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INTEGRATED CIRCUITS
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INTEGRATED CIRCUITS – UNIT 5
CLASSIFICATION OF IC’s
• Monolithic IC
• Hybrid IC
INTEGRATED CIRCUITS
CHIP
INTEGRATED CIRCUIT
IC CHIP SIZE AND CIRCUIT COMPLEXITY
BASIC PLANAR PROCESSESMAIN STEPS USED TO FABRICATE AN IC :
1. Pure silicon is formed as INGOT and sliced into wafer.2. Fabrication of Integrated circuits on the wafer surface3. Wafer is cut into chips and is packaged.
THE PLANAR PROCESS
STEP 1: Silicon Wafer(Substrate) Preparation
STEP 2: Epitaxial Growth
STEP 3: Oxidation
STEP 4: Photolithography
STEP 5: Diffusion
STEP 6: Ion Implantation
STEP 7: Isolation Technique
STEP 8: Metallization
STEP 9: Assembly Processing and Packaging
Fabrication
Silicon Processing
Packaging
STEP 1: Silicon Wafer(Substrate) Preparation
Crystal Growth and doping – (Czochralski Crystal growth) Ingot trimming and grinding Ingot slicing – (Stainless steel saw blade with industrial
diamonds embedded in it) Wafer polishing and etching Wafer cleaning.
Czochralski Crystal Growth Process
Ingot slicing and Polishing
STEP 2: Epitaxial Growth (Extension of substrate crystal)
WHY EPITAXY? To enhance the performance of discrete bipolar transistorIt also offers a means of controlling the doping levels.It is generally oxygen and carbon free.
SiCl4+2H2 Si +4Hcl
STEP 3: Oxidation• SiO2 has the property of preventing diffusion
of almost all impurities through it. It serves very important purposes.
• SiO2 is an extremely hard protective coating and is unaffected by almost all reagents except hydrofluoric acid . Thus it stands against any contamination
Si +2H2O SiO2 + 2H2
LITHOGRAPHY
STEP 4: Photolithography
3
4
5
TYPES OF PHOTO RESISTpositive resist - the portion of the photoresist that is exposed to light becomes soluble to the photoresist developer. The portion of the photoresist that is unexposed remains insoluble to the photoresist developer.
negative resist - the portion of the photoresist that is exposed to light becomes insoluble to the photoresist developer. The unexposed portion of the photoresist is dissolved by the photoresist developer.
DIFFERENCE b/w POSITIVE & NEGATIVE PHOTO RESIST
STEP 5 : DIFFUSION
STEP 6: ION IMPLANTATION
INDUSTRIAL SET UP FOR ION IMPLANTATION
ION IMPLANTATION SETUP