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Introduction
Chapter - IIntroduction
1.1 Semiconductors and Metal oxidesThe last 60 years or so have been shaped by the silicon age. The expression information
age is a misnomer really, as it would not have materialized without silicon and other
semiconducting materials. The first transistor device, or crystal triode, was invented in
the Bell labs in 1947. Unbeknown to many, it was built using Germanium, a
semiconductor.
The semiconductor industry is still a main driver of today’s innovations. A life
without semiconductors is unimaginable today: no information highway, no cell
phones, no personal computers and no satellites, to name a few. Besides silicon, which
has been the ultimate material for being a semiconductor for the last 60 years, scientists
have turned their efforts towards other materials to fulfill the needs of various
applications. It is a little known fact that the semiconducting properties of zinc oxide
(ZnO) were already discovered in the 1920’s. Based on this fact, they had put effort to
study the semiconducting properties of various metal oxides.
Comparing with the simple semiconductors, the electrical properties of oxides
show certain characteristic features. One is the metal – insulator transition, in which at a
certain temperature or pressure, an insulator turns into metal. The word transition is
usually used even when this change occurs at a certain composition. This phenomenon
has attracted much attention and was the most popular research theme before high-
temperature superconductivity exploded onto the scene. The mechanism of the
transition is not simple and the phenomenon itself seems to become more and more
complex as research progresses.
Another characteristic feature of oxide conductivity is a temperature dependance
of resistivity that is stronger than T4. This is mostly due to scattering by optical phonons
but for certain transition element oxides, such as cuprates, electron-electron scattering is
not negligible. In transition metal oxides, the conduction bands are mostly formed with
oxygen 2p and metal d-orbitals. The s-electrons enter into deeper bonding orbitals. The
oxygen orbitals are usually located lower in energy, which leads to the observed
2
ionicity. At the same time the directionality of the p and d – orbitals and the strong
coulomb interaction in the d – orbital cloud manifest more directly in the transport
phenomena, whereas in the simple metals, s – orbitals are the main constituent of the
conduction band. Apart from these, many features are there when oxides are considered
than the elemental semiconductors. They are,
➢ The ionicity is large and even infrared absorption is observed
➢ Distribution of conduction electron of the oxides occupy only part of the
material and sometimes the average density has no meaning
➢ Carrier density covers wide range and in some cases it may be much smaller
than the metals
➢ In oxides the main impurity is not other elements but an excess or insufficiency
in the constituent element itself which occurs as a deviation from stoichiometric
composition
There are many good conductors among oxides. Phenomenologically they are
classified into the following groups [1].
➢ Metallic conductors in which a deviation from the stoichiometric composition is
essential to have metallic conductivity. For example SnO2, In2O3, CdIn2O4,
Zn2SnO4, Cd2SnO4, etc.
➢ Normal metallic conductors which show metallic conductivity in their
stoichiometric compositions. Examples for these types are ReO3, TiO, SrCrO3,
RuO2, OsO2, MoO2, WO2, etc.
1.2 Multi-component Metal oxide semiconductorsMulti-component metal (multication) oxide semiconductors are of interest for many
device application and fundamental research. They have high luminous transmittance,
wide bandgap, good electrical conductivity, excellent substrate adherence, hardness and
chemical inertness. Therefore they are frequently used in variety of opto-electronic
devices. To have favorable characteristics of a wide-gap semiconductors, two necessary
conditions are to be satisfied. The first is to restore high mobility of electrons in the
conduction band. Most of the electrical insulators are truly insulators because of their
3
low mobility in addition to wide band gap. However, in the case of oxides the
conductivity can be drastically enhanced by doping. The second requirements relates to
the possibility of doping. In the case of n-type oxides, electron carriers are in principle
introduced by substitution of Mi+ ions with M(i+1)+ ions [2, 3] and of O2- oxygen vacancy
or interstitial positively chargeable atoms [4]. However, there is no established science
that enables one to predict which technique is applicable to a specified material,
therefore the prediction are based only on the condition - high mobility.
For having high mobility in n-type wide gap semiconductor, one of the cation
must belongs to p-block with ns0 electronic configuration [eg, Zn2+, Hg2+, Ga3+, In3+,
Ti3+, Ge4+, Sn4+, Pb4+, Sb5+, Bi5+ and Te6+]. In this case, bottom edge of the conduction
band is composed mainly of ns atomic orbital of the M-cation. In addition to this, a
linear chain of edge-sharing octahedral (rutile chain) is preferred in which the p block
cations occupy a central position. This is the case of the oxides having high mobility.
There is no intervening oxygen between the two neighboring M cation in the rutile
chain. Consequently, the M-M distance becomes short compared with that in the M-O-
M linear structure frequently seen in a vertex sharing structure. Direct overlap between
ns atomic orbital of the neighboring M cations is possible for the heavy p-block cations.
This feature as well as covalency in M-O bonds gives rise to large dispersion of the
conduction band, which is appropriate for high mobility of the electron carrier.
Normally in multi-cation oxides, mobility decreases with increasing the second
cation proportion. The lowering of mobility has been explained in terms of the
scattering of carrier electrons by the substituted ions in the lattice [5]. Indium oxide
possesses a single type of cation site in the lattice and that the drop in the mobility by
the doping may be avoidable or reducible, if in the crystalline lattice, the doping site
and conduction path of carrier electrons are separated spatially by selecting the crystal
structure having two different cation sites.
1.2.1 Importance of the Multi-component metal oxide semiconductors
1.2.1.1 Bandgap tailoring due to multi-cationBand gap tailoring refers to the ability to tune the band structure of a semiconductor
which is useful for tailoring the performance of optoelectronic devices. Band gap
tailoring of semiconductors can be typically achieved by:
4
➢ alloying two or more semiconductors
➢ use of heterostructures to cause quantum confinement or formation of
superlattices
For example, the bandgap of ZnMgO can be tuned from 3.3 eV to 7.8 eV by
tuning the Mg content from 0 – 100% [6].
1.2.1.2 Self doping of cations:In particular cases, the second cation itself replaces the site of the first cation. For
example, the inverse spinel exists with the general formula of AB2O4, where the
tetrahedral voids are occupied by B atoms and the octahedral voids are occupied
randomly by an equal number of A and B atoms. This causes the tuning of carrier
density.
1.3 Amorphous oxide semiconductorsAmorphous oxide semiconductors (AOS), have captured manufacturers interest as both
a replacement for hydrogenated amorphous silicon (a-Si:H) in flat screen displays and
for high-volume reel-to-reel processing applications involving flexible substrates. AOSs
consist of the combinations of several optically-transparent transition and post-
transition metal oxides with (n - 1)d10 ns0 (where n ≥ 4) cation electronic configurations.
These oxides derive their conduction bands from the cation's ns orbital, which is
spherically-symmetric with a large orbital radius. High electron mobilities with low
sensitivity to crystalline disorder are found in these AOS materials as a result of the
significant overlap between these large-radius ns orbitals. The most common AOS
materials are synthesized from Ga2O3, In2O3, SnO2, and ZnO into multicomponent
oxides such as indium gallium oxide (IGO), indium gallium zinc oxide (IGZO), zinc
indium oxide (ZIO), and zinc tin oxide (ZTO). Searching of new materials of AOS are
still under research. Compared to binary oxides, the multicomponent metal oxides
largely remain amorphous, and thus atomically smooth, over a wider range of
processing conditions and allow for more control over electrical properties via changes
in film stoichiometry.
5
1.4 Importance of thin filmsThe positions of the surface ions of thin films may or may not be the same as those
defined by simple extension of the bulk structure, depending on whether the free
surface reconstructs or not. The driving force for reconstruction is to lower the surface
Gibbs energy per unit surface area to attain a thermodynamically more stable system.
However, metastable surface structure can exist if the energy barrier for reconstruction
is too high. Thus thin film plays a main role in the materials science. A great advantage
with a thin film device is the small amount of material used and the compact volume of
the device. Thin film science and technology play a crucial role in microelectronics,
communications, optoelectronics, integrated optics, photovoltaic devices and
waveguides.
There are three steps in formation of a deposit:
a. Synthesis or creation of the depositing species
b. Transport from source to substrate
c. Deposition onto the substrate and film growth
These steps can be completely separated from each other or be superimposed on
each other depending upon the process under consideration. The important point to note
is that if, in a given process, these steps can be individually varied and controlled, there
is much greater flexibility for such a process as compared to one where they are not
separately variable. This is analogous to the degrees of freedom in Gibbs phase rule.
1.5 Physical dimension of thin filmsThe physical dimension of thickness was used to make the distinction between thick
films and thin films. Unfortunately, the critical thickness value depends on the
application and discipline. In recent years, a Confucian solution has been advanced. It
states that if a coating is used for surface properties such as electron emission, catalytic
activity, it is a thin film; whereas, if it is used for bulk properties, corrosion resistance,
etc., it is a thick film. Thus, the same coating material of identical thickness can be a
thin film or a thick film depending upon the usage [7]. This represents a reasonable way
out of the semantic problem.
6
1.6 Transparent Conducting Oxides (TCOs)
1.6.1 Background of TCOThe technological uses of wide bandgap conducting oxides have come to the forefront
in the past decade because of an increasing need for photonic devices, high power, high
frequency electronic devices and also transparent conducting devices because of their
breakthroughs in growth techniques for these materials. While many research efforts
have focused on doped ZnO, In2O3:Sn and doped SnO2 or which have some defects in
their atomic sites. The materials which have the properties of the above said oxides
make up a small class of specialized materials called Transparent Conducting Oxides
(TCOs) and the search is not only limited to common TCO materials and mixtures
thereof [8]. Bӓdeker [9] prepared the first transparent conducting oxide in 1907 by
thermal oxidation of glow discharge sputtered Cd films. Since then, TCOs have
received a great attention because of their various technological applications. The most
widely used TCO in optoelectronic devices is ITO. Other TCOs are also available and
find use in specialized applications where ease of deposition, cost, or IR reflectivity is
favored over optimum optical transmission and minimum sheet resistance. Recent work
has begun to explore new binary-oxide combinations and even to move into phase
fields of ternaries. Cd2SnO4, Zn2SnO4, MgIn2O4, CdSb2O6:Y, ZnSnO3, GaInO3, GdInOx,
Zn2In2O5, and In4Sn3O12 are just a few of the ternary n-type materials under
investigation [101112-131415]. The efficiency and performance of these devices depend on the
electrical and optical properties of the TCO material used in their construction.
1.6.2 Properties of TCOAs mentioned above, transparent conducting oxides are materials possesses high optical
transparency and high electrical conductivity. The transparency of the TCOs is derived
from a large band gap (Eg > 3 eV), which prevents absorption of visible wavelengths,
and a lack of d-d transitions in the metal cations which could act as color centers. The
d-d transitions cannot occur if the d orbitals of the metal cation are full, and therefore
many TCOs incorporate this type of cations [16]. This yields a transmittance in the
visible often greater than 85% (T>85%). They are basically doped semiconductors
categorized most often by their carrier type (n-type or p-type) or by the mechanism of
charge transport (free carrier or bound). Each classification of carrier type or
7
conduction mechanism exhibits complementary electrical and optical properties.
Enhancing the properties of TCOs, specifically the conductivity, can be done
either by increasing the charge carrier concentration (doping levels) or improving the
mobility of those carriers [17], since conductivity is given as σ = μeN ,where μ is the
mobility of the carriers in a TCO , e is electronic charge and N is the carrier
concentration. Increasing the carrier concentration can be achieved by heavily doping
the TCO materials. For example, in ZnO, Zinc atom contributes two electrons to the
formation of the bond with oxygen. When ZnO is aluminum doped, aluminum replaces
some of the Zinc. But when oxidized aluminum provides three electrons, one more than
Zinc, this electron would disrupt the electrostatic distribution of the lattice; this electron
is not free to appreciably move about the lattice. It is unstable and can be easily
elevated to the conduction band with the external application of energy. In the case of,
the most commonly used TCOs SnO2 and In2O3, the materials are doped with Fluorine
and Tin respectively. Fluorine doping gives superior performance compared with
metallic dopants in TCOs. A theoretical understanding of this advantage of fluorine can
be obtained by considering that the conduction band of oxide semiconductors is derived
mainly from metal orbitals. If a metal dopant is used, it is electrically active when it
substitutes for the primary metal (such as zinc or tin). The conduction band thus
receives a strong perturbation from each metal dopant, the scattering of conduction
electrons is enhanced, and the mobility and conductivity are decreased. In contrast,
when fluorine substitutes for oxygen, the electronic perturbation are largely confined to
the filled valence band and the scattering of conduction electrons is minimized [18].
This will, however, degrade the transparency due to increased free carrier absorption
and lower the carrier mobility due to an increase in ionized impurity scattering and
neutral impurity scattering.
Additionally, introduction of point defects or oxygen vacancies in the lattice of
the oxides can increase the conductivity of a TCO. In an oxide, oxygen vacancies
produce donor sites. This is done by the reduction of the cation to which the oxygen
atoms were bound, thus creating a dangling bond - an electron pair. These electrons,
upon receipt of a specific amount of energy (the activation energy for the defect) can
enter the conduction band. TCOs can have oxygen vacancies introduced in two ways.
The first is by synthesizing the material with a deficiency of O2 as one of the reactants
8
or having a reducing ambient while synthesizing. Alternatively, the compound can be
subjected to a reducing post synthetic ambient, such as H2 often at elevated
temperatures [19].
Increasing the mobility of charge carriers in TCOs will allow the conductivity to
increase without compromising the transparency, thereby enhancing the overall
performance of the TCO material. In order to obtain films with high conductivity, high
carrier concentration and mobility should be simultaneously realized. The electrical
properties of the oxides depend critically upon the oxidation state of the metal
component, stoichiometry of the oxide and also on the nature and quantity of impurities
incorporated in the films, either intentionally or unintentionally.
Seeing the electrical and optical properties of TCOs with the band structures of the
materials [20], A good performing n-type TCO must simultaneously satisfy two
requirements: (i) large bandgap as well as large energy separation between the
conduction band minimum (CBM) and the second conduction band (SCB), for
transparency; (ii) a low CBM with respect to the vacuum level, for high dopability, as
well as a small effective mass, for good conductivity. As a consequence of the second
condition, a low valance band maximum (VBM), which is a common characteristic of
oxides, is also required to meet the first condition. Taking theses criteria into account,
the recent growing demand has led to an extensive search for new TCOs with high
performance and low cost materials with higher transparency and conductivity [21, 22].
Among many binary and ternary oxides, Cd2SnO4 and Zn2SnO4 have emerged as
promising TCO's. Cd2SnO4 have a high carrier mobility [23] compared to most
conventional TCO's. Zn2SnO4 has better optical transparency than Cd2SnO4, although its
electrical conductivity is lower [23] than that of Cd2SnO4. Hence, the Cadmium
Stannate (Cd2SnO4) and also the Zinc Stannate (Zn2SnO4) have been chosen for the
current research.
1.6.3 Applications of TCOTransparent conducting oxides have largest technological applications such as solar
cells, optoelectronics, low-emissivity windows, gas sensors, wear resistant applications,
flat panel displays, touch screens, IR reflectors, solar cells and optical sensor and thin
film resistors [24]. A multitude of applications exist in which transparent conductors are
9
involved in active or passive roles. Some important applications of transparent
conductors are listed below.
1.6.3.1 Solar CellsWidespread utilization of solar energy required the production of durable, low-cost and
optically efficient solar selective coatings. Transparent conducting coatings are
preferred due to their application in a wide variety of fields of interest in solar energy
conversion. During the past few years, heterojunction solar cells consisting of wide
band gap semiconductor mated to a much narrower band gap semiconductor have
gained considerable prominence. The performance of these devices is strongly
controlled by the presence of a thin interfacial insulation layer. Heterojunctions with
this interfacial layer constitute SIS solar cells.
1.6.3.2 Transparent electrode for heterojunctionThin films of In2O3 (IO) and In2O3:Sn (ITO) have been extensively used to provide a
transparent conducting base for back wall heterojunction solar cells yielding
efficiencies of about 6-8%.
1.6.3.3 Anti reflection coatings for solar cellsSince SnO2(TO) layers reduces the surface recombination velocity, the short circuit
current increases in a solar cells. Also due to their refractive indices in the range 1.8-
2.0, this makes them useful as anti-reflection coatings on silicon solar cells.
1.6.3.4 Heat mirror
Transparent conducting oxide films with plasma edge at about 1.5 µm are well suited
for keeping heat radiation confined in a closed space.
1.6.3.5 Reflector-absorber tandem for photothermal conversionA coating of a transparent conductor on any semiconductor absorber surface will yield a
selective absorber tandem. These materials can also be used as anti-reflection coatings
in photothermal conversions.
1.6.3.6 Opto-electronic devicesConducting oxides have been extensively used as transparent electrodes in various
display devices, which includes electrochromic displays, light emitting diodes and
10
liquid crystal displays. Also TCO films have been used as transparent gates on charge
injection devices (CIDs) and charge-coupled devices (CCDs).
1.6.3.7 Thin film resistorsTCO materials exhibit low temperature co-efficient of resistivity (TCR) and high
degree of stability. As a consequence of these attractive properties, highly stable TO
resistors are being manufactured commercially.
1.6.3.8 Gas sensorsOxides thin films have shown promising results in the detection of gases such as CO,
CO2, H2, H2S, alcohols and hydrocarbons. Usually a change in electrical conductivity
occurs when a change in the ambient occurs and this property forms the basis of gas
sensing. The change in conducting can be either due to direct transfer of electrons from
the absorbed gas to the oxide semiconductor or due to a reaction of the absorbed gas
with previously chemisorbed surface oxygen.
1.6.3.9 Wear resistance applicationsIn order to reduce damaging of glass containers during manufacturing or filling, it is
desirable to apply a low friction wear resistant coating to the glass surface.
They are applied as thin films using various deposition techniques such as spray
pyrolysis, sputter deposition, chemical vapor deposition, molecular beam epitaxy, and
laser ablation [2526-272829]. For optoelectronic applications, the transparent conductor must
be carefully processed to maximize optical transmissivity in the visible regime, while
achieving minimum electrical resistivity. Optimization of these properties will depend
on the application, but in general, achieving the required performance in the as-
deposited condition requires careful process control [19].
1.7 Properties of Cd2SnO4: ReviewDicadmium Stannate (Cd2SnO4 or CTO) despite having somewhat lower carrier
concentration than the conventional TCO's such as ITO and SnO2, is actually a better
conductor due to its higher carrier mobility [23, 30]. This results in overall improved
performance. Cd2SnO4 is also a more robust material and can survive in process
environments where SnO2-based materials have difficulties. It is, in fact, more readily
etchable and generally smoother than SnO2 films. Cd2SnO4 is a TCO with exceptional
11
electrical and optical properties. This particularly illustrates the complex nature of the
electro-optical properties in these materials and their potential for improvement.
1.7.1 Crystal structureThe binary oxide CTO have the general chemical formula AB2O4 and usually exist in
either the orthorhombic structure or the cubic spinel structure. Many experimental and
theoretical studies have been carried out to understand the structural, electrical and
optical properties of these binary oxides [22, 23, 31]. Generally, the CTO is more stable
in the spinel structure [31, 32]. But, CTO has been observed in two crystallographic
forms which have orthorhombic and cubic symmetry, respectively [33]. Relatively
orthorhombic Cd2SnO4 can be easily prepared by heating the mixtures of CdO and SnO2
powders at some elevated temperatures [34]. The crystal structure of the orthorhombic
Cd2SnO4 is shown in Fig. 1.1.
In the orthorhombic structure with space group Pbam, the Sn atom is in a
slightly distorted octahedral (2a) site with six (4+2) Sn-O bonds, whereas the Cd atom
is in a lower symmetry (4h) site and can form either four, six, or eight Cd-O bonds. For
the orthorhombic structure, three external and six internal structural parameters
determine the atomic positions [20]. Even though the bulk CTO normally crystallizes in
the orthorhombic crystal structure, the CTO obtained from sputtered thin films and
from a high temperature, high pressure procedure has now been shown, on the basis of
X-ray diffraction investigation, to crystallize in the cubic system [35]. The crystal
structure of the cubic spinel structure is shown in Fig. 1.2, where the A atom is Sn and
B atom is Cd.
In the normal spinel structure with space group Fd 3 m , one-eighth of the
tetrahedral voids in a face-center-cubic (fcc) close-packed oxygen sublattice are
occupied by A atoms and one-half of the octahedral voids are occupied by B atoms.
There exists also an inverse spinel structure, where the tetrahedral voids are occupied
by B atoms and the octahedral voids are occupied randomly by an equal number of A
and B atoms [31].
The normal spinel structure is determined by two parameters: the lattice
constant a and the anion displacement u. The bond length between A atom at the center
of a AO4 tetrahedron and its four nearest-neighbor oxygen atoms is given by [31]
Rtetra=3u−0.25a ...........................................................................................(1.1)
12
whereas the bond length between the B atoms at the corner of the octahedron and their
six nearest oxygen atom is
Rocta=u−0.625 22 u−0.3752 a ..................................................................(1.2)
For the Inverse spinel, which has the same lattice parameters as normal spinel,
the effective u parameter is obtained using the averaged tetrahedral and octahedral bond
lengths and the formula given above.
1.7.2 Band structureA clear understanding of the band structure is of critical importance to explain the
electrical properties of Cd2SnO4. In the determination of the band structure of a
semiconductor, both experimental method and theoretical modeling is followed by
Segev et al. [20]. The band structure calculations are performed using the local density
of approximation (LDA) [36, 37], with the Caperley-Alder exchange correlation
potential [36], as parametrized by Perdew and Zunger [37]. The calculated results of
Segev et al. [20] was in good agreement with the all-electron full-potential linearized
augmented plane-wave (FLAPW) calculations, as well as with the available
experimental data [22, 31, 38, 39].
Figure 1.3(a) shows the band structure of Cd2SnO4 along the L-Γ-X line for the
normal and inverse spinel structures and along the X-Γ-Z line for the orthorhombic
structure. Figure 1.3(b) shows the atom- and angular-momentum resolved local density
of states (LDOS) of Cd2SnO4 in the normal spinel structure. Only the dominent
components of the LDOS are shown. The inverse and orthorhombic structures show
very similar features at the vicinity of the band gap edges and are not shown here.
At the Γ point, the valence band maximum (VBM) state has the Γ12v
representation and consists mostly of O p and cation d states of the octahedral site, with
some d character from the cation at the tetrahedral site. The Conduction band minimum
(CBM) has the Γ1c representation with predominantly O s and cation s states of the
tetrahedral site, as well as some s character from the cation at the octahedral site. A
minority of O p and Cd d characters can also be observed for this state. The second
conduction band (SCB) has the Γ2'c representation and consists of O s and p, of cation s
states of the tetrahedral site only, as well as of some p state from the cation at the
octahedral site. With this analysis, it can be explained that the change in the band gap
13
and the splitting between the first two conduction bands, E12 = ESCB – ECBM, as a function
of the crystal structure.
The atomic size of Cd is much larger than that of the Sn. When Cd moves to the
tetrahedral site in the Cd2SnO4 inverse spinel structure, the tetrahedral bond length
increases, whereas the octahedral bond length decreases, as reflected by the different u
parameters observed for the normal and inverse spinel structures. Consequently, this
lowers the energy of the CBM state, which is an antibonding state centered mostly on
the tetrahedral site. Thus the strain induced deformation effect partially cancels the
chemical effect in the Cd2SnO4 and the volume of the Cd2SnO4 is small which explains
the smaller band gap variation in Cd2SnO4. But, the energy of the SCB increases more
than that of the CBM state because the former contains only Cd 4s orbital but no Sn 5s
orbital. This explains why the E12 is larger in the inverse spinel than in the normal spinel
structure.
It is evident from the figure that the orthorhombic Cn2SnO4 has an even larger
band gap than the inverse spinel structure. However the E12 energy separation is smaller
than that in the inverse spinel structure. Due to the smaller volume of the orthorhombic
structure compared to that of the spinel structure, the CBM in the orthorhombic
structure has a higher energy [31]. Furthermore, the p-d coupling is reduced at the
VBM, which is due to the lower symmetry of the orthorhombic structure. This explains
the larger band gap of the orthorhombic structure compared to the spinel structure.
Moreover, in contrast to the spinel structure, the SCB state has a mixed Cd 4s and Sn 5s
character in the orthorhombic structure. Therefore the energy separation E12 in the
orthorhombic structure is in between that of the normal and the inverse spinel structure.
1.7.3 Properties and applications of Cd2SnO4 filmsEven though the bulk Cd2SnO4 normally crystallizes in the orthorhombic crystal
structure, the Cd2SnO4 films obtained from sputtering and from a high temperature,
high pressure procedure has now been shown to crystallize in the cubic system [35].
Such phenomenon makes the material a unique compound and not a mere mixture of
CdO and SnO2. Cd2SnO4 being a defect semiconductor attracts many coworkers [30,
40] because of their excellent optical and electrical properties not the structural
properties of the films, since the as prepared films are mostly amorphous in nature or
14
amorphous-like [41] state in nature. The amorphous films are crystallized after the post
heat treatment of the films, temperature ranging from room temperature to 700oC [23,
42-4344] in the Argon atmosphere or CdS atmosphere.
Cd2SnO4 is now the subject of numerous investigations as alternative material to
Indium Tin Oxide (ITO) for photovoltaic device structures [45]. Cd2SnO4 films have
been used in the CdTe/CdS solar cells because of their outstanding optical and electrical
properties which yields highly efficient solar cells [46, 47]. Cd2SnO4 films are n-type
defect semicondutor material exhibiting promising properties such as low metal-like
electrical resistivity (10-4 Ωcm) [42] and high transmission (> 90%) [46] in the visible
range of the light spectrum and high reflectivity in the IR range. Another importance of
the Cd2SnO4 films is the carrier mobility of the films even at a higher carrier
concentration. Electron mobility as high as 65 cm2 V-1s-1 at a carrier concentration of
2X1020 cm-3 have been achieved [46]. Possible applications of Cd2SnO4 films as a
perspective electrode material for various electrochemical applications, including bio
catalytic redox transformations were recently suggested [48-4950].
1.7.4 Some literature on Cd2SnO4 filmsThe properties of cadmium stannate films were first reported by Nozik [30], who
prepared amorphous films by RF sputtering and reported mobilities as high as
100 cm2 V-1 s-1 at a carrier concentration of 5×1018 cm-3. Nozik attributed this unusually
high mobility to a low carrier effective mass (m* = 0.04 me). Haacke [51, 52]
investigated the effect of deposition and annealing parameters on the polycrystalline
Cd2SnO4 films prepared by RF sputtering. Miyata et al. [41, 53, 54] studied the effect of
thickness and the number of charge carriers on the electrical conductivity of the
Cd2SnO4 films. They reported the resistivity of the CTO films as 4×10-4 Ωcm in the film
thickness range of 2500-15000 Å, and the average transmission was 90% over the
visible region. The lowest band gap of the Cd2SnO4 was determined by Koffyberg et al.
[55]. They have determined the band gap of the Cd2SnO4 by the photoelectrolysis of
water with the Cd2SnO4 films as the anode and a platinum as the cathode arranged in an
electrochemical cell. They have reported the minimum band gap of Cd2SnO4 as 2.12 eV
which is attributed to the indirect transition and the band gap of interband transition as
2.79 eV. Howson et al. [56] calculated the carrier effective mass of Cd2SnO4 films by
applying the thin film interference theory and sheet resistance measurements. They
15
have compared the results of Cd2SnO4 with the results of ITO, and believed that the
Cd2SnO4 films are best over ITO. Carl. M. Lampert [57] studied the properties of the
films to use Cd2SnO4 films as heat mirror coatings for energy conserving windows.
Armando Ortiz [58] studied the surface morphology of the Cd2SnO4 and showed that
the films are more uniform in their topography. Stapinski [59, 60] suggest the existence
of oxygen vacancies, interstitial cadmium ions and neutral CdO as the defects
influencing electrical properties of the film. Shetty et al. [61] observed firstly the
Burstein effect in the Cd2SnO4 films which are heavily doped. Apart from these specific
results, many coworkers [46, 62, 63] just studied only the electrical and optical
properties of Cd2SnO4. Even though several literatures dealing with the electrical and
optical properties, there is no any reports on the theoretical phenomena behind the
electrical and optical properties of the Cd2SnO4 films upto the year of 1999. After 1999,
Many research coworkers [23] from national renewable laboratory, Golden, Colorodo
and Sun Power corporation, California, started to study the physical phenomena behind
the electrical and optical properties of the Cd2SnO4 films. Mason et al. in 2002 [64, 65]
studied the defect chemistry and the physical properties of the Cd2SnO4 films. Shang et
al. [66] reported the defect formation energy in the Cd2SnO4 films. Mamazza et al. in
2005 [42] studied the effect of Cd Sn ratio on the conductivity of the Cd2SnO4 films.
Apart from the optoelectronic properties, Dou et al. [67] studied the surface
composition analysis of the bulk Cd2SnO4 with XPS, UPS and EELS studies. Possible
applications of Cd2SnO4 films as a perspective electrode material for various
electrochemical applications, including bio catalytic redox transformations were
recently suggested [48-4950] after the electrochemical studies of Cd2SnO4 films by
Valincius et al. [48] on the Cd2SnO4 films.
1.8 Properties of Zn2SnO4: ReviewDizinc Stannate (Zn2SnO4 or ZTO) is superior to CTO in optical properties but has poor
electrical conductivity and mobility due to its structure [68] comparing to Cd2SnO4 and
does not suffer from the toxicity problem associated with Cd in Cd2SnO4 [20].
1.8.1 Crystal structurePolycrystalline ZTO thin films form in the 'inverse' spinel crystal structure. This
structure is viewed as a combination of the rock salt and zinc-blend structure. The
16
crystal structure of the inverse spinel cubic Zn2SnO4 is given in Fig. 1.2. The inverse
spinel exists where the tetrahedral voids are occupied by Zn atoms and the octahedral
voids are occupied randomly by an equal number of Zn and Sn atoms [31]. However,
the spinel lattice is locally distorted enough to form two distinct octahedrally
coordinated Sn and Zn sites. The disorder in the Sn and Zn sites in the lattice
significantly limits the mobility of the carriers, possibly by disrupting the edge-sharing
nature [69] of the octahedrally coordinated cations. For this inverse structure, the cation
inversion energy ∆E is slightly negative, which is a strong indicative of stable structure
in the inverse spinel structure. Inter mediate phases with the formula (A1-xBx)[AxB2-x]O4
also exists. Here the cations in the square bracket occupy the octahedral sites and
cations in the parenthesis occupy the tetrahedral sites. The cation inversion parameter
‘x’ ranges from one for a normal spinel to one for an inverse spinel.
Inverse spinel structure in Zn2SnO4 is a favorable crystal structure for TCOs,
composed of closely packed oxygen ions and rutile chains which are connected by
cations in the tetrahedral sites and which run through the lattice. The rutile chains are
considered as conduction paths for electrons as unoccupied orbital of cations
significantly overlap in the chains because of short cation-cation separation distances
due to the edge sharing of cation octahedra.
1.8.2 Band structureThe band structure and the LDOS of the normal spinel Zn2SnO4 are as shown in Fig.
1.4. The variation of the band gap and the changes in E12 are similar to those in the
Cd2SnO4 and can be explained in an analogous way to that described in section 1.7.2
for Cd2SnO4.
The only noticeable distinctions between Zn2SnO4 and Cd2SnO4 are that the
band gap of Zn2SnO4 is larger than the band gap of Zn2SnO4, due mostly to the smaller
volume of Cd2SnO4 than Zn2SnO4. Since Zn and Sn have similar atomic sizes, there is
no any change in bond lengths as seen that for Cd2SnO4. Further, when Sn is at the
octahedral site, the VBM energy decreases, which is due to the lower Sn 4d orbital
energy compared to that of the Zn 3d orbital and hence the reduced p-d repulsion at the
octahedral site. Moreover, because Zn has a much higher 4s orbital energy than the Sn
5s orbital, both of the first two conduction bands energies increase. However the energy
17
of the SCB increases more than that of the CBM state because the former contains only
Zn 4s orbital but no Sn 5s orbital. This explains why the fundamental bandgap Eg as
well as the E12 of Zn2SnO4 is much larger in the inverse spinel structure than in the
normal spinel structure.
1.8.3 Properties and applications of Zn2SnO4 filmsFrom the crystal structure, it is cleat that the Inverse spinel structure is the most stable
form of Zn2SnO4 and the Band structure reveals that the inverse spinel has the large
band gap. This makes the Zn2SnO4 as the promising material for the TCO applications
even though its conductivity is slightly smaller than the Cd2SnO4. Most often the
literature [20, 31] deals both the Zn2SnO4 and Cd2SnO4, simultaneously, since the
Cd2SnO4 is well known for its high conductivity due to its high carrier mobility and the
Zn2SnO4 for its high optical transparency, because of its large energy separation
between the CBM and the SCB which causes the transparency. Sometimes the Zn2SnO4
is considered as a non-toxic alternative of Cd2SnO4, despite concerns about the toxicity
of cadmium [46].
The Zn2SnO4 is also crystallizes in the amorphous state in the as-prepared
conditions. Many coworkers [70-7172] analyzed its properties in the as-prepared
condition, because amorphous Zn2SnO4 (a-ZTO) is considered to be a promising
material for the channel layer of transparent thin film transistors (TFTs) [73-7475] which
is currently using the Indium Gallium oxide (IGO) or Indium Gallium Zinc oxide
(IGZO). ZTO shows equivalent TFT performance to In or Ga based AOS, which
employs inexpensive atomic constituents and is able to be deposited by sputtering itself.
The as deposited films are amorphous but subsequent annealing at 600ºC give
polycrystalline uniaxially oriented films with resistivity of 10-2-10-3 Ωcm [72, 76, 77],
mobilities of 16–26 cm2/Vs [78], and n-type carrier concentrations in the low 1019 cm3
range [79]. Zn2SnO4 films are being used as the buffer layer for the CdTe/CdS with the
combination of Cd2SnO4 recently [80].
1.8.4 Some literature on Zn2SnO4 filmsCoutts et al. (2000) [23] and Wu et al. [46, 81], while searching for the new transparent
conducting oxide and the remedy for the toxicity of cadmium in Cd2SnO4, they started
to develop Zn2SnO4, in the belief that the spinel compounds should have to behave in a
18
similar manner, but they found this is clearly not the case. They believed that the grain
boundary scattering which is due to the poor crystallinity of the films plays a major role
in the conductivity and the very high effective mass (0.1me) and the short relaxation
time of 8X10-6 s lead to the reduced carrier mobility. The results of Young et al. [69,
79] also confirms the electrical property results of Coutts and Wu et al., even though the
optical properties of Zn2SnO4 is superior to Cd2SnO4. Many researchers tried to achieve
better conductivity in Zn2SnO4 by varying the film processing parameters such as
applying the post heat treatment [70, 72] or intentionally doping [47] and varying the
films Sn/Zn concentration [82, 83]. Segev et al. (2005) theoretically described the band
structures of the Zn2SnO4 and Cd2SnO4. The results made clear the era of investigation
on Zn2SnO4. The all the researchers came to know the basic phenomenon behind the
transparency and the conductivity of Zn2SnO4 films. This lead, the analysis of Zn2SnO4
as TCO geared back in literature.
Wu et al. [45] in (2001) suggests the Zn2SnO4 as the buffer layer for the CdTe
solar cells and [47, 80] analyzed it as a buffer layer for CdTe solar cells. But being a
amorphous semiconductor which has a smooth surface like Cd2SnO4 made the Zn2SnO4
as a promising material for the channel layer of AOS based transparent thin film
transistors (TFTs) [73-7475] which is currently using the Indium Gallium oxide (IGO) or
Indium Gallium Zinc oxide (IGZO) ZTO shows equivalent TFT performance to In or
Ga based AOS, which employs inexpensive atomic constituents and is able to be
deposited by sputtering itself.
In 2005, Chiang et al. [73] reported the first TFT with a ZTO channel layer.
ZTO is sputtered onto the substrate, which is held at ~175 oC, in a 90/10 Ar/O2
atmosphere, and then subsequently annealed for one hour at temperatures up to 600 oC,
where the channel material remains amorphous with target stoichiometries with
ZnO:SnO2 ratios of 2:1 and 1:1 (Zn2SnO4 and ZnSnO3, respectively). According to this
study, there is little to no performance difference between the targets. Since then, many
coworkers [74, 75, 84, 85] studied the device structures like TFTs, Field effect
transistors (FET) and Organic LEDs which uses Zn2SnO4 as its constituents.
Zn2SnO4 has another importance role in the field of gas sensors which is used to
sense the ethanol (C2H5OH) [86], Carbon Monoxide (CO) [87, 88], Nitrogen dioxide
19
(NO2) [89], isobutane (i-C4H10) [90] and humidity [91] after Zhang et al. [92] who
observed that Zn2SnO4 has gas-sensitivities to reductive gases.
1.9 Scope of the present workThe principal aim of this thesis is to prepare the transparent and conducting Cd2SnO4
and Zn2SnO4 films by RF Magnetron sputtering technique by varying the deposition
parameters, since the goal of the work is to prepare the optimized films in the as-
prepared conditions without any post deposition treatments.
The objective of the study are:
➢ Prepare the Cd2SnO4 and Zn2SnO4 thin films by RF Magnetron sputtering
technique by varying the deposition parameters such as the substrate
temperature and the RF power.
➢ Study the structural, surface morphological and the chemical composition and
the energy states of the films by X-Ray diffraction, High resolution transmission
electron microscopy, Scanning electron microscopy, atomic force microscopy
and X-ray photoelectron spectroscopy
➢ Study the optical properties of the films by optical absorption spectroscopy,
photoluminescence spectroscopy, Raman spectroscopy, Photoacoustic
spectroscopy
➢ Study the thermal properties by photoacoustic spectroscopy and the electrical
properties by conductivity measurements and the Hall measurements
➢ Fabricate Cd2SnO4 and Zn2SnO4 based devices and study its performance.
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