EX200 High Energy Excimer Laser

The laser is an all metal/ceramic device and uses the most advanced design of a n y c o m m e r c i a l excimer laser.

Long gas lifetime Corona PreIonization On-Board Vacuum Pump Long life optics

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EX200

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High Power and High stability

The EX200 excimer laser is designed to provide high energy and high power laser performance for Pulsed Laser Deposition in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX200 provides the first cost effective high power excimer laser. The EX200 gives repetition rates to 125Hz with all excimer gases and F2 at 157nm: lower repetition rate versions are also available. The laser gives up to 180mJ output energy with KrF, and 115mJ with ArF. Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 18 million pulses to 50% energy on KrF and 8 weeks static gas lifetime.An industrial version gives longer gas lifetime. The laser is an all metal/ceramic device and uses the most advanced design of any commercial excimer laser. The laser of course includes standard features such as active thermal stabilization, constant power and energy control, automatic refill and automatic gas control. The laser can be completely controlled from a Windows 9x/2000/XP software package. An ActiveX is available for those wishing to write custom software for the laser, or to incorporate the laser into a larger software packages. PCI software control package is standard with the EX200 laser. Low cost of Ownership

The EX200 is designed for simple, low cost refurbishing and replacement of the laser chamber. This minimizes down time and maintains a low cost of ownership.

High efficiency discharge

Several models of the EX200 laser are available. The repetition rates available in EX200 are 60Hz and 125Hz. The 60Hz model is air cooled. The EX200 laser is designed to give high electrical to optical conversion efficiency. The high discharge efficiency reduces the load on the heat transfer sys-tem and allows air cooled operation at up to 60Hz. A optimized 15mJ high energy 157nm version is also available. Economical Operation

The EX200 is designed to allow simple and low cost replacement and refurbishment of the laser chamber. This gives minimal downtime for scien-tific and Industrial applications

Automatic Gas Handling

The EX200 uses one small cylinder of gas for up to 2 years of operation. No solid state Fluorine generators, no high temperatures, the EX200 operates for 109 pulses as supplied with one small tank of premix gas. When a gas refill is required the autofill software option replaces the gas fill in under 1 minute using the internal vacuum pump and halogen filter.

High Energy Excimer Laser

O p t i o n s

♦ Clean Room Package

♦ Unstable Resonator Optics

♦ EX200F Version 15mJ @ 157nm

The EX200 causing AIR BREAKDOWN at 40mJ, 193nm, with a stable Resonator

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Dimensions and electrical service

The EX200 gives high performance in a compact package. The laser is 120cm long. The entire laser is packaged in one computer controlled table top unit.

Dimensions: 120 X 44 X 30cm (L X W X H) Power Requirements: 60/125/250 Hz 95-240 VAC,8/15A,47/63Hz 208-240 VAC 10A 47/63 Hz Weight 65kg

GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

Email : Sales@ gamlaser.com Web : www.gamlaser.com

Copyright © 2005 GAM Laser Inc.,

Specifications

♦ A powerful high energy laser system in a compact package.

♦ Low divergence output

♦ Excellent Pulse to Pulse stability

♦ Low Jitter <2nS standard deviation

K e y B e n e f i t s

EX200 High Energy Excimer Laser

A F2 Optimized version b At Max. Voltage c typical d Full Width Half Max.

PARAMETER F2 ArF KrF XeCl XeF

Wavelength nm 157 193 248 308 351

Energy Max. mJ 10/15a 115 180 100 90

Average Power @ 60 Hz , Air cooled 0.4/0.7 6 10 5 4.5

Average Power @ 125 Hz 0.75/1.4 10 18 9 9

Average Power @ 250 Hz 1.5/2.5 18 35 17 17

Dynamic gas lifetime Pulses to 50% energy 10E7 15E6 18E6 25E6 20E6

Shelf life approx. to 50% energy 15 days 60 days 90 days 1 year 90 days

Pulse Length 18-23 nS b

Beam Size 11 X 6/7 mm

Stability < 2% Standard Deviation c

Divergence 0.8 X 1.2 mRad d

Cooling Air / Water