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High throughput pumping of dangerous gases with a multistage roots vacuumpumpJ. Henning, E. Rossmanith, and J. Steinmüller Citation: Journal of Vacuum Science & Technology 20, 1023 (1982); doi: 10.1116/1.571533 View online: http://dx.doi.org/10.1116/1.571533 View Table of Contents: http://scitation.aip.org/content/avs/journal/jvst/20/4?ver=pdfcov Published by the AVS: Science & Technology of Materials, Interfaces, and Processing Articles you may be interested in Modeling of a multistage claw rotor vacuum pump J. Vac. Sci. Technol. A 13, 536 (1995); 10.1116/1.579780 Throughputtype pumps and ultrahigh vacuum J. Vac. Sci. Technol. A 12, 897 (1994); 10.1116/1.579066 High throughput tandem turbomolecular pump for extreme high vacuum J. Vac. Sci. Technol. A 8, 2768 (1990); 10.1116/1.576665 A new type of vacuum pump for corrosive gases and vapors J. Vac. Sci. Technol. A 5, 2620 (1987); 10.1116/1.574398 Threestage Roots high vacuum pump J. Vac. Sci. Technol. 13, 630 (1976); 10.1116/1.569047
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 160.36.178.25 On: Mon, 22 Dec 2014 03:28:22
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 160.36.178.25 On: Mon, 22 Dec 2014 03:28:22
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 160.36.178.25 On: Mon, 22 Dec 2014 03:28:22
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 160.36.178.25 On: Mon, 22 Dec 2014 03:28:22
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 160.36.178.25 On: Mon, 22 Dec 2014 03:28:22
