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04/06/13 Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition) - 9780815520375|ScienceDirect.com

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Handbook of Physical Vapor Deposition (PVD) Processing(Second Edition)Copyright 2010 Elsevier Inc. All rights reserved

Author(s): Donald M. Mattox

ISBN: 978-0-8155-2037-5

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Front-matter, Pages i-iii

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Dedication To my wife Vivienne, Page ii


Copyright, Page iv


Preface to First Edition, Pages xix-xx


Preface to Second Edition, Page xxi


Acknowledgements, Page xxiii


Acronyms Used in Vacuum Coating and Surface Engineering, Pages xxv-xliii


Donald M. Mattox, Pages xlv-xlvi


Chapter 1 - Introduction, Pages 1-24


Chapter 2 - Substrate (Real) Surfaces and Surface Modification, Pages 25-72


Chapter 3 - The Good Vacuum (Low Pressure) Processing Environment, Pages 73-145


Chapter 4 - The Sub-Atmospheric Processing Environment, Pages 147-156


Chapter 5 - The Low Pressure Plasma Processing Environment, Pages 157-193


Table of Contents

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04/06/13 Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition) - 9780815520375|ScienceDirect.com

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Chapter 6 - Vacuum Evaporation and Vacuum Deposition, Pages 195-235


Chapter 7 - Physical Sputtering and Sputter Deposition (Sputtering), Pages 237-286


Chapter 8 - Arc Vapor Deposition, Pages 287-300


Chapter 9 - Ion Plating and Ion Beam-Assisted Deposition , Pages 301-331


Chapter 10 - Atomistic Film Growth and Some Growth-Related Film Properties , Pages 333-398


Chapter 11 - Film Characterization and Some Basic Film Properties, Pages 399-438


Chapter 12 - Adhesion and Deadhesion, Pages 439-474


Chapter 13 - Cleaning, Pages 475-527


Chapter 14 - The External Process ing Environment, Pages 529-544


Appendix - The Transfer of Technology from Research and Development to Manufacturing, Pages 545-552


Glossary of Terms for Vacuum Coating (including synonyms, antonyms, and re lated terms), Pages 553-734


Index, Pages 735-746

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