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4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria Fabrication of highly precise fiber optical array products by use of laser based micro alignment M. Zimmermann , L. Schaefer, M. Rank, M. Schmidt, S. Roth Bayerisches Laserzentrum GmbH, Konrad-Zuse-Str. 2-6, 91052 Erlangen, Germany, Email: [email protected]

Fabrication of highly precise fiber optical array … of highly precise fiber optical array products by use of ... Design of an Actuator System Experimental Results – Laser Micro

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4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Fabrication of highly precise fiber optical array products by use of laser based micro alignment

M. Zimmermann, L. Schaefer, M. Rank, M. Schmidt, S. Roth

Bayerisches Laserzentrum GmbH, Konrad-Zuse-Str. 2-6, 91052 Erlangen,

Germany, Email: [email protected]

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Outline

Introduction and Motivation

Design of an Actuator System

- Simulation and Optimization

- Experimental Results

Conclusion

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Free Space Light Coupling

• Efficient coupling of light into fibers or between fibers where multiple parallel optical fibers are used

• Especially single-mode communication

MotivationWhat is a Fiber Collimator Array?

Design

• Combination of a fiber array and a micro lens array

• Collimation of the light transmitted from a fiber

• Coupling light into a fiber by focusing

Pointing Accuracy σ

• Angle of the collimated beam with

respect to the optical axes• Depends on: lateral fiber offset ∆∆∆∆x

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

1. Heating by laser radiation

2. Gradient formation,plastification

3. Cooling

MotivationThermal Laser Adjustment

Upsetting Mechanism

Temperature-Gradient-Mechanism (TGM)

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

laser beam

laser beam

Reed-contacts

MotivationIndustrial Applications

Reference: Philips

Optical drives

Reference: Philips

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Design of an Actuator SystemDesign of Fiber Collimator Arrays

Properties

• Pitch: 2 mm

• Fiber: Singlemode

• dFiber: 125 µm

• MLA: fused silica

Requirements

• Total displacement 10 µm

• Displacement steps minimum 0.1 µm

• No thermal damage of the adhesive

• Mechanical stability

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Laser

- Power [W]

- Pulse width [τp]

- Frequency [fp]

- Location of radiation

Actuator

- Thickness

- Length

- Width of bridge FEM-Model

Results

- Displacement

- Temperature

- Dumping

SYSWELD SYSTUS International

Process data

- Max./min. displacement

- Max. temperature

- Min. dumping

Design of an Actuator SystemSimulation and Optimization of Fiber Collimator Arr ays

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Design of an Actuator SystemSimulation and Optimization of Fiber Collimator Arr ays

Displacement y-direction

• Thickness ↓ - Displacement ↑

• Fiber displacement in

arbitrarily direction possible!

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Dumping

Defined Limits for Actuator Alignment

• upper limit of dumping 0.175 rad/mm

Actuator thickness: 50 µm uniform heating

Actuator thickness: 400 µmTemperature gradient

Design of an Actuator SystemSimulation and Optimization of Fiber Collimator Arr ays

• Thickness ↓ - Dumping ↓

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Temperature

Design of an Actuator SystemSimulation and Optimization of Fiber Collimator Arr ays

Defined Limits for Actuator Alignment

• Maximum temperature at center of actuator 350°C

• Thickness ↓ - Temperature ↑

• Thickness 100 µm - 200 µm

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Design of an Actuator SystemExperimental Results – Laser Micro Alignment

Measurement of

pointing accuracy

Laser 1310 nm

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

• Displacement of actuator with different number of pulses

• 10 µm displacement

• Requirements fulfilled

Design of an Actuator SystemExperimental Results – Laser Micro Alignment

0

2

4

6

8

10

12

0 2 4 6 8 10Number of Pulses

Dis

plac

emen

t [µm

]

19 mJ36 mJ82 mJ

Pulse Energy

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

ConclusionLaser Micro Alignment

- Alignment in µm range is possible

- Simulation: sub-µm adjustment

- Temperature treatment of adhesive and assemblies

- Laser irradiation strategy reduces heat stress

- Time-consuming actuator design

- Outlook

- Sub-µm alignment -> precise sensor necessary

- Long term stability?

- Non-thermal adjustment

4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets Bulgaria

Thank you for your kind attention!

Questions?