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%$ !$$ #*# "%( ! %$ %! ! % 3=;8==< 7; &"" <AB7BCB3 =4 <2CAB@7/: '173<13 (63 )<7D3@A7BG =4 (=9G= =;/0/ "35C@=9C (=9G= />/< (3: 4/F 3;/7: 08==<97;77ACB=9G=/18> $%#% +3 >@=>=A3 / <3E 4/0@71/B7=< ;3B6=2 4=@ </<=4:C7271 23D713 E7B6 <=D3: A6/>3A CA7<5 B63@;/: A6/2=E 3D/>=@/B7=< /<2 E3B /<7A=B@=>71 3B167<5 7< /?C3=CA $ A=:CB7=< (63 A6/2=E 3D/>=@/B7=< =4 ;3B/: =<B= B63 A723E/::A =4 B=>=5@/>671 43/BC@3A 4=::=E32 0G B63 A3:31B7D3 3B167<5 =4 B63 AC0AB@/B3 53<3@/B3A </@@=E 16/<<3: AB@C1BC@3A E7B6 </<=;3B3@ A1/:3A <2 B63 E3B /<7A=B@=>71 3B167<5 =4 A7:71=< AC0AB@/B3 7< $ A=:CB7=< >@=D723A B63 E3::2347<32 4:C7271 16/<<3:A E7B6 B@7/<5C:/@ 1@=AAA31B7=<A /A E3:: /A 16/;03@ AB@C1BC@3A E7B6 ;71@=;3B3@ A1/:3A +3 /:A= 23;=<AB@/B3 B6/B / A7<5:3 # ;=:31C:3 1=C:2 03 2@7D3< 7< B63 </<=4:C7271 23D713 0G 3:31B@=>6=@3A7A 7< E6716 B63 :7<3/@ AB@3B167<5 /<2 3:31B@=>6=@3B71 ;75@/B7=< =4 / # >=:G;3@ ;=:31C:3 1=C:2 03 =0A3@D32 /B / A7<5:3 ;=:31C:3 :3D3: 7</::G E3 7<D3AB75/B3 :3<5B623>3<23<B ;=07:7BG =4 16@=;=A=;3A7H32 # 7< </<=4:C7271 16/<<3: /<2 AC113AA4C::G A3>/@/B3 27443@3<B :3<5B6A =4 # C<23@ A7;C:B/<3=CA /1B7=< =4 3:31B@71 473:2 /A E3:: /A >@3AAC@3 5@/273<B %#!&%! $C@ @3A3/@16 5=/:A /@3 B= 0C7:2 </<=AGAB3;A /<2 4/0@71/B3 </<=A1/:3 23D713A 7< >/@B71C:/@ 4=@ 07=A3<A7<5 7< A7<5C:/@ :3D3: B6@=C56 0=B6 0=BB=;C> /<2 B=>2=E< />>@=/163A +3 4=1CA =< 7<B3@27A17>:7</@G @3A3/@16 /0=CB :=1/: M0=BB=;C>N AC@4/13 ;=27471/B7=< CA7<5 4C<1B7=</: A3:4/AA3;0:32 ;=<=:/G3@A /<2 MB=>2=E<N />>@=/163A 4=@ ;71@=</<= >/BB3@<7<5 B316<=:=573A 3G B316<=:=573A 1=<13<B@/B3 =< 6756@3A=:CB7=< AC@4/13 >/BB3@<7<5 E7B6 A7;>:3 :=E1=AB B316<7?C3A AC16 /A ;71@=1=<B/1B >@7<B7<5 L% 4:3F70:3 >=:G;3@ 0/A32 A=4B :7B6=5@/>6G /<2 ;71@= 3D3< </<= A6/2=E;/A9A >/BB3@<7<5 < A>7B3 =4 7BA 5@3/B D3@A/B7:7BG L% 6/A AB7:: ;/<G 274471C:B73A 7< B63 />>:71/B7=< /A / >@/1B71/: >/BB3@<7<5 B316<=:=5G 4=@ / :/@53 /@3/ (63@34=@3 E3 23D3:=>32 B63 =>B7;7H32 L% ;3B6=2A 7< :7?C72 3<D7@=<;3<B /<2 23A75<32 6G0@72 AB/;> /<2 AB/;>7<5 23D713 B= 7<1@3/A3 B63 C<74=@;7BG =< B63 >/BB3@< /<2 231@3/A3 B63 234=@;/B7=< =4 / AB/;> "=@3=D3@ :7?C72L% B316<7?C3 @32C132 B63 1=::/>A3 =4 %"' B7>A /<2 B63 2744CA7=< =4 '" ;=:31C:3A A= B6/B 7B A6=E32 B63 >=AA707:7BG 4=@ >@/1B71/: />>:71/B7=< B= B63 </<=>/BB3@<7<5 >@=13AA 7< / :/@53 /@3/ /A32 =< B63A3 ABC273A =< </<=;71@= 1=;>=<3<BA AGAB3;A 4=@ B63 4/0@71/B7=< =4 <=D3: </<= 23D713A E3 7<D3AB75/B3 B= 23D3:=> D/@7=CA ;71@= A3<A=@A 4=@ 07=:=571/: />>:71/B7=<A AC16 /A 7 "$' 1=;>/B70:3 4/0@71/B7=< =4 B=>5/B32 ( A7:71=< </<=E7@3A 4=@ 23B31B7=< =4 >@=B37<A > :3D3: 3D3< ;3B/AB/B71 @3:/B32 1/<13@ ;/93@A /<2 :/03:4@33 07=A3<A=@ 1=;>=<3<BA 77 B3;>3@/BC@3 ;3/AC@3;3<B =< @3A7AB7D3:G 63/B32 </<=E7@3A 4=@ B63 ABC2G =< A7<5:3 ;=:31C:3A /<2 777 /@07B@/@GA6/>32 </<=16/<<3:A 4/0@71/B7=< B= /1673D3 A7<5:3 # AB@3B167<5 3B1 A7<5:3 07=;=:31C:3 # <=E 2@/EA ;C16 /BB3<B7=< A7<13 @3:3D/<B 27;3<A7=< =4 </<=;3B3@ :3D3: 167>A /@3 >=AA70:3 B= 03 ;/23 0G </<=4/0@71/B7=< B316<7?C3A ;=<5 ;/<G # /</:GA7A 23D713A @313<B:G </<=16/<<3: 7A 6756:756B32 /A 7B >@=D723A / >@=>3@ >:/B4=@; 0/A32 =< # AB@3B16 >63<=;3<=< 7<A723 </<=16/<<3: +3 E7:: 1=<B7<C3 =< B63 23D3:=>;3<B =4 1=;>:3B3 4/0@71/B7=< =4 B63A3 </<=16/<<3:A /<2 233> 7<D3AB75/B7=< E7B6 D/@7=CA # =@ 3<HG;3 07= ;=:31C:3A 7</::G E3 <=E /7; B= @3/:7H3 / B==: 4=@ B63 ABC2G =4 B3;>3@/BC@3 23>3<23<B >63<=;3</ =4 07=;=:31C:3A 35 # /<2 >@=B37<A /B / A7<5:3 ;=:31C:3 :3D3: $< B63 =B63@ 6/<2A B63@;/: 1=<2C1B7D7BG 7< </<=A1/:3 A>317/::G /4431B32 0G 1=<B@70CB7=< =4 AC@4/13 >6=<=<>=:/@7B=<A '%%A E7:: 03 7<D3AB75/B32 E7B6 ;71@=</<= 63/B3@A +3 /7; /B B63 ;=23:7<5 B63 4/0@71/B7=< /<2 B63 16/@/1B3@7H/B7=< =4 ;71@=</<=AB@C1BC@3A 5:/AA BC03A 3F6707B7<5 /<=;/:=CA B63@;/: 1=<2C1B7D7BG 2C3 B= B63 1=<B@70CB7=< =4 '%%A (63 23>3<23<13 B= B3;>3@/BC@3 /<2 B= </<=AB@C1BC@3 A7H3A E7:: 03 3F>:=@32 7< =@23@ B= >=AA70:G @3D3/: A3D3@/: '%%A 43/BC@3A AC16 /A /BB3<C/B7=< :3<5B6 /<2 >@32=;7</<B E/D3:3<5B6 3@3 B6@33 B=>71A /0=CB #"' 4=@ 07=;=:31C:/@ 3<57<33@7<5 /@3 7<B@=2C132 7< 0@734 !& ' %! ' % "% !%* ! ! !&$ $"#%! (63 C<74=@;:G 16/@532 >=:G;3@ AC16 /A # ;=:31C:3 ;=D3A E7B6 :3<5B67<23>3<23<B ;=07:7BG 7< B63 3:31B@71 473:2 031/CA3 B63 4@71B7=< 4=@13 7A >@=>=@B7=</: B= # 1=<B=C@ :3<5B6 /A E3:: /A B63 3:31B@=AB/B71 4=@13 (67A A7H37<23>3<23<B ;75@/B7=< >@3D3<BA A3>/@/B7=< 7< 4@33 0C443@ A=:CB7=< /<2 B6CA B63 A73D7<5 ;/B@7F AC16 /A /5/@=A3 53:A A6=C:2 03 CA32 =E3D3@ B63 #A /0=D3 / 1@7B71/: :3<5B6 BG>71/::G I 0/A3>/7@A A6=E B63 :3<5B67<23>3<23<B 3:31B@=>6=@3B71/: ;=07:7BG 3D3< 7< A73D7<5 ;/B@7F 031/CA3 B63 :=<5 # ;=:31C:3 031=;3A 6756:G =@73<B32 /:=<5 B63 27@31B7=< =4 3:31B@71 473:2 7< B63 53:A A / @3AC:B B63 >C:A32 473:2 53: 3:31B@=>6=@3A7A % 7A 53<3@/::G CA32 4=@ B63 :=<5 # A3>/@/B7=< E6716 7A BG>71/::G =<32/G >@=13AA (= /1673D3 B63 A7H323>3<23<B 036/D7=@ =4 B63 :=<5 #A / <=D3: 1=<13>B B63 3:31B@=>6=@3A7A C<23@ >@3AAC@3 5@/273<B 7A >@=>=A32 4:C7271 23D713 =4 </<=A:7B ABG:3 7A 4/0@71/B32 =< 313 978-1-4673-4842-3/13/$31.00 c 2013 IEEE

[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - NEMS meets

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Page 1: [IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - NEMS meets

313978-1-4673-4842-3/13/$31.00 c©2013 IEEE

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314 2013 IEEE 5th International Nanoelectronics Conference (INEC)

Page 3: [IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - NEMS meets

2013 IEEE 5th International Nanoelectronics Conference (INEC) 315