11

都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal

  • Upload
    others

  • View
    2

  • Download
    0

Embed Size (px)

Citation preview

Page 1: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 2: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 3: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 4: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 5: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 6: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 7: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 8: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 9: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 10: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 11: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal