36
30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 128 Side-Mount Fine Pitch Positioner, Aluminum Body, Cross-Roller Bearings 130 Center-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 132 40mm Table Brass Body, Dove-Tail Slide 106 Brass Body, Cross-Roller Bearing 108 50mm Table Brass Body, Dove-Tail Slide 110 Brass Body, Cross-Roller Bearing 112 Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 122 Side-Mount Fine Pitch Positioner, Aluminum Body, Cross-Roller Bearings 124 Center-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 126 Side-Swivel, Brass Body, Dove-Tail Slide 134 160mm Table Aluminum Body, Cross-Roller Bearing 120 100mm Table Aluminum Body, Cross-Roller Bearing 116 130mm Table Aluminum Body, Cross-Roller Bearing 118

Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

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Page 1: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

30~160mm Table

Manual Swivel Stages (Goniometers)

30mm Table

Brass Body, Dove-Tail Slide 104

70mm Table

Aluminum Body, Cross-Roller Bearing 114Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 128Side-Mount Fine Pitch Positioner, Aluminum Body, Cross-Roller Bearings 130Center-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 132

40mm Table

Brass Body, Dove-Tail Slide 106Brass Body, Cross-Roller Bearing 108

50mm Table

Brass Body, Dove-Tail Slide 110Brass Body, Cross-Roller Bearing 112Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 122Side-Mount Fine Pitch Positioner, Aluminum Body, Cross-Roller Bearings 124Center-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 126Side-Swivel, Brass Body, Dove-Tail Slide 134

160mm Table

Aluminum Body, Cross-Roller Bearing 120

100mm Table

Aluminum Body, Cross-Roller Bearing 116

130mm Table

Aluminum Body, Cross-Roller Bearing 118

Page 2: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

100

Manual Sw

ivel Stages (Goniometers)

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH07A-RT

SH07A-RT-R

Speci f icat ions Description

70mm

Cross-Roller Bearing

±10°

70mm±0.2mm

φ0.05mm / ±10°

0.1° (vernier)

1.53°/ revolution

5kg

0.9 arcsec / kgf-cm

Aluminum Alloy

Clear-Matte Anodizing

570g

90°±1'

Handle-Wheel

1. Kohzu's significant alpha-numeric model numbers offer quick product insight.

2. Mirror symmetry of standard stage.

3. Table size refers to the stage's upper-most mounting surface.

4. Type of movement mechanism used on this stage.

5. Stage travel range in the positive and negative directions from it's centered or neutral position.

6. Distance from table surface to rotation center.

7. Deviation of rotation center while stage is rotating.

8. Minimum readout of Table is the smallest measurable actuator motion increment at stage table.

9. Angle of gradient per handle-wheel revolution.

10. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate.

11. Moment load stiffness is measured in a direction perpendicular to the motion axis. See page 298 for details.

12. Material specification is for stage's main body components only.

13. Surface finish type and color.

14. Stage weight includes all components depicted in product photograph.

15. Perpendicularity between motion axes in a dual-axis XY stage assembly.

16. Actuator model number and travel range.

Understanding Swivel Stage (Goniometers) Specifications

SH07A-RT

● Cross Roller BearingIn cross-roller bearing guides,,, quench hardened and precision ground bearing surfaces move upon loose hardened steel cylinders (rollers) with rotation axes oriented in alternating 90 degree angles (Ref. Fig.1). Having rollers arranged in an alternating cross pattern allows preloading and operation at any angle. The roller bearings are held apart from one another by a bearing cage, which prevents adjacent rollers from touching. Since cross-roller bearing have little difference between static and dynamic friction they minimize start-to-stop slip-motion typical of other bearing types. The line contact of roller bearings along with precise roller-to-race gap management provide larger load bearing surfaces, higher preloads and meet very tight runout and stiffness specifications.

Dove-Tail Slide is guide mechanism which is build from contiguous two face (Ref. Fig.2). In other words, that of guide mechanism is built from fixed part and movement part only. That is efficient of dust reduction from the parts slit. In addition, this type of stage have high load capacity and mechanical chock, because supportable touch field is large. On the other hands, easy to occur the stick slip on contiguous part, because difference between coefficient static and kinetic friction is big.

Guide Mechanism Type

Fig. 1

● Dove-Tail Slide

Fig. 2

Precision Positioning Stages

Page 3: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

101CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

worm wheel

worm shaft

A worm shaft and worm wheel are used for deceleration and driving (see Fig. 3). For the worm wheel of the swivel stage, a portion is cut off and the gear is mounted on the upper stage. Since the worm gear is assembled on the worm shaft and lapping is performed precisely for each movement while the torque gauge is used for checking, almost no backlash or lost motion occurs.

● Worm Shaft and Worm Wheel

Fig. 3

Feeding Mechanism

See Common Features of Kohzu Manual Stages section on page 18.

Actuator Type

For the SH series (except model SH07B-DH), the tilt angle is adjusted by rotating the handle that is directly connected to the worm shaft. The relationship between the tilt angle and the rotation of the handle-wheel is shown below.

ΔΘ = Δθ / n  ΔΘ: Tilt angle of stage        n : Reduction ratio of worm wheel       Δθ : Rotation angle of handle

For the ST series and model SH07B-DH, the stage top face and the horizontal plane can be tilted by pressing the bar mounted on the stage with the micrometer. Although the feed angle varies with the distances from the fulcrum of the lever to the power point and to the action point, and by the shape of sphere of the tip, the following relationship is seen near the center:

ΔΘ = tan-1(Δt / R)   ΔΘ: Tilt angle of stage            R : Distance from rotation center to power point (mm)

      Δ t : Distance from neutral position of micrometer

 

Angular Motion

Standard & Reverse Stage Assembly Configurations

Model Number

ーNNN (no mark)

ーNNR

ーNRN

ーNRR

ーRNN

ーRNR

ーRRN

ーRRR

Lower Axis Stage

Standard (Right Hand)

Standard (Right Hand)

Standard (Right Hand)

Standard (Right Hand)

Mirror Symmetry (Left Hand)

Mirror Symmetry (Left Hand)

Mirror Symmetry (Left Hand)

Mirror Symmetry (Left Hand)

Upper Axis Stage

Standard (Right Hand)

Standard (Right Hand)

Mirror Symmetry (Left Hand)

Mirror Symmetry (Left Hand)

Standard (Right Hand)

Standard (Right Hand)

Mirror Symmetry (Left Hand)

Mirror Symmetry (Left Hand)

Assembly Configuration

Standard Assembly

Reversed Assembly

Standard Assembly

Reversed Assembly

Standard Assembly

Reversed Assembly

Standard Assembly

Reversed Assembly

Prec

isio

n Po

sitio

ning

Sta

ges

Assembling multiple stages can be customized to meet specific application requirements at no additional cost.

nΔθ

( )RΔt

Page 4: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

102

Manual Sw

ivel Stages (Goniometers)

Understanding Swivel Stage (Goniometers) Specifications

- NNR-NNN

-RRR-RRN

-RNR-RNN

-NRR-NRN

(SH series)

Precision Positioning Stages

Page 5: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

103CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

- NNR-NNN

-RRR-RRN

-RNR-RNN-NRR

-NRN

-NNR

-NNN

-RRR

-RRN-RNR-RNN

-NRR-NRN

(ST series)

Prec

isio

n Po

sitio

ning

Sta

ges

Page 6: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

104

Manual Sw

ivel Stages (Goniometers)

Manual Swivel Stages (Goniometers) / 30mm Table

SH03B-DT SH03B-DM

SH03B-DS

● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium matte plating.● Two (2) types of work distances are available.● Manual Swivel stages are actuated by separate handle.● Combination of model SH03B-DT and SH03B-DM form 2-axis swivel stage model SH03B-DS.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH03B-DT

SH03B-DT-R

102g

-

Handle-Wheel

204g

0.1° (vernier)

±10°

30mm

Dove-Tail Slide

44mm±0.1mm

φ0.1mm / ±10° φ0.2mm / ±10°

30mm±0.2mm30mm±0.1mm

2.06° / Handle Revolution

SH03B-DM

SH03B-DM-R

1.5° / Handle Revolution 2.06° / Handle Revolution (top), 1.5°/Handle Revolution (bottom)

1kg

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

Lubricant Type

Sample Model Number

Modification Cost

SH03B-DT-C

SH03B-DT-R-C

Call Call

Clean Room1

SH03B-DT-V

SH03B-DT-R-V

Vacuum2

12 arcsec / kgf-cm, Roll Direction 24 arcsec / kgf-cm

Brass

Chromium Matte Plating

SH03B-DS

SH03B-DS-RRR

±10° (both axes)

≦ 90°±1'

Optional Lubricant Exchange

Specifications

Precision Positioning Stages

1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Page 7: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

105CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Brass Body, Dove-Tail Slide

SH03B-DT SH03B-DM

SH03B-DS

Prec

isio

n Po

sitio

ning

Sta

ges

(9)

30

Handle φ8

0.5

20 13

13

20

30 7

Φ3 Depth 2.5mm

4-M2 Depth 3mm

4-M3 Depth 3mm

(9)

30

6.1

14

Clamp φ6

13

6.5

010

10

6.1 6

Rotation Center

134-for M2 screws

6.5

1314

30

010 10

6.1

6

14

Clamp φ6

13

4-for M2 screws

Rotation Center44

13

13 6.5

010 10

30

(9)

30

Handle φ8

0.5

20 13

13

20

30 7

Φ3 Depth 2.5mm

4-M2 Depth 3mm

4-M3 Depth 3mm

6.1

6

14

Clamp φ6

13

4-for M2 screws

Rotation Center

3014

13

6.5

010 10

30

(9)

30

Handle φ8

0.5

20 13

13

20

Φ3 Depth 2.5mm

30 7

4-M2 Depth 3mm

4-M3 Depth 3mm

Page 8: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

106

Manual Sw

ivel Stages (Goniometers)

Manual Swivel Stages (Goniometers) / 40mm Table

SH04B-DT SH04B-DM

SH04B-DS

● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium matte plating.● Two (2) types of work distances are available.● Combination of model SH04B-DT and SH04B-DM form 2-axis swivel stage model SH04B-DS.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH04B-DT

SH04B-DT-R

210g 190g

-

Handle-Wheel

400g

0.1° (vernier)

±10°

40mm

Dove-Tail Slide

57mm±0.1mm 40mm±0.2mm40mm±0.1mm

1.91° / Handle Revolution

SH04B-DM

SH04B-DM-R

1.45° / Handle Revolution 1.91° / Handle Revolution (top), 1.45°/ Handle Revolution (bottom)

1.5kg

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH04B-DT-C

SH04B-DT-R-C

Call Call

Clean Room1

SH04B-DT-V

SH04B-DT-R-V

Vacuum2

10 arcsec / kgf-cm, Roll Direction 18 arcsec / kgf-cm

Brass

Chromium Matte Plating

SH04B-DS

SH04B-DS-RRR

±10° (both axes)

≦ 90°±1'

φ0.1mm / ±10° φ0.2mm / ±10°

Specifications

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Page 9: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

107CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Brass Body, Dove-Tail Slide

SH04B-DT SH04B-DM

SH04B-DS

Prec

isio

n Po

sitio

ning

Sta

ges

(13)

20

3040(10)

(10)

400.5

30 20

Φ4 Depth 4mm

4-M3 Depth 4mm

4-M3 Depth 4mm

Handle φ12

Rotation Center

4017

2

7

010 10

7

4-for M3 screws

30

Clamp φ8

30

15

010

10

7.5

7.5

20

30

40 (13)

(10)

400.5

30 20

Φ4 Depth 4mm

4-M3 Depth 4mm

4-M3 Depth 4mm

Handle φ12

Rotation Center

4017

2

7

010 10

7.5

4-for M3 screws

30

Clamp φ8

30

20

3040 (13)

(10)

400.5

30 20

Φ4 Depth 3mm

4-M3 Depth 3mm

4-M3 Depth 2.5mm

Handle φ12

Rotation Center

5715

2

7

010 10

7.5

30

Clamp φ8

304-for M3 screws

Page 10: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

108

Manual Sw

ivel Stages (Goniometers)

Manual Swivel Stages (Goniometers) / 40mm Table

SH04B-RT SH04B-RM

SH04B-RS● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Brass and finished with a chromium matte plating.● Two (2) types of work distances are available.● Combination of model SH04B-RT and SH04B-RM form 2-axis swivel stage model SH04B-RS.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Actuator

SH04B-RT

SH04B-RT-R

250g

Handle-Wheel

500g

0.1° (vernier)

±10°

40mm

Cross-Roller Bearing

57mm±0.2mm 40mm±0.4mm40mm±0.2mm

1.34° / Handle Revolution

SH04B-RM

SH04B-RM-R

0.99° / Handle Revolution 1.34° / Handle Revolution (top), 0.99° / Handle Revolution (bottom)

2kg

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH04B-RT-C

SH04B-RT-R-C

Call Call

SH04B-RT-V

SH04B-RT-R-V

4 arcsec / kgf-cm, Roll Direction 12 arcsec / kgf-cm, Roll Direction

Brass

Chromium Matte Plating

SH04B-RS

SH04B-RS-RRR

±10° (both axes)

φ0.05mm / ±10° φ0.1mm / ±10°

Specifications

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 11: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

109CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Brass Body, Cross-Roller Bearing

SH04B-RT SH04B-RM

SH04B-RS

Prec

isio

n Po

sitio

ning

Sta

ges

20

30

40 (20)

(9.5)

400.5

30 20

Φ4 Depth 4mm

4-M3 Depth 4mm

4-M3 Depth 3mm

Handle φ12

(10.5)

Clamp φ8

Rotation Center

4017

7

010 10

30

3

30

Clamp φ8

4-for M3 screws

20

30

40 (20)

(9.5)

400.5

30 20

Φ4 Depth 4mm

4-M3 Depth 4mm

4-M3 Depth 3mm

(10.5)

Clamp φ8

Rotation Center57

17

7

010 10

30

3

30

Clamp φ8

4-for M3 screws

Handle φ12

20

30

40 (20)

(20)

40(10)

30 20

Φ4 Depth 4mm

4-M3 Depth 4mm

4-M3 Depth 3mm

Handle φ12

(10.5)

010 10

0.5

Rotation Center

4017

7

17

7.5

30 4-for M3 screws

3

010

10

30

Clamp φ8

77.5

(9.5)

Page 12: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

110

SH05B-DT SH05B-DM SH05B-DB

SH05B-DS SH05B-DL● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium matte plating.● Three (3) types of work distances are available.● Combination of model SH05B-DT and SH05B-DM form 2-axis swivel stage model SH05B-DS.● Combination of model SH05B-DM and SH05B-DB form 2-axis swivel stage model SH05B-DL.

Manual Swivel Stages (Goniometers) / 50mm Table

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH05B-DT

SH05B-DT-R

Handle-Wheel

0.97° / Handle Revolution

3kg

50mm

Dove-Tail Slide

86mm±0.1mm

φ0.1mm / ±8°

±8°

0.1° (vernier)

Brass

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH05B-DT-C

SH05B-DT-R-C

Call Call

SH05B-DT-V

SH05B-DT-R-V

SH05B-DM

SH05B-DM-R

SH05B-DB

SH05B-DB-R

SH05B-DS

SH05B-DS-RRR

SH05B-DL

SH05B-DL-RRR

Chromium Matte Plating

1.2° / Handle Revolution

±10°

68mm±0.1mm

5 arcsec / kgf-cm, Roll Direction

400g

-

1.55° / Handle Revolution

50mm±0.1mm

1.55°/ Handle Revolution (top)1.2° / Handle Revolution (bottom)

φ0.1mm / ±10°

50mm±0.2mm

φ0.2mm / ±10°

10 arcsec / kgf-cm

2.5kg

800g

≦ 90°±1'

1.2° / Handle Revolution (top)0.97° / Handle Revolution (bottom)

68mm±0.2mm

±10° (both axes) ±10° (top), ±8° (bottom)

φ0.2mm / ±8°

Specifications

Precision Positioning StagesM

anual Swivel Stages (Goniom

eters)

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 13: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

111CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Brass Body, Dove-Tail Slide

SH05B-DT

SH05B-DM

SH05B-DB

SH05B-DS

SH05B-DL

Prec

isio

n Po

sitio

ning

Sta

ges

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

50

3040

(15)

(10)

500.5

40 30

Φ4 Depth 5mm4-M3 Depth 3mm4-M3 Depth 3mm

Handle φ13

3

6.5

4-for M3 screws

40

Clamp φ8

Rotation Center

5018

7

010 10

40

Rotation Center

5018

7

18

3

40

7.5

50

3040

(15)

(15)

500.5

40 30

Φ4 Depth 5mm

4-M3 Depth 3mm

Handle φ13

(10)

6.5

4-for M3 screws

40

Clamp φ8

(10)

8

010 10

010

10

Rotation Center

6818

8010 10

40

Rotation Center

8618

8

010 10

40

Rotation Center

6818

8

18

3

40

7.5

4-for M3 screws

010 10

4-M3 Depth 3mm

Page 14: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

112

Manual Sw

ivel Stages (Goniometers)

SH05B-RT SH05B-RM SH05B-RB

SH05B-RS SH05B-RL● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Brass and finished with a chromium matte plating.● Three (3) types of work distances are available.● Combination of model SH05B-RT and SH05B-RM form 2-axis swivel stage model SH05B-RS.● Combination of model SH05B-RM and SH05B-RB form 2-axis swivel stage model SH05B-RL.

Manual Swivel Stages (Goniometers) / 50mm Table

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH05B-RT

SH05B-RT-R

Handle-Wheel

0.97° / Handle Revolution

50mm

Cross-Roller Bearing

86mm±0.2mm

0.1° (vernier)

Brass

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH05B-RT-C

SH05B-RT-R-C

Call Call

SH05B-RT-V

SH05B-RT-R-V

SH05B-RM

SH05B-RM-R

SH05B-RB

SH05B-RB-R

SH05B-RS

SH05B-RS-RRR

SH05B-RL

SH05B-RL-RRR

Chromium Matte Plating

1.2° / Handle Revolution

±10°

68mm±0.2mm

3 arcsec / kgf-cm, Roll Direction

360g

-

1.55° / Handle Revolution

50mm±0.2mm

1.55° / Handle Revolution (top)1.2° / Handle Revolution (bottom)

φ0.05mm / ±10°

50mm±0.4mm

9 arcsec / kgf-cm

720g

≦ 90°±1'

1.2° / Handle Revolution (top)0.97° / Handle Revolution (bottom)

68mm±0.4mm

φ0.05mm / ±8°

±8°

φ0.1mm / ±10° φ0.1mm / ±8°

±10° (both axes) ±10° (top), ±8° (bottom)

3kg 2.5kg

Specifications

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 15: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

113CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Brass Body, Cross-Roller Bearing

SH05B-RT

SH05B-RM

SH05B-RB

SH05B-RS

SH05B-RL

Prec

isio

n Po

sitio

ning

Sta

ges

50

3040

(21.5)

(12.5)

500.5

40 30

Φ4 Depth 5mm4-M3 Depth 4mm4-M3 Depth 3.5mm

Handle φ13

10.5

3 4-for M3 screws

40

Clamp φ15

Rotation Center

5018 010 10

40

Rotation Center

6818

40

010 10

Rotation Center

8618

40

010 10

Rotation Center

5018 010 10

40

50

3040

(21.5)

(21.5)

50

0.5

40 30

Φ4 Depth 5mm4-M3 Depth 4mm4-M3 Depth 3.5mm

Handle φ13

(12.5)

10

3

4-for M3 screws

40

Clamp φ15

010

10

(12.5)

18

Rotation Center

6818 010 10

40

3

18

Page 16: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

114

Manual Sw

ivel Stages (Goniometers)

SH07A-RT SH07A-RM SH07A-RB

SH07A-RS SH07A-RL● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model SH07A-RT and SH07A-RM form 2-axis swivel stage model SH07A-RS.● Combination of model SH07A-RM and SH07A-RB form 2-axis swivel stage model SH07A-RL.

Manual Swivel Stages (Goniometers) / 70mm Table

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH07A-RT

SH07A-RT-R

Handle-Wheel

0.96° / Handle Revolution

70mm

Cross-Roller Bearing

122mm±0.2mm

0.1° (vernier)

Aluminum Alloy

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH07A-RT-C

SH07A-RT-R-C

Call Call

SH07A-RT-V

SH07A-RT-R-V

SH07A-RM

SH07A-RM-R

SH07A-RB

SH07A-RB-R

SH07A-RS

SH07A-RS-RRR

SH07A-RL

SH07A-RL-RRR

Clear-Matte Anodizing

1.2° / Handle Revolution

±10°

96mm±0.2mm

0.9 arcsec / kgf-cm, Roll Direction

570g

-

1.53° / Handle Revolution

70mm±0.2mm

1.53° / Handle Revolution (top)1.2° / Handle Revolution (bottom)

φ0.05mm / ±10°

70mm±0.4mm

2.7 arcsec / kgf-cm

1.14kg

≦ 90°±1'

1.2° / Handle Revolution (top)0.96° / Handle Revolution (bottom)

96mm±0.4mm

φ0.05mm / ±8°

±8°

φ0.1mm / ±10° φ0.1mm / ±8°

±10° (both axes) ±10° (top), ±8° (bottom)

5kg 4.5kg

Specifications

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 17: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

115CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Aluminum Body, Cross-Roller Bearing

SH07A-RT

SH07A-RM

SH07A-RB

SH07A-RS

SH07A-RL

Prec

isio

n Po

sitio

ning

Sta

ges

4

1

7026

70

3040

27

(12.5)

700.5

40 30

Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ20

16

60

60

60

4-M4 Depth 5mm

9

60

4-for M4 screws

Clampφ15

Rotation Center

010 10

10 10

2.5

9626

60

12.5

4-for M4 screws

Rotation Center

010 10

10 10

1.85

122

26

60

11.85

4-for M4 screws

Rotation Center

010 10

4

60

26

12.5

010 10

10 10

26

14

96

70

3040

(27)

(27)

7015.5

40 30

Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ20

16

60

60

4-M4 Depth 5mm

0.5

4

60

Clamp φ15

7026

9

Rotation CenterRotation Center

010 10

10 10

26

14

60

(12.5)

11 12.5

010

10

1010

Handle φ20

4-for M4 screws

4-for M4 screws

4

1

7026

70

3040

27

(12.5)

700.5

40 30

Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ20

16

60

60

60

4-M4 Depth 5mm

9

60

4-for M4 screws

Clampφ15

Rotation Center

010 10

10 10

2.5

9626

60

12.5

4-for M4 screws

Rotation Center

010 10

10 10

1.85

122

26

60

11.85

4-for M4 screws

Rotation Center

010 10

4

60

26

12.5

010 10

10 10

26

14

96

70

3040

(27)

(27)

7015.5

40 30

Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ20

16

60

60

4-M4 Depth 5mm

0.5

4

60

Clamp φ15

7026

9

Rotation CenterRotation Center

010 10

10 10

26

14

60

(12.5)

11 12.5

010

10

1010

Handle φ20

4-for M4 screws

4-for M4 screws

Page 18: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

116

Manual Sw

ivel Stages (Goniometers)

SH10A-RT SH10A-RM SH10A-RB

SH10A-RS SH10A-RL● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model SH10A-RT and SH10A-RM form 2-axis swivel stage model SH10A-RS.● Combination of model SH10A-RM and SH10A-RB form 2-axis swivel stage model SH10A-RL.

Manual Swivel Stages (Goniometers) / 100mm Table

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH10A-RT

SH10A-RT-R

0.67° / Handle Revolution

100mm

Cross-Roller Bearing

172mm±0.2mm

0.1° (vernier)

Aluminum Alloy

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH10A-RT-C

SH10A-RT-R-C

SH10A-RT-V

SH10A-RT-R-V

SH10A-RM

SH10A-RM-R

SH10A-RB

SH10A-RB-R

SH10A-RS

SH10A-RS-RRR

SH10A-RL

SH10A-RL-RRR

Clear-Matte Anodizing

0.84° / Handle Revolution

±10°

134mm±0.2mm

0.4 arcsec / kgf-cm, Roll Direction

1.7kg

-

1.125° / Handle Revolution

95mm±0.2mm

φ0.05mm / ±10°

95mm±0.4mm

1.2 arcsec / kgf-cm

3.4kg

≦ 90°±1'

134mm±0.4mm

±8°

φ0.05mm / ±8° φ0.1mm / ±10° φ0.1mm / ±8°

±10° (both axes) ±10° (top), ±8° (bottom)

7kg 5kg

Specifications

1.125° / Handle Revolution (top)0.84° / Handle Revolution (bottom)

0.84° / Handle Revolution (top)0.67° / Handle Revolution (bottom)

Handle-Wheel

Call Call

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 19: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

117CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Aluminum Body, Cross-Roller Bearing

SH10A-RT

SH10A-RM

SH10A-RB

SH10A-RS

SH10A-RL

Prec

isio

n Po

sitio

ning

Sta

ges

0

20 20

10 10

10 10

6

9539

100

3040

(34)

(12.5)

100

0.5

40 30

Φ6 Depth 8mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ20

19.5

90 60

90

90

60

4-M4 Depth 6mm

14.5

90

Clamp φ15

Rotation Center

4-M4 Depth 6mm

4-for M4 screws

15

010 10

10 10

134

38

90

14.7

Rotation Center

4-for M4 screws

010 10

10 10

172

38

90

14.7

Rotation Center

4-for M4 screws

100

3040

(34)

(34)

100

19

40 30

Φ6 Depth 8mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ20

19.5

90 60

9060

4-M4 Depth 6mm4-M4 Depth 6mm

0.5

6

Clamp φ15

15 14.7

(12.5)

3817.5

Rotation Center

9539

14.5

90

904-for M4 screws

0

20 20

10 10

10 10

010

10

1010

6

3817.5

Rotation Center

3814.7

904-for M4 screws

134

010 10

10 10

Page 20: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

118

Manual Sw

ivel Stages (Goniometers)

Manual Swivel Stages (Goniometers) / 130mm Table

SH13A-RT SH13A-RM

SH13A-RS● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model SH13A-RT and SH13A-RM form 2-axis swivel stage model SH13A-RS.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH13A-RT

SH13A-RT-R

3.6kg 4kg

-

Handle-Wheel

7.6kg

0.1° (vernier)

±10°

φ0.05mm / ±10°

130mm

Cross-Roller Bearing

173mm±0.5mm 120mm±1mm120mm±0.5mm

φ0.1mm / ±10°

1.25° / Handle Revolution

SH13A-RM

SH13A-RM-R

0.9° / Handle Revolution 1.25° / Handle Revolution (top), 0.9° / Handle Revolution (bottom)

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH13A-RT-C

SH13A-RT-R-C

SH13A-RT-V

SH13A-RT-R-V

0.2 arcsec / kgf-cm, Roll Direction 0.6 arcsec / kgf-cm

Aluminum Alloy

Clear-Matte Anodizing

SH13A-RS

SH13A-RS-RRR

±10° (both axes)

≦ 90°±1'

10kg 6kg

Specifications

Call Call

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 21: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

119CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Aluminum Body, Cross-Roller Bearing

SH13A-RT/RM

SH13A-RT

SH13A-RS

SH13A-RM

SH13A-RT SH13A-RM

Prec

isio

n Po

sitio

ning

Sta

ges

110130

3040

(43)

(19)

130

2

40 30

Φ8 Depth 10mm4-M3 Depth 8mm4-M3 Depth 8mm

Handle φ40

23

11090 60

9060

4-M4 Depth 10mm4-M4 Depth 10mm4-M5 Depth 10mm

6

110

Clamp φ25 18

0

20 2010 10

10 10

120

53

110

19

Rotation Center

4-for M5 screws

6

110

Clamp φ25 20

010 10

10 10

173

58

110

21

Rotation Center

4-for M5 screws

110130

3040

(43)

(43)

130

21

40 30

Handle φ40

23

11090 60

9060

Φ8 Depth 10mm4-M3 Depth 8mm4-M3 Depth 8mm4-M4 Depth 10mm4-M4 Depth 10mm4-M5 Depth 10mm

2

010

10

1010

58

110

20

Rotation Center

4-for M5 screws

120

5319

0

20 2010 10

10 10

6

110

Clamp φ25

2118

Page 22: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

120

Manual Sw

ivel Stages (Goniometers)

Manual Swivel Stages (Goniometers) / 160mm Table

SH16A-RT SH16A-RM

SH16A-RS● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model SH16A-RT and SH16A-RM form 2-axis swivel stage model SH16A-RS.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

SH16A-RT

SH16A-RT-R

SH16A-RM

SH16A-RM-R

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH16A-RS

SH16A-RS-RRR

Specifications

Precision Positioning Stages

5.2kg 4.5kg

-

Handle-Wheel

9.7kg

0.1° (vernier)

±10°

φ0.5mm / ±10°

160mm

Cross-Roller Bearing

280mm±0.5mm 220mm±1mm220mm±0.5mm

φ0.1mm / ±10°

0.705° / Handle Revolution 0.6° / Handle Revolution 0.705° / Handle Revolution (top), 0.6° / Handle Revolution (bottom)

0.2 arcsec / kgf-cm, Roll Direction 0.6 arcsec / kgf-cm

Aluminum Alloy

Clear-Matte Anodizing

±10° (both axes)

≦ 90°±1'

20kg 15kg

SH16A-RT-C

SH16A-RT-R-C

SH16A-RT-V

SH16A-RT-R-V

Call Call

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 23: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

121CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Aluminum Body, Cross-Roller Bearing

SH16A-RT

SH16A-RT

SH16A-RM

SH16A-RS

SH16A-RM

Prec

isio

n Po

sitio

ning

Sta

ges

140110

160

3040

(35)

(19)

160

2

40 30Φ8 Depth 8mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ40

32

140

11090 60

9060

4-M4 Depth 8mm4-M4 Depth 8mm4-M5 Depth 8mm4-M5 Depth 10mm

6

140

Clamp φ25 21

010 10

10 10

220

60

140

16.5

Rotation Center

4-for M5 screws 3.5

6

140

Clamp φ25 23

0

10 10

10 10

280

50

140

21.4

Rotation Center

4-for M5 screws

010 10

10 10

140110

160

3040

(35)

(35)

160

30

40 30

Φ8 Depth 15mm4-M3 Depth 6mm4-M3 Depth 6mm

Handle φ40

32

140

11090 60

9060

4-M4 Depth 10mm4-M4 Depth 10mm4-M5 Depth 12mm4-M5 Depth 15mm

2

6

140

0

1010

1010

Clamp φ25

21 21.4

Rotation Center

1404-for M5 screws

220

6050

2316.5

Page 24: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

122

Manual Sw

ivel Stages (Goniometers)

ST05A-S1T ST05A-S1M ST05A-S1B

ST05A-S1S ST05A-S1L● Micrometer actuator type.● Side-Mount actuators are ideal for limited space applications.● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST05A-S1T and ST05A-S1M form 2-axis swivel stage model ST05A-S1S.● Combination of model ST05A-S1M and ST05A-S1B form 2-axis swivel stage model ST05A-S1L.

Manual Swivel Stages (Goniometers) / 50mm Table

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

ST05A-S1T

ST05A-S1T-R

ST05A-S1M

ST05A-S1M-R

ST05A-S1B

ST05A-S1B-R

ST05A-S1L

ST05A-S1L-RRR

ST05A-S1S

ST05A-S1S-RRR

50mm

Cross-Roller Bearing

±3° ±3° (both axes)

0.006° / scale0.0074° / scale

3 arcsec / kgf-cm, Roll Direction

210g

-

0.0097° / scale0.0097° / scale (top)

0.0074° / scale (bottom)0.0074° / scale (top)

0.006° / scale (bottom)

86mm±0.2mm

-

3kg

Aluminum Alloy

Clear-Matte Anodizing

68mm±0.2mm

φ0.05mm / ±3°

50mm±0.2mm 50mm±0.4mm

φ0.1mm / ±3°

9 arcsec / kgf-cm

420g

≦ 90°±1'

68mm±0.4mm

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

Specifications

Micrometer

(13mm)

Precision Positioning Stages

Call Call

ST05A-S1T-V

ST05A-S1T-R-V

ST05A-S1T-C

ST05A-S1T-R-C

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 25: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

123CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

3

18.5

(56)

10

40

1850

9.25

40

50

3040

(12)

5011.5

40 30

Φ4 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm

Micrometer Head

(0.5)(0.5)

Clamp φ15

Rotation Center

4-for M3 screws

40

1868

9.25

Rotation Center

4-for M3 screws

40

1886

9.25

Rotation Center

4-for M3 screws

9.25

(56)

(56)

50

3040

18.5

50(12)

40 30

Φ4 Depth 5mm

4-M3 Depth 5mm4-M3 Depth 5mm

Micrometer Head

18.5(12)

10

40

1818

50

3

40

Clamp φ15

Rotation Center

4-for M3 screws

10

9.25

40

1818

68

3

Rotation Center

4-for M3 screws

10

9.25

Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing

ST05A-S1T

ST05A-S1M

ST05A-S1S

ST05A-S1L

ST05A-S1B

Prec

isio

n Po

sitio

ning

Sta

ges

Page 26: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

124

Manual Sw

ivel Stages (Goniometers)

Call Call

Manual Swivel Stages (Goniometers) / 50mm Table

ST05A-S3T-CL ST05A-S3M-CL

ST05A-S3S-CL

● The FPP03-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282).● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model ST05A-S3T-CL and ST05A-S3M-CL form 2-axis swivel stage model ST05A-S3S-CL.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

ST05A-S3T-CL

ST05A-S3T-R-CL

210g

-

Fine Pitch Positioner

FPP03-13 (13mm)

420g

-

±3°

φ0.05mm / ±3°

50mm

Cross-Roller Bearing

68mm±0.2mm 50mm±0.4mm50mm±0.2mm

φ0.1mm / ±3°

Coarse 0.97°, Fine 0.00048°

ST05A-S3M-CL

ST05A-S3M-R-CL

Coarse 0.74°, Fine 0.00037°

3kg

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

ST05A-S3T-CL-C

ST05A-S3T-R-CL-C

ST05A-S3T-CL-V

ST05A-S3T-R-CL-V

3 arcsec / kgf-cm, Roll Direction 9 arcsec / kgf-cm

Aluminum Alloy

Clear-Matte Anodizing

ST05A-S3S-CL

ST05A-S3S-RRR-CL

Coarse 0.74°Fine 0.00037°

Coarse 0.97°Fine 0.00048°

±3° (both axes)

≦ 90°±1'

Specifications

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 27: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

125CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing

ST05A-S3T-CL

ST05A-S3S-CL

ST05A-S3M-CL

Prec

isio

n Po

sitio

ning

Sta

ges

35

30

40

45

0

5

10

45

40

1050

50

3040

(12)

50(22.5)

40 30

Φ4 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm

(0.5) (9.25)(0.5)

11.5

(73)

Micrometer HeadFPP03-13

Clamp φ15

18 (1.75)

10

40

1850

Rotation Center

4-for M3 screws

40

3

35

30

40

45

40

1868

Rotation Center

4-for M3 screws

3

35

30

40

45

15

20

10

5

0

5

10

45

40

10 5 0

0510

45

40

10

50

50

3040

(22.5)

5010

40 30

(22.5)

(73)

(73)

Micrometer HeadFPP03-13

Φ4 Depth 5mm

4-M3 Depth 5mm4-M3 Depth 5mm

40

1818

50

3

Rotation Center

4-for M3 screws

(1.75)

(9.25)

9.25

10

40

9.25

Clamp φ15

Page 28: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

126

Manual Sw

ivel Stages (Goniometers)

ST05A-C1T ST05A-C1M ST05A-C1B

ST05A-C1S ST05A-C1L● Micrometer actuator type.● Center-mounted actuators provide greater operator accessibility.● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST05A-C1T and ST05A-C1M form 2-axis swivel stage model ST05A-C1S.● Combination of model ST05A-C1M and SH05A-C1B form 2-axis swivel stage model ST05A-C1L.

Manual Swivel Stages (Goniometers) / 50mm Table

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

ST05A-C1T

ST05A-C1T-R

Micrometer

(13mm)

0.0059° / scale

3kg

50mm

Cross-Roller Bearing

86mm±0.2mm

0.1° (vernier)

Aluminum Alloy

Clear-Matte Anodizing

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

ST05A-C1M

ST05A-C1M-R

ST05A-C1B

ST05A-C1B-R

ST05A-C1S

ST05A-C1S-RRR

ST05A-C1L

ST05A-C1L-RRR

0.0073° / scale

±3°

68mm±0.2mm

3 arcsec / kgf-cm, Roll Direction

210g

-

0.0095° / scale

50mm±0.2mm

0.0095° / scale (top) 0.0073° / scale (bottom)

±3° (both axes)

φ0.05mm / ±3° φ0.1mm / ±3°

50mm±0.4mm

9 arcsec / kgf-cm

420g

≦ 90°±1'

0.0073° / scale (top)0.0059° / scale (bottom)

68mm±0.4mm

Specifications

Precision Positioning Stages

Call Call

ST05A-C1T-V

ST05A-C1T-R-V

ST05A-C1T-C

ST05A-C1T-R-C

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 29: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

127CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

0 1010

50

3040

(43)

(12)

500.5

40 30

Φ4 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm

Micrometer Head

5

3

10

40

Clamp φ15

Rotation Center

5018

40 4-for M3 screws 0 1010

Rotation Center

6818

40 4-for M3 screws 0 1010

Rotation Center

8618

40 4-for M3 screws

0 1010

50

3040

(43)

(12)

500.5

40 30

Φ4 Depth 5mm

4-M3 Depth 5mm4-M3 Depth 5mm

Micrometer Head

5

10

40

Clamp φ15

18

Rotation Center

5018

40 4-for M3 screws

3

0 1010

6818

18

Rotation Center

40 4-for M3 screws

3

Cener-Mount Micrometer, Aluminum Body, Cross-Roller Bearing

ST05A-C1T

ST05A-C1M

ST05A-C1S

ST05A-C1L

ST05A-C1B

Prec

isio

n Po

sitio

ning

Sta

ges

Page 30: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

128

Manual Sw

ivel Stages (Goniometers)

Call Call

ST07A-S1T ST07A-S1M ST07A-S1B

ST07A-S1S ST07A-S1L● Micrometer actuator type.● Side-Mount actuators are ideal for limited space applications.● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST07A-S1T and ST07A-S1M form 2-axis swivel stage model ST07A-S1S.● Combination of model ST07A-S1M and ST07A-S1B form 2-axis swivel stage model ST07A-S1L.  

Manual Swivel Stages (Goniometers) / 70mm Table

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

ST07A-S1T

ST07A-S1T-R

Micrometer

(25mm)

0.0042° / scale

70mm

Cross-Roller Bearing

122mm±0.2mm

-

Aluminum Alloy

Clear-Matte Anodizing

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

ST07A-S1T-C

ST07A-S1T-R-C

ST07A-S1T-V

ST07A-S1T-R-V

ST07A-S1M

ST07A-S1M-R

ST07A-S1B

ST07A-S1B-R

ST07A-S1S

ST07A-S1S-RRR

ST07A-S1L

ST07A-S1L-RRR

0.0053° / scale

±3°

96mm±0.2mm

0.9 arcsec / kgf-cm, Roll Direction

520g

-

0.0069° / scale

70mm±0.2mm

0.0069° / scale (top)0.0053° / scale (bottom)

±3° (both axes)

φ0.05mm / ±3° φ0.1mm / ±3°

70mm±0.4mm

2.7 arcsec / kgf-cm

5kg 4.5kg

1040g

≦ 90°±1'

0.0053° / scale (top)0.0042° / scale (bottom)

96mm±0.4mm

Specifications

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 31: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

129CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

26122

4

60

Rotation Center

4-for M4 screws

6070(12.5) (21.5)

3040

(21.5)

70(12.5)

60 40 30

Micrometer Head

(91.5)

(91.5)

Φ5 Depth 7mm

4-M4 Depth 6mm

4-M3 Depth 6mm4-M3 Depth 6mm

1426

2670

14

60 4-for M4 screws

14 14

60

Clamp φ15

5

Rotation Center

1426

2696

14

60 4-for M4 screws

5

Rotation Center

6070

3040

(91.5)

(12.5)

70(21.5)

60 40 30

2670

4

60

Rotation Center

14

60

Clamp φ15

4-for M4 screws

Micrometer Head

Φ5 Depth 7mm

4-M4 Depth 6mm

4-M3 Depth 6mm4-M3 Depth 6mm

2696

4

60

Rotation Center

4-for M4 screws

Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing

ST07A-S1T

ST07A-S1L

ST07A-S1S

ST07A-S1M

ST07A-S1B

Prec

isio

n Po

sitio

ning

Sta

ges

Page 32: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

130

Manual Sw

ivel Stages (Goniometers)

Call Call

Manual Swivel Stages (Goniometers) / 70mm Table

ST07A-S3T-CL ST07A-S3M-CL

ST07A-S3S-CL

● The FPP03-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282).● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model ST07A-S3T-CL and ST07A-S3M-CL form 2-axis swivel stage model ST07A-S3S-CL.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

ST07A-S3T-CL

ST07A-S3T-R-CL

520g

-

Fine Pitch PositionerFPP03-13 (13mm)

1040g

-

±3°

φ0.05mm / ±3°

70mm

Cross-Roller Bearing

96mm±0.2mm 70mm±0.4mm70mm±0.2mm

φ0.1mm / ±3°

Coarse 0.69°, Fine 0.00034°

ST07A-S3M-CL

ST07A-S3M-R-CL

Coarse 0.53°, Fine 0.00026°

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

ST07A-S3T-CL-C

ST07A-S3T-R-CL-C

ST07A-S3T-CL-V

ST07A-S3T-R-CL-V

0.9 arcsec / kgf-cm, Roll Direction 2.7 arcsec / kgf-cm

Aluminum Alloy

Clear-Matte Anodizing

ST07A-S3S-CL

ST07A-S3S-RRR-CL

Coarse 0.53°Fine 0.00026°

Coarse 0.69°Fine 0.00034°

±3° (both axes)

≦ 90°±1'

5kg 4.5kg

Specifications

Precision Positioning Stages

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 33: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

131CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

35

30

40

45

0

5

10

45

40

1050

6070

3040

(80.5)

(12.5)

70(23.5)

60 40 30

Micrometer Head

Φ5 Depth 7mm

4-M4 Depth 6mm

4-M3 Depth 6mm4-M3 Depth 6mm

FPP03-13

14

60

Clamp φ15

6

2670

4

60

Rotation Center

4-for M4 screws

35

30

40

45

2696

4

60

Rotation Center

4-for M4 screws

0510

45

40

10

50

35

30

40

45

0

5

10

45

40

10 5 0

15

20

10

5

FPP03-13

6070(12.5) (23.5)

3040

(23.5)

70(12.5)

60 40 30

Micrometer Head

(80.5)

(80.5)

Φ5 Depth 7mm

4-M4 Depth 6mm

4-M3 Depth 6mm4-M3 Depth 6mm

14 14

60

Clamp φ15

1426

2670

14

60 4-for M4 screws

5

Rotation Center

6

6

Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing

ST07A-S3T-CL

ST07A-S3S-CL

ST07A-S3M-CL

Prec

isio

n Po

sitio

ning

Sta

ges

Page 34: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

132

Manual Sw

ivel Stages (Goniometers)

ST07A-C1T ST07A-C1M ST07A-C1B

ST07A-C1S ST07A-C1L● Micrometer actuator type.● Center-mounted actuators provide greater operator accessibility.● Manual Swivel stages are fitted with Cross-Roller Bearing guide.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST07A-C1T and ST07A-C1M form 2-axis swivel stage model ST07A-C1S.● Combination of model ST07A-C1M and SH07A-C1B form 2-axis swivel stage model ST07A-C1L.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Perpendicularity

Actuator

ST07A-C1T

ST07A-C1T-R

Micrometer(25mm)

0.0041° / scale

70mm

Cross-Roller Bearing

122mm±0.2mm

0.1° (vernier)

Aluminum Alloy

Clear-Matte Anodizing

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

ST07A-C1M

ST07A-C1M-R

ST07A-C1B

ST07A-C1B-R

ST07A-C1S

ST07A-C1S-RRR

ST07A-C1L

ST07A-C1L-RRR

0.005° / scale

±3°

96mm±0.2mm

0.9 arcsec / kgf-cm, Roll Direction

520g

-

0.0066° / scale

70mm±0.2mm

0.0066° / scale (top) 0.0055° / scale (bottom)

±3° (both axes)

φ0.05mm / ±3° φ0.1mm / ±3°

70mm±0.4mm

2.7 arcsec / kgf-cm

1040g

≦ 90°±1'

0.0055° / scale (top) 0.0041° / scale (bottom)

96mm±0.4mm

5kg 4.5kg

Specifications

Manual Swivel Stages (Goniometers) / 70mm Table

Precision Positioning Stages

Call Call

ST07A-C1T-C

ST07A-C1T-R-C

ST07A-C1T-V

ST07A-C1T-R-V

Lubricant Type

Sample Model Number

Modification Cost

Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot

 be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.

Clean Room1

Vacuum2

Page 35: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

133CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com

Man

ual S

wiv

el S

tage

s (G

onio

met

ers)

Cener-Mount Micrometer, Aluminum Body, Cross-Roller Bearing

ST07A-C1T

ST07A-C1S

ST07A-C1L

ST07A-C1M

ST07A-C1B

Prec

isio

n Po

sitio

ning

Sta

ges

0 1010

10 10

6070

3040

(70)

2670

9.5

(12.5)

700.5

60 40 30

Φ5 Depth 7mm

4-M4 Depth 6mm

4-M3 Depth 6mm4-M3 Depth 6mm

Micrometer Head

4

14

60

Clamp φ15

60 0.5

4-for M4 screws

Rotation Center

0 1010

1010

2696

9.5

60 0.5

Rotation Center

0 101026

122

9.5

60 0.5

Rotation Center

0 1010

1010

6070

3040

(70)

(12.5)

70(70)

60 40 30

Micrometer Head

14

60

Clamp φ15

2626

70

60 4-for M4 screws

5

14

Rotation Center

0 1010

1010

2626

96

60 4-for M4 screws

5

14

Rotation Center

Φ5 Depth 7mm

4-M4 Depth 6mm

4-M3 Depth 6mm4-M3 Depth 6mm

Page 36: Manual Swivel Stages (Goniometers)30~160mm Table Manual Swivel Stages (Goniometers) 30mm Table Brass Body, Dove-Tail Slide 104 70mm Table Aluminum Body, Cross-Roller Bearing 114 Side-Mount

CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com134

Manual Sw

ivel Stages (Goniometers)

Lubricant Type

Sample Model Number

Modification Cost Call Call

Clean Room1

Vacuum2

Optional Lubricant Exchange

1. Although clean room grease aids in the reduction of particulate output, a specific

cleanliness level cannot be guaranteed.

2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be

guaranteed.

Manual Swivel Stages (Goniometers) / 50mm TableSide-Swivel, Brass Body, Dove-Tail Slide

SH05B-DH● Manual Swivel stages with the rotation axis oriented perpendicular to the table and located at the side.● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium mat plating.● Micrometer actuator type.

Model Number

Mirror Model Number

Table Size

Guide Mechanism

Angular Range

Work Distance

Rotation Center Play

Minimum Readout

Angular Motion

Load Capacity (Horizontal)

Moment Load Stiffness

Material

Finish

Weight

Actuator

0.72kg

Micrometer(13mm)

0.0048°,tan-1

(0.01 / 120)

50mm

Dove-Tail Slide

±3°

80mm±0.1mm

φ0.1mm / ±3°

SH05B-DH

SH05B-DH-R

0.239°, tan-1

(0.5 / 120) / Micrometer Revolution

3kg

4 arcsec / kgf-cm, Roll Direction

We offer custom products such as vacuum stages, clean room stages, and many other modifications.

SH05B-DH-C

SH05B-DH-R-C

SH05B-DH-V

SH05B-DH-R-V

Brass

Chromium Mat Plating

Specifications

Precision Positioning Stages

82

22

Micrometer Head

Clamp φ10

Rotation Center

4-for M4 screws

50

(138.5)

6

60

(21)

14

46.5

40

80

(62.5)

50 60

4-M2 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm

133040

133040

Table matrix