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UNIVERSITAS INDONESIA MODEL MANAJEMEN …lib.ui.ac.id/file?file=digital/20313404-T31251-Model manajemen.pdf · DAFTAR PUSTAKA KUESIONER PENELITIAN 103 103 103 104 104 105 105 107
MEMS Mechanical Sensors · 5.6 Actuation Techniques 104 5.6.1 Electrostatic 104 5.6.2 Piezoelectric 107 5.6.3 Thermal 107 5.6.4 Magnetic 109 5.7 Smart Sensors 109 References 112 CHAPTER
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