IMEC CORPORATE OVERVIEWMAARTEN WILLEMS

BUSINESS DIRECTOR SMART SYSTEMS

© IMEC 2015

200mm

pilot

line Silicon

solar cell

line

Organic

solar cell

lineNERF

lab

300mm

pilot lineNano

Bio labs

▸ World-leading R&D in nano-electronics

▸ International top talent in a unique >1B€ leading-edge fab infrastructure

▸ Delivering industry relevant technology solutions serving ICT, Healthcare and Energymarkets

▸ 400 M€ R&D budget, 85%direct from industry

▸ 2300 people

▸ HQ in Leuven, Belgium

▸ 6 sites worldwide

IMEC

Belgium

Netherlands

Taiwan

office Japanoffice

USA

China

India

imec HQ

HISTORY

Established by state government of Flanders in 1984

Independent not-for-profit organization

Initial investment: 62M€

Initial staff: ~70

‣ World-leading research in nano-electronics

‣ Combining scientific knowledge with the innovative power of global partnerships in ICT, healthcare and energy

‣ Leading to Industry-relevant technology solutions

‣ Leveraging international top talent in a unique high-tech environmentcommitted to provide building blocks for a better life in a sustainable society

IMEC MISSION

2015: € 400M

IMEC REVENUE

Gov’t funding for seed R&D

Growth through industrial R&D

IMEC HEADCOUNT

2015: 2200

400 industrial residents

280 PhD students

+ 1,177 Belgians

+ 169 Dutch

71 DIFFERENT NATIONALITIES

IMEC HQ R&D CAMPUS

Leuven, Belgium

200mm

pilot line

4800 m2

24/7Silicon solar

cell line

Organic

solar cell

line NERF

lab

300mm

pilot line

4200 m2

24/7

Nano

biolabs

>1 B€ R&D Infrastructure

CLEAN ROOMEXPANSIONREADY in Q1 2016

300mm pilot

line

+4000 m2

24/7

MEMS, Sensors, Photonics

CMORE

Lithography Devices Interconnects

CORE CMOS FLEXIBLEELECTRONICS

INTERNET OF HEALTH

Wearables

Life sciences

INTERNET OF POWER

Photovoltaics/storage

Power devices

INTERNET OF THINGS

Sensing &

connectivity solutions

IMEC INNOVATION PLATFORM

IC

Link

IMEC INNOVATION CHAIN

Flexible

partnership

Shared IPShared Risk/CostGeneric Building Blocks – Pre Competitive

Proprietary IPFull Cost

LVP/Tech Transfer

Open

+

Proprietary R&D

Prototype &

Product

Dev’t

Open Research

Programs

FLEXIBLE BUSINESS MODELS

EUV Sensors Electron Detectors

Bio-Photonic sensors

Hyperspectral image sensors

IMEC CONFIDENTIAL

PCR-on-chip

IMEC LOW VOLUME PRODUCTION

DNA Sequencing chip

© IMEC 2015

LamRESEARCH

SY

STE

M

Kuwait University

IDM

/Fo

un

dry

/OSA

TEq

uip

me

nt/

Ma

teria

ls

Fa

blit

e/l

ess

NEDI

IMEC R&D ECOSYSTEM

-Responsiveness

Operational

Excellence Innovation

Global

Partnerships

Unique

Infrastructure

Top

Talent

COMMITTED TO A CULTURE OF …

MEMS, Sensors, Photonics

CMORE

Lithography Devices Interconnects

CORE CMOS FLEXIBL

EELECTRONICS

INTERNET OF HEALTH

Wearables

Life sciences

INTERNET OF POWER

Photovoltaics/storage

Power devices

IMEC INNOVATION PLATFORM

INTERNET OF THINGS

Sensing &

connectivity solutions

© IMEC 2015

SENSOR

NETWORKS

WIRELESS

COMMUNICATION

SENSOR

TECHNOLOGIES

Interconnection becomes

massive & heterogeneousat

ultra-low Power & cost

© IMEC 2015

Dumb systems

Adaptive systems

Smart systems

Perceptive systems

act how they were hardwired

act how they were programmed

Heterogenoussmart systemsAct on all available data from own sensors and the cloud

act on theirown sensors

sensing communication&

IOT + CLOUD = PERCEPTIVE SYSTEMS

imec solutions for Ultra Low power & Cost

Sensors

Sensor I/F Processing ULP Radio

Power Management

Battery / Harvesting

IoT sensor Node

MultiSensorSOC

RF energy

transfer

Near Threshold Computing

Smart Algorithms

Core Logic

Configuration Memory

Data memory

Data memory Instruction memory

Instruction memory

Instruction memory

Reconfigurable memory

Reconfig. memory

PMIC

Memory

High Speed Networks

HIGH SPEED MOBILE WIRELESS TECHNOLOGIES

© IMEC 2015

IMEC’S 5G CONNECTIVITY SOLUTIONS

Cellular: Any band – 3 GbpsConnectivity:Any band – 10 Gbps

TX1

RX1

ReconfigurableRFIC in ≤ 28nm

CMOS

TX2

RX2

RX3RX4

AT

Reconfigurable FEM in SOI CMOS and/or 3D packaging

`

AT`

RF bandwidth 57-66GHzIndoor (WiGiG) & Outdoor (Backhaul)Up to 4.6Gbps speed10m (indoor)–300 mm (outdoor)

Scaldio Phara

© IMEC 2015

NEXT GENERATION RECONFIGURABLE RADIO TRANSCEIVER IN

28NM CMOS : A GIANT LEAP IN PERFORMANCE, POWER AND AREA

▸ Digital Transmitter

- ~50% lower power and area versus Direct Conversion Arch.

- Cellular (2G,.., LTE Advanced) and Connectivity (802.11a/b/g/j/n/ac) and 802.11p for V2V and V2I

▸ 0-6GHz Low-noise Frequency synthesizer

- 256-QAM up to 5-6GHz band for 802.11ac @ 13mW

- GSM phase noise spec

▸ Low power reconfigurable Receiver

- 0.4-6GHz, NF down to 1.8 dB, < 40mW, 0.6mm2

▸ Record efficiency ADC

- Up to 13 bit, 300MS/s @ ~3mW

© IMEC 2015

PHASED ARRAY RADIO IN 28NM: VERY ENERGY EFFICIENT

RF bandwidth 57-66GHzIF bandwidth 0-880MHzUp to 4.6Gbps speeds @ 1m (MCS12)1.5Gbps up to 10m (MCS6)Antenna interface loss 0.5dB @ 60GHzPDC < 1W for TX & RX together“Beamsteering time” < 500nsec

© 2014 InterDigital, Inc. All rights reserved. 68Creating the Living Network

MILLIMETER WAVE SMALL CELL BACKHAUL

• System-oriented approach to

develop future small cell platform

• High throughput over range

suitable for urban small cell

• 60GHz Phased Array with

electronic beamsteering reduces

installation cost an provides

interference management

• Leverage high volume WiGig

baseband

• Low-Cost, High Capacity, Scalable

design for today’s Small Cell

Backhaul and future 5G millimeter

wave access

INTERDIGITAL, IMEC AND PERASO DEMONSTRATE WORLD’S FIRST WIGIG®-BASED

MILLIMETER WAVE MESH BACKHAUL SYSTEM

0

200

400

600

0 1 2 3 4 5GbpsM

ete

rs

OpenFlow-based

Mesh Controller

Deployment Tools

EXPECTED RANGE

VS. RATE

InterDigital’s EdgeHaul™

Platform

Results assume QPSK and 16 antennas

Imec-InterDigital

Backhaul module with

integrated phased array

Sensor NetworksSENSOR CONNECTIVITY SOLUTIONS

© IMEC 2015

ULTRA LOW POWER WIRELESS

World’s lowest power with state-of-the-art performance

400 MHz

medical

2.4 GHz proprietary1mW@1Mbps

802.15.6 & proprietary2.2mW@2Mbps

900MHz / 2.4GHz RFID150µW @100kbps

0.7V operation

Digital

transceiver

Personal Area

Network

ULP WiFi

for sensors

Sub-GHz

802.15.4g

IR UWB

radio

platform

6-9GHz, 6mW@1MbpsIndoor positioning & audio streaming

Body

Area

Network

radio

Event

Driven

radio

2.4GHz multi-standard5mW @1Mbps

90nm

9mW Rx150dB link budget

5mW Rx16QAM, OFDM

BLE SoC

ARM-Cortex

2.4GHz multi-standard3.7mW Rx 2.4GHz self-tuned

direct phase demodulation

multi-

standard

for IoT

Dual mode digital Tx

90nm CMOS 40nm CMOS 28nm CMOS

900MHz rectifier&PMU

RF power

transfer

© IMEC 2015

IMEC SENSOR CONNECTIVITY PROGRAMS

802.11ah sensor radio

Target the sensor node; not the router

Mandatory modes: BPSK, QPSK in 1-2MHz bandwidth

100kbps for >1km

TX<12mW@0dBm

RX<5 mWFocus on deep sleep

Sub-GHz radio for smart buildings

Regional ISM bands

802.15.4g, KNX, WMBUS

Smart utilities, M2M and home automation

1-400kbps Rx @4mW >13dBm Tx @3-50mW

Focus on deep sleep, >120dB link budget

2.4GHz multi-standard radio

SoC 40nm

BT-LE, ZigBee

ULP connectivity & healthcare

0.25-2Mbps

5mW @1Mbps

Complete SoC + SW stack

74

© IMEC 2015

▸ 4mW SoC

▸ Fully tested on CBT

WORLD’S LOWEST POWER BLUETOOTH LOW-ENERGY

RADIO

© IMEC 2015

WIFI FOR SENSORS

Lowest Power:

Target TX < 12 mW @ 0dBm

Target RX < 5 mW

>1 km distance

Pre-standard compliant System

IEEE 802.11ah Timeline

WG Letter BallotsIEEE-SA Sponsor

BallotsFinal 802.11 WG

Approval

Standards Board Final or continuous Process

Approval

Nov 2013 Nov 2015 Jan 2016 Mar 2016

Source: official IEEE 802.11 working group project timelines

Sensor Technologies

SENSOR TECHNOLOGIES

© IMEC 2015

SENSOR TECHNOLOGIES

▸ CMOS Radar

▸ Image Sensors

▸ Ion Sensors

▸ Bio Sensors

© IMEC 2015

AUTOMOTIVE RADAR TODAY: MOSTLY 24 GHZ, SIGE

Short Range Radar (SRR)<30m – 150°

Blind Spot Monitoring, Park Assist

Medium Range Radar (MRR)80m – 90°

Autonomous Emergency Braking

Long Range Radar (LRR)250m – 20°

Adaptive Cruise Control

Short Range Radar (SRR)30m – 150°

Side Impact prevention

Innovative 79GHz radar with a 2 GHz bandwidth –comparison versus 24GHz radar :• radar and antenna size are much smaller versus 24GHz• higher accuracy in Doppler resolution at higher carrier frequency• higher range resolution / object separation by distance by higher BW

IMEC WORKS AT THE IC, ANTENNA MODULE,

PLATFORM, SYSTEM MODELLINGIC module platform

integrated circuit containing the core

functionality

carrier containing antennasand mounted ICs,

similar form factor to product

carrier containing module, components and connectors,

complemented with computation component (PC, FPGA or similar)

for demonstration

© IMEC 2015

IMEC MM-WAVE RADAR ICS

1.2

mm

1.1mm

Tx

Rx

2015

Tx

28nm CMOS2.16 x 1.26 mm260mW @ 0.9/0.95V

35 dB RX Gain6.2 dB RX NF75 to 83 GHz RX Tuning Range1.5dBm RX 1dB compression point

includes Tx-Rx spillover rejection

28nm CMOS1.1 x 1.2 mm120mW @ 0.9V

>11 dBm TX power>10% Tx efficiencyETSI mask compliantcovers 77 & 79 GHz

World’s first high-resolutionlow-power CMOS radar

TRX

lab ranging experimentsconfirm high resolution

PHADAR28A PHADAR28B

© IMEC 2015

2012: system design

2013: transmitter

2014: transceiver

2015:SoC integration

2016:MIMO radar

2015

2014

IMEC 79 GHZ RADAR ROADMAP

2012 20182013

2015

2017

2017:

complete solution

in 1cm x 1cm package

© IMEC 2015

RADAR

EVOLUTION

fixed

mobile

automotive today

imec 79 GHz automotive

imec 140 GHz with antenna-on-chip

yesterday

tomorrow

© IMEC 2015

140 GHZ FULLY-INTEGRATED PERSON-DETECTION SENSORJohn’s home!

Let’s cool down the place.Baby Jane approaching!

Let’s switch off and lock the door.

Miranda looks tired!

Let’s dim the lights.

Mike looks angry!

Let’s offer him a drink.

Natasha’s head too close!

Let’s reduce the heat.

Francis is too far from the left speaker!

Let’s increase its power.

low-cost,low-power, miniatureperson detection

and micro-Doppler sensor

Frank is drowsy!

Let’s suggest a break.

© IMEC 2015

building blocks&

system design2016 single-antenna

transceiver2017array

&demonstrator

2018

NEW 140 GHZ RADAR SENSOR PROGRAM

140 GHz IC R&D

system & app development platform

PA

on-chip antenna

measurement setup

frequency generation

transmitter

receiver

transceiver

antenna array

demo code

digital code

link budget

micro-Doppler parameters

demo platform

IC baseband integration

© IMEC 2015

IMEC IMAGE SENSORS

Machine Vision

High-end

transports,

security &

surveillance

Space, Physics &

Scientific

Life-Science

& Medical

Imaging

Industrial

Instrumentation High speed

Low noise

Low power

Radiation

Hard

Non-Visible

sensing

High QE

Spectral

sensing

Key features:

Desi

gn

in

novati

on

Pro

cess

Tech

no

logie

s

+

© IMEC 2015

IMAGER PLATFORMS

CMOS

module

FlexCIS

module

TDI

module

High-speed

module

BSI-3D

module

HSI

module

ARC

module

3 KEY

PLATFORMS›

© IMEC 2015

TECHNOLOGY MODULES

HSI

MODULE

ARC

MODULE

PASSIVE

CARRIER

WAFER

LIGHT

OX-OX

BONDING

10%

30%

50%

70%

90%

250 350 450 550 650 750 850

QE

Wavelength [nm]

MEASURED QE

UV

VIS

ARC

POST-PROCESSED

CAVITY FILTERL

TX [%]

FWHM ~

5-20nm

© IMEC 2015

IMEC DESIGNTECHNOLOGY

IMAGER PLATFORM

PROTOTYPES›

LOW-NOISE TDI PLATFORM

HIGH-SPEED HIGH-QE PLATFORM

MONOCHROME COLOR HSI

GLOBAL SHUTTER

2.5-5µm

2-8Mpix

1000fps

70dB DR

70-90% QE

OPTIONS:

CCD TDI IN CMOS

5µm

512 stages

>0.99995 CTE

>50kHz line rate

MONOCHROME HSI

OPTIONS:

© IMEC 2015

IMEC WAFER-LEVELPOST-PROCESSING

INTEGRATED

HYPERSPECTRAL FILTERS›

CONCEPTCOMMERCIAL

PARTNERS

TX [%]

FWHM ~

5-20nm

POST-PROCESSED

CAVITY FILTERL

CUSTOM

NARROW-

BAND FILTERS420nm-1000nm

IMPLEMENTATIONS

MOSAIC

LINE-SCAN

TILED

IMEC Hyperspectral sensors

in Ximea cameras

10X weight reduction

RGB | Hyperspectral

Vegetation monitoring applications● Genotyping● Phenotyping● Biodiversity● Invasive species● Environmental stress● Climate change

MEMS, Sensors, Photonics

CMORE

Lithography Devices Interconnects

CORE CMOS FLEXIBL

EELECTRONICS

INTERNET OF POWER

Photovoltaics/storage

Power devices

IMEC INNOVATION PLATFORM

INTERNET OF THINGS

Sensing &

connectivity solutions

INTERNET OF HEALTH

Wearables

Life sciences

© IMEC 2015

It is about truly personalized health and lifestyle solutions,

and making health management mobile, ubiquitous and convenient.

It is about advanced wearable platforms on new body

locations and advanced smart peripherals around us.

Expand beyond monitoring – opportunities for feedback, for

coaching, for stimulation, for treatment, for prevention.

VISION WEARABLES

© IMEC 2015

VISION:

MEDICAL QUALITY DATAin

EVERYONE’S

REACH

© IMEC 2015

ApplicationsData

ScienceSystems

Circuits

& SensorsTechnology

INTEGRATED APPROACH: HELPING OUR

CUSTOMERS SHORTEN THEIR TIME-TO-MARKET FROM TECHNOLOGY BUILDING BLOCKS TO FULL APPLICATION VALIDATION

imec key strengths: we can provide all the necessary key ingredients that enable your product using customer components and unique imec components

© IMEC 2015

• Actimetry / Activity Monitoring

• Energy Expenditure (EE)

• Cardiorespiratory fitness (CRF)

• Health coaching

• Rehydration / dehydration

• Stress / relaxation

• Mental engagement / cognition

PERSONAL HEALTH:

PREVENTION THROUGH HEALTHIER

LIFESTYLE

KEY PERSONAL HEALTH

APPLICATIONS

Imec partners in healthcare

COLLABORATE TO INNOVATE !

BIO-IMPEDANCE

POSTURE

ACTIVITY

HEART RATE

HEART RATE VARIABILITY

MULTI-

PARAMETER

PATCH

imec TECHNOLOGY TO IMPROVE THE

CARE AND QUALITY OF LIFE

Day 1-1 Day 1-2 Day 2-1 Day 2-2 Day 3-2 Day 3-3

imec TECHNOLOGY

UNDERGOING CLINICAL TESTING

Day 1-1 Day 1-2 Day 2-1 Day 2-2 Day 3-1 Day 3-2 Day 4-1 Day 4-2

BODY FLUID

1. Prevent readmissions 2. Monitor treatment efficiency

BIO-IMPEDANCE

Day 1-1 Day 1-2 Day 2-1 Day 2-2 Day 3-2 Day 3-3

imec TECHNOLOGY

UNDERGOING CLINICAL TESTING

Day 1-1 Day 1-2 Day 2-1 Day 2-2 Day 3-1 Day 3-2 Day 4-1 Day 4-2

BODY FLUID

1. Prevent readmissions 2. Monitor treatment efficiency

BIO-IMPEDANCE

Belli

From Bloom.

A medical-grade smart

device designed for women

www.bloom.life

Empowered by imec’s ULP SOC

CAPTURING A 360˚ VIEW OF MATERNAL & FETAL HEALTH

Stress Calorie Expenditure

FetalHeart Rate

Contractions

FetalMovement

Activity

Heart RateVariability

Heart Rate

Sleep

SAMSUNG SIMBAND

IMEC SENSING TECHNOLOGY

© IMEC 2015

IMEC & SAMSUNG DEVELOP

SIMBAND PLATFORM

▸ ECG▸ HR, HRV▸ Blood Pressure▸ Bio-Z▸ GSR▸ Actimetry

Based on imec’s ULP multisensor SOC & algorithms

http://www.samsung.com/us/globalinnovation/innovation_areas/

© IMEC 2015

NeuroPro specific EEG system

created with imec circuits and

imec system electronics

FROM PLATFORM TO PRODUCT

“imec-inside”

imec generic EEG development platform

http://www2.imec.be/be_en/press/imec-news/neuropro.html

IMEC MULTI-SENSOR MIXED-SIGNAL SOC

World Lowest Power Sensor Hub for Bio-Medical Applications

Analog + DSP + Algorithms = 750uW in total

multi-sensor interface

embedded signal

processing

power management

A versatile platform for IoT and Wearable Devices

Interfacing with Various Sensors

Flexible to integrate Different Algorithms at Extreme Low Power

Managing batteries and generating supply voltage for the system Connected to

Different Platforms

Energy Efficient and Minimum Package Size

© IMEC 2015

AFE

extension

Dig

ital

Inte

rfac

eAFE

extension

Dig

ital

Inte

rfac

eAFE

extension

Dig

ital

Inte

rfac

e

AFE

extension

Dig

ital

Inte

rfac

e

Analog Expansion

I2C

Analog

What is inside MUSEIC?

Generic

AFE

Dedicated

AFE

Generic

Digital

Dedicated

Digital

Power Management

Standard Digital Interface

Well Established COTS Sensors

TemperatureoC

Flow

m3/h

Rotationo/h

Acceleration

mg

Pressure

Pa

I2C, SPI, or UART

Analog

Standard CompliantBiomedical Sensors

Electrocardiogram

ECG

ElectroEncephalogram

EEGElectromyogram

EMG

Photoplethysmograph

PPG

Bio-Impedance

Bio-Z

Galvanic Skin Response

GSR

AnalogSample Rate Conversion

Fourier Transform

FFT, DFT Wavelet Transform

CWT, DWT

Encryption

AES128

Supported with Dedicated HW

Accelerators

Accurate time stamping

Filters

FIR, CIC

Generic Digital

© IMEC 2015

Using MUSEIC for different applications

MUSEICGEN I

MotionSensor

BTLE

PressureSensor

FLASHStorage

Activity Monitoring Device

MUSEICGEN I

MotionSensor

BTLE

FLASHStorage

Portable EEG (up to 16 leads)

AnalogExtensio

n

AnalogExtensio

n

AnalogExtensio

n

MUSEICGEN I

MotionSensor

BTLE

FLASHStorage

ECG Patch (Bio-Z & 3-Lead ECG)

Display

EEGelectrodes

MUSEICGEN I

MotionSensor

BTLE

FLASHStorage

Sleep Monitoring (EEG, EOG, EMG)

AnalogExtensio

n

AnalogExtensio

n

EEGelectrodesEOG

Electrode

EMGElectrode

Battery

Battery Battery

Battery

ECGand Bio-Z electrode

© IMEC 2015

IMECs MULTI-SENSOR HUB (MUSEIC) ROADMAP

MUSEIC Gen 2 MUSEIC Gen 3

Available

MUSEIC Gen I

2016

7mm x 7mm

New Integrated Sensors:

Integrated PPG

Wide Band Bio-Impedance

Galvanic Skin Response sensor

New Power Management

Efficient LED Drivers

Integrated Power Management with

Buck & Boost converters

New Processor:

Cortex M0+

Sensors:

Biopotentials (ECG, EEG, etc)

Bioimpedance

High Resolution ADC (18b)

Medium Resolution ADC (12b)

Processor:

Cortex M0

1Mbit SRAM

Hardware Accelerators

2017-2018

New Integrated Sensors

New Power Management

Newer Technology Node

More Memory, Lower Power,

Higher Performance Processing

© IMEC 2015

CELL SORTER

In vivo probes

In vitro systems

Cyto-metry

Molecular diagnostics

IMEC’S LIFE SCIENCES

Si nanotechnology for personal

diagnostics

& therapy

BIOREACTORS

• 456 electrodes• On-chip amplification, filters,

analog-to-digital conversion for 52 channels

• Very-low-noise: 4 μVrms• Recording + stimulation

64-site probe

+

10 mm

2 m

100 kg

+

IMEC NEUROPROBES

Many passive probes+

Rack of electronics Integrated onto single chip

VALIDATION

4655 u

m

ch 20

ch 31

ch 37

ch 48

1.38 1.39 1.41time (s)

time (s)

Raw filtered data (0.3-6.0 kHz, 30 kS/s)

1.40 1.42

1.38 1.39 1.40 1.41 1.42

C.M. Lopez, et al. ISSCC Conf., 2013,

San Francisco

© IMEC 2015

PHOTONICS ON TOP OF CMOS

Full photonics chip combined with microfluidics

Not all layers are required for all applications

Back-end of line

Active CMOS (e.g.

pixel)

Bottom cladding

Waveguide layer

Integrated Filter

Top cladding

Microfluidics

Metal Reflector

© IMEC 2015

DEVELOPMENT OF SIN COMPONENT LIBRARY

Waveguides: low losses!

Splitters

Arrayed waveguide & Echelle gratings

Grating couplers

Evanescent couplers Mach-Zehnder & Fabry-Perot interferometers

© IMEC 2015

Si PHOTONICS FOR LIFE SCIENCE

Imec silicon photonics

chip inside

© IMEC 2015

Granulocyte Red Blood cellLymphocyte

IMEC CELL SORTER

In flow on-chip imaging

& classification of blood cells

sorting speed up to 1000 cells/s per channel

In flow reconstruction of a granulocyte flowing at 1 mm/s

fluidic cell sorter on chip

© IMEC 2015

many $750k machines

single, disposable chip

DNA SEQUENCING ON-CHIP

Single molecule

DNA sequencing

© IMEC 2015

© IMEC 2015

ACCELERATING PRODUCT INNOVATION

7x faster

3x smaller

2x cheaper

Enabled by imec’s photonic chip

PacBio RS II Sequel System

© IMEC 2015

imec PCR-on-ChipDNA amplification in 3 mins

DIAGNOSTICSFOR INFECTIOUS DISEASES

≈20x

faster

imec PCR-on-ChipDNA amplification in 3 mins

© IMEC 2015

•Microfluidic silicon platform fully developed•Mixers, Filters, Microreactors.

•On chip sample preparation•From blood to purified and amplified DNA

•Fast amplification (4 min)

•Multiplex amplification (more fragments in the same reactor)

•On chip selective amplification•Only DNA segments containing SNPs are amplified

•Miniaturized electrochemical detector•1 mL volume

•Dry chemistry

•DNA separation

•Heterogeneous integration of conductive polymer

valves and pumps.

A complex

microfluidic Si chip

Integration of pumps and valve with the

Silicon chip

ON CHIP DNA AMPLIFICATION

DNA

separation

DNA with SNPSNP

© IMEC 2015

EXAMPLE CAPILLARY COMPONENTSTrigger valve Tooth pump with controlled filling

© IMEC 2015

© IMEC 2015

Image: Best Home Appliance

© IMEC 2015

Valu

e

80 millioncars/year

2000 milliondevices/year

80,000 millionpieces/year

10,000,000 millionpackages/year

Image: Best Home Appliance

© IMEC 2015

Valu

e

80 millioncars/year

2000 milliondevices/year

80,000 millionpieces/year

10,000,000 millionpackages/year

Image: Best Home Appliance

$100+ billion

OPPORTUNITY

for item level

electronics

APPLICATION CASE: RFID IN RETAIL

APPLICATION CASE: RETAIL LOGISTICS

APPLICATION CASE: SMART PACKAGING

APPLICATION CASE: SENSOR PATCH

Thin-film electronics

Made in very large volumes

on flat-panel display lines

THIN-FILM ELECTRONICS TECHNOLOGY

Form factor

Thin (<25μm) flexible plastic

substrates

Monolithic integration

Sensors, display segments, ...

© IMEC 2015

February 22-26, 2015

San Francisco, CA

“IGZO thin-film transistor based flexible NFC tags powered by

commercial USB reader device at 13.56MHz”

Getting closer to ISO14443 standard data rates

Thin-film RFID/NFC tags – item level IoT

Diode-load

Dual-gate M2

Dual-gate M3

Pseudo-CMOS

[1] Zero-VGS-load

[2] Diode-load

# TFTs/inv 2 2 2 4 2 2

Area [mm2]2.70x2.9

8(8.046)

3.91x3.87

(15.132)

2.70x3.14

(8.478)

4.69x3.36

(15.759)

7x10(70)

3.9x1.5(5.85)

# TFTs 218 218 218 436 1026 222

# VDD 2 3 3 3 2 2

Noise margin<7.4% VDD/2

~36% VDD/2

~40%VDD/2

~24%VBIAS/2

~15% VDD/2

11.6% VDD/2

Datarate

71.6kbit/s

11.3kbit/s

25.8kbit/s

43.9kbit/s

0.05kbit/s

3.2kbit/s

ISO15693

Yes Yes Yes Yes No No

Carrier PEN-film PEN-film PEN-film PEN-film Glass Glass

[1] H. Ozaki, et al., Symposium on VLSI Circuits Digest of Technical Papers, 2011[2] B.-D. Yang, et al., ETRI Journal, Volume 35, Number 4, August 2013

Thin-film ion sensors Thin-film photodetectors

• Printed solid-state ion-selective

electrodes

• pH, Cl-, Na+, K+

• pH: 2-10 pH range, 0.1 accuracy

• Quantum efficiency @ 550nm

• Linear response down to 3.5 nW/cm2

• Dark current <100pA/cm2

THIN-FILM SENSORS

© IMEC 2015

Towards stretchable displays

MEMS, Sensors, Photonics

CMORE

Lithography Devices Interconnects

CORE CMOS

IMEC INNOVATION PLATFORM

INTERNET OF THINGS

Sensing &

connectivity solutions

INTERNET OF HEALTH

Wearables

Life sciences

FLEXIBL

EELECTRONICS

INTERNET OF POWER

Photovoltaics/storage

Power devices

POWER DEVICES200 mm GaN-on-Si

© IMEC 2015

Page.4Ver1.6

Lower Loss Lower Cost Smaller Size

IGBT GaN-HEMT

Realization of conversion AC to AC

GaN-HEMT

IGBT GaN-HEMT

Power loss:60% decreaseHigher efficiency than IGBT(99.2% achieved)

Device cost: GaN SiCSystem cost: GaN SiC

Decrease loss by high frequency operationPossible to highly integrated from lateral structure

Merit of GaN power devices

AC F

ilter

3phasemotor

3phaseAC

GAN POWER DEVICES: THE POTENTIAL

SIZE REDUCTION EFFICIENT SWITCHING

© IMEC 2015

EFFICIENT POWER SWITCHING

8” GAN-ON-SI

8” GaN-on-Si

wafer

imec E-mode power device

Au free devices - Si foundry

compatible

Vth >2V, Vbd=200V

Ron = 7 Ohm.mm

Ids@10V > 450mA/mm

No hysteresis

© IMEC 2015

ENVIRONMENTALMONITORING

© IMEC 2015

Available today

▸ NO2, NO; ppb sensitivity

▸ Miniaturized sensor on Si

- 8” process flow

- Small 1x2mm2

▸ Hand-held sensor demo with readout

▸ Trial test results in outdoor

environment

2 mm

GAN SENSOR

ENERGY STORAGE

SOLID STATE BATTERIES

© IMEC 2015

KEY DRIVERS IN BATTERY RESEARCH

Form-factor

Safety

Fast charging

Volume,Weight

Lifetime

Solid state

Power Density

Energy Density

Mechanical flexibility

Reliability, Cyclability

© IMEC 2015

OUR APPROACH TO SOLID-STATE BATTERIES

WITH HIGH SPEED + HIGH CAPACITY

High speed:

How: Thin electrodes and electrolyte

Target: 80% capacity at 20C (3 min charging)

compared to current 80% at 2C (30 min) wet cell

High capacity:

How: 3D structure (micropillars)

Target: 60-120mAh/cm3

same as effective cell capacity of current wet cells 125-1

50 u

m

250nm

250nm<250nm

© IMEC 2015

OUR TARGET PERFORMANCE FOR SS BATTERY

Reach effective capacity of current wet batteries, but with fast charging capability (5-20C) and thus power

Exceed effective capacity of wet microbatteries (button cells)

3D TFB targets

3D TF SSB

0.5-10 mA.h/cm3

60 -120 mA.h/cm3

25-50 mA.h/cm3

TF-SSB

TF-SSB

Wet cells

cylindrical prismatic

Polymer-gel Button cell

Wet cells

© IMEC 2015

LamRESEARCH

SY

STE

M

Kuwait University

IDM

/Fo

un

dry

/OSA

TEq

uip

me

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Ma

teria

ls

Fa

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NEDI

IMEC R&D ECOSYSTEM

aspire - invent - achieve