MEMS in SoC r Embedded Systems Copyright 2000, Naresh R. Shanbhag Sensor(MEMS) ->DSP(Circuits, Architectures, OS, Com-piler, Networks -> Actuators (MEMS). mobile/wireless automotive systems(navigation, safety andentertainmentsystems) medical sys-tems(hearing aids) etc. MEMS in SoC Commercial MEMS Products Texas Instruments Digital Micromirror Display RF MEMS Applications Cell Phone Components Coupled Resonator System Two Coupled Vertically Driven Resonator MEMS-Enabled Miniature Wireless Transceiver What if you needed,or wanted,adjustable bandwidth or centerfrequency on the input filters? ->Use multiple filters &switches ->Semiconductor/active filters ->Varactor-tuned filters Some RF mems Reconfigurable Antennas Analog IC Design Flow MEMS IC Design Flow The Top Down Design Process for MEMS System architect MEMS, packaging, analog and digital designers IP Custom Level Design New MEMS in New Process Goal: A New MEMS component Semi-Custom Design Existing MEMS in New Process Goal: A Better MEMS component Standard/IP Re-Use Existing MEMS and MEMS Process Making Existing MEMS Available to IC level Designers to Build new systems IP approach Appropriateness Does the offered MEMS design IP supply exactly what is needed? Portability How does one move MEMS design IP from development fab to manufacturing fab Yield How will an IP based MEMS design yield in actual manufacturing and how predictable is this? Reliability How can one predict the reliability of a MEMS IP design under application specific stresses and challenges. Issues with an IP approach Coupling Effects 3D Device Modeling Available in MEMS today *Structural Mechanics (including contact) *Electrostatics & Capacitance Extraction *Thermo-mechanics *Coupled Electro-Thermo-Mechanics (including contact) *Thermal Flow Analysis *Piezoresistive Devices *Electro-Thermal Devices *CFD for Compressible and Incompressible Flow *Electrokinetics and Chemical Transport in Liquids *Damping of complex structures Electrokinetic Switching for Chemical Transport Coventorware from Coventor www. memcad. com IntelliSuite from Intellisense Inc. www. intellisense. com MEMS ProCAETool from Tanner Inc. www. tanner. com MEMScap from MEMScap Inc. www. memscap. com SOLIDIS from ISE Inc. www. ise. com Commercially Available Software Layout and process Topography simulation Boundaries, IC process results and Material properties Mesh generation Device simulation System- Level Simulation Outline of the Task Sequence *MEMS will play important role in SoC *MEMS/MST tools exist today. *The Tools can support the design of RF devices and systems. *The Design Process needs to support the integration of MEMS and ASIC subsystems. *ALL players in the design process (Architect, Analog, Digital, MEMS, Package) must communicate. Summary Referenece *Microcosm Technologies*University of Texas at Arlington Course EE 5349/4328*UC Irvine*berkeley EE143 Microfabrication Technology Fall 2002 Lecture Noteswww- inst. eecs. berkeley. edu/~ ee143/