22
30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!7390/ 73,90/- ,90 ,.30 ,907, !,79%50 #0;80/- ,90 0:2-07 7,/0 !74/:.9  5574;0/- ,90 ,;908 447 !,7909 #0;843:2-07 4/343/943 ,3:1,.9:707 #:330709  %#$  %&!  %#$  %&!  %!#  %&# 80. 22 9072,,947  %!#$$&#$  %&!  %'  % $ %&!     % 80. 80. 22 22 &$ 22 !$ %&!8.7003  %$  %&!8.7003 $ .398 80. ! 80.  %$ %&!8.7003 !$  %&!8.7003 80. 80. 80. 80.  %!#  %&#$  %&!8.7003  %#$  %&!8.7003 700#0 89!%20 80. 80. 80. 80. 22  %# &#$  %&! $09 &5,90 490 !7 4.088 90. 8 7085438 - 0 147 809:5 ;07 1 .,9 43 220/ , 90 :543 89,79:5 47 ,3 57 4.088 .,30 $199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819 !74.08890.89,790/57088 4397407%50 !74.088,304 $  %#$ %&!!  # %#$$00!,7,20907,30  %407,3.0843 !  032,3.,308 ,90 $19 !74.088  %0. !74-02 40 7439 //0 #0,7 439#0 !7503 9%025$945 74%27 $.70$5/ 4/%27 4'9 77470,7 !7' ! 4! ;075,.%27 30.9&5 9$9,79 $498 0 !: -,. $ $ $ /'0 4:398 %25  ' $ $4' '0 4. 9  '0 4. 9 $4'  %! $  ' ! ! ! ! $  ' '  ' $ .$9,79 :73 30.9  %  % % $9 $.7085/  '$ ,.57088 #,30 #,30 !48 !,89%2 472 8 !,041

IMM Process Setups

Embed Size (px)

Citation preview

Page 1: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 1/24

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

 %#$ %&!  %#$ %&!

 %!#  %&#

80. 22 9072,,947

 %!#$$&#$ %&!  %' % $ %&!    %

80.

80. 22 22 &$

22

!$ %&!8.7003  %$ %&!8.7003

$ .398 80.

! 80.

 %$ %&!8.7003 !$ %&!8.7003

80. 80. 80. 80.

 %!#  %&#$ %&!8.7003  %#$ %&!8.7003

700#0 89!%20

80. 80.

80. 80. 22

 %# &#$ %&!

$09&5,90 490 !74.08890.87085438-0147809:5;071.,943220/,90:54389,79:547,3574.088.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819

!74.08890.89,790/57088

4397407%50

!74.088,304

$ %#$ %&!! # %#$$00!,7,20907,30 %407,3.0843! 032,3.,308

,90 $19 !74.088 %0. !74-02

40 7439 //0 #0,7 439#0

!7503

9%025$945 74%27$.70$5/ 4/%27 4'9

77470,7

!7' 

!4!

;075,.%2730.9&5 9$9,79

$4980 !:-,. 

$ $

$

/'0 4:398 %25

 '

$

$4' '04.9 

'04.9 $4' 

  %! $

 '! ! !

!

$

  ' ' '

$

.$9,79:73 30.9

 %  % %

$9

$.7085/

 '$

,.57088

#,30

#,30 !48!,89%2

Page 2: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 2/24

/ $ $ / /

Page 3: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 3/24

30.9434/3$09:5$9,3/,7/

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

!$ %!#%&#$

80.

22 %# 

7067747$945 3147.0/#00.9

849 849

503!,:80 /'50 3

22

22 80. 22 22

%#  $9740#01 

22 22

%20#01 

22 22 80. 80. 80.

!,89%20#01 

80. 80. 80.

%%#

80. 89058

22 22 22

4/!

80.

89058 ,9 22

29!

80. 80. 890580.425019

22 22

%#&#$%&! % %

$09&5,90 490 !74.088 90. 8 7085438-0147809: 5;071.,943220/,90:54389,79:547,3574.08 8.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74.088,304,90 $19 !74.088%0. !74-02

$945%

' /$945 42$945

'

#050,9/$945

#050,9.9' /' /!708

#0,7

!,99073 .9!708 /' 4:39

!,:80!48

40 7439 //0

$3:90

!

7747$945

53$945 $893. /' '  

 %20

+

!

$4' /' ' !75'  

$$9,79

$%!:503

$4! 4! #097  

' 4!%2 /$4  

4' /$4 

  ' '

'!$38

30.9 44 .%

#,30

 '

.#,30

4/480

#,30

#,30

4397407%50

$; $;

  '$ !

$

  ' '

$; $;!5 !5 !5

  %5 %5

$

 '!,30

!$%

 '

$;

!; !; !;

$5 $5

$.70 #49 ,9 0 40/%

$9740

$%#$%&!!#%#$$00!,7,20907,30%407,3.0843!032,3.,308

  '04.9 0.425'  

97$9,79%

3 9 3 /3 $ 9 5 $9 3/ 7/ &3.43974

Page 4: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 4/24

30.9434/3$09:5$9,3/,7/ &3.43974

30.943 4/3 $09:5 $9,3/,7/

Page 5: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 5/24

30.9434/3$09:5$9,3/,7/

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

!$ %#  480' ,25$ ,25! ,25! $4!48 !!48 /' 4:398

22 22

503$4 53' !753 !753% 53$945!48 $893.0 9%25$95% $9,79%

80. 22 22 80. 80.

%25$95!48 %25$95% 13.93 %25$95$ %25$95#089,79 ' ' /$945

22 80. 22

%%#30.9 44 .$9 9$9 4/

80.

80. 22

80.

  %!#%&#$ %# $:90 70677$945 47.0/#00.9

8498 8498

!%$ % 33/!48397  89!%397 97%397 

74 7$9,79 7%20 80. #,30 #,30

% 22 80. 80. 2274 7$9,79 7%20 .9:, 22 %$ % %$ % !48943

80. 80.47$6 47$6 /7 4'9

%#&#$%&!

$09&5,90 490 !74.08890.87085438-0147809:5;071.,943220/,90 :54389,79:547,3574.088.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74.088%0. !74-02 !74.088,304

!78 

$.70#49,90;07!%2 3!704,/

40 7439

'

! ! '$!

'

,.!

' ' '

$ $ $ $ $ $ $%!

$%#$%&!!#%#$$00!,7,20907,30%407,3.0843!032,3.,308

//0 #0,7

4397407%50

,90 $19

30.943 4/3 $09:5 $9,3/,7/ &3.439740/ #010703.0 45 1 !

Page 6: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 6/24

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!

30.943 4/3 $09:5 $9,3/,7/

Page 7: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 7/24

30.9434/3$09:5$9,3/,7/

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

!$!#53%

22 80.503$945 $489 %25$945!48 %25$945%

22 22 22 80.

%# 

80. 22 22

80. 22

 %  %30.9% 44% .$9% 9$9% 40/% ;07!,.!7; 3!704,/

80. 80. 80. 80. 80. 80.

$.70#49,90 !78,30

40%4:. 40/%

80. 22 80.

 %!#%&#$%&!  %# $%&!

47.0/ 22

&$ 22

 %  % 80. 80. 80. 80. 22

!%$

74 7$9,79 7%20 74 7$9,79 7%20 47$6 47$6 /7 4'9

%#&# $%&!

$09&5,90 490 !74.08890.8 7085438-0147809:5;071.,943220/,90:54389,79:547,3574.088.,30 $199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74-02 !74.088,304,90 $19 !74.088 %0.

%25$945#089,79,13.93 %25$945$ 

!#53' !$' !' !!48$' $' ! ! $!48

  $ %# $%&!!# %# $$00!,7,20907,30 %407,3.0843! 032,3.,308

' ' ' '

$ $ $ $

'

%! $ $ $

'$ ,.!! ! !

70677 4 0 7439 //0 #0,7

389 #,30 9 #,30 89!$9/ 9 $9/ !48

4397407%50

4:398!,99073 0.9!7088 /' /$945

/' /!7088 $945%

$9,79% ',30/'

42$945 #050,9/$945 #050,90.9'

893.943

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451

Page 8: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 8/24

5

30.9434/3$09:5$9,3/,7/

Page 9: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 9/24

5

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

 !

4/503 4/480

4!/,25

!48943 3 !48943 3 !48 3

 '04.9  '04.9  !7088

3907;, 80. 0.947 %20/0503/039

311 !48 3 0.943 80.

4:394100.943 .39 !7088 #097,.9 80.

0,  80. '0 #000.9 80.

%

441$9,08 ,!7088:70 0, 80.

 %20 80. !48943 3

!7088:70 '04.9 

443  80.

3907;, 80. !48 3

,.! '0

!,89/0,  80. #0; 

% %   %#$ %&!

$:507;843 29/010.9;0-3472,$9454/0 41  8498

0397, 39,#00.98 8498

#,30 #041010.9 8498

 ;07,0

 %!#  %&#$

3  %

 %# &#$ %&!

$09&5,90 490 !74.08890.87085438-0147809:5;071.,943220/,90:54389,79:547,3574.088.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74.088,304,90 $19 !74.088 %0. !74-02

3 3 3

4397407%50

3

 '!!7088

!,89.0

0, 507,93  

:843  '!$9. &39#097,.9

!:-,. 89 !:-,. $4/43

3/

899 9 7/ 3/9 7/ 3/ 89

0.989#097,.9

89 89503 29 3/

  $ %#$ %&!!  #    %#$$00!,7,20907,30 %407,3.0843!   032,3.,308

3/ /,25

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!

Page 10: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 10/24

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!7390/ 

Page 11: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 11/24

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

 %#$ %&!  %#$ %&!  %!#  %&#9072,,947

80. 22

 %

 %!#$$&#$ %&!  %' % $ %&! 80.

&$

80. 22 22 22

!$ %&!8.7003  %$ %&!8.7003

$ .398 80.!$ %&!8.7003

! 80.

 %$ %&!8.7003$.70$5/ 4/%27

80. 80. 80.

 %!#  %&#$ %&!8.7003  %#$ %&!8.7003

80.

80.

 %# &#$ %&!

$09&5,90 490 !74.08890.87085438-0147809:5;071.,943220/,90:54389,79:547,3574.088.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74.088,304,90 $19 !74.088 %0. !74-02

89!%2 #,30

!48

#,30!,89%2

%# ## $ 9

;075,.%27 9$9,79

40 7439 //0 #0 ,7

30.9&5

4397407%50

$4 ' '04.9 !7 ' !7 503

4:398 %25

$

'04.9 $4' 4! ! 77470,7 /'0

  ' '

  %! $ $ $ $

  ' '! ! ! '

  % % % '$ ! $ $

$ %#$ %&!! # %#$$00!,7,20907,30 %407,3.0843! 032,3.,308

30.9 :73 .$9,79 $.7085/ ,.57088 $4980 !:-,.  

/' 

%25$9 4' 47

4: 398 $ 9%2 

72

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!7390/ 

Page 12: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 12/24

72

30.9434/3$09:5$9,3/,7/

Page 13: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 13/24

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

 !$%&!4/503 4/480

4!/,25!48943 22 !48943 22 !48 22

 '04.9  '04.9  !7088

3907;, 80. 0.947 4:394100.943 .39 %20/0503/039

4/0 #097,.9 0.9 0.943 80.311 !48 22 !48 22 #097,.9 80.

0,  80. '0 '0 #000.9 80.

 %$%&!441$9,08 ,!7088:70 25,.9

 %20 80. !48943 22!7088:70 '04.9 

443  80.3907;, 80. !48 22

,.! '0

#0;  0, 80.

 %%   %#$%&!$:507;843 29/010.9;0-3472,$945

80. 4/0 41  84980397, 39,#00.98 8498

80. #,30 #041010.9 8498

 ;07,0

80. %!#     %&#$%&! %

%#&#$%&!

$09&5,90 490 !74.08 890. 8 7085438 -01478 09:5;07 1 .,943220/,90:54389,79: 547,3574.08 8.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74.088,304,90 $19 !74.088%0. !74-02

!,89

9 9 7/ 3/ 89

  $%#$%&!!  #   %#$$00!,7,20907,30%407,3.0843!   032,3.,308

.0

/,25

:843

3

0.43974 '!!7088

4397407%50

50329 3/ 89 89 3/

89,3/,7/

9 7/ 3/ 89

!:-,. 3/89

  '!$9. &39#097,.9 0,  

0, 507,93 !,89/0, 

3 3 3 3

$4/43!:-,. 

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451

Page 14: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 14/24

30.9434/3$09:5$9,3/,7/ &3.

Page 15: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 15/24

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

 !$%&!

4/503 4/480

4!/,25

!48943 3 !48943 3 !48 3

 '04.9  '04.9  !7088

3907;, 80. 0.947 4:394100.943 .39 %20/0503/039

4/0 #097,.9 0.9 0.943 80.311 !48 3 !48 3 #097,.9 80.

0,  80. '0 '0 #000.9 80.

 %$%&!

441$9,08 ,!7088:70 25,.9

 %20 80. !48943 3!7088:70 '04.9 

443  80.3907;, 80. !48 3

,.! '0

#0;  0, 80.

 %%   %#$%&!

$:507;843 29/010.9;0-3472,$945

80. 4/0 41  8498

0397, 39,#00.98 8498

80. #,30 #041010.9 8498

 ;07,0

80. %!#     %&#$%&! %

%#&#$%&!

$09&5,90 490 !74.08890.87085438-0147809:5;071.,943220/,90 :54389,79:547,3574.088.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74-02 !74.088,304,90 $19 !74.088%0.

4397407%50

3

3 3 3 3

0, 507,93 !,89/0,  

0.43974 '!!7088

:843  '!$9. &39#097,.9 0, .0 !,89

!:-,. 89 !:-,. $4/43

3/

3/ 899 7/ 3/ 89 9 9 7/

89,3/,7/

89 8950329 3/

  $%#$%&!!  #   %#$$00!,7,20907,30%407,3.0843!   032,3.,308

3/ /,25

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!7390/ 

Page 16: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 16/24

472 8 !,041

/ - ! %

Page 17: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 17/24

73,90/- ,90 ,.30 ,907, !,79%50

#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909

#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

!$%&!

4!/,25

!48943 3 !48943 3 !48 3

 '04.9  '04.9  !7088

3907;, 80. 0.947 4:394100.943 .39 %20/0503/039

4/0 #097,.9 0.9 0.943 80.

311 !48 3 !48 3 #097,.9 80.

0,  80. '0 '0 #000.9 80.

%$%&!

441$9,08 ,!7088:70 25,.9

  %20 $0. !48943 3

!7088:70 '04.9

443  80.

3907;, 80. !48 3

,.! '0

#0;  0, 80.

%% %#$%&!

$:507;843 29/010.9;0-3472,$945

80. 4/0 41  8498

0397, 39,#00.98 8498

80. #,30 #041010.9 8498 ;07,0

80. %!#%&#$%&! %

%#&#$%&!

3/ 89

3

3 3 3 3

80.

!,89/0, 0, 507,93 

0.43974 '!!7088

!,890, .0 :843  '!$9. &39#097,.9

$4/43

!:-,. 89 3/ !:-,.  

3/ 89

89,3/,7/

89 89

$%#$%&!!#%#$$00!,7,20907,30%407,3.0843!032,3.,308

3/ /,2550329 3/

Page 18: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 18/24

73,90/ - ,90 ,.30 ,907, !,79 %50

Page 19: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 19/24

73,90/- ,90 ,.30 ,907, !,79%50

#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909

#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

!$%&!

4/503 4/480

4!/,25

!48943 3 !48943 3 !48 3

 '04.9  '04.9  !7088

3907;, 80. 0.947 4:394100.943 .39 %20/0503/039

4/0 #097,.9 0.9 0.943 80.

311 !48 3 !48 3 #097,.9 80.

0,  80. '0 '0 #000.9 80.

%$%&!

441$9,08 ,!7088:70 25,.9

 %20 80. !48943 3

!7088:70 '04.9 

443  80.

3907;, 80. !48 3

,.! '0

#0;  0, 80.

%% %#$%&!

$:507;843 29/010.9;0-3472,$945

80. 4/0 41  8498

0397, 39,#00.98 8498

80. #,30 #041010.9 8498 ;07,0

80. %!#%&#$%&! %

%#&#$%&!

3/ /,25

$%#$%&!!#%#$$00!,7,20907,30%407,3.0843!032,3.,308

50329 3/ 89 89

89,3/,7/

9 9 7/9 7/ 3/ 89 3/ 89

3/ !:-,. $4/43

!:-,. 89

  '!$9. &39#097,.9 0, .0 !,89 :843

0.43974 '!!7088

3

0, 507,93 !,89/0, 

3

3 3 3

Page 20: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 20/24

30.9434/3$09:5$9,3/,7/ &

73,90/ - ,90 ,.30 ,907, !,79 %50

Page 21: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 21/24

73,90/- ,90 ,.30 ,907, !,79%50#0;80/- ,90 0:2-07 7,/0 !74/:.9

  5574;0/- ,90 ,;908 447 !,7909#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

%$%%$ %#&#$%%$ $!#&#  $%! $9058 %7,38107 3 $57:070,

%# $9058

!$%! $9058 $57:070,

80.

#097,.989,3.0

3

% 019 $49$0 3

0.42589 3

0.425'0 58 %,3!7088 58 0013 80. 44%20 80. 80.

,3%20 80. ..0#,25

,!,.'0 58 %!#%&#$%%$

!%$%%$

50329 70,,,   !#$$%#$%%$4808  50389

8$4 5033/ 43947

480$! .9$9,79 &5507

4/!79.9 503920 80. 407

 ;07,0

0.9474/0 !:808 0, 80.

!#%%%# 3/$905$9,79 %#

47,7/ %&&$ 849

$945 $%#%&!

#0;0780 $%#%&!#" 849

%#&#$

$09&5,90 490 !74.08890.87085438-0147809:5;071.,943220/,90:54389,79:547,3574.088.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

,90 $19 !74.088%0. !74-02 !74.088,304

$%#$%&!!#%#$$00!,7,20907,30%407,3.0843!032,3.,308

 %

% #'%

!483 '058 080.

#0,740

&$

!$ !$

4397407%50

!$ #!

  

!$

!$ $

!$

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0

Page 22: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 22/24

30.9434/3$09:5$9,3/,7/ &3

73,90/- ,90 ,.30 ,907, !,79%50

Page 23: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 23/24

#0;80/- ,90 0:2-07 7,/0 !74/:.9  5574;0/- ,90 ,;908 447 !,7909

#0;843:2-07 4/343/943 ,3:1,.9:707 #:330709

!$ %#  480' ,25$ ,25! ,25! $4!48 !!48 /' 4:398

22 22 503$4 53' !753 !753% 53$945!48 $893.0 9%25$95% $9,79%

80. 22 22 80. 80.

%25$95!48 %25$95% 13.93 %25$95$ %25$95#089,79 ' ' /$945

22 80. 22

%%#30.9 44 .$9 9$9 4/

80.

80. 22

80.

  %!#%&#$ %# $:90 70677$945 47.0/#00.9

8498 8498

!%$ % 33/!48397  89!%397 97%397 

74 7$9,79 7%20 80. #,30 #,30

% 22 80. 80. 2274 7$9,79 7%20 .9:, 22 %$% %$% !48943

80. 80.47$6 47$6 /7

&38.70 &38.70$9,79 &38.70%20 #:39 #:39$06 #:39/' #:394:39 9$%2 9/!48

22 80. 80. 22

%#&#$%&!

$09&5,90 490 !74.08890.87085438-0147809:5;071.,943220/,90 :54389,79:547,3574.088.,30$199,980924/ 157088,8-0037:333934.,308809:5;071.,9432:89-0.425090/-9003/4190819!74.08890.89,790/57088

!74.088,304,90 $19 !74.088%0. !74-02

4397407%50

4'9

4 0 7439 //0 #0,7

! ! ! ;07!%2 3!704,/ '$ ,.! $.70#49,90 !78  

$ $%! $ $ $ $ $

' ' ' ' '

$%#$%&!!#%#$$00!,7,20907,30%407,3.0843!032,3.,308

30.9434/3$09:5$9,3/,7/ &3.439740/#010703.0451!7390/ 

Page 24: IMM Process Setups

8/8/2019 IMM Process Setups

http://slidepdf.com/reader/full/imm-process-setups 24/24

472 8 !,041