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Nanotechnik Klocke Pascalstr. 17
Aachen, Germany
Intro_0
Klocke Nanotechnik
The SEM/FIB-Workbench ... from Manipulator to Applications
Microtechnology Network
One of 295 members in a
Nanotechnik Klocke
Module
Since 1992
Modular Nanorobotics
Centimeter Stroke
Atomic Resolution
Pool of more than 200 Nanorobotics Components
Configuration to independent machines
Integration in Nanorobotics systems
Universal Testing Benches
Micro Production Systems
-Assembly, -Tensile-Machine, 3D-Nanofinger, SPM-Lithographer, ... Wafer Prober, SEM-Manipulators, X-Ray Sources, ...
Nanotechnik Klocke
Intro_0
System Integration
of Nanorobotics
from Klocke Nantoechnik
into SEM/FIB chambers
from different suppliers
System Integration:
Nanotechnik Klocke
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Cartesian Manipulators With machine coordinate system
Cartesian movement
Assembly by Docking Stations:
Nanotechnik Klocke
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Manipulator Configurations
Different tool holder configurations.
The Docking Station can be assembled like shown here or upside down.
Nanotechnik Klocke
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Integration in different Chambers Sensors in all Axes
LEO 15xx
Double manipulator
in FEI XL 30
FEI XL 30
Nanotechnik Klocke
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FEI XL 30
Integration in different Chambers
2 manipulators fixed at 2 Ports
Nanotechnik Klocke
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Integration in different Chambers FEI XL 30
Port assembly with
manipulator holder
allowing maximum tilt range
for sample stage
Nanotechnik Klocke
Intro_0
Integration in different Chambers FEI XL 30
2 manipulators fixed by Docking Stations
Nanotechnik Klocke
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4 Nanorobotics Manipulators even in a small FEI XL-30
2 manipulators are fixed at ports,
the other 2 at the chamber-hole
of the front door
Nanotechnik Klocke
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Integration in different Chambers FEI XL 40
2 Docking Stations 1 manipulator installed
Nanotechnik Klocke
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ZEISS EVO 15
Integration in different Chambers
Roof assembly
by Docking Station
Nanotechnik Klocke
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ZEISS EVO 50
Integration in different Chambers
Docking station fixed by adhesive
(visible during installation, cut off later)
Nanotechnik Klocke
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90° or 180° setup
Two manipulators
in JEOL 6500 F
JEOL 6500 F
Integration in different Chambers
Nanotechnik Klocke
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Two manipulators for
Force Distance
Measurement Package
JEOL 6500 F
Integration in different Chambers
Nanotechnik Klocke
Intro_0
HITACHI 4800-II
Integration in different Chambers
Nanotechnik Klocke
Intro_0
HITACHI 4800-II
Integration in different Chambers
Nanotechnik Klocke
Intro_0
HITACHI 4800-II
Integration in different Chambers
Nanotechnik Klocke
Intro_0
HITACHI 4800-II
Integration in different Chambers
Nanotechnik Klocke
Intro_0
LEO/ZEISS Supra
Integration in different Chambers
Nanotechnik Klocke
Intro_0
Manipulator
1
Manipulator
4
Manipulator 2 &
3
Installation process in a
LEO/ZEISS Supra 35
LEO/ZEISS Supra
Integration in different Chambers
Nanotechnik Klocke
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4 manipulators
installed at the chamber roof
by docking stations
LEO/ZEISS Supra
Integration in different Chambers
Nanotechnik Klocke
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TESCAN MIRA XM
Integration in different Chambers
Nanotechnik Klocke
Intro_0
TESCAN MIRA XM
Integration in different Chambers
Metal frame to be fixed at the chamber roof.
4 Docking stations are fixed onto the frame
Nanotechnik Klocke
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TESCAN VEGA LM
Integration in different Chambers
up to 3 Nanorobotics manipulators
Nanotechnik Klocke
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TESCAN Lyra XM Dual Beam
Integration in different Chambers
Nanotechnik Klocke
Intro_0
TESCAN Lyra XM Dual Beam
Integration in different Chambers
Up to 4 Nanorobotics
manipulators can be
installed at the chamber
roof by docking stations
Nanotechnik Klocke
Intro_0
TESCAN Lyra XM Dual Beam
Integration in different Chambers
Including full software integration in one common control
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