and an opening for receiving the chemical into the container.

P L A T I N G A P P A R A T U S U.S. Patent 6,251,238. June 26, 2001 R. Kaufman and G.C. Downes, assignors to Technic Inc., Cranston, R.I.

An anode having separately excit- able sections to compensate for nonuni form pla t ing deposi t ion across the surface of a wafer due to seed layer resistance.

M E T A L A L L O Y S U L F A T E E L E C T R O P L A T I N G B A T H S U.S. Patent 6,251,253. June 26, 2001 H.D. Gillman et al., assignors to Technic, Inc., and Specialty Chemical Systems, Inc., both of Cranston, R.I.

A method of improving the plating performance of an aqueous sulfate electrolyte electroplating bath com- prising the step of adding an effec- tive amount of a salt of an alkyl and/or alkanol sulfonic acid to the bath to operate at higher current densities, wherein the added salt is selected from the group consisting

of alkali metal , alkaline ear th metal, and ammonium or substi- tuted ammonium salts.

ELECTRODE FOR C H R O M I U M P L A T I N G U.S. Patent 6,251,254. June 26, 2001 M. Katoh et al., assignors to Permelec Electrode Ltd., Kanagawa, Japan

A method for plating chromium onto a substrate, which comprises passing an electric current through a plating bath including a trivalent chromium solution, and anode and a cathode, wherein the anode con- sists of a conductive base, an elec- trode material layer comprising iridium oxide formed on the base, and a porous layer formed on the surface of the electrode material layer consisting of an oxide of one or more elements selected from the group consisting of silicon, molyb- denum, titanium, tantalum, zirco- nium, and tungsten.

A P P A R A T U S FOR E L E C T R O P L A T I N G T I N W I T H I N S O L U B L E A N O D E S

U.S. Patent 6,251,255. June 26, 2001 W.J. Copping et al., assignors to Precision Process Equipment, Inc., Niagara Falls, N.Y.

A method for plating tin onto a workpiece comprising providing a process cell and a secondary cell including a secondary soluble an- ode of the platable metal and a secondary ca thode e lect r ical ly connected to each other by a sec- ondary rectifier and a secondary electrolyte; a permeability-selec- tive ion exchange membrane di- viding the secondary cell into an anolyte compartment containing the secondary soluble anode and a catholyte compartment contain- ing the secondary cathode; a first conduit in fluid flow communica- tion from the anolyte compart- ment to the process cell; and a second conduit in fluid flow com- munication from the process cell to the anolyte compartment; and moving tin enriched anolyte from the secondary cell to the process cell through the first conduit as the process cell is being operated.

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June 2002 165