FPD/300mm Wafer Inspection Microscope Eclipse · PDF fileWarning / Caution Symbols Used in This Manual I FPD/300mm Wafer Inspection Microscope Eclipse L300D / L300 Instructions Warning

M327E 04.5.NF.1

FPD/300mm Wafer Inspection Microscope

Eclipse L300D / L300

Instructions

Thank you for purchasing Nikon products.

This instruction manual is written for the users of

the Nikon's FPD/300mm wafer inspection microscope "Eclipse L300D / L300"

and describes the basic operations of the microscope.

To ensure correct usage, read this manual carefully before operating the instrument.

• It is prohibited to reproduce or transmit this manual in part or whole without Nikon's expressed

permission.

• The contents of this manual are subject to change without notice.

• Although every effort has been made to ensure the accuracy of this manual, if you note any

points that are unclear or incorrect, contact your nearest Nikon representative.

• Some of the products described in this manual may not be included in the set you have pur-

chased.

• Be sure to read the instruction manual for any other products used in combination with the mi-

croscope.

Warning / Caution Symbols Used in This Manual

� I �

FPD/300mm Wafer Inspection Microscope Eclipse L300D / L300 Instructions

Warning / Caution Symbols Used in This Manual

Although Nikon products are designed to provide you with the utmost safety during use, in-correct usage or disregard of these instructions can cause personal injury or property dam-age. Warranty does not cover failures and damage due to these kinds of actions. For your safety, read the instruction manual carefully and thoroughly before using the instrument. Do not discard this manual but keep it near the product for easy reference.

In this manual, safety instructions are indicated with the symbols shown below. Be sure to follow the instructions indicated with these symbols to ensure correct and safe operation.

Table-1 WARNING / CAUTION symbol

Symbol Meaning

WARNING Disregarding instructions marked with this symbol may lead to death or serious injury.

CAUTION Disregarding instructions marked with this symbol may lead to injury or property damage.

Meaning of Symbol Used on the Equipment

The following symbol placed on the equipment indicates that you need to be cautious when you use the equipment. Before you operate the part of the equipment with this symbol, check this instruction manual.

Figure-1 Symbol affixed positions

Table-2 Meaning of symbol

Symbol Meaning

Caution for heat.

This marking near the lamphouse and side surface of the microscope calls

your attention on the following;

• Lamphouse becomes very hot during and immediately after the illumina-

tion.

• Risk of burns. Do not touch the lamphouse during and immediately after

the illumination.

• Make sure that the lamphouse is sufficiently cool before the lamp re-

placement.

Caution symbol

Safety Notes

� II �


Safety Notes

Note the following for safe usage.

WARNING 1 Intended product use.

This product should only be used for microscopic observation. Do not use it for any other pur-

pose. Do not use it to view overly large sample that sticks out beyond the stage.

2 Read the instruction manual thoroughly.

For your safety, thoroughly read this instruction manual and the instruction manual of the

equipment used along with this product. Be sure to observe the warnings and cautions ex-

plained in the beginning of this manual.

3 Do not disassemble.

Disassembly may cause malfunction, electrical shock and/or injury. Do not disassemble any

part other than those described in this manual. If you experience any problem with the micro-

scope, contact your nearest Nikon representative.

4 Power cord.

Use only the specified power cord. Using other power cords could result in failures or fire. Also

note that the protection Class 1 equipment should be connected to the PE (protective earth)

terminal for grounding. For details about the specified power cord, see "7 Technical specifica-

tions".

To prevent electrical shock, always turn off the power switch (flip it to the “O” side) before con-

necting or disconnecting the power cord.

5 Heat from the light source.

The lamp and the lamphouse become extremely hot. To avoid burns, do not touch the lam-

phouse while the lamp is lit or for thirty minutes after it has been turned off.

Further more, in order to avoid the risk of fire, do not place fabric, paper or highly flammable

volatile materials such as gasoline, petroleum benzene, paint thinner or alcohol near the lam-

phouse while the lamp is lit or for about thirty minutes after it has been turned off.

The rear of the microscope also becomes hot during use. Although this is not a malfunction,

be careful not to touch it.

6 Reflection.

The polished surface of the sample will reflect strong light by the illumination. Do not look at

the illuminated surface for a long time because the strong reflection may hurt your eyes.

Safety Notes

� III �


CAUTION 1 Disconnect this product from the power supply before assembling this product, attaching or

removing the cord, replacing the lamp, or performing maintenance.

To prevent electric shocks and failures, when you assemble this product, attach or remove the

cord, replace the lamp, or clean the main body or objectives, you must turn off this product

and other related equipment (flip the power switches to the “O” side) and unplug the power

cords from the wall outlet.

2 Check the light source.

Use only the specified lamp and the lamphouse on this product. The use of other lamps and

lamphouses may lead to malfunction. For details about the specified lamp and lamphouse,

see "7 Technical specifications".

3 Cautions on lamp replacement.

• To prevent burn injury, allow the lamp to cool for at least 30 minutes after turning off the

power switch, before replacing the lamp.

• To prevent electrical shock and damage to the microscope, always turn off the power switch (flip it to the “O” side) and unplug the power cord from the wall outlet before con-necting or disconnecting the lamphouse.

• Do not touch the glass surface of the lamp with bare hands. Fingerprints or grease on the

bulb surface will reduce the illumination of the lamp. Wipe clean the fingerprints or grease

with a clean piece of cloth.

• Securely attach the lamphouse cover to the lamphouse after replacing the lamp. Never

light the lamp while the lamphouse cover is open.

• When you dispose of the replaced lamp, do not shatter it or dispose of it casually. Dispose

of the used lamp as the special industrial waste or dispose of them according to the regu-

lations and rules of your local authority.

4 Do not let the microscope become wet.

Do not get this product wet. In addition, do not use this product in an environment where water

will get into this product. If the product gets wet, a short circuit may result that may cause mal-

function or abnormal heating of the product. If you accidentally spill a liquid on the microscope,

immediately turn off the power switch (flip it to the “O” side) and unplug the power cord from

the wall outlet. Then use a dry cloth to wipe away the moisture. If any liquid gets inside the mi-

croscope, do not use it; instead, notify your nearest Nikon representative.

5 Weak electromagnetic emission.

This product emits weak electromagnetic waves. The accuracy of any precision electronic

equipment may be adversely affected if positioned too close. If the microscope affects TV or

radio reception, move the radio or TV further away from the microscope.

6 Installation location.

This product is a precision optical instrument. Using or storing the microscope under unsuit-

able conditions may damage it or may have an adverse effect on its accuracy. The following

conditions should be kept in mind when selecting the installation location.

• Avoid a brightly lit location such as a room that receives direct sunlight, or directly under

room lights. The image quality deteriorates if there is excessive ambient light.

• Choose a location that is free from dust or dirt.

Safety Notes

� IV �


• Choose a flat surface with little vibration.

• Choose a sturdy desk or table that is able to bear the weight of the instrument.

• The main body of this instrument weighs about 40 kg.

• To install this instrument on a desk or a table, at least two people are required. Handle the

instrument carefully and do not drop it. Dropping it may injure the person carrying it or

damage the instrument.

Install this product in a place where it will not be a hazard in case of an unexpected event

such as an earthquake. In some locations, you may need to tie down this product to a

workbench or secure object so that it will not overturn or fall down.

• Do not use this microscope in an environment where water can get into the microscope.

• Do not install the microscope in a warm, humid location.

• Install this microscope in a location where you can easily unplug the power cord from the

AC inlet of this microscope in emergency.

• Provide enough space around the microscope referring to the layout diagrams on the next

page.

• The installation conditions are as follows:

Area required : 1050 mm (W) × 1109 mm (D) or more (see the layout diagrams)

Power source : 100 to 240 V AC ±10% (2.4 A)

Humidity : Relative humidity 85% at maximum (no condensation)

Operating environmental temperature : +5° to +35°C

Weight of the microscope : 64 kg (including stage and eyepiece tube) approx.

• Be careful not to pinch your fingers or hands when moving the microscope.

7 Cautions on moving the microscope.

• The microscope is a precision optical instrument. Handle it carefully and do not subject it to

a strong physical shock.

• When moving the microscope, first remove the stage. Then, have two or more people

grasp the microscope from both sides.

(Information) The main body of the L300/L300D weighs about 40 kg.

With the eyepiece tube, lamphouse and other parts (except stage) at-

tached, the microscope weighs about 46 kg.

• Do not grasp the focusing knobs, eyepiece tube, lamphouse, stage mount, breath shield

plate, etc., when carrying the microscope. They may come off and may cause serious in-

jury or malfunction.

• Ask your nearest Nikon representative for the carrying rods of the microscope.

• Before carrying the stage, attach the two fixing metals to hold the movement of the stage

plate. Use the smaller fixing metal to secure the side of the stage and then use the larger

fixing metal to secure the front of the stage. (See ”4.5 Attaching the stage, the glass plate,

and the wafer holder”.)

8 Cautions on assembling the microscope.

• Be careful not to pinch your fingers or hands during the assembly.

• The scratches or fingerprints on the lens surface will adversely affect the microscope's im-

age. Be careful not to scratch or touch the lens surfaces.

Layout diagram

� V �


Layout diagram

Figure-2 Layout diagram

100

788

427

721

Stage movable range (For LCD setting)

975

1009

210

360

9

613

380

(0°)

– 4

39 (

15°)

– 4

95 (

30°)

244

324 – 34２

176

328

649

687

397

363

712

Stage movable range (when the stroke limit pin is removed)

(For semiconductor setting)

１60

１80

936 – 954 530

Gravity point

Gravity point

431

E. P.

108.

5

1050

Operating Posture

� VI �


Operating Posture

The figure below shows the posture that prevents strain on your body when you operate this equipment.

Choose a workbench and a chair having the similar dimensions to those shown on the fig-ure.

Figure-3 Operating Posture

The 95th-percentile male (Height: 189.5 cm)

510

(The front clear-ance for the knees)

415

(The

hei

ght o

f

the

seat

ing

surf

ace)

690

The

uppe

r cle

aran

ce fo

r the

kne

es)

760

(The

hei

ght o

f the

wor

kben

ch)

The 5th-percentile female (Height: 147.5 cm)

1140

(T

he h

eigh

t of t

he e

ye p

oint

)

472

(The

hei

ght o

f

the

seat

ing

surf

ace)

510 (The front clearance for

the knees)

690

(The

upp

er c

lear

ance

for

760

(The

hei

ght o

f the

wor

kben

ch)

１22

5 12

55 (

The

hei

ght o

f the

eye

poi

nt)

Contents

� VII �


Warning / Caution Symbols Used in This Manual............................................................... I Meaning of Symbol Used on the Equipment....................................................................... I Safety Notes....................................................................................................................... II Layout diagram...................................................................................................................V Operating Posture .............................................................................................................VI

1 Nomenclature and Functions ................................................................................................1

1.1 Names of the parts .................................................................................................. 1 1.2 Names of the operational parts ............................................................................... 2

2 Microscopy .................................................................................................................................... 4

2.1 Episcopic bright-field microscopy............................................................................ 5 2.2 Episcopic dark-field microscopy.............................................................................. 6 2.3 Episcopic DIC (differential interference contrast) microscopy ................................ 7 2.4 Episcopic bright-field simplified polarization microscopy ........................................ 8 2.5 Episcopic fluorescent microscopy........................................................................... 9 2.6 Diascopic bright-field microscopy (for L300D only)............................................... 10 2.7 Diascopic bright-field simplified polarization microscopy (for L300D only) ..............................11

3 Operation of Each Part..........................................................................................................12

3.1 Filters..................................................................................................................... 12 3.1.1 The types and usage of the filters.......................................................................................................................12 3.1.2 Placing the filter in and out of the optical path (for episcopic illumination) .....................................13 3.1.3 Placing the filter in and out of the optical path (for diascopic illumination) .....................................13

3.2 Coarse / fine focus knobs...................................................................................... 14 3.2.1 The relationship between the focus knob rotation and the stage vertical movement....................................14 3.2.2 Adjusting the torque of the coarse focus knobs ...........................................................................................15 3.2.3 Coarse focus stopper ring .......................................................................................................................................15

3.3 Eyepiece tube........................................................................................................ 16 3.3.1 Optical path selection................................................................................................................................................16 3.3.2 Tilting function...............................................................................................................................................................16 3.3.3 Vertical tube adapters ...............................................................................................................................................16

3.4 Diopter adjustment ................................................................................................ 17 3.5 Interpupillary distance adjustment......................................................................... 18 3.6 Centering the objective ......................................................................................... 18

Contents

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3.7 Field diaphragm..................................................................................................... 19 3.7.1 Adjusting the size of the field diaphragm (for diascopic illumination only) ........................................19 3.7.2 Focusing the field diaphragm image (for diascopic illumination only)...................................................20 3.7.3 Centering the field diaphragm (for diascopic illumination only)...............................................................20

3.8 Aperture diaphragm............................................................................................... 21 3.8.1 Adjusting the size of the aperture diaphragm.................................................................................................21 3.8.2 Centering the episcopic aperture diaphragm...................................................................................................21

3.9 Changing the illumination...................................................................................... 23 3.10 14 × 12 Stage ........................................................................................................ 24

3.10.1 The "coarse" mode..................................................................................................................................................24 3.10.2 The "fine" mode ........................................................................................................................................................25

3.11 Focusing target...................................................................................................... 25 3.11.1 How to use the focusing target ..........................................................................................................................25

3.12 Episcopic polarizer slider ...................................................................................... 26 3.12.1 Attaching the polarizer slider...............................................................................................................................26 3.12.2 Placing/removing the polarizer in/from the optical path ........................................................................26 3.12.3 Adjusting the orientation of the polarizer.......................................................................................................27

3.13 Episcopic rotatable polarizer slider ....................................................................... 27 3.13.1 Attaching the polarizer slider...............................................................................................................................28 3.13.2 Placing/removing the polarizer in/from the optical path ........................................................................28 3.13.3 Setting the polarizer orientation.........................................................................................................................29 3.13.4 Orientation of the polarizer during episcopic DIC microscopy.............................................................29

3.14 Diascopic rotatable polarizer slider ....................................................................... 29 3.14.1 Attaching the polarizer slider...............................................................................................................................30 3.14.2 Placing/removing the polarizer in/from the optical path ........................................................................30 3.14.3 Setting the polarizer orientation.........................................................................................................................31

3.15 Analyzer slider....................................................................................................... 32 3.15.1 Attaching the analyzer slider ...............................................................................................................................32 3.15.2 Placing/removing the analyzer in/from the optical path.........................................................................32

3.16 Rotatable analyzer slider....................................................................................... 33 3.16.1 Attaching the analyzer slider ...............................................................................................................................33 3.16.2 Placing/removing the analyzer in/from the optical path.........................................................................34 3.16.3 Setting the analyzer orientation .........................................................................................................................34 3.16.4 Orientation of the analyzer during episcopic DIC microscopy..............................................................34

3.17 DIC slider............................................................................................................... 35 3.17.1 Attaching (removing) the DIC slider..................................................................................................................35 3.17.2 Placing/removing the DIC prism in/from the optical path .....................................................................36 3.17.3 Selecting the DIC prism position........................................................................................................................36 3.17.4 Selecting the interference color.........................................................................................................................37

3.18 Pinhole slider......................................................................................................... 37 3.18.1 Attaching the pinhole slider ..................................................................................................................................37

Contents

� IX �


3.18.2 Placing/removing the pinhole in/from the optical path ...........................................................................37 3.18.3 Centering the pinhole ..............................................................................................................................................38

4 Assembly ......................................................................................................................................39

4.1 Required tools ....................................................................................................... 39 4.2 Installation location................................................................................................ 40 4.3 Assembling (schematic of complete assembly) .................................................... 40 4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and

diascopic illumination (replacing the lamp) ........................................................... 41 4.5 Attaching the stage, the glass plate, and the wafer holder ................................... 42

4.5.1 When using glass plate (when performing diascopic microscopy)..........................................................42 4.5.2 When using wafer holder...........................................................................................................................................43

4.6 Attaching the eyepiece tube.................................................................................. 45 4.6.1 When removing the eyepiece tube .......................................................................................................................45

4.7 Attaching the objectives ........................................................................................ 46 4.7.1 When removing the objectives ...............................................................................................................................46 4.7.2 When the objectives not set correctly on the optical path when they are switched...................46 4.7.3 Centering the objectives ..........................................................................................................................................46

4.8 Attaching the eyepieces ........................................................................................ 46 4.9 Installing the filter block (for fluorescent illumination only).................................... 47 4.10 Attaching fiber adapter .......................................................................................... 48 4.11 Attaching breath shielding plate ............................................................................ 48 4.12 Seismic restraint.................................................................................................... 49 4.13 Connecting the power cord ................................................................................... 50 4.14 Attaching photomicrographic equipment or TV camera........................................ 50

4.14.1 Photomicrographic equipment .............................................................................................................................50 4.14.2 Photo-mask eyepiece..............................................................................................................................................50 4.14.3 TV cameras..................................................................................................................................................................51 4.14.4 Digital cameras ...........................................................................................................................................................51

5 Troubleshooting.........................................................................................................................53

5.1 Viewing and control systems................................................................................. 53 5.2 Electrical................................................................................................................ 57

6 Care and Maintenance ...........................................................................................................58

6.1 Daily care and maintenance.................................................................................. 58 6.2 Cleaning the lens................................................................................................... 59

6.2.1 Cleaning tool and supplies (consumables) ........................................................................................................59 6.2.2 Cleaning procedure and notes ...............................................................................................................................59

Contents

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6.3 Cleaning this product............................................................................................. 59 6.4 Storage.................................................................................................................. 59 6.5 Regular inspections (with charge)......................................................................... 60

7 Technical Specifications .......................................................................................................61

Contents

� XI �


☆☆☆

1 Nomenclature and Functions

� 1 �


1

Nomenclature and Functions

1.1 Names of the parts

*1: For DIC microscopy or episcopic bright-field simplified polarization microscopy. ♦ ：L300D only

*2: For episcopic bright-field simplified polarization microscopy when the polarization is set to the desired direction.

*3: For pinhole microscopy, insert the pinhole slider here.

*4: For DIC microscopy.

Figure-4 Names of the parts

Eyepiece tube

Eyepieces

DIC slider*4

Breath shielding

plate

Stage

Sample holder

(The glass plate is used

in this figure.)

Analyzer slider*1 or rotatable analyzer slider*2

Episcopic polarizer slider*1 or episcopic rotatable polarizer slider*2

Lamphouse for episcopic illumination

Slot for pinhole slider*3

Arm of the microscope

Main body of the microscope

Revolving nosepiece

Objective

♦ Lamphouse for diascopic illumination

Power cord

Base of the microscope


� 2 �


1.2 Names of the operational parts

*5: For the rotatable analyzer slider only.

*6: For the episcopic rotatable polarizer slider only. ♦ ：L300D only

Figure-5 Names of the operational parts (1)

Clamp for various adapters

Diopter adjustment rings

Prism movement knob

Prism selection knob

♦ Aperture diaphragm lever for diascopic illumination

Pilot lamp (Lights when the

power is ON.)

Nosepiece rotation buttons

Brightness control dial

♦ Episcopic/Diascopic illumination selection switch

Episcopic aperture diaphragm control buttons

Optical path selection lever

Rotatable analyzer dial*5

Episcopic rotatable polarizer dial *6

Pinhole centering screws

Dark-field/bright-field/ fluorescent selection lever

Coarse movement ON switch

Stage coarse movement lever

Coarse movement OFF switch

Stage fine movement knobfor Y-axis

Stage fine movement knob for X-axis

Fine focus knob

Coarse focus knob

♦ Condenser focus lever

Coarse torque adjustment ring

♦ Condenser clamp screw


� 3 �


♦ ：L300D only

*7: For diascopic bright-field simplified polarization microscopy.



Aperture diaphragm centering screw holes

Filter sliders

Holder clamp screw

♦ Slots for diascopic illumination filter

Focusing target lever

Screw hole for carrying rod

Coarse focus stopper ring

♦ Diascopic field diaphragm dial

♦ Diascopic field diaphragm centering knobs

♦ Diascopic rotatable polarizer *7

♦ Diascopic polarizer dial

Screw holes for carrying rods

“Caution for heat” symbol

CAUTION label

Input voltage indication

Power switch

AC IN connector

2 Microscopy

� 4 �


2

Microscopy

In this chapter, each type of microscopy is described.

Please also refer to "3 Operation of Each Part" for how to operate each part.

1. Episcopic bright-field microscopy__________________________________________ p.5

2. Episcopic dark-field microscopy___________________________________________ p.6

3. Episcopic DIC (differential interference contrast) microscopy ____________________ p.7

4. Episcopic bright-field simplified polarization microscopy ________________________ p.8

5. Episcopic fluorescent microscopy _________________________________________ p.9

6. Diascopic bright-field microscopy (for L300D only) ___________________________ p.10

7. Diascopic bright-field simplified polarization microscopy (for L300D only) __________p.11

2 Microscopy

� 5 �


2.1 Episcopic bright-field microscopy

1. Set each part as follows.

You can perform steps in any sequence.

♦ : L300D only

2. Place the sample on the stage. ___________________________ See “3.10 14 x 12 Stage”

Move the stage to your right (or left) side.

3. Focus on the sample. ___________________________________ See “3.10 14 x 12 Stage”

Use the focusing target for a sample with a polished surface.

4. Adjust diopter. _______________________________________ See “3.4 Diopter adjustment”

5. Adjust interpupillary distance. __________________See “3.5 Interpupillary distance adjustment”

6. Switch to the desired objective and focus on the sample again.

7. Adjust brightness. ____________________________________________ See “3.1 Filters”

Use the ND filters and brightness control dial.

8. Adjust the size of the aperture diaphragm.________________ See “3.8 Aperture diaphragm”

Press in the NCB and ND filters. (Insert the NCB filter into the slot closer to the lamphouse.)

Press in for 100% binocularviewing.

Slide out the analyzer and the polarizer.

Fully press in and pull out 1 click for BF (bright-field).

Slide out the DIC slider.

Lower the stage to the limit.

Select 10x objective.

Adjust the brightness.

♦ Press for EPI.

Fully open the aperture diaphragm.

2 Microscopy

� 6 �


2.2 Episcopic dark-field microscopy

1. Mount the BD objectives.

However, only the objectives marked "BD" can be used on the dark-field microscopy.

2. Observe the sample with the episcopic bright-field microscopy. _________________________________________ See “2.1 Episcopic bright-field microscopy”

3. Switch to the dark-field microscopy.

4. After dark-field microscopy, return to bright-field microscopy, if required.

Fully slide out for DF (dark-field).

Swing in the BDobjective.

Adjust brightness with the brightness control dial.


Adjust the size of the aperture diaphragm.

Press in 1 click for BF (bright-field).


Adjust brightness withthe ND filters.


BD marking on the objective

2 Microscopy

� 7 �


2.3 Episcopic DIC (differential interference contrast) microscopy

1. Attach the analyzer, episcopic polarizer and DIC sliders.

Slide them out to the click position.

2. Observe the sample with the episcopic bright-field microscopy. ________________________________________ See “2.1 Episcopic bright-field microscopy”

3. Switch to the DIC microscopy.

The objective with "LU" marking is suitable for DIC microscopy.

When using the episcopic rotatable polarizer and the rotatable analyzer, set the direction of

polarization for DIC microscopy. (See “3.13.4 Orientation of the polarizer during episcopic DIC

microscopy” and “3.16.4 Orientation of the analyzer during episcopic DIC microscopy”.)

4. After DIC microsopy, return to bright-field microscopy, if required.

Press in the DIC slider.

Adjust brightness with thebrightness control dial.

Rotate to change the interference color.

Slide out the polarizer and analyzer.


Adjust brightness with the ND filters.


Press in the polarizer and the analyzer. When using the episcopic rotatable polarizer and the rotatable analyzer, set the direction of polarization for DIC microscopy.

Rotate the knob to the position indicated on the objective.


(For the objective on theright, turn the knob to match the letter “A” with the white dot.)

2 Microscopy

� 8 �


2.4 Episcopic bright-field simplified polarization microscopy

1. Attach the analyzer and episcopic polarizer.

Slide them out to the click position.


3. Switch to the episcopic bright-field simplified polarization microscopy.

When you use the episcopic rotatable polarizer and the rotatable analyzer, you can perform

polarization microscopy in a desired direction.

(See “3.13 Episcopic rotatable polarizer slider” and “3.16 Rotatable analyzer slider”.)

4. After episcopic bright-field simplified polarization microscopy, return to bright-field microscopy, if required.

Slide out the polarizer and analyzer.





Press in the polarizer and the analyzer. (When using the episcopic rotatable polarizer and the rotatable analyzer, adjust the direction.)

2 Microscopy

� 9 �


2.5 Episcopic fluorescent microscopy

1. Attach the filter block for the desired excitation method. __________________________ See “4.9 Installing the filter block (for fluorescent illumination only)”


3. Perform the episcopic fluorescent microscopy.

4. After episopic fluorescent microscopy, return to bright-field microscopy, if required.

Slide out 1 click for BF.

Completely press in so the filter block enters the optical path.




Adjust the size of the aperture diaphragm.



2 Microscopy

� 10 �


2.6 Diascopic bright-field microscopy (for L300D only)

1. Set each part as follows.

You can perform steps in any sequence.

2. Place the sample on the stage. ____________________________See “3.10 14 x 12 Stage”

Move the stage to your right (or left) front side.

3. Focus on the sample.

The focusing target cannot be used for diascopic illumination. Adjust the focus using the

diascopic field diaphragm as the guide.

4. Adjust diopter. _______________________________________ See “3.4 Diopter adjustment”

5. Adjust interpupillary distance. __________________See “3.5 Interpupillary distance adjustment”

6. Switch to the desired objective and focus on the sample again.

7. Adjust the size of the field diaphragm. ______________________ See “3.7 Field diaphragm”

8. Adjust brightness. ____________________________________________ See “3.1 Filters”

Use the ND filters and brightness control dial.

9. Adjust the size of the aperture diaphragm.________________ See “3.8 Aperture diaphragm”

Slide out the analyzer.

Fully pull out for DF (dark-field).

Lower the stage to the limit.

Select 10× objective.

Adjust the brightness.

Press for DIA.

Turn ON the power.

Set the NCB and ND filters.

Press in for 100% binocular viewing.



2 Microscopy

� 11 �


2.7 Diascopic bright-field simplified polarization microscopy (for L300D only)

1. Observe the sample with the diascopic bright-field microscopy. ______________________________ See “2.6 Diascopic bright-field microscopy (for L300D only)”

2. Attach the analyzer and diascopic rotatable polarizer.

3. Perform the diascopic bright-field simplified polarization microscopy.

When you use the rotatable analyzer with the diascopic rotatable polarizer, you can perform

polarization microscopy of the desired direction. (See “3.14 Diascopic rotatable polarizer slider“ and

“3.16 Rotatable analyzer slider“.)

4. After diascopic bright-field polarization microscopy, return to bright-field microscopy, if required.

Press in the analyzer. (When using the rotatable analyzer, adjust the direction.).

Press in the diascopic rotatable polarizer. Adjust the direction.

Slide out the analyzer.



Slide out the diascopic rotatable polarizer.



3 Operation of Each Part

� 12 �


3

Operation of Each Part

3.1 Filters

Use filters to adjust color temperature, brightness, and contrast. Two types of filter holders are provided: one is for episcopic illumination and the other is for diascopic illumination. Note that the diascopic illumination filters can be used only for L300D.

Up to four episcopic illumination filters can be installed to the left side of the microscope arm, while three diascopic illumination filters can be installed to the front of the lamphouse.

Figure-8 Filters

3.1.1 The types and usage of the filters

The filters as listed in the table below are provided for both episcopic illumination and diascopic illumination. These filters can be used independently or in combination with each other.

Table-3 Types and usage of the filters

Filters Usage

NCB (neutral color balancing filter) Color temperature adjustment for general use and color photomicrography.

ND2 (transmission rate: 50%) Brightness adjustment.



GIF (green interference filter) Contrast adjustment.

Episcopic illumination filter sliders Diascopic illumination filter holders


� 13 �


3.1.2 Placing the filter in and out of the optical path (for episcopic illumination)

You can insert an episcopic illumination filter slider in any of the two slots provided for each of two places on the left side of the microscope arm. You can feel two clicks as you place a filter slider in a slot.

Figure-9 Installation positions of episcopic illumination filters

•••• Placing the filter in the optical path

Push in the filter slider to the second click to place the filter in the optical path. Up to four filter sliders can be combined at your desired way. The NCB filter, however, must be inserted in the nearest slot to the episcopic illumination lamphouse.

•••• Removing the filter from the optical path

Slide out the filter slider to the first click to remove the filter from the optical path. Keep this state if the filter is not used.

3.1.3 Placing the filter in and out of the optical path (for diascopic illumination)

You can insert a diascopic illumination filter holder in any of the three slots provided in front of the diascopic illumination lamphouse.

Figure-10 Installation positions of diascopic illumination filters

•••• Placing the filter in the optical path

Set the filter holder, so that the filter to be used is at the bottom, to desired slot in front of the lamphouse. Up to three filter holders can be combined at your desired way. The NCB filter, however, must be inserted in the nearest slot to the diascopic illumination lamphouse.

•••• Removing the filter from the optical path

Remove all the filter holders from the slots in front of the lamphouse.

Slots for filter sliders

Slots for filter holders


� 14 �


3.2 Coarse / fine focus knobs

3.2.1 The relationship between the focus knob rotation and the stage vertical movement

The relationship between the direction of the focus knob rotation and the stage vertical movement is shown in the figure.

Figure-11 Relationship between the focus knob rotation and the stage vertical movement

• The stage moves 0.1 mm by one full rotation of the fine focus knob.

• The stage moves 1 µm by one step of the fine focus knob graduations.

• The stroke (range) of the stage vertical movement is 29 mm.

Note: When performing observation with the combination of the 14 x 12 stage, glass plate, and 0.7mm liquid crystal board, the stage vertical movement range is 7.2 mm up and 21.8 mm down from the focal plane.

Reference: Never attempt either of the following actions. They will damage the microscope.

• Rotating the left and right knobs in opposite directions at the same time.

• Continuing to rotate the coarse focus knob after the stage has reached the limit of its motion.


� 15 �


3.2.2 Adjusting the torque of the coarse focus knobs

The torque of the coarse focus knobs can be adjusted using the torque adjustment ring at the base of the right coarse focus knob.

Figure-12 Adjusting the torque of the coarse focus knobs

• Increasing the torque of the coarse focus knobs

To increase the torque, turn the torque adjustment ring counter-clockwise.

• Reducing the torque of the coarse focus knobs

To reduce the torque, turn the torque adjustment ring clockwise, but make sure that the stage does not fall on its own weight when you take your hands off the coarse focus knob.

3.2.3 Coarse focus stopper ring

The coarse focus stopper ring is used to mark the vertical position of the stage, mainly the focal plane. Once the coarse focus stopper ring is clamped at a position, you can easily bring back the stage to that position even after it is lowered greatly for sample exchange.

The coarse focus stopper ring is at the base of the left side coarse focus knob.

Figure-13 Coarse focus stopper ring

• Marking the stage position

To mark the stage position, turn the ring clockwise to the limit. When the coarse focus stopper ring is clamped, the stage can no longer be raised up beyond the marked position by the coarse focus knobs.

Reference: Do not excessively tighten the coarse focus stopper ring, otherwise the coarse focus stopper ring may become difficult to release.

Use only the coarse focus knob to lower or raise the stage for sample exchange. To return the stage to the marked position after sample exchange, raise the stage to the limit by the coarse focus knob.

• Releasing the mark

To release the mark, turn the coarse focus stopper ring counter-clockwise to the limit.

To increase the torque

Torque adjustment ring

The stage position is marked.

Coarse focus stopper ring


� 16 �


3.3 Eyepiece tube

3.3.1 Optical path selection

The optical path selection lever can be used to switch the destination of light from the binocular part to the vertical tube.

Figure-14 Optical path selection

3.3.2 Tilting function

The binocular part of the trinocular tilting eyepiece tube can be swung up and down for finding the best viewing position.

Figure-15 Tilting function

3.3.3 Vertical tube adapters

When mounting the photomicrographic equipment or TV camera to the vertical tube of the trinocular eyepiece tube, you must first attach the adapter (photo adapter or direct C-mount adapter; both sold separately). Insert the adapter into the vertical tube and fix it by the clamp screw with the Allen wrench.

Figure-16 Vertical tube adapters

Push IN

100%

0%

Pull OUT

0%

100%

Photo adapter

Set-screw

Vertical tube of the trinocilar eyepiece tube.


� 17 �


3.4 Diopter adjustment

The diopter adjustment compensates for differences in eyesight between your left and right eyes. After the correct adjustment, you will find the observation with both eyes easier and the focus shift is reduced when switched to the different objectives. Be sure to adjust the diopter adjustment rings on both eyepieces.

Figure-17 Diopter adjustment

1. Turn the diopter adjustment rings on both eyepieces to align their engraved lines with the edge of the outer tube of the eyepiece. (This is the standard position for the diopter adjustment.)

2. Focus on the sample with the 10× objective following the steps described in “2.1 Episcopic bright-field microscopy” or “2.6 Diascopic bright-field microscopy (for L300D only).”

3. Bring the 50× objective in the optical path and focus on the sample using the focus knobs. (Using the focusing target makes the focusing easier on episcopic illumination. See ”3.11 Focusing target”.)

4. Bring the 5× or 10× objective in the optical path.

5. Looking through the right eyepiece with your right eye, focus on the sample by turning the diopter adjustment ring on the right eyepiece (not the coarse and fine focus knobs). Look through the left eyepiece with your left eye and focus on the sample with the diopter adjustment ring on the left eyepiece.

6. Repeat steps 3 to 5 till the image keeps its focus even though the objective magnification is changed.

Outer tube edge

Engraved line Diopter adjustment ring


� 18 �


3.5 Interpupillary distance adjustment

Adjust the interpupillary distance to observe a sample with both eyes.

Figure-18 Interpupillary distance adjustment

1. Perform the diopter adjustment and focus on the image with the 10× objective.

2. Adjust the interpupillary distance so that the viewfield for each eye is at the same position on the sample.

3.6 Centering the objective

Among the six holes of the nosepiece, three (nosepiece addresses 4, 5, and 6) have the centering feature for objectives. When you center an objective, you can reduce the viewfield misalignment that occurs when you switch objectives of high magnification. Using the eyepiece with crosshairs (sold separately) lets you perform even more precise centering.

Figure-19 Centering screw holes

1. Attach the desired objectives to nosepiece addresses 4, 5, and 6.

2. Attach the eyepiece with crosshairs. (If you do not have an eyepiece with crosshairs, use a normal eyepiece.)

3. Insert an objective with one-level lower magnification than the desired objective into the optical path and focus on the sample.

4. Match the target in the sample (for example, a pattern that is easy to recognize) to the cross point of the cross in the viewfield (or center of the viewfield).

5. Insert the objective attached to nosepiece address 4 into the optical path.

Merge the viewfields into one.

Centering screw holes


� 19 �


6. If the target is not aligned with the cross point, use an Allen wrench (1.5 mm) to turn the centering screws of the nosepiece and bring the target to the cross point (or center of the viewfield). If you mainly connect the microscope to a monitor display, bring the target to the center of the monitor display.

7. In the same manner, adjust the objectives attached to nosepiece addresses 5 and 6.

Reference: If you turn the centering screw to the right and the screw hits the limit, do not turn the screw any further. If you do, you may damage the screw.

3.7 Field diaphragm

The field diaphragm determines the range of light to samples. The more you narrow the field diaphragm, the more flaring is suppressed, improving contrast. You need to set the field diaphragm to an adequate size especially when you perform microscopy that requires high image quality (such as filming).

For episcopic illumination, the built-in field diaphragm is set to the adequate size and it does not need to be adjusted.

3.7.1 Adjusting the size of the field diaphragm (for diascopic illumination only)

While observing the sample, operate the diascopic field diaphragm dial so the size of the diaphragm is the same as that of the viewfield. For diascopic illumination, the adequate size of the diaphragm differs depending on the magnification of the objective in the optical path. Adjust the diaphragm so it is appropriate for the magnification in use.

Figure-20 Diascopic field diaphragm dial

Diascopic field diaphragm dial


� 20 �


3.7.2 Focusing the field diaphragm image (for diascopic illumination only)

Bring the diaphragm image into focus when the microscope is delivered to you or when the way you use the microscope is changed. The diaphragm image may become out of focus depending on the thickness of the sample or whether a glass plate is used for mounting a sample.

1. Use the 10× objective to focus on the sample. Bring the part of the sample with less patterns in the optical path.

2. Bring the diascopic field diaphragm dial to the minimum.

3. While observing the sample, operate the condenser focus lever to focus the field diaphragm image.

Figure-21 Condenser focus lever

3.7.3 Centering the field diaphragm (for diascopic illumination only)

Center the objectives (see “3.6 Centering the objective”)and then perform this centering.

Focus the diaphragm image, operate the diascopic field diaphragm centering knobs to move the diaphragm image to the center of the viewfield.

Figure-22 Centering the field diaphragm (diascopic illumination)

1. Switch to the 50× objective and match the center of the diaphragm image and the center of the viewfield.

At this time, operate the diascopic field diaphragm dial to reduce the diaphragm image so it is a little

smaller than the viewfield, and then operate the centering knob. This way, you can achieve highly

precise centering.

Condenser focus lever

Moving the diaphragm image

Diascopic field diaphragm centering knobs

Viewfield

Diaphragm image

Viewfield

Diaphragm image


� 21 �


3.8 Aperture diaphragm

The aperture diaphragm adjusts the numerical aperture (N.A.) of the illumination system, and plays an important part in determining image resolution, contrast and depth of focus.

3.8.1 Adjusting the size of the aperture diaphragm

When adjusting the size of the aperture diaphragm for episcopic illumination, use the episcopic aperture diaphragm control buttons. For diascopic illumination, use the aperture diaphragm lever for diascopic illumination.

1. Remove one eyepiece and look into the open sleeve.

Inside, you can see the exit pupil of the objective as a bright circle.

2. Adjust the size of the aperture diaphragm image to the appropriate size.

Generally, the aperture diaphragm is to be stopped down to 70 to 80% of the objective N.A.

Stopping down the aperture diaphragm excessively will lower the image resolution. The

aperture should not be smaller than 60% of the objective N.A.

Figure-23 Aperture diaphragm

If your sample is of low reflectance and observed under episcopic illumination, you may not be able to see the aperture diaphragm image. In this case, replace the sample with of higher reflectance.

3.8.2 Centering the episcopic aperture diaphragm

Tools required: Allen wrench (2 mm) × 2

On normal usage, there is no need to center the episcopic aperture diaphragm since it is already centered at the factory. If you need very precise centering or off-centered diaphragm (such as for diagonal illumination), the position of the aperture diaphragm can be shifted.

Center the episcopic aperture diaphragm using two aperture diaphragm centering holes at the back of the filter slider on the left side arm.

1. Remove the caps of the centering holes and insert the Allen wrench in the centering holes.

You can look in the holes to find the centering screw heads.

Exit pupil of the objective

Image of the aperture diaphragm

100%

70 to 80%

Aperture diaphragm lever for diascopic illumination

Episcopic aperture diaphragm control buttons

The appropriate size of the aperture diaphragm


� 22 �


2. Remove one eyepiece from the microscope and look inside the open sleeve to find the image of the aperture diaphragm. Turn the centering screws to match the two centers of the exit pupil of the objective and the image of the aperture diaphragm in the same manner as adjusting the size of the aperture diaphragm.

Figure-24 Centering the episcopic aperture diaphragm

For precise centering, using a centering telescope (sold separately) is recommended with

which you can see the exit pupil of the objective much easier.

Image of the aperture diaphragm

Exit pupil of the objective

Match two centers

Aperture diaphragm centering screw holes


� 23 �


3.9 Changing the illumination

You can use the dark-field/bright-field/fluorescent selection lever on the right of the arm to change illumination.

Figure-25 Dark-field/bright-field/fluorescent selection lever

For fluorescent illumination, attach the filter block inside the arm. (See “4.9 Installing the filter block (for fluorescent illumination only)”.)

Table-4 Changing the illumination

Lever position Type of illumination

FL Fully push in.

Fluorescent illumination

(only when the filter block is attached)

BF Pull out 1 click.

Bright-field illumination

DF Fully pull out.

Dark-field illumination

Dark-field/bright-field/fluorescent selection lever


� 24 �


3.10 14 ×××× 12 Stage

The 14 × 12 stage can be moved in either the "coarse" mode for swift and long-ranging movement, or the "fine" mode for minute movement. To switch between the modes, use the coarse movement ON and OFF switches on the stage coarse movement lever.

3.10.1 The "coarse" mode

Grip the stage coarse movement lever to press in the coarse movement ON switch at the back side of the lever. The stage is now in the "coarse" mode and can be moved freely in both X and Y direction.

Once the coarse movement ON switch is pressed, the stage stays in the "coarse" mode. Take hold of the stage coarse movement lever and move the stage (the coarse mode is used at low magnification observation and changing samples).

Moving the stage with the stage coarse movement lever without pressing in the coarse movement ON switch will damage the stage. Likewise, pushing or pulling the stage plate without pressing in the coarse movement ON switch will damage the stage. Make sure that the coarse movement ON switch is pressed in for the "coarse" mode before moving the stage coarse movement lever.

When changing samples, lower the stage 5 to 10 mm below the focal plane. Use coarse focus stopper ring for easy adjustment. (See “ 3.2.3 Coarse focus stopper ring".)

Figure-26 COARSE mode

Press in the coarse movement ON switch

Stage coarse movement lever


� 25 �


3.10.2 The "fine" mode

Press down the coarse movement OFF switch at the left side of the stage coarse movement lever. The stage is now in the "fine" mode. Turn the stage fine movement knobs to move the stage minutely in both X and Y direction. The fine mode is maintained until you press in the coarse movement ON switch at the back side of the stage coarse movement lever.

Figure-27 FINE mode

3.11 Focusing target

When you are to observe a sample with a polished surface under the episcopic illumination, the use of the focusing target will facilitate the focusing.

3.11.1 How to use the focusing target

Pull out the focusing target lever to put the focusing target in the optical path.

Pull out the focusing target lever and look into the eyepieces. You will find dark shadows at 4 corners of the viewfield. When the sample is out of focus, the edges of the shadows are also blurred (see the figure below). Turn the focus knobs and focus on the edges of the shadows till they look sharp. After that, push in the focusing target lever to remove the focusing target from the optical path and find out that the sample is just as well in focus.

Figure-28 Focusing target

Stage fine movement knob for X-axis Stage fine movement

knob for Y-axis

Press down the coarse movement OFF switch

Focusing target lever (Pull out to put the focusing target in the optical path.)

Out of focus. In focus.

The edges are blurred.

The edges are sharp.


� 26 �


3.12 Episcopic polarizer slider

Use together with the analyzer slider for episcopic bright-field simplified polarization microscopy.

Use together with the analyzer and the DIC sliders for episcopic DIC microscopy.

Figure-29 Episcopic polarizer slider

3.12.1 Attaching the polarizer slider

Remove the cap near the indication "POLARIZER" at the right side of the microscope arm. Insert the polarizer slider with its nameplate facing toward the eyepieces. Slide the slider in and out of the microscope to find two clicks on the slider.

3.12.2 Placing/removing the polarizer in/from the optical path

Figure-30 Episcopic polarizer

•••• Placing the polarizer in the optical path

Push in the slider till the second click to place the polarizer in the optical path.

Adjust the orientation of the polarizer before using the polarizer slider for the first time. (See “3.12.3 Adjusting the orientation of the polarizer”.)

Empty hole

Polarizer

Orientation adjustment screw

Push in: The polarizer is in the optical path.

Episcopic polarizer slider


� 27 �


•••• Removing the polarizer from the optical path

Pull out the slider to the first click to remove the polarizer from the optical path. (The empty hole is now placed in the optical path.)

3.12.3 Adjusting the orientation of the polarizer

Turning the orientation adjustment screw at the bottom of the slider changes the orientation of the polarizer. Here is how to rotate the polarizer for the precise crossed Nicols adjustment.

Place the polarizer and the analyzer in the optical path. Place a sample with flat and plane surface on the stage and set each part of the microscope for the episcopic simplified polarization microscopy.

Remove one eyepiece from the microscope and look inside the open sleeve. You can see the objective's exit pupil as a bright circle. Turn the orientation adjustment screw in either direction till the dark cross appears in the field. This is the crossed Nicols position.

Figure-31 Dark cross

3.13 Episcopic rotatable polarizer slider

Use together with the rotatable analyzer for episcopic bright-field simplified polarization microscopy with the orientation of polarization that can be set to the desired direction.

Using the episcopic rotatable polarizer slider with the analyzer slider and the DIC slider makes episcopic DIC microscopy possible.

Figure-32 Episcopic rotatable polarizer slider

Empty hole

Polarizer

Triangular mark

Dial

Orientation indicators


� 28 �


Figure-33 Layout of dial and polarizer orientation


Remove the cap near the indication "POLARIZER" at the right side of the microscope arm. Insert the polarizer slider with its nameplate facing toward the eyepiece. Slide the slider in and out of the microscope to find two clicks on the slider.


Figure-34 Episcopic rotatable polarizer




Pull out the slider to the first click (to the right) to remove the polarizer from the optical path. (The empty hole is now placed in the optical path.)

Episcopic rotatable polarizer slider

Orientation indicator of polarizer Dial



� 29 �


3.13.3 Setting the polarizer orientation

While checking the orientation indicators of the dial, operate the dial so the desired indicator matches the triangular mark.

To set the polarizer in the crossed Nicols position with the desired analyzer orientation, remove the eyepiece and rotate the dial so the objective's exit pupil in the eyepiece becomes a dark cross. Use a sample that is flat and plain.


3.13.4 Orientation of the polarizer during episcopic DIC microscopy

Match the horizontal indicator of the dial with the triangular mark.

Figure-36 Orientation of the polarizer during episcopic DIC microscopy

3.14 Diascopic rotatable polarizer slider

Use together with the rotatable analyzer for diascopic bright-field simplified polarization microscopy with the orientation of polarization that can be set to the desired direction.

Figure-37 Diascopic rotatable polarizer slider


Polarizer

Triangular mark

Empty hole

Dial


� 30 �


Figure-38 Layout of dial and polarizer orientation


Remove the cap near the indication "POLARIZER" at the left side of the microscope base. Insert the polarizer slider with its nameplate facing up. Slide the slider in and out of the microscope to find two clicks on the slider.

Figure-39 Diascopic rotatable polarizer


Figure-40 Diascopic rotatable polarizer

Diascopic rotatable polarizer slider

Orientation indicators Dial

Insert the diascopic rotatable polarizer slider.



� 31 �





Pull out the slider to the first click (to the left) to remove the polarizer from the optical path. (The empty hole is now placed in the optical path.)

3.14.3 Setting the polarizer orientation


To set the polarizer in the crossed Nicols position with the desired analyzer orientation, remove the eyepiece and rotate the dial so the objective's exit pupil in the eyepiece becomes a dark cross. Use a sample that is flat and plain.



� 32 �


3.15 Analyzer slider

Use together with the polarizer slider for episcopic bright-field simplified polarization microscopy.

Use together with the polarizer and the DIC sliders for episcopic DIC microscopy.

Figure-42 Analyzer slider

3.15.1 Attaching the analyzer slider

Remove the cap near the indication "ANALYZER" at the right side of the microscope arm. Insert the analyzer slider with its nameplate facing up. Slide the slider in and out of the microscope to find two clicks on the slider.

3.15.2 Placing/removing the analyzer in/from the optical path

Figure-43 Analyzer

•••• Placing the analyzer in the optical path

Push in the slider till the second click to place the analyzer in the optical path.

Since the orientation of the analyzer is already adjusted at the factory, you can easily get the crossed Nicols position by just placing the polarizer and the analyzer in the optical path.

•••• Removing the analyzer from the optical path

Pull out the slider to the first click to remove the analyzer from the optical path. (The empty hole is now placed in the optical path.)

Empty hole

Analyzer

Analyzer slider

Push in: The analyzer is in the optical path.


� 33 �


3.16 Rotatable analyzer slider

Use together with the episcopic rotatable polarizer or the diascopic rotatable polarizer for episcopic or diascopic simplified polarization microscopy with the orientation of polarization that can be set to the desired direction.

Using the rotatable analyzer slider with the episcopic (or episcopic rotating) polarizer slider and the DIC slider makes episcopic DIC microscopy possible.

Figure-44 Rotatable analyzer slider

Figure-45 Layout of dial and analyzer orientation

3.16.1 Attaching the analyzer slider

Remove the cap near the indication "ANALYZER" at the right side of the microscope arm. Insert the analyzer slider with its nameplate facing upward. Slide the slider in and out of the microscope to find two clicks on the slider.

Empty hole

Analyzer

Triangular mark

Dial



� 34 �


3.16.2 Placing/removing the analyzer in/from the optical path

Figure-46 Rotatable analyzer

•••• Placing the analyzer in the optical path

Push in the slider till the second click to place the analyzer in the optical path.

•••• Removing the analyzer from the optical path

Pull out the slider to the first click (to the right) to remove the analyzer from the optical path. (The empty hole is now placed in the optical path.)

3.16.3 Setting the analyzer orientation


To set the analyzer in the crossed Nicols position with the desired polarizer orientation, remove the eyepiece and rotate the dial so the objective's exit pupil in the eyepiece becomes a dark cross. Use a sample that is flat and plain.


3.16.4 Orientation of the analyzer during episcopic DIC microscopy

Match the vertical indicator of the dial with the triangular mark.

Figure-48 Orientation of the analyzer during episcopic DIC microscopy

Rotatable analyzer slider

Push in: The analyzer is in the optical path.


� 35 �


3.17 DIC slider

Use together with the episcopic (or episcopic rotatable) polarizer and analyzer sliders for episcopic DIC microscopy.

Figure-49 DIC slider

3.17.1 Attaching (removing) the DIC slider

Use an Allen wrench to loosen the DIC slider limit screw on the revolving nosepiece.

Insert the DIC slider into the slot on the nosepiece and screw in the DIC slider limit screw.

When removing the DIC slider from the nosepiece, first fully loosen the DIC slider limit screw, and then pull out the slider.


Prism movement knob

Prism selection knob

Sliding limit groove

DIC slider limit screw


� 36 �


3.17.2 Placing/removing the DIC prism in/from the optical path


•••• Placing the DIC prism in the optical path

Push in the slider till the second click to place the DIC prism in the optical path.

•••• Removing the DIC prism from the optical path

Pull out the slider to the first click to remove the DIC prism from the optical path.

3.17.3 Selecting the DIC prism position

According to the objective in use, select either A or B as the position of the DIC prism. The correct position to be used is indicated on the objective barrel after the magnification and the objective N.A. indications. See the objective figure below. The letter "A" on the barrel indicates that the correct DIC prism position for this objective is "A". Thus, when you use this objective, turn the prism selection knob on the DIC slider to match the letter "A" with the white dot.

Figure-52 Selecting the DIC prism position (objective)

Push in: The DIC prism is in the opticalpath.

The correct position for the DIC prism selection knob is indicated here.


� 37 �


3.17.4 Selecting the interference color

Turn the prism movement knob to change the interference colors.

Table-5 Selecting the interference color

Interference color Effects

Dark Observation similar to the dark-field microscopy can be performed.

Gray The changes in phase difference are shown as the difference in brightness. This color gives the highest sensitivity in detecting the phase difference.

Sensitive red-violet The changes in phase difference are shown as a difference in interference colors. The detection sensitivity is not good as the gray.

3.18 Pinhole slider

When using the high magnification objectives, placing the pinhole on the optical path gives deep depth of focus to the image. This is especially effective when viewing contact holes.

Figure-53 Pinhole slider

3.18.1 Attaching the pinhole slider

Remove the cover plate near the indication "PINHOLE" at the right side of the microscope arm. Attach the pinhole slider adapter instead, using two flat head screws supplied together with the pinhole slider. Insert the pinhole slider to the adapter. Slide the slider in and out of the microscope to find two clicks on the slider.

Be sure to center the pinhole before observation.

3.18.2 Placing/removing the pinhole in/from the optical path

•••• Placing the pinhole in the optical path

Push in the slider till the second click to place the pinhole in the optical path.

When the pinhole is in the optical path, opening or closing down the aperture diaphragm will have no effect on the image since the pinhole aperture is smaller than the aperture diaphragm stopped down to the limit.

Pinhole slider adapter

Flat head screws

Pinhole

Pinhole centering screws


� 38 �


•••• Removing the pinhole from the optical path

Pull out the slider to the first click to remove the pinhole from the optical path and to make the aperture diaphragm effective.

3.18.3 Centering the pinhole

Be sure to center the pinhole (match the centers of the pinhole and the optical path) before observation.

Remove one eyepiece and while looking into the open sleeve, turn the pinhole centering screws to bring the pinhole image to the center of the exit pupil of the objective. For this adjustment, the use of centering telescope (sold separately) is recommended since it will facilitate the observation of the exit pupil.

Figure-54 Pinhole

Pinhole slider

Push in: The pinhole is in the optical path.

Pinhole slider adapter

4 Assembly

� 39 �


4

Assembly

Assemble each part of the microscope referring to the diagram on the next page.

WARNING • Before assembling the microscope, be sure to read the WARNING and CAUTION at

the beginning of this instruction manual and follow the instructions written therein.

• To avoid electrical shocks and fire, turn off the power switch (flip it to the “O” side) before assembling the microscope.

CAUTION • The main body of this instrument weighs about 40 kg.

• To install this instrument on a desk or a table, at least two people are required. Handle the instrument carefully and do not drop it.

• Dropping it may injure the person carrying it or damage the instrument.

• Take care not to pinch your hands or fingers during assembly.

• Scratches and fingerprints on the lenses will adversely affect the image. Take care not to get

them on the lenses. If lenses and the like are contaminated, e.g., with fingerprints, clean them

according to the description in "6.3 Cleaning this product."

• The microscope is a precision optical instrument. Take care when handling them and avoid strong shocks. (Especially on the objectives since they can be adversely affected even by a weak shock.)

4.1 Required tools

To assemble this instrument, the following tools are required. (These tools are not supplied with the microscope.)

• Allen wrench or screwdriver 2 mm × 1 2.5 mm × 1 4 mm × 1 5 mm × 1

• Phillips screwdriver × 1

4 Assembly

� 40 �


4.2 Installation location

This product is a precision optical instrument. Using or storing the microscope under unsuitable conditions may damage it or may have an adverse effect on its accuracy. Read the warnings and cautions explained in the beginning of this manual and select the location that satisfies the indicated conditions.

4.3 Assembling (schematic of complete assembly)

∗1: Needs objective mount adapter to change the screw from ∅25 to ∅32 mm.

Figure-55 Assembling

Power cord

Rotatable analyzer

Eyepieces

Analyzer

Polarizer

Episcopic rotatablepolarizer

Pinhole ND, NCB, GIF filters (for episcopic illumination)

Lamp and lamphouse (for episcopic illumination)

Lamp and lamphouse (for diascopic illumination)

ND, NCB, GIF filters (for diascopic illumination)

Eyepiece tube

Breath shielding plate

DIC slider

Objective mount adapter

*1

Objective (with ∅25 mm

screw)

Objective (with ∅32 mm

screw)

Stage

Glass plate and wafer holder

Diascopic rotatable polarizer (for diascopic illumination)

(L300D only)

(L30

0D o

nly)

(L300D only)

4 Assembly

� 41 �


4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replacing the lamp)

CAUTION • To prevent electrical shock and damage to the microscope, always turn off the power switch

(flip it to the “O” side) and unplug the power cord from the wall outlet before connecting or disconnecting the lamphouse.

• To prevent burn injury, allow the lamp and the lamphouse to cool for at least 30 minutes after turning off the power switch, before replacing the lamp.

• Use only the specified lamp and the lamphouse on this product. The use of other lamps and

lamphouses may lead to malfunction. For details about the specified lamp and lamphouse,

see "7 Technical specifications".

• Do not touch the glass surface of the lamp with bare hands. Fingerprints or grease on the bulb

surface will reduce the illumination of the lamp. Wipe clean any fingerprints or grease with a

clean piece of cloth.

• Securely attach the lamphouse cover to the lamphouse after replacing the lamp. Never light

the lamp while the lamphouse cover is open.

• When you dispose of the replaced lamp, do not shatter it or dispose of it casually. Dispose of

the used lamp as the special industrial waste or dispose of them according to the regulations

and rules of your local authority.

1. Turn off the power switch of the microscope (flip it to the “O” side) and disconnect the power cord plug from the outlet.

2. Remove the lamphouse from the microscope if attached. (Use the Allen wrench (2 mm for episcopic illumination, 2.5 mm for diascopic illumination) to loosen the lamphouse clamp screw on the right side of the microscope and remove the lamphouse.)

3. Remove the lamphouse cover by loosening the lamphouse cover clamp screw using a coin.

4. Press down the lamp clamp lever, remove the old lamp, and insert a new lamp to the socket to the limit. (Do not hold the lamp by the bare hands. Use gloves.)

5. Slowly return the lamp clamp lever to its original position. Take care not to tilt the lamp at this time.

6. Securely close the lamphouse cover and tighten the clamp screw.

7. Return the lamphouse to the microscope. Make sure that the plug on the lamphouse fits securely into the socket on the lamphouse mount.

Figure-56 Lamphouse

Lamphouse clamp screw

Lamp clamp lever

Lamphouse cover clamp screw

(For episcopic illumination)

4 Assembly

� 42 �


4.5 Attaching the stage, the glass plate, and the wafer holder

CAUTION The stage weighs about 15 kg.

Use caution not to drop it or get your hands and fingers caught.

4.5.1 When using glass plate (when performing diascopic microscopy)

Set the glass plate on the stage when performing diascopic microscopy or when observing the sample such as the liquid crystal panel. Don't remove the stroke limit pins from the stage. (The longitudinal stroke of the stage becomes 270 mm.)

If the stage is moved a large distance with the stroke limit pins removed, the interference occurs between the stage and the diascopic illumination condenser resulting in a malfunction of the microscope.

Use the screw holes specified by the arrows in the figure below when fixing the stage on to the substage of the microscope base.

Figure-57 Screw holes to fix the stage (when performing diascopic microscopy)

1. Move the condenser focus lever to the left and lower the condenser.

2. Lower the substage to the limit using the coarse and fine focus knobs.

3. Remove the four Allen screws from the substage.

• Use a 5-mm Allen wrench.

4. Mount the stage on the substage and secure it using the four screws removed in step 3.

• Use the screw holes shown on the above figure.

Ball spline

Front fixing metal

Screw holes to fix the stage

(for diascopic microscopy)

Side fixing metal

Don't remove the stroke limit pins.

(longitudinal stroke: 270 mm)

4 Assembly

� 43 �



• Mount the stage carefully. Make sure you do not hit the bottom of the stage with the top of the

condenser.

• When you hold the stage, do not touch the ball spline. Doing so may cause rust.

• When you hold the stage, do not hold the fine movement knobs or the stage coarse movement

lever. Doing so may damage those parts.

5. Remove the two fixing metals that secure the stage plate.


• The fixing metals are secured using four Allen screws.

6. Attach the glass plate.

• Gently place the glass plate into the square hole on the upper surface of stage so that the fixing

metal is placed on the left and the large chamfer is front right, viewing from you.

• Tighten the clamp screw on the left of the stage and secure the glass plate. (If you tighten the

screw too strongly, the glass plate tilts.)

Figure-58 Glass plate

4.5.2 When using wafer holder

Set the wafer holder on the stage when observing the sample such as the 300mm wafer. Note that when the wafer holder is set on the stage, you cannot perform diascopic microscopy. The longitudinal stroke of the stage must be set to 304 mm by removing the stroke limit pins.

Use the screw holes specified by the arrows in the figure below when fixing the stage on to the substage of the microscope base.

Fixing metal

Large chamfer

Observer

Back

4 Assembly

� 44 �


Figure-59 Screw holes to fix the stage (when not performing diascopic microscopy)

1. Move the condenser focus lever to the left and lower the condenser.

2. Lower the substage to the limit using the coarse and fine focus knobs.

3. Remove the four Allen screws from the substage.


4. Mount the stage on the substage and secure it using the four screws removed in step 3.

• Use the screw holes shown on the above figure.


• Mount the stage carefully. Make sure you do not hit the bottom of the stage with the top of the

condenser.

• When you hold the stage, do not touch the ball spline. Doing so may cause rust.

• When you hold the stage, do not hold the fine movement knobs or the stage coarse movement

lever. Doing so may damage those parts.

5. While the condenser focus lever is at the left (the condenser is lowered), tighten the condenser clamp screw to secure the condenser (L300D only).

• If you move the stage while the condenser is up, the stage and the condenser interfere each other,

causing damage. Secure the condenser in the lower position.

Figure-60 Fixing the condenser

Ball spline

(Remove two pins when not performing diascopic microscopy)

Front fixing metal

Stroke limit pins

Side fixing metal

Condenser focus lever

Condenser clamp screw

Screw holes to fix the stage

(for the semiconductor wafer)

4 Assembly

� 45 �


6. Remove the two stroke limit pins using a flat-head screwdriver.

7. Remove the two fixing metals that secure the stage plate.


• The fixing metals are secured using four Allen screws.

8. Attach the 300-mm wafer holder.

• Gently place the wafer holder into the square hole on the upper surface of stage so that you can

read the erect images of the letters on the nameplate.

• Tighten the clamp screw on the left of the stage and secure the wafer holder. (If you tighten the

screw too strongly, the wafer holder tilts.)

4.6 Attaching the eyepiece tube

Fully loosen the eyepiece tube fixing screw with the Allen wrench. Fit the eyepiece tube on to the mount on the top of the microscope arm and tighten the eyepiece tube clamp screw.

4.6.1 When removing the eyepiece tube

Grasp the eyepiece tube when loosening the eyepiece tube clamp screw since the eyepiece tube may fall out suddenly.

4 Assembly

� 46 �


4.7 Attaching the objectives

Lower the stage to the limit. Screw in the objectives to the nosepiece so that their magnification becomes higher in the order of the nosepiece addresses of 1 to 6.

The objectives of ∅25 mm and ∅32 mm screws can be attached to the nosepiece. Note that the ∅25 mm objectives need objective mount adapters to change their screws to ∅32 mm.

4.7.1 When removing the objectives

To avoid breaking the objectives and the sample, first lower the stage to the limit and remove the sample on the stage. Then remove the objective using both hands so that the objective will not fall out suddenly.

4.7.2 When the objectives not set correctly on the optical path when they are switched

When the objectives not set correctly on the optical path when they are switched, turn the revolving nosepiece several times. After these several turns, the objectives will be set correctly on the optical path. This trouble may happen when there are only a few objectives on the nosepiece, and all the objectives are set on one side of the nosepiece.

4.7.3 Centering the objectives

Nosepiece addresses 4, 5, and 6 have the feature to center the objectives. By using this feature, you can avoid the viewfield misalignment that might occur when switching objectives of high magnification. (See “3.6 Centering the objective”.)

4.8 Attaching the eyepieces

Attach eyepieces with the same magnifications for the left and the right eyes.

There is a positioning pin on the eyepiece sleeve. Insert the eyepiece so that its positioning groove matches the pin.

4 Assembly

� 47 �


4.9 Installing the filter block (for fluorescent illumination only)

CAUTION • Turn off the microscope (flip the switch to the “O” side) when installing or replacing the filter

block.

• If you replace the filter block while the episcopic illumination is turned on, the strong light may hurt your eyes.

1. Remove the dark-field/bright-field/fluorescent selection lever.

2. Remove the lid on the right of the arm.

• Loosen the knob until it is removed together with the lid.

3. Mount the dark-field/bright-field/fluorescent selection lever and draw it out to near side.

4. Insert the filter block along the block installation guide.

• Insert the block until you feel a click.

• You cannot remove the two illumination blocks at the back of the guide.

5. Remove the dark-field/bright-field/fluorescent selection lever again and retain the lid at its original position.

6. Mount the dark-field/bright-field/fluorescent selection lever.

Figure-61 Installing the filter block (fluorescent illumination)

Dark-field/bright-field/fluorescent selection lever

Knob State at step 3.

Block installation guide

4 Assembly

� 48 �


4.10 Attaching fiber adapter

Attaching the fiber adapter instead of the episcopic lamphouse will enable the user to use the illuminator with the fiber luminous section.

Figure-62 Fiber adapter

To avoid burns, attach the fiber adapter when the lamphouse is fully cooled (at least 30 minutes after it is turned off).

1. Loosen the lamphouse clamp screw to remove the episcopic lamphouse.

2. Insert the fiber adapter instead and fix it by the same clamp screw.

3. Insert the fiber to the adapter to the limit and fix it by the fiber clamp screw.

4.11 Attaching breath shielding plate

There are three screw holes for mounting the breath shielding plate under the front bottom side of the arm near the nosepiece. Screw on the breath shielding plate to the microscope by screwing in the screws on the breath shielding plate.

The excessive loading on the transparent plastic plate such as to bend the plate may break the plate. Be careful when handling it.

Figure-63 Breath shielding plate installation positions

Fiber clamp screw

Insert the fiber.

Fiber adapter

Lamphouse clamp screw

Screw holes for the breath shielding plate

4 Assembly

� 49 �


4.12 Seismic restraint

Nikon recommends you to screw securely the microscope on the base to prevent sliding of the microscope on the base during an earthquake.

1. Provide two pieces of the angles as illustrated below (the below figure shows the installation dimensions to the microscope. Installation dimensions to the installation surface must be decided considering conditions of the installation surface. The material of the angle must be aluminum alloy and the gauge must be over 5mm).

2. Fix the angles on the installation surface using retaining screws.

3. Turn the bolt through the elongated hole on the angle into the screw hole for carrying rod on the microscope to connect the angle and the microscope. Use appropriate two screw holes for carrying rod out of four.

• Provide a gap of a few millimeters between the microscope, angle, and the head of the bolt.

Otherwise, vibrations of the earthquake shake the microscope to interfere observation through the

microscope.

Figure-64 Installation dimensions

Gap

Gap

Gap

90

120

30

10

133 42

30

10

39 -

43

80 17

51

57 -

61

60 17

33

M8 L30

2-R5

2-R5

M8 L30

351

526

Chamfer

4 Assembly

� 50 �


4.13 Connecting the power cord

WARNING Use only the supplied power cord. Using the wrong power cord could result in damage or fire.

(The specification of the supplied power cord is written below.) Also note that the protection

Class 1 equipment should be connected to the PE (protective earth) terminal for grounding.

• For the 100 to 120 V area:

UL approved, detachable power cord set, 3 conductor grounding Type SVT, No. 18 AWG, 3m

long maximum, rated at 125 V AC minimum.

• For the 220 to 240 V area:

Approved according to EU/EN standards, 3 conductor grounding Type H05VV-F, 3 m long

maximum, rated at 250 V AC minimum.

Turn off the power switch of the microscope (flip it to the “O” side).

First connect the socket of the power cord to the AC IN connector on the back of microscope. Then plug in the plug of the power cord to the AC outlet.

4.14 Attaching photomicrographic equipment or TV camera

Please refer to the instruction manual supplied with the equipment for its operation and assembly.

4.14.1 Photomicrographic equipment

Remove the cap on the vertical tube of the trinocular eyepiece tube and attach the photo adapter, then secure it using the set-screw. Insert the PLI projection lens deep into the photo adapter and then attach the photomicrographic equipment on the photo adapter. Face the finder to the front and tighten the clamp screw.

4.14.2 Photo-mask eyepiece

The use of photo-mask eyepiece (sold separately) is recommended to take photographs while maintaining the normal operating posture. Without this eyepiece, you must look into the finder on the photomicrographic equipment. See the instruction manual supplied with the photomicrographic equipment (U-III, H-III, P-III) for the use of photo-mask eyepiece.

4 Assembly

� 51 �


4.14.3 TV cameras

(1) When using a 1×××× relay lens

1. Attach the photo adapter (sold separately) to the vertical tube of the trinocular eyepiece tube and secure it using the set-screw.

2. Insert the relay lens into the hole inside the photo adapter.

3. Attach the C-mount adapter or the ENG adapter to the camera.

4. Insert the sleeve of the adapter attached to the camera into the hole of the photo adapter.

5. Adjust the direction of the camera and secure the camera using the clamp screw of the photo adapter.

(2) When using a 0.35××××, 0.45××××, or 0.6×××× C mount lens


2. Attach the C-mount lens to the camera.

3. Insert the lower tube of the C-mount lens into the hole of the photo adapter.


(3) When using a direct C-mount adapter

1. Attach the C-mount adapter to the camera.

2. Insert the sleeve of the C-mount adapter to the vertical tube of the trinocular eyepiece tube.

3. Adjust the direction of the camera and secure the camera using the set-screw of the vertical tube of the trinocular eyepiece tube.

4.14.4 Digital cameras

(1) When using a 0.38×××× lens for DN


2. Attach the 0.38× lens to the camera.

3. Insert the lower tube of the lens into the hole of the photo adapter.


4 Assembly

� 52 �


(2) When using a 0.63×××× lens for DXM

1. Attach the 0.63× lens to the camera.

2. Insert the lower tube of the lens into the vertical tube of the trinocular eyepiece tube.


(3) When using a direct C-mount adapter

1. Attach the C-mount adapter to the camera.

2. Insert the sleeve of the C-mount adapter to the vertical tube of the trinocular eyepiece tube.


5 Troubleshooting

� 53 �


5

Troubleshooting

Improper use of the microscope may adversely affect its performance even though it will not damage the microscope. If any of the problems listed below arise, take the countermeasures indicated.

5.1 Viewing and control systems

Table-6 Troubleshooting(viewing and control systems)

Trouble Causes Countermeasures

Lamp is not installed correctly. Install it correctly. (See “4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replac-ing the lamp)”.)

DIC, analyzer and polarizer sliders in the intermediate position.

Press in or pull out to the click stop. (See from “3.12 Episcopic po-larizer slider” to “3.17 DIC slider”.)

Optical path selection lever is not positioned correctly.

Optical path selection lever is set for 100% vertical tube.

Press in the lever for 100% binocular part. (See “3.3.1 Optical path selec-tion”.)

Filter sliders are not positioned correctly.

Slide in or out the sliders cor-rectly. (See “3.1 Filters”.)

Dark-field/bright-field/fluorescent selection lever is not positioned correctly.

Push in or pull out the lever to the click stop. (See “3.9 Changing the illumination”.)

Vignetting in the viewfield.

Uneven brightness in the viewfield.

Entire viewfield cannot be seen.

Focusing target lever in the inter-mediate position.

Push in to the limit.

5 Troubleshooting

� 54 �



Aperture diaphragm stopped down too far.

Open it to the appropriate size. (See “3.8.1 Adjusting the size of the aperture diaphragm”.)

Dirt or dust in the viewfield.

Dirt or dust on the lenses, eye-pieces, filters and the sample.

Dirt or dust on the condenser lens (for diascopic illumination).

Clean them. (See “6.2 Cleaning the lens”.)

Dirt or dust on the lenses, eye-pieces, filters and the sample.

Clean them. (See “6.2 Cleaning the lens”.)

Wrong type of objective is used. Use the objectives marked "L Plan", "LU Plan" or "LU Plan Apo".



A sheet of glass is on top of the sample.

Use the objective for LCD.

Inferior image

(contrast too high or low)

(low resolution)

The adjustment ring of the objective for LCD is not adequate for the thickness of the glass.

Adjust the adjustment ring for the thickness of the glass.

Sample not securely fit on the stage.

Fit the sample securely on the sample holder of the stage.

Image is partially dim.

Image moves while being focused. Stage tilted. Mount the stage correctly.

(See “4.5 Attaching the stage, the glass plate, and the wafer holder”.)

NCB11 filter not used. Place the NCB11 filter in the optical path. (See “3.1 Filters”.)

Image tinged yellow.

Lamp voltage too low. Adjust the brightness by the brightness control dial and the ND filter. (See “1.2 Names of the opera-tional parts” and “3.1 Filters”.)

Image too bright. Lamp voltage too high. Adjust the brightness by the brightness control dial. (See “1.2 Names of the opera-tional parts”.) Or, use ND filters. (See “3.1 Filters”.)

Lamp voltage too low. Adjust the brightness by the brightness control dial. (See “1.2 Names of the opera-tional parts”.)

Dark image.

(Also refer to the troubles and countermeasures on "5.2 Electrical".)



5 Troubleshooting

� 55 �



Eyepiece diopter not adjusted. Adjust the diopter. (See “3.4 Diopter adjustment”.)

Objective hits the sample when switched from low to high magnification.

Sample is out-focused by objective switching.

Eyepieces not mounted correctly. Mount them correctly (match the positioning pin and the groove.) (See “4.8 Attaching the eye-pieces”.)

Image position changes when switching objectives.

Objective is not correctly centered. Center the objective. (See “4.7.3 Centering the ob-jectives”.)

No smooth switching of the objectives.

Objectives attached only to the one side of the nosepiece.

Turn the nosepiece for several times with the nosepiece rota-tion buttons. (See “4.7.2 When the objec-tives not set correctly on the optical path when they are switched”.)

Sample does not move smooth.

Sample holder not fixed on the stage correctly.

Fix the sample holder correctly. (See “4.5 Attaching the stage, the glass plate, and the wafer holder”.)

Interpupillary adjustment not cor-rectly adjusted.

Adjust the interpupillary dis-tance. (See “3.5 Interpupillary dis-tance adjustment”.)

Viewfields do not merge into one when observed with both eyes.


Interpupillary adjustment not cor-rectly adjusted.

Adjust the interpupillary dis-tance. (See “3.5 Interpupillary dis-tance adjustment”.)


Eye fatigue.

Improper brightness. Adjust the brightness by the brightness control dial, or by placing ND filters in the optical path. (See “1.2 Names of the opera-tional parts” and “3.1 Filters”.)

Heavy coarse focus knobs. Coarse torque adjustment ring tightened too much.

Adjust the torque. (See “3.2.2 Adjusting the torque of the coarse focus knobs”.)

Stage falls down by its own weight and the image be-comes out of focus.

Coarse torque adjustment ring is too loose.

Adjust the torque. (See “3.2.2 Adjusting the torque of the coarse focus knobs”.)

5 Troubleshooting

� 56 �



Analyzer or polarizer not in the op-tical path.

Put them in the optical path. (See “3.12.2 Placing/removing the polarizer in/from the optical path”, “3.13.4 Orientation of the polarizer during episcopic DIC microscopy”, “3.15.2 Plac-ing/removing the analyzer in/from the optical path” and “3.16.4 Orientation of the ana-lyzer during episcopic DIC mi-croscopy”.)

DIC prism not in the optical path. Put it into the optical path. (See “3.17 DIC slider”.)

No interference colors seen on DIC microscopy.

Analyzer or polarizer slider inserted in the wrong direction.

Insert them into the micro-scope in correct direction. (See from “3.12 Episcopic po-larizer slider” to “3.16 Ro-tatable analyzer slider”.)

Wrong type of objective is used. Use the objectives marked "LU Plan" or "LU Plan Apo".

Uneven interference colors on DIC microscopy. Low contrasted colors. Wrong combination of objective and

DIC prism position. Turn the prism selection knob to the position specified by the objective. (See “3.17.3 Selecting the DIC prism position”.)

5 Troubleshooting

� 57 �


5.2 Electrical

Table-7 Troubleshooting(electrical)


No electricity. (Power cord not connected.)

Connect the power cord (See “4.13 Connecting the power cord”.)

No lamp installed. Install the lamp. (See “4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replac-ing the lamp)”.)

Lamp is blown. Replace the lamp. (See “4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replac-ing the lamp)”.)

Episcopic/Diascopic illumination selection switch not set correctly.

Switch it correctly. (See “3.9 Changing the illumi-nation”.)

Lamp does not light when switched on.

Specified lamp not used. Use the specified lamp. (See “7 Technical Specifica-tions”.)

Lamp about to blow. Replace the lamp. (See “4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replac-ing the lamp)”.)

Power cord or lamphouse not con-nected securely.

Connect them securely. (See “4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replac-ing the lamp)” and ”4.13 Con-necting the power cord”.)

Lamp flickers.

Unstable brightness.

Lamp not securely inserted in the socket.

Insert securely into the socket. (See “4.4 Attaching/detaching the lamp and the lamphouse for episcopic illumination and diascopic illumination (replac-ing the lamp)”.)

6 Care and Maintenance

� 58 �


6

Care and Maintenance

Nikon recommends daily care and maintenance for maintaining the performance as long as possible.

Do not let dust, fingerprints, and the like, get on the lenses. Dirt on the lenses, filters, and the like will adversely affect the optical performance of the microscope.

If lenses are contaminated, clean them according to the procedure described in “6.2 Cleaning the lens”. When cleaning, be sure to turn off the power switch (flip the switch to “O” side) to avoid malfunction.

6.1 Daily care and maintenance

Clean the parts frequently manipulated by hands, such as eyepieces and glass plate according to the procedure described in "6.2 Cleaning the lens" without removing them from the microscope. Nikon recommends cleaning them frequently.

Clean the bottom ends of objectives, condenser lens, filter, and the like to maintain the optical performance. When cleaning the objectives, remove them from the microscope following the steps described in “4.7.1 When removing the objectives.” Clean the condenser by removing the glass plate. Clean them whenever they are contaminated.

Microscopes and stages are contaminated with use. When you find the microscope is contaminated, clean them according to the description in “6.3 Cleaning this product”.


� 59 �


6.2 Cleaning the lens

If any of the lenses get dirty, use the following cleaning tool and cleaning supplies (consumables) to clean them as follows.

6.2.1 Cleaning tool and supplies (consumables)

• Cleaning tool

Brush (with soft tip) (Use a cleanroom wiper in the cleanroom.)

• Cleaning supplies (consumables)

Ethyl or methyl alcohol

Lens tissue (Use a cleanroom wiper in the cleanroom.)

6.2.2 Cleaning procedure and notes

• Either brush away dust with a soft brush, or else wipe it away gently with gauze. (In the cleanroom, use a cleanroom wiper instead of brushes and gauze.)

• Only if there are fingerprints or grease on a lens, dampen a piece of soft, clean cotton cloth, lens tissue, or gauze with absolute alcohol (ethyl or methyl alcohol) and wipe. (In the cleanroom, use a cleanroom wiper instead of cotton cloth, lens tissue, and gauze.)

• Absolute alcohol is highly flammable. Be careful when handling it, when around open flames, when turning the power switch on/off, etc.

• Follow the instructions provided by the manufacturer when using absolute alcohol.

6.3 Cleaning this product

Do not use organic solvents (such as alcohol, ether, or paint thinner) on painted, plastic or printed parts. Doing so could result in discoloration or in the peeling of printed characters. For severely dirty portions, lightly wiping the surface using a piece of gauze moistened with small amount of diluted neutral detergent is recommended. (In the cleanroom, use a cleanroom wiper instead of gauze.)

6.4 Storage

Store the microscope in a dry place where mold is not likely to form.

Store the objectives and eyepieces in a desiccator or similar container with a drying agent.

Put the plastic cover over the microscope to protect it from dust.

Before putting on the plastic cover, turn off the power switch on the microscope (flip it to the “O” side) and wait until the lamphouse is cool.


� 60 �


6.5 Regular inspections (with charge)

Regular inspections of this microscope are recommended in order to maintain peak performance. Contact your nearest Nikon representative for details about regular inspections.

7 Technical Specifications

� 61 �


7

Technical Specifications

Table-8 Technical Specifications

Model ECLIPSE L300D、ECLIPSE L300

Input rating 100V-240 V AC, ±10%, 50/60Hz、2.4A or less

Built-in fuse rating 250V, T4A

Power cord • For the 100 to 120 V area: UL approved, detachable power cord set (3-conductor grounding type SVT, AWG 18, 3m long maximum, rated at 125 V AC minimum)

• For the 220 to 240 V area: EU/EN approved 3-conductor power cord set (3-conductor grounding type H05VV-F, 3m long maximum, rated at 250 V AC minimum)

Lamp and lamphouse for epis-copic illumination

Lamphouse: 12-V 100-W halogen epi-lamphouse manufactured by Nikon

Model: LHS-H100P-2

Halogen lamp: 12-V 100-W LONGLIFE halogen lamp

Model: OSRAM HLX64623 or Philips 7724

Average service life of the lamp: 2000h

Lamp and lamphouse for diascopic illumination

Lamphouse: 12-V 100-W halogen lamphouse manu-factured by Nikon

Model: LHS-H100P-1

Halogen lamp: 12-V 100-W LONGLIFE halogen lamp

Model: OSRAM HLX64623 or Philips 7724

Average service life of the lamp: 2000h

Operating environment conditions

Installation area: 1050 mm (W) x 1109 mm (D) or larger

Temperature: +5°C to +35°C

Humidity: 85% RH max., (non-condensing)

Altitude: 2000 m max.

Pollution: Degree 2

Installation category: Category II

Electric shock protection class: Class I

Indoor use only

7 Technical Specifications

� 62 �


Transport and storage environment conditions

Temperature: -20°C to +60°C

Humidity: 90% RH max., (non-condensing)

Outer dimensions and weight (main body)

Dimensions: 360 (W) x 613 (H) x 788 (D) mm (without the stage)

Weight: Approximately 64 kg (including the stage and the eyepiece tube)

Safety standards

• These models satisfy the SEMI guideline (S2, S8).

• These models satisfy the UL standards (UL61010A-1).

• These models satisfy the FCC Part 15B Class A.

This equipment has been tested and found to comply with the limits for a Class A

digital device, pursuant to Part 15 of the FCC Rules.

These limits are designed to provide reasonable protection against harmful inter-

ference when the equipment is operated in a commercial environment.

This equipment generates, uses, and can radiate radio frequency energy and, if

not installed and used in accordance with the instruction manual, may cause

harmful interference to radio communications.

Operation of this equipment in a residential area is likely to cause harmful inter-

ference in which case the user will be required to correct the interference at his

own expense.

• These models satisfy the EMC standards of Canada (ICES-003 Class A).

Cet appareil numérique de la Classe A est conforme à la norme NMB-003 du

Canada.

• These models satisfy the EMC standards of Australia (AS/NZS2064 Group 1 Class A).

CE marking

• These models satisfy the EU Low Voltage (LV) Directive.

• These models satisfy the EU EMC Directive (EN61326).

Documents

FPD/300mm Wafer Inspection Microscope Eclipse · PDF fileWarning / Caution Symbols Used in This Manual I FPD/300mm Wafer Inspection Microscope Eclipse L300D / L300 Instructions Warning