8/1/2019 Factsheet - Smart Materials for Sensors and Actuators - 140510

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Institute of Materials Research and Engineering

3 Research Link, Singapore 117602

Email: enquiry@imre.a-star.edu.sg Website: www.imre.a-star.edu.sg

Tel: (65) 6874 8111 Fax: (65) 6872 0785

Institute of Materials Researchand Engineering

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IMRE’s work is leading to a host of unique portable,

energy-saving, smart and cost-effective consumer

and industry related applications

8/1/2019 Factsheet - Smart Materials for Sensors and Actuators - 140510

http://slidepdf.com/reader/full/factsheet-smart-materials-for-sensors-and-actuators-140510 2/2

3 Research Link, Singapore 117602

Email: enquiry@imre.a-star.edu.sg Website: www.imre.a-star.edu.sg

Tel: (65) 6874 8111 Fax: (65) 6872 0785

Institute of Materials Researchand Engineering

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InnovatIon andachIevement• Sussfully sblis

ifbii for batchproducing micro- sensors and actuatorswithlowstresspiezoelectricthinlms

• Created the frst 3-dimensional

micro-machined piezoelectric

thin flm microactuator  that hashigh stability and high response speedfor nanopositioning

• dl bl Uv ss  derived from in-plane polarised

ferroelectricthinlmthatcangeneratephotovoltage of up to 7 volts

“Based on ferroic and 

 piezoelectric materials, new

technologies and functional 

devices have been developed…”

Contact

d Y KuiSenior Scientist

Tel +65 68745160 Fax +65 68720785

Email: k-yao@imre.a-star.edu.sg

IntrodUctIonIMRE’s innovative work on sensors,

actuators and transducers uses intelligentferroics and piezoelectrics. The materialsinherently possess signal/energyconversion functions and are also cost-effective.

BacKgroUndBased on ferroic and piezoelectricmaterials, new technologies andfunctional devices have been developed.Wafer-based micro-fabrication techniqueshave been applied to produce miniaturised

sensors, actuators and energytransducers.

• Demonstrated battery-less radio

fquy l, poweredsolely by mechanical energy fromthe user, which was derived frompiezoelectric energy transducers

ImpactIMRE’s work using ferroics andpiezoelectrics is leading to a host of new and unique portable, energy-saving,smart and cost-effective consumer and

industry related applications. For one,you may soon never have to worry aboutreplacing the batteries in your remotecontroller again.

Smart materialS for

SenSorS and actuatorS

materialS Growth

Piezoelectric materials packaged into a

sensor chip.

Piezoelectric micro sensors batch- produced on silicon wafer for machine condition monitoring.