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High Power Semiconductor Lasers
Gary M. Smith
IEEE Photonics Society, Boston Section Seminar
14 Nov 2012
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views expressed are those of the authors
and do not reflect the official policy or position of the Department of Defense or the U.S. Government.
GMS
2
Semiconductor Lasers
• Semiconductor lasers (also called diode lasers) are the smallest family of lasers - can be about the size of a sesame seed
• Technology to make them is similar to that used to make computer chips (integrated circuit fabrication)
• Easy to provide power with low voltages and currents
0.5 mm
0.1 mm
0.3 mm
Bare Laser Chip
6 mm diameter package
Optical fiber coupled
laser diodes for
telecommunication
(vol. of 2 cm3)
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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3
High Power Semiconductor Lasers
Single-Mode Emitter
e.g. Slab-Coupled
Optical-Waveguide Laser
(SCOWLs)
Multi-Mode Emitter
e.g. Broad-Area Laser
SCOWL
M2 ~ 1.2
Near diffraction-limited
Multiple modes
5000 µm
5 µm Both
Large mode areas (spread heat)
Power ~ 1-20 W
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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4
Why Semiconductor Lasers?
• Most efficient laser systems
available use semiconductor
lasers directly or indirectly
• Indirect: brightness
conversion using laser diode
pumps for solid-state lasers
(DPSS), semiconductor
discs, fiber lasers, or alkali
lasers (DPAL)
Semiconductor Laser
Pumped
Schröder, D., et al., “Roadmap to low cost, high
brightness diode laser power out of the fiber”,
Proc. SPIE 7583, 758309-1 (2010).
Transforming Watts to kiloWatts
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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5
Outline
• Introduction
• 5 key high-power laser attributes
• Survey of state-of-the-art semiconductor laser systems
• Alternative: surface emitting lasers
• Beam combining for higher brightness
• Summary
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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6
5 Key High Power Laser Attributes
1. Power
– How high?
Power
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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7
Courtesy Erik Zucker, JDSU
Bro
ad
-Are
a L
asers
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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5 Key High Power Laser Attributes
1. Power
– How high?
2. Efficiency
– (Output optical power)
(Input electrical power)
Efficiency
Power
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Laser Power and Efficiency
0%
10%
20%
30%
40%
50%
0
0.5
1
1.5
2
2.5
3
3.5
0 1 2 3 4 5 6
PC
E (%
)
Op
tica
l Po
we
r (W
)
Current (A)
MIT-LL SCOWL
λ = 1060 nm
L = 10 mm
T = 15°C
Coherent
λ ~ 980 nm
Broad-Area Lasers
100 µm Stripes, 2-4 mm cavity lengths
Pmax ~ 5-20 W
Efficiency ~ 50-70%
M2 ~ 5-20
Courtesy Rajiv Pathak, Coherent
Single-Mode Lasers
5 µm Waveguide, 2-10 mm cavity lengths
Pmax ~ 1-3 W
Efficiency ~ 35-50%
M2 ~ 1-2
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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10
5 Key High Power Laser Attributes
1. Power
– How high?
2. Efficiency
– (Output optical power)
(Input electrical power)
3. Reliability
– How long will it last?
Reliability Efficiency
Power
After Erik Zucker, JDSU
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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11
Reliability
10
100
1000
0 100 200 300 400 500 600
BGS Fiber Power (mW)
Su
dd
en
Failu
re R
ate
(F
ITs) CLT2.1
CLT2.2
CLT3
0
500
1000
1500
2000
2500
3000
3500
0 1000 2000 3000 4000 5000 6000 7000
Po
we
r(m
W)
Current(A)
5 mm
1 cm
Front facet SEM after COD
MIT-LL SCOWL
CW, 15°C
Corning Lasertron 980 nm Chip Generations
Circa 2003
MIT-LL SCOWL
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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12
5 Key High Power Laser Attributes
1. Power
– How high?
2. Efficiency
– (Output optical power)
(Input electrical power)
3. Reliability
– How long will it last?
4. Étendue (Beam Quality)
– How tightly can it be focused?
Reliability Efficiency
Étendue Power
After Erik Zucker, JDSU
A 2q
W = πq2 Étendue = A W
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Brightness Plot
Broad-area Lasers
Beam Parameter Product =
BPP = M2 x λ / π
= NA x (fiber radius)
Brightness = Power / Étendue
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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14
5 Key High Power Laser Attributes
1. Power
– How high?
2. Efficiency
– (Output optical power)
(Input electrical power)
3. Reliability
– How long will it last?
4. Étendue (Beam Quality)
– How small can it be focused?
5. Cost
– Is it competitively priced?
– Necessary for commercial success
Reliability Efficiency
Étendue Power
Cost
After Erik Zucker, JDSU
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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15
Courtesy Erik Zucker, JDSU
JD
SU
Sellin
g P
rice
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Survey of State-of-the-Art: Fiber-Coupled Diode Laser Systems
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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17
JDSU Building Block
Multiple 10 W emitters
Courtesy Erik Zucker, JDSU
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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18
JDSU 2 kW System
Courtesy Erik Zucker, JDSU
Using 2 kW JDSU Stingrays to
pump Yb-doped fiber laser
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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19
JDSU Brightness Plot
Courtesy Erik Zucker, JDSU
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Laserline Bars and Stacks
www.laserline-inc.com
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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21
Laserline Diode Systems
www.laserline-inc.com
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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22
Trumpf Direct Diode System
www.us.trumpf.com
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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23
IPG Direct Diode System
www.ipgphotonics.com
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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24
Brightness Comparison
Courtesy Erik Zucker, JDSU
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Outline
• Introduction
• 5 key high-power laser attributes
• Survey of state-of-the-art semiconductor laser systems
• Alternative: surface emitting lasers
• Beam combining for higher brightness
• Summary
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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26
Courtesy Chad Wang, FLIR
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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27
Courtesy Chad Wang, FLIR
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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28
Courtesy Chad Wang, FLIR
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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29
Courtesy Chad Wang, FLIR
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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30
Courtesy Toby Garrod, Alfalight
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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31
Courtesy Toby Garrod, Alfalight
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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32
Outline
• Introduction
• 5 key high-power laser attributes
• Survey of state-of-the-art semiconductor laser systems
• Alternative: surface emitting lasers
• Beam combining for higher brightness
• Summary
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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33
Laser Beam Combination Approaches
• Conventional side-by-side
– Overlapping far fields
– Beam quality proportional to N1/2
– Brightness no greater than single element
• Wavelength beam combining (WBC)
– Inherently multi-wavelength
– No far-field sidelobes
– Similar to wavelength-division-multiplexing in fiber optic
communications
– Brightness scales as fgN (fg <1)
• Coherent beam combining (CBC)
– Phasing to narrow far field and increase intensity
– Requires phase control to much better than
– Brightness goes as ffN (ff <1)
– Highest spatial and spectral brightness possible
Courtesy T.Y. Fan, MIT-LL
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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34
Wavelength Beam Combining (WBC) Basic Architecture
• Beams are overlapped at dispersive element
• Output coupler and grating provide optical feedback for unique wave-
length control of elements and overlap beams in both near and far fields
V. Daneu et al., Optics Letters, 25, 405-407 (2000)
Lens (f) Diffraction
Grating
Output
Coupler
SCOWL
Array
f f
Microlens
Array
d
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Nearly Ideal WBC of Large Laser Arrays
• Nearly ideal beam combining of a large (10’s of elements) laser array
• 100-element slab coupled optical waveguide laser (SCOWL) array at ~980 nm
– Single-mode elements
– 100-µm laser pitch
• Highest brightness diode array demonstrated to date
– 50-W output power with M2 ~ 1.2 Position Along Array
Wa
ve
len
gth
Output Spectrum
M2 = 1.2
Output Power Output Far-Field
10 mm
15
nm
Beam
Qualit
y (
M2)
Chann et al. (2005)
Huang et al. (2007) Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Fiber-coupled direct-diode laser
> 2000 W in 50 m/0.15 NA fiber (95% power content)
967 nm center wavelength
TeraDiode’s 2-kW fiber-coupled diode laser
27Courtesy Robin Huang, Teradiode
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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37
Brightness Comparison
Courtesy Erik Zucker, JDSU
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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• Single pass amplifier to minimize feedback effects [Slab-coupled Optical Waveguide Amplifier (SCOWA)]
• Planar lightwave circuit (PLC) seed distribution
• Transform lens to focus array output
• Diffractive Optical Element (DOE) to combine multiple beams into single output
• Use current modulation on SCOWAs to adjust phase of each element (SPGD hill-climbing algorithm)
Coherent Beam Combining
Seed
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expressed are those of the authors and do not reflect the official policy or position of the
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• 47 element Planar Lightwave Circuit (PLC) for seed distribution
– 6 fiber inputs, 1x8 splitters on-chip to achieve 47 seeds to SCOWAs
• AlN multilayer ceramic for individual addressable current distribution
• Microimpingement cooler for heat removal
47 Element SCOWA Array
47 Elements Operated at 1.6 A each
20°C Cooling Water, Unseeded
47 SCOWA Array
12.5 mm x 5 mm
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Schematic of CBC Module Experimental Layout
DFB Master
Oscillator YDFA
1x6 Fiber
Splitter
7x8 PLC
Splitter
SCOWA
Module
Transform
Optics DOE
Raw Power
Meter
Beam
Blocks Combined
Power Meter Relay
Telescope
SPGD
Detector
DOE
Image
DOE
Far
Field
M2 Meter
Diagnostics include simultaneous measurements of combined beam
near-field, far-field, beam quality, power, and SPGD control signal Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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41
Combined Beam Power
• Achieved 40.1 W with high combining efficiency (87%)
• Test to failure (not plotted): Achieved 50.1 W combined power with 80%
combining efficiency at 1.85 A / channel average with maximum seed
available (~65 mW / channel)
– Three SCOWAs failed
0 0.2 0.4 0.6 0.8 1 1.2 1.40
10
20
30
40
50
60
Drive Current (A)
Pow
er
(W)
RC4 Array 3 Combining Test
Raw
Combined
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
Com
bin
ing E
ffic
iency
47 element
SCOWA array,
50 mW seed per
channel
(per channel average)
87% to 90%
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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42
• Mode evolution consistent with single element SCOWA measurement
– SCOWA mode shrinks in the slow axis with increasing current (thermal)
• Measured M2 values of ~1.2 x 1.3 for all currents
Combined Beam Diagnostics
0.6 0.7 0.8 0.9 1 1.1 1.2 1.3 1.41
1.05
1.1
1.15
1.2
1.25
1.3
1.35
1.4
Drive Current (A)M
2 (
90/1
0 M
eth
od)
Combined Beam Quality
Array Dimension
Non-Array Dimension
(per channel average) 0.6 0.7 0.8 0.9 1 1.1 1.2 1.3 1.44
4.2
4.4
4.6
4.8
5
5.2
5.4
5.6
5.8
6
Drive Current (A)
Scale
d B
eam
Dia
mete
r (
m)
Combined DOE Far Field
Array Dimension
Non-Array Dimension
(per channel average)
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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43
Brightness Comparison
Single SCOWL
Coherently
Combined
SCOWAs
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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44
Future Fusion Reactor Application
Courtesy Ryan Feeler, NG Cutting Edge Optronics
NIF = National Ignition Facility
LIFE = Laser Inertial Fusion Energy U.S. Dept of Energy
Learn more at life.llnl.gov
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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45
Fusion (cont.)
Courtesy Ryan Feeler, NG Cutting Edge Optronics
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expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.
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Summary
• High-power semiconductor lasers are most efficient lasers available
– Used directly can provide lab efficiencies of 60+%, fiber-coupled systems of 45+%
– Used indirectly to pump most other state-of-the-art laser systems
• Fiber lasers, disc lasers, diode-pumped solid-state (DPSS) lasers, and diode-pumped alkali lasers (DPALs)
• Efforts continue to increase efficiency and brightness
• Beam combining is key to producing kWatt+ powers from Watt class devices
– Incoherent beam combining: used in most commercial systems
• Brightness not increased
– Path to higher brightness:
• Wavelength beam combining: coarse WDM used in several commercial systems, fine WDM being commercialized by Teradiode (Westford, MA)
• Coherent beam combining
Distribution Statement "A" (Approved for Public Release, Distribution Unlimited). The views
expressed are those of the authors and do not reflect the official policy or position of the
Department of Defense or the U.S. Government.