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WESTFÄLISCHERHEINISCH-
AACHEN
TECHNISCHEHOCHSCHULE
Kick-off meeting, Villingen 18.08.2004
A. Heinrici, P. Haring Bolívar, H. KurzInstitut für Halbleitertechnik, RWTH Aachen, Germany
ATHOS – media tester developmentATHOS – media tester development
Institute of Semiconductor Electronics, RWTH Aachen
ContentsContents
Role of RWTH in ATHOS Deliverables and milestones Time schedule Current work Open discussion points
Institute of Semiconductor Electronics, RWTH Aachen
Role of RWTH in ATHOSRole of RWTH in ATHOS
Substrate and disk development (WP4) Task 4.5 Characterization and optimization of the disc assembly
(with LETI&MPO)
Media testing (WP7) Task 7.2: Scattering analysis of media Task 7.3: Holographic media tester (with Optimal/BU) Task 7.4: Holographic testing of media
Institute of Semiconductor Electronics, RWTH Aachen
Deliverables & MilestonesDeliverables & Milestones
D22 (month 12) Dedicated tester for holographic media analysis at 408nm
M19 (month 24)Detailed performance inter-comparison of media manufactured at LETI and MPO,
using Aprilis and InPhase materials to concentrate further development.
M20 (month 24)Characterization of flat media (without tracking structure) manufactured with
different materials M21 (month 36)Final evaluation of fundamental
characteristics of structured media
Institute of Semiconductor Electronics, RWTH Aachen
Time scheduleTime schedule
Official planning:
First priority is holographic tester Planned schedule: working setup by Feb 2005
Month N° 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36Workpackage Title
WP 7 Media tester
7.1 Standard optical characterization
7.2 Scattering analysis
7.3 Holographic media tester
7.4 Testing of fundamental media characteristics
Institute of Semiconductor Electronics, RWTH Aachen
Holographic media testerHolographic media tester
Detailed planning is actually performed in close cooperation with Optimal Optik (Gábor Szarvas)
Start at 532nm (5W DPSS laser) and then 408nm
laser 1
mirror 1
shutter 1
semitransparent mirror
detector
λ/2 plate
microscope objective
pinhole
achromatic doublet
PBS prism
shutter 2
λ/2 plate
mirror 2
Cr mask
Writing Fourier objective
reference aperture
reference
lens
data carrier
Beam stop
relay lens
CCD/CMOS detector array
Adjustable components
(Computer controlled)
Reading Fourier objective
Intermediate image plane
Reference arm
Scheme of tester
(by Optimal Opt.)
Institute of Semiconductor Electronics, RWTH Aachen
RequirementsRequirements
Transmission and reflection Shift multiplexing and angle multiplexing + phase!! 532nm and 405nm
Writing Fourier objective NT30-941
Reading Fourier objective, NT30-941
Chromium mask
Beam stop
Substrate+ storage layer
Institute of Semiconductor Electronics, RWTH Aachen
Interference analysisInterference analysis
Tests with large area interference setup
X
I
1
2
P = / (2 s in ( ) )
Institute of Semiconductor Electronics, RWTH Aachen
Examples of interference patterns on photoresist (2)Examples of interference patterns on photoresist (2)
Institute of Semiconductor Electronics, RWTH Aachen
Open issuesOpen issues
General issues: Reflection geometry for media tester: When will first reflection
disks be available? Is angle multiplexing best option for quantifying shrinkage? Phase stability of DLP devices? Disadvantages of LC-array? Blue laser by Toptica? When? Characteristics Scattering sensitivity of disks? Storage requirements? Spectral
dependencies? Material specs (InPhase tapestry 3000?) intensity specs for
detection array?