Work Flow of an Inspection Procedure

S et up a lignm enttoo l next to wave

pla te

W ave p la televe l?

M eas. he ightedge 1

M eas. he ightedge 2

A djus t M icrom eter

Yes

No

C oarse pos itione lec tron ic gage too l

S et up wave p la teon p la tfo rm .

A ccess M anua lC ontro l S creen on

D P S C ontro lle r.

P ower-upequipm ent

F ine pos itione lec tron ic gage too l

to zero am plifie r

(X-d irec tion)

F ind upper beve lrun-out

(+Z -d irec tion)

F ind lower beve lrun-out

(-Z -d irec tion)

0 'ed on 4mrange?

R educe range o fam plifie r

Yes

No

TOTAL RUN-OUT

2nd edge surf.com ple te?

Yes

EN D

1No

1

R E Q U IR E D :

T h e e d g e r u n -o u t m u s t b ee v a l u a t e d f o r a t l e a s t 2e d g e su r fa c e s in a n y w a v ep la te .

W A R N IN G !

D O N O T A P P L Y E X C E S S IV EP R E S S U R E O N C a F2 M A T E R IA L S .

W A R N IN G !

D O N O T A P P L Y E X C E S S IV EP R E S S U R E O N C a F2 M A T E R IA L S .

Prepared by: Paul F. GeerDate: 9/18/01