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Dr. Victor Veliadis CTO and Interim Deputy Director PowerAmerica [email protected]

Dr. Victor Veliadis CTO and Interim Deputy Director ... · CTO and Interim Deputy Director PowerAmerica ... X-FAB is open 150-mm SiC Foundry fully integrated within a ... • Workforce

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Dr. Victor Veliadis CTO and Interim Deputy Director

PowerAmerica [email protected]

PowerAmerica is a U.S Department of Energy WBG Semiconductor Manufacturing Institute

•  The U.S Department of Energy launched the PowerAmerica Institute under the initiative of “National Network of Manufacturing Institutes (NNMI)” to commercialize Wide Band Gap (WBG) power devices.

•  PowerAmerica is located in Raleigh NC and is managed by North Carolina State University.

•  PowerAmerica is accelerating commercialization of wide bandgap semiconductor technologies by making them cost-competitive with silicon-based power electronics and reducing their perceived risk in industrial applications.

•  Through membership in the PowerAmerica ecosystem, industry members grow their business by accelerated wide bandgap product introduction to market, and University members gain by engaging in collaborative projects with industry.

PowerAmerica Supports TRL/MRL 4-7 Projects to Stimulate High-tech Manufacturing

TRL: Technology Readiness Level, MRL: Manufacturing Readiness Level

Benefits

Strategy

Mission

•  Highlight Performance Advantages of WBG Devices Stress high voltage at low resistance, and high temperature/frequency WBG device operational advantages over those of Si devices

•  Establish Reliability of WBG Devices Leverage Si Reliability best practices in developing WBG reliability standards

•  Demonstrate System Insertion Advantages of WBG Devices §  Develop packaging technology that allows for full WBG performance potential §  Establish WBG PE system smaller weight/volume and higher efficiency value proposition

through low additional overall system cost and life of system energy savings

•  Reduce Cost of WBG Devices (TRL 4-7) §  Leverage mature Si fabrication practices and qualify WBG specific processes to enable

multiple source high-yield volume manufacturing §  Train Workforce in WBG devices/modules/systems (short courses, University programs)

US Manufacturing Jobs Creation and Energy Savings through Accelerated Large scale Adoption of WBG Semiconductor Devices in Power Electronics Systems

Job Creation, Accelerated Technology Innovation, Energy Savings, Smaller Environmental footprint

PowerAmerica Strategy for Accelerated Large-scale Adoption of WBG Semiconductor Devices

•  Device  design  to  member’s  specifica4ons  and  applica4ons,  and  cost-­‐effec4ve  device  manufacturing  in  high  volume  US  fabs  

•  Device  design  trade  offs  op1mized  to  member’s  applica1on  and  reliability  requirements  •  Access  to  PA’s  baseline  MOSFET,  JBS,  and  MOS-­‐JBS  fabrica1on  recipes  •  Fabrica1on  processes  tailored  to  op1mize  member’s  device  performance  and  reliability  •  Manufacturing  at  150-­‐mm  WBG  high-­‐volume  manufacturing  centers    

•  Custom  tes4ng/reliability  and  module  development  •  Reliability  and  tes1ng  tailored  to  members  applica1on  requirements  •  Package  and  module  solu1ons  to  member’s  temperature/frequency/voltage  ra1ngs.  •  Applica1on  specific  circuit  topology  op1miza1on  for  maximum  efficiency  •  Failure  analysis  to  drive  device/circuit/module/system  op1miza1on    •  Insight  into  peripheral  technologies  (passives,  voltage  &  current  sensing,  gate  drives,  etc.)  

•  Timely  access  to  PowerAmerica  device  bank  engineering  samples    •  Short  lead  1mes  expedite  development  of  next  genera1on  offerings  

•  WBG  ecosystem  benefits  such  as  roadmaps,  industry  perspec4ves,  and  networking  opportuni4es  •  Roadmaps,  market  direc1on,  industry  perspec1ves,  problem  solving,  and  gaining  confidence  in  new  technologies  •  Networking  opportuni1es  and  expansion  of  client  base  through  PA  interac1on  and  events  •  Ability  to  influence  and  gain  from  shared  project  undertakings  within  PA  

•  Educa4on  and  Workforce  development,  including  access  to  short  courses,  highly  trained  personnel,  and  wide  bandgap  experts  

•  Workforce  training  (design,  fab,  test,  reliability,  packaging,  module,  circuit  topology,  system  inser1on)  through  university  programs  and  short  course  offerings  

•  Highly  WBG  trained  personnel  (graduate  students/post-­‐docs)  to  strengthen  member’s  workforce  •  Consul1ng  by  WBG  experts  

PA Provides Value to Members Through Acceleration of Their WBG Concept-to-Prototype Cycle

Industry  members  grow  their  business  by  accelerated  WBG  product  introduc1on  to  market  University  members  benefit  by  collabora1ng  with  industry  

PA is Strengthening WBG Power Electronics Programs at NCSU and Universities Across the US

NCSU: 8 New Graduate Courses / 8 Existing Graduate Courses Augmented with WBG (PowerAmerica Impact: Doubled our Capacity)

Date First

Offered

Actual/Average Enrollment

1 EEE 531 Semiconductor Device Theory I Existing 24

2 ECE 5244 Advanced Power Conversion Techniques (WBG added) Existing 25

3 ECE 5204 Power Semiconductor Devices (WBG added) Existing 25

4 ECE 5274 Modeling and Control of Three-Phase PWM Converter Existing 25

5 ECE 5254 Power Converter Modeling and Control Existing 25

6 ECE 5264 Embedded Power Management Existing 25

7 ECE 5234 EMI and Noise Reduction Techniques and Filter Design Existing 25

8 ECE 4224 Power Electronics Existing 25

9 ECE553 Spring 2016 Semiconductor Power Devices (WBG added) 2016 15

10 EEE572 Advanced Power Electronics (WBG added) 2015 61

11 EEE598 Renewable Electric Energy (WBG added) 2015 33

12 8 Online Video Modules on WBG – Short Courses or Supplementary Material 2015 50

13 ECE792-030 Wide Band Gap Semiconductor Power Devices (New Course) 2015 11

14 ECE739 Integrated Circuits Technology and Fabrication Laboratory 2013 15

15 ECE 592 Power Electronics Design & Packaging 2012 10

16 ECE 732 Dynamics and Control of Electric Machines 2012 20

Power electronics projects at Universities provide real world experience to the next generation of WBG Engineers: 44 undergrad, 38 grad, and 11 Post-doc full time trainees in BP2

Strategic PA Funding Allocation Accelerates Commercialization of WBG Power Electronics

PA Member Wolfspeed has a Highly Efficient Vertically Integrated WBG Manufacturing Model

•  $171M revenue (FY2016) •  2240 patents worldwide

•  323,000 sq. ft. of fabrication and office facilities •  Class 10, 100, and 1000 Clean Rooms

150-mm X-FAB Open SiC Foundry Exploits Existing Si Economy of Scale to Reduce SiC Manufacturing Cost

X-FAB/PowerAmerica Manufacturing Vision: Open SiC Foundry at the Economy Scale of Silicon

X-FAB is open 150-mm SiC Foundry fully integrated within a high volume 150-mm Si fab

•  Wafer fabrication dominated by fixed O/H costs (Management, Quality, EHS, IT) •  Economies of scale the greatest factor in reducing cost: Use the scale

established in Si to accelerate SiC

X-FAB SiC Users: ABB, GeneSiC, Monolith, USCi, Global Power, and NCSU

0

1

2

3

4

5

6

7

8

9

0 5 10 15

Drain  Cu

rren

t  (A)

Drain  Voltage  (V)

Vg=25V

Vg=20V

Vg=15V

Vg=10V

Vg=5V

Vg=0V

Specific on resistance: 5.5 mΩ-cm2 at 1 A, Vg=20V

MOSFET Active area is 4.5 mm2

PowerAmerica process yielded 1.2 kV MOSFETs in its first run

1.00E-­‐10

1.00E-­‐05

2.00E-­‐05

3.00E-­‐05

4.00E-­‐05

5.00E-­‐05

6.00E-­‐05

7.00E-­‐05

8.00E-­‐05

9.00E-­‐05

0 500 1000 1500Drain  Cu

rren

t  (A)

Drain  Voltage  (V)

PiN

MOSFET  (Vgs=0V)1.00E-­‐10

1.00E-­‐05

2.00E-­‐05

3.00E-­‐05

4.00E-­‐05

5.00E-­‐05

6.00E-­‐05

7.00E-­‐05

8.00E-­‐05

9.00E-­‐05

0 500 1000 1500

Drain  Cu

rren

t  (A)

Drain  Voltage  (V)

PiN

MOSFET  (Vgs=0V)

BV 1400V, Id@1200V=1uA

PowerAmerica is developing 3.3, 6.5, and 10 kV MOSFET and JBS Baseline Processes

PowerAmerica has Established Baseline Processes for 1200-V MOSFET and Diode SiC Fabrication at XFAB

PA Processes developed by Prof. Baliga of NCSU and Prof. Sung of SUNY

The PowerAmerica process yielded an integrated 1.2 kV MOSFET/JBS

0

1

2

3

4

5

6

7

8

9

0 5 10 15

Drain  Cu

rren

t  (A)

Drain  Voltage  (V)

Vg=25V

Vg=20V

Vg=15V

Vg=10V

Vg=5V

Vg=0V

JBSFET Active area is 4.5 mm2

JBSFET 3rd Q Behavior

PowerAmerica has Established a Baseline Process for 1.2 kV Monolithically Integrated SiC MOS-JBS Fabrication at XFAB

Specific on resistance: 12.5 mΩ-cm2 at 8 A, Vg=20V

PA Processes developed by Prof. Baliga of NCSU and Prof. Sung of SUNY

PowerAmerica is developing 3.3, 6.5, and 10 kV SiC MOS-JBS Baseline Processes

•  Interviewed numerous experts in the SiC and GaN communities

•  Convened an in-person workshop on June 22, 2016 in Raleigh, North Carolina with +50 attendees

•  Held a second virtual workshop with PowerAmerica working group members

•  Convened working group meetings to collect additional information and gather feedback on roadmap components

•  Reviewed more than 100 sources as part of a background literature review

SiC and GaN Technology Roadmaps Developed Through Expert Interviews and Literature Reviews

SiC Roadmap Identifies Markets & Applications at Each Voltage Node and Outlines Device Performance Requirements

Roadmap tables cover 0.65, 1.2, 1.7, 3.3, 6.5, 10, and 15 kV devices

GaN Roadmap Identifies Markets & Applications at Each Voltage Node and Outlines Device Performance Requirements

Performance Targets Budget Period

2016–2018 2019–2021 2022–2024 2025–2027

Device Type Lateral normally-off switch Lateral normally-off switch Lateral normally-off switch Lateral normally-off switch

Device Cost [$/A]

Device Voltage Rating [V]

Device Rated Current at 25/150oC [A]

Power [kW]

Frequency Range [kHz]

System Efficiency [%]

Packaging Form

Roadmap tables cover devices in the 100-1200 V range

In BP3 PowerAmerica will support: •  Cost-effective device manufacturing •  Module development •  Reliability and failure analysis •  Circuit applications •  Workforce training (short courses to be offered in 2017) •  Graduate Education •  Timely access to engineering samples through the device bank •  Roadmaps, market direction, industry perspectives, and

networking opportunities

The PowerAmerica Ecosystem is a Catalyst for the Commercialization of SiC and GaN PE