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Lecture 4. OUTLINE Semiconductor Fundamentals (cont’d) Properties of carriers in semiconductors Carrier drift Scattering mechanisms Drift current Conductivity and resistivity Reading : Pierret 3.1; Hu 1.5, 2.1-2.2. Mobile Charge Carriers in Semiconductors. - PowerPoint PPT Presentation
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Lecture 4
OUTLINE• Semiconductor Fundamentals (cont’d)
– Properties of carriers in semiconductors– Carrier drift
• Scattering mechanisms• Drift current
– Conductivity and resistivity
Reading: Pierret 3.1; Hu 1.5, 2.1-2.2
Mobile Charge Carriers in Semiconductors
• Three primary types of carrier action occur inside a semiconductor:
– Drift: charged particle motion under the influence of an electric field.
– Diffusion: particle motion due to concentration gradient or temperature gradient.
– Recombination-generation (R-G)
Lecture 4, Slide 2EE130/230A Fall 2013
Electrons as Moving Particles
F = (-q)E = moa F = (-q)E = mn*a
where mn* is the conductivity effective mass
In vacuum In semiconductor
Lecture 4, Slide 3EE130/230A Fall 2013
R.F. Pierret, Semiconductor Fundamentals, Figure 2.9
Conductivity Effective Mass, m*Under the influence of an electric field (E-field), an electron or a hole is accelerated:
electrons
holes
acceleration qE–mn---------=
*nm
qa
*pm
qa
Lecture 4, Slide 4
Si Ge GaAsmn*/mo 0.26 0.12 0.068
mp*/mo 0.39 0.30 0.50
mo = 9.110-31 kg
Electron and hole conductivity effective masses
EE130/230A Fall 2013
How to Measure the Effective Mass
Cyclotron Resonance Technique:
Centripetal force = Lorentzian force
• fcr is the Cyclotron resonance frequency, which is independent of v and r.
• Electrons strongly absorb microwaves of that frequency.
By measuring fcr , mn can be found.
qvBr
vmn 2
nm
qBrv
ncr m
qB
r
vf
22
C.Hu, Modern Semiconductor Devices for Integrated Circuits, Fig. 1-15
Lecture 4, Slide 5EE130/230A Fall 2013
Carrier Scattering• Mobile electrons and atoms in the Si lattice are always in
random thermal motion.– Electrons make frequent collisions with the vibrating atoms
“lattice scattering” or “phonon scattering” – increases with increasing T
• Other scattering mechanisms:– deflection by ionized impurity atoms– deflection due to Coulombic force between carriers
“carrier-carrier scattering” – only significant at high carrier concentrations
• The net current in any direction is zero, if no E-field is applied.
123
45
electron
Lecture 4, Slide 6EE130/230A Fall 2013
Thermal Velocity, vth
Average electron kinetic energy 2*
2
1
2
3thnvmkT
cm/s103.2m/s103.2
kg101.926.0
J/eV)106.1(eV026.033
75
31
19
*
nth m
kTv
Lecture 4, Slide 7EE130/230A Fall 2013
Carrier Drift• When an electric field (e.g. due to an externally applied voltage)
exists within a semiconductor, mobile charge-carriers will be accelerated by the electrostatic force:
12
3
45
electron
EElectrons drift in the direction opposite to the E-field net current
Because of scattering, electrons in a semiconductor do not undergo constant acceleration. However, they can be viewed as quasi-classical particles moving at a constant average drift velocity vdn
Lecture 4, Slide 8EE130/230A Fall 2013
Carrier Drift (Band Model)
Ec
Ev
Lecture 4, Slide 9EE130/230A Fall 2013
Electron Momentum• With every collision, the electron loses momentum
• Between collisions, the electron gains momentum–qEmn
mn ≡ average time between electron scattering events
dnnvm*
Lecture 4, Slide 10
Conservation of momentum |mn*vdn | = | qEmn|
EE130/230A Fall 2013
Carrier Mobility, |vdn| = qEmn / mn* ≡ nE
n [qmn / mn*] is the electron mobility
p [qmp / mp*] is the hole mobility
Similarly, for holes: |vdp|= qEmp / mp* pE
Lecture 4, Slide 11
Si Ge GaAs InAsn (cm2/Vs) 1400 3900 8500 30,000
p (cm2/Vs) 470 1900 400 500
Electron and hole mobilities for intrinsic semiconductors @ 300K
For electrons:
EE130/230A Fall 2013
Example: Drift Velocity Calculationa) Find the hole drift velocity in an intrinsic Si sample for E = 103 V/cm.
b) What is the average hole scattering time?
vdp = pE
q
m
m
q ppmp
p
mpp
*
*
Lecture 4, Slide 12
Solution:
a)
b)
EE130/230A Fall 2013
Mean Free Path• Average distance traveled between collisions
mpthvl
Lecture 4, Slide 13EE130/230A Fall 2013
Mechanisms of Carrier ScatteringDominant scattering mechanisms:
1. Phonon scattering (lattice scattering)2. Impurity (dopant) ion scattering
2/32/1
1
velocityermalcarrier thdensityphonon
1
TTTphononphonon
Phonon scattering limited mobility decreases with increasing T:
= q / m Tvth
Lecture 4, Slide 14EE130/230A Fall 2013
Impurity Ion Scattering
DADA
thimpurity NN
T
NN
v
2/33
There is less change in the electron’s direction if the electron travels by the ion at a higher speed.
Lecture 4, Slide 15
Ion scattering limited mobility increases with increasing T:
EE130/230A Fall 2013
Matthiessen's Rule
Probability that a carrier will be scattered by any mechanism
within a time period dt is
impurityphononimpurityphonon 111
111
i i
dt
i
dt
Lecture 4, Slide 16
• The probability that a carrier will be scattered by mechanism i
within a time period dt is
i ≡ mean time between scattering events due to mechanism i
EE130/230A Fall 2013
Mobility Dependence on DopingCarrier mobilities in Si at 300K
Lecture 4, Slide 17EE130/230A Fall 2013
Mobility Dependence on Temperature
impurityphonon 111
Lecture 4, Slide 18EE130/230A Fall 2013
Velocity Saturation• At high electric field, carrier drift velocity saturates:
The saturation velocity, vsat , is the maximum drift velocity
Lecture 4, Slide 19
Siin holesfor cm/s 106
Siin sonfor electr cm/s 1086
6
satv
J. Bean, in High-Speed Semiconductor Devices, S.M. Sze (ed.), 1990
EE130/230A Fall 2013
Hole Drift Current Density, Jp,drift
vdp t A = volume from which all holes cross plane in time t
p vdp t A = number of holes crossing plane in time t
q p vdp t A = hole charge crossing plane in time t
q p vdp A = hole charge crossing plane per unit time = hole current
Hole drift current per unit area Jp,drift = q p vdpLecture 4, Slide 20EE130/230A Fall 2013
R.F. Pierret, Semiconductor Fundamentals, Figure 3.3
Conductivity and Resistivity
Lecture 4, Slide 21
)( npdrift qnqpJ
)( ,, ndriftnpdriftp qnJqpJ
npdriftndriftpdrift qnqpJJJ ,,
• In a semiconductor, both electrons and holes conduct current:
np qnqp • The conductivity of a semiconductor is– Unit: mho/cm
1
• The resistivity of a semiconductor is– Unit: ohm-cm
EE130/230A Fall 2013
Resistivity Dependence on Doping
Lecture 4, Slide 22
For n-type material:
nqn 1
For p-type material:
pqp 1
Note: This plot (for Si) does not apply to compensated material (doped with both acceptors and donors).
EE130/230A Fall 2013
R.F. Pierret, Semiconductor Fundamentals, Figure 3.8
Electrical Resistance
where is the resistivity
Resistance Wt
L
I
VR [Unit: ohms]
V+ _
L
tW
I
uniformly doped semiconductor
Lecture 4, Slide 23EE130/230A Fall 2013
Example: Resistivity CalculationWhat is the resistivity of a Si sample doped with 1016/cm3 Boron?
Answer:
cm 4.1)450)(10)(106.1(
11
11619
ppn qpqpqn
Lecture 4, Slide 24EE130/230A Fall 2013
Example: Compensated Doping
cm 93.0)750)(109)(106.1(
11
11619
npn qnqpqn
Consider the same Si sample doped with 1016/cm3 Boron, and additionally doped with 1017/cm3 Arsenic. What is its resistivity?Answer:
Lecture 4, Slide 25EE130/230A Fall 2013
Example: T Dependence of
Consider a Si sample doped with 1017 As atoms/cm3. How will its resistivity change when T is increased from 300K to 400K?
93.1400
770
Lecture 4, Slide 26
Answer: The temperature dependent factor in (and therefore ) is n.
From the mobility vs. temperature curve for 1017 cm-3, we find that n decreases from 770 at 300K to 400 at 400K.
Thus, increases by
EE130/230A Fall 2013
Summary• Electrons and holes can be considered as quasi-classical
particles with effective mass m*
• In the presence of an electric field E, carriers move with average drift velocity vd = E , is the carrier mobility– Mobility decreases w/ increasing total concentration of ionized dopants – Mobility is dependent on temperature
• decreases w/ increasing T if lattice scattering is dominant• decreases w/ decreasing T if impurity scattering is dominant
• The conductivity () hence the resistivity () of a semiconductor is dependent on its mobile charge carrier concentrations and mobilities
Lecture 4, Slide 27
np qnqp 1
EE130/230A Fall 2013