EasyGem

EasyGemEasyGem™2.4™2.4 Technology Summary for SECS Communication

Easy, Fast and Reliable Equipment FA Control Solution

EasyGem

Introduction

EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment

EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication

EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments.

CTCCTC

PMCPMC

PMCPMC

PMCPMC

PMCPMC

TMCTMC

Intra-tool Network

HOST

FAB Network

Machine

I/F

GEMGEM

Easycluster

EasyGem

Advantages

Easy to build : Defined using Configuration File or GUI

Easy to extend : GEM Definition options to change functionality. ( ex : 200mm <-> 300mm,

Increased Modules )

Easy to debug : Comprehensive history and communication data logfiles

( Host<->Gem, Gem<->Equip, Error, Debug Message file )

High Reliability and Flexibility : Multiple OEM installs in varied End User facilities

EasyGem

Features

200mm/300mm FA Scenario Support : 200mm -> Gem Scenario, 300mm -> Gem and Control/Process Job Scenario

Full Gem Scenario Support : Up to Spooling, Trace, Variable Limit Set/Monitor, Material Movement

Max 64 Process Module Support : PPID, CEID

User ID Definition : Maximum 3000 : ID => SVID,CEID,ECID,RCMD,ALID

TEPAS Support : TEPAS( Samsung : Total Equipment Prediction Analysis System )

1 TraceID has maximum 200 SVIDs, minimum 1sec sampling time and maximum 21 hundred million counts. At the same time 10 TraceID is supported

Variable and Flexible Option : User can configure Option as Fab Request and Equipment System,

EasyGem

User Configuration Files

ALID.cfg : Alarm ID Registry File( link with Equipment Alarm Number )

CEID.cfg : Collection Event ID Registry File( includes Kornic Provision Event )

ECID.cfg : Equipment Constant ID Registry File( link with Equipment Parameter IO )

SVID.cfg : Status Variable ID Registry File( link with Equipment Status IO )

RCMD.cfg : Remote Command Registry File( includes Kornic Default Command )

Recipe.cfg : Process Program ID Registry File( link with Process Module Recipe Item )

System.cfg : EasyGem Option Configuration File

EasyGem

Debugging Files

SECS Message Log File : All messages between Host and Equip. are saved. File is created at 1 hour intervals

Report/Event ID Log File : Can show ReportID/Event from host in GUI.

The information remains persistent, no need to reload

Equipment Execution Log File : Command and Event messages between Gem and Equipment

Gem Analysis Error Log File : If message from host has an error( syntax, format, reject situation ), the analysis error message is saved.

Communication History and Error Log File : Ethernet Port Open Fail and Host Communication Start/End Time

EasyGem

Architecture

Alarm Manager

System

CEID RCMD SVID PP Body

Configuration

IO Manager

Alarm Manager

CTC

Application1

Application2

GUI

PMC / TMC

GUI

IO Manager

Application2

.

.

.

Application1

Easycluster

H/W

Format

Unformat

Analysis

Event

Execution

Datagathering

Easycluster

EasyGem

Log File

SpoolingData

AnalysisDebug

EventLog

Log File

SECS2Message

CommDebug

CommunicationTask

Host

ALID

SECS2 Format UnFormat Task

EasyGem

System Requirements

Control System Pentium III or Higher, min. 128 MB RAM Monitor : SVGA (1,024 768) LAN Card

OS : Window NT 4.0 Workstation, Windows 2000, Windows XP

FA Pre-test Tool : SECSim Pro™ (GW Associates, Ver2.0)

EasyGem

Generic Equipment Model(GEM)

State Models: Process, Communication, Alarm, Control, Material Movement, Spooling

Establish Communications : Communication State Display in GUI, Timer Constants, Comm. Enable/Disable

Data Collection: Collection Event, Host Defined Event Reports, Event Enable/Disable, Status Data Collection, Trace Data Collection, Host Limit monitoring, Variable Name list Req.

Alarm Management: Set Alarm Enable/Disable/Auto/Semi, Alarm Reporting, Alarm Data Request

Remote Control: Control Event, Control Status Variable, State Display, Appropriately Accept/Deny

Equipment Constants: Non-Volatile Storage, Host Data Req. and New Data Set, EC Name List Request

EasyGem

Generic Equipment Model(GEM)

Process Program Management: Host Upload/Download/Delete/Directory request, Process Program Verification

Material Movement: Port/Wafer Status, Completion Time

Equipment Terminal Services: Single/Multi Block, Message Display in GUI

Error Messages: Unrecognized Device ID/Stream/Function, illegal Data, Transaction Timeout

Clock: Equipment Clock Request/Set

Spooling: Non-Volatile Storage, Spool Status and Display

EasyGem

Supported SEMI Standards

SEMI E5-0301 SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30-1000 Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E37-0298 High-Speed SECS Message Services (HSMS) Generic Services

SEMI E37.1-96E High-Speed SECS Message Services Single – Session Mode (HSMS-SS)

SEMI E39-0600 Object Services Standard : Concepts, Behavior, and Services (OSS)

SEMI E40-0301 Standard for Processing Management (PJM)

SEMI E42-0299E Recipe Management Standard: Concepts, Behavior, and Service(RMS)

SEMI E84-0301 Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO)

SEMI E87-0301 Provisional Specification for Carrier Management (CMS)

SEMI E90-0301 Specification for Substrate Tracking(STS)

SEMI E94-1000 Provisional Specification for Control Job Management(CJM)

SEMI E99-1000E The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

EasyGem

Supported Stream & Function Msgs.

Stream Primary Function

S1 F1,F3,F11,F13,F15,F17,F76

S2 F13,F15,F17,F23,F25,F29,F31,F33,F35,F37,F39,F41,F43,F45,F47

S3 F1,F3,F17,F23,F25

S5 F1,F3,F5,F7

S6 F1,F3,F9,F11,F23

S7 F1,F17,F19,F23,F25,F27,F29,F65

S9 F1,F3,F5,F7,F9,F11,F13

S10 F1,F3,F5,F9

S14 F1,F3,F9,F11

S16 F1,F5,F7,F9,F11,F13,F15,F17,F19,F21,F23,F25,F27,F29

S18 F5,F7,F9,F11,F13

EasyGem

Semi Standard Compliance( E5-0301/SEMI E30-1000/SEMI E39-0600 )

GEM COMPLIANCE STATEMENT

Fundamental GEM Requirements GEM Section Implemented GEM-Compliant

State Models 3.0, 3.1, 3.3 Yes No

Yes (See NOTE 1)No

Equipment Processing States 3.4 Yes No

Host-Initiated S1=F13/F14 Scenario 4.1.5.1 Yes No

Event Notification 4.2.1.1 Yes No

On-Line Identification 4.2.6 Yes No

Error Message 4.9 Yes No

Documentation 8.4 Yes No

Control ( Operation Initiated) 4.12(except 4.12.5.2) Yes No

Additional Capabilities ImplementedGEM-Compliant

(See NOTE 2)Establish Communications 4.1, 3.2 Yes No Yes No

Dynamic Event Report Configuration 4.2.1.2 Yes No Yes No

Variable Data Collection 4.2.2 Yes No Yes No

Trace Data Collection 4.2.3 Yes No Yes No

Status Data Collection 4.2.5 Yes No Yes No

Alarm Management 4.3 Yes No Yes No

Remote Control 4.4 Yes No Yes No

Equipment Constants 4.5 Yes No Yes No

Process Program Management 4.6 Yes No Yes No

Material Movement 4.7 Yes No Yes No

Equipment Terminal Services 4.8 Yes No Yes No

Clock 4.10 Yes No Yes No

Limits Monitoring 4.2.4 Yes No Yes No

Spooling 4.11 Yes No Yes No

Control (Host-Initiated) 4.12.5.1 Yes No Yes No

EasyGem

Semi Standard Compliance ( E40-0301 )

PM COMPLIANCE STATEMENT

Fundamental PM Requirements PM Section Implemented PM Compliant

Single Process Job Execution 8.2 Yes No Yes No

Process Job Milestones 8.2.1 (except 8.2.1.2, 3) Yes No Yes No

Process Job Failure Indication 8.2.1.7 Yes No Yes No

Abort Command 8.2.3.2 Yes No Yes No

Process Job Object Implementation 8.3, 9 Yes No Yes No

Reject Invalid/Incomplete Parameter 8.2.1.2.1 Yes No Yes No

Reject Unsupported Capabilities 11.2 Yes No Yes No

Services Implementation (not per Additional) 10 Yes No Yes No

Resource Pre/Post-conditioning   Yes No Yes No

Stop, Pause and Resume Commands 8.2.3.3, 4, 5 Yes No Yes No

Manual Process Start 8.2.3.9 Yes No Yes No

Process Job Queuing 8.3 Yes No Yes No

Process Tuning 7.5, 10.4.9 Yes No Yes No

Processing of Material Groups 7.6 Yes No Yes No

Multiple Concurrent Process Jobs 7.7 Yes No Yes No

Multiple Consecutive Process Jobs 7.8 Yes No Yes No

Process Job With No Material 7.9 Yes No Yes No

Event Notification 8.2.2 Yes No Yes No

Enhanced Job Creation 10.4.2 Yes No Yes No

Multiple Job Creation 10.4.3 Yes No Yes No

Duplicate Job Creation 10.4.4 Yes No Yes No

EasyGem

Semi Standard Compliance ( E87-0301 )

CMS COMPLIANCE STATEMENT

Fundamental CMS Requirements CMS Section Implemented CMS Compliant

Load Port Number 9.1 ■Yes No ■Yes No

Carrier Slot Number 9.2 ■Yes No ■Yes No

Load Port Transfer State Model 9.3 – 9.4.3 ■Yes No ■Yes No

Carrier Object Implementation 10 ■Yes No ■Yes No

Load Port Reservation State Model (internal buffer equipment)

12 Yes ■No Yes ■No

Load Port/Carrier Association State Model 13 ■Yes No ■Yes No

Carrier ID Verification Support 14.2 ■Yes No ■Yes No

Slot Map Verification Support 14.3 ■Yes No ■Yes No

Services Implementation 16 ■Yes No Yes ■No

Additional Events Implementation 18 ■Yes No Yes ■No

Variable Data Definitions 19 ■Yes No Yes ■No

Alarms Implementation 20 ■Yes No Yes ■No

Additional CMS Capabilities CMS Section Implemented CMS Compliant

Load Port Reservation State Model (fixed buffer equipment)

12 ■Yes No ■Yes No

Reservation Visible Signal 12.2 ■Yes No ■Yes No

EasyGem

Semi Standard Compliance ( E90-0301 )

STS COMPLIANCE STATEMENT

Fundamental STS Requirements

STS Section Implemented STS Compliant

Substrate Tracking 8 (except 8.4) ■Yes No ■Yes No

Substrate Object and State Model

9 ■Yes No ■Yes No

Substrate Location Object and State Model

10 ■Yes No ■Yes No

Service Message Implementation

11 ■Yes No ■Yes No

Variable Data 12 ■Yes No ■Yes No

Events 8.4 ■Yes No ■Yes No

Fundamental STS Requirements

STS Section Implemented STS Compliant

none      

EasyGem

Semi Standard Compliance ( E94-1000 )

CJM COMPLIANCE STATEMENT

Fundamental CJM Requirements

CJM Section Implemented CJM Compliant

Control Job Object 8 ■Yes No ■Yes No

Control Job State Model 9 ■Yes No ■Yes No

Control Job Queue Model 10 ■Yes No ■Yes No

Carrier Properties 11 ■Yes No ■Yes No

Service Message Implementation

12 ■Yes No ■Yes No

Variable Data 13 ■Yes No Yes ■No

Events 7.3.2 ■Yes No ■Yes No

Additional Requirements 14 ■Yes No Yes ■No

EasyGem

Related Screens ( Gem Communication )

EasyGem

Related Screens ( Gem Configuration )

EasyGem

Related Screens ( Host Communication )

EasyGem

Related Screens ( Job Manager )

EasyGem

EasyGem Install Base

Equipment Size Numbers Country/End UserControl Type

(SECS2,GEM,HSMS)

CVD

200mm 4 Korea/Samsung 200mm Gem Scenario

300mm 1 Taiwan/PSC 300mm Job Control Scenario

RTP 200mm 7 Korea/Samsung 200mm Gem Scenario

Asher 300mm 3Korea/Samsung

Taiwan/XXX

Korea : 200mm Extension Gem Scenario

Taiwan : 300mm Job Control Scenario

Track 200mm 5Korea/Dongboo

Taiwan/XXX200mm Gem Scenario