Approval Standard

for Tools Used in the

Semiconductor Industry

Class Number 7701

December 2005

©2005 FM Approvals LLC. All rights reserved.

Foreword

The FM Approvals certification mark is intended to verify that the products and services described will meet FM Approvals’ stated conditions of performance, safety and quality useful to the ends of property conservation. The purpose of Approval Standards is to present the criteria for FM Approval of various types of products and services, as guidance for FM Approvals personnel, manufacturers, users and authorities having jurisdiction.

Products submitted for certification by FM Approvals shall demonstrate that they meet the intent of the Approval Standard, and that quality control in manufacturing shall ensure a consistently uniform and reliable product. Approval Standards strive to be performance-oriented. They are intended to facilitate technological development.

For examining equipment, materials and services, Approval Standards:

a) must be useful to the ends of property conservation by preventing, limiting or not

causing damage under the conditions stated by the Approval listing; and

b) must be readily identifiable.

Continuance of Approval and listing depends on compliance with the Approval Agreement, satisfactory performance in the field, on successful re-examinations of equipment, materials, and services as appropriate, and on periodic follow-up audits of the manufacturing facility.

FM Approvals LLC reserves the right in its sole judgment to change or revise its standards, criteria, methods, or procedures.

TABLE OF CONTENTS

I. INTRODUCTION ...................................................................................................................................................................... 11.1 Purpose .............................................................................................................................................................................. 11.2 Scope and Application ........................................................................................................................................................ 11.3 Basis for FM Approvals Assessment ................................................................................................................................ 21.4 Basis for Continued Assessment ....................................................................................................................................... 21.5 Basis For Requirements ..................................................................................................................................................... 21.6 Effective Date .................................................................................................................................................................... 3

II. GENERAL INFORMATION .................................................................................................................................................. 32.1 Requirements ..................................................................................................................................................................... 32.2 Applicable Documents ...................................................................................................................................................... 32.3 Applicability of Other Standards ...................................................................................................................................... 42.4 Clarification Statement on the Use of the Above Referenced Standards ....................................................................... 42.5 Equipment and Process Protection Requirements ............................................................................................................. 4

2.5.1 Materials of Construction ............................................................................................................................................ 42.5.2 Electrical Systems ...................................................................................................................................................... 52.5.3 Liquid Supplies .......................................................................................................................................................... 72.5.4 Ventilation ................................................................................................................................................................... 72.5.5 Steppers ...................................................................................................................................................................... 72.5.6 Wafer Tracks ............................................................................................................................................................... 72.5.7 Ion Implanters .............................................................................................................................................................. 82.5.8 Furnaces & Reactors .................................................................................................................................................. 92.5.9 Fire Protection for Wet Benches and Other Processing Tools ................................................................................. 92.5.10 Fire Detection and Alarm Systems ......................................................................................................................... 112.5.11 Protection Guidelines for Processing Tools Using FM Approved Water Mist Systems (WMS) ........................ 122.5.12 Protection Guidelines for Processing Tools Using Carbon Dioxide (CO2) Systems .......................................... 132.5.13 Protection Guidelines for Processing Tools Using FM-200 Systems .................................................................. 15

2.6 Additional Specific Equipment Requirements ............................................................................................................... 16

III. MARKING AND MANUAL REQUIREMENTS ............................................................................................................. 17

IV. REQUIRED DOCUMENTATION FOR PRODUCT ASSESSMENT EXAMINATION ............................................. 17

V. EQUIPMENT TESTING ....................................................................................................................................................... 18

VI. OPERATIONS REQUIREMENTS .................................................................................................................................... 196.1 Demonstrated Quality Control Program ......................................................................................................................... 196.2 Facilities and Procedures Audit (F&PA) ......................................................................................................................... 19

I. INTRODUCTION

1.1 Purpose

This standard is the basis for FM Approvals Assessment of manufacturing equipment (i.e., ‘‘Tools’’) used by theSemiconductor Industry in semiconductor cleanroom manufacturing occupancies where the processing of semi-conductor components, such as microprocessors, memory components, etc., takes place. This standard providesfor listing of semiconductor manufacturing equipment as it relates to promoting the practice of property con-servation and business continuity.

FM Approvals Assessment – is defined as Tool products meeting the requirements of this standard.

Headcase – For purposes of this standard is defined as an area directly above the working surface of a wet bench.

Minienvironment – For purposes of this standard is defined as a localized environment created by an enclosureto isolate the product from contamination and people. (www.sematech.org: SEMI E44-95)

Module – For purposes of this standard is defined as an independently operable unit that is part of a tool orsystem. (www.sematech.org: SEMI E21-94)

Tool – For purposes of this standard is defined as any piece of semiconductor fabrication or inspection equipmentdesigned to process wafers delivered in cassettes or cassettes in containers intended for use with an automatedmaterial transport system. (www.sematech.org: SEMI E15-91)

1.2 Scope and Application

1.2.1 This standard addresses equipment design and construction features with regard to the following items:

• Both metallic and non-metallic materials of construction. These materials may be used in ducts, pumps,piping, housings, etc.

• Electrical systems with regard to preventing an electrical incident leading to contamination of the cleanroom and mitigation of fire.

• Compatibility with regard to potentially flammable or combustible chemicals integral to the equipmentoperation.

• Installation and operation of fixed fire detection/suppression equipment when applicable and suppliedas part of the equipment.

• Ventilation, gas or vapor leak detection and liquid leak detection and containment.

• Assessment of the associated mechanical/electrical engineering controls, limiting devices, emergencyoff, and/or safety interlocks.

1.2.2 It is a general understanding in the industry that the type of equipment addressed by this standard is custombuilt rather than mass produced. Therefore this equipment assessment program is based on a buildingblock approach involving sub-assemblies since many of these items are likely to be used in more than onepiece of equipment. This approach is intended to reduce efforts involved with future equipment assessmentprograms which are based on blocks of assemblies previously used and determined to be compliant. It alsoallows for multiple identical equipment units to be produced without additional examination, as well asaddressing only the areas of subsequent modifications.

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This concept is also displayed in the following chart.

1.3 Basis for FM Approvals Assessment

FM Approvals Assessment is contingent upon:

• satisfactory results of the analysis of the equipment (compliance with this standard).

• satisfactory examination of the manufacturing facilities and audit of quality control procedures shall bemade to evaluate the manufacturer’s ability to produce the product which is identical to that which wasexamined and tested, and the marking procedures used to identify the product. These examinations arerepeated as part of FM Approvals’ product follow-up program.

1.4 Basis for Continued Assessment

Continued Assessment is based upon:

• production or availability of the product as Assessed, or as acceptably revised;

• the continued use of acceptable quality control procedures;

• satisfactory field experience;

• compliance with the terms stipulated in the Master Agreement; and,

• examination of production samples for continued conformity to the requirements of this standard.

1.5 Basis For Requirements

1.5.1 The requirements of this standard are focused on minimizing the possibility of an event occurring whichmay result in a fire, or contamination of the clean room environment which may lead to business loss orbusiness interruption. The advice of industry members was also considered.

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1.5.2 These requirements are intended for the purpose of obtaining FM Approvals Assessment of the product.These requirements are intended primarily as guides, and strict conformity is not always mandatory.Equipment having characteristics not anticipated by this standard may be FM Approvals Assessed ifperformance equal or superior to that required by this standard is demonstrated, or if the intent of thestandard is met. Alternatively, equipment which does meet all the requirements identified in this standardmay not be FM Approvals Assessed if other conditions which adversely affect performance exist, or theintent of this standard is not met.

1.6 Effective Date

The effective date of this Standard mandates that all products Assessed for evaluation after the effective dateshall satisfy the requirements of that standard.

The effective date of this standard is December 1, 2005 for full compliance with all requirements.

II. GENERAL INFORMATION

2.1 Requirements

The FM Global Loss Prevention Data Sheet 7-7, published May 1999 and revised January 2003, has been usedas a reference for the requirements in this document.

2.2 Applicable Documents

The following standards, test methods, and practices are referenced in this standard:

FM Approvals Standard Class 3972 – ‘‘Test Standard for Cable Fire Propagation’’ (Materials)

FM Approvals Standard Class 4910 – ‘‘Cleanroom Materials Flammability Test Protocol’’ (Materials)

FM Approvals Standard Class 4911 – ‘‘Wafer Carriers for Use in Cleanrooms’’ (Materials)

FM Approvals Standard Class 4922 – ‘‘Fume Exhaust Ducts or Fume and Smoke Exhaust Ducts’’ (Materials)

FM Approvals Standard Class 4924 – ‘‘Pipe Insulation’’ (Materials)

FM Global Data Sheet 4-0 – ‘‘Special Protection Systems’’

FM Global Data Sheet 4-8N – ‘‘Halon 1301 Fire Extinguishing Systems’’ (Materials)

FM Global Data Sheet 4-11N (NFPA 12,) ‘‘Carbon Dioxide Extinguishing Systems’’(Hydraulics – Systems Electric Panel)

NOTE: THE ABOVE STANDARDS AND DATA SHEETS ARE AVAILABLE FROM:THE FM APPROVALS WEB SITE: http://www.fmglobal.com/approvals/resources/standards.asp, orOrder Processing: http://www.fmglobal.com/scripts/store/.

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NFPA 79 – (2002), ‘‘Electrical Standard for Industrial Machinery’’

NOTE: The above standard is available from:

National Fire Protection AssociationBatterymarch ParkQuincy, MA 02269

2.3 Applicability of Other Standards

Due to the nature of potentially flammable and combustible materials of use, the Approval Standard Class 3600‘‘Electrical Equipment for Use in Hazardous (Classified) Locations – General Requirements’’ and the followingspecific standards provide additional requirements for electrical, electronic, or electro-mechanical equipmentused in clean room environments, where applicable. These additional requirements are intended to address thehazards associated with this equipment when incorporating potentially flammable or combustible chemicals usedwithin the equipment.

Class No. Approval Standard Title

3610 Intrinsically Safe Apparatus and Associated Apparatus for Use inClass I, II and III, Division 1 Hazardous (Classified) Locations

3611 Electrical Equipment for Use in Class I, Division 2; Class II,Division 2; and Class III, Divisions 1 and 2 Hazardous (Classified)Locations

3615 Explosion proof Electrical Equipment

3620 Purged and Pressurized Electrical Equipment

6310/6330 Combustible Gas Detectors

Tool equipment for use internationally may be required to meet the local codes and standards of its end uselocation. When this is the case, Assessment of the equipment to the local codes and standards will likely takeprecedence, but shall meet the same intent of equipment performance.

2.4 Clarification Statement on the Use of the Above Referenced Standards

The applicable requirements of the standards referenced above in paragraphs 2.1, 2.2 and 2.3 are to be used todetermine compliance as it applies to the various design and construction features of the product submitted forAssessment.

2.5 Equipment and Process Protection Requirements

The following is applicable to tools, such as, but not limited to, wet benches, spin rinse dryers, alcohol vapordryers, chemical mechanical polish and spray acid/solvent tools, unless specifically noted.

2.5.1 Materials of Construction

2.5.1.1 Tool Housing or Shell

The tool housing or shell includes walls, view ports, rear doors, minienvironment enclosures,modular compartments, internal plenums, horizontal working surface and electrical headcase.

1. Process modules handling flammable or combustible liquids or gases shall be constructed ofmetal or other suitable non-combustible material (ex. quartz).

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2. Working and subsurface areas of noncombustible wet benches handling flammable orcombustible liquids shall be protected by FM Approved Water Mist, CO2 or FM-200 Systems.

Exception – Fixed fire protection of the subsurface area of noncombustible wet benches handlingflammable or combustible liquids is not required when:

• there are no plastic tanks, plastic piping or other combustible material in the subsurface areaincluding plastic parts made of material which meet FM Approvals Class 4910 requirementsand,

• there are no flammable or combustible piping or pumps.

3. All other process tools shall be constructed of metal whenever possible, or of FM ApprovalsClass 4910 material.

2.5.1.2 Internal Components

1. Piping, tanks (including the tank outer jacket of a dual wall tank), process baths, valves andpumps shall be constructed of FM Approvals Class 4910 materials. If necessary, some of theseitems can be tolerated as conventional (non FM Approvals Class 4910 materials) plastic alongwith printed circuit boards, knobs, hinges, handles and low-voltage cables.

2. However, in no case shall the amount of non FM Approvals Class 4910 material exceed 1% byweight of the total weight of the tool. Additionally, the use of non FM Approvals Class 4910material shall be spread throughout the tool, i.e., no concentrations permitted.

Exception: A cast resin dry-type transformer is not to be included when meeting this requirement.

NOTE: It shall be noted that all non FM Approvals Class 4910 materials are not alike in termsof potential fire exposure. If non FM Approvals Class 4910 materials are used, materials likepolypropylene, polyethylene, polycarbonate, acrylics and standard PVC shall be avoided.Materials such as Halar, Teflon, PVDF and CPVC shall be used since they are genericallycloser to meeting the FM Approvals Class 4910 Standard.

3. No fixed fire protection is required when flammable or combustible liquids are not present inthe tool.

2.5.1.3 Piping

Process tool piping shall be constructed of material compatible with the chemical. Flammable andcombustible liquids shall be conveyed in metallic welded piping.

2.5.1.4 High Efficiency Particulate Air (HEPA) or Ultra Low Particulate Air (ULPA) Filter Modules

HEPA or ULPA filters installed in tools shall be FM Approved, or equivalent.

2.5.1.5 Hookup Duct Connection

The tool hookup duct connection(s) shall meet FM Approvals Class 4922 requirements.

2.5.2 Electrical Systems

2.5.2.1 Hazardous (classified) Location Equipment

Electrical equipment rated for use in hazardous (classified) location shall be provided whenequipment employs the use of flammable gases or flammable liquids.

2.5.2.2 Cabling/Wiring

Cable/wiring used in the equipment should be FM Approvals Group 1 rated. Individual wiringconductors within enclosed metallic raceways, metallic conduit, or 4910 material are exempt fromthis criteria.

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2.5.2.3 Process Liquid Heating

Whenever possible, process liquid heating shall be done using heat transfer systems using hotwater or other noncombustible heat transfer media. Another option would be to remotely heat thechemicals themselves in a properly designed heat exchanger that is external from the tool.

1. The order of preference of process bath heating is:

a) indirect or outboard in-line heaters with low flow/over temperature interlocks

b) embedded heaters

c) bonded heaters

d) immersion heaters (not acceptable for process baths; may be used in internal tanks sup-plying process baths and shall be provided with high temperature limit switch protection)

2. The heating of any flammable or combustible liquid shall only be done in a noncombustible(metal) bench or tool.

3. Any process bath which heats liquid shall also be equipped with an independent low liquidlevel interlock to remove power in the event the liquid level is too low.

4. All process tools that heat flammable or combustible liquids shall be equipped with anindependent high temperature safety interlock in addition to the high temperature processcontroller.

5. The process tool shall be equipped with proper grounding, over current, ground faultprotection, Ground Fault Circuit Interrupter (GFCI) for the heater circuit only, and a manualreset.

6. For bonded or embedded heating systems, the following power interlocks shall be provided:

• redundant high temperature limit switches, independent of process temperature controls.These switches shall be arranged to shut off power to the heating system and sound analarm.

• low liquid level safety interlocks in addition to process control of the liquid level.

7. In addition, any outer enclosure around a bonded heating system shall be made of noncom-bustible material such as stainless steel, quartz or materials which meet FM ApprovalsClass 4910 requirements.

8. Quartz tanks shall not be used for the heating of flammable or combustible liquids as the tankcan fail resulting in a fire.

9. Noncombustible tanks or suitable process compatible materials that meet the FM ApprovalsClass 4910 requirements shall be used to heat noncombustible liquids where possible.

2.5.2.4 Spin Rinse Dryers

1. When nitrogen heating or other heating methods are used, a high temperature switch (thermallyactivated electrical cutoff switch) shall be installed on the heating system.

2. If an external brake resistor device is used, it shall be located a minimum 1ft (0.3 m) from anycombustible material to prevent ignition of combustible material by this high energy device.

2.5.2.5 Alcohol Vapor Dryers

1. The dryer shall be provided with FM Approved vapor detectors in each control cabinet andexhaust plenum as follows:

• arranged to alarm at a concentration of 0.5% (25% of the lower explosive limit) isopropylalcohol (IPA). When an alarm occurs, the detector shall initiate power disconnect from theheater, drain the IPA tank and flush the system with deionized water;

• interlocked to alarm on detector failure.

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2. The heater system shall be provided with over-current protection, over-temperature protection,and low/high liquid level sensor interlocked to shut off power to the dryer.

2.5.2.6 Transformers

Only dry type transformers shall be used in process equipment located in the cleanroom.

2.5.2.7 Emergency Power

Automated wet benches shall be provided with emergency power to lift boats or wafers out of thechemical baths in the event of a fabrication facility power loss.

2.5.3 Liquid Supplies

2.5.3.1 Storage reservoirs that are supplied by a pumped system shall be equipped with high liquid levelinterlocks.

2.5.3.2 Leakage detection shall be provided in the tool.

2.5.3.3 The leakage detection shall be interlocked to shut down the liquid supply.

2.5.4 Ventilation

Ventilation shall be provided for all tools handling flammable and combustible liquids. Ventilation shallbe provided to ensure the atmosphere does not exceed 25% of the LEL in the event of the largest possibleleak. Engineering calculations shall be submitted to show that an adequate ventilation rating is provided.The equipment shall be interlocked to remove main power in the event ventilation concentration exceed25% of the LEL. Alternatively, it is acceptable to shut down the supply of flammable and combustibleliquids if the atmosphere exceeds 25% of the LEL.

2.5.5 Steppers

2.5.5.1 FM Approved smoke detection systems (high sensitivity types) shall be provided for the stepper.The system shall alarm to a constantly attended location and shall be interlocked to safely shutdown power to the stepper.

2.5.5.2 HEPA or ULPA filters used within the air handling system shall meet FM Approvals Class 4920requirements.

2.5.5.3 The foam insulating material applied to air supply and return ductwork shall be noncombustibleor, as a minimum, meet FM Approvals Class 4924 requirements.

2.5.6 Wafer Tracks

2.5.6.1 The wafer track hookup duct connection shall meet FM Approvals Class 4922 requirements.

2.5.6.2 Flammable and combustible liquids used in spin coat operations shall be kept in stainless steelcontainers. The containers shall be equipped with a pressure relief valve, rated at 20 psi(137.9 kPa).

2.5.6.3 Liquid transfer by gas pressure, nitrogen or another inert gas shall be used at 15 psi (103.4 kPa)or less.

2.5.6.4 The arrangement for in-process storage and supply of chemicals to photo resist coating anddeveloping track tools shall be evaluated for fire and liquid release exposures. The followingprotection shall be provided:

1) Storage and distribution cabinets and the wafer track process tool shall be non-combustible anddesigned to contain the minimum amount of in-process chemical storage for efficientproduction.

2) Liquids in plastic or glass containers shall have liquid leak detection or vapor detection andshall be interlocked to shut down the flow of chemicals and alarm to a constantly attendedlocation. Secondary containment shall be provided for the maximum expected liquid release.

3) Flammable and combustible liquids stored in plastic or glass containers that do not meet item 1above shall be provided with a FM Approved fire suppression system.

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4) Electrical equipment shall be suitable for Class I, Division 2 or Class I, Zone 2 locations.Alternatively, it shall be determined that adequate ventilation is provided to ensure theatmosphere is less than 25% of the LEL, and the equipment shall be interlocked to safelyremove main power in the event the LEL exceeds 25%.

5) Cabinets used to store wafer track chemicals shall be subdivided to separate differing classesof chemicals, e.g., flammables, corrosives, etc.

6) Metallic (stainless steel or other suitable material) piping shall be used for conveying flam-mable and combustible liquids from storage containers to the point of application. If the liquidis being aspirated (pulled) from the container to the equipment, plastic tubing is satisfactory.

7) Where single walled plastic tubing is used to convey pumped corrosive chemicals from storagecontainers to the point of application, secondary containment shall be provided, either throughthe use of coaxial tubing or other suitable methods. Also, liquid leak detection or vapordetection shall be provided and shall be interlocked to shut down the flow of chemical andalarm to a constantly attended location.

8) Piping conveying pumped/flammable liquids within the wafer track process tool shall bewelded metallic. In the event of leakage, liquid leak detection or vapor detection shall beprovided and interlocked to shut down the flow of chemical and alarm to a constantly attendedlocation. Also a suitable method for secondary containment shall be provided.

2.5.7 Ion Implanters

2.5.7.1 Ion implanters shall be provided with cast resin dry-type transformers or motor generator sets.Provide new cast resin transformers and power supply units with temperature monitoring devices(e.g., thermocouples) inside the units. The devices shall be interlocked to safely shut down bymeans of a shunt trip device on the implanter circuit breaker or an upstream circuit breaker to theimplanter in the event of over-temperature.

2.5.7.2 Provide optical or air sampling type smoke detection systems interlocked to de-energize high-voltage, shut off the gas supply from the ‘‘gas-box’’, and alarm at the tool and at a constantlyattended location.

2.5.7.3 Provide an FM Approved fire suppression system if combustibles exceed 1% by weight of the totalweight of the tool. Additionally, the use of non FM Approvals Class 4910 material shall be spreadthroughout the tool, i.e., no concentrations permitted.

2.5.7.4 Use sub-atmospheric gas sources instead of high pressure cylinder sources whenever processcompatibility will allow.

2.5.7.5 If sub-atmospheric gas sources are not used, high pressure gas sources shall be arranged inaccordance with the following. However, sprinkler protection is not needed within the enclosure.

Process Gas Cabinets

1) Locate process gas cylinders containing pyrophoric, flammable, corrosive and toxic materialswhich supply fabrication areas in cabinets constructed of at least 16 gauge metal.

2) Cabinets containing flammable, corrosive and toxic gases shall be provided with a gas moni-toring system. Activation of the monitoring system shall automatically shut off the process gasflow at the cylinder and initiate an alarm to the emergency control system.

a) For other gases, emergency shutoff valves (ESOV) shall be as close as practical to eachcylinder CGA (threaded outlet on gas cylinder valve body) connection.

b) Provision for a remote manual actuation of ACVs and ESOVs shall be provided for useoutside of the gas distribution room and at the fabrication area exits.

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3) The emergency shutoff valves shall also automatically close upon any of the followingconditions:

• activation of the gas monitoring system

• sustained (> 0.15 seconds) power failure

• loss of cabinet ventilation airflow

• activation of cabinet fire detectors if provided

• activation of an excess flow switch

• seismic activity

4) All gas cylinder cabinets shall be labeled as to gases they contain and the particular gasconcentration. All gas lines and valves within the cabinet shall be labeled as to their function,i.e., process, purge or vent.

5) Provide continuous internal ventilation inside gas cabinets and other enclosures with flam-mable, corrosive and toxic gases. Arrange ventilation system to prevent the formation of deadzones near likely leakage sites. This will prevent accumulation of gas at higher concentrations.Size the ventilation system to provide a flow rate of 100 linear ft/min (0.51 m/sec) of internalventilation velocity across any potential leakage points such as cylinder heads, pressure regu-lators and controls (other ventilation rates may be determined acceptable provided they achievethe same result). This air flow shall be available with the cabinet doors and access windowclosed, i.e., air taken from cabinet louvers only.

2.5.8 Furnaces & Reactors

2.5.8.1 Provide Uninterrupted Power Supply (UPS) power to the process menu control circuits (typically120V power) on all furnaces and reactors [diffusion, Chemical Vapor Deposition (CVD), LowPressure Chemical Vapor Deposition (LPCVD), Plasma Enhanced Chemical Vapor Deposition(PECVD), etc.]

2.5.8.2 Provide FM Approved HEPA or ULPA filters assemblies for furnaces.

2.5.8.3 All process gas handling systems shall use welded, metallic piping or metallic tubing compatiblewith the gas being transported.

2.5.8.4 All process tools handling flammable, pyrophoric or toxic gases shall be equipped with ahazardous gas detection system. This system shall be interlocked to shut down the process tool andgas supply to the tool.

2.5.9 Fire Protection for Wet Benches and Other Processing Tools

The following applicable guidelines are for fixed fire suppression systems installed in wet benches andother processing tools as required by recommendations for the protection of processing tools previouslystated in this standard. In open style tools, applications of these guidelines are limited to tools with airexhaust flow rates not exceeding 150 cfm/linear ft (14 cmm/linear meter), unless the suppression systemselected is FM Approved for higher air exhaust flow rates.

2.5.9.1 Use FM Approved fixed fire suppression systems specifically evaluated for use in cleanroomapplication. The fixed fire suppression system is to be designed, installed and maintained to themanufacturer’s manual as identified in the listing in the Approval Guide, a publication ofFM Approvals.

Suppression systems shall be designed to discharge with the exhaust/ventilation systems in con-tinuous operation. If there are filter units supplying air to a minienvironment, these units may bearranged to shut down upon detector activation. However, the tool exhaust shall always remainoperational. The amount of extinguishing agent shall be calculated based on the maximum oper-ating exhaust/ventilation rate. Calculations and exhaust rates shall be documented.

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2.5.9.2 Interlock the electrical power supply to the tool to shut down upon the fixed fire protection systemdischarge, except for the electrical power necessary to keep the exhaust/ventilation system inoperation.

2.5.9.3 Total agent supply demand for each extinguishing system shall be based on a one shot dischargeof the system over the entire tool and on the recommended duration of discharge for the specificagent used (water mist, C02 or FM-200). The duration of discharge for water mist is 2 minutes;for CO2 it is 1 minute for total flooding applications and 30 seconds for local application; and forFM-200 it is 10 seconds.

2.5.9.4 Each tool shall be protected by an individual fire extinguishing system. A connected reservesupply is not needed for individual extinguishing systems provided the tool is not operated untilthe agent supply is restored after a discharge.

2.5.9.5 Zoning of a fire extinguishing system protecting a processing tool (for example, one zone pro-tecting the working surface and subsurface of a wet bench and a separate second zone protectingthe headcase and other compartments of the same bench) may be acceptable if tools exceed 8 ft(2.4 m) in length. Each zone shall be provided with a separate agent supply and connected reserveor the system shall be sized for the entire bench and provided with an equally sized connectedreserve. Zoning shall not allow the working surface of the wet benches or other processing toolsto be subdivided into multiple zones of discharge if the working surface is protected by gaseousextinguishing systems. When gaseous extinguishing systems are used, there shall be a physicalbarrier separating each zone.

2.5.9.6 Working Surface and Subsurface Fixed Fire Protection

1) A 30 sec. time delay prior to discharge of the extinguishing system over the working surface(after fire detection) is acceptable where it is desirable to allow for preparation of the workingsurface for the system discharge.

2) The 30 sec. time delay is acceptable in other areas of a tool (subsurface, headcase, etc.) in asingle fixed fire protection zone system.

2.5.9.7 Headcase and Other Compartments

Fixed fire protection shall be provided for the headcase and all other compartments of processingtools. Fixed fire protection is not needed for the following cases:

1) Compartments of combustible construction inerted with N2, to a maximum oxygenconcentration of 5%, and provided with fire detection (preferably by ionization type smokedetection or by linear heat detection) when electrical equipment is present. The inert environ-ment inside each compartment shall be monitored by the pressure difference between thecompartment and the ambient. Loss of N2 pressure in a compartment shall sound an alarm atthe tool and at a constantly attended location. When linear heat detection is used, it shall beplaced as near as possible to electrical equipment. The detection system shall be interlocked toshut down the electrical power to the bench upon detection.

Nitrogen inerting will prevent ignition and combustion within a compartment; however, inert-ing will not prevent overheating or arcing caused by faults within electrical equipment. Suchconditions can decompose and/or melt exposed plastic materials, and lead to a possible fire onthe outside wall of the compartment or even inside the compartment, if the N2 atmospherewithin the compartment is somehow compromised. Fire detection is recommended to helpprovide early warning of problems within an inerted compartment containing electricalequipment.

2) Compartments of noncombustible construction or constructed of materials which meetClass 4910 when:

• they contain no fire hazardous materials such as flammable or combustible liquids,

• they contain electrical equipment, however, the contents of the compartment arenoncombustible.

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2.5.9.8 Nozzle and Piping Materials

1) Tubing and/or piping as well as nozzles used in fire extinguishment systems shall resist thecorrosive nature of the environment of tools handling corrosive products.

2) Piping shall be located outside of the tool with only the nozzle placed inside the tool.

3) The nozzle is to be protected with a corrosive coating such as Halar. If the piping is inside thetool, it shall also be protected with a corrosive coating such as Halar.

2.5.10 Fire Detection and Alarm Systems

This section covers general requirements for fire detection and alarm systems used with fire suppressionsystems which are FM Approved for wet benches and other processing tool applications.

2.5.10.1 Use FM Approved fire detectors integral with the tools, with alarm at the tool, and at aconstantly attended location.

2.5.10.2 Flame-actuated detectors shall be FM Approved with attention given to the following items:

1) Distance along the center axis of the detector Field of View (FOV) for the detectors torespond to the fires in a time not to exceed five (5) seconds.

2) Fires involving fuels such as plastic materials typically used in wet benches being protected(polypropylene, polyvinylchloride or other specified material).

3) Flammable liquids (Isopropyl Alcohol or other specified flammable liquid), and

4) Ingress protection (IP) of the equipment enclosure (e.g., IP×5 or NEMA 4).

2.5.10.3 There shall be no obstruction to the detectors that can block their field of view. This includesthe use of transparent partitions such as Plexiglas, Lexan or other plastics as they may bepossible obstructions due to blocking certain spectra of Ultra Violet (UV) or Infrared (IR)radiation necessary for the operation of optical flame detectors. In such cases, the detectormanufacturer literature shall be consulted.

Indirect reflective radiation from a fire shall not be considered as a reliable source of radiationfor the actuation of optical flame detectors. Indirect radiation may delay the detector responseor prevent the detector actuation altogether for certain optical detectors which are programmedto minimize interference from reflective radiation.

The coverage of an optical detector, and consequently its installation spacing, is a function ofthe sensitivity of the detector for a given fire, its field of view and the desired threshold fordetection. Since optical detectors respond to radiant electromagnetic emissions of specificwavelengths and not all fuels give rise to the same emissions, the detector selected must bematched with the fuels within the hazard area.

2.5.10.4 Fire Detection System for a Wet Bench Subsurface (Plenum)

1) Use FM Approved flame detectors Ultra Violet (UV), UV/Infrared (IR), dual wavelengthinfrared [Dual IR] or multi-spectrum flame actuated detectors), or digital linear heat detec-tion systems.

2) For linear heat detection (LHD), the local flow velocity across the LHD shall not exceed260 ft/min (1.3 m/s). The linear heat detection cable shall be placed across the centerline ofall exhaust openings and around the top perimeter of the plenum. Time delays are notpermitted for ventilated plenums.

3) When optical detectors are used inside the plenum, they shall be installed in adequatenumbers and positions to ensure that any possible fire is in the field of view of at least onedetector.

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2.5.10.5 Fire Detection System for Wet Bench Working Surface

1) Use FM Approved flame detectors (UV/IR, dual wavelength infrared [Dual IR], or multi-spectrum flame-actuated detectors).

2) Install detectors in adequate numbers and positions to ensure that a fire in any part of theworking surface area of the bench is in the field of view of at least one detector.

2.5.10.6 Fire Detection System for Headcase and Compartments other than the Sub-Surface Plenum

1) Use FM Approved detectors. These may be either an ‘‘air-sampling’’ or ‘‘addressable analogtype’’ smoke detector or linear heat detection.

2) For linear heat detection, the local flow velocity across the LDH shall not exceed 260 ft/min(1.3 m/s). The linear heat detection cable shall be placed across the centerline of all exhaustopenings and around the top perimeter of the headcase or compartment. Time delays are notacceptable.

3) In areas subject to migration of corrosive fumes that can impair smoke detection or subjectthe system to false alarms, digital linear heat detection or optical flame detection can beaccepted.

2.5.11 Protection Guidelines for Processing Tools Using FM Approved Water Mist Systems (WMS)

2.5.11.1 Use FM Approved systems and components specifically evaluated for this application. Thesystem shall follow additional specific installation recommendations given by the systemmanufacturer and any limitations listed in the Approval Guide.

2.5.11.2 The following sources of water and air, or Nitrogen (N2), supply (when air or N2 is requiredby the WMS system selected) are acceptable and shall be identified by the manufacturerliterature and/or marking on the equipment:

1) a self-contained source of air (or N2) and water supply, or

2) the plant fire protection [or deionized (DI) water or domestic] system and plant air (or N2)system, or

3) a hybrid system between the two sources of supply discussed above, e.g., water from thesprinkler system and air taken from a pressurized tank.

2.5.11.3 Arrange WMS systems for automatic operation and for a minimum discharge time of 2 minutes(120 sec). The system demand shall be based on the operation of all nozzles within a hazard.

2.5.11.4 Provide each system with a properly identified secondary manual means of operation. Locatemanual controls for system actuation to be readily accessible at all times. Manual operation ofthe system shall not cause any time delays to recycle.

2.5.11.5 Protection of Subsurface (Plenum)

1) Install nozzles inside the subsurface area (plenum) centered on the lateral side walls of thetool, mounted in the horizontal position to project water mist longitudinally, toward thecenter of the plenum.

2) Locate the nozzle to minimize obstructions to the water mist spray discharge and allow fora spray discharge pattern to develop.

3) Determine the required number of nozzles based on the total gross internal volume of theplenum, and on the nozzle performance criteria.

4) Measure the volume of the plenum from the inside walls, without deducting the volumeoccupied by the equipment inside the plenum, such as tanks, heaters, piping and otherequipment.

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2.5.11.6 Protection of Working Surface

1) Install nozzles in line, centered over the working surface of the tool and mounted in thevertical position, to project the fine water spray, unobstructed, downwards toward theworking surface of the tool.

2) Base the required number of nozzles to protect the working surface of a tool on the coverageof the entire working surface area. Coverage is based on the height of the nozzle above theworking surface and discharge pattern (spray angle) of the nozzle used.

2.5.11.7 Protection of Tool Headcase and Other Compartments

1) Locate nozzles in each compartment in the pendent position, centered under the top partitionof the compartment; if necessary, nozzles can be installed on the sidewall position, centeredin one of the lateral partitions of the compartment.

2) Locate the nozzle to minimize obstructions to the water mist spray discharge and allow fora spray discharge pattern to develop.

2.5.11.8 Use of Deionized (DI) Water and Nitrogen

In most cleanroom applications discharge of water and air may contaminate the wet bench andthe wafers in process. This is especially critical if there is an accidental discharge of the system.If intended to be connected to the fabrication facility, the system points of connection shall beappropriately marked with labels identifying each point of connection. WMS systems may beconnected to fabrication facility deionized water (DI water) or to the fabrication facilitynitrogen supply, replacing water and air respectively, provided that the fabrication facility DIwater system and/or N2 system can meet the following minimum performance criteria:

1) Meet the total WMS system demand for the required duration of supply (at least 2 minutesfor wet benches and other processing tools).

2) Be continuous in operation. Loss of pressure, flow or shut down of the system shall causea trouble fire alarm to sound.

3) A supervised indicating control valve shall be installed on the feed main of the supply toeach wet bench.

2.5.11.9 Acceptance of WMS Systems

1) Final acceptance of fine water spray systems response shall be done in accordance with DataSheet 4-0.

2) Proper system functionality shall be verified which may include conducting a wet dischargetest to determine the system will operate as intended. Specifically, the tests shall checktightness of piping, flow from nozzles or discharge devices, and the operation of allcomponents.

3) Nozzle positioning shall be visually checked.

2.5.12 Protection Guidelines for Processing Tools Using Carbon Dioxide (CO2) Systems

Carbon dioxide (CO2) extinguishing systems can be either high pressure or low pressure systems. Localapplication systems are designed to protect unconfined hazards (such as the working surface of open stylewet benches) by discharging CO2 directly over the burning surface. Total flooding systems are used toprotect hazards within a confined space (such as the subsurface area of the benches) by discharging CO2into the enclosure.

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2.5.12.1 Use FM Approved systems and components specifically evaluated for this application.

Exception: Wet benches and other tools enclosed within minienvironments, or other enclosedhazards, can be protected with standard FM Approved CO2 systems using a total floodingapplication when:

– The total amount of gas is sized to compensate for the maximum operating tool ventilationrating and for gas leaks through ‘‘uncloseable’’ openings in the enclosure during the systemdischarge period.

– Nozzles are located away from exhaust openings and process baths, so that a gas dischargewill not be directly exhausted or cause liquid baths to splash.

– A full discharge test is performed in the protected hazard with the ventilation system of thetool in full operation to verify that a 50% gas concentration is achieved throughout theprotected volume.

– Corrosive environments are properly designed with FM Approved equipment for theapplication.

2.5.12.2 Protection of Tool Subsurface (Plenum)

1) Design the CO2 system on a total flooding basis to achieve a minimum concentration of 50%within 1 minute. The quantity of CO2 required shall be adjusted to compensate for the airexhaust flow rate of the processing equipment.

2) When the CO2 system is arranged to protect the working surface area and plenum simul-taneously, the discharge rate for the plenum shall be calculated in accordance with DataSheet 4-11N.

3) Determine the size and the required number of nozzles based on the total required dischargerate of CO2 and on the discharge characteristics of the nozzle selected.

4) Use discharge nozzles that are FM Approved for total flooding application.

5) Nozzles, if possible, shall be centered on the lateral side walls, arranged to dischargelongitudinally towards the center of the plenum.

6) The manufacturer’s manual for the FM Approved product listing for this application shall bereferenced for requirements which supersede those in paragraphs 2.5.12.2.1 through2.5.12.2.5. This is based on the Approval testing conducted.

2.5.12.3 Protection of Working Surface

1) For open style tools, design the CO2 system on a local application basis, rate-by-volumemethod, for a minimum discharge time of 30 seconds. The basic system discharge rate of1 lb/min/ft3 (16 kg/min/m3) of assumed volume may be proportionately reduced to accountfor barriers that surround the working surface, such as: side panels, back walls, and head-case, in accordance with Data Sheet 4-11N. The assumed volume enclosing the workingsurface shall be determined as outlined in Data Sheet 4-11N.

2) For tools provided with minienvironment enclosures, design the CO2 system on a totalflooding basis to achieve a minimum concentration of 50% within one minute. The quantityof CO2 required shall be adjusted to compensate for the air exhaust flow rate of the wetbench. If there are filter units supplying air to a minienvironment these units may bearranged to shut down upon detector activation. However, the tool exhaust shall alwaysremain operational. If the supply air is not interlocked to shut down, then the CO2 systemneeds to be designed to compensate for the greater of the two air flows (either the exhaustor the supply air). A sufficient number of discharge nozzles shall be used to cover the entireprotected volume. Nozzles shall be located and directed to prevent CO2 from splashing theliquid surfaces during discharge.

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3) The manufacturer’s manual for the FM Approved product listing for this application shall bereferenced for requirements which supersede those in paragraphs 2.5.12.3.1 and 2.5.12.3.2.This is based on the Approval testing conducted.

2.5.12.4 Protection of Wet Bench Headcase and Other Compartments

1) Design the CO2 system on a total flooding basis to achieve a minimum concentration of 50%within 1 minute in each compartment.

2) Determine the size and the required number of nozzles based on the total required dischargerate of CO2 and on the discharge characteristics of the nozzle selected.

3) Use discharge nozzles which are FM Approved for total flooding application.

4) Locate nozzles preferably centered on the lateral sidewalls.

2.5.12.5 Acceptance of CO2 Systems

1) Final acceptance tests of a CO2 system response shall be done in accordance with DataSheets 4-0 and 4-11N.

2) A discharge shall be conducted to verify concentration and discharge time. The dischargetest shall be conducted under simulated operating conditions.

3) Nozzle positioning shall be visually checked.

2.5.13 Protection Guidelines for Processing Tools Using FM-200 Systems

2.5.13.1 Use FM Approved systems and components specifically evaluated for this application.

2.5.13.2 FM-200 systems shall be designed, installed and maintained in accordance with Data Sheets 4-0and 4-8N.

2.5.13.3 Protection of Tool Subsurface (Plenum)

1) Design the FM-200 system on a total flooding basis to achieve a minimum concentration of7% within 10 seconds. The quantity of FM-200 required shall be adjusted to compensate forthe air exhaust flow rate of the tool. Air exhaust rates and calculations to determine agentquantity shall be documented.

2) Determine the size and the required number of nozzles based on the total required dischargerate of FM-200 and on the discharge characteristics of the nozzle selected.

3) Locate nozzles preferably centered on the lateral side walls, arranged to dischargelongitudinally towards the center of the plenum.

4) The manufacturer’s manual for the FM Approved product listing for this application shall bereferenced for requirements which supersede those in paragraphs 2.5.13.3.1 through2.5.13.3.3. This is based on the Approval testing conducted.

2.5.13.4 Protection of Tool Working Surface

1) For tools provided with minienvironment enclosures, design the FM-200 system on a totalflooding basis to achieve a minimum concentration of 7% within 10 seconds. The quantityof FM-200 required shall be adjusted to compensate for the air exhaust flow rate of the tool.

2) Determine the size and the required number of nozzles based on the total required dischargerate of FM-200 and on the discharge characteristics of the nozzle selected.

3) The manufacturer’s manual for the FM Approved product listing for this application shall bereferenced for requirements which may supersede those in paragraphs 2.5.13.4.1 through2.5.13.4.2. This is based on the Approval testing conducted.

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2.5.13.5 Protection of Tool Headcase and Other Compartments

1) Verify the design of the FM-200 system based on a total flooding basis to achieve aminimum concentration of 7% within 10 seconds in each compartment.

2) Verify the size and the required number of nozzles based on the total required discharge rateof FM-200 and on the discharge characteristics of the nozzle selected. Locate nozzlescentered on the lateral side walls.

2.5.13.6 Acceptance of FM-200 Systems

1) Final acceptance tests of an FM-200 system response shall be done in accordance with DataSheet 4-0.

2) A discharge test shall be done to verify concentration and discharge time. The discharge testshall be conducted under simulated operating conditions.

3) Nozzle positioning shall be visually checked.

2.6 Additional Specific Equipment Requirements

With regard to specific pieces of the equipment or assemblies identified below, the following will apply:

2.6.1 Motors and Electric Pumps – They shall be in compliance with the applicable requirements of NFPA 79.Additionally, they shall meet the applicable requirements of the standards listed in Section 2.3 for hazardsrelative to potentially flammable/combustible chemical atmospheres of the gases and vapors which maybe present.

2.6.2 Pneumatic Pumps – They shall be constructed of materials compatible with the chemicals being pumped.In addition, their materials of construction shall be metal or non-metallic, meeting the requirements ofClass 4910 – ‘‘Cleanroom Materials Flammability Test Protocol.’’

2.6.3 Purchased Sub-assemblies Having Individual Certification – They are not likely to require additionalexamination and/or testing if third party certification and compliance can be verified and maintainedduring the continued manufacturing of the product submitted for compliance to this standard. Examplesof sub-assemblies of the manufacturing equipment (i.e., ‘‘Tool’’) are, but not limited to:

• power supplies;

• uninterruptible power supply (UPS);

• fluorescent lights;

• chiller/heat exchanger;

• video monitor;

• computers (PC);

• robotic assembly;

• megasonics;

• fan filter unit (FFU) motor;

• robot and its controller.

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III. MARKING AND MANUAL REQUIREMENTS

3.1 In addition to the requirements of the standards referenced in paragraph 2.1, the following additionalrequirements apply. These markings shall be located on the equipment exterior:

• Name and Address of Manufacturer

NOTE 1: WHEN LISTED BY FM APPROVALS FOR OTHER THAN THE MANUFACTURER, THEPRIVATE LABELER’S (DISTRIBUTOR’S) NAME MUST APPEAR ON THE PRODUCT LABEL.THE MANUFACTURER’S NAME OR DISTINGUISHING MARK MUST ALSO APPEAR ON THEEQUIPMENT (INTERNALLY OR EXTERNALLY).

NOTE 2: THE ADDRESS OF THE MANUFACTURER IS OPTIONAL EXCEPT IN THE CASEWHERE THE EQUIPMENT IS NOT MANUFACTURED IN THE USA. IN SUCH CASES, THECOUNTRY OF ORIGIN MUST APPEAR ON THE LABEL.

• Model/Catalog Designation

• Serial Number or Date Code

• Circuit Breaker Current Interrupting Capacity

• The Certification Mark

• The Statement, ‘‘Assessment by FM Approvals – Compliant to FM 7701’’

3.2 The manufacturer’s manual shall include preventive maintenance and testing of safety interlock systemsreferred to in paragraph 2.5.2.3 parts 3, 4 and 6 of this standard, as follows:

3.2.1 at least monthly, low liquid level and high temperature interlocks shall be tested to assure properoperation.

3.2.2 all electrical connections to heating systems and their controls shall be visually inspected at leastsemiannually. An annual physical check for tightness of connections, or an appropriate infrared scanof all components shall be conducted.

IV. REQUIRED DOCUMENTATION FOR PRODUCT ASSESSMENTEXAMINATION

For the purposes of assessing compliance of equipment with these FM Approvals requirements; determiningwhat test samples will be required for the program; and providing a means for design modification control, themanufacturer shall submit documents which give a full and correct specification of the critical constructionaspects of the equipment. One copy (except as noted) of the following documentation as it pertains to theAssessment request shall be assembled in an organized manner and submitted prior to scheduling of the program.All documents shall identify the following: the manufacturer’s name; document number or other form ofreference number identification; title, and date of latest revision of document and/or the revision reference (i.e.,number or letter indicating revision level).

NOTE 1: PROGRAMS WILL BE SCHEDULED ONLY UPON RECEIPT OF ALL THE MATERIAL LISTEDHEREIN.

NOTE 2: DRAWINGS IN A LANGUAGE OTHER THAN ENGLISH WILL REQUIRE PARTIALTRANSLATION FOR USE IN THE ASSESSMENT PROGRAM.

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• marketing/ordering literature showing general specifications and functions of the equipment. These aregenerally very useful in determining project costs and may also be used as attachments to the final reportfor equipment Assessment projects. Typically, one copy will be sufficient.

• product identification or sales specification sheet for the product being assessed. The product shall havea unique and traceable means of identification.

• instruction manual(s) providing installation, operation, and maintenance instructions

• quality control procedures document(s) detailing routine testing and final inspection procedures

• production drawings (stating information to assess compliance; i.e. amount of non FM ApprovalsClass 4910 polymeric material not to exceed 1% of the Tool’s total weight)

• electrical schematic(s)

• final assembly drawing and parts lists (i.e. wiring/cable rating including size, flammability rating, etc.)

• sub-assembly drawings or piece-part drawings/assembly drawings sufficient to detail primary circuitcomponents, operator controls, enclosure design, and safety interlocks and limit controls

• product label drawing(s) showing all required marking information. The label drawing shall showproposed artwork indicating the manufacturer’s name, address, model and serial numbers, equipmentratings, warning markings, and the FM Approvals Assessment mark

• protective grounding detail drawing(s) showing the method of protective grounding provided, includinglocation, size, and marking

• documentation control specification showing proposed method of controlling documents which may beidentified as critical documents by FM Approvals. These drawings will be identified by FM Approvalsat the conclusion of the Assessment program. FM Approvals must be notified of changes to thesedocuments via Form 797, ‘‘FM Approved Product Revision Report’’

V. EQUIPMENT TESTING

Tests, as necessary, shall be conducted to verify compliance with all requirements according to the standardslisted in Section 2. These tests shall be conducted at a location mutually agreed upon by the manufacturer andFM Approvals. A description of these tests and the results obtained will be presented in a final report to be issuedby FM Approvals to the manufacturer.

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VI. OPERATIONS REQUIREMENTS

6.1 Demonstrated Quality Control Program

6.1.1 A quality control program is required to assure that each subsequent unit produced by the manufacturershall present the same quality and reliability as the specific samples examined. Design quality,conformance to design, and performance are the areas of primary concern.

Design quality is determined during the examination and tests. Conformance to design is verified bycontrol of quality in the following areas:

• existence of corporate quality control guidelines

• incoming assurance, including testing

• in-process assurance, including testing

• final testing and audit

• equipment calibration

• drawing and change control

• packaging and shipping

• handling and disposition of discrepant materials

Quality of performance is determined by field performance and by re-examination and test.

6.1.2 The manufacturer shall establish a system of product configuration control to prevent unauthorizedchanges, including, as appropriate:

• engineering drawings

• engineering change requests

• engineering orders

• change notices.

These shall be executed in conformance with a written policy and detailed procedures. Records of allrevisions to all FM Approved products shall be kept.

6.1.3 The manufacturer shall assign an appropriate person or group to be responsible to obtain FM Approvals’authorization of all changes applicable to FM Approved products. FM Approvals’ Form 797,FM Approved Product Revision Report or Address/Contact Change Notice, is provided to notifyFM Approvals of pending changes.

6.2 Facilities and Procedures Audit (F&PA)

6.2.1 An audit of the product manufacturing facility shall be part of the Assessment investigation. Its purposeshall be to determine that equipment, procedures, and the manufacturer’s controls are properly maintainedto produce a product of the same design quality as originally verified.

6.2.2 Follow-up audits shall be conducted at least annually to assure continued quality control and productuniformity.

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