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30~160mm Table
Manual Swivel Stages (Goniometers)
30mm Table
Brass Body, Dove-Tail Slide 104
70mm Table
Aluminum Body, Cross-Roller Bearing 114Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 128Side-Mount Fine Pitch Positioner, Aluminum Body, Cross-Roller Bearings 130Center-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 132
40mm Table
Brass Body, Dove-Tail Slide 106Brass Body, Cross-Roller Bearing 108
50mm Table
Brass Body, Dove-Tail Slide 110Brass Body, Cross-Roller Bearing 112Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 122Side-Mount Fine Pitch Positioner, Aluminum Body, Cross-Roller Bearings 124Center-Mount Micrometer, Aluminum Body, Cross-Roller Bearings 126Side-Swivel, Brass Body, Dove-Tail Slide 134
160mm Table
Aluminum Body, Cross-Roller Bearing 120
100mm Table
Aluminum Body, Cross-Roller Bearing 116
130mm Table
Aluminum Body, Cross-Roller Bearing 118
100
Manual Sw
ivel Stages (Goniometers)
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH07A-RT
SH07A-RT-R
Speci f icat ions Description
70mm
Cross-Roller Bearing
±10°
70mm±0.2mm
φ0.05mm / ±10°
0.1° (vernier)
1.53°/ revolution
5kg
0.9 arcsec / kgf-cm
Aluminum Alloy
Clear-Matte Anodizing
570g
90°±1'
Handle-Wheel
1. Kohzu's significant alpha-numeric model numbers offer quick product insight.
2. Mirror symmetry of standard stage.
3. Table size refers to the stage's upper-most mounting surface.
4. Type of movement mechanism used on this stage.
5. Stage travel range in the positive and negative directions from it's centered or neutral position.
6. Distance from table surface to rotation center.
7. Deviation of rotation center while stage is rotating.
8. Minimum readout of Table is the smallest measurable actuator motion increment at stage table.
9. Angle of gradient per handle-wheel revolution.
10. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate.
11. Moment load stiffness is measured in a direction perpendicular to the motion axis. See page 298 for details.
12. Material specification is for stage's main body components only.
13. Surface finish type and color.
14. Stage weight includes all components depicted in product photograph.
15. Perpendicularity between motion axes in a dual-axis XY stage assembly.
16. Actuator model number and travel range.
Understanding Swivel Stage (Goniometers) Specifications
SH07A-RT
● Cross Roller BearingIn cross-roller bearing guides,,, quench hardened and precision ground bearing surfaces move upon loose hardened steel cylinders (rollers) with rotation axes oriented in alternating 90 degree angles (Ref. Fig.1). Having rollers arranged in an alternating cross pattern allows preloading and operation at any angle. The roller bearings are held apart from one another by a bearing cage, which prevents adjacent rollers from touching. Since cross-roller bearing have little difference between static and dynamic friction they minimize start-to-stop slip-motion typical of other bearing types. The line contact of roller bearings along with precise roller-to-race gap management provide larger load bearing surfaces, higher preloads and meet very tight runout and stiffness specifications.
Dove-Tail Slide is guide mechanism which is build from contiguous two face (Ref. Fig.2). In other words, that of guide mechanism is built from fixed part and movement part only. That is efficient of dust reduction from the parts slit. In addition, this type of stage have high load capacity and mechanical chock, because supportable touch field is large. On the other hands, easy to occur the stick slip on contiguous part, because difference between coefficient static and kinetic friction is big.
Guide Mechanism Type
Fig. 1
● Dove-Tail Slide
Fig. 2
Precision Positioning Stages
101CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
worm wheel
worm shaft
A worm shaft and worm wheel are used for deceleration and driving (see Fig. 3). For the worm wheel of the swivel stage, a portion is cut off and the gear is mounted on the upper stage. Since the worm gear is assembled on the worm shaft and lapping is performed precisely for each movement while the torque gauge is used for checking, almost no backlash or lost motion occurs.
● Worm Shaft and Worm Wheel
Fig. 3
Feeding Mechanism
See Common Features of Kohzu Manual Stages section on page 18.
Actuator Type
For the SH series (except model SH07B-DH), the tilt angle is adjusted by rotating the handle that is directly connected to the worm shaft. The relationship between the tilt angle and the rotation of the handle-wheel is shown below.
ΔΘ = Δθ / n ΔΘ: Tilt angle of stage n : Reduction ratio of worm wheel Δθ : Rotation angle of handle
For the ST series and model SH07B-DH, the stage top face and the horizontal plane can be tilted by pressing the bar mounted on the stage with the micrometer. Although the feed angle varies with the distances from the fulcrum of the lever to the power point and to the action point, and by the shape of sphere of the tip, the following relationship is seen near the center:
ΔΘ = tan-1(Δt / R) ΔΘ: Tilt angle of stage R : Distance from rotation center to power point (mm)
Δ t : Distance from neutral position of micrometer
Angular Motion
Standard & Reverse Stage Assembly Configurations
Model Number
ーNNN (no mark)
ーNNR
ーNRN
ーNRR
ーRNN
ーRNR
ーRRN
ーRRR
Lower Axis Stage
Standard (Right Hand)
Standard (Right Hand)
Standard (Right Hand)
Standard (Right Hand)
Mirror Symmetry (Left Hand)
Mirror Symmetry (Left Hand)
Mirror Symmetry (Left Hand)
Mirror Symmetry (Left Hand)
Upper Axis Stage
Standard (Right Hand)
Standard (Right Hand)
Mirror Symmetry (Left Hand)
Mirror Symmetry (Left Hand)
Standard (Right Hand)
Standard (Right Hand)
Mirror Symmetry (Left Hand)
Mirror Symmetry (Left Hand)
Assembly Configuration
Standard Assembly
Reversed Assembly
Standard Assembly
Reversed Assembly
Standard Assembly
Reversed Assembly
Standard Assembly
Reversed Assembly
Prec
isio
n Po
sitio
ning
Sta
ges
Assembling multiple stages can be customized to meet specific application requirements at no additional cost.
nΔθ
( )RΔt
102
Manual Sw
ivel Stages (Goniometers)
Understanding Swivel Stage (Goniometers) Specifications
- NNR-NNN
-RRR-RRN
-RNR-RNN
-NRR-NRN
(SH series)
Precision Positioning Stages
103CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
- NNR-NNN
-RRR-RRN
-RNR-RNN-NRR
-NRN
-NNR
-NNN
-RRR
-RRN-RNR-RNN
-NRR-NRN
(ST series)
Prec
isio
n Po
sitio
ning
Sta
ges
104
Manual Sw
ivel Stages (Goniometers)
Manual Swivel Stages (Goniometers) / 30mm Table
SH03B-DT SH03B-DM
SH03B-DS
● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium matte plating.● Two (2) types of work distances are available.● Manual Swivel stages are actuated by separate handle.● Combination of model SH03B-DT and SH03B-DM form 2-axis swivel stage model SH03B-DS.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH03B-DT
SH03B-DT-R
102g
-
Handle-Wheel
204g
0.1° (vernier)
±10°
30mm
Dove-Tail Slide
44mm±0.1mm
φ0.1mm / ±10° φ0.2mm / ±10°
30mm±0.2mm30mm±0.1mm
2.06° / Handle Revolution
SH03B-DM
SH03B-DM-R
1.5° / Handle Revolution 2.06° / Handle Revolution (top), 1.5°/Handle Revolution (bottom)
1kg
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
Lubricant Type
Sample Model Number
Modification Cost
SH03B-DT-C
SH03B-DT-R-C
Call Call
Clean Room1
SH03B-DT-V
SH03B-DT-R-V
Vacuum2
12 arcsec / kgf-cm, Roll Direction 24 arcsec / kgf-cm
Brass
Chromium Matte Plating
SH03B-DS
SH03B-DS-RRR
±10° (both axes)
≦ 90°±1'
Optional Lubricant Exchange
Specifications
Precision Positioning Stages
1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
105CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Brass Body, Dove-Tail Slide
SH03B-DT SH03B-DM
SH03B-DS
Prec
isio
n Po
sitio
ning
Sta
ges
(9)
30
Handle φ8
0.5
20 13
13
20
30 7
Φ3 Depth 2.5mm
4-M2 Depth 3mm
4-M3 Depth 3mm
(9)
30
6.1
14
Clamp φ6
13
6.5
010
10
6.1 6
Rotation Center
134-for M2 screws
6.5
1314
30
010 10
6.1
6
14
Clamp φ6
13
4-for M2 screws
Rotation Center44
13
13 6.5
010 10
30
(9)
30
Handle φ8
0.5
20 13
13
20
30 7
Φ3 Depth 2.5mm
4-M2 Depth 3mm
4-M3 Depth 3mm
6.1
6
14
Clamp φ6
13
4-for M2 screws
Rotation Center
3014
13
6.5
010 10
30
(9)
30
Handle φ8
0.5
20 13
13
20
Φ3 Depth 2.5mm
30 7
4-M2 Depth 3mm
4-M3 Depth 3mm
106
Manual Sw
ivel Stages (Goniometers)
Manual Swivel Stages (Goniometers) / 40mm Table
SH04B-DT SH04B-DM
SH04B-DS
● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium matte plating.● Two (2) types of work distances are available.● Combination of model SH04B-DT and SH04B-DM form 2-axis swivel stage model SH04B-DS.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH04B-DT
SH04B-DT-R
210g 190g
-
Handle-Wheel
400g
0.1° (vernier)
±10°
40mm
Dove-Tail Slide
57mm±0.1mm 40mm±0.2mm40mm±0.1mm
1.91° / Handle Revolution
SH04B-DM
SH04B-DM-R
1.45° / Handle Revolution 1.91° / Handle Revolution (top), 1.45°/ Handle Revolution (bottom)
1.5kg
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH04B-DT-C
SH04B-DT-R-C
Call Call
Clean Room1
SH04B-DT-V
SH04B-DT-R-V
Vacuum2
10 arcsec / kgf-cm, Roll Direction 18 arcsec / kgf-cm
Brass
Chromium Matte Plating
SH04B-DS
SH04B-DS-RRR
±10° (both axes)
≦ 90°±1'
φ0.1mm / ±10° φ0.2mm / ±10°
Specifications
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
107CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Brass Body, Dove-Tail Slide
SH04B-DT SH04B-DM
SH04B-DS
Prec
isio
n Po
sitio
ning
Sta
ges
(13)
20
3040(10)
(10)
400.5
30 20
Φ4 Depth 4mm
4-M3 Depth 4mm
4-M3 Depth 4mm
Handle φ12
Rotation Center
4017
2
7
010 10
7
4-for M3 screws
30
Clamp φ8
30
15
010
10
7.5
7.5
20
30
40 (13)
(10)
400.5
30 20
Φ4 Depth 4mm
4-M3 Depth 4mm
4-M3 Depth 4mm
Handle φ12
Rotation Center
4017
2
7
010 10
7.5
4-for M3 screws
30
Clamp φ8
30
20
3040 (13)
(10)
400.5
30 20
Φ4 Depth 3mm
4-M3 Depth 3mm
4-M3 Depth 2.5mm
Handle φ12
Rotation Center
5715
2
7
010 10
7.5
30
Clamp φ8
304-for M3 screws
108
Manual Sw
ivel Stages (Goniometers)
Manual Swivel Stages (Goniometers) / 40mm Table
SH04B-RT SH04B-RM
SH04B-RS● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Brass and finished with a chromium matte plating.● Two (2) types of work distances are available.● Combination of model SH04B-RT and SH04B-RM form 2-axis swivel stage model SH04B-RS.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Actuator
SH04B-RT
SH04B-RT-R
250g
Handle-Wheel
500g
0.1° (vernier)
±10°
40mm
Cross-Roller Bearing
57mm±0.2mm 40mm±0.4mm40mm±0.2mm
1.34° / Handle Revolution
SH04B-RM
SH04B-RM-R
0.99° / Handle Revolution 1.34° / Handle Revolution (top), 0.99° / Handle Revolution (bottom)
2kg
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH04B-RT-C
SH04B-RT-R-C
Call Call
SH04B-RT-V
SH04B-RT-R-V
4 arcsec / kgf-cm, Roll Direction 12 arcsec / kgf-cm, Roll Direction
Brass
Chromium Matte Plating
SH04B-RS
SH04B-RS-RRR
±10° (both axes)
φ0.05mm / ±10° φ0.1mm / ±10°
Specifications
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
109CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Brass Body, Cross-Roller Bearing
SH04B-RT SH04B-RM
SH04B-RS
Prec
isio
n Po
sitio
ning
Sta
ges
20
30
40 (20)
(9.5)
400.5
30 20
Φ4 Depth 4mm
4-M3 Depth 4mm
4-M3 Depth 3mm
Handle φ12
(10.5)
Clamp φ8
Rotation Center
4017
7
010 10
30
3
30
Clamp φ8
4-for M3 screws
20
30
40 (20)
(9.5)
400.5
30 20
Φ4 Depth 4mm
4-M3 Depth 4mm
4-M3 Depth 3mm
(10.5)
Clamp φ8
Rotation Center57
17
7
010 10
30
3
30
Clamp φ8
4-for M3 screws
Handle φ12
20
30
40 (20)
(20)
40(10)
30 20
Φ4 Depth 4mm
4-M3 Depth 4mm
4-M3 Depth 3mm
Handle φ12
(10.5)
010 10
0.5
Rotation Center
4017
7
17
7.5
30 4-for M3 screws
3
010
10
30
Clamp φ8
77.5
(9.5)
110
SH05B-DT SH05B-DM SH05B-DB
SH05B-DS SH05B-DL● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium matte plating.● Three (3) types of work distances are available.● Combination of model SH05B-DT and SH05B-DM form 2-axis swivel stage model SH05B-DS.● Combination of model SH05B-DM and SH05B-DB form 2-axis swivel stage model SH05B-DL.
Manual Swivel Stages (Goniometers) / 50mm Table
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH05B-DT
SH05B-DT-R
Handle-Wheel
0.97° / Handle Revolution
3kg
50mm
Dove-Tail Slide
86mm±0.1mm
φ0.1mm / ±8°
±8°
0.1° (vernier)
Brass
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH05B-DT-C
SH05B-DT-R-C
Call Call
SH05B-DT-V
SH05B-DT-R-V
SH05B-DM
SH05B-DM-R
SH05B-DB
SH05B-DB-R
SH05B-DS
SH05B-DS-RRR
SH05B-DL
SH05B-DL-RRR
Chromium Matte Plating
1.2° / Handle Revolution
±10°
68mm±0.1mm
5 arcsec / kgf-cm, Roll Direction
400g
-
1.55° / Handle Revolution
50mm±0.1mm
1.55°/ Handle Revolution (top)1.2° / Handle Revolution (bottom)
φ0.1mm / ±10°
50mm±0.2mm
φ0.2mm / ±10°
10 arcsec / kgf-cm
2.5kg
800g
≦ 90°±1'
1.2° / Handle Revolution (top)0.97° / Handle Revolution (bottom)
68mm±0.2mm
±10° (both axes) ±10° (top), ±8° (bottom)
φ0.2mm / ±8°
Specifications
Precision Positioning StagesM
anual Swivel Stages (Goniom
eters)
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
111CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Brass Body, Dove-Tail Slide
SH05B-DT
SH05B-DM
SH05B-DB
SH05B-DS
SH05B-DL
Prec
isio
n Po
sitio
ning
Sta
ges
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
50
3040
(15)
(10)
500.5
40 30
Φ4 Depth 5mm4-M3 Depth 3mm4-M3 Depth 3mm
Handle φ13
3
6.5
4-for M3 screws
40
Clamp φ8
Rotation Center
5018
7
010 10
40
Rotation Center
5018
7
18
3
40
7.5
50
3040
(15)
(15)
500.5
40 30
Φ4 Depth 5mm
4-M3 Depth 3mm
Handle φ13
(10)
6.5
4-for M3 screws
40
Clamp φ8
(10)
8
010 10
010
10
Rotation Center
6818
8010 10
40
Rotation Center
8618
8
010 10
40
Rotation Center
6818
8
18
3
40
7.5
4-for M3 screws
010 10
4-M3 Depth 3mm
112
Manual Sw
ivel Stages (Goniometers)
SH05B-RT SH05B-RM SH05B-RB
SH05B-RS SH05B-RL● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Brass and finished with a chromium matte plating.● Three (3) types of work distances are available.● Combination of model SH05B-RT and SH05B-RM form 2-axis swivel stage model SH05B-RS.● Combination of model SH05B-RM and SH05B-RB form 2-axis swivel stage model SH05B-RL.
Manual Swivel Stages (Goniometers) / 50mm Table
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH05B-RT
SH05B-RT-R
Handle-Wheel
0.97° / Handle Revolution
50mm
Cross-Roller Bearing
86mm±0.2mm
0.1° (vernier)
Brass
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH05B-RT-C
SH05B-RT-R-C
Call Call
SH05B-RT-V
SH05B-RT-R-V
SH05B-RM
SH05B-RM-R
SH05B-RB
SH05B-RB-R
SH05B-RS
SH05B-RS-RRR
SH05B-RL
SH05B-RL-RRR
Chromium Matte Plating
1.2° / Handle Revolution
±10°
68mm±0.2mm
3 arcsec / kgf-cm, Roll Direction
360g
-
1.55° / Handle Revolution
50mm±0.2mm
1.55° / Handle Revolution (top)1.2° / Handle Revolution (bottom)
φ0.05mm / ±10°
50mm±0.4mm
9 arcsec / kgf-cm
720g
≦ 90°±1'
1.2° / Handle Revolution (top)0.97° / Handle Revolution (bottom)
68mm±0.4mm
φ0.05mm / ±8°
±8°
φ0.1mm / ±10° φ0.1mm / ±8°
±10° (both axes) ±10° (top), ±8° (bottom)
3kg 2.5kg
Specifications
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
113CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Brass Body, Cross-Roller Bearing
SH05B-RT
SH05B-RM
SH05B-RB
SH05B-RS
SH05B-RL
Prec
isio
n Po
sitio
ning
Sta
ges
50
3040
(21.5)
(12.5)
500.5
40 30
Φ4 Depth 5mm4-M3 Depth 4mm4-M3 Depth 3.5mm
Handle φ13
10.5
3 4-for M3 screws
40
Clamp φ15
Rotation Center
5018 010 10
40
Rotation Center
6818
40
010 10
Rotation Center
8618
40
010 10
Rotation Center
5018 010 10
40
50
3040
(21.5)
(21.5)
50
0.5
40 30
Φ4 Depth 5mm4-M3 Depth 4mm4-M3 Depth 3.5mm
Handle φ13
(12.5)
10
3
4-for M3 screws
40
Clamp φ15
010
10
(12.5)
18
Rotation Center
6818 010 10
40
3
18
114
Manual Sw
ivel Stages (Goniometers)
SH07A-RT SH07A-RM SH07A-RB
SH07A-RS SH07A-RL● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model SH07A-RT and SH07A-RM form 2-axis swivel stage model SH07A-RS.● Combination of model SH07A-RM and SH07A-RB form 2-axis swivel stage model SH07A-RL.
Manual Swivel Stages (Goniometers) / 70mm Table
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH07A-RT
SH07A-RT-R
Handle-Wheel
0.96° / Handle Revolution
70mm
Cross-Roller Bearing
122mm±0.2mm
0.1° (vernier)
Aluminum Alloy
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH07A-RT-C
SH07A-RT-R-C
Call Call
SH07A-RT-V
SH07A-RT-R-V
SH07A-RM
SH07A-RM-R
SH07A-RB
SH07A-RB-R
SH07A-RS
SH07A-RS-RRR
SH07A-RL
SH07A-RL-RRR
Clear-Matte Anodizing
1.2° / Handle Revolution
±10°
96mm±0.2mm
0.9 arcsec / kgf-cm, Roll Direction
570g
-
1.53° / Handle Revolution
70mm±0.2mm
1.53° / Handle Revolution (top)1.2° / Handle Revolution (bottom)
φ0.05mm / ±10°
70mm±0.4mm
2.7 arcsec / kgf-cm
1.14kg
≦ 90°±1'
1.2° / Handle Revolution (top)0.96° / Handle Revolution (bottom)
96mm±0.4mm
φ0.05mm / ±8°
±8°
φ0.1mm / ±10° φ0.1mm / ±8°
±10° (both axes) ±10° (top), ±8° (bottom)
5kg 4.5kg
Specifications
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
115CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Aluminum Body, Cross-Roller Bearing
SH07A-RT
SH07A-RM
SH07A-RB
SH07A-RS
SH07A-RL
Prec
isio
n Po
sitio
ning
Sta
ges
4
1
7026
70
3040
27
(12.5)
700.5
40 30
Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ20
16
60
60
60
4-M4 Depth 5mm
9
60
4-for M4 screws
Clampφ15
Rotation Center
010 10
10 10
2.5
9626
60
12.5
4-for M4 screws
Rotation Center
010 10
10 10
1.85
122
26
60
11.85
4-for M4 screws
Rotation Center
010 10
4
60
26
12.5
010 10
10 10
26
14
96
70
3040
(27)
(27)
7015.5
40 30
Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ20
16
60
60
4-M4 Depth 5mm
0.5
4
60
Clamp φ15
7026
9
Rotation CenterRotation Center
010 10
10 10
26
14
60
(12.5)
11 12.5
010
10
1010
Handle φ20
4-for M4 screws
4-for M4 screws
4
1
7026
70
3040
27
(12.5)
700.5
40 30
Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ20
16
60
60
60
4-M4 Depth 5mm
9
60
4-for M4 screws
Clampφ15
Rotation Center
010 10
10 10
2.5
9626
60
12.5
4-for M4 screws
Rotation Center
010 10
10 10
1.85
122
26
60
11.85
4-for M4 screws
Rotation Center
010 10
4
60
26
12.5
010 10
10 10
26
14
96
70
3040
(27)
(27)
7015.5
40 30
Φ5 Depth 5mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ20
16
60
60
4-M4 Depth 5mm
0.5
4
60
Clamp φ15
7026
9
Rotation CenterRotation Center
010 10
10 10
26
14
60
(12.5)
11 12.5
010
10
1010
Handle φ20
4-for M4 screws
4-for M4 screws
116
Manual Sw
ivel Stages (Goniometers)
SH10A-RT SH10A-RM SH10A-RB
SH10A-RS SH10A-RL● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model SH10A-RT and SH10A-RM form 2-axis swivel stage model SH10A-RS.● Combination of model SH10A-RM and SH10A-RB form 2-axis swivel stage model SH10A-RL.
Manual Swivel Stages (Goniometers) / 100mm Table
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH10A-RT
SH10A-RT-R
0.67° / Handle Revolution
100mm
Cross-Roller Bearing
172mm±0.2mm
0.1° (vernier)
Aluminum Alloy
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH10A-RT-C
SH10A-RT-R-C
SH10A-RT-V
SH10A-RT-R-V
SH10A-RM
SH10A-RM-R
SH10A-RB
SH10A-RB-R
SH10A-RS
SH10A-RS-RRR
SH10A-RL
SH10A-RL-RRR
Clear-Matte Anodizing
0.84° / Handle Revolution
±10°
134mm±0.2mm
0.4 arcsec / kgf-cm, Roll Direction
1.7kg
-
1.125° / Handle Revolution
95mm±0.2mm
φ0.05mm / ±10°
95mm±0.4mm
1.2 arcsec / kgf-cm
3.4kg
≦ 90°±1'
134mm±0.4mm
±8°
φ0.05mm / ±8° φ0.1mm / ±10° φ0.1mm / ±8°
±10° (both axes) ±10° (top), ±8° (bottom)
7kg 5kg
Specifications
1.125° / Handle Revolution (top)0.84° / Handle Revolution (bottom)
0.84° / Handle Revolution (top)0.67° / Handle Revolution (bottom)
Handle-Wheel
Call Call
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
117CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Aluminum Body, Cross-Roller Bearing
SH10A-RT
SH10A-RM
SH10A-RB
SH10A-RS
SH10A-RL
Prec
isio
n Po
sitio
ning
Sta
ges
0
20 20
10 10
10 10
6
9539
100
3040
(34)
(12.5)
100
0.5
40 30
Φ6 Depth 8mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ20
19.5
90 60
90
90
60
4-M4 Depth 6mm
14.5
90
Clamp φ15
Rotation Center
4-M4 Depth 6mm
4-for M4 screws
15
010 10
10 10
134
38
90
14.7
Rotation Center
4-for M4 screws
010 10
10 10
172
38
90
14.7
Rotation Center
4-for M4 screws
100
3040
(34)
(34)
100
19
40 30
Φ6 Depth 8mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ20
19.5
90 60
9060
4-M4 Depth 6mm4-M4 Depth 6mm
0.5
6
Clamp φ15
15 14.7
(12.5)
3817.5
Rotation Center
9539
14.5
90
904-for M4 screws
0
20 20
10 10
10 10
010
10
1010
6
3817.5
Rotation Center
3814.7
904-for M4 screws
134
010 10
10 10
118
Manual Sw
ivel Stages (Goniometers)
Manual Swivel Stages (Goniometers) / 130mm Table
SH13A-RT SH13A-RM
SH13A-RS● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model SH13A-RT and SH13A-RM form 2-axis swivel stage model SH13A-RS.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH13A-RT
SH13A-RT-R
3.6kg 4kg
-
Handle-Wheel
7.6kg
0.1° (vernier)
±10°
φ0.05mm / ±10°
130mm
Cross-Roller Bearing
173mm±0.5mm 120mm±1mm120mm±0.5mm
φ0.1mm / ±10°
1.25° / Handle Revolution
SH13A-RM
SH13A-RM-R
0.9° / Handle Revolution 1.25° / Handle Revolution (top), 0.9° / Handle Revolution (bottom)
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH13A-RT-C
SH13A-RT-R-C
SH13A-RT-V
SH13A-RT-R-V
0.2 arcsec / kgf-cm, Roll Direction 0.6 arcsec / kgf-cm
Aluminum Alloy
Clear-Matte Anodizing
SH13A-RS
SH13A-RS-RRR
±10° (both axes)
≦ 90°±1'
10kg 6kg
Specifications
Call Call
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
119CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Aluminum Body, Cross-Roller Bearing
SH13A-RT/RM
SH13A-RT
SH13A-RS
SH13A-RM
SH13A-RT SH13A-RM
Prec
isio
n Po
sitio
ning
Sta
ges
110130
3040
(43)
(19)
130
2
40 30
Φ8 Depth 10mm4-M3 Depth 8mm4-M3 Depth 8mm
Handle φ40
23
11090 60
9060
4-M4 Depth 10mm4-M4 Depth 10mm4-M5 Depth 10mm
6
110
Clamp φ25 18
0
20 2010 10
10 10
120
53
110
19
Rotation Center
4-for M5 screws
6
110
Clamp φ25 20
010 10
10 10
173
58
110
21
Rotation Center
4-for M5 screws
110130
3040
(43)
(43)
130
21
40 30
Handle φ40
23
11090 60
9060
Φ8 Depth 10mm4-M3 Depth 8mm4-M3 Depth 8mm4-M4 Depth 10mm4-M4 Depth 10mm4-M5 Depth 10mm
2
010
10
1010
58
110
20
Rotation Center
4-for M5 screws
120
5319
0
20 2010 10
10 10
6
110
Clamp φ25
2118
120
Manual Sw
ivel Stages (Goniometers)
Manual Swivel Stages (Goniometers) / 160mm Table
SH16A-RT SH16A-RM
SH16A-RS● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model SH16A-RT and SH16A-RM form 2-axis swivel stage model SH16A-RS.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
SH16A-RT
SH16A-RT-R
SH16A-RM
SH16A-RM-R
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH16A-RS
SH16A-RS-RRR
Specifications
Precision Positioning Stages
5.2kg 4.5kg
-
Handle-Wheel
9.7kg
0.1° (vernier)
±10°
φ0.5mm / ±10°
160mm
Cross-Roller Bearing
280mm±0.5mm 220mm±1mm220mm±0.5mm
φ0.1mm / ±10°
0.705° / Handle Revolution 0.6° / Handle Revolution 0.705° / Handle Revolution (top), 0.6° / Handle Revolution (bottom)
0.2 arcsec / kgf-cm, Roll Direction 0.6 arcsec / kgf-cm
Aluminum Alloy
Clear-Matte Anodizing
±10° (both axes)
≦ 90°±1'
20kg 15kg
SH16A-RT-C
SH16A-RT-R-C
SH16A-RT-V
SH16A-RT-R-V
Call Call
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
121CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Aluminum Body, Cross-Roller Bearing
SH16A-RT
SH16A-RT
SH16A-RM
SH16A-RS
SH16A-RM
Prec
isio
n Po
sitio
ning
Sta
ges
140110
160
3040
(35)
(19)
160
2
40 30Φ8 Depth 8mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ40
32
140
11090 60
9060
4-M4 Depth 8mm4-M4 Depth 8mm4-M5 Depth 8mm4-M5 Depth 10mm
6
140
Clamp φ25 21
010 10
10 10
220
60
140
16.5
Rotation Center
4-for M5 screws 3.5
6
140
Clamp φ25 23
0
10 10
10 10
280
50
140
21.4
Rotation Center
4-for M5 screws
010 10
10 10
140110
160
3040
(35)
(35)
160
30
40 30
Φ8 Depth 15mm4-M3 Depth 6mm4-M3 Depth 6mm
Handle φ40
32
140
11090 60
9060
4-M4 Depth 10mm4-M4 Depth 10mm4-M5 Depth 12mm4-M5 Depth 15mm
2
6
140
0
1010
1010
Clamp φ25
21 21.4
Rotation Center
1404-for M5 screws
220
6050
2316.5
122
Manual Sw
ivel Stages (Goniometers)
ST05A-S1T ST05A-S1M ST05A-S1B
ST05A-S1S ST05A-S1L● Micrometer actuator type.● Side-Mount actuators are ideal for limited space applications.● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST05A-S1T and ST05A-S1M form 2-axis swivel stage model ST05A-S1S.● Combination of model ST05A-S1M and ST05A-S1B form 2-axis swivel stage model ST05A-S1L.
Manual Swivel Stages (Goniometers) / 50mm Table
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
ST05A-S1T
ST05A-S1T-R
ST05A-S1M
ST05A-S1M-R
ST05A-S1B
ST05A-S1B-R
ST05A-S1L
ST05A-S1L-RRR
ST05A-S1S
ST05A-S1S-RRR
50mm
Cross-Roller Bearing
±3° ±3° (both axes)
0.006° / scale0.0074° / scale
3 arcsec / kgf-cm, Roll Direction
210g
-
0.0097° / scale0.0097° / scale (top)
0.0074° / scale (bottom)0.0074° / scale (top)
0.006° / scale (bottom)
86mm±0.2mm
-
3kg
Aluminum Alloy
Clear-Matte Anodizing
68mm±0.2mm
φ0.05mm / ±3°
50mm±0.2mm 50mm±0.4mm
φ0.1mm / ±3°
9 arcsec / kgf-cm
420g
≦ 90°±1'
68mm±0.4mm
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
Specifications
Micrometer
(13mm)
Precision Positioning Stages
Call Call
ST05A-S1T-V
ST05A-S1T-R-V
ST05A-S1T-C
ST05A-S1T-R-C
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
123CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
3
18.5
(56)
10
40
1850
9.25
40
50
3040
(12)
5011.5
40 30
Φ4 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm
Micrometer Head
(0.5)(0.5)
Clamp φ15
Rotation Center
4-for M3 screws
40
1868
9.25
Rotation Center
4-for M3 screws
40
1886
9.25
Rotation Center
4-for M3 screws
9.25
(56)
(56)
50
3040
18.5
50(12)
40 30
Φ4 Depth 5mm
4-M3 Depth 5mm4-M3 Depth 5mm
Micrometer Head
18.5(12)
10
40
1818
50
3
40
Clamp φ15
Rotation Center
4-for M3 screws
10
9.25
40
1818
68
3
Rotation Center
4-for M3 screws
10
9.25
Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing
ST05A-S1T
ST05A-S1M
ST05A-S1S
ST05A-S1L
ST05A-S1B
Prec
isio
n Po
sitio
ning
Sta
ges
124
Manual Sw
ivel Stages (Goniometers)
Call Call
Manual Swivel Stages (Goniometers) / 50mm Table
ST05A-S3T-CL ST05A-S3M-CL
ST05A-S3S-CL
● The FPP03-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282).● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model ST05A-S3T-CL and ST05A-S3M-CL form 2-axis swivel stage model ST05A-S3S-CL.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
ST05A-S3T-CL
ST05A-S3T-R-CL
210g
-
Fine Pitch Positioner
FPP03-13 (13mm)
420g
-
±3°
φ0.05mm / ±3°
50mm
Cross-Roller Bearing
68mm±0.2mm 50mm±0.4mm50mm±0.2mm
φ0.1mm / ±3°
Coarse 0.97°, Fine 0.00048°
ST05A-S3M-CL
ST05A-S3M-R-CL
Coarse 0.74°, Fine 0.00037°
3kg
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
ST05A-S3T-CL-C
ST05A-S3T-R-CL-C
ST05A-S3T-CL-V
ST05A-S3T-R-CL-V
3 arcsec / kgf-cm, Roll Direction 9 arcsec / kgf-cm
Aluminum Alloy
Clear-Matte Anodizing
ST05A-S3S-CL
ST05A-S3S-RRR-CL
Coarse 0.74°Fine 0.00037°
Coarse 0.97°Fine 0.00048°
±3° (both axes)
≦ 90°±1'
Specifications
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
125CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing
ST05A-S3T-CL
ST05A-S3S-CL
ST05A-S3M-CL
Prec
isio
n Po
sitio
ning
Sta
ges
35
30
40
45
0
5
10
45
40
1050
50
3040
(12)
50(22.5)
40 30
Φ4 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm
(0.5) (9.25)(0.5)
11.5
(73)
Micrometer HeadFPP03-13
Clamp φ15
18 (1.75)
10
40
1850
Rotation Center
4-for M3 screws
40
3
35
30
40
45
40
1868
Rotation Center
4-for M3 screws
3
35
30
40
45
15
20
10
5
0
5
10
45
40
10 5 0
0510
45
40
10
50
50
3040
(22.5)
5010
40 30
(22.5)
(73)
(73)
Micrometer HeadFPP03-13
Φ4 Depth 5mm
4-M3 Depth 5mm4-M3 Depth 5mm
40
1818
50
3
Rotation Center
4-for M3 screws
(1.75)
(9.25)
9.25
10
40
9.25
Clamp φ15
126
Manual Sw
ivel Stages (Goniometers)
ST05A-C1T ST05A-C1M ST05A-C1B
ST05A-C1S ST05A-C1L● Micrometer actuator type.● Center-mounted actuators provide greater operator accessibility.● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST05A-C1T and ST05A-C1M form 2-axis swivel stage model ST05A-C1S.● Combination of model ST05A-C1M and SH05A-C1B form 2-axis swivel stage model ST05A-C1L.
Manual Swivel Stages (Goniometers) / 50mm Table
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
ST05A-C1T
ST05A-C1T-R
Micrometer
(13mm)
0.0059° / scale
3kg
50mm
Cross-Roller Bearing
86mm±0.2mm
0.1° (vernier)
Aluminum Alloy
Clear-Matte Anodizing
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
ST05A-C1M
ST05A-C1M-R
ST05A-C1B
ST05A-C1B-R
ST05A-C1S
ST05A-C1S-RRR
ST05A-C1L
ST05A-C1L-RRR
0.0073° / scale
±3°
68mm±0.2mm
3 arcsec / kgf-cm, Roll Direction
210g
-
0.0095° / scale
50mm±0.2mm
0.0095° / scale (top) 0.0073° / scale (bottom)
±3° (both axes)
φ0.05mm / ±3° φ0.1mm / ±3°
50mm±0.4mm
9 arcsec / kgf-cm
420g
≦ 90°±1'
0.0073° / scale (top)0.0059° / scale (bottom)
68mm±0.4mm
Specifications
Precision Positioning Stages
Call Call
ST05A-C1T-V
ST05A-C1T-R-V
ST05A-C1T-C
ST05A-C1T-R-C
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
127CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
0 1010
50
3040
(43)
(12)
500.5
40 30
Φ4 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm
Micrometer Head
5
3
10
40
Clamp φ15
Rotation Center
5018
40 4-for M3 screws 0 1010
Rotation Center
6818
40 4-for M3 screws 0 1010
Rotation Center
8618
40 4-for M3 screws
0 1010
50
3040
(43)
(12)
500.5
40 30
Φ4 Depth 5mm
4-M3 Depth 5mm4-M3 Depth 5mm
Micrometer Head
5
10
40
Clamp φ15
18
Rotation Center
5018
40 4-for M3 screws
3
0 1010
6818
18
Rotation Center
40 4-for M3 screws
3
Cener-Mount Micrometer, Aluminum Body, Cross-Roller Bearing
ST05A-C1T
ST05A-C1M
ST05A-C1S
ST05A-C1L
ST05A-C1B
Prec
isio
n Po
sitio
ning
Sta
ges
128
Manual Sw
ivel Stages (Goniometers)
Call Call
ST07A-S1T ST07A-S1M ST07A-S1B
ST07A-S1S ST07A-S1L● Micrometer actuator type.● Side-Mount actuators are ideal for limited space applications.● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST07A-S1T and ST07A-S1M form 2-axis swivel stage model ST07A-S1S.● Combination of model ST07A-S1M and ST07A-S1B form 2-axis swivel stage model ST07A-S1L.
Manual Swivel Stages (Goniometers) / 70mm Table
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
ST07A-S1T
ST07A-S1T-R
Micrometer
(25mm)
0.0042° / scale
70mm
Cross-Roller Bearing
122mm±0.2mm
-
Aluminum Alloy
Clear-Matte Anodizing
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
ST07A-S1T-C
ST07A-S1T-R-C
ST07A-S1T-V
ST07A-S1T-R-V
ST07A-S1M
ST07A-S1M-R
ST07A-S1B
ST07A-S1B-R
ST07A-S1S
ST07A-S1S-RRR
ST07A-S1L
ST07A-S1L-RRR
0.0053° / scale
±3°
96mm±0.2mm
0.9 arcsec / kgf-cm, Roll Direction
520g
-
0.0069° / scale
70mm±0.2mm
0.0069° / scale (top)0.0053° / scale (bottom)
±3° (both axes)
φ0.05mm / ±3° φ0.1mm / ±3°
70mm±0.4mm
2.7 arcsec / kgf-cm
5kg 4.5kg
1040g
≦ 90°±1'
0.0053° / scale (top)0.0042° / scale (bottom)
96mm±0.4mm
Specifications
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
129CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
26122
4
60
Rotation Center
4-for M4 screws
6070(12.5) (21.5)
3040
(21.5)
70(12.5)
60 40 30
Micrometer Head
(91.5)
(91.5)
Φ5 Depth 7mm
4-M4 Depth 6mm
4-M3 Depth 6mm4-M3 Depth 6mm
1426
2670
14
60 4-for M4 screws
14 14
60
Clamp φ15
5
Rotation Center
1426
2696
14
60 4-for M4 screws
5
Rotation Center
6070
3040
(91.5)
(12.5)
70(21.5)
60 40 30
2670
4
60
Rotation Center
14
60
Clamp φ15
4-for M4 screws
Micrometer Head
Φ5 Depth 7mm
4-M4 Depth 6mm
4-M3 Depth 6mm4-M3 Depth 6mm
2696
4
60
Rotation Center
4-for M4 screws
Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing
ST07A-S1T
ST07A-S1L
ST07A-S1S
ST07A-S1M
ST07A-S1B
Prec
isio
n Po
sitio
ning
Sta
ges
130
Manual Sw
ivel Stages (Goniometers)
Call Call
Manual Swivel Stages (Goniometers) / 70mm Table
ST07A-S3T-CL ST07A-S3M-CL
ST07A-S3S-CL
● The FPP03-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282).● Manual Swivel stages are fitted with Cross-Roller Bearing guides.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Two (2) types of work distances are available.● Combination of model ST07A-S3T-CL and ST07A-S3M-CL form 2-axis swivel stage model ST07A-S3S-CL.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
ST07A-S3T-CL
ST07A-S3T-R-CL
520g
-
Fine Pitch PositionerFPP03-13 (13mm)
1040g
-
±3°
φ0.05mm / ±3°
70mm
Cross-Roller Bearing
96mm±0.2mm 70mm±0.4mm70mm±0.2mm
φ0.1mm / ±3°
Coarse 0.69°, Fine 0.00034°
ST07A-S3M-CL
ST07A-S3M-R-CL
Coarse 0.53°, Fine 0.00026°
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
ST07A-S3T-CL-C
ST07A-S3T-R-CL-C
ST07A-S3T-CL-V
ST07A-S3T-R-CL-V
0.9 arcsec / kgf-cm, Roll Direction 2.7 arcsec / kgf-cm
Aluminum Alloy
Clear-Matte Anodizing
ST07A-S3S-CL
ST07A-S3S-RRR-CL
Coarse 0.53°Fine 0.00026°
Coarse 0.69°Fine 0.00034°
±3° (both axes)
≦ 90°±1'
5kg 4.5kg
Specifications
Precision Positioning Stages
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
131CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
35
30
40
45
0
5
10
45
40
1050
6070
3040
(80.5)
(12.5)
70(23.5)
60 40 30
Micrometer Head
Φ5 Depth 7mm
4-M4 Depth 6mm
4-M3 Depth 6mm4-M3 Depth 6mm
FPP03-13
14
60
Clamp φ15
6
2670
4
60
Rotation Center
4-for M4 screws
35
30
40
45
2696
4
60
Rotation Center
4-for M4 screws
0510
45
40
10
50
35
30
40
45
0
5
10
45
40
10 5 0
15
20
10
5
FPP03-13
6070(12.5) (23.5)
3040
(23.5)
70(12.5)
60 40 30
Micrometer Head
(80.5)
(80.5)
Φ5 Depth 7mm
4-M4 Depth 6mm
4-M3 Depth 6mm4-M3 Depth 6mm
14 14
60
Clamp φ15
1426
2670
14
60 4-for M4 screws
5
Rotation Center
6
6
Side-Mount Micrometer, Aluminum Body, Cross-Roller Bearing
ST07A-S3T-CL
ST07A-S3S-CL
ST07A-S3M-CL
Prec
isio
n Po
sitio
ning
Sta
ges
132
Manual Sw
ivel Stages (Goniometers)
ST07A-C1T ST07A-C1M ST07A-C1B
ST07A-C1S ST07A-C1L● Micrometer actuator type.● Center-mounted actuators provide greater operator accessibility.● Manual Swivel stages are fitted with Cross-Roller Bearing guide.● Stage body is made of Aluminum and finished with a clear-matte anodizing.● Three (3) types of work distances are available.● Combination of model ST07A-C1T and ST07A-C1M form 2-axis swivel stage model ST07A-C1S.● Combination of model ST07A-C1M and SH07A-C1B form 2-axis swivel stage model ST07A-C1L.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Perpendicularity
Actuator
ST07A-C1T
ST07A-C1T-R
Micrometer(25mm)
0.0041° / scale
70mm
Cross-Roller Bearing
122mm±0.2mm
0.1° (vernier)
Aluminum Alloy
Clear-Matte Anodizing
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
ST07A-C1M
ST07A-C1M-R
ST07A-C1B
ST07A-C1B-R
ST07A-C1S
ST07A-C1S-RRR
ST07A-C1L
ST07A-C1L-RRR
0.005° / scale
±3°
96mm±0.2mm
0.9 arcsec / kgf-cm, Roll Direction
520g
-
0.0066° / scale
70mm±0.2mm
0.0066° / scale (top) 0.0055° / scale (bottom)
±3° (both axes)
φ0.05mm / ±3° φ0.1mm / ±3°
70mm±0.4mm
2.7 arcsec / kgf-cm
1040g
≦ 90°±1'
0.0055° / scale (top) 0.0041° / scale (bottom)
96mm±0.4mm
5kg 4.5kg
Specifications
Manual Swivel Stages (Goniometers) / 70mm Table
Precision Positioning Stages
Call Call
ST07A-C1T-C
ST07A-C1T-R-C
ST07A-C1T-V
ST07A-C1T-R-V
Lubricant Type
Sample Model Number
Modification Cost
Optional Lubricant Exchange1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot
be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed.
Clean Room1
Vacuum2
133CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
Man
ual S
wiv
el S
tage
s (G
onio
met
ers)
Cener-Mount Micrometer, Aluminum Body, Cross-Roller Bearing
ST07A-C1T
ST07A-C1S
ST07A-C1L
ST07A-C1M
ST07A-C1B
Prec
isio
n Po
sitio
ning
Sta
ges
0 1010
10 10
6070
3040
(70)
2670
9.5
(12.5)
700.5
60 40 30
Φ5 Depth 7mm
4-M4 Depth 6mm
4-M3 Depth 6mm4-M3 Depth 6mm
Micrometer Head
4
14
60
Clamp φ15
60 0.5
4-for M4 screws
Rotation Center
0 1010
1010
2696
9.5
60 0.5
Rotation Center
0 101026
122
9.5
60 0.5
Rotation Center
0 1010
1010
6070
3040
(70)
(12.5)
70(70)
60 40 30
Micrometer Head
14
60
Clamp φ15
2626
70
60 4-for M4 screws
5
14
Rotation Center
0 1010
1010
2626
96
60 4-for M4 screws
5
14
Rotation Center
Φ5 Depth 7mm
4-M4 Depth 6mm
4-M3 Depth 6mm4-M3 Depth 6mm
CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com134
Manual Sw
ivel Stages (Goniometers)
Lubricant Type
Sample Model Number
Modification Cost Call Call
Clean Room1
Vacuum2
Optional Lubricant Exchange
1. Although clean room grease aids in the reduction of particulate output, a specific
cleanliness level cannot be guaranteed.
2. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be
guaranteed.
Manual Swivel Stages (Goniometers) / 50mm TableSide-Swivel, Brass Body, Dove-Tail Slide
SH05B-DH● Manual Swivel stages with the rotation axis oriented perpendicular to the table and located at the side.● Manual Swivel stages are fitted with Dove-Tail Slide guides.● Stage body is made of Brass and finished with a chromium mat plating.● Micrometer actuator type.
Model Number
Mirror Model Number
Table Size
Guide Mechanism
Angular Range
Work Distance
Rotation Center Play
Minimum Readout
Angular Motion
Load Capacity (Horizontal)
Moment Load Stiffness
Material
Finish
Weight
Actuator
0.72kg
Micrometer(13mm)
0.0048°,tan-1
(0.01 / 120)
50mm
Dove-Tail Slide
±3°
80mm±0.1mm
φ0.1mm / ±3°
SH05B-DH
SH05B-DH-R
0.239°, tan-1
(0.5 / 120) / Micrometer Revolution
3kg
4 arcsec / kgf-cm, Roll Direction
We offer custom products such as vacuum stages, clean room stages, and many other modifications.
SH05B-DH-C
SH05B-DH-R-C
SH05B-DH-V
SH05B-DH-R-V
Brass
Chromium Mat Plating
Specifications
Precision Positioning Stages
82
22
Micrometer Head
Clamp φ10
Rotation Center
4-for M4 screws
50
(138.5)
6
60
(21)
14
46.5
40
80
(62.5)
50 60
4-M2 Depth 5mm4-M3 Depth 5mm4-M3 Depth 5mm
133040
133040
Table matrix