47
Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California, Berkeley Introduction to superconductivity Types of Josephson junctions Choice of material (LTS/MTS/HTS) Pendulum analog Switching of single junction and SQUID Rapid-Single-Flux-Quantum (RSFQ) circuits Interconnections CAD tools Example: margins vs. frequency High-Speed Measurement “Applications of Superconductivity”, Special Issue of Proc. IEEE, October 2004.

Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

  • Upload
    others

  • View
    2

  • Download
    0

Embed Size (px)

Citation preview

Page 1: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Fundamentals of Superconductor Digital Circuits

Ted Van DuzerUniversity of California, Berkeley

Introduction to superconductivityTypes of Josephson junctionsChoice of material (LTS/MTS/HTS)Pendulum analogSwitching of single junction and SQUID Rapid-Single-Flux-Quantum (RSFQ) circuitsInterconnectionsCAD toolsExample: margins vs. frequencyHigh-Speed Measurement

“Applications of Superconductivity”, Special Issue of Proc. IEEE, October 2004.

Page 2: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Introduction to Superconductivity

Page 3: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

ψ = |ψ|eiθ(r)

BCS Pairing Concept

Cooper pairwave function

∼1 µm

At nonzero temperature, pairs are mixed with unpaired electrons.

Page 4: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Absolute zero (0 K)

68 oF 293 K

- 460 oF

Room temperature

- 220 oF“High-temperature

superconductors”

Examples:BiSrCaCuO 110 K

YBaCuO 93 K

“Low-temperature superconductors”

Examples:NbTiN 16 K

Nb 9.2 K

136 K

LHe 4.2 K

LN 77 K

Temperature Scales and Materials

Page 5: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Magnetic Flux Quantization

Magnetic field B

In superconductors, magnetic flux is quantized in units of

Φ0 = h/2e = 2.07 x 10 -15 weber

Superconducting ring

Page 6: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Thin-filmsuperconductor integrated

circuitJosephsonjunctions

TYPES OF JOSEPHSON JUNCTIONS

Tunnel junction Conductive barrier junctionVg= 2.8 mV

SuperconductorsBarrier

Substrate

First demonstrated in 1963

Page 7: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Types of Josephson Junctions

Sandwich form preferred

Page 8: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Digital Applications

Page 9: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

A Very Brief History of Digital Applications

First efforts at IBM in 1967

Voltage-state projects at IBM, Sperry, TRW, Berkeley MITI project in Japan, some in Europe 1967 – early 1990’s

Early 1980’sImportant fabrication developments

1985 First publication on rapid single flux quantum (RSFQ) circuits

1991 – present Many groups worldwide have had RSFQ projects

Page 10: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Issues in Digital Circuits

• Large numbers of devices (many thousands for useful circuits)

• Need for CAD tools (Some tools made for semiconductors are usable, but others need modification)

• Small margins (The allowed variation of power supply level)

• No gain (unlike transistor circuits)

• Lack of adequate memory (4-kbit memory demonstrated)

• Layout for flux management (1 cm2 chip has 500 flux quantaif B = 0.1 mG . Circuits must be protected.)

Page 11: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Device Technologyfor

Digital Applications

Page 12: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Choosing a Technology

Currently niobium is the “workhorse” for large circuits; operation at 4-5 K.

100 junctions in series1.25 µm dia., 8 kA/cm2, σ = 1.6%

LTS

Currently established junction technology

Page 13: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Choosing a Technology MTS

Advantage over Nb: Tc ~ 15 K so operation temperature ~ 8-10 K

Disadvantage: Large and variable penetration depth and inductance/square

MgB2 In some cases Tc = 40 K, so potentially usable with simple refrigerator

Early state of development, only a small number of junctions have been demonstrated; none at 40 K.

NbN NbNDeposited MgONbN

Josephson junction I

V

Page 14: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Choosing a Technology HTS

Most developed candidate is YBa2Cu3O with Tc = 90 K

The usual rule of operating 0.5 - 0.7 of Tc suggests operating at 45 K – 63 K But noise currents and voltages increase with temperature.

Excessive error rates if T > 30 K.

Critical current spread: σ = 6% (6σ = 36%) at 4 K (Somewhat worse at 30 K)

Too large for digital circuits, except small demonstration gates.

Need a breakthrough—a new controllable way to make Josephson junctions.

Page 15: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Niobium Josephson Junctions for Digital Circuits

Typical I-Vof a high-quality tunnel junction

Predominant type of digital circuit is the Rapid Single Flux Quantum (RSFQ) logic family, which requires nearly non-hysteretic I-V.

To achieve the non-hysteretic form of I-V, a resistor R is connectedin shunt with the tunnel junctions to make βc ~ 1- 2

βc = (2π/Φ0 ) IcCRn2

Where C is junction capacitance and Rn is normal state resistance.

The only JJ technology for circuits with large numbers of junctions with sufficient control is the Nb/AlOx/Nb tunnel junction.

Page 16: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Desired Properties of Josephson Junctions

High current density (Jc)

If βc =1can rearrange βc expression to show

IcR = (Φ0/2π)1/2(Jc/Cs)1/2

Also:

Accurate targeting of Jc

Uniformity of Ic across chips and wafer

Small variation of Ic with temperature

Thermally cyclable and free of ageing

Tunneling barrierspecific capacitance

Typical values

Page 17: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Pendulum Analog

Page 18: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Switching of a Single Junction

0 20 40 60 80-0. 5

0. 5

1. 5

0 .0

1 .0

2 .0

V ( mV )

Ti m e ( ps )

τ t u rn o n

τ ri s e

Pl a s m a o s c il l a t i on d a mp i ng t i m e

Ig

0. 1 8 mA0. 2 05 m A

t ( ps )0 4 0

Page 19: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Switching of a 1-Junction SQUID

0 2 4 6 8 1 00

1

2

3

4

0

9 0

0 1 0t ( p s )

V ( µ V )

τ p

J c = 5 k A / c m 2

β L = 2 π

τ p ( p s )

J c ( k A / c m 2 )

β L = 3 πβ L = 2 π

β L = π

Shunted junctionβc = 1

Note effect of damping

βL = 2πLIc/Φ0where Φ0= 2e/h

Page 20: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

SFQ Logic Bit Energy

v(t)

t

< 1 mV

∫ v(t)dt = Φ0

Energy ≅ ∫ Icv(t)dt ≅ Ic Φ0

Typical Ic ≅ 0.1 mA

Energy/bit ≅ 10 - 19 joules

[Advanced CMOS switching energy ≅ (1/2)CVdd

2 ≅ (1/2) x 10− 14 joules]

Page 21: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Rapid-Single-Flux-Quantum (RSFQ) Logic Family

Page 22: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Rapid Single Flux Quantum (RSFQ) Circuits(Examples)

K. K. Likhharev and V. K. Semenov, “RSFQ logic/memory family: a new Josephson–junction family for subterahertz-clock-frequency digital systems,” IEEE Trans. Appl. Superconduct., Vol. 1, pp. 1-28, March 1991

A

Ib2

Ib1

Ib3

Tunnel junction with resistor shunt

Page 23: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

HYPRES

Non-storage Inductance (~6 pH)

Junction Shunt (~1 Ω)

Junctions of different area(min. area = 3 µm x 3 µm)

Storage Inductance (~12 pH)

Toggle Flip-Flop Layout

RSFQ Gate Physical Layout on IC

Page 24: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

RS Flip-Flop Ready for Action

Bias

. .

Page 25: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

RS Flip-Flop ---------Setting

Bias

. .

Page 26: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

RS Flip-Flop -----------Resetting

Bias

. .

Page 27: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Microstrip Inductance per square for NbL = ~ 0.5 pH/square

I

Interconnections

BNbSiO2Nb

t

Most interconnections are in microstrip configuration(Example is a 2 µm line over a ground plane)

Typical SiO2 thickness is 200 nm

Capacitance: C= εA/t

Characteristic impedance typically several ohms

Page 28: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Josephson Transmission Line (JTL)

Jc (kA/cm2) IcRn(mV) t (ps)------------- ----------- -------

1.0 0.26 4.454.0 0.55 2.3010.0 0.72 1.73

Torsion springs

Mechanical analog

Delay per stage

Page 29: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

More RSFQ Basic Circuits

Buffer

One-way transmission

Confluence Buffer

Combines inputs(“fan-in”)

Pulse Splitter

Provides “fan-out”

Page 30: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

T Flip-Flop

Successive input pulses give outputs alternately to F0 and F1.

Cascades of T flip-flops are used in counters

Used to show off a process. Maximum demonstrated frequency is 770 GHz.

Page 31: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Unclocked Input and Output RSFQ Circuits

Input (“dc to sfq”)

t

t

t

Pulse intervalOutput (“sfq to dc”)

tNon-return-to-zero

output

Page 32: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Picosecond-scale pulses with amplitude less than 1 mVcarry data between gates. Clock and data pulses are same.

Rapid Single Flux Quantum (RSFQ) Logic

Holdtime

Set-up time

Useful time

Page 33: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Circuit SpeedReason for interest in superconducting digital circuits is speed (with low power dissipation).

How fast can they be? What factors determine speed?

Simple circuits:

One example is the T-flip-flop

Other simple circuit studied is a circular JTL.Pulses interact with each other if the frequency is

f max> 0.3 IcR/Φ0

(IcR is the main criterion in simple circuits)

For Nb Jc = 10 kA/cm2 IcR = 0.74fmax ~ 100 GHz

Page 34: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Larger Circuits

Page 35: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Construct a Library of Optimized Gates

OR gate

OR

NOR

AND

NAND

ETC.

Page 36: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Inductance Extraction

INDUCTANCE A KEY COMPONENT IN JOSEPHSON DIGITAL CIRCUITS

• After circuit is optimized at schematic stage, it is laid out. Then inductances that actually appear in the layout are evaluated.

• L-meter developed at Stony Brook University (formerly SUNY Stony Brook) for extraction.

• Re-optimization and adjustments of the layout are required.

• Library is re-optimized

Page 37: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Computer Aided Design Toolsfor small circuits

Analog dynamic simulation:WRspice, JSIM, PSCAN

Inductance extraction:Lmeter, Fast Henry, Sline (microstrip)

Optimization:MALT, COWBOY, other home-grown programs

Layout:Xic, Cadence, any layout editor (including Autocad)

Page 38: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

SFQ Standard Cell Libraryschematic

behavior

symbol_playout

module __jand(a, b, clk, c);input a, b, clk;output c;reg c;reg[1:0] state;

always @(posedge a) begin// b__a timing checkdiff_time = $realtime - b_time;if ( ( a__b <= 0 && -a__b < diff_time|| a__b > 0 ) &&diff_time < b__a ) beginstate = `SFQ___jand_x;

symbol

CONNECTcell library

Japanese CONNECT Library

Page 39: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Automatic Placement and Routing Tool

72 logic gates

• 4433 JJ• 1662 cells• 3.36 mm x 2.36 mm

2 seconds!

Japanese CONNECT Library

Page 40: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

An Example of a Circuit Design and Layoutat Berkeley

Page 41: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

2-Bit SFQ DEMULTIPLEXER(50-GHz Simulation)

In

In

Out 1

Out 2

Out 2

Out 1

50 100 150 200 250 300 ps

InputInput

Out1Out1Out2Out2

Dual-Rail Demultiplexer

L. Zheng

Page 42: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

Optimization of the 2-bit DEMUX

Critical parameter margin: (-28.8%, 31.3%)dc bias margin: (-45.0%, 31.3%)

Page 43: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

2-Bit DEMUX Bias Margins vs. Frequency

1

2

3

4

10 20 30 40 50 60

frequency (GHz)

dc b

ias

volta

ge (m

V)

1

2

3

4

0 20 40 60 80 100 120 140

frequency (GHz)dc

bia

s vo

ltage

(mV)

Jc = 1 kA/cm2 Jc = 6.5 kA/cm2

Page 44: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

1:8 RSFQ Dual-Rail DEMUX

(b) 1:2 DEMUX (a) 1:8 DEMUX

Page 45: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

40

Micrographs of the DEMUX

(a) 4-bit DEMUX (b) 8-bit DEMUX

Page 46: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

50 GHz Digital Test of DEMUX

Externalpattern

generator

Oscilloscopeor

logic analyzer

Clock generator

Shift register

Shift register

2-bit DEMUXShift register

Trigger

On-Chip Test System w/ 2-bit DEMUX under test

50 GHz clock

Dual-rail data

Page 47: Fundamentals of Superconductor Digital Circuitsee290b/fa07/bspace/VanDu... · 2007. 12. 5. · Fundamentals of Superconductor Digital Circuits Ted Van Duzer University of California,

And there’s more to the story------