Measuring Leakage Current on Singles and Ladders P. Riedler and S. Ceresa, August 2005 Sensor Chip...
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Measuring Leakage Current on Singles and Ladders P. Riedler and S. Ceresa, August 2005 Sensor Chip Manipulator Needle for sensor back side contact Probe-card with contact needles for chip • Apply +50V on sensor back side via needle • Ground sensor front side via chip contacts (-> probe-card)
Measuring Leakage Current on Singles and Ladders P. Riedler and S. Ceresa, August 2005 Sensor Chip Manipulator Needle for sensor back side contact Probe-card
Measuring Leakage Current on Singles and Ladders P. Riedler and
S. Ceresa, August 2005 Sensor Chip Manipulator Needle for sensor
back side contact Probe-card with contact needles for chip Apply
+50V on sensor back side via needle Ground sensor front side via
chip contacts (-> probe-card)
Slide 2
Probe-card Manipulator arm with needle Sensor back side
Probe-card needles
Slide 3
Check-list: The probe-card is installed correctly. Cables J1
and J2 are connected to the probe-card and on the other side to the
MB card. The connectors on the cables are labeled as well as the
connectors on the probe-card. On the MB side the connector names
are on the large PCB: J1=J1, J10=J2. The 5 cables from the MB card
should be connected to the Gossen power supply. The manipulator
coax cable should be connected to the filter (lemo connectors with
capacitors and resistor). The filter should be connected on one
side to the Keithley (inner conductor=> +, outer conductor =>
-) and on the other side to the lemo cable soldered to the
probe-card.
Slide 4
MB card Cables J1+J2 Probe-card The probe-card is connected via
cables J1+J2 to the MB card. The MB card is connected to the Gossen
power supply:
Slide 5
Contacting the chip After the first contact the chuck needs to
be moved up by ~ 80-100 microns to ensure a good electrical
contact: 1st contact: Needles barely touch the pads Good el.
contact (1st contact + 80 microns): Needle marks are clearly
visible
Slide 6
Chuck settings: SET ALIGN to -500 microns (important to avoid
damage to the probe card!). SET SEPARATION to -1000 microns. Once
the contact point is found the CONTACT should be SET. The same
contact setting can be used for all chips unless the prober is
switched off in between.
Slide 7
Gossen Power Supply (Chip): -5V ~ 100mA +5V ~ 600mA +5V ~ 1A
The cables should be connected correctly and the three outputs
should be adjusted to 5V (checked April 05). The expected current
consumption of the 3 outputs is indicated above. Gossen power
supply with cables to the MB card MB card Cables After contacting
the chip with the probe-card needles the power supply can be
switched on:
Slide 8
Sequence - SWITCH ON: Position single/ladder on vacuum chuck.
Contact the pads of the chip with the probe-card needles (see
previous slides). Contact the back side of the sensor with the
manipulator needle. Switch on the Gossen 3x5V power supply.
Slide 9
Switch on the PC and VME crate Start ALICE PTS Labview program
located on the desktop. Select Initialize and Initialize VME from
the menu of the ALICE PTS window. This will start the VXI resource
manager. Once it finished, click OK. Go back to the ALICE PTS
window and click Initialize JTAG and Initialize MB. A red LED on
the MB card will come on. Switch on the Keithley 2410. Increase the
bias voltage (Keithley) up to 50V and measure the leakage current
(Keithley). Sequence - SWITCH ON continued:
Slide 10
Sequence - SWITCH OFF: Warning: do not disconnect the needles
with the power supplies switched on! 1.Decrease the bias voltage
(Keithley) to 0V. 2.Switch off the Keithley 2410 power supply.
3.Switch off MB card using black switch on the PCB. 4.Switch off
the Gossen 3x5V power supply. 5.De-contact the manipulator needle.
6.De-contact the chip by moving into ALIGN position.