precision engineeringnanotechnology

proceedings of the

•/•••.' euspen

2nd International Conferenceeuropean society for precisionengineering and nanotechnology

may 27th - 31s t , 2001Turin, Italy

volume 2

editors: A. Balsamo further reviewing by: G. Amato_ _ P. AthertonC. Evans M. BonisA. Frank |- Brinksmeier

E. CanutoW. Knapp K. Carneiro

M. Mortarino R. Hockenc _ . . H. Kunzmann5- S a r t o n P. Me KeownE.G. Thwaite M. Week

VII

Table of contents

OPENING SESSION. Keynotes 3

P. PerloFrom microtechnology to nanotechnology: a "natural" evolution involvingthe automotive context 4

E. Di FabrizioPerspectives on nanofabrication and advanced Lithographies 8

SESSION 1. MEMS/MOEMS & non-mechanical ultra-precision processes 9M. Rasetti

Quantum Computation and quantum information: a new challenge fornanotechnology 10

B. Blasi, V. Boerner, A. Gombert, V. Kiibler, M. Niggemann, V. WittwerFunctional Surface-Relief Structures Manufactured by Holography andSubsequent Microreplication 12

M. Hie, E. Cianci, V. Foglietti, G. De Bellis, G. CaramentiMicromachined Chips for Biomolecular Investigation 16

K. Ashida, L. Chen, N. MoritaNew maskless micro-fabrication technique of single-crystal silicon usingthe combination of nanometer-scale machining and wet etching 20

G. D'Arrigo, S. Castorina, S. Coffa, C. SpinellaAdvanced Micromachining Processes for Micro Opto-electro MechanicalComponents and Devices 24

R. Marcelli, A. Miiller, F. Giacomozzi, G. BartolucciMicromachined Coplanar Microwave Components: Technology andModeling 28

Q. Fang, D.G. Chetwynd, J.W. GardnerTensile Properties of Conducting Polymer Fibres 32

M. Cocuzza, F. Giorgis, P. Civera, L. Scalrito, C.F. Pirri,Micromachined silicon based cooling loop designed for general purposedevices 36

E. Cianci, A. Cianchi.V. Foglietti, A. NotargiacomoDiffraction Radiation by Silicon Micromachined Targets as BeamDiagnostics Instrument in Particles Accelerators 38

R. Kurt, D. Dumitriu, A. KarimiPlasma Enhanced Chemical Vapour Deposition of Patterned Cnx FilmsConsisting of Feathered Nanotubes 42

V. Foglietti, E. Cianci, D. Memmi, G. Caliano, M. PappalardoFabrication of Capacitive Ultrasonic Transducers by a Low-Temperatureand Fully Surface-Micromachined Process 46

E. Ohmura, I. Fukumoto, I. MiyamotoMolecular Dynamics Analysis of Ultra Fast Laser Ablation 50

C.C. Wang, D.H. Chen, T.C. HuangNanofabrication of Pd/Ti Nanostructured Electrodes by ElectrophoreticDeposition of Pd Colloidal Dispersions 54

H. Takino, T. Kobayashi, N. Shibata, K. Yamamura, Y. Sano, Y. MoriRemoval Characteristics of Plasma Chemical Vaporization Machiningwith a Pipe Electrode 58

Proc. of 2nd euspen International Conference - Turin, Italy - May 27th - 31st, 2001

VIM

G. Torrioli, B. Buonomo, P. Carelli, M.G. Castellano, F. Chiarello,C. Cosmelli, R. Leoni, F. MattioliFabrication of a single-Electron Transistor with Mesoscopic TunnelJunctions 62

V. Piotter, T. Schaller, R. Ruprecht, J. HausseltFabrication of Micro Components by Micromachining and InjectionMolding 66

H.K. Tonshoff, A. Ostendorf, K. Korber, T. TemmePrecision Machining of Optical Materials with 157 nm Excimer LaserRadiation 70

J. Remes, H. Moilanen, S. LeppavuoriThe Fabrication of Submicrometer Structures in Si and Porous-Si byFocused Ion Beam 74

H. Leclerc, N. Boudeau, J.C. GelinDesign and Modelling the accuracy of an High Precision SLSExperimental Pilot 78

E. Giovine, A. Notargiacomo, L. Di Gaspare, E. Palange, F. Evangelisti,R. Leoni, G. Castellano, G. Torrioli, V. FogliettiElectrical Characterization of Nanowires Fabricated on a Si/SiGe 2DEG 82

E. Giovine, V. Foglietti, R. Leoni, F. EvangelistiFabrication of Nanowires on Si/SiGe Heterostructures by EBL 84

M. Bellucci, G. Cocorullo, F.G. Delia Corte, M. lodice, I. RendinaHigh-Speed Thermo-Optical Modulation in Waveguide-IntegratedModulators 86

F.G. Delia Corte, F. Cantore, M. lodice, I. Rendina, C. SummonteLow-Cost Chip-lntegrable Silicon-Based All-Optical Infrared Light Micro-Modulator 90

J.Z. Zhu, F. Tian, D.R. Lu, G.X. Zhang , R. Wang, X.Q. Wu, Z.R. ZhangMultifunctional Sensor-Chip Based on Micromachined Chamber Array 94

L. Mariucci, M. Stanizzi, G. Fortunato, V. Privitera, C. SpinellaTwo-dimensional Study of Laterally Confined Ultra-shallow Junctions 98

S. Takahashi, T. Miyoshi, Y. Takaya, R. NakajimaNano-defects Detection of Si Wafer Surface Using Evanescent Light -Computer Simulation by Means of FDTD Method 102

G. Amato, L. Boarino, S. Borini, A.M. Rossi, V. LysenkoMicromachined integrated Si/AI Thermopiles Based on Porous Silicon 106

G. Manzoni, F. De Bona, E. Di FabrizioDesign and Fabrication of a Microvalve for Space Applications 110

A. M. Rossi, G. Amato, L. Boarino, D. Madonna Ripa, E. Monticone, S. BoriniUltrasound generator based on porous silicon 114

G. Amato, L. Boarino, A. M. Rossi, S. Borini, G. Lulli, A. ParisiniSilicon On Insulator wafers and devices from High-Energy Implantationand Electrochemical Etching 116

SESSION 2. MEMS/MOEMS & material properties 119

R.W. WhatmoreFerroelectric Materials and their Applications in Microsystems andNanotechnology 120

IX

N. Savalli, S. Baglio, M. Scalora, M. BloemerOpto-Electro-Mechanical Systems based on 'Transparent Metals" 124

H.K. Tonshoff, K. KorberComparison of Laser Processes to Achieve Conductive Surface Areas onCeramics 128

H. Bohlmann, H. Liegerer, R. Gotzen, A. Reinhardt,Micro RP&M Technologies for End User Applications 132

A. Chilkoti, J. HyunSurface-Initiated Free Radical Polymerization of Polymer Microstructureson a Self-Assembled Monolayer on Gold 136

K. Kuwahara, Y. Watanabe, M. OtaRotational Characteristics of Laser Opto-Microactuator Controlled byMagnetic Force 140

D. Bethmont, A. KarimiMechanical Properties at Submicro Scale by Nanoindentation 144

M. Week, B. PetersenAdhesion Problems During Handling of Micro parts - Vibration AssistedRelease of Objects 148

T. Sumomogi, M. Nakamura, T. EndoSimultaneous Evaluation of Surface and Subsurface cracks on Nano-scale Machined Brittle Materials by Scanning Force Microscope andScanning Laser Microscope 152

D. Reyes, H.D. TranDesign and Evaluation of a MEMS Dynamometer 156

E. Westkamper, B. Gottwald, P. Klein, A. GemmlerModelling of Crystal Growth for Sputtered Layers by Molecular Dynamics 160

Torii, A. Ueda, S. OkumaA small Coil Used for Displacement Measurement 164

Y. Kanda, M. SuzukiAn Attempt at Micro Cutting under Different Cutting Environment Using AFM 168

A. Notargiacomo, V. Foglietti, F. EvangelistiNanoscale Patterning of Thin Aluminum Film Using AFM Lithography 172

R. Liedtke, G.P. Lopez, H.D. TranMicrowriting Using Surface Tension 176

S.Y. Lee, Y.B. Choi, K.K. Park, Y.S. Jo, S.G. Lim, S.W. KimGrating Projection Moire Interferometry for High Speed 3-D Inspection ofMeso-scale Objects 180

R. Neugebauer, A. Schubert, J. Bohm, T. BurkhardtForming Technologies for Production of Micro Structured Parts 184

D.L. CorkerRapid Material Analysis for Determining the Effect of PiezoelectricDopants and Alternative Material Preparation Techniques 188

F. Perennes, F. De Bona, F.J. PantenburgMicrofabrication with Deep X-ray Lithography: Technological AspectsAffecting the Microstructure Geometry 192

M. Heckele, A. DurandMicrostructured Through-Holes in Plastic Films by Hot Embossing 196

A. Chilkoti, W. FreyUltraflat Nanosphere Lithography: A New Method to Fabricate FlatNanostructures 200

J. Juuti, H. Moilanen, S. LeppavuoriManufacturing of Rainbow Actuators for Displacement Application 204

D.A. Lucca, R. Ghisleni, M.J. Klopfstein, G. CantwellInvestigation of the Two Polar Faces of ZnO by Nanoindentation 208

N. Li Pira, P. Perlo, R. Monferino, A. Zvezdin, V. Lambertini, M. RepettoModelling And Experimental Evidence of Quantum Phenomena InMetallic Non-Continuous Films (Metal Quantum Wire Network -MQWN) 212

M. Pizzi, V.Koniackine, M. Nieri, P. Perlo, S. Sinesi, C. lachetti, K. SassoliElectrostatically driven microstructures using nanoparticles based inks 216

SESSION 3. Metrology & nanometrology I 221

E. Spanner, J. Thiel,Homodyne Laser Interferometer with new Interferometer Optics and Fiber- Coupled Measuring Head for Ultra Precision Measurement Below 1 nm 222

K.M.-Hagen, M. Wolf, A. Abou-ZeidMeasuring Micrometer Steps with Nanometer Resolution 226

S.-Woo Kim, H.-G. RheePhase Measuring Volumetric Interferometry for Three-DimensionalCoordinate Metrology 230

T. Ruijl, J. Franse, J. van EijkUltra precision CMM Aiming for the Ultimate Concept 234

J. DankowskiState of the Art Vibration Isolation of Large coordinate MeasuringMachines with an Adverse Environment 238

J. DankowskiState of the Art Vibration Isolation Internal to Large Aerospace VacuumChambers for Space Simulation Testing 242

R. Furutani, C.Y. WonHigh Resolution Probe System for CMM 246

P. Kappelhof, B. Snijders, C. Braam, H.J.P. Vink, P. Vertioeff, B. Calvel, F. SafaGAIA OPD Testbench. Interferometer with Tens of Picometre Accuracy 250

Y. Tanaka, Y. Hirai, M. Kabuto, K. Kawabata, H. Haga, M. NagayamaEvaluation of Viscoelasticity of Biological Cells in Liquid by Atomic ForceMicroscope 254

K. Wendt, H. Schwenke, F. Waldele, M. Krawczyk, K. KnielError Mapping of Large CMMs by Sequential Multi-lateration Using aLaser Tracker 258

J.G. Salsbury, R.J. HockenA Novel Step Plate Gage for Machine Metrology 262

S. Cao, W. Hoffmann, U. Brand, T. Kleine-Besten, P. Pomnoppadol, S.ButtgenbackA Micro Probing System for Dimensional Metrology on MicrosystemComponents 266

T. Eom, T. ChoiSingle Frequency Laser Interferometer with Subnanometer Accuracy 270

T. Eom, D. ChungPrecision Goniometer System with Indexing Table and Small AngleMeasuring Interferometer 274

XI

S. Driessen, C. Bosbach, T. Pfeifer, B. MicheltFiber-optic Interferometer for Absolute Distance Measurements with HighMeasuring Frequency 278

A. Bai, F. Bitte, T. PfeiferAssessment of Interferometer-errors with the Virtual Interferometer 282

A. Lassila, J. UnkuriInvestigation of Nonlinearity of Gauge Block Interferometers 286

G. Jager, E. Manske, T. HausotteNanopositioning and Measuring Machine 290

B. Bodermann, V. Burgarth, A. Abou-ZeidModulation-free Stabilised Diode Laser for Interferometry Using Doppler-reduced Rb Transitions 294

H. Matsuoka, S. KaseiMeasurement of Form deviations of Minute Module Gears 298

H. Bosse, W. Hassler-Grohne, J. Tschirnich, J. Flugge, G. Bonsch, P.Speckbacher, W. IsraelDesign Aspects of the international Line Scale Comparison Nano3 302

K. Takamasu, M. Fujiwara, M. Hiraki, A. Yamaguchi, S. OzonoEvaluation of Thermal Drift of Nano-CMM 306

E. Canuto, F. BertinettoThe use of Fabry-Perot Interferometer for Ultra Fine Dimensional Control 310

E. Canuto, A. Rolino, P.P. Pepe, F. Bertinetto, P. CordialeDigital Control of the Frequency of Laser Sources for Fine Metrology 314

E. Canuto, A. Rolino, P.P. Pepe, F. Bertinetto, P. CordialeFine Digital Temperature Control for Metrological Applications 318

M.N. Bournachev, Y.V. Filatov, D.P. Loukianov, P.A. Pavlov, A.E. SinelnikovReproduction of Plane Angle unit in Dynamic Mode by Means of RingLaser and Holographic Optical Encoder 322

R. Probst, M. KrauseSix Nanoradiant in 2% Radiant - A Primary Standard for Angle Measurement 326

R. Haberland, H. MuInstabilities in High Speed Scanner Air Bearings 330

M. BisiSub-micrometer resolution Position Sensor for Use in Active Equipmentfor Vibration Isolation 334

V. Burgarth, A. Abou-ZeidWavelength Stabilized Diode Laser Interferometer for Calibration ofLength Measuring Instruments 338

S. Weikert, W. KnappThe Grid-bar, a New Device for Machine Tool Testing 342

R. Meneghello, L. De Chiffre, A. BalsamoPrecision of Coordinate Measurements in Industry: AUDIT ITALIANO 346

J. Zuo, M.A. Mannan, A.N. PooA Real -Time Contouring Error-mapping System in an Open ArchitecturePC Based Controller Environment 350

E. Savio, L. De ChiffreAn Artefact for Traceable Free Form Measurements on CoordinateMeasuring Machines 354

F. MeliInternational Comparison in the Field of Nanometrology: Pitch of 1Dgratings (Nano4) 358

XII

E. Savio, L. De ChiffrePerformance Verification of CMMs for Free Form Measurements 362

A. Piratelli-Filho, B.D. GiacomoDevelopment of CMM Volumetric Performance Test Utilizing Ball Bar Gauge 366

E. Ricci, M. Verdi, J. Valero CatalaA Large CMM Under Harsh Temperature onditions: a real case 370

S. Desogus, G.B. Picotto, M. Pisani, B.I. RebagliaA probe with differential capacitive readings of displacements 374

E. Canuto, S. TonaniDigital stabilization of a suspended table for fine metrology 378

D. SinigalliesiDimensional Measurement of Hard-Disk-Drive Suspensions 382

SESSION 4. Metrology & nanometrology II 387

C. Evans, A. Davies, T. Schmitz, R. Parks, L.-Z. ShaoInterferometric Metrology of Substrates for VLSI 388

J. Haycocks, K. JacksonA Metrological Atomic Force Microscope for Calibration of TransferStandards 392

K. Hasche, K. Herrmann, M. Krumrey, S. Schadlich, W. Frank, M. Procop, G.UlmCalibrated Reference Standards for Films in the Nanometer Range 396

F. Lamarque, J. F. Le GargassonConfocal Scanning Video Endoscope 400

G.B. Picotto, M. PisaniA metrological SPM for dimensional surface measurements 402

O. Jusko, R. Liang, M. NeugebauerDesign and Implementation of an Advanced Dynamic Probe Calibrator forForm Measurement Instruments 406

C. Lupi, D. Leduc, P. Blanchard, R. Le Ny, G. Normand, C. BoisrobertHigh Resolution Low Coherence Reflectometry Defect Localisation andAnalysis 410

R. Leach, I. Garbutt, P. Harris, M. CoxSinusoidally Modulated Reference Artefacts for Calibration of SurfaceTexture Measuring Instruments 414

K.A. Tiftikci, C. Velzel, P.H.J. Schellekens, F. BitteDesign Aspects of a Fast 3D Surface Scanner Based on DMDTechnology and Confocal Microscopy 418

M.R.H. KrausDiscrete Measurement Data Analysis: a New Method to CharacterizeStructured Surfaces on Atomic Scale 422

U. Berzano, G. Durando, E. MassaPhase Contrast Imaging Using an X-Ray Interferometer 426

W. Gao, P.S. Huang, T. Yamada, S. KiyonoFlatness metrology of Large Silicon Wafer Using an Absolute ErrorSeparation Technique 430

O. Hignette, P. Cloetens,Metrology and Manufacturing of Coherence Preserving Synchrotron X-Ray Optics 434

XIII

K. Herrmann, K. Hasche, F. Pohlenz, R. SeemannDetermination of the Geometry of Various Indenter Types Used for Microand Nanoindentation 436

H. Fukatsu, Y. Nakanishi, K. Asahina, S. HiraiNoncontacting Surface Roughness Measurement using the Optical StylusMethod 440

K.C. Kim, J. Woo Seo, D.K. Kang, D.G. GweonCorrection of distortion in Confocal Scanning Laser microscopy 444

S.Q. Lee, K.S. Moon, D.G. GweonThe Effect of Stereo Focus Technique on the Three-Dimensional Imagingin the Confocal Scanning Microscopy 448

K. Yanagi, T. Kurozo, A. ShimamotoDevelopment of a Sophisticated Scanning Instrument for SurfaceTopography Measurement Using an Optical Flat as a Reference Plane 452

X. Liu, Y. Gao, Z. LiA Functional Noise-Immune Unwrapping Method Based on WrappedPhases Statistics and Self-Calibration 454

X. Liu, Y. Gao, M. ChangA New Lateral Shearing Interferometric Measurement Method forAspheric Lenses under the condition of Vibration 458

T. Doi, T. KurosawaAccurate Optical Surface Profilometer Based on Mirau-typeInterferometric Microscope 462

G. Barbato, G. Brondino, M. Galetto, A. GermakUncertainty Evaluation for Martens Hardness. Analysis of the VelocityEffect 466

J.R. Pratt, D. Newell, E. Williams, D. Smith, J. KramarTowards a Traceable Nanoscale Force Standard 470

I. Misumi, S. Gonda, T. KurosawaPrecision Measurements of 1 D Grating Using Metrological Atomic ForceMicroscope 474

M. Schulz, I. WeingartnerMeasurement of Steep Aspheres by Curvature Scanning: an UncertaintyBudget 478

K. Schneefuss,T. PfeiferMicroscopic Formtesting of Large Area Microstructured by Means ofFormtesting Interferometry 482

A. Bai, K. Schneefuss, T. PfeiferNulltest for Aspherical Microlenses Using Moire Deflectometry 486

C. Dal Savio, T. Dziomba, T. Sulzbach, O. Ohlsson, H.U. DanzebrinkScanning Near-field Optical Microscopy with Silicon Cantilever Probes 490

I.M.R. Najjar, D.G. ChetwyndSurface-Related Characterisation in Contact-Probe Metrology 492

A. Yacoot, L. Koenders, U. Kuetgens, T. WeimannA Combined X- ray Interferometer and Scanning tunnelling Microscopefor the Characterization of Grating Structures 496

L. Jung, R. Kruger-Sehm, B. Spranger, L. KoendersReference Software for Roughness Analysis 500

V. Greco, G. MolesiniAbsolute Calibration of Optical Flats: Long Term Reproducibility ofInterferometric Measurements 504

XIV

X. Liu, F. GaoMulti-function evaluation of Surface at Micro/Nano Scales by a NewTribological Probe Microscope 508

R. Breil, T. Fries, J. Gamaes, J. Haycocks, D. Huser, J. Joergensen, W.Kautek, L. Koenders, N. Kofod, K.R. Koopos, R. Komtner, B. Lindner, W.Mirande, A. Neubauer, J. Peltonen, G.B. Picotto, M. Pisani, H. Rothe, M.Sahre, M. Stedman, G. WilkeningIntercomparison of Scanning Probe Microscopes 510

J. Gaernaes, A. Kuhle, N. KofodTreaceable Stepheight and Roughness Measurements with Atomic ForceMicroscopes 514

H.J. Pahk, Y.M. HwangA New Method for Three-Dimensional Measurement of Surface ProfileBased on the Focused Image Surface Algorithm and Optical Microscope 518

F. Cabiati, V. D'Elia, D. SerazioVector Transducer for Precision Offset and Tilt Monitoring Suitable toLevitated Objects 522

M. Strobl, W. Treimer, A. HilgerExperiments with Tuneable Many Bounce Channel Cut Crystals forThermal Neutron Scattering 526

U. Hubner, W. Morgenroth, S. Bommann, H.G. Meyer, T. Sulzbach, B.Brendel, W. MirandeCalibration standards for the in-situdetermination of AFM tip-shapes 530

Y. Jourlin, O. Parriaux, F. Pigeon, M. Bonis, Y. Alayli, S. TopcuDouble Read Head for the Measurement of Differential Effects on aGrating Scale 534

SESSION 5. Ultra-precision motion control 539

Y. Yoshimura, F. Hatori, Y. Ue, H.TakahashiOn Displacement Characteristics of One-piece XYZ Table for Fine Positioning 540

D. Reynaerts, H. Van Brussel, F. Al-Bender, M. Versteyhe, S. DevosConstruction and Control of an Ultra-stiff Nanopositioning System 544

J. Flugge, G. Dai, R. KoningSoftware and Control System of the PTB Nanometer Length Comparator 548

S. FukadaMicroscopic Behavior of Preloaded Ball Screw for Ultra-precisePositioning with Nanometric Resolution 552

V.I. Rakhovsky, S.V. Vakula,Precision Alignment of Fiber Optics Assemblies by Using a Novel "SuperPrecise" Nano Positioning System 556

J.Y. Shim, H.W. Jung, D.G. GweonModelling and Control of the Multi-axis Nanopositioner Using InertialSlider/Walking Method 558

S. Li, Z. Zheng, Y. DaiThe Design of a High Precision Tracking Controller Used in Ultra-precision Machine 562

J.S. ChenDual-Mode Friction Compensation of a Precision Linear-Motor Rolling-Guide Stage 566

XV

D. Li, J. Wang, S. DongHybrid Vibration Control of Slide Carriage of Ultraprecision Machine Tool 570

G. Durando, E. MassaA Micro-Manipulator for Scanning X-Ray Interferometry 574

Y.S. Kim, S.Q. Lee, M.J. Chung, M.G. Lee, D.G. GweonOptimal Design of XYO Precision Positioning Stage Maximizing theSystem Bandwidth 578

E. Castillo-Castaneda, Y. OkazakiAn Alternative Static Friction Control Algorithm for Precision MotionControl of Mechanical Drivers 582

S.H. Chang, J.B. LeeA Lead Screw Stepper Equipped with Piezo Driven Ultra-high ResolutionLinear Positioner 5 8 6

D.K. Jin, J.H. Lee, H.K. Yoon, D.G. GweonAuto-alignment Algorithm for Near-Field Optical Recording Head 590

S.C. Kim, S.H. KimPrecision Flexure Hinge Mechanism Using the Elastic Modelling Method 594

A. Torii, T. Koyanagi, R. Fukui, A. UedaVelocity of Precision Positioning Miniature Robots Using PiezoelectricElements and Electromagnets 598

D. Reynaerts, H. Van Brussel, F. Al-Bender, M. Versteyhe, S. DevosCalibration Aspects of a Measurement System for an Ultra-stiffNanopositioning System 6 0 2

V. Guyenot, G. Tittelbach, C. SiebenhaarInvestigations of Alignment and Positioning Principles for OpticalDetectors 6 0 6

E. Brusa, S. Carabelli, G. Genta, F. Maddaleno, M. Silvagni, A. TonoliVoice coil actuator for active vibration isolation in microgravity 610

S. Carabelli, G. Genta, M. Silvagni, A. TonoliActive Magnetic Suspension for Satellite Inertial Wheels 614

SESSION 6. Mechanical ultra-precision processes 619

D.J. Stephenson, J Corbett, J.H. SweetTetraform 'C - A Major Advancement in the Efficient Machining of OpticalSurfaces on Hardened Steels 6 2 0

J. Schmidt, H. Tritschler, H. HabererCutting tools and material conditioning for micro end milling of tool steel 624

E. Brinksmeier, R. GlabeAdvanced Cutting Tools for Precision Machining of Steel 6 2 8

Q. Zhao, S. DongInvestigation of Single Asperity Microcutting using an Atomic ForceMicroscope

Y. Takeuchi, S. Maeda, K. Sawada, T. Kawai .Creation of Ultraprecision Microgrooves Using Non-Rotational CuttingTools 6 3 6

F. Klocke, O. RuebenachKinematics and Material Removal Mechanisms in Ultrasonic-AssistedDiamond Turning of Brittle Materials 6 4 °

XVI

G.J. Pietsch, M. KerstanSimultaneous Double-Disk Grinding - Machining Process for Flat, Low-damage and Material-saving Silicon Wafer Substrate Manufacturing 644

S. LavrynenkoTesting of Surface Generation Process of Polymer Optics by Single-pointDiamond Micromachining 648

H. Hashizume, H. Yoshioka , H. ShinnoIn-Process Monitoring of Thermal Behaviour near the Cutting Point duringUltraprecision Machining 652

F. Klocke, D. Pahler, A. JakobPrecision Machining of Future Silicon Wafers - Grinding and SlicingTechniques for Flawless Qualities 656

I. Nakamura, M. Sato, T. Tanaka, H. Seki, M. IshiyamaDinamic FEM Analysis of Micro Groove in Nanometer Order Prepared byRuling Engine 660

K.E. Puttick, A.G. Mamalis, S. LavrynenkoRegistration and Modelling of Polymers Stress Propagation in ControlledDirectional Fracture Processes by Microcutting and Indentation 664

X. Wang, S. Jiang, C. Liu, Z. Shi, D. WuThe Study on Diamond Precision Turning Technology of Middle-Convexand Varying Ellipse Piston 668

H. Onikura, B.K. Shil, O. Ohnishi, R. Inoue, T. SembaFabrication of Micro Cylindrical Diamond Grinding Tools by UltrasonicVibration Grinding for Drilling of Brittle Materials 672

Th. Schaller, H. Dittrich, A. Gerlach, A.E. Guber, M. Heckele, A. Muslija,U. Wallrabe, W. ZiBlerSmall Tolerances & Large Areas: Micromachining Meets IndustrialRequirements 676

E. Brinksmeier, W. Preuss, A. GessenharterManufacturing of Calibration Standards by Diamond Machining 680

Y. Gao, Z. TaoTests of Flow Patterns of Grinding Coolant Interfered using an Injection ofStream 684

T. Kaneeda, S. Yokomizo, D. NishiyamaTransmission Electron Microscopy of Oxygen-Free Copper MachinedSurface 688

Y. Liang, X. Luo, S. Dong, K. ChengAn MDS Study of the Micro-vibration effects of Diamond ToolsRoughness on Surface 692

Z. Zhong, S.H. Yeo, L.K. TayA Study of Relationship between Roughness and Lightness of PrecisionMachined Surfaces 696

X.D. Liu, L.C. Lee, F.Z. Fang, S.K. Lau, P.S. ChanShrinkage Error Compensation of Plastic Lenses by Modifying MoldInserts Using Diamond Turning 698

L KudlaStrenght Properties of Miniature Drills 702

E. Uhlmann, H. Engel, R. Hammer, C. PaeslerImpact of Diamond Geometry on Removal Mechanisms During Machiningof GaAs 706

XVII

Y. Kobayashi, K. ShiraiSurface Texturing on a Microscopic Area by Micro-cutting 710

M. Takacs, I. Meszaros, B. VeroSurface Integrity by Micromilling of Polycrystalline Metals 714

J. Nyiro, A.G. Mamalis, J. Prohaszka, I. MeszarosAnalysis of Ultraprecision turned Mirror Surfaces 718

H.H. Gatzen, C. Morsbach, M. TricardDual Wheel Miniature Gang for Silicon Wafer Dicing 722

C.R. Pagotto, J.G. Duduch, R.G. Jasinevicius, A.J.V. PortoInvestigation on the Plasticity of Window Glasses at Room TemperatureUsing Vickers Micro-Indentation and Single Point Diamond Turning 726

H. Khanfir, P. Revel, R.Y. FillitInfluence of the Cutting Parameters and Crystallographic Orientation onthe Surface properties of Ductile Materials in Ultraprecision Machining 730

M.A.J. van As, M. de JonghThe manufacturing of high NA objective lenses for optical storage 734

T. Kuriyagawa, M. Saeki, K. SyojiStudy of Electrorheological Fluid-Assisted Ultra-Precision Polishing For 3-Dimensional Small Parts 738

F. Klocke, S. HambiickerInfluence exerted by the pad material and polishing suspension onreproducibility of a polishing process 742

S. To, W. B. Lee, C.F. CheungInvestigation of surface properties in ultra-precision diamond turning 746

C.F. Cheung, W. B. LeePrediction of nano-surface generation in ultra-precision diamond turningfrom a new materials induced vibration model 750

SESSION 7. Ultra-precision machines 755

T. MoriwakiRecent Development in Ultraprecision Machine Tool Technology 756

M. Takahashi, T. Masaki, D. W. Davis, C. StroshineDevelopment of Laser Printer Free Form Mirror and Related Machiningand Metrology Systems 758

Z. Lu, D. Zheng, S. Dong, K. ChengAccuracy-influencing Factors Analysis and Error Resources Identificationin Ultra Precision Machining 762

M. Week, B. LeifhelmNew Lights in Solar Cell Manufacturing: High Throughput SurfaceStructuring System for Solar Cell Wafers 766

L. Phee, C. Stefanini, A. Arena, D. Accoto, A. Menciassi, G. Pernorio, M.Boccadoro, P. DarioMechanical Clamping Mechanisms for Locomotion in the GastrointestinalTract 770

G. Jayaraman, V.K. Venkateswaran, K. Niranjan ReddyAn Analytical Approach for Precise Positioning of Tool in DiamondTurning 774

T. Pfeifer, G. Dussler, S. Driessen, M. Week, B. PetersenAssembly of Micro Systems by the Example of Miniature Flexible Fibre-scopes 778

XVIII

S. Zelenika, F. De BonaAnalytical and Experimental Characterisation of High-Precision FlexuralPivots 782

A. Weckenmann, R. Ernst, R. HornfeckTolerancing of Micromechanical-Monolithic Components 786

T. Goto, S. Asano, O. Hasegawa, T. TsunoDevelopment of a Rotary Fast Tool Servo for Ultraprecision Grinding ofSilicon Wafer 790

Y. Dai, X. Peng, S. LiAnalysis and Elimination of Servomechanism Error Source Measuring onan Ultra-precision Lathe 794

S. Li, Y. Liu, Y. DaiResearch on Precision & Ultra-precision Machining Center-orientedWorkpiece Geometric Localization Algorithms 798

S. Kaji, T. Goto, O. Hasegawa, T. Tsuno, S. Asano, T. KurimotoUltraprecision Grinding of Large Silicon Wafer Using a Rotary Fast ToolServo 802

M. Ono, E. Arakawa, S. Kyomine, S. KatoFabrication of a Microrobot Movable in a Freely Held Pig's Small Intestine 806

R. HaberlandMachine vibration and machined surface 810

J.L. Vavrille and Club Nanotechnologie Workgroup 2Progress on the French National Intercomparaison of Precision TurningMachines 814

M. SchopfTrueing and Dressing of High Precision Grinding Tools withUnconventional Machining 816

M. Schopf, G. BurkhardNew Replication Method for the Evaluation of the Surface Topography ofGrinding Tools 820

S.W. Kim, T. Keem, S. YooActive Thermal Stabilization of Machine Structures Using the FixedTemperature Point of Gallium 824

R.F.M. Marcal, A.A. Susin, J.L. KovaleskiDetecting Incipient Faults in Rotating Machines with Vibration analysisand Fuzzy Logic 828

J.S. Ahn, S.M. Kim, S.K. LeeMicro Machining Using an Electro Magnetic Exciter 832

E. Egerer, U. Engel, G. Van Der HeydHandling of Microparts in a Multi-Station Former 836

H.W. Hoffmeister, H. HerrmannFine Grinding of Optical Glasses with Diamond Foil Tools 840

H. Suzuki, T. Higuchi, O. Horiuchi, H. ShibutaniPrecision Cutting of Micro None-Axi-Symmetric Aspherical Surface with3-Axes Controlled Diamond Tool 844

Y. Landon, P. Lagarrigue, F. Monies, W. RubioCorrection of Circularity Defects on a N.C. Machine Tool 848

P. Dario, A. Eisinberg, A. Menciassi, C. Stefanini, G. Scalari, M.C. CarrozzaA sensorized pelectro discharge machined, superelastic alloymicrogripper for micromanipulation 852