LABORATORY WORK REPORT - Univerzita Karlova · PDF fileFaculty of Mathematics and Physics LABORATORY ... treatment have been proved as an effective artefact precaution. ... this parallax

Charles University in Prague

Faculty of Mathematics and Physics

LABORATORY WORK REPORT

Ondřej Zbytek

Development of new test methods for silicon laboratory, optical scanning system

Institute of Particle and Nuclear Physics

Supervisor: RNDr. Peter Kodyš, CSc.

Prague 2015

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Content

Content .................................................................................................................................................... 1

Task description and future acquisition ................................................................................................... 2

ConoScan 4000 ....................................................................................................................................... 3

Overall description .............................................................................................................................. 3

Parameters of the NanoConoProbe ..................................................................................................... 4

Holographic system principal .............................................................................................................. 4

Software .............................................................................................................................................. 5

Measurement guideline ........................................................................................................................... 6

Software installation and connection to PC ......................................................................................... 6

Sample preparation .............................................................................................................................. 8

Calibration ........................................................................................................................................... 9

The measurement .............................................................................................................................. 10

Reference results ................................................................................................................................... 13

Comparison to manufacturer results .................................................................................................. 13

System errors & possible solutions ................................................................................................... 21

Possible improvements ...................................................................................................................... 24

Discussion ............................................................................................................................................. 26

Summary ............................................................................................................................................... 26

Attachments ........................................................................................................................................... 27

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Task description and future acquisition

The task was to explore the usage of the ConoScan 4000 optical metrology system with a submicron accuracy. The focus was on the proper settings of the device, the connection to the computer, the sample preparation, the measurement guideline and mainly the reference result comparison.

The main goal was to achieve an ultra high definition 3D scan of a board (PCB) with a DEPFET detector in the same quality as the reference results sent by the manufacturer.1

This laboratory report should serve as a basic tutorial to run the device in various future applications. Such applications can be for instance micro PCB assembly, PCB sagging and bending tests, or on-board device flaw detections.

1 The manufacturer performed the reference scan with the same specimen of PCB/DEPFET board as was used during this work.

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ConoScan 4000

Overall description

The ConoScan 4000 together with the NanoConoProbe is a patented conoscopic holography 3 axis 3D scanner. Measurement of variety of materials can be done with this scanner, for instance metal, plastic, black rubber, electronic boards and bonding. With the ConoScan 4000, it is possible to investigate such parameters as precise diameters, angles, heights, holes and groove depths, radii and distances.

Fig. 1: ConoScan 4000 with NanoConoProbe

The specimen position adjustment in XY axis is realized by moving either the pad (Y axis) or the probe (X axis) with pc-controlled motors. Setting the probe in vertical axis is also done by servo motor, nevertheless a manual adjustment which extends the vertical range is available through the lock leverage (on the right side of the probe) as well. The ConoScan 4000 is also equipped with the top CCD orientation camera supported with illuminative LED diodes, which switch off automatically, when the scanning starts.

Scanning area X Y mm 160 x 150

Maximum object height mm 130

Maximum XY step size µm 3

Tab. 1: Parameters of the ConoScan 4000

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Parameters of the NanoConoProbe

Precision Z µm 1

Laser spot size µm 1

Working range mm 1

Standoff mm 15

Angular coverage mm 5

Thickness measurement – Physical Thickness max – min layer

mm 0.75 – 0.010

Tab. 2: Parametres of the NanoConoProbe

Holographic system principal

Manufacturer’s content citation:

Basics of conoscopic holography from http://www.optimet.co.il/our_technology.php

In classical holography, a hologram is created by recording an interference pattern formed between an object beam and a reference beam using a coherent light source. The two beams propagate at the same velocity (same refractive index), but follow different geometric paths. This means that when overlapped, the phase difference

between the two beams depends only on the geometric path difference. This phase difference is responsible for the creation of a measurable interference pattern that can later be used to reconstruct the original light field.

In conoscopic holography, however, a light beam that traverses an optically anisotropic crystal is split into two beams that share the same geometric path but have orthogonal polarization modes. The refractive indices of these two beams generally differ from each other. Therefore, after the two beams exit the crystal an interference pattern is generated. The features of this pattern depend on the distance from the light's source.

Since both beams propagate through the same geometric path, conoscopic holography is highly stable in comparison to interferometry-based measurement techniques. Moreover, it is also possible to perform measurements using incoherent light.

How does the sensor work?

The sensor emits an eye-safe laser beam, which is focused by an objective lens, and hits the specimen being measured. Part of the scattered light travels back from the specimen into the sensor, and enters the conoscopic unit that contains the optically anisotropic crystal. The resulting interference pattern is detected, and signal processing algorithms are then used to retrieve the distance information from the measured data.

“

”

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Fig. 2: Conoscopic holography technology – Path of the light inside the Optimet sensor

Software

The ConoScan 4000 is supplied with a scanning and scan viewing software. The work was conducted on a scanning software ConoScan4000 – Version 2.57.

Fig. 3: ConoScan 4000 scanning software

The scan analysis was conducted with supplied application – Viewer – Version 1.1.5.

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Measurement guideline

Software installation and connection to PC

The connection between the ConoScan and a computer is realized through the standard USB cable, however, the device is recognized as a network device connected through an ethernet adapter. Therefore, the ConoScan cannot be utilized as a plug-and-play device and the prerequisite alterations of settings have to be executed. The software was tested on Windows 7 - professional, 64bit operating system.

Installation process

1. The prerequisites pack has to be installed

a. The supplied pack: “Prerequisites 0.61.9.exe” has to be installed. During the installation it is necessary to install all the prerequisites including the camera, which is unchecked by default!

Fig. 4: Installation prerequisites

2. The scanning and viewing software has to be installed

a. The supplied pack “ConoScan 4000 2.57 Setup.exe” has to be installed.

3. The ConoScan 4000 scanner has to be connected to the PC through USB and powered on

4. The new network virtual adapter labelled “LAN 9500 USB to Ethernet 2.0 10/100 Adapter” will be recognised within the system.

a. It’s necessary to manually set the static IP address of this adapter to “1.2.3.9” and subnet mask: “255.255.255.0”

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Fig. 5: Network and Sharing Center, choose Change adapter settings

Fig. 6: Network Connections, open Properties of the proper connection

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Fig. 7: Click on Internet Protocol Version 4 (TCP/IPv4) and choose Properties.

Fig. 8: Setting the right address.

5. Now the system is ready to be used. The scanning application is labelled: “Optimet.ConoScan4000.exe” and can be found in software installation directory.

Sample preparation

The sample has to be as clean and dust-free as possible because even naked-eye-invisible impurities can cause false artefacts in the measurements. Handling the device and the sample in clean room regime together with preliminary pressurised air treatment have been proved as an effective artefact precaution.

The standoff distance (distance between the lens and the measured surface) is only 15 mm, thereupon, the measured sample is required to be without any vertical humps. This is important when the measurement is done and the probe returns to the parking position. During the parking process the probe

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can easily bump into the sample’s elevated points and easily damage the specimen.2 When is the sample cleaned and ready to scan, it should be placed on the scanning pad.

Fig. 9: ConoScan with DEPFET

Calibration

The ConoScan scanner is equipped with a digital camera which allows the user to select the area on the sample to scan. However, as the camera position is shifted relative to the probe position, the camera shows a parallax error. Consequently, this parallax error causes that the different area is scanned than the one which was selected by the user. Forthwith, the calibration to minimize the parallax error must occur prior to the measurement.

In theory the calibration process is performed semi-automatically where the known position of the control screw thread on the specimen plate is compared to the position on the image from the camera. When the position is automatically acquired the user manually corrects the parallax error by moving the specimen plate in the corresponding position.

Due to a software error the calibration process could not be performed. When the calibration process was initiated, the software displayed an internal error message (the error message wasn't retrieved) and consequently shut down the program. For this reason the calibration of the camera wasn’t performed.

In order to accomplish the proper measurement in the intended area even with a substantial camera parallax error a substitute method was used. As the laser light from the probe lays in the visible spectrum (655 nm), it is possible to physically see where the laser light shines during the measurement. Henceforth, the systematic shift caused by the parallax error of the camera can be manually corrected by moving the scanned area in the software accordingly (this method is described in the next chapter: The measurement).

2 The option not to park the probe in default position and leave the probe in the position, where the scanning was finished, wasn’t found in the software. This option, followed by the probe vertical retraction, would partially solve the problem.

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The measurement

In order to perform the measurement series of steps have to take place.

1. region to scan selection

2. probe vertical position setting/conoscopic signal adjustment

3. scanning settings

4. resolution settings

5. start scanning

6. scan evaluation

Region to scan selection

When the desired specimen is placed on the pad (as seen on Fig. 8) it is necessary to select the region the user wants to scan. This can be done in various ways.

In theory the best way is to create a region in the camera image which corresponds to intended scanned area. However, the camera shows parallax error which causes that other area is scanned then the one selected. This issue is described in previous chapter: Calibration.

Therefore, the most precise way to this is to create the region by using set current position buttons (1) and (2).

Fig. 10: Scanning program – probe signal window

To do that, the program has to be switched to probe mode (3). Than it is necessary to lower the probe in the height that the laser light coming from the probe is visible. The probe height (vertical Z position) is adjusted through manipulation buttons (4).

The probe and the pad has to be moved manually to the upper left corner of the intended scanning area. Than the button Set Current Position X (Start X/Y) (1) should be pressed.

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After pressing the button, the probe has to be moved to the lower right corner of the intended scanning area. Than the button Set Current Position (End X/Y) (2) should be pressed.

Consequently the button Create Region (5) needs to be pressed. Afterwards the accurate region is created even if parallax camera error is present.

Fig. 11: Scanning program – settings window

Probe vertical position setting/conoscopic signal adjustment

The next step after the successful region creation is to move the probe in the correct vertical position. This step is crucial, because only a very specific vertical position allows the scanning.

The key parameter is a standoff distance of the probe/lens (in this situation 15 mm). This is the approximate value which represents the distance from the probe lens to the scanned sample.

First the probe should be moved (either manually, or by clicking on the intended position in the camera image) to the area of the region which is the most valuable for the scan (for this work it was active area of DEPFET sensor).

Than the probe should be slowly lowered by buttons (4) until characteristic conoscopic signal appears in the probe signal field (6).

This conoscopic signal can be described as some kind of harmonic periodic function. The sign of finding the correct vertical position is sudden increment of signal to noise ratio (7) (over 500). Through the vertical adjustments of the probe the second harmonic (n-th harmonic) signal may appear. It is very important to distinguish the fundamental signal from the harmonic overtones. The example of the scan with the second harmonics can be found in Fig. 23 in results section.

Scanning settings

It is necessary to set the probe parameters before the scanning will happen. The key parameters are laser power (8), total minimum, total maximum and SNR minimum (9).

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The laser power setting (8) sets the power of the probe laser. The laser power should be set in such a way that a highest SNR is achieved. To low laser power causes that the signal is not strong enough, on the other hand, to powerful laser causes that the system is overloaded and can’t perform the scan properly. In both situations the SNR radically drops.

The total minimum, total maximum and SNR minimum (9) are parameters which filter the scanning data. The user can set with these parameters which points are evaluated as invalid. So for instance when the SNR drops below certain level, no points measured within this lowered SNR will be recorded.

Resolution settings

The resolution of the scan can be either selected from default presets (10) or by manually selecting both x (step along the line) a y (step between the line) resolution (11). Sometimes it is useful to change the Scanning Axis either because it returns better results or it is more convenient concerning the sample topography (possible probe/sample collisions).

Start scanning

When everything is set, the SCAN button (12) turns green and it is possible to start the scanning procedure. The program automatically switches to 3D viewer mode and a scanning progress bar appears.

Fig. 12: 3D viewer mode and a scanning progress bar

Scan evaluation

After scanning is completed the output files are created within default directory (C:\ProgramData\Optimet\ConoScan 4000\Sessions). These files can be further analysed by various software.

The default outcome is in txt files with all the measured points, 3D high density point cloud file, and job 2D file. In the following chapter - Reference results, all the images come from job files processed by Optimet Viewer software.

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Reference results

Comparison to manufacturer results

The reference measurement by Optimet - the manufacturer of the ConoScan4000 was conducted on a PCB board with DEPFET detector. The same specimen was used for repeated results.

Fig. 13: The PCB board with DEPFET sensor

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Fig. 14: DEPFET sensor detail

Fig. 15: Visible red dot of laser while scanning the DEPFET sensor

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There are optical elements on the DEPFET sensor in focus during the first measurement. Manufacturer’s scan resolution is 5x25 µm and the repeated scan resolution is 4.5x4.5 µm.

Fig. 16: Measurement 1 – manufacturer’s results (resolution 5x25 µm)

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Fig. 17: Measurement 1 – repeated results (resolution 4.5x4.5 µm)

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The second measurement shows, what can be measured, when focusing on a small area.

Fig. 18: Measurement 2 – manufacturer’s results (resolution 5x25 µm)

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Fig. 19: Measurement 2 – Repeated results (resolution 4.5x4.5 µm), Z axis in mm

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The first measurement was also captured with different scan resolutions.

Fig. 20: Measurement 1 – repeated results – scan resolution 12x12 µm, XY scanned area 7.0x6.0 mm

Fig. 21: Measurement 1 – repeated results – scan resolution 9x9 µm, XY scanned area 7.0x6.0 mm

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Fig. 22: Measurement 1 – repeated results – scan resolution 7.5x7.5 µm, XY scanned area 6.4x3.6 mm

Fig. 23: Measurement 1 – repeated results – scan resolution 4.5x4.5 µm, XY scanned area 6.4x5.4 mm

Fig. 24: The 2nd harmonic conoscopic signal

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System errors & possible solutions

The ConoScan 4000 system exhibits system errors which aren’t computer specific. Here is the list and description of the errors and a possible solution if known:

Camera parallax error

Issue:

The ConoScan scanner is equipped with a digital camera which allows the user to select the area on the sample to scan. However, as the camera position is shifted relative to the probe position, the camera exhibits a parallax error. Consequently, this parallax error causes that the different area is scanned than the one which was selected by the user. Forthwith, the calibration to minimize the parallax error must occur prior to the measurement.

Possible solution:

Functional calibration option, which would allow to shift the position of the probe accordingly.

Auto power error

Issue:

When the auto laser power button is clicked, the program returns error (Fig. 24) and shuts down.

Fig. 25: Auto power error

Unhandled exception thrown. Successfully logged to: Regular Critical. Details ======= Source: Optimet.Common.Smart Exception message: Communication problem: WaitAndReceivePacket() failed.

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Stack trace: at Optimet.Common.Smart.Smart.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartInternal.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartProxy.GetSingleMeasurement() at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaserPower(UInt16 minTunedParameterValue, UInt16 maxTunedParameterValue, UInt16 minTotal, UInt16 maxTotal, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.Set(UInt16 minTotal, UInt16 maxTotal, UInt16 minPower, UInt16 maxPower, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaser(Boolean doFineTuning, Boolean oneStepOnly) at Optimet.ProbeAutoTuning.SinglePointProbeAutoTuner.FindTuningParametersValues() at Optimet.SmartProbeControlsFactory.ProbeControlsPane.RunAutoLaser() at System.Threading.ThreadHelper.ThreadStart_Context(Object state) at System.Threading.ExecutionContext.Run(ExecutionContext executionContext, ContextCallback callback, Object state) at System.Threading.ThreadHelper.ThreadStart()

Log 1: Auto power error – Critical failure log

Fig. 26: Auto power error – non responsive program

Scanning progress bar inadequacy error

Issue:

When the scanning is performed, the time left is not proportional to progress bar which should indicate how far the scanning is.

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Electromotoric Z axis movement error

Issue:

When the probe is instructed to move down (both 10 and 100 µm) or up (both 10 and 100 µm) sometimes (randomly) the probe suddenly starts returning to the most upper position (even when the probe is instructed to go down).

Fig. 27: Electromotoric Z axis movement error

Probe signal error

Issues:

During the measurement preparatory phase the probe suddenly ceases to send the signal to the scanning software. Therefore it’s not possible to correctly set the height, power, and other parameters. The error can be solved by restarting the program.

Electromotoric z axis permanent error

Issue:

During the setting of probe position in z axis (distance from the sample) the servomotors sometimes stop to respond and it is no longer possible to adjust the height of the probe. This failure is more severe than the previous ones because only the complete restart both of the whole ConoScan device and the software helps.

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Possible improvements

The following list describes the possibilities of software improvements which would make the scanning and scan viewing much more user effective and comfortable.

Probe after measurement parking

Problematic situation:

The standoff of the probe is very low (15 mm) and therefore when the measurement is done and the probe returns to the parking position, the probe can easily bump into the sample’s elevated points and easily damage the specimen.

Possible solution:

The problem would be solved by adding the option to leave the probe in the position where the scanning was finished. This option, followed by the probe vertical-only retraction could solve the problem.

Probe z parameter setting


The supplied scanning software offers only graphical setup (moving a slider with a mouse) of the z parameter (height/vertical distance of the probe). Therefore it’s not possible to precisely set the height and repeat the measurement in the same distance from the sample. Moreover, the mouse setting of sub micron precision of the probe is very impractical and nearly impossible when specific value is needed.

Possible solution:

Adding a value box, where the user would enter required precise vertical distance (instead of mouse moving the slider), would completely solve the issue.

Camera zoom


When selecting the region to scan, it’s highly problematic to zoom the camera to required region. When scanning detailed PCB boards it’s impossible to make a precise region selection without a precise camera zoom. No zoom tool is present and the only adjustment is done with middle mouse wheel, however, it is not possible to control what area will be zoomed in this way.

Possible solution:

Adding a simple standard zoom tool, which would allow user to select the area to zoom, would solve the problem.

Region respacing


When the region to scan is created, it’s not possible to resize the region. This is very impractical because sometimes it would be useful to only edit the existing region rather than creating the new one.

Possible solution:

Adding a simple setting box, where the diameters of the regions could be altered, would solve the issue.

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Active elements positioning


The program offers setting of multiple variables, however, it is not easy to access the elements which set the variables. The whole program design can be compared to a table where certain sections are present as single table cells. Therefore it is necessary to resize the cells to access one category of elements (such as probe Z parameter setting) but that cause simultaneous hiding the other category of elements (such as probe signal).

Possible solution:

Redesigning (or at least upgrading the design) the program. The simplest way to resolve this issue is to implement window sliders in each section. That would make the work with the program much more comfortable and time efficient (section rescaling is very time consuming).

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Discussion

Overall commentary:

The device was confirmed to exhibit parameters and the results were successfully repeated. The ConoScan 4000 is a valuable apparatus which offers a very different type of topographic measurement than any other known method.

The quality of the measurement itself is very high and the ConoScan 4000 is very well crafted machine. On the other hand, the handling software is not suitable for applications that the device itself is capable of (as regarded in the previous chapters System errors & possible solutions and Possible improvements).

For instance, it is not possible to easily repeat the measurement and it is nearly impossible to automatize the whole process. It will be very helpful if the device could be operated externally through command line, predefined scripts and algorithms. As far as the manufacturer tells, the probe itself (NanoConoProbe) is capable of such controlling, however the ConoScan software is not.

Therefore, I would suggest contacting the manufacturer in order to adjust software in an intended way. A multiplatform software (instead of Windows only support) would open a lot of future possibilities.

Measurement commentary:

During the measurement of the sample PCB with DEPFET sensor a discrepancy in measured height appeared. The same region of bonds was measured by both manufacturer and me, but different heights were measured. The manufacturer measured an average height of the bond of 14 µm, however the highest height measured in the laboratory was only 10.5 µm. I haven’t found out why different heights were measured.

Summary

The main task to repeat the manufacturer’s results was accomplished. All the other side goals such as exploration and description of the ConoScan 4000 manipulation, pc connection, software handling or identifying the errors and possible improvements within the system, were accomplished as well.

The ConnoScan 4000 declared accuracy was achieved. During the repeated measurements, even sub micron accuracies were achieved (see table 3).

Different vertical profiles of the same PCB board with DEPFET sensor were measured by manufacturer and the author of this lab report (see table 4). However, it was not concluded where this discrepancy emerged from.

accuracy in vertical axis from product flyer

accuracy in vertical axis achieved during reference results

accuracy in vertical axis achieved during repeated results

1 µm 1 µm 0.1 µm

Tab. 3: Device accuracies

Manufacturer results average bonds height Repeated results maximal bonds height

14 µm ± 0.1 µm 10.5 µm ± 0.1 µm

Tab. 4: Bond heights

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Attachments

Critical failures logs

Critical failure log 1

23/03/2015 15:11:41: System.ArgumentException: Can't set active lens to "85". The specified lens index -1 in not in the range [0..1]. at Optimet.Scanning.ScannerSimple.SetActiveLens(String lens) at Optimet.Scanning.ScannerSimple.SetMaterial(Material material) at Optimet.Scanning.ScannerSimple.ScanRegion(ScannerRegionBase scanRegion, ICalibrationData calibrationData, Boolean inCalibration) at Optimet.Scanning.ScannerSimple.ScanRegion(ScannerRegionBase scanRegion) at Optimet.Framework.Scanning.ScanActionScanRegionOrthogonal.ExecuteScan() at Optimet.Framework.ScanActionScanRegion.ExecuteInternal() at Optimet.Common.Utils.ActionResourceLock.DoExecute() at Optimet.Common.Utils.ActionBase.Execute() at Optimet.DentalScanner.GuiControls.Orthogonal.ScanCurvature(RectangleF rectangleF, ScanAxis axis, String prefixFileName) at Optimet.DentalScanner.GuiControls.Orthogonal.ux_buttonHorizontalCurvature_Click(Object sender, EventArgs e) at System.Windows.Forms.Control.OnClick(EventArgs e) at System.Windows.Forms.Button.OnClick(EventArgs e) at System.Windows.Forms.Button.OnMouseUp(MouseEventArgs mevent) at System.Windows.Forms.Control.WmMouseUp(Message& m, MouseButtons button, Int32 clicks) at System.Windows.Forms.Control.WndProc(Message& m) at System.Windows.Forms.ButtonBase.WndProc(Message& m) at System.Windows.Forms.Button.WndProc(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.OnMessage(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.WndProc(Message& m) at System.Windows.Forms.NativeWindow.Callback(IntPtr hWnd, Int32 msg, IntPtr wparam, IntPtr lparam) 23/03/2015 15:15:24: System.Exception: Can't start new scan. Another scan is not finished. at Optimet.Scanning.ScannerSimple.ScanRegion(ScannerRegionBase scanRegion, ICalibrationData calibrationData, Boolean inCalibration) at Optimet.Scanning.ScannerSimple.ScanRegion(ScannerRegionBase scanRegion) at Optimet.Framework.Scanning.ScanActionScanRegionOrthogonal.ExecuteScan() at Optimet.Framework.ScanActionScanRegion.ExecuteInternal() at Optimet.Common.Utils.ActionResourceLock.DoExecute() at Optimet.Common.Utils.ActionBase.Execute() at Optimet.DentalScanner.GuiControls.Orthogonal.ScanCurvature(RectangleF rectangleF, ScanAxis axis, String prefixFileName) at Optimet.DentalScanner.GuiControls.Orthogonal.ux_buttonVerticalCurvature_Click(Object sender, EventArgs e) at System.Windows.Forms.Control.OnClick(EventArgs e) at System.Windows.Forms.Button.OnClick(EventArgs e) at System.Windows.Forms.Button.OnMouseUp(MouseEventArgs mevent) at System.Windows.Forms.Control.WmMouseUp(Message& m, MouseButtons button, Int32 clicks) at System.Windows.Forms.Control.WndProc(Message& m) at System.Windows.Forms.ButtonBase.WndProc(Message& m)

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at System.Windows.Forms.Button.WndProc(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.OnMessage(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.WndProc(Message& m) at System.Windows.Forms.NativeWindow.Callback(IntPtr hWnd, Int32 msg, IntPtr wparam, IntPtr lparam)


23/03/2015 15:22:25: System.Exception: Can't start scan, region is out of range. at Optimet.Scanning.ScannerSimple.ScanRegion(ScannerRegionBase scanRegion, ICalibrationData calibrationData, Boolean inCalibration) at Optimet.Scanning.ScannerSimple.ScanRegion(ScannerRegionBase scanRegion) at Optimet.Framework.Scanning.ScanActionScanRegionOrthogonal.ExecuteScan() at Optimet.Framework.ScanActionScanRegion.ExecuteInternal() at Optimet.Common.Utils.ActionResourceLock.DoExecute() at Optimet.Common.Utils.ActionBase.Execute() at Optimet.DentalScanner.GuiControls.Orthogonal.ScanCurvature(RectangleF rectangleF, ScanAxis axis, String prefixFileName) at Optimet.DentalScanner.GuiControls.Orthogonal.ux_buttonHorizontalCurvature_Click(Object sender, EventArgs e) at System.Windows.Forms.Control.OnClick(EventArgs e) at System.Windows.Forms.Button.OnClick(EventArgs e) at System.Windows.Forms.Button.OnMouseUp(MouseEventArgs mevent) at System.Windows.Forms.Control.WmMouseUp(Message& m, MouseButtons button, Int32 clicks) at System.Windows.Forms.Control.WndProc(Message& m) at System.Windows.Forms.ButtonBase.WndProc(Message& m) at System.Windows.Forms.Button.WndProc(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.OnMessage(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.WndProc(Message& m) at System.Windows.Forms.NativeWindow.Callback(IntPtr hWnd, Int32 msg, IntPtr wparam, IntPtr lparam)


3/23/2015 4:11:25 PM: Optimet.Common.Smart.SmartException: Communication problem: WaitAndReceivePacket() failed. at Optimet.Common.Smart.Smart.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartInternal.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartProxy.GetSingleMeasurement() at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaserPower(UInt16 minTunedParameterValue, UInt16 maxTunedParameterValue, UInt16 minTotal, UInt16 maxTotal, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.Set(UInt16 minTotal, UInt16 maxTotal, UInt16 minPower, UInt16 maxPower, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaser(Boolean doFineTuning, Boolean oneStepOnly) at Optimet.ProbeAutoTuning.SinglePointProbeAutoTuner.FindTuningParametersValues() at Optimet.SmartProbeControlsFactory.ProbeControlsPane.RunAutoLaser() at System.Threading.ThreadHelper.ThreadStart_Context(Object state) at System.Threading.ExecutionContext.Run(ExecutionContext executionContext, ContextCallback callback, Object state) at System.Threading.ThreadHelper.ThreadStart()

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23/03/2015 16:32:09: System.ArgumentException: Distance must be bigger than zero. at devDept.Eyeshot.Camera.set_Distance(Double value) at devDept.Eyeshot.Viewport.ZoomCamera(Point mousePos, Int32 dy) at devDept.Eyeshot.Viewport.OnMouseWheel(MouseEventArgs e) at System.Windows.Forms.Control.WmMouseWheel(Message& m) at System.Windows.Forms.Control.WndProc(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.OnMessage(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.WndProc(Message& m) at System.Windows.Forms.NativeWindow.Callback(IntPtr hWnd, Int32 msg, IntPtr wparam, IntPtr lparam) 23/03/2015 16:32:32: System.ArgumentException: Distance must be bigger than zero. at devDept.Eyeshot.Camera.set_Distance(Double value) at devDept.Eyeshot.Viewport.ZoomCamera(Point mousePos, Int32 dy) at devDept.Eyeshot.Viewport.OnMouseWheel(MouseEventArgs e) at System.Windows.Forms.Control.WmMouseWheel(Message& m) at System.Windows.Forms.Control.WndProc(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.OnMessage(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.WndProc(Message& m) at System.Windows.Forms.NativeWindow.Callback(IntPtr hWnd, Int32 msg, IntPtr wparam, IntPtr lparam)


24/03/2015 09:03:51: System.ArgumentException: Distance must be bigger than zero. at devDept.Eyeshot.Camera.set_Distance(Double value) at devDept.Eyeshot.Viewport.ZoomCamera(Point mousePos, Int32 dy) at devDept.Eyeshot.Viewport.OnMouseWheel(MouseEventArgs e) at System.Windows.Forms.Control.WmMouseWheel(Message& m) at System.Windows.Forms.Control.WndProc(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.OnMessage(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.WndProc(Message& m) at System.Windows.Forms.NativeWindow.Callback(IntPtr hWnd, Int32 msg, IntPtr wparam, IntPtr lparam) 3/24/2015 10:10:25 AM: Optimet.Common.Smart.SmartException: Communication problem: WaitAndReceivePacket() failed. at Optimet.Common.Smart.Smart.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartInternal.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartProxy.GetSingleMeasurement() at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaserPower(UInt16 minTunedParameterValue, UInt16 maxTunedParameterValue, UInt16 minTotal, UInt16 maxTotal, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.Set(UInt16 minTotal, UInt16 maxTotal, UInt16 minPower, UInt16 maxPower, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaser(Boolean doFineTuning, Boolean oneStepOnly) at Optimet.ProbeAutoTuning.SinglePointProbeAutoTuner.FindTuningParametersValues() at Optimet.SmartProbeControlsFactory.ProbeControlsPane.RunAutoLaser() at System.Threading.ThreadHelper.ThreadStart_Context(Object state) at System.Threading.ExecutionContext.Run(ExecutionContext executionContext, ContextCallback callback, Object state)

30

at System.Threading.ThreadHelper.ThreadStart()


3/24/2015 10:29:38 AM: Optimet.Common.Smart.SmartException: Communication problem: WaitAndReceivePacket() failed. at Optimet.Common.Smart.Smart.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartInternal.GetSingleMeasurement() at Optimet.Common.SmartHelper.SmartProxy.GetSingleMeasurement() at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaserPower(UInt16 minTunedParameterValue, UInt16 maxTunedParameterValue, UInt16 minTotal, UInt16 maxTotal, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.Set(UInt16 minTotal, UInt16 maxTotal, UInt16 minPower, UInt16 maxPower, UInt16 step, Boolean checkNearToMinOrMaxPower) at Optimet.ProbeAutoTuning.LaserTuner.AutoTuneLaser(Boolean doFineTuning, Boolean oneStepOnly) at Optimet.ProbeAutoTuning.SinglePointProbeAutoTuner.FindTuningParametersValues() at Optimet.SmartProbeControlsFactory.ProbeControlsPane.RunAutoLaser() at System.Threading.ThreadHelper.ThreadStart_Context(Object state) at System.Threading.ExecutionContext.Run(ExecutionContext executionContext, ContextCallback callback, Object state) at System.Threading.ThreadHelper.ThreadStart()


24/03/2015 10:40:23: Optimet.Common.Smart.SmartException: Bad response: Received command is not ACK or bad sequence counter in received command. at Optimet.Common.Smart.Smart.GetLens(Int32 index) at Optimet.Common.SmartHelper.SmartInternalBase.GetLens(Int32 index) at Optimet.Common.SmartHelper.SmartInternal.GetLens(Int32 index) at Optimet.Common.SmartHelper.SmartInternalBase.GetLensCached(Int32 index) at Optimet.Common.SmartHelper.SmartProxy.GetLensCached(Int32 index) at QC_Scanner.DefineQCObjectPane.InitFilter() at QC_Scanner.DefineQCObjectPane.InitScannerSettingsControl(Boolean newObjectRequested) at QC_Scanner.DefineQCObjectPane.m_canvasHandler_OnSelectionChanged(Object sender, IHasID entity) at Optimet.Common.Interfaces.GenericEventHandler`1.Invoke(Object sender, T entity) at Optimet.Framework.InterfaceWrapper.<>c__DisplayClass2.<DataModelOnSelectionChanged>b__0() at Optimet.ClientApplicationFramework.FormAPI.InvokeOnGuiThread(ThreadStart func) at Optimet.Framework.InterfaceWrapper.DataModelOnSelectionChanged(Object sender, IHasID entity) at Optimet.Common.Interfaces.GenericEventHandler`1.Invoke(Object sender, T entity) at Optimet.Common.Utils.System.ObjectDataModel`1.FireOnSelectionChanged(Object sender, IHasID obj) at Optimet.Common.Utils.System.ObjectDataModel`1.HandleSelectionChanged(IHasID selected) at Optimet.Framework.CanvasHandler.HandleSelectionChanged(IHasID selected) at Optimet.DentalScanner.Video.ScanCanvasEngineBase.CanvasHandlerOnChildAdded(IHasIDContainer entity, IHasID child) at Optimet.DentalScanner.Video.ScanCanvasEngineBase.CanvasHandlerOnChildrenAdded(IHasIDContainer parent, IEnumerable`1 entities)

31

at Optimet.Framework.InterfaceWrapperRegions.<>c__DisplayClass1f.<RegionsOnAdded>b__1c() at Optimet.ClientApplicationFramework.FormAPI.InvokeOnGuiThread(ThreadStart func) at Optimet.Framework.InterfaceWrapperRegions.RegionsOnAdded(IHasIDContainer parent, IEnumerable`1 entities) at Optimet.Common.Interfaces.OnEntityActionEventHandler`1.Invoke(IHasIDContainer parent, IEnumerable`1 entities) at Optimet.Common.Utils.System.ListNotifier`3.FireOnAdded(T[] added) at Optimet.Common.Utils.System.ListNotifier`3.Add(T item) at Optimet.Framework.ObjectsConstructor.AddRegion(ScanObject parent, IScannerRegionProps props, ToolKind toolKind) at Optimet.Framework.CreateManagerDefault.AddScan(ScanObject parent, IScannerRegionProps props, ToolKind kind) at Optimet.Framework.ObjectManager.AddRegion(ScanObject obj, IScanObjectProperties props) at Optimet.Framework.ObjectManager.CanvasHandlerCreateRegionRequest(Object sender, EventArgs e) at Optimet.Framework.CanvasHandler.HandleCreateRegionRequest() at Optimet.DentalScanner.Video.ScanCanvasEngineBase.NewRectangleRegionCreateRequest() at Optimet.DentalScanner.Video.ScanCanvasEngineBase.HandleMouseDownOutOfRegion() at Optimet.DentalScanner.Video.ScanCanvasEngineBase.Canvas_MouseDown(Object sender, MouseEventArgs e) at System.Windows.Forms.Control.OnMouseDown(MouseEventArgs e) at System.Windows.Forms.UserControl.OnMouseDown(MouseEventArgs e) at System.Windows.Forms.Control.WmMouseDown(Message& m, MouseButtons button, Int32 clicks) at System.Windows.Forms.Control.WndProc(Message& m) at System.Windows.Forms.ScrollableControl.WndProc(Message& m) at System.Windows.Forms.ContainerControl.WndProc(Message& m) at System.Windows.Forms.UserControl.WndProc(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.OnMessage(Message& m) at System.Windows.Forms.Control.ControlNativeWindow.WndProc(Message& m) at System.Windows.Forms.NativeWindow.Callback(IntPtr hWnd, Int32 msg, IntPtr wparam, IntPtr lparam) 3/24/2015 10:40:36 AM: System.NullReferenceException: Object reference not set to an instance of an object. at Optimet.Common.SmartHelper.SmartProxy.StopMeasuring() at Optimet.Scanning.AcquisitionThread.StopAcquisition(Boolean hardStop) at Optimet.Scanning.AcquisitionThread.ThreadBody(Object startPosition) at System.Threading.ThreadHelper.ThreadStart_Context(Object state) at System.Threading.ExecutionContext.Run(ExecutionContext executionContext, ContextCallback callback, Object state) at System.Threading.ThreadHelper.ThreadStart(Object obj)


24/03/2015 14:28:42: System.OutOfMemoryException: Exception of type 'System.OutOfMemoryException' was thrown. at Steema.TeeChart.Styles.ValueList.IncrementArray() at Steema.TeeChart.Styles.ValueList.InsertChartValue(Int32 valueIndex, Double value) at Steema.TeeChart.Styles.Series.Add(Double x, Double y) at Steema.TeeChart.Styles.Series.Add(Double value) at Steema.TeeChart.Styles.Series.Add(IList list)

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at Optimet.GuiControlsBase.SimpleChartDataRenderer.UpdateChart(Int32 seriesIndex, Int16[] values) at Optimet.ProbeDataProcessors.SimpleRawDataRenderer.UpdateMeasurementData(Int16[][] data) at Optimet.ProbeDataProcessors.SimpleRawDataRenderer.ProcessDataInternal(MeasurementInput inputData) at Optimet.Common.SmartHelper.ProbeDataProcessorRendererBase`1.<>c__DisplayClass2.<ProcessData>b__0()

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