HoloDark – holography for strain HoloDark generates quantitative deformation and strain maps over wide fields of view from a pair of dark-field electron holograms [1,2]. Key Features ◆ Determines geometric phases from dark-field electron holograms, and corresponding deformation maps ◆ Generates full 2D deformation tensor from pairs of dark- field holograms of differing diffraction vectors ◆ Displays color maps and contours of strains ◆ Aligns multiple holograms by correcting drift, rotation and magnification changes ◆ Corrects for Fresnel fringes and optical distortions due to the projector lens system and CCD camera [4] [1] M.J. Hÿtch, F. Houdellier, F. Hüe, and E. Snoeck, Nature 453 (2008) 1086-1089. Nanoscale holographic interferometry for strain measurements in electronic devices [2] F. Hüe, M.J. Hÿtch, F. Houdellier, H. Bender, and A. Claverie, Appl. Phys. Lett. 95, 073103 (2009). Strain mapping of tensiley strained silicon transistors with embedded Si1‐yCy source and drain by dark‐field holography. [3] M.J. Hÿtch, F. Houdellier, F. Hüe, and E. Snoeck, International Patent Application N° PCT/FR2008/001302 [4] F. Hüe et al. J. Electron Microscopy 54 (2005) 181-190. Calibration of projector lens distortions References: HoloDark is based on the patented technique and routines developed by Martin Hÿtch et al [3]. -3% 3% ε xx -2% 2% ε xx ε zz δ xz ε xz ω xz 900 nm 200 nm Strained-silicon MOSFET transistor [1] Dark-field hologram Strain map, ε xx Finite element model Bright-field image 2D Strain Tensor HoloDark DigitalMicrograph Plug-in Lattice Deformation and Strain Analysis using Dark-Field Holography www.hremresearch.com / [email protected] / +81(493)35 3919

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Page 1: HoloDark – holography for strain - HREM Research

HoloDark – holography for strain HoloDark generates quantitative deformation and strain maps over wide fields of view from a pair of dark-field electron holograms [1,2].

Key Features ◆  Determines geometric phases from dark-field electron holograms, and corresponding deformation maps ◆  Generates full 2D deformation tensor from pairs of dark-field holograms of differing diffraction vectors ◆  Displays color maps and contours of strains ◆  Aligns multiple holograms by correcting drift, rotation and magnification changes ◆  Corrects for Fresnel fringes and optical distortions due to the projector lens system and CCD camera [4]

[1] M.J. Hÿtch, F. Houdellier, F. Hüe, and E. Snoeck, Nature 453 (2008) 1086-1089. Nanoscale holographic interferometry for strain measurements in electronic devices [2] F. Hüe, M.J. Hÿtch, F. Houdellier, H. Bender, and A. Claverie, Appl. Phys. Lett. 95, 073103 (2009). Strain mapping of tensiley strained silicon transistors with embedded Si1‐yCy source and drain by dark‐field holography. [3] M.J. Hÿtch, F. Houdellier, F. Hüe, and E. Snoeck, International Patent Application N° PCT/FR2008/001302 [4] F. Hüe et al. J. Electron Microscopy 54 (2005) 181-190. Calibration of projector lens distortions

References:

HoloDark is based on the patented technique and routines developed by Martin Hÿtch et al [3].

-3%

εxx

-2%

εxx

εzz

δxz

εxz

ωxz

900 nm

200 nm