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次世代 銲線技術發展趨勢與現況 樂金公司 蔡幸樺

樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

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Page 1: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

次世代 銲線技術發展趨勢與現況

樂金公司 蔡幸樺

Page 2: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

LED封裝製程步驟

Page 3: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

四種高導電純金屬材料的物理特性比較

Page 4: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Ag-Au-Pd 合金銲線 (WT)

1. Manufacturing Method for Composite Alloy

Bonding Wire, US Patent 8,101,030B2(2012).

2. Composite Alloy Bonding Wire and

Manufacturing Method Thereof, US Patent

8,101,123B2(2012).

Page 5: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

含大量退火孿晶結構之Ag-Au-Pd合金線晶粒組織:(a)

縱切面,(b)橫截面

Page 6: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

INTERMETALLIC COMPOUNDS (IMC)

Page 7: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

INTERMETALLIC COMPOUNDS(IMC)

Page 8: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

INTERMETALLIC COMPOUNDS(IMC)

Page 9: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

INTERMETALLIC COMPOUNDS(IMC)

Page 10: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Thermal Stability of Grain Structure at 600 ℃

0min

Annealing Twinned Ag-8Au-3Pd Conventional Ag-8Au-3Pd

3min

30min

Page 11: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Thermal Stability of Grain Structure at 600 ℃

60min

90min

180min

Annealing Twinned Ag-8Au-3Pd Conventional Ag-8Au-3Pd

Page 12: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Thermal Stability of Grain Structure at 600 ℃

4N Au Wire

0min

3min

30min

60min

90min

180min

Page 13: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Thermal Stability of Grain Structure at 600 ℃

Pd coated Cu Cu

0min

3min

30min

Page 14: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Heat Affected Zones after EFO of (a) Annealing Twinned

Ag8Au3Pd and (b) Conventional Ag8Au3Pd Wires

Page 15: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Electric Current Stressing Tests

Innovative Ag8Au3Pd

3248~7072 minutes

Conventional Ag8Au3Pd

969~1930 minutes

Wire Diameter 17.5 mm, Current 0.3 A

Page 16: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

銀合金線在一般LED封裝打線接合作業後的第一球銲點(右)

與第二楔形銲點(左)

Page 17: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

銀合金線與純金線在LED封裝之接合強度比較

Page 18: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

純金線、銅鍍鈀線與銀金鈀合金線在LED封裝之打線接合製程良率(UPH)比較

Page 19: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

銀合金線在IC半導體封裝特殊疊球打線接合技術應用

Page 20: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

銀合金線在LED封裝特殊球/尾堆疊(BBOS)與

尾/球堆疊(BSOB)打線接合技術應用

Page 21: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

退火孿晶結構Ag-8Au-3Pd合金線與純金線在0605 LED

封裝之打線接合驗證

Page 22: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

純金線在0605 LED封裝驗證之打線接合作業參數(線徑0.8 mil)

Page 23: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

退火孿晶結構Ag-8Au-3Pd合金線在0605 LED封裝驗證之打線接合作業參數(線徑0.8 mil)

Page 24: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

退火孿晶結構Ag-8Au-3Pd合金線在0605 LED封裝打線接合驗證之第一球銲點與第二楔形銲點全貌

Page 25: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

退火孿晶結構Ag-8Au-3Pd合金線在0605 LED封裝打線接合驗證之第一球銲點厚度與銲線弧高

Page 26: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

純金線在0605 LED封裝驗證之打線接合強度(線徑0.8 mil)

Page 27: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

退火孿晶結構Ag-8Au-3Pd合金線在0605 LED封裝驗證之打線接合強度(線徑0.8 mil)

Page 28: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

退火孿晶結構Ag-8Au-3Pd合金線在0605 LED封裝驗證之打線接合品質檢測

Page 29: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

退火孿晶結構Ag-8Au-3Pd合金線在0605 LED封裝驗證之可靠度試驗

Page 30: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

銀合金線與純金線在 LED封裝之亮度(LOP)比較

LOP increase 3.2% !!!

Page 31: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Application in V-LAMP LED Package

Page 32: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Application in COB-LED Package

Page 33: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Applications in other LED Packages

Page 34: 樂金公司 蔡幸樺 - SEMICON Taiwan · 2018-06-11 · Ag-Au-Pd 合金銲線 (WT) 1. Manufacturing Method for Composite Alloy Bonding Wire, US Patent 8,101,030B2(2012). 2. Composite

Department of Materials Science and Engineering, National Taiwan University

Thank You for Your Attention !