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Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major Polish R&D centre in the field of semiconductor electronics and physics with a focus on development of innovative micro- and nano- technologies and systems, and their applications in micro/nano- electronics, optoelectronics,

Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

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Page 1: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Dr Piotr Grabiec, prof. ITEDept. of Silicon Microsystem and Nanostructure Technol.

Instytut Technologii Elektronowej (ITE) Warsaw, Poland

ITE is a major Polish R&D centre in the field of semiconductor electronics and physics with a focus on development of innovative micro- and nano- technologies and systems, and their applications in micro/nano-electronics, optoelectronics, photonics and micro/nano-systems

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 2: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Investment in R&D is part of the solution to exit from the economic crises

Page 3: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Message to Poland

?

Page 4: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

After Josef Alois Schumpeter (1883-1950)

Research is transforming money into knowledge

Innovation is transforming knowledge into money

A good balance of both will create welfare

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 5: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Nanotechnology

Micro- and nanoelectronics,including semiconductors

Photonics

Advancedmaterials

Biotechnology

Communication COM(2009)512 of 30.9.2009

Advanced manufacturing Systems

KEY Enabling TechnologiesKEY Enabling Technologies

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 6: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

> $ 6,500B

$ 1,105BConsumer, Medical,

Transport, Security, Space

Telecom,

Internet, Broadcast

Cornerstone of

high-tech economyMaterials and equipment

Products

Services

Semiconductors $ 280B

$ 80B

The industry underpins 1/6 of the world economy

Source: Future Horizons Feb 2007Source: Future Horizons Feb 2007Estimated world market figures for 2007Estimated world market figures for 2007

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 7: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

7

More than Moore: Diversification

Mo

ore

’s L

aw:

Min

iatu

riza

tio

n

Bas

elin

e C

MO

S:

CP

U, M

emo

ry, L

og

ic

130nm

90nm

65nm

45nm

32nm

22nm

Beyond & Extended CMOS

Analog/RF Passives HV PowerSensors

ActuatorsBiochips

Information

Processing

Digital content

System-on-Chip

(SoC)

Interacting with people and environment

Non-digital content SoC & System-in-Package (SiP)

Combining SoC and SiP: Higher Value Systems

- Advanced components in advanced systems enabling pervasive applications -

NANOELECTRONICS – A Key Enabling TechnologyNANOELECTRONICS – A Key Enabling TechnologyResearch in Europe

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 8: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Year oscilatorsmicro-displ.

Micro-phones

micro-bolometers other

RF MEMS

Accele-rometrs

pressuresensors

Micro-fluidics

2010 17 4,5 201 253 207 262 1274 1360 757

2011 33 12,6 265 289 248 263 1371 1566 952

2012 60 65 326 312 312 297 1487 1744 1196

2013 106 122 368 338 397 354 1608 1960 1494

2014 178 215,5 421 400 540 494 1757 2222 1875

2015 282 307,5 480 478 706 649 1883 2415 2363

2016 416 460 573 569 857 814 2032 2557 2875

MEMS market forecast (Yole)

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 9: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Technology Readiness Level

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 10: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Technology Readiness Level

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 11: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

TRL Funding SourcesT

RL

Le v

e l

Investment

1

2

3

4

5

6

7

8

9

Low TRLM

id T

RL

High TRL

Gov’t Grants, Fed & Universities

R&D Projects, Family and Friends

Gov’t Grants, SBIRs, BAAs, Angels

Family and Friends

Angel Organizations, Early Stage Funds

Tier 1 VCs

$$? <$500K <$2M $2M - $20M+

Challenge:

Find New Emerging Funding Sources

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 12: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

12

Source: Preliminary HLG KET Report, Brussels, 09/02/2011

Technological facilities

Pilot linesDemonstrator

Globally competitive manufacturing facilities

KEY Enabling TechnologiesKEY Enabling TechnologiesObservations of the HLG – The ‘Valley of Death’

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 13: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Colaboration of the Research with Industry

Research institutions do not sell products. They sell trust, that the marketable product will be developed:

On time

Within budget

Within expected specification.

To meet demands of the industry it is required that research is equipped with:

Reliable, modern research infrastructure,

Best, highly skilled, talented researchers,

Adequate finacing,

Research marketing skill.

EKG Katowice, 15-05-2012 Piotr Grabiec

This is all about a trust

Page 14: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Basic research as % of total R&D expenditure, 2001

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 15: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

FP6 Integrated Project

1st Year finacial report

Structural funds POIG Project

Bureaucracy

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 16: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Bureaucracy

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 17: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Investing in education

• Develop multi-disciplinary education and new training schemes covering the More-Moore, More-Than-Moore and beyond CMOS domains –ENGINEERING SKILLS!

• Create greater public awareness of the societal benefits of advanced nanoelectronics research and industry in Europe

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 18: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Thank you for your attention

Page 19: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 20: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

From Micro- to nanoelectronics

Reduction of minimum feature size

(in micrometers) along the years.

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 21: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

World GDP as a function of time. Data published by De Long and Nordhaus, found in: Morten Tonnessen, The Future of Growth, TRAMES 2008, 12(62/57),2, 115-126

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 22: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 23: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

23

• Recommendation n°5: A strategic approach to KETs programmesThe High Level Group recommends that the European Commission defines and implements a strategic, industry driven and coordinated approach to KETs programmes and related policies across EC RDI funding programmes and instruments (CSF, ERDF).

• Recommendation n°6: Establish an appropriate set of rules to implement KETs programmesThe High Level Group recommends that the European Commission adapts its selection criteria and implementation rules in the CSF programme to maximise its impact on the value and innovation chains. In particular, a "value chain correctness" criterion should be added

• Recommendation n°7: Combined funding mechanismsThe High Level Group recommends that the EU should introduce a tripartite financing approach based on combined funding mechanisms involving Industry, Commission, and national authorities (Member States and local government), when required by the high costs of the KETs RDI projects, and put in place the appropriate program management and mechanisms to allow the combination of EU funding (CSF, structural funds), to enable the optimum investment in significant KET pilot line and manufacturing facilities across Europe.

• Recommendation n°8: KETs state aid provisionsThe High Level Group recommends that the EU adapts state aid provisions to facilitate RDI activities and large-scale investment in KETs, in particular through the introduction of a matching clause in the EU state aid framework across the board, review of the scaling-down mechanism for larger investments increased thresholds for notifications, faster procedures and the use of projects of common European interest.

KEY Enabling TechnologiesKEY Enabling TechnologiesRecommendations by the HLG

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 24: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

24

• Recommendation n°9: Globally competitive IP policy in EuropeThe High Level Group recommends that the selection criteria and terms of the consortium agreements of EU RDI funding programmes should be amended to ensure that participating consortia have a clear and explicit plan for both the ownership of and first exploitation of IP resulting from the project within the EU. It should explicitly include provisions similar to those of the “Bayh-Dole Act” and “Exception Circumstances”-like provisions to encourage the first exploitation and manufacturing of products based on this IP within the EU.

• Recommendation n°10: Build, strengthen and retain KETs skillsThe High Level Group recommends that the EU should create a European Technology Research Council (ETRC) to promote individual excellence in technologically focused engineering research and innovation and establish the appropriate framework conditions through the ESF regulation in order to support KETs skills capacity building at national and regional level.

• Recommendation n°11: A European KETs observatory and consultative body

The High Level Group recommends that the European Commission establishes a European KETs Observatory Monitoring Mechanism tasked with the mission of performing analysis and a “KETs Consultative Body” comprised of stakeholders across the entire innovation chain to advise and monitor the progress in Europe of the HLG KET recommendations towards the development and deployment of KETs for a competitive Europe this should include all relevant data regarding policies and strategies evolution

outside EU.

KEY Enabling TechnologiesKEY Enabling TechnologiesRecommendations by the HLG

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 25: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

As estimated by INTEL number of transistors sold in year 2003 has reached over 1018

1 000 000 000 000 000 000 pieces.

Which is 100 times more than estimated number of ants in the whole world!!!

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 26: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Prototype 128 x 128 channels, 2.4 2.4 cm

Radiation detector with integrated read-out electronics for medical applications - SUCIMA FP5 (Growth) project

Integration of the pixel detector and readout electronics in SOI substrate:Detector handle wafer

• High resistive (> 4 kcm, FZ, 300m)

• Conventional p+-nElectronics active layer

• Low resistive (9-13 cm, CZ, 1.5 m)

• Standard CMOS technology

EKG Katowice, 15-05-2012 Piotr Grabiec

Page 27: Dr Piotr Grabiec, prof. ITE Dept. of Silicon Microsystem and Nanostructure Technol. Instytut Technologii Elektronowej (ITE) Warsaw, Poland ITE is a major

Proc. of Topical Workshop on Electronics for Particle Physics (TWEPP-07), 3-7 Sep.

2007, Prague, Czech Republic

„Electronics and Sensor Study with the OKI SOI process”

by Yasuo Arai

KEK、 High Energy Accelerator Research Organization

Institute of Particle and Nuclear Studies 1-1 Oho, Tsukuba, Ibaraki 305-0801, JAPAN

….. Pioneering work for a SOI pixel detector has been done by the SUCIMA collaboration [17]. Unfortunately the technology used there was rather obsolete (CMOS 3 µm technology), and suffered from many technical problems. …

Radiation detector with integrated read-out electronics for medical applications - SUCIMA FP5 (Growth) project

EKG Katowice, 15-05-2012 Piotr Grabiec