1

Granite table 1000×1500×500, 2.2tons

CFRPSUS

Channel100x50 → 150x75

Level Jack < 5000kg

Dec. 04,’03KEK H. Yamaoka

2

FEM Model

・ Thermal Effect(±1 )℃・ Deformation due to self-weight

・ Resonant frequency

・ P.S.D

1

X

Y

Z

DEC 2 200316:59:38

ELEMENTS

REAL NUM

U

3

Thermal Effect(±1 )℃

1

X

Y

Z

DEC 2 200316:59:38

ELEMENTS

REAL NUM

U

CFRP

SUS

Granite

SUS

SUS Granite CFRPYoung’s modulus(kg/mm2) : 2.1×104 4.8 ×103 1.5×104

Density(×10-6kg/mm3) : 7.85 2.8 1.6Thermal expansion coeff.(×10-6/ ): ℃ 17 8 0.

4

P2 = -6m

1

MN

MX

X

Y

Z

-.579E-05

-.515E-05-.452E-05

-.389E-05-.326E-05

-.262E-05-.199E-05

-.136E-05-.723E-06

0

DEC 3 200314:35:05

NODAL SOLUTION

STEP=1SUB =1TIME=1UY (AVG)RSYS=0DMX =.596E-05SMN =-.579E-05 P1 P2

P1-P2 = 0.23m

Self-weight

1

MN

MX

X

Y

Z

-.247E-05

-.312E-06.184E-05

.400E-05.615E-05

.831E-05.105E-04

.126E-04.148E-04

.172E-04

DEC 3 200314:55:13

NODAL SOLUTION

STEP=1SUB =1TIME=1UY (AVG)RSYS=0DMX =.182E-04SMN =-.247E-05SMX =.172E-04

P1 P2

P2 = +11m

P1-P2 = 4.3m

Self-weight + +1℃

P2 = -23m

P1-P2 = 3.8m

Self-weight + -1℃

CFRP

SUS

GraniteSUS

P2 = +16m

P1-P2 = 4.1m

1

MN

MX

X

Y

Z

0

.247E-05.494E-05

.741E-05.988E-05

.124E-04.148E-04

.173E-04.198E-04

.226E-04

DEC 3 200314:44:11

NODAL SOLUTION

STEP=1SUB =1TIME=1UY (AVG)RSYS=0DMX =.230E-04SMX =.226E-04

P1 P2+1℃

P2 = -16m

P1-P2 = 4.1m

-1℃

5

CFRP→ GFRP or Alumina(Ceramics)

SUS

Granite

SUS → GFRP or Alumina(Ceramics)

GFRP Alumina GraniteYoung’s modulus(kg/mm2) : 4.5×103 1.5×104 　 3.5×104

Density(×10-6kg/mm3) : 2 2.9 2.8Thermal expansion coeff.(×10-6/ ): ℃ 7, 23 8 7.8

Alumina ceramics, most widely used material among fine ceramics, has same sintered crystal structure (Al2O3) as Sapphire and Ruby. Its application is widely used due to its superb properties such as high insulation, high strength, high wear-resistance and chemical resistance.

6

Ref. Bar Side Plate Base Plate Self-weight +1℃ (Self-weight)+1℃ (Self-weight)-1℃CFRP SUS SUS -5.8 +16.8 +11.0 -22.6CFRP CFRP SUS -4.4 +8.2 +3.8 -12.7CFRP CFRP CFRP -4.2 +7.2 +3.0 -11.5

Alumina SUS SUS -5.8 +18.4 +12.6 -24.2Alumina Alumina Alumina -4.5 +13.2 +8.7 -17.7

GFRP SUS GFRP -6.6 +18.3 +11.7 -24.9

Ref. Bar Side Plate Base Plate Self-weight +1℃ (Self-weight)+1℃ (Self-weight)-1℃CFRP SUS SUS 0.23 4.07 4.30 3.83CFRP CFRP SUS 0.44 2.72 3.15 2.28CFRP CFRP CFRP 0.44 0.96 1.39 0.52

Alumina SUS SUS 0.17 1.54 1.71 1.37Alumina Alumina Alumina 0.18 0.09 0.27 0.11

GFRP SUS GFRP 1.2 0.63 1.81 0.62

Deformation @P2

Difference(P1-P2)

Side plate

SUS

GraniteBase plate

Ref. bar

Unit: m

Unit: m

P1 P2

7

P2 = -4.5m

P1 P2

P1-P2 = 0.18m

P2 = +13m

P1-P2 = 0.09m

P2 = +9m

P1-P2 = 0.3m

Self-weight

+1℃

Self-weight + +1℃

P2 = -18m

P1-P2 = 0.1m

Self-weight + -1℃

P2 = -13m

P1-P2 = 0.09m

-1℃

Alumina

SUS

GraniteAlumina

8

Resonant Frequencies

1

X

Y

Z

DEC 4 200310:39:54

DISPLACEMENT

STEP=1SUB =2FREQ=110.356DMX =.099132

2nd: 110Hz

1

X

Y

Z

DEC 4 200310:40:18

DISPLACEMENT

STEP=1SUB =3FREQ=143.042DMX =.108583

3rd: 143Hz

1

X

Y

Z

DEC 4 200310:40:44

DISPLACEMENT

STEP=1SUB =4FREQ=238.831DMX =.132114

4th: 239Hz

1

X

Y

Z

DEC 4 200310:39:24

DISPLACEMENT

STEP=1SUB =1FREQ=88.008DMX =.09065

1st: 88Hz

CFRP

SUS

Granite

SUS

9

1

X

Y

Z

DEC 2 200316:59:38

ELEMENTS

REAL NUM

U

0.1 1 10 100 10001E-291E-281E-271E-261E-251E-241E-231E-221E-211E-201E-191E-181E-171E-161E-151E-141E-131E-121E-111E-10

Res

po

nse

: P

.S.D

(m2 /H

z)

Frequency (Hz)

X- R X- C X- L Fixed

0.1 1 10 100 10001E-291E-281E-271E-261E-251E-241E-231E-221E-211E-201E-191E-181E-171E-161E-151E-141E-131E-121E-111E-10

Res

po

nse

: P

.S.D

(m2 /H

z)

Frequency (Hz)

Y- R Y- C Y- L Fixed

0.1 1 10 100 10001E-291E-281E-271E-261E-251E-241E-231E-221E-211E-201E-191E-181E-171E-161E-151E-141E-131E-121E-111E-10

Res

po

nse

: P

.S.D

(m2 /H

z)

Frequency (Hz)

Z- R Z- C Z- L Fixed

L CR

Z

Y

X

Fixed

0.5nm/Hz1/2

0.03nm/Hz1/2

0.3nm/Hz1/2

X-direction

Y-direction Z-direction