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LPKF LDS Technology For Innovative MEMS Packaging

LPKF LDS Technology For Innovative MEMS Packaging · For Innovative MEMS Packaging. LDS technology is able to increase options for the layout: Inner and outer layers can be utilized,

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Page 1: LPKF LDS Technology For Innovative MEMS Packaging · For Innovative MEMS Packaging. LDS technology is able to increase options for the layout: Inner and outer layers can be utilized,

LPKF LDS Technology For Innovative MEMS Packaging

Page 2: LPKF LDS Technology For Innovative MEMS Packaging · For Innovative MEMS Packaging. LDS technology is able to increase options for the layout: Inner and outer layers can be utilized,

LDS technology is able to increase options for the layout: Inner and outer layers can be utilized, walls can be used as a circuit carrier and through-hole plating can be created in a cost-efficient and safe manner. The LDS method uses lasers to apply conductor structures onto plastic bodies, which are later chemically metallized. The process creates the smooth metal surfaces required for reliable assembly, even for gold finishes.

Ever smaller components require more and more precise connection technologies. This holds true

in particular for micro-electro-mechanical components (MEMS). Here, sensorics and processing

electronics are combined into extremely tight spaces.

3D Solutions for Compact Chip Stacking

LDS through-hole plating at a diameter of 240 μm (70° angle).

On the left through-hole plating created with injection molding,

on the right a hole drilled by laser. With certain plastic materials

through-hole plating is done directly as part of the laser process.

Page 3: LPKF LDS Technology For Innovative MEMS Packaging · For Innovative MEMS Packaging. LDS technology is able to increase options for the layout: Inner and outer layers can be utilized,

Easy stacking of dies due to three dimensional MEMS housing. LDS eliminates the traditional process of making bumps because these are made directly during the molding process. They are activated and plated together with the conductive tracks. A high packing density results from the slight pitch and the option of also using the outside of the housing or package for tracks.

Sensor and evaluation electronics combined: The 3D-LDS housing

carries the components in different levels (stacking) to ensure a

compact MEMS package

Changes to the circuit layout can be easily implemented by amending the path of the laser. LPKF LDS techno-logy thus opens up additional platform strategies for sensor packages. With suitable chip sets and circuit layouts, different products are developed on the basis of a common injection molded component. The LPKF LDS process allows assembly with unhoused chips, e. g., through wire bonding or flip-chip technology.

The LDS Process

Pressure sensor for industrial applications. The ASIC is integrated;

mechanical connections are part of the package (Manufacturer:

Harting AG)

3. Metallization is done with an

additive build-up of the tracks

typically up to 15 μm with the

help of electroless copper

baths.

4. In the final step the

dispensing of glue or solder

paste and the pick and place

of components are done with

innovative pick-and-place

systems.

2. A physical-chemical reaction,

induced by the laser, forms

metallic nuclei. These act

as a catalyst for reductive

copper plating. In addition to

activation, the laser creates a

microscopically rough surface

in which the copper is firmly

anchored during metallization.

1. The parts to be laser structured

are produced using 1-shot

injection molding with an LDS

thermoplastic or thermoset

grade. As an alternative, metal

parts can be prepared with LDS

PowderCoating, for even better

thermal conductivity.

Page 4: LPKF LDS Technology For Innovative MEMS Packaging · For Innovative MEMS Packaging. LDS technology is able to increase options for the layout: Inner and outer layers can be utilized,

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© LPKF Laser & Electronics AG, LPKF reserves the right to modify the specifications and other product information without giving notice. Systems and products supplied by LPKF and its subsidiaries are covered by valid or pending US and other foreign patents. Product names are only used for identification and could be trademarks or registered brand names of the companies involved.

Worldwide Support for Laser Direct StructuringWherever they are in the world, users of LPKF systems can be supported from our application centers in Germany, the USA, Japan and China. At these centers, users have access to LPKF’s extensive experience in laser material processing and the laser direct structuring process. User training for technical employees and special consulting services complete the offer from the world market leader in laser systems for structuring three-dimensional molded interconnect devices. LPKF will gladly provide application reports and further information on request.

LPKF Laser & Electronics AG sells and markets products and provides support in more than 50 countries. Find your local representative at www.lpkf.com.

Worldwide (LPKF Headquarters)

LPKF Laser & Electronics AG Osteriede 7 30827 Garbsen Germany

Phone +49 (5131) 7095-0 [email protected] www.lpkf.com

North / Central America

LPKF Laser & Electronics North America

Phone +1 (503) 454-4200 [email protected] www.lpkfusa.com

China

LPKF Tianjin Co., Ltd.

Phone +86 (22) 2378-5318 [email protected] www.lpkf.cn

Hong Kong

LPKF Laser & Electronics (Hong Kong) Ltd.

Phone +852-2545-4005 [email protected] www.lpkf.com

Japan

LPKF Laser & Electronics K.K. Japan

Phone +81 (0) 45 650 1622 [email protected] www.lpkf.jp

South Korea (Application Center)

LPKF Laser & Electronics Korea Ltd.

Phone +82 (31) 689 3660 [email protected] www.lpkf.com

The global LPKF network for service and distribution: Headquarters LPKF Group LPKF Distributors