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1 Copyright © by Jose E. Schutt-Aine , All Rights Reserved ECE 497-JS, Spring 2004 ECE 497 JS Lecture - 12 Device Technologies Spring 2004 Jose E. Schutt-Aine Electrical & Computer Engineering University of Illinois [email protected]

ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

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Page 1: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

1Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

ECE 497 JS Lecture - 12Device Technologies

Spring 2004

Jose E. Schutt-AineElectrical & Computer Engineering

University of [email protected]

Page 2: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

2Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

NMOS Transistor

Page 3: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

3Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Source Drain

Electricfield

inversion layer

y

ρ

chan

nel c

harg

e de

nsity

Source Drain

Electricfield

y

ρ

c han

nel c

h arg

e d e

nsity

L

Source Draindepletionregion

y

ρ

chan

nel c

harg

e de

nsity

L- d d0, GT DS GTV V V> ≥

0, =GT DS GTV V V>

0, smallGT DSV V>

Resistive Region

Nonlinear Region

Saturation Region

MOS Regions of Operation

Page 4: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

4Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Capacitance• Gate Capacitance

– CG determines the amount of charge to switch gate– Several distributed components– Large discontinuity as device turns on– At saturation capacitance is entirely between gate

and source22 11

3 2gs gso oxXC C WLCX

− = + − −

22 113 2gd gdo oxC C WLC

X = + − −

Page 5: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

5Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

CGDO

n+source

n+drain

p-

gate

CGDO

n+source

n+drain

p-

gate

CGDO

n+source

n+drain

p-

gate

0GTV < 0, smallGT DSV V>

0, largeGT DSV V>

Gate Capacitance

Page 6: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

6Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

MOS Regions of Operation• Resistive Region

– For small VDS, FET is a linear resistor

• Nonlinear Region– Charge distribution nonuniform across channel– Less charge induced in proximity of drain

• Saturation Region– Channel is pinched off– Increase in VDS has little effect– Square-law behavior (wrt VGT)– Acts like a current source

Page 7: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

DS n ox GT DSWI C V VL

µ =

for DS GTV V<<

2

2DS

DS n GT DSVI V Vβ

= −

2

2GT

DS nVI β=

for DS GTV V<

for DS GTV V≥

Resistive Region

Saturation Region

MOS Current-Voltage Equations

Page 8: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

8Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

• Threshold voltage– Depends on equilibrium potential– Controlled by inversion in channel

• Body Effect– VT varies with bias between source and body– Leads to modulation of VT

Current-Voltage Characteristics

Page 9: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

9Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Body Effect

1/ 2 1/ 20( ) (2 ) (2 )T SB T F SB FV V V Vγ φ φ = + + −

ln aBF

i

Nk Tq n

φ

=

( )1/ 22 a

ox

qNC

γ =

Fermi potential of material

Body bias coefficient

Potential on substrate affects threshold voltage

Page 10: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

10Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

0

100

200

300

400

500

600

700

0 0.5 1 1.5 2 2.5

NMOS

VGS=1.0VGS=1.5VGS=2.0VGS=2.5

IDS

Vds

NMOS IV Curves

Page 11: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

11Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

nMOS Devices

• Enhancement Mode– Normally off & requires positive potential on gate– Good at passing low voltages– Cannot pass full VDD (pinch off)

• Depletion Mode– Normally on (negative threshold voltage)– Channel is implanted with positive ions (→VT )– Provides inverter with full output swings

Page 12: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

12Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Ω/square4Source and drain sheet resistanceRdiff

Ω/square4Gate sheet resistanceRpoly

fF/µm0.2Junction sidewall capacitanceCJSW

fF/µm20.5Junction capacitanceCJ

fF/µm0.1Gate source and drain overlap capacitanceCGSO,CGDO

fF/µm25Gate oxide capacitance per unit areaCox

µA/V250PFET process transconductancekp

µA/V2200NFET process transconductancekn

cm2/Vs100Hole mobilityµp

cm2/Vs400Electron mobilityµn

m/s1.7 × 105Saturation velocityVsat

V1/20.3Body effect parameterγ

V-10.1 Channel modulation parameterλ

V-0.5PFET threshold voltageVTp

V0.5NFET threshold voltageVTn

cm-32.5 × 1017Density of donor ions in PFET channelNd

cm-31.0 × 1017Density of acceptor ions in NFET channelNa

A70Gate oxide thicknesstox

µm0.25Device length (effective)Leff

µm0.35Device length (drawn)Ldrawn

UnitsValueDescriptionSymbolMOS SPICE Parameters

Page 13: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

13Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Body

CSB

CGS CGD CGB

CDB

RG

Gate

DrainSourceRS

MOS Parasitics

- Capacitance from gate to other 3 terminals- Diodes to body- Series resistance- Wiring parasitics

Page 14: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

14Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

-700

-600

-500

-400

-300

-200

-100

0

-2.5 -2 -1.5 -1 -0.5 0

PMOS

VGS=-1.0VGS=-1.5VGS=-2.0VGS=-2.5

VG

S=-

1.0

Vds

PMOS IV Curves

Page 15: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

15Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

p-

p+ p+

Gate oxideGateSource Drain

Field oxide

n+Channel

Well

PMOS Transistor

-700

-600

-500

-400

-300

-200

-100

0

-2.5 -2 -1.5 -1 -0.5 0

PMOS

VGS=-1.0VGS=-1.5VGS=-2.0VGS=-2.5

VG

S=-

1.0

Vds

- All polarities are reversed from nMOS- Hole mobility is lower ⇒ low transconductance- nMOS favored over pMOS

Page 16: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

16Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

p-

p+ p+n+

n+n+

inGND VDD

out

p-

Complementary MOS

in out

Page 17: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

17Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

CMOS• Advantages

– Virtually, no DC power consumed– No DC path between power and ground– Excellent noise margins (VOL=0, VOH=VDD)– Inverter has sharp transfer curve

• Drawbacks– Requires more transistors– Process is more complicated– pMOS size larger to achieve electrical symmetry– Latch up

Page 18: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

18Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

1 2V V V∆ = − 1 2I I I∆ = −

1 2

2CV VV +

= 1 2

2 2S

CII II +

= =

( )2

2 21 / 4

2 CTCT CTVI V V V V Vβ β∆ = + = + ∆ + ∆

( )2

2 22 / 4

2 CTCT CTVI V V V V Vβ β∆ = − = − ∆ + ∆

2 CTI V Vβ∆ = ∆

Source Coupled Pair

Page 19: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

19Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

( ) ( )2

0 0 2

DD DDV VDD

sw DD C DD C CCVE V V Idt V V CdV= − = − =∫ ∫

2sig cy sig DD sigP E f CV f= =

2 2DD tog DD D ckP CV f CV K f= =

C

Rn

RP

Power Dissipation in Static CMOS Gate Switching energy dissipated in 0-1 transition

Power dissipation

In terms of duty factor

Page 20: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

20Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Bipolar Junction Transistor

Page 21: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

21Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Peo

Pco

Wb0

nb(W)

nb(0)

nb

nbo

E B C

' '(0) ( )b b bC b

b

n n WI qADW−

=

q: electron chargeA: Effective area of E-B junctionDb: diffusion constant of electrons in base

BJT – Operating Principle

Page 22: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

22Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

CMOS vs Bipolar

• Current– Collector current inversely proportional to Wb– Drain current inversely proportional to L

• Topology– Base width is vertical defined by lithography– Channel length is horizontal defined by diffusion

• Behavior– Bipolar current is exponential– MOS current obeys square law

Page 23: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

23Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

BJT vs MOS

• Matching – VBEon for bipolar is determined by bandgap– VT on MOS is determined by tox and implant

⇒BJTs have superior current drive⇒BJTs switch faster than MOS⇒BJTs dissipate more power⇒BJTs have lower yield⇒BJTs are more costly

Page 24: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

24Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

• Speed– High electron mobility– Saturation velocity is reached at lower power

• Substrate– Larger bandgap than Si ⇒ semi insulating– SOI, Lower parasitics

• Optical Properties– Direct bandgap ⇒ LED, lasers– Integrate digital and optics on same IC

Gallium Arsenide Transistors

Page 25: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

25Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

• Physics– Low hole mobility– Low thermal conductivity– More defects and more fragile

• Process– No oxide ⇒ more complex process– Lower level of integration

• Cost– More expensive– Less mature technology

GaAs Limitations

Page 26: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

26Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Product

TechnologyToday

TechnologyFuture

Criterion

PA LNA Mixer VCO Filter Switch

SiGaAs

SiSiGe

SiSi

GaAs Si SiGaAs

InPGaAsSiGe

InPGaAs

InPGaAs

InPGaAs MEMS

InPGaAsMEMS

PAE,linearity

Low power Linearity,1/f noise 1/f noise High Q

Isolation,Insertion loss

RF Front End Technologies

Page 27: ECE 497 JS Lecture - 12 Device Technologiesjsa.ece.illinois.edu/ece497js/Lect_12.pdf · BJT vs MOS • Matching –V BEon for bipolar is determined by bandgap –V T on MOS is determined

27Copyright © by Jose E. Schutt-Aine , All Rights ReservedECE 497-JS, Spring 2004

Device Technologies for RF ApplicationsDevice Technologies for RF Applications

?858Max resolution (bits)

160???fT (GHz)

low> 10 V> 8 V< 10 Vbreakdown voltage

mediumlowhighdevice scaling

?negligible> 10 mVnegligiblehysteresis or backgating

?1 mV> 10 mV< 1 mVdevice matching

?50X150Xtransconductance

mediumlow?highthermal conductivity

0.31.4-0.8turn on voltage

mediumlow?highlinearity of DC current gain

lowlow-highcol-subst capacitance

highhigh?lowbeta-Early voltage product

lowlow?hightransit time

lowlow-highbase resistance

InP HBTGaAs HBTGaAs MESFETSi Bipolar