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Cleanroom Product Range 3rd edition

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Page 1: doc.infoxmation.comdoc.infoxmation.com/xlk/auto/festo/xlk0000000000404.pdf · 2019. 10. 16. · 4 Cleanroom Product Range-subjected to change The cleanroom project initiated by Festo

Cleanroom Product Range

3rd edition

Page 2: doc.infoxmation.comdoc.infoxmation.com/xlk/auto/festo/xlk0000000000404.pdf · 2019. 10. 16. · 4 Cleanroom Product Range-subjected to change The cleanroom project initiated by Festo

2 Cleanroom Product Range-subjected to change

Cleanroom Product Range

Issue 01/06, 3rd edition

Printed on paper free of

chlorine and acids, for the

benefit of our environment.

All technical data applies at

the time of going to print. All

texts, representations,

illustrations and drawings

included in this catalogue are

the intellectual property of

Festo AG & Co., and are

protected by copyright law. All

rights re-served, including

translation rights. No part of

this publication may be

reproduced or transmitted in

any form or by any means,

electronic, mechanical,

photocopying or otherwise,

without the prior written

permission of Festo AG & Co.

All technical data subject to

change according to technical

update.

Festo AG & Co.

P.O. Box

D-73726 Esslingen, Germany

Ruiter Strasse 82

D-73734 Esslingen, Germany

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3 Cleanroom Product Range-subjected to change

Foreword

Cleanroom Product Range from Festo

Changes in industrial production

have also resulted in changes in

the prevailing environmental

conditions. The demand for

quality has risen and the

reduction of costs has now

become the essential criterion.

Cleanroom production offers

considerable potential

here – as long as it is used

properly.

The more sensitive the item to be

produced, the “cleaner” the

production method required.

Production in cleanroom or using

cleanroom technology has

become increasingly popular.

However, it is not always

immediately obvious what

is actually behind it, never mind

how it should be used. Even the

concepts used to describe it are

often difficult to understand and

unclear.

Let us start with the concept of

the cleanroom. The only possible

method of cleanroom comparison

is based on the number of

airborne particles relative to a

volume equivalent. The VDI

Guideline 2083, the ISO 14644-1

and the US Federal Standard

209E have made a start by

defining international standards

for cleanliness classes.

One of the main factors that

influences air cleanliness is the

equipment installed in a

cleanroom. As a supplier of

automation expertise Festo has

been concerned with this subject

for over ten years. Back then the

number of customers in this

specialized area was small. That

has since changed.

The propagation of high-tech

chip development facilities, for

example, has resulted in a clear

increase in cleanroom

production.

Festo pneumatic products that

are suitable for used in

cleanroom ISO class 4

(FS209E class 10) and ISO

class 5 (FS209E class 100)

This catalogue cover both

standard Festo pneumatic

products and products that are

slightly modified to meet the

stringent requirements of

cleanroom ISO class 4 and

cleanroom ISO class 5 (i.e. US

Federal Standard 209E, class

10 and class 100).

Generally these products are

classified in the following

categories:

– Type RR: Are standard

product that are clean and

pack. Ready for cleanroom

application or replacement

– Type RR-SA: Are products

with slight modification

(usually come with a vacuum

suction port). They are clean

and pack, ready for

cleanroom application or

replacement

All the products in this

catalogue are tested and

certified that the particle

emission level are within the

guideline and test procedures,

as stated in Chapter 4.

The products are then cleaned

and double packed before

in-house sending to the user.

The user is advised to remove

the first layer of packaging

in a clean area and the final

packaging inside the

cleanroom.

Festo pneumatic products that

are suitable for cleanroom ISO

class 6 (FS209E class 1000)

These standard products,

without any modification

needed, are tested and found

to be suitable for cleanroom

ISO class 6 (i.e. US Federal

Standard 209E class 1000).

Since they are standard

products, they can be order at

any Festo companies.

They are available in standard

packaging, the user are advice

to clean them before

introducing them into the

cleanroom.

The detail information of these

cleanroom ISO class 6 products

can be obtain on the CD-ROM

catalogue or any Festo

catalogue and brochure that

bears the information of the

products. User can also obtain

the necessary information on

the website: www.Festo.com

User are advice to use this

catalogue together with the

handbook “Fundamentals of

Cleanroom Technology”, part

no: 54078GB to gain more in

depth with cleanroom

technologies and qualifying

products for cleanroom

applications. The handbook

is available in all Festo

companies, worldwide.

What are the points to bear

in mind when using Festo

Cleanroom product range?

The specified values for

pressures, speeds, loads, lateral

forces, actuating forces, voltages,

magnetic fields and temperatures

should be adhered to at all times

and at any operational note

observed by the user to ensure

the correct functioning of the

equipment.

What are the points to bear

in mind when using this

catalogue?

All texts, representations,

illustrations and drawings

included in this publication are

the intellectual property of

Festo AG & Co., and are protected

by copyright law.

All rights reserved, including

translation rights. No part of this

publication may be reproduced or

transmitted in any form or by any

means, electronic, mechanical,

photocopying or otherwise,

without the prior written

permission of Festo AG & Co. All

technical data subject to change

according to technical update.

Festo AG & Co. shall not be held

liable for any damage, loss of

profit, consequential loss and/or

any other financial or technical

problems arising out of or in

connection with the use of the

products in this catalogue, if such

use is not in accordance within

the technical specification, the

manual and/or description in this

catalogue or in any other cases of

misuse of the products.

We wish you much success with

the Festo cleanroom product

range.

The Editor

Festo cleanroom product team

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4 Cleanroom Product Range-subjected to change

The cleanroom project initiated

by Festo is a collaboration among

Fraunhofer Institute for

Manufacturing Engineering and

Automation in Germany, Nanyang

Polytechnic (NYP) of Singapore

and Festo Singapore.

The objective is to work together

in the field of particle emission of

Festo products.

Furthermore, it is Festo’s

intention to improve the

experience in the field of particle

measurements, contamination

control as well as cleanroom

applications in general.

Introduction The Festo cleanroom project– a collaboration amongst 3 parties

Cleanroom Product Range from Festo AG & Co

Festo is doing the measure-

ment according the VDI 2083-8

guideline which is described on

page 133 and the following

pages. Fraunhofer Institute

approved this measurement

principle and attested this in a

‘Certificate of qualification’.

The certification covers: The

support for the performance of

testing the cleanroom suitabil-

ity of pneumatic components of

the company Festo AG & Co.

A sample of the product test

certificate, DGPL double acting

rodless cylinder is displayed.

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5 Cleanroom Product Range-subjected to change

Cleanroom Product Range Contents Overview

Introduction to cleanroom International standard of cleanroom Basic principles for designing cleanroom equipment Qualifying equipment for cleanroom used Measurement of airborne particle in cleanroom

The principle of measuring contamination level of pneumatic components Festo cleanroom project Test procedure of cleanroom components Conditions at which components are tested Benefits of Festo cleanroom components

Information

4 124 125 127 128 129

130 131 132 136 138

Drives

1 Compact cylinders ADVU-…-RR-SA Standard cylinder ADN-…-RR-SA ISO standard cylinders CDN-…-RR-SA Twin piston rotary actuators DRQD-…-ZW-RR (spigot) Twin piston rotary actuators DRQD-…--FW-RR (Flange) ISO standard cylinders DSNU-…-RR-SA Guided drives DFM-KF-RR-SA Precision gripper HGPP-RR-SA T-slot parallel gripper HGPT-…-RR

T-slot 3 point gripper HGDT-…-RR Proximity sensors, SME-8-…-RR, SMT-8-…-RR Pneumatic linear, rodless cylinder DGPL-…-RR-SA Pneumatic rodless cylinder DGC-…-RR-SA Clamping modules EV-…-RR Mini rotary actuator DRQD-…-J20-...-RR ISO standard cylinders DNC-…-RR-SA Mini slide SLT-RR-SA Linear/Swivel clamp CLR-RR-SA Electromechanical drive DGE-…-ZR-RR-SA Electromechanical drive DGE-…-SP-RR-SA Fluid muscle MAS-…-RR

14 16 18 20 20 26 30 34 36

- 40 42 45 48 49 52 54 58 60 63 66

Valves

2 Miniature valves MH...1-…-RR High speed valve MHE2-…-RR CP individual valve CPA-SC-…-RR CP valve terminal CPA-SC-…-RR CPE individual valve CPE-RR

Clean design valve terminal CDVI-…-RR Flow control valves GRL…-…-RR Corrosion resistant flow control valves CRGRLA-...RR Flow control valves GR-…-RR

70 74 76 78 80

84 86 86 88

Air preparation & accessories

3 Filter for D-Micro series LF-…-5M-Micro-RR Microfilter LFMA-…-RR, LFMB-…-RR, LFMBA-…-RR Manual on/off valves HE-…-RR Precision regulator LRP-…-RR-SA, gauge MAP-…-RR Regulator for D-Micro series LR-…-Micro-RR-SA Branching modules FRZ-…-RR, FRM-…-RR Filter regulator D-Micro series LFR-…-Micro-RR-SA Filter regulator LFR-…-RR-SA

Corrosion resistant air reservoir CRVZS-…-RR Tubing PUN-…-RR Fitting series QS-F-…-RR Fitting series CK-…-RR Sealing rings OL-…-RR Pressure sensor SDE5-…-RR Vacuum generator VN-…-RR

90 92 96 97 98 100 102 104

106 108 109 114 118 119 120

Festo Worldwide

5 Sales and service network The company

The history

139 140

0 Table of content

Drives for cleanroom ISO class 4 Drives for cleanroom ISO class 4 and 5 Valves for cleanroom ISO class 4 and 5

Flow control valve ISO class 4 Air preparation units for cleanroom ISO class 4, 5 Fitting and accessories for cleanroom ISO class 4

06 07 08

09 10 12

141

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6 Cleanroom Product Range-subjected to change

Table of content Drives

Drives for cleanroom ISO Class 4 (FS209E class 10)

Type Function Piston Ø (mm) Stroke (mm) Variant Cleanroom Page

ADVU-…-RR-SA

Compact cylinder

16, 20, 25 32, 40

1...100 1...200

P-A: Internal rod thread A-P-A: External rod thread

ISO 4 (FS209E class 10)

14

ADN-…-RR-SA

Standard cylinder

12, 16, 20, 25 32, 40, 50

1...100 1...200

I-P-A: Internal rod thread A-P-A: External rod thread

ISO 4 (FS209E class 10)

16

CDN-…-RR-SA

ISO standard, double acting cylinder

32, 40, 50 10...500 PPV: Adj. cushioning AIB-SME: End position reed sensors integrated at both ends

ISO 4 (FS209E class 10)

18

DRQD-…-ZW-RR DRQD-…-FW-RR

Rotary actuator with spigot or flange

16, 20, 25, 32 90°, 180, 360°

PPV: Adj. cushioning YSRJ: Hydraulic cushioning AL, AR: air on left or right

ISO 4 (FS209E class 10)

20

DSNU-…-RR-SA DSNU-…-MQ- RR-SA DSNU-…-MA- RR-SA

ISO standard, double acting cylinder

8, 10 12, 16 20 25, 32, 40, 50, 63

10...100 10...200 10...320 10...500 10...500

P-A: Damping and magnetic sensing PPV-A: Adj. cushioning magnetic sensing MQ: Lateral port MA: Axial port

ISO 4 (FS209E class 10)

26

HGPP-…-RR-SA

Precision parallel gripper

10 12 16 20 25

2.0 2.5 5.0 7.5 10.0

- ISO 4 (FS209E class 10)

34

SME-8-…-RR SME-10-…-RR

Proximity sensor for cylinders

- - Contact type With cable With plug

ISO 4 (FS209E class 10)

40

HGPT-…-A-RR

T-slot parallel gripper

16 20 25 35

3.0 4.0 6.0 8.0

- ISO 4 (FS209E class 10)

36

HGDT-…-A-RR

T-slot 3 point gripper

25 35

6 8

- ISO 5 (FS209E class 100)

Avail-able soon

DFM-…-KF-RR-SA

Guided drives

12, 16 20, 25

10...100 20...100

KF: With recirculating ball bearing guide

ISO 4 (FS209E class 10)

30

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7 Cleanroom Product Range-subjected to change

Table of content Drives

Drives for cleanroom ISO Class 4 and 5(FS209E class 10 and class 100)

Type Function Piston Ø (mm) Stroke (mm) Variant Cleanroom Page

DGPL-…-KF- RR-SA

Double acting linear, rodless cylinder

25, 32, 40 10...1000 KF: With recirculating ball bearing guide

ISO 4 or 5 (FS209E class 10 or 100)

42

DGC-12-…-KF-YSR-A-RR-SA DGC-…-KF-PPV-A-RR-SA

Double acting linear, rodless cylinder

12 18, 25, 32, 40

10...1000 10...1000

KF: With recirculating ball bearing guide YSR: With self-adj. shock absorber PPV: Adj. cushioning

ISO 5 (FS209E class 100)

45

EV-…-RR

Single acting clamping module

12 16, 20, 25 32, 40, 50, 63

3 4 5

- ISO 5 (FS209E class 100)

48

DRQD-…-J20-A-ZW-ZS-RR DRQD-…-J20-A-FW-ZS-RR

Mini rotary actuator with spigot or flange

6, 8, 12 90°, 180 ° J20: Adjusting range at end; +6°/-20° ZW: Spigot shaft FW: Flange

ISO 5 (FS209E class 100)

49

DNC-…-RR-SA

ISO standard, double acting cylinder

32, 40, 50 10...500 PPV: Adj. cushioning PPV-A: Adj. cushioning and magnetic sensing

ISO 5 (FS209E class 100)

52

SLT-…-A-CC-B-RR-SA

Mini slide 10, 16, 20, 25 30, 40, 50, 80, 100

CC-B: Damping with self -adj shock absorber

ISO 5 (FS209E class 100)

54

CLR-…-RR-SA

Linear/swivel clamp

12, 16, 20, 25 10, 20 R: Swivel motion to right L: Swivel motion to left

ISO 5 (FS209E class 100)

58

Electromechanical drives

DGE-...-ZR-LK-RV-KG-KF- RR-SA

Electromechanical axis Tooth belt drives

25, 40 100...1000 ZR: Tooth belt drive LK: No drive on left RV: Drive shaft on right, front KG: Drive come with coupling housing KF: With recirculating ball bearing guide

ISO 4 or 5 (FS209E class 10 or 100)

60

DGE-...-SP-KG-KF-RR-SA

Electromechanical axis Spindle drive

25, 40 100...1000 SP: Spindle drive KG: Drive come with coupling housing KF: With recirculating ball bearing guide

ISO 4 or 5 (FS209E class 10 or 100)

63

Fluid muscle

MAS-…-RR

Tensile actuator

10, 20, 40 Nominal length: 40...4500

Muscle open at both ends Muscle open at one end

ISO 4 (FS209E class 10)

66

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8 Cleanroom Product Range-subjected to change

Type Valve function Width (mm) Connections Flowrate (l/min) Cleanroom Page

Micro valves and High speed valve

MHP1-…-RR

In-line valve 3/2 way, NO 3/2 way, NC Single solenoid Individual connection Manifold mounting

10 M3 10 ISO 4 (FS209E class 10)

70

MHA1-…-RR

Sub-base valve 3/2 way, NO 3/2 way, NC Single solenoid Individual connection Manifold mounting

10 M3 10 ISO 4 (FS209E class 10)

70

Compact performance valve

CPA-SC-…-RR

2 x 2/2 way, NC 1 x 3/2 way, with ext. air supply 2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid

10 M5 150 ISO 4 (FS209E class 10)

76

CPA-SC-…-RR

2 x 2/2 way, NC 1 x 3/2 way, with ext. air supply 2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid

10 Port 1, 3, 5: G1/8 Port 12, 14, 82, 84: M5 Port 2, 4: M5

150 ISO 4 (FS209E class 10)

78

Clean design valve terminal

CDVI-…-RR

2 x 3/2 way, NO 2 x 3/2 way, NC 2 x 3/2 way, NO & NC 5/2 way 5/3 way Single solenoid Double solenoid

24 Port 1, 3, 5: G3/8 Port 12, 14, 82, 84: G1/8 Port 2, 4: G1/8

300...650 ISO 5 (FS209E class 100)

84

MHE2-…-RR

Individual valve 3/2 way, NO 3/2 way, NC 5/2 way Single solenoid With molded-in cable or plug Switching time 2 ms or 7 ms

10 M7 100 ISO 4 (FS209E class 10)

74

CPE-RR

3/2 way 5/2 way 5/3 way Single solenoid Double solenoid Individual connection

Micro 10 Mini 14

M5 M7 G1/8

180...800 ISO 5 (FS209E class 100)

80

Table of content Valves

Valves for cleanroom ISO Class 4 and 5(FS209E class 10, class 100)

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9 Cleanroom Product Range-subjected to change

Type Valve function Width (mm) Connections Flowrate (l/min) Cleanroom Page

Flow control valve

GRLA-…-D-RR GRLA-…-RS-D-RR

Throttle out with check valve

- M5 G1/8 G1/4 G3/8

0...820 ISO 4 (FS209E class 10)

86

CRGRLA-…-RR

Throttle out with check valve

- M5 G1/8 G1/4

0...610 ISO 4 (FS209E class 10)

86

GR-…-RR GRA-…-RR

In-line - M3 M5 G1/8 G1/4

0...420 ISO 4 (FS209E class 10)

88

Table of content Valves

Flow control valves for cleanroom ISO Class 4 FS209E class 10)

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10 Cleanroom Product Range-subjected to change

Table of content Air preparation units

Air preparation units for cleanroom ISO Class 4 (FS209E class 10)

Type Features Connections Variants Specifications Cleanroom Page

Filter for D-Micro series

LF-…-5M-Micro-RR

5.0 µm M5 M7 G1/8

MICRO (M5, M7, G1/8)

170...280 l/min ISO 4 (FS209E class 10)

90

Micro filter

LFMA-…-RR LFMB-…-RR LFMBA-…-RR

0.01 µm 1.0 µm Combine both sizes

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

130...950 l/min 250...1250 l/min 125...600 l/min

ISO 4 (FS209E class 10)

92

Manual on/off valve

HE-…-RR

Twist knob for on/off Lockable

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

1000...6500 l/min ISO 4 (FS209E class 10)

96

Precision regulator

LRP-…-RR-SA

With diaphragm pilot control

G1/4 0,7 2,5 4 10

0.05...0.7 bar 0.05...2.5 bar 0.05...4 bar 0.1...10 bar

ISO 4 (FS209E class 10)

97

Precision gauge

MAP-…-RR

Ø 40 mm G1/8 1 4 6 16

0...1 bar 0...4 bar 0...6 bar 0...16 bar

ISO 4 (FS209E class 10)

97

Regulator for D-Micro series

LR-…-Micro-RR-SA

Locking at the rotary knob

M5 M7 G1/8

MICRO (M5, M7, G1/8)

120...300 l/min ISO 4 (FS209E class 10)

98

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11 Cleanroom Product Range-subjected to change

Table of content Air preparation units

Air preparation units for cleanroom ISO Class 4 and 5 (FS209E class 10 and class 100)

Type Features Connections Variants Specifications Cleanroom Page

Branching module

FRZ-…-RR FRM-…-RR FRM-H-…-RR

With or without check valve

M5 G1/8 G1/4 G3/8 G1/2 G3/4

MICRO (M5) MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

210...580 l/min 1300...17400 l/min

ISO 4 (FS209E class 10)

100

Filter regulator for D-Micro series

LFR-…-MICRO-RR-SA

Locking at the rotary knob

M5 M7 G1/8

MICRO (M5, M7, G1/8)

110...280 l/min

ISO 5 (FS209E class 100)

102

Filter regulator

LFR-…-RR-SA

Turn knob to adjust pressure

G1/8 G1/4 G3/8 G1/2 G3/4

MINI (1/8, 1/4, 3/8) MIDI (1/4, 3/8, 1/2, 3/4) MAXI (1/2, 3/4, 1)

750...10000 l/min ISO 5 (FS209E class 100)

104

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12 Cleanroom Product Range-subjected to change

Table of content Fitting and accessories

Fitting and accessories for cleanroom ISO Class 4 (FS209E class 10)

Type Features Connections Specification Material Cleanroom Page

Air reservoir

CRVZS-…-RR Capacity: 0.1l 0.4l 0.75l 2.0l 5.0l 10.0l

G1/8 G1/4 G1/2 G3/8 G1

Operating pressure: -0.95…+16 bar

X5CrNi18 10

ISO 4 (FS209E class 10)

106

Tubing

PUN-…-RR Type: 3 4 6 8 10

Outside Ø: 3.0 mm 4.0 mm 6.0 mm 8.0 mm 10.0 mm

Inside Ø: 2.1 mm 2.6 mm 4.0 mm 5.7 mm 7.0 mm

Polyurethane in colour: BL: Blue SW: Black

ISO 4 (FS209E class 10)

108

Fitting

QS-F-…-RR Push in fitting range, O.D. of tube calibrated

For thread: M5 G1/8 G1/4 G3/8

Can be connected with PUN tubing

Brass fitting, nickel plated.

ISO 4 (FS209E class 10)

109

CK-…-RR Quick connector range, I.D. of tube calibrated

For thread: M5 G1/8 G1/4 G3/8

Can be connected with PUN tubing

Die-cast zinc and Aluminum, blue anodised

ISO 4 (FS209E class 10)

114

Sealing ring

OL-…-RR O-ring for sealing connection

For thread: M5 G1/8 G1/4 G3/8 G1/2 G3/4

Max. tightening: 2 Nm 4 Nm 11 Nm 40 Nm 50 Nm 100 Nm

Stainless steel Aluminum NBR

ISO 4 (FS209E class 10)

118

Sensor

SDE5- D10-…-RR SDE5- V1-…-RR

Pressure switch Vacuum switch

QS-3 QS-4 QS-6

0...10 bar -1...0 bar

Polymer ISO 4 (FS209E class 10)

119

Vacuum generator

VN-…-RR High vacuum High suction volume flow

G1/8 G1/4

-0.8 bar -0.5 bar

Polymer ISO 4 (FS209E class 10)

120

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13 Cleanroom Product Range-subjected to change

Drives

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14 Cleanroom Product Range-subjected to change

Double acting cylinder with

flexible cushioning rings in the

end positions and contact-less

sensing. The cylinder come with

internal piston rod thread.

ADVU-…-P-A-RR-SA

Double acting cylinder with

flexible cushioning rings in the

end positions and contact-less

sensing. The cylinder come with

external piston rod thread.

ADVU-…-A-P-A-RR-SA

Swivel flange

Ø 16, 20, 25, 32, 40

SUA-…

Compact cylinders ADVU

permit space saving of 50% in

comparison with standard

cylinder of similar power

while offering the same force

As with all standard drives, the

proximity sensor SME-8 can be

used in the profile slot in the

compact cylinder

Order example:

Order no: 15024226

Type: ADVU-25-80-P-A-RR-SA

Double acting cylinder, diame-

ter 25 mm, stroke 80 mm with

internal piston rod thread.

Accessories

Proximity sensor for fitting

in 8 mm slot (Page 40)

SME-8...

Mounting options

Foot mounting

Ø 16, 20, 25, 32, 40

HUA-…

Flange mounting

Ø 16, 20, 25, 32, 40

FUA-…

Cleanroom class ISO 4 (FS209E class 10)

Compact cylinders ADVU-…-RR-SA Ø 16, 20, 25, 32, 40, stroke 1 to 200 mm

Type Part No. Type Part No. Piston Ø Stroke Thrust at 6 bar Return force Connection

[Internal rod thread] [external rod thread] [mm] [mm] [N] [N]

ADVU-16-…-P-A-RR-SA 15024223 ADVU-16-…-A-P-A-RR-SA 15024230 16 1 … 100 121 90 M5

ADVU-20-…-P-A-RR-SA 15024225 ADVU-20-…-A-P-A-RR-SA 15024231 20 1 … 100 188 141 M5

ADVU-25-…-P-A-RR-SA 15024226 ADVU-25-…-A-P-A-RR-SA 15024233 25 1 … 100 295 247 M5

ADVU-32-…-P-A-RR-SA 15024227 ADVU-32-…-A-P-A-RR-SA 15024234 32 1 … 200 483 415 G1/8

ADVU-40-…-P-A-RR-SA 15024228 ADVU-40-…-A-P-A-RR-SA 15024235 40 1 … 200 754 686 G1/8

Technical data

Medium Compressed air, filtered (lubricated or unlubricated)

Max. operating pressure 10 bar

Temperature range –20 ... +80 °C (note operating range of proximity sensor)

Cylinder barrel and cover Wrought aluminium alloy

Piston rod High alloy stainless steel

Seals Polyurethane

Materials

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15 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Compact cylinders ADVU-…-RR-SA Ø 16, 20, 25, 32, 40, stroke 1 to 200 mm

Ø BG D1 D2 E EE G1 H L2 L3 L4 MM PL PL1 RT T2 TG ZJ ß1

[mm] Ø H9 Ø Ø – 0.2 h13

16 18.5 6 6 29 M5 10 1 48 3 16 8 8 5 M4 4 18 52.5 7

20 18.5 6 7 36 M5 10 1.5 48 4 18 10 8 5 M5 4 22 52.5 9

25 18.5 6 7 40 M5 10 1.5 49.5 4 18 10 8 5 M5 4 26 55 9

32 21.5 6 8 50 G1/8 14 2 58.5 5 20 12 8 7 M6 4 32 64.5 10

40 21.5 6 8 60 G1/8 14 2.5 59.5 5 20 12 8 7 M6 4 42 66 10

Ø AF AM KF KK T4 WH ZJ

[mm]

16 10 20 M4 M8 1.5 4.5 52.5

20 12 22 M5 M10x1.25 2 4.5 52.5

25 12 22 M5 M10x1.25 2 5.5 55

32 14 22 M6 M10x1.25 2.6 6 64.5

40 14 22 M6 M10x1.25 2.6 6.5 66

1

2

+ = plus stroke length

ADVU-…-P-A-RR-SA version

with internal rod thread

ADVU-…-A-P-A-RR-SA version

with external rod thread

Vacuum suction port

Minimum screw in depth

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16 Cleanroom Product Range-subjected to change

Double acting cylinder with

flexible cushioning rings in the

end positions and contact-less

sensing. The cylinder come with

internal piston rod thread.

ADN-…-I-P-A-RR-SA

Double acting cylinder with

flexible cushioning rings in the

end positions and contact-less

sensing. The cylinder come with

external piston rod thread.

ADN-…-A-P-A-RR-SA

Series ADN/AEN standard

cylinders comply with the

standard ISO 21 287.

Swivel flange

Ø 12, 16, 20, 25, 32, 40, 50

SNCL-…

Swivel flange

Ø 32, 40, 50

SNCB-…

Flexible cushioning rings as

standard for absorbing the

residual energy facilitate high

speeds and machine cycles.

Long service life thanks to

exceptional cushioning

characteristics and minimal

friction factors

Order example:

Order no: 15083521

Type: ADN-25-80-A-P-A-RR-SA

Double acting cylinder, diame-

ter 25 mm, stroke 80 mm with

external piston rod thread.

Accessories

Proximity sensor for fitting

in 8 mm slot (Page 40)

SME-8...

Mounting options

Foot mounting

Ø 12, 16, 20, 25, 32, 40, 50

HNA-…

Flange mounting

Ø 12, 16, 20, 25, 32, 40, 50

FNC-…

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders ADN-…-RR-SA Ø 12, 16, 20, 25, 32, 40, 50 stroke 1 to 200 mm

Type Part No. Type Part No. Piston Ø Stroke Thrust at 6 bar Return force Connection

[Internal rod thread] [external rod thread] [mm] [mm] [N] [N]

ADN-12-…-I-P-A-RR-SA 15083511 ADN-12-…-A-P-A-RR-SA 15083518 12 1 … 100 68 51 M5

ADN-16-…-I-P-A-RR-SA 15083512 ADN-16-…-A-P-A-RR-SA 15083519 16 1 … 100 121 90 M5

ADN-20-…-I-P-A-RR-SA 15083513 ADN-20-…-A-P-A-RR-SA 15083520 20 1 … 100 188 141 M5

ADN-25-…-I-P-A-RR-SA 15083514 ADN-25-…-A-P-A-RR-SA 15083521 25 1 … 100 295 247 M5

ADN-32-…-I-P-A-RR-SA 15083515 ADN-32-…-A-P-A-RR-SA 15083522 32 1 … 200 483 415 G1/8

ADN-40-…-I-P-A-RR-SA 15083516 ADN-40-…-A-P-A-RR-SA 15083523 40 1 … 200 754 686 G1/8

ADN-50-…-I-P-A-RR-SA 15083517 ADN-50-…-A-P-A-RR-SA 15083524 50 1 … 200 1178 1057 G1/8

Technical data

Medium Compressed air, filtered (lubricated or unlubricated)

Max. operating pressure 10 bar

Temperature range –20 ... +80 °C (note operating range of proximity sensor)

Cylinder barrel and cover Smooth anodised aluminium

Piston rod High alloy steel

Seals Polyurethane

Materials

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17 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders ADN-…-RR-SA Ø 12, 16, 20, 25, 32, 40, 50 stroke 1 to 200 mm

Ø 12… Ø 25 mm Ø 32… Ø 50 mm

Ø BG D1 D5 E EE G G1 J3 L2 L3 L4 MM PL1 PL RT T2 TG ZJ+ ß1

[mm] Ø H9 Ø F9 max. + 0.2 Ø h8 + 0.2 + 0.1 ± 0.2 h13

12 17 9 6 27.5+0.3 M5 10.5 10 2 45 3.5 13.5 6 5 6 M4 2.1 16 50 5

16 17 9 6 29+0.3 M5 11 10 2.6 45 3.5 13.5 8 5 6 M4 2.1 18 50 7

20 19.5 9 9 35.5+0.3 M5 12 10 2.6 47 5 15 10 5 6 M5 2.1 22 53 9

25 19.5 9 9 39.5+0.3 M5 12 10 2.6 49 5 15 10 5 6 M5 2.1 26 55 9

32 27 9 9 47+0.3 G1/8 15 14 6 58 5 19 12 7 8.2 M6 2.1 32.5 64 10

40 27 9 9 54.5+0.3 G1/8 15 14 8 59 5 19 12 7 8.2 M6 2.1 38 65 10

50 27 12 12 65.5+0.3 G1/8 15 14 8 59 5 19 16 7 8.2 M8 2.6 46.5 67 13

Ø AF AM KF KK T4 WH ZJ+

[mm] min. -0.5

12 8 10 M3 M5 1.5 4.2 +1 50

16 10 12 M4 M6 1.5 4.85+1 50

20 14 16 M6 M8 2.6 5.65+1 53

25 14 16 M6 M8 2.6 5.65+1 55

32 16 19 M8 M10 x 1.25 3.3 6.15+1 64

40 16 19 M8 M10 x 1.25 3.3 6.15+1 65

50 20 22 M10 M12 x 1.25 4.7 8.25+1 67

Ø 12…

ADN-…-I-P-A-RR-SA version

with internal rod thread

ADN-…-A-P-A-RR-SA version

with external rod thread

1

+ = plus stroke length

Vacuum suction port

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18 Cleanroom Product Range-subjected to change

Cylinder with adjustable end

cushioning, without sensor at

the end

CDN-…-PPV –RR-SA

Cylinder with adjustable end

cushioning and sensor at the

two ends

CDN-…-PPV –A-RR-SA

Order example:

Order no: 15043418

Type: CDN-32-200-PPV-AIB-SME-

RR-SA

Double acting cylinder, diameter

32 mm, stroke 200 mm with

adjustable cushioning and sensor

at the ends. Sensor cables are not

included in the scope of delivery

Accessories

Straight connector cable

SIM-K-GD-…-CDN-RR

Swivel flange

Ø 32, 40, 50

SNCB-…

Trunnion flange

Ø 32, 40, 50

CRZNG-…

Easy to clean, double-acting

cylinders suitable for the most

demanding of anti-corrosion

and special design

requirements.

Proximity sensors for the end

positions can be integrated in

the housing.

– Dimensions and connection

sizes as per ISO 6431, DIN

ISO 6431, VDMA 24 562, NF

E 49 003.1, and UNI 10 290

– Corrosion and acid resistant

– Adjustable end-position

cushioning at both ends

– Contact-less end-position

sensing with reed contact

– End-position sensing on both

sides

Angled connector cable

SIM-K-WD-…-CDN-RR

Mounting options

Foot mounting

Ø 32, 40, 50

CRHNC-…

Flange mounting

Ø 32, 40, 50

CRFNG-…

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders CDN-…-RR-SA Ø 32, 40, 50, stroke 10 to 500 mm

Type Part No. Type Part No. Piston Ø

Stroke Thrust at 6 bar

Return force

Cushioning length

Connection

[without magnet] [with magnet] [mm] [mm] [N] [N] [mm]

CDN-32-…-PPV-RR-SA 15024278 CDN-32-…-PPV-AIB-SME-RR-SA 15043418 32 10 …500 483 415 20 G1/8

CDN-40-…-PPV-RR-SA 15024280 CDN-40-…-PPV-AIB-SME-RR-SA 15024285 40 10 …500 754 633 20 G1/4

CDN-50-…-PPV-RR-SA 15024281 CDN-50-…-PPV-AIB-SME-RR-SA 15024287 50 10 …500 1178 990 22 G1/4

M8 plug with cable [m] Type Part No.

Straight 2.5 SIM-K-GD-2,5-CDN-RR 15025008

5 SIM-K-GD-5-CDN-RR 15025009

Angled 2.5 SIM-K-WD-2,5-CDN-RR 15025010

5 SIM-K-WD-5-CDN-RR 15025011

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19 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders CDN-…-RR-SA Ø 32, 40, 50, stroke 10 to 500 mm

Ø AM B BG E EE EE1 J1 J2 J3 KK L1 L2 LL1 LL2

[mm] Ø d11

32 22 30 16 50 G1/8 G1/8 6.2 6.3 5.3 M10 x 1.25 18.5 94 ±0.4 22 18

40 24 35 16 58 G1/4 G1/8 9.9 8 6 M12 x 1.25 21 104.8 ±0.4 26.5 20

50 32 40 17 70 G1/4 G1/8 9.7 10.4 8.5 M16 x 1.50 27 105.9 ±0.5 34 26

Ø L3 L4 L7 MM PL PL1 RT TG VA VD WH ZJ SW1 SW2 SW3

[mm] Ø f8

32 19.8 38 4.1 12 13.8 8 M6 32.5 4 4 26.7 ±1 120.7 10 17 6

40 24.3 42 1.9 16 15.5 8 M6 38 4 6.5 30.8 ±1 135.6 13 19 6

50 24.3 47 1.9 20 14 8 M8 46.5 4 8 38.1 ±1.2 144 17 24 8

1

2

3

4

+ = plus stroke length

Miniature plug connector, 3-

pin, for integrated proximity

sensors SME/SMT; suitable

for plug socket with cable

SIM-K-...-CDN

Vacuum suction port

Socket head screws with

female threads for mounting

attachments

Regulating screw for adjust-

able end-position cushioning

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20 Cleanroom Product Range-subjected to change

Accessories

Proximity sensor for fitting in 8

mm slot (Page 40)

SME-8...

Double acting, twin piston rotary

actuator with spigot rotating

shaft

DRQD-…-ZW-RR

Defined interfaces, high accuracy

and extremely good torsional

rigidity make this rotary actuator

the perfect choice for Festo’s

modular system for handling and

assembly technology.

– 90°, 180°, 360° rotation angle

– Contact-less end-position

sensing

– Twin-piston principle: Back-

lash-free, dynamic and

powerful

– Adjustable end-position

cushioning with precision

adjustment for end position

rotation angle with

– PPVJ: Pneumatic end-

position cushioning

– YSRJ: Hydraulic shock

absorbers

– Compressed air supply at

one end cap

– AL: Air connection on left

– AR: Air connection on right

– Pinion variants

– ZW: Spigot shaft

–FW: Flanged shaft

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Order example:

Order no: 15024480

Type: DRQD-20-180-YSRJ-A-AL-

FW-RR

Rotary actuator at 180 °

operation, with hydraulic shock

absorbers, magnetic sensing,

air connection on left and

flange shaft

Cleanroom class ISO 4 (FS209E class 10)

Twin piston rotary actuators DRQD-…-ZW-RR (Spigot) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Left

Right

Type Part No. Torque at 6 bar [Nm]

Description

DRQD-16-...-PPVJ-A-AL-ZW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AL: Air connec-tion on left ZW: Spigot shaft

DRQD-20-...-PPVJ-A-AL-ZW-RR 15024480 3.1

DRQD-25-...-PPVJ-A-AL-ZW-RR 15024487 6.1

DRQD-32-...-PPVJ-A-AL-ZW-RR 15024492 12.5

DRQD-16-...-YSRJ-A-AL-ZW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AL: Air connec-tion on left ZW: Spigot shaft

DRQD-20-...-YSRJ-A-AL-ZW-RR 15024480 3.1

DRQD-25-...-YSRJ-A-AL-ZW-RR 15024487 6.1

DRQD-32-...-YSRJ-A-AL-ZW-RR 15024492 12.5

DRQD-16-...-PPVJ-A-AR-ZW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AR: Air connec-tion on right ZW: Spigot shaft

DRQD-20-...-PPVJ-A-AR-ZW-RR 15024480 3.1

DRQD-25-...-PPVJ-A-AR-ZW-RR 15024487 6.1

DRQD-32-...-PPVJ-A-AR-ZW-RR 15024492 12.5

DRQD-16-...-YSRJ-A-AR-ZW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AR: Air connec-tion on right ZW: Spigot shaft

DRQD-20-...-YSRJ-A-AR-ZW-RR 15024480 3.1

DRQD-25-...-YSRJ-A-AR-ZW-RR 15024487 6.1

DRQD-32-...-YSRJ-A-AR-ZW-RR 15024492 12.5

Type Part No. Torque at 6 bar [Nm]

Description

DRQD-16-...-PPVJ-A-AL-FW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AL: Air connec-tion on left FW: Flange shaft

DRQD-20-...-PPVJ-A-AL-FW-RR 15024480 3.1

DRQD-25-...-PPVJ-A-AL-FW-RR 15024487 6.1

DRQD-32-...-PPVJ-A-AL-FW-RR 15024492 12.5

DRQD-16-...-YSRJ-A-AL-FW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AL: Air connec-tion on left FW: Flange shaft

DRQD-20-...-YSRJ-A-AL-FW-RR 15024480 3.1

DRQD-25-...-YSRJ-A-AL-FW-RR 15024487 6.1

DRQD-32-...-YSRJ-A-AL-FW-RR 15024492 12.5

DRQD-16-...-PPVJ-A-AR-FW-RR 15024475 1.6 PPVJ: Pneumatic end-position cushioning A: Magnetic sensing AR: Air connec-tion on right FW: Flange shaft

DRQD-20-...-PPVJ-A-AR-FW-RR 15024480 3.1

DRQD-25-...-PPVJ-A-AR-FW-RR 15024487 6.1

DRQD-32-...-PPVJ-A-AR-FW-RR 15024492 12.5

DRQD-16-...-YSRJ-A-AR-FW-RR 15024475 1.6 YSRJ: Hydraulic shock absorbers A: Magnetic sensing AR: Air connec-tion on right FW: Flange shaft

DRQD-20-...-YSRJ-A-AR-FW-RR 15024480 3.1

DRQD-25-...-YSRJ-A-AR-FW-RR 15024487 6.1

DRQD-32-...-YSRJ-A-AR-FW-RR 15024492 12.5

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21 Cleanroom Product Range-subjected to change

Double acting, twin piston rotary

actuator with rotating flange

DRQD-…-FW-RR

Cleanroom class ISO 4 (FS209E class 10)

Twin piston rotary actuators DRQD-…-FW-RR (Flange) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Technical data 16 20 25 32

Ø 16 mm 20 mm 25 mm 32 mm

Design Rotary drive system in accordance with the rack and pinion principle

Mounting position Any

Pneumatic connection M5 G1/8

Operating pressure range DRQD-...-PPVJ 1 ... 10 bar

DRQD-...-YSRJ

Max. permissible frequency (for completed cycle of motion)

DRQD-...-PPVJ 90 ° 4.0 Hz 3.0 Hz 2.0 Hz 1.2 Hz

180 ° 3.0 Hz 2.2 Hz 1.3 Hz 0.8 Hz

360 ° 1.5 Hz 1.2 Hz 0.8 Hz 0.5 Hz

DRQD-...-YSRJ* 90 ° 2.0 Hz 2.0 Hz 1.5 Hz 1.2 Hz

180 ° 1.8 Hz 1.8 Hz 1.5 Hz 1.2 Hz

360 ° 1.0 Hz 1.0 Hz 0.9 Hz 0.8 Hz

* At temperatures of less than 0 °C, a maximum frequency of 1 Hz always applies to all YSRJ models.

Max. permissible mass moments of inertia on the drive shaft

DRQD-...-PPVJ 5 x 10% kgm² 10 x 10% kgm² 20 x 10% kgm² 40 x 10% kgm²

DRQD-...-YSRJ 300 x 10% kgm² 400 x 10% kgm² 700 x 10% kgm² 1500 x 10% kgm²

Rotation angle range min./max. DRQD-...-PPVJ Nominal rotation angle: -20° +6° (per end position)

DRQD-...-YSRJ

Repetition accuracy DRQD-... < 0.05°

Temperature range –10°…+60

Materials Spiral tubing Polyurethane

Cylinder barrel, slip disc Anodised aluminium

Cap, SD transfer plate

Gear rack X 5 CrNi 18 9, hardened, milled teeth

Pinion X 14 CrMoS 17, hardened, treated surfaces, stamped teeth

Piston seal Polyurethane

Screws Galvanised steel

O-rings BUNA-N

Threaded pin Galvanised steel

Centring sleeves X 8 CrNi 18 9

2 ... 10 bar

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22 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Twin piston rotary actuators DRQD-…-ZW-RR (Spigot) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

1

2

3

4

5

6

7

aJ

Woodruff key position at 0°

Centering sleeves (2 ea.

Included in scope of

delivery)

Internal hex-head screw for

end position adjustment

with integral regulating

screw for end position

cushioning

Type PPVJ: Both air

connections on one cap,

optionally at front or side.

Type YSRJ: Both air

connections on one cap,

at side only.

Sensor slots for type

SME-/SMT-8-... proximity

sensors

Self-adjusting shock

absorbers for end position

cushioning

Adjustable sleeve for end

position cushioning with type

DRQD-...YSRJ

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23 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Twin piston rotary actuators DRQD-…-RR (Spigot) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Type B1 B2 B3 B4 B5 B6 B7 B8 D1 Ø g6

D2 Ø

D3 Ø

D4 D7 D8 Ø

H13

D9 Ø

D10 D11 Ø

H7

EE H1 H2 L1 L2

DRQD-16-90-... 30 25.5 23 17.8 4 14.8 22 23.5 10 12 18 M3 M4 8 4.2 M5 9 M5 50 11.2 71 35.5

DRQD-16-180-... 93 46.5

DRQD-16-360-... 137 68.5

DRQD-20-90-... 36 32.5 30 21.8 4 19.8 26 30.5 12 15 24 M4 M4 8 4.2 M5 9 M5 56 13.5 78.4 39.2

DRQD-20-180-... 104.8 52.4

DRQD-20-360-... 157.6 78.8

DRQD-25-90-... 42 42.5 40 24.8 4 24.8 30 40.5 16 20 30 M5 M5 10 5.3 M6 9 M5 67 18 91.2 45.6

DRQD-25-180-... 124 62

DRQD-25-360-... 189.2 94.6

DRQD-32-90-... 51 52.5 50 29.8 2 29.8 36 50.5 20 25 35 M6 M5 10 5.3 M6 9 G 79 22.5 114.8 57.4

DRQD-32-180-... 155.6 77.8

DRQD-32-360-... 237.4 118.7

Type L3 L4 L5 L6 L8 ±0.03

L9 ±0.03

L10 L11 N1 P9

T1 T2 T3 T4 T5 T6 T7 ß1 ß2 ß3 ß4

min max min max

DRQD-16-90-... 10 24 20.8 1.7 5.7 23.4 28.2 60 – 7.6 5.3 3 18.1 9 3.5 5 10 2 2 4 9 13 17

DRQD-16-180-... –

DRQD-16-360-... 20

DRQD-20-90-... 10 31.5 27 2.4 7 28.6 35.9 60 – 8 5 4 25.1 10 3.5 5 12 2 2 7 11 15 19

DRQD-20-180-... –

DRQD-20-360-... 20

DRQD-25-90-... 11 36.5 33 2.6 8.9 42 50.2 60 – 11 5 5 36.1 12.5 5 6 12 2 2 7 15 19 24

DRQD-25-180-... –

DRQD-25-360-... 20

DRQD-32-90-... 16 39 39 4.3 11.8 59.4 70.1 80 – 13.1 8 6 45.1 16 5 6 14 2 2 8 20 27 32

DRQD-32-180-... –

DRQD-32-360-... 20

L7

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24 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Twin piston rotary actuators DRQD-…-FW-RR (Flange) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

1

2

3

4

5

6

7

aJ

aA

Woodruff key position at 0°

Centering sleeves

(2 ea. Included in scope of

delivery)

Centering sleeves

(not included in scope of

delivery)

Internal hex-head screw for

end position adjustment

with integral regulating

screw for end position

cushioning

Type PPVJ: Both air

connections on one cap,

optionally at front or side.

Type YSRJ: Both air

connections on one cap, at

side only.

Sensor slots for type

SME-/SMT-8-... proximity

sensors

Self-adjusting shock

absorbers for end position

cushioning

Adjustable sleeve for end

position cushioning with type

DRQD-...YSRJ

Page 25: doc.infoxmation.comdoc.infoxmation.com/xlk/auto/festo/xlk0000000000404.pdf · 2019. 10. 16. · 4 Cleanroom Product Range-subjected to change The cleanroom project initiated by Festo

25 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Twin piston rotary actuators DRQD-…-FW-RR (Flange) Ø 16, 20, 25, 32, angle 90°, 180° and 360°

Type B1 B2 B3 B4 B5 B6 B7 D1 Ø

D2 Ø ±0.025

D3 Ø

H8

D4 Ø

D5 D6 Ø

H7

D7 D8 Ø

H13

D9 Ø

D10 D11 Ø

H7

EE H1 L1 L2

DRQD-16-90-... 30 6.5 6 17.8 4 14.8 22 34 25 14 9 M4 7 M4 8 4.2 M5 9 M5 50 71 35.5

DRQD-16-180-... 93 46.5

DRQD-16-360-... 137 68.5

DRQD-20-90-... 36 6.5 6 21.8 4 19.8 26 38 28 16 11 M4 7 M4 8 4.2 M5 9 M5 56 78.4 39.2

DRQD-20-180-... 104.8 52.4

DRQD-20-360-... 157.6 78.8

DRQD-25-90-... 42 9.5 9 24.8 4 24.8 30 48 34 16 12 M6 9 M5 10 5.3 M6 9 M5 67 91.2 45.6

DRQD-25-180-... 124 62

DRQD-25-360-... 189.2 94.6

DRQD-32-90-... 51 9.5 9 29.8 2 29.8 36 58 45 19 14 M6 9 M5 10 5.3 M6 9 G 79 114.8 57.4

DRQD-32-180-... 155.6 77.8

DRQD-32-360-... 237.4 118.7

Type L3 L4 L5 L6 L7 L8 ±0.03

L9 ±0.03

L10 L11 T1 T2 T3 T4 T5 T6 T7 ß1 ß2 ß3 ß4

min max min max

DRQD-16-90-... 10 24 20.8 1.7 5.7 23.4 28.2 60 – 7.6 5.3 3 1.6 3.5 5 10 2 2 4 9 13 17

DRQD-16-180-... – 13 17

DRQD-16-360-... 20

DRQD-20-90-... 10 31.5 27 2.4 7 28.6 35.9 60 – 8 5 3 1.6 3.5 5 12 2 2 7 11 15 19

DRQD-20-180-... –

DRQD-20-360-... 20

DRQD-25-90-... 11 36.5 33 2.6 8.9 42 50.2 60 – 11 5 3 2 5 6 12 2 2 7 15 19 24

DRQD-25-180-... –

DRQD-25-360-... 20

DRQD-32-90-... 16 39 39 4.3 11.8 59.4 70.1 80 – 13.1 8 3 2 5 6 14 2 2 8 20 27 32

DRQD-32-180-... –

DRQD-32-360-... 20

T8

1.4

1.4

2

2

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26 Cleanroom Product Range-subjected to change

DSNU-…-RR-SA

(basic version)

Double acting cylinder with

flexible cushioning rings in the

end positions and contact-less

sensing.

DSNU-…-P-A-RR-SA

DSNU-…-P-A-MQ-RR-SA

DSNU-…-P-A-MA-RR-SA

Double acting cylinder with

adjustable cushioning rings in the

end positions and contact-less

sensing.

DSNU-…-PPV-A-RR-SA

DSNU-…-PPV-A-MQ-RR-SA

– Optimum graded range of

piston diameters and stroke

lengths

– Three different end caps

means numerous functional

and space saving design

– Good running performance

and long service life thanks

to smooth, hard cylinder

bore

– Cylinder barrel made of

stainless steel

– With flexible cushioning

rings in the end positions

– With adjustable end-position

cushioning at both ends

– With or without contact less

end position sensing

Order example:

Part no: 15024262

Type: DSNU-20-200-PPV-A-RR-

SA

Double acting cylinder Ø 20

mm, stroke 200 mm, with

adjustable cushioning rings

in the end positions and

contact-less sensing.

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders DSNU-…-RR-SA Ø 8, 10, 16, 20, 25, 32, 40, 50, 63 mm, stroke 10 to 500 mm

Type Part no. Pis-ton Ø

Stroke Thrust at 6 bar

Return force

Air cushioning

Con-nection

Bracket for SME-8 sensor

Part no.

[Basic version] [mm] [mm] [N] [N] [cushioning length]

DSNU-8-…-P-A-RR-SA 15024250 8 10 …100 30 23 Damper M5 SMBR-8-8-RR 15025013

DSNU-10-…-P-A-RR-SA 15024251 10 10 …100 47 40 Damper M5 SMBR-8-10-RR 15025014

DSNU-12-…-P-A-RR-SA 15024256 12 10 …200 68 51 Adjustable [9 mm] M5 SMBR-8-12-RR 15025015

DSNU-16-…-PPV-A-RR-SA 15024260 16 10 …200 121 104 Adjustable [12 mm] M5 SMBR-8-16-RR 15025016

DSNU-20-…-PPV-A-RR-SA 15024262 20 10 …320 189 158 Adjustable [15 mm] G1/8 SMBR-8-20-RR 15025017

DSNU-25-…-PPV-A-RR-SA 15024265 25 10 …500 295 247 Adjustable [17 mm] G1/8 SMBR-8-25-RR 15025018

DSNU-32-…-PPV-A-RR-SA 15083882 32 10 …500 483 415 Adjustable [14 mm] G1/8 SMBR-8-32-RR 15083956

DSNU-40-…-PPV-A-RR-SA 15083883 40 10 …500 753 633 Adjustable [18 mm] G1/4 SMBR-8-40-RR 15083957

DSNU-50-…-PPV-A-RR-SA 15083884 50 10 …500 1178 990 Adjustable [20 mm] G1/4 SMBR-8-50-RR 15083958

DSNU-63-…-PPV-A-RR-SA 15083885 63 10 …500 1870 1682 Adjustable [21 mm] G3/8 SMBR-8-63-RR 15083959

DSNU-…-MA-RR-SA

(Axial supply port at rear)

DSNU-…-MQ-RR-SA

(Lateral supply port at rear)

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27 Cleanroom Product Range-subjected to change

Swivel mounting

WBN-...

Clevis foot

LBN-...

Mounting options

Foot mounting

HBN-… x1

HBN-… x2

Flange mounting

FBN-...

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders DSNU-…-RR-SA Ø 8, 10, 16, 20, 25, 32, 40, 50, 63 mm, stroke 10 to 500 mm

Accessories

Proximity sensor for fitting in 8

mm slot (Page 40)

SME-8...

Mounting bracket for proximity

sensor

SMBR-8-...

Type Part no. Piston Ø Stroke Type Part no. Piston Ø Stroke

[Lateral supply port] [mm] [mm] [Axial supply port] [mm] [mm]

DSNU-8-…-P-A-MQ-RR-SA 15083886 8 10 …100 DSNU-8-…-P-A-MA-RR-SA 15083896 8 10 …100

DSNU-10-…-P-A-MQ-RR-SA 15083887 10 10 …100 DSNU-10-…-P-A-MA-RR-SA 15083897 10 10 …100

DSNU-12-…-P-A-MQ-RR-SA 15083888 12 10 …200 DSNU-12-…-P-A-MA-RR-SA 15083898 12 10 …200

DSNU-16-…-PPV-A-MQ-RR-SA 15083889 16 10 …200 DSNU-16-…-P-A-MA-RR-SA 15083899 16 10 …200

DSNU-20-…-PPV-A-MQ-RR-SA 15083890 20 10 …320 DSNU-20-…-P-A-MA-RR-SA 15083900 20 10 …320

DSNU-25-…-PPV-A-MQ-RR-SA 15083891 25 10 …500 DSNU-25-…-P-A-MA-RR-SA 15083901 25 10 …500

DSNU-32-…-PPV-A-MQ-RR-SA 15083892 32 10 …500 DSNU-32-…-P-A-MA-RR-SA 15083902 32 10 …500

DSNU-40-…-PPV-A-MQ-RR-SA 15083893 40 10 …500 DSNU-40-…-P-A-MA-RR-SA 15083903 40 10 …500

DSNU-50-…-PPV-A-MQ-RR-SA 15083894 50 10 …500 DSNU-50-…-P-A-MA-RR-SA 15083904 50 10 …500

DSNU-63-…-PPV-A-MQ-RR-SA 15083895 63 10 …500 DSNU-63-…-P-A-MA-RR-SA 15083905 63 10 …500

Technical data

Medium Compressed air, filtered (lubricated or unlubricated)

Max. operating pressure 10 bar

Temperature range –20 ... +80 °C (note operating range of proximity sensor)

Cylinder barrel and cover High alloy stainless steel

Cylinder cover Aluminum

Seals Polyurethane, nitrile rubber

Materials

Piston rod High alloy steel

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28 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders DSNU-…-RR-SA Ø 8, 10, 16, 20, 25, 32, 40, 50, 63 mm, stroke 10 to 500 mm

Ø AM B BE BF CD D D1 D4 EE EE1 EW G G1

[mm] Ø h9 Ø Ø Ø

8 12 12 M12 x 1.25 15 4 15 - 9.3 M5 M5 8 10 22.5

10 12 12 M12 x 1.25 15 4 15 - 11.3 M5 M5 8 10 22.5

12 16 16 M16 x 1.5 16 6 20 - 13.3 M5 M5 12 10 27.5

16 16 16 M16 x 1.5 17 6 20 - 17.3 M5 M5 12 10 26

20 20 22 M22 x 1.5 20 8 27 - 21.3 G1/8 G1/8 16 16 34

25 22 22 M22 x 1.5 22 8 27 - 26.5 G1/8 G1/8 16 16 36

32 22 30 M30 x 1.5 26 10 38 42 33.6 G1/8 G1/8 16 19 42.5

40 24 38 M38 x 1.5 30 12 46 50 41.6 G1/4 G1/8 18 25 47

50 32 45 M45 x 1.5 33 16 57 60 52.4 G1/4 G1/8 21 25 50

63 32 45 M45 x 1.5 33 16 70 60 65.4 G3/8 G1/8 21 28 50

Ø KK KV KW L L2 MM PL PL1 VD WF XC ZJ ß1

[mm] Ø f8 ± 1

8 M4 19 6 6 68.5 4 6 8 2 19 89.2 87.2 –

10 M4 19 6 6 68.5 4 6 8 2 19 89.2 87.2 –

12 M6 24 8 9 77.5 6 6 8 2 21 101.5 98.5 5

16 M6 24 8 9 82 6 6 6 2 22 108 104 5

20 M8 32 11 12 102 8 8.2 8.2 2 24 129 126 7

25 M10 x 1.25 32 11 12 105.5 10 8.2 8.2 2 28 140 133.2 9

32 M10 x 1.25 - 8 13 112 12 9 8 2 34 160 146 10

40 M12 x 1.25 - 10 15 131.6 16 12 8 3 39 186.6 170.6 13

50 M16 x 1.5 - 10 16 136.2 20 12 8 3 44 197.2 180.2 17

63 M16 x 1.5 - 10 16 144.2 20 13 8 3 45 206.2 189.2 17

DSNU-8-… to DSNU-25-...

(Basic version)

DSNU-32-… to DSNU-63-…

(Basic version)

1

+ = plus stroke length

Vacuum suction port

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29 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Standard cylinders DSNU-…-RR-SA Ø 8, 10, 16, 20, 25, 32, 40, 50, 63 mm, stroke 10 to 500 mm

DSNU-…-MA-RR-SA

(Axial supply port)

DSNU-…-MQ-RR-SA

(Lateral supply port)

Ø D2 D6 EE G L1 L2 L3

[mm] Ø Ø MQ MA MQ MA

8 10.5 - M5 10 - 68.5 66.1 7.6 87.2 84.8

10 12.5 - M5 10 - 68.5 65.6 7.1 87.2 84.3

12 14.5 - M5 10 - 77.5 75.2 7.7 98.5 96.2

16 17.5 - M5 10 - 82 79.7 7.7 104 101.7

20 21.7 - G1/8 16 - 102 100.5 14.5 126 124.5

25 26.7 - G1/8 16 - 105.5 102.5 14 133.2 132.5

32 34 30 G1/8 19 3 112 108 15 146 142

40 42 38 G1/4 25 4 131.6 124.6 18 170.6 163.6

50 53 45 G1/4 25 4 136.2 136.2 25 180.2 180.2

63 66 45 G3/8 28 4 144.2 144.2 28 189.2 189.2

ZJ

1

+ = plus stroke length

Vacuum suction port

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30 Cleanroom Product Range-subjected to change

Double acting guided drive with

flexible cushioning rings in the

end positions, contact-less

sensing and recirculating ball

bearing.

DFM-…-P-A-KF-RR-SA

Order example:

Part no: 15083920

Type: DFM-20-100-P-A-KF-RR-SA

Guided drive Ø 20 mm, stroke

100 mm, with flexible cushioning

rings in the end positions,

contact-less sensing and

recirculating ball bearing

Excellent protection against

torsion, high resistance to

torque and lateral forces

– With recirculating ball bear-

ing guide

– For applications involving

torque loads.

– Minimal space requirement

– Minimal assembly time

– Choice of supply ports

– Versatile mounting options

– Good protection against

torsion

– Rigid construction

– Maintenance-free

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Cleanroom class ISO 4 (FS209E class 10)

Guided drives DFM-…-RR-SA Ø 12, 16, 20, 25 mm, stroke 10 to 100 mm

Type Thrust at 6 bar

Return force at 6 bar

Connection Max. speed Max. impact energy at ends

[N] [N] [m/s] [J]

DFM-12-… 68 51 M5 0.8 0.09

DFM-16-… 121 90 M5 0.8 0.10

DFM-20-… 188 141 M5 0.8 0.14

DFM-25-… 295 247 G1/8 0.8 0.35

Accessories

Proximity sensor for fitting

in 8 mm slot (Page 40)

SME-8...

Mounting options

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31 Cleanroom Product Range-subjected to change

Type Part no. Piston Ø Stroke Type Part no. Piston Ø Stroke

[mm] [mm] [mm] [mm]

DFM-12-10-P-A-KF-RR-SA 15083906 12 10 DFM-16-10-P-A-KF-RR-SA 15083921 16 10

DFM-12-20-P-A-KF-RR-SA 15083907 12 20 DFM-16-20-P-A-KF-RR-SA 15083922 16 20

DFM-12-25-P-A-KF-RR-SA 15083908 12 25 DFM-16-25-P-A-KF-RR-SA 15083923 16 25

DFM-12-30-P-A-KF-RR-SA 15083909 12 30 DFM-16-30-P-A-KF-RR-SA 15083924 16 30

DFM-12-40-P-A-KF-RR-SA 15083910 12 40 DFM-16-40-P-A-KF-RR-SA 15083925 16 40

DFM-12-50-P-A-KF-RR-SA 15083911 12 50 DFM-16-50-P-A-KF-RR-SA 15083926 16 50

DFM-12-80-P-A-KF-RR-SA 15083912 12 80 DFM-16-80-P-A-KF-RR-SA 15083927 16 80

DFM-12-100-P-A-KF-RR-SA 15083913 12 100 DFM-16-100-P-A-KF-RR-SA 15083928 16 100

DFM-20-20-P-A-KF-RR-SA 15083914 20 20 DFM-25-20-P-A-KF-RR-SA 15083929 25 20

DFM-20-25-P-A-KF-RR-SA 15083915 20 25 DFM-25-25-P-A-KF-RR-SA 15083930 25 25

DFM-20-30-P-A-KF-RR-SA 15083916 20 30 DFM-25-30-P-A-KF-RR-SA 15083931 25 30

DFM-20-40-P-A-KF-RR-SA 15083917 20 40 DFM-25-40-P-A-KF-RR-SA 15083932 25 40

DFM-20-50-P-A-KF-RR-SA 15083918 20 50 DFM-25-50-P-A-KF-RR-SA 15083933 25 50

DFM-20-80-P-A-KF-RR-SA 15083919 20 80 DFM-25-80-P-A-KF-RR-SA 15083934 25 80

DFM-20-100-P-A-KF-RR-SA 15083920 20 100 DFM-25-100-P-A-KF-RR-SA 15083935 25 100

Cleanroom class ISO 4 (FS209E class 10)

Guided drives DFM-…-RR-SA Ø 12, 16, 20, 25 mm, stroke 10 to 100 mm

Piston Ø XS Stroke [mm]

[mm] [mm] 10 20 25 30 40 50 80 100

12 25 27 23 21 20 23 22 20 19

16 50 45 31 27 24 58 56 51 48

20 50 – 45 39 35 91 88 80 75

25 50 – 88 86 84 100 97 89 85

Maximum effective load F [N]

Piston Ø XS Stroke [mm]

[mm] [mm] 10 20 25 30 40 50 80 100

12 25 0.55 0.47 0.44 0.42 0.47 0.45 0.41 0.38

16 50 1.03 0.71 0.62 0.55 1.34 1.29 1.18 1.12

20 50 – 1.3 1.13 1.01 2.64 2.56 2.34 2.23

25 50 – 3 2.92 2.85 3.4 3.3 3.02 2.89

Permissible torque load M [Nm]

M Torque

XS

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32 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Guided drives DFM-…-RR-SA Ø 12, 16, 20, 25 mm, stroke 10 to 100 mm

Ø B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14 B15 B16 D1 D2 D3 D4

Ø Ø H7

12 60 58 42.4 30 4.5 51 20.5 19 20 20 9.5 41 19.5 21 8.5 41 M5 8 9 M4

16 67 65 45.9 33.5 4.5 58 22 23 23.5 20 10.5 46 21.3 24.4 – – M5 7.5 9 M5

20 83 81 53.6 41.5 6.5 70 26.5 30 26.5 30 12.5 58 26 31 – – M6 9 9 M5

25 95 93 70 47.5 15.5 64 30 35 27.5 40 13.5 68 29 37 – – M6 9 9 M6

Ø D5 D6 D8 D9 EE EE1 G1 G2 H1 H2 H3 H4 H5 H6 H7 H8 H9 H10 H11

[mm] Ø H7 Ø H7

12 – M4 5 M4 M5 M5 10 7 28 26 24 14 14 4 20 – 4 20 14

16 – M5 5 – M5 M5 10 10 32 30 27 16 17.4 4 24 – 7.4 20 16

20 9 M5 7 – M5 M5 14 14 36 34 30 17 17 4.5 27 – 7 20 18

25 9 M6 7 – G1/8 M5 14 12 44 42 35 19 23.9 4.5 35 35 12 20 22

1

2

3

4

5

6

7

Mounting slot for proximity

sensor SME-/SMT-8

Supply port optionally at side

or top

Mounting thread

Mounting thread (not with

Dia. 12 … 20)

Tolerance between centering

holes ±0.02 mm (12 and

16 mm have no centering

holes on the flange plates)

Exhaust port

Vacuum port

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33 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Guided drives DFM-…-RR-SA Ø 12, 16, 20, 25 mm, stroke 10 to 100 mm

Ø Stroke L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11 L12 T1 T2 T3 T4 T5 T6 T7 T8 ß1 ß2

[mm] [mm] ± 0.1

12 10 76 63 10 13 11.4 9.5 – 31 – 44 – 11.4 9 9.4 2.1 8 – 1 8 5 14 11

20 86 73 10 13 11.4 9.5 – 31 – 44 – 11.4 9 9.4 2.1 8 – 1 8 5 14 11

25 91 78 10 13 11.4 9.5 – 31 20 44 – 11.4 9 9.4 2.1 8 – 1 8 5 14 11

30 96 83 10 13 11.4 9.5 – 31 20 44 – 11.4 9 9.4 2.1 8 – 1 8 5 14 11

40 106 93 10 13 11.4 9.5 6 31 20 44 – 11.4 9 9.4 2.1 8 – 1 8 5 14 11

50 116 103 10 13 11.4 9.5 6 31 40 44 – 11.4 9 9.4 2.1 8 – 1 8 5 14 11

80 146 133 10 13 11.4 9.5 6 31 40 44 – 11.4 9 9.4 2.1 8 – 1 8 5 14 11

100 166 153 10 13 11.4 9.5 6 31 40 44 80 11.4 9 9.4 2.1 8 – 1 8 5 14 11

16 10 80 68 10 12 11.9 10.6 – 32 – 44 – 11.9 9 4.6 2.1 10 – 1 – 8 14 14

20 90 78 10 12 11.9 10.6 – 32 – 44 – 11.9 9 4.6 2.1 10 – 1 – 8 14 14

25 95 83 10 12 11.9 10.6 – 32 20 44 – 11.9 9 4.6 2.1 10 – 1 – 8 14 14

30 100 88 10 12 11.9 10.6 – 32 20 44 – 11.9 9 4.6 2.1 10 – 1 – 8 14 14

40 110 98 10 12 11.9 10.6 17 32 20 44 – 11.9 9 4.6 2.1 10 – 1 – 8 14 14

50 120 108 10 12 11.9 10.6 17 32 40 44 – 11.9 9 4.6 2.1 10 – 1 – 8 14 14

80 150 138 10 12 11.9 10.6 17 32 40 44 – 11.9 9 4.6 2.1 10 – 1 – 8 14 14

100 170 158 10 12 11.9 10.6 17 32 40 44 80 11.9 9 4.6 2.1 10 – 1 – 8 14 14

20 20 103 89 12 14 14 10.5 – 40 – 54 – 14 12 5.7 2.1 10 2.1 1.6 – 10 17 17

25 108 94 12 14 14 10.5 – 40 20 54 – 14 12 5.7 2.1 10 2.1 1.6 – 10 17 17

30 113 99 12 14 14 10.5 – 40 20 54 – 14 12 5.7 2.1 10 2.1 1.6 – 10 17 17

40 123 109 12 14 14 10.5 26 40 20 54 – 14 12 5.7 2.1 10 2.1 1.6 – 10 17 17

50 133 119 12 14 14 10.5 26 40 40 54 – 14 12 5.7 2.1 10 2.1 1.6 – 10 17 17

80 163 149 12 14 14 10.5 26 40 40 54 – 14 12 5.7 2.1 10 2.1 1.6 – 10 17 17

100 183 169 12 14 14 10.5 26 40 40 54 80 14 12 5.7 2.1 10 2.1 1.6 – 10 17 17

25 20 105.6 91.6 12 14 17.5 9.5 13 40 – 54 – 15 14 5.7 2.1 12 2.1 1.6 – 10 17 17

25 110.6 96.6 12 14 17.5 9.5 13 40 20 54 – 15 14 5.7 2.1 12 2.1 1.6 – 10 17 17

30 115.6 101.6 12 14 17.5 9.5 13 40 20 54 – 15 14 5.7 2.1 12 2.1 1.6 – 10 17 17

40 125.6 111.6 12 14 17.5 9.5 23 40 20 54 – 15 14 5.7 2.1 12 2.1 1.6 – 10 17 17

50 135.6 121.6 12 14 17.5 9.5 23 40 40 54 – 15 14 5.7 2.1 12 2.1 1.6 – 10 17 17

80 165.6 151.6 12 14 17.5 9.5 23 40 40 54 – 15 14 5.7 2.1 12 2.1 1.6 – 10 17 17

100 185.6 171.6 12 14 17.5 9.5 23 40 40 54 80 15 14 5.7 2.1 12 2.1 1.6 – 10 17 17

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34 Cleanroom Product Range-subjected to change

Double acting precision gripper

HGPP-…-RR-SA

– Wide ranging variants for flexi-

ble use:

– Double-acting piston drive

HGPP-...-A.

– High precision gripper jaw

guide.

– Variable gripping action:

– External gripping

– Internal gripping

– Multiple compressed air

connections

– Integrated Hall sensor

– Highly flexible thanks to

versatile attachment

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Precision gripper HGPP-…-RR-SA Ø 10, 12, 16, 20, 25 mm, opening stroke 2.0 to 10.0 mm

Cleanroom class ISO 4 (FS209E class 10)

Type Part No. Ø Opening stroke per jaw

Con-nection

Gripping force per gripper at 6 bar

Max. applied load for additional gripper fingers

Repetition accuracy

Operating pressure

Max. frequency

[mm] [mm] [N] [N] [mm] [bar] [mm] [°] [Hz]

HGPP-10-A-RR-SA 15083874 10 2.0 M3 47.1 < 0.5 < 0.02 2...8 0 0 4

HGPP-12-A-RR-SA 15043419 12 2.5 M3 67.6 < 1 < 0.015

HGPP-16-A-RR-SA 15044334 16 5.0 M5 120.6 < 1.5 < 0.015

HGPP-20-A-RR-SA 15024276 20 7.5 M5 188.4 < 2 < 0.01

HGPP-25-A-RR-SA 15083875 25 10.0 M5 294.5 < 3 < 0.02

Max. jaw backlash

Technical data Size 10 12 16 20 25

Max. permissible static characteristic load values

Forces Fz Gripper jaw [N] 40 70 130 220 380

Fz Housing [N] 200 400 600 800 1000

Torques Mx [Nm] 1.5 3 7 14 21

My [Nm] 1.5 3 7 14 21

Mz [Nm] 1.5 3 7 14 21

Mass moments of inertia Jz [kgm² x10%] 0.43 0.73 2.39 6.22 16.68

Opening and closing times (without gripper fingers at 6 bar)

open [ms] 22 27 40 44 64

close [ms] 34 40 53 59 92

Opening and closing times (with additional gripper fingers as a function of the applied load)

2 N [ms] 200 100 50 – –

3 N [ms] 300 200 100 50 100

4 N [ms] – 300 200 100 150

5 N [ms] – – 300 200 200

Weights [g] 126 172 315 604 884

Materials Housing Anodised aluminium

Gripper jaws Nickel plated aluminium

Cover cap Anodised aluminium

Ambient conditions Temperature range [°C] +5 ... + 60

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35 Cleanroom Product Range-subjected to change

Precision gripper HGPP-…-RR-SA Ø 10, 12, 16, 20, 25 mm, opening stroke 2.0 to 10.0 mm

Cleanroom class ISO 4 (FS209E class 10)

Ø B1 B2 B3 B4 B5 B6 B7 D1 D2 D3 D4 D5 D6 D7 D8

[mm] +0.3 +0.3 ±0.1 ±0.1 ±0.02 ±0.1 ±0.1 Ø Ø H8 Ø H8 Ø H8 Ø +0.2

HGPP-10 33 33 6.5 27 8 12.5 27 M4 3.3 3 M3 2 M2 M3 9

HGPP-12 38 38 6.5 30 8 12.5 30 M4 3.3 3 M3 2 M2 M3 9

HGPP-16 42 42 8.5 32 10 16 32 M4 3.3 3 M3 2.5 M2 M3 12.1

HGPP-20 48 48 10 40 12 20 40 M5 4.2 3 M4 3 M2 M3 12.1

HGPP-25 55 55 12 45 15 25 45 M6 5.1 5 M5 4 M2 M3 12.1

Ø EE EE1 H1 H2 H3 H4 H5 H6 H7 L1 L2 L3 L4 L5 L6

[mm] ±0.1 ±0.1 ±0.02 ±0.12 -0.3 ±0.5 ±0.5 ±0.25 ±0.05 ±0.1 ±0.1

HGPP-10 M3 M3 35.2 31.4 8.9 ±0.25 3.7 2 2.6 28.7 62 58 56 47.4 5 27

HGPP-12 M3 M3 40.2 35.5 8.5 ±0.3 4.7 2 5 32.7 67 62 60 51.4 4 30

HGPP-16 M5 M5 51.5 40.9 8.3 ±0.2 6.8 3 5 37.1 98 88 86 76 6.5 40

HGPP-20 M5 M5 57.5 53.48 15.5 ±0.2 8 3 7 48.5 120 105 103 92 7.5 40

HGPP-25 M5 M5 61 56 12.5 ±0.25 7.5 4 8 51 163 143 139.4 127.4 12 45

Ø L7 L8 L9 L10 L11 L12 T1 T2 T3 T4 T5 T6 T7 T8 T9 T10

[mm] ±0.1 ±0.02 ±0.05 ±0.1 ±0.05 ±0.1 +0.1

HGPP-10 6 8 13.5 7.5 15 4 8 14.85 6 8 5 4 6 3.8 1 3

HGPP-12 6 9 14 8.5 18 4 8 16 6 7.5 5 4 6 5.5 1 3

HGPP-16 6 14 17.5 11.5 24 6.5 10 19.5 7 8 6 4.5 6 5 1.3 4

HGPP-20 8 20 21 13.5 26 7.5 12 28.5 7 10 8 7 8 6 1.3 7

HGPP-25 9 22 29.8 17 28 12 12 27 10 10 8 8 10 6 1.3 8

1

2

3

4

5

6

7

8

9

aJ

aA

aB

Supply port, opening

Supply port, closing

Hole for locating pin

(Locating pins are not in-

cluded in scope of delivery.)

Gripper jaws open

Gripper jaws closed

Hole for sensor kit

Gripper

Adapter customer specific

O-ring for precision grippers:

HGPP-10: 5x1.5

HGPP-12: 5x1.5

HGPP-16: 13x1.78

HGPP-20: 13x1.78

HGPP-25: 13x1.78

Set screw for securing the

Hall sensor

Thread for mounting bracket

HGPP-HWS-Q5

Supply port on base seal

Vacuum suction port

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36 Cleanroom Product Range-subjected to change

Double acting T-slot gripper

HGPT-…-A-RR

The force generated by the linear

motion is translated into the

gripper jaw movement via a

wedge mechanism with guided

motion sequence. This also

guarantees synchronous

movement of the gripper jaws.

The virtually backlash-free slide

way is realised using ground-in

gripper jaws.

When vacuum is applied to the

vacuum suction port, all the

particles and lubrication mist

that are generated by the

movement of the gripper jaws,

during operation will be suck

away. These prevent contami-

nation in the cleanroom.

Accessories

Proximity sensor for fitting

in slot (Page 40)

SME-10…

T-slot parallel gripper HGPT-…-RR Ø 16, 20, 25, 35 mm, opening stroke 3.0 to 8.0 mm

Cleanroom class ISO 4 (FS209E class 10)

Type Part No. Ø Opening stroke per jaw

Con-nection

Gripping force per gripper at 6 bar

Max. applied load for additional gripper fingers

Repetition accuracy

Operating pressure

Max. frequency

[mm] [mm] [N] [N] [mm] [bar] [mm] [°] [Hz]

HGPT-16-A-RR 15083557 16 3.0 M3 62 < 0.5 < 0.03 3...8 0.02 0.1 3

HGPT-20-A-RR 15083558 20 4.0 M3 102 < 1 < 0.04

HGPT-25-A-RR 15083559 25 6.0 M5 158 < 1.5 < 0.04

HGPT-35-A-RR 15083560 35 8.0 M5 310 < 2 < 0.05

Max. jaw backlash

Technical data Size 16 20 25 35

Forces Fz Gripper jaw [N] 200 300 500 900

Torques Mx [Nm] 10 15 30 50

My [Nm] 7 10 25 40

Mz [Nm] 5 8 15 30

Mass moments of inertia Jz [kgm² x10%] 0.177 0.391 1.263 3.383

Opening and closing times (without gripper fingers at 6 bar)

open [ms] 20 31 30 40

close [ms] 21 31 33 40

Opening and closing times (with additional gripper fingers as a function of the applied load)

1N [ms] 100 – – –

2 N [ms] 200 150 100 –

3 N [ms] 300- 250 200 150

4 N [ms] – 350 300 250

Weights [g] 102 183 361 625

Materials Housing Aluminium , coated with ComCote

Gripper jaws Hardened steel

Seals Nitrile rubber

Ambient conditions Temperature range [°C] +5 ... + 60

Max. permissible static characteristic load values

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

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37 Cleanroom Product Range-subjected to change

T-slot parallel gripper HGPT-…-RR Ø 16, 20, 25, 35 mm, opening stroke 3.0 to 8.0 mm

Cleanroom class ISO 4 (FS209E class 10)

aA

Vacuum suction port aA

Ø B1 B3 B4 B6 D1 D2 D3 D4 D5 D6 D7 D8 EE E1 E2 H1 H2 H3 H4 H5

Ø Ø Ø Ø Ø Ø

16 24 4 17 6 M3 2.6 5 M3 2 4.6+0.1 2.6 4.6+0.1 M3 M2 M3 39 38 12 33.7 1.2

20 28 7 22 6.5 M4 3.2 5 M3 3 6+0.2 3.2 6+0.2 M3 M3 M3 46 45 15 37 1.2

25 36 10 27 10 M5 4.2 7 M4 4 8+0.3 4.2 8+0.3 M5 M3 M5 57 56 20 46 1.4

35 42 9 32 12 M5 4.2 9 M6 4 10+0.3 5.3 8+0.3 M5 M4 M5 67 66 28 53 1.9

Ø L7 L8 L9 L10 L11 L12 T1 T2 T3 T4 T5 T6 T7 H6 L1 L2 L3 L4 L5 L6

16 20 11 3 6 29 22 5 1.3 4 5 4 15 24 27.5 46 40 35.8 3.8 22.4 29

20 24 18 4 8 35 24 6 1.3 4 5 4 19 11 24 58 50 44 0 28 35

25 20 17 5 12 42 28 10 1.6 4 5 4 24 16 34 76 64 52 0 28 42

35 40 24 6 15 52 40 10 2.1 6 10 4 27 19 38 96 80 64 0 40 52

3

4

5

6

7

8

1

2

Hole for dowel pin

(not included in scope of

delivery)

Gripper jaw open

Gripper jaw closed

Vacuum suction port (sealed

on delivery)

Centering sleeves ZBH

Slot for proximity sensor

Compressed air connection

opening, either on the side

or bottom (bottom connec-

tion sealed on delivery)

Compressed air connection

closing, either on the side

or bottom (bottom connec-

tion sealed on delivery)

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38 Cleanroom Product Range-subjected to change

Double acting T-slot 3 point

gripper

HGDT-…-A-RR

The force generated by the linear

motion is translated into the

gripper jaw movement via a

wedge mechanism with guided

motion sequence. This also

guarantees synchronous

movement of the gripper jaws.

The virtually backlash-free slide

way is realised using ground-in

gripper jaws.

When vacuum is applied to the

vacuum suction port, all the

particles and lubrication mist

that are generated by the

movement of the gripper jaws,

during operation will be suck

away. These prevent contami-

nation in the cleanroom.

Accessories

Proximity sensor for fitting

in slot

SME-10… (Page 40)

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

T-slot 3 point gripper HGDT-…-RR Ø 25, 35 mm, opening stroke 6.0 and 8.0 mm

Cleanroom class ISO 5 (FS209E class 100)

Type Part No. Ø Opening stroke per jaw

Con-nection

Force/jaw at 6 bar

Max. applied load for additional gripper fingers

Repetition accuracy

Operating pressure

Max. jaw backlash

Max. frequency

[mm] [mm] [N] [N] [mm] [bar] [mm] [°] [Hz]

HGDT-25-A-RR 15083876 25 3.0 65 < 0.5 < 0.03 3...8 0.02 0.1 3

HGDT-35-A-RR 15083877 35 4.0 195 < 2 < 0.05

Total force at 6 bar

[N]

140

420

Technical data Size 25 35

Max. permissible static characteristic load values

Forces Fz Gripper jaw [N] 350 400

Torques Mx [Nm] 7 15

My [Nm] 10 10

Mz [Nm] 5 10

Mass moments of inertia Jz [kgm² x10%]

Opening and closing times (without gripper fingers at 6 bar)

open [ms]

close [ms] < 0.15 < 0.2

Opening and closing times (with additional gripper fingers as a function of the applied load)

1N [ms]

2 N [ms]

3 N [ms]

4 N [ms]

Weights [g]

Materials Housing

Gripper jaws Hardened steel

Seals Nitrile rubber

Ambient conditions Temperature range [°C] +5 ... + 60

Aluminium , coated with ComCote

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39 Cleanroom Product Range-subjected to change

T-slot 3 point gripper HGDT-…-RR-SA Ø 25, 35 mm, opening stroke 6.0 and 8.0 mm

Cleanroom class ISO 5 (FS209E class 100)

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40 Cleanroom Product Range-subjected to change

Proximity sensors for cylinders

with size 8 slot. Contact-type

(reed switch)

SME-8-…-RR

230 V version

SME-8-K-LED-230-RR

2 wires version

SME-8-O-K-LED-24-RR

– Plug or cable (2 x 0.14 mm²)

– CE conformance, IP 65/67

– Suitable for a wide variety of

Festo cylinders

– Fast and reliable due to simple

clamping into the sensor slot

– Mounted on round section

cylinders using special

mounting kit

– Reproducibility of switching

point: ± 0.1 mm

Proximity sensors for cylinders

with size 10 slot. Contact-type

(reed switch)

SME-10F-…-RR

In-line sensor with 2.5 m cable

SME-10F-…-K2,5L-...

Angled sensor with 2.5 m cable

SME-10F-…-K2,5Q-...

In-line sensor with plug version

SME-8-S-…

Straight plug with cable

SIM-M8-3GD-…

Angled plug with cable

SIM-M8-3WD-…

In-line sensor with 2.5 m cable

SME-8-K-...

In-line sensor with plug version

SME-10F-…-K0,3L-...

Angled sensor with plug version

SME-10F-…-K0,3Q-...

Cleanroom class ISO 4 (FS209E class 10)

Proximity sensors SME-8-…-RR, SME-10F-…-RR Cable and plug version

Type Part No. Version Connection Contact rating

Switching current

Switching voltage

Switch-on time

Switch-off time

Weight

SME-8 contact-type, reed switch

SME-8-S-LED-24-RR 15024688 In-line 3-pin M8 10 W 500 mA 12...30 V DC ≤ 0.5 ms 0.03 ms 0.008 kg

SME-8-K-LED-24-RR 15024689 In-line 3-core cable, 2.5 m

10 W 500 mA 12...30 V DC ≤ 0.5 ms 0.03 ms 0.030 kg

SME-8-K-LED-230-RR 15024692 230 V 2-core cable, 2.5 m

10 W AC: 200 mA DC: 120 mA

3...250 V ≤ 0.5 ms 0.03 ms 0.040 kg

SME-8-O-K-LED-24-RR 15024695 NC contact 3-core ca-ble, 7.5 m

2 W 50 mA 12...30 V DC ≤ 2.0 ms ≤ 0.2 ms 0.085 kg

SME-10 contact-type, reed switch

SME-10F-DS-24V-K0,3L-M8D-RR 15024702 In-line 3-pin M8 10 W 500 mA 12...30 V DC ≤ 0.5 ms 0.03 ms 0.006 kg

SME-10F-DS-24V-K0,3Q-M8D-RR 15024707 Angled 3-pin M8 10 W 500 mA 12...30 V DC ≤ 0.5 ms 0.03 ms 0.006 kg

SME-10F-DS-24V-K2,5L-OE-RR 15024709 In-line 3-core cable, 2.5 m

10 W 500 mA 12...30 V DC ≤ 0.5 ms 0.03 ms 0.020 kg

SME-10F-DS-24V-K2,5Q-OE-RR 15024710 Angled 3-core cable, 2.5 m

10 W 500 mA 12...30 V DC ≤ 0.5 ms 0.03 ms 0.020 kg

M8 plug socket with cable (3 pins) Type Part no.

Straight plug socket 2.5 m SIM-M8-3GD-2,5-PU-RR 15024996

5 m SIM-M8-3GD-5-PU-RR 15024997

10 m SIM-M8-3GD-10-PU-RR 15024998

2.5 m SIM-M8-3WD-2,5-PU-RR 15024999

5 m SIM-M8-3WD-5-PU-RR 15025002

10 m SIM-M8-3WD-10-PU-RR 15025003

Angled plug socket

BN

BK

BU

RL

BN

BU RL

BN

BK

BU

RL

1

4

3

BN

BK

BU

RL

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41 Cleanroom Product Range-subjected to change

SME-8-K-LED-24-RR

SME-8-O-K-LED-24-RR

SME-8-K-LED-230-RR

SME-8-S-LED-24-RR

SME-10F-DS-24V-K2,5L-OE-RR

SME-10F-DS-24V-K2,5Q-OE-RR

SME-10F-DS-24V-K0,3L-M8D-RR

SME-10F-DS-24V-K0,3Q-M8D-RR

Proximity sensors SME-8-…-RR, SME-10F-…-RR Cable and plug version

Cleanroom class ISO 4 (FS209E class 10)

1

2

3

1

2

3

4

5

6

Connecting cable

Plug suitable for plug

socket with cable

SIM-M8-…

Clamping component

Yellow LED

Switching point

Yellow LED

SME-8-K-LED-24, 3-core

cable, 2.5 m long

(3x0.14 mm²)

SME-8-O-K-LED, 3-core cable,

7.5 m long (3x0.14 mm²)

SME-8-S-LED-24, 3-core

cable, 0 3 m long

(3x0 14 mm²)

SME-8-K-LED-230, 2-core

cable, 2.5 m long

(2x0.25 mm²)

Yellow LED

Max. tightening torque 0.2

Nm (threaded pin M3 x 5)

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42 Cleanroom Product Range-subjected to change

Important technical data:

– For used in Cleanroom class

ISO 4 (FS209E class 10),

max. speed should be less

than 0.3 m/s

– For used in Cleanroom class

ISO 5 (FS209E class 100),

max. speed should be less

than 1.0 m/s

– To achieved the least parti-

cle emission during clean-

room application it is recom-

mended to ensure sufficient

damping when the rodless

cylinder come to the end of

the stroke. This can be

achieved by optimising the

in-build pneumatic end

cushioning or to attach a

external shock absorber.

Accessories

Foot mounting

HNC-40 for DGPL-25-…-RR-SA

HNC-63 for DGPL-32-…-RR-SA

and DGPL-40-…-RR-SA

Sensor cable (Page 40)

SIM-M8-3…-RR

Double acting, pneumatic linear

drive units with slide, adjustable

end-position cushioning and

recirculating ball bearing guides

DGPL-...-KF-RR-SA

– Precision, rigid guide

– Greater flexibility thanks to

wide choice of mounting and

assembly options

– Variable end-position cushion-

ing systems

– Wide range of options for

mounting on drive units

– System product for position-

ing, handling and assembly

technology

Order example:

Part no: 15059878

Type DGPL-32-500-PPV-A-B-KF-

RR-SA

Double acting linear drive, Ø 32

mm, stroke 500 mm, with adjust-

able end-position cushioning and

recirculating ball bearing guides

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Pneumatic linear drives DGPL-…-KF-RR-SA Ø 25, 32, 40 mm, stroke 10 to 1000 mm

Type Part No. Piston Ø [mm]

Stroke [mm]

Theoretical force at 6 bar [N]

Cushioning length [mm]

Connection

DGPL-25-…-PPV-A-B-KF-RR-SA 15059877 25 100…1000 295 18 G1/8

DGPL-32-…-PPV-A-B-KF-RR-SA 15059878 32 100…1000 483 20 G1/8

DGPL-40-…-PPV-A-B-KF-RR-SA 15059879 40 100…1000 754 30 G1/4

Part no: 15060241

– Shock absorber package for

DGPL-40-…-RR-SA

– Shock absorber: 2 x YSR-16-

20-C

– Shock absorber retainer with

end stop: 2 x KYP-40-SA

Optional packages:

Part no: 15060240

Shock absorber package for

DGPL-25-…-RR-SA

– Shock absorber: 2 x YSR-12-

12-C (2x)

– Shock absorber retainer with

end stop: 2 x KYP-25-SA

Part no: 15085313

– Shock absorber package for

DGPL-32-…-RR-SA

– Shock absorber: 2 x YSR-12-

12-C

– Shock absorber retainer with

end stop: 2 x KYP-32-SA

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43 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Pneumatic linear drives DGPL-…-KF-RR-SA Ø 25, 32, 40 mm, stroke 10 to 1000 mm

Technical data Type DGPL

Size 25 32 40

Pneumatic data Min. operating pressure [bar] 2 2 1.5

Max. operating pressure [bar] 8 8 8

Connections G1/8 G1/8 G1/4

Mechanical data Design Pneumatic linear drive unit with slide

Guide Recirculating ball bearing guide (KF)

Size Piston Ø [mm] 25 32 40

Stroke length [mm] 100 ... 1000

Cushioning length [mm] 18 20 30

Effective force at 6 bar (theoretical) [N] 295 483 754

Max. speed DGPL-...-KF [m/s] 1

Weights Basic weight DGPL-...-KF [kg] 1.52 2.72 4.48

Per 10 mm stroke DGPL-...-KF [g] 53 69 97

Materials Drive unit Profile barrel Anodised aluminium

End cap Anodised aluminium

Cover strip Stainless steel

Driver Anodised aluminium

Seals –

Guide unit Profile –

End cap –

Slide Anodised aluminium

Guide rail KF Corrosion resistant steel

Ambient conditions Temperature range [°C] –10 …60

Tube Profile Aluminium, nickel plated

End cover Aluminium, nickel plated

Part no: 15060239

Proximity Sensor package (NPN)

– Proximity Sensor: 2 x SIEN-

M8NB-PS-S-L

– Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-

18/25-M8

– Slot nuts: 2 x ZVB-8

Optional packages:

Part no: 15060238

Proximity Sensor package (PNP)

– Proximity Sensor: 2 x SIEN-

M8B-PS-S-L

– Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-

18/25-M8

– Slot nuts: 2 x ZVB-8

1

2

3

4

5

6

1

2

3

4

5

6

Seal

End cap

Cover strip

Profile barrel

Driver

Slide

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44 Cleanroom Product Range-subjected to change

Pneumatic linear drives DGPL-…-KF-RR-SA Ø 25, 32, 40 mm, stroke 100 to 1000 mm

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Ø [mm] B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14

25 103.2 86 76.2 43 31 9.5 32 12 16.5 12.5 41.2 32 38 12

32 128.6 112 101.6 55 45 12 47 12 19 9.5 52.4 20 56.5 15

40 158 127 127 69.2 57.8 22 55 0 22 20 64.3 20 56.5 18

Ø [mm] B15 B16 B17 B18 D1 D2 D3 D4 D5 D6 D7 H1 H2 H3

25 5 18.2 49.5 29 Ø 6 M6 M6 G1/8 M4 Ø 14 G7 M4 98.2 95.2 38

32 5 20.8 60 29 Ø 6 M8 M6 G1/8 M4 Ø 25 G7 M6 123.6 120.6 56.5

40 5 28.5 70 29 Ø 6 M8 M8 G1/4 M4 Ø 25 G7 M6 155 146 56.5

Ø [mm] H4 H5 H6 H7 L1 L2 L3 L4 L5 L6 L7 L8 L9 L10

25 76.2 9.5 9 25.3 244 220 105 88 232 140 73 43 40 50

32 101.6 12 10 30 294 270 131 88 282 190 120 40 60 60

40 127 20.5 20 38 352 320 167 88 336 220 120 40 60 60

1

2

3

4

5

6

7

8

9

+ = plus stroke length

For foot mounting HNC-40/63

Sensor package

For mounting of switch lug

SF-25

For mounting of shock

absorber retainer

For centering sleeve

Vacuum suction port G1/8

For slot nut NSTL-25

Shock absorber retainer

Air connections

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45 Cleanroom Product Range-subjected to change

Double acting, pneumatic linear

drive units with slide, adjustable

end-position cushioning and

recirculating ball bearing guides

DGC-12-...-KF-YSR-A-RR-SA

DGC-...-KF-PPV-A-RR-SA

– Air connection options on 2

sides (on the end face or from

the front)

– Proximity sensors can be inte-

grated, therefore there is no

protrusion. Cable can be

guided through the slot be-

hind a second sensor

– Profile mounting MUC remains

on the base plate after the

drive is dismantled. This

means faster assembly and

removal without repeat adjust-

ment.

– Precision end-position adjust-

ment 0 … 25 mm per side

– Adjustable pneumatic end

position cushioning

Order example:

Part no: 15083880

Type: DGC-32-500-KF-PPV-A-RR-

SA

Double acting linear drive, Ø 32

mm, stroke 500 mm, with build in

adjustable end-position cushion-

ing and recirculating ball bearing

guides

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Accessories

Foot mounting

HPC-...

Profile mounting

MUC-...

Proximity sensor for fitting

in slot (Page 40)

SME-10…

Cleanroom class ISO 5 (FS209E class 100)

Pneumatic linear drives DGC-…-KF-RR-SA Ø 12, 18, 25, 32, 40 mm, stroke 10 to 1000 mm

Type Part No. Piston Ø [mm]

Stroke [mm]

Theoretical force at 6 bar [N]

Cushioning length [mm]

Adjustable end position [mm]

Connection

DGC-12-…-KF-YSR-A-RR-SA 15083878 12 10…1000 68 Adjustable 0...10 M5

DGC-18-…-KF-PPV-A-RR-SA 15083814 18 10...1000 153 16.5 0...5 M5

DGC-25-…-KF-PPV-A-RR-SA 15083879 25 10...1000 295 15.5 0...2 G1/8

DGC-32-…-KF-PPV-A-RR-SA 15083880 32 10...1000 483 17.5 0...4 G1/8

DGC-40-…-KF-PPV-A-RR-SA 15083881 40 10…1000 754 29.5 0...5 G1/4

Piston Ø Max. perm. applied load [m] in kg / at max. load distance [r] in mm

Guide characteristics

[mm] [kg] / [mm] Fy [N] Fz [N] Mx [Nm} My [Nm] Mz [Nm]

12 1.8 / 35 650 650 3.5 10 10

18 10 / 35 1850 1850 16 51 51

25 30 / 50 3050 3050 36 97 97

32 30 / 50 3310 3310 54 150 150

40 50 / 50 6890 6890 144 380 380

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46 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Pneumatic linear drives DGC-12-...-KF-YSR-RR-SA Ø 12, 18, 25, 32, 40 mm, stroke 10 to 1000 mm

1

2

3

4

5

6

7

DGC SX1 SX2 SX3 SX4 SX5 SX6 SX7 SX8 SY1 SY2 SY3 SY4 SY5 SY6

±0.03 ±0.2 ±0.2 ±0.2 ±0.03 ±0.03 ±0.2 ±0.03 ±0.1

25 40 44 74 104 - - 118.5 138.5 32 76 - 25.5 10 8

32 40 70 100 131 - - 145 165 47 88.7 20 29.5 10 8

40 40 76 116 169 40 40 194.5 214.5 55 108.2 20 34.7 10.5 8.5

View A: Ø 25, Ø 32, Ø 40 Slide and suction adapter View A: Ø 18 Slide and suction adapter

Air connection options on 2 or

3 faces of end cap

Air connection options on 2

faces of end cap, for air

connection at one end

Sensor slot for proximity

sensor

Holes for foot mounting

Holes for centering sleeve ZBH

Hole for centering pin ZBS

Vacuum port

View A: Ø 12 Slide and

suction adapter

Page 47: doc.infoxmation.comdoc.infoxmation.com/xlk/auto/festo/xlk0000000000404.pdf · 2019. 10. 16. · 4 Cleanroom Product Range-subjected to change The cleanroom project initiated by Festo

47 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Pneumatic linear drives DGC-…-KF-RR-SA

Ø 12, 18, 25, 32, 40 mm, stroke 10 to 1000 mm

Ø B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14 B15

[mm] ± 0.05 ± 0.1 ± 0.05 ± 0.1 ± 0.1 ± 0.05 ± 0.1 ± 0.05

18 44.5 49.9 19.5 8.8 21 31 0.8 3.8 1 2.4 5.5 15.5 39 19.5 60

25 59.8 66 30 12.65 30 42 1 6.65 1 3.5 9.3 21 53 29 76

32 73 79 38.5 5.7 63.1 57.5 – 8.5 1.5 14 14.9 18 65 38.5 88.7

40 91 98.5 45 17.2 55 65 – 12.2 2 8 16.5 24.8 80.5 45 108.2

Ø D1 D2 D3 EE H1 H2 H3 H4 H5 H6 H7 H8 H9 H10 H11

[mm] ± 0.05 Ø H7 ± 0.1 ± 0.1 ± 0.1 ± 0.1 ± 0.1 ± 0.1 ± 0.1 ± 0.05

18 2 M4 5 M5 56.3 23.1 55 9.6 13.4 20 4.6 2.4 25.2 46 8.5

25 3 M5 9 G 1/8 68 29 67 13.65 15.8 24 7.65 4.5 29 55.5 12

32 3 M6 9 G 1/8 78.5 30 77 5.7 17 27.7 8.5 14 35.2 63.8 11.5

40 4 M6 9 G 1/4 99.5 41.5 97.5 17.2 25 36.5 12.2 8 44 81.5 15

Ø H12 J1 J2 J3 L1 L2 L3 L4 L5 L6 T1 T2 T3 T6

[mm] ± 0.05 ± 0.1 ± 0.1 ± 0.1 +0.9/–0.2 ± 0.2

18 30 20 16.5 11 150 74.5 5.7 5.8 15 5.5 9 2 3.1 15

25 35 26.1 18.6 17 200 100 10.5 10.6 24.5 10.6 17.5 2 2.1 17.3

32 50 30 22 18.5 250 124.8 14.5 14.5 30.5 14.5 15 2 2.1 20

40 60 35 26 26 300 150 14.6 14.6 33.5 14.6 20 3 2.1 25.7

View C View B: Dia 25, 32 and 40 mm View B: Dia 18

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48 Cleanroom Product Range-subjected to change

Clamping module

EV-…-RR

– Single-acting

– Flat space-saving construction

– Hermetically sealed

– Ideal for clamping tasks

– Pressure plate to protect dia-

phragm

– For application against abra-

sive surfaces, a metal pressure

plate can be snap-fitted to the

diaphragm to protect it against

external damage. Type; EV-…-

DP.

– Housing; Al die-cast. Dia-

phragm; polyurethane

For rapid clamping of sensitive

and slightly uneven workpieces

with small dimensional devia-

tions. This cylinder series is

suitable for installation in all

types of handling devices.

The flat design and relatively

high clamping forces make the

cylinders particularly suitable

for clamping block-shaped

workpieces.

As the cylinders

do not have any stroke limita-

tion, they should be operated

only against a workpiece. The

return force is provided by the

pre-tensioned diaphragm.

Cleanroom class ISO 5 (FS209E class 100)

Clamping modules EV-…-RR Ø 12, 16, 20, 25, 32, 40, 50, 63 mm, stroke 3 to 5 mm

Type Part No. Piston Ø Stroke Clamping force at 6 bar [N]

[mm] [mm] Stroke 1mm Stroke max.

EV-12-3-RR 15024495 12 3 55 56

EV-16-4-RR 15024496 16 4 102 125

EV-20-4-RR 15024497 20 4 162 187

EV-25-4-RR 15024498 25 4 226 271

EV-32-5-RR 15024499 32 5 376 456

EV-40-5-RR 15024500 40 5 680 675

EV-50-5-RR 15024501 50 5 1090 1075

EV-63-5-RR 15024502 63 5 1660 1640

Type B1 B2 B3 D1 Ø D2 Ø D3 D4 Ø D5 Ø D6 Ø H1 H2 H3 H4 H5 L1 L2

EV-12-3-RR 29 16.5 13 3.5 2 M3 6.5 3 11 10.5 3 4 3.5 1.5 25 18

EV-16-4-RR 33 18.5 15 3.5 2 M3 6.5 7 15 10.5 4 4 3.5 1.5 29 22

EV-20-4-RR 37 20.5 16.5 4.5 2 M3 6.5 11 19 10.5 4 4 3.5 1.5 33 25

EV-25-4-RR 42 23 18.5 5.5 2 M3 6.5 16 24 10.5 4 4 3.5 1.5 38 28

EV-32-5-RR 49 26.5 21 5.5 2 M3 6.5 23 31 10.5 5 4 3.5 1.5 45 34

EV-40-5-RR 57 30.5 25 5.5 2 M3 6.5 31 39 10.5 5 4 2.5 1.6 53 42

EV-50-5-RR 67 35.5 29 5.5 2 M3 6.5 41 49 10.5 5 4 2.5 1.6 63 49

EV-63-5-RR 80 42 34 5.5 2 M3 6.5 54 62 10.5 5 4 2.5 1.6 76 60

1

2

3

Max. permissible stroke

against stop (workpiece)

Clamping area

The pressure plate can be

snap fitted onto the

diaphragm of the clamping

module

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49 Cleanroom Product Range-subjected to change

Accessories

Proximity sensor for fitting

in slot (Page 40)

SME-10…

Double acting, twin piston rotary

actuator with spigot rotating

shaft

DRQD-…-J20-A-ZW-ZS-RR

Double acting, twin piston rotary

actuator with rotating flange

DRQD-…-J20-A-FW-ZS-RR

Defined interfaces, high

accuracy and extremely good

torsional rigidity make this rotary

actuator the perfect choice for

Festo modular system for

handling of small part.

– 90° rotation angle

– 180° rotation angle

– Contact-less end-position

sensing

– Twin-piston principle: Back-

lash-free, dynamic and

powerful

– Compressed air supply at

one end cap

– Flexible precision end posi-

tion adjustment

– ZW: Spigot shaft

– FW: Flanged shaft

– Variable mounting options,

direct via centering sleeves

Order example:

Order no: 15083937

Type: DRQD-8-180-J20-A-FW-

ZS-RR

Rotary actuator at 180 °

operation with rotating flange

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Cleanroom class ISO 5 (FS209E class 100)

Twin piston mini rotary actuators DRQD-…-J20-A-ZS-RR Ø 6, 8 12, angle 90° and 180°

Type Part No. Torque at 6 bar

Max. permissible mass moment of inertia

Max. permissible freq Repetition accuracy

Description

[Nm] [kgm²] [Hz] at 90° [Hz] at 180°

DRQD-6-...-J20-A-ZW-ZS-RR 15083936 0.16 0.075 x 10 –4 5 3.5 J20: End position adjustment +6°/-20° A: Magnetic sensing ZW: Spigot shaft FW: Flange shaft ZS: Socket screw

DRQD-8-...-J20-A-ZW-ZS-RR 15083937 0.33 0.250 x 10 –4 4 2.5

DRQD-12-...-J20-A-ZW-ZS-RR 15083938 0.76 0.700 x 10 –4 3 2

DRQD-6-...-J20-A-FW-ZS-RR 15083936 0.16 0.075 x 10 –4 5 3.5

DRQD-8-...-J20-A-FW-ZS-RR 15083937 0.33 0.250 x 10 –4 4 2.5

DRQD-12-...-J20-A-FW-ZS-RR 15083938 0.76 0.700 x 10 –4 3 2

Less then 0.2 °

ZW

FW

Direction of rotation of the drive

shaft

Pressure applied at connections

1 or 2 causes a rotary movement

in R1 or R2 direction respectively.

R1 2

1

R2

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50 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Twin piston mini rotary actuators DRQD-…-J20-ZW-A-ZS-RR Ø 6, 8 12, angle 90° and 180°

Ø Swivel B1 B2 B3 B4 B5 B8 D1 D2 D3 D4 D7 D8 D9 D10 EE H1 H2

angle [°] Ø g7 Ø g6 Ø f7 Ø H8 Ø H8 Ø H7

6 90 15.4 18.2 16 2 13.6 16.7 6 8 20 M2.5 2 6 M4 7 M3 31 6.8

180

8 90 17 22.2 20 4 16.2 20.7 8 10 22 M3 – 8 M5 9 M3 34 8.8

180

12 90 21 22.2 20 6 18.2 20.7 8 10 22 M3 – 8 M5 9 M3 41 8.8

180

Ø Swivel L1 L2 L3 L5 L7 L8 N1 T1 T2 T3 T4 T6 T8 ß1 ß2

angle [°] max. ±0.03 ±0.03 P9

6 90 46.7 20.2 7.1 7.5 20 30 2 12 7 2 3.4 1.6 1.4 8 2.5

180 61.8 27.8

8 90 54.2 23.5 8.1 7 – 36 2 16 9 – 4.6 2 2 10 3

180 71.8 32.3

12 90 59.2 26 9.1 8 – 36 2 16 9 – 4.6 2 2 13 4

180 76.8 34.8

1

2

3

4

5

aJ

Sensor slots for type

SME-10- proximity sensors

Supply ports

Mounting thread

Internal hex-head screw for

end position adjustment

Woodruff key position at 0°

Centering sleeves (2 ea.

included in scope of delivery)

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51 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Twin piston mini rotary actuators DRQD-…-J20-FW-A-ZS-RR Ø 6, 8 12, angle 90° and 180°

Ø Swivel B1 B2 B3 B4 B5 B6 D1 D2 D3 D5 D6 D7 D8 D9 D10

Angle [°] Ø Ø Ø H7 Ø g7 Ø H8 Ø H8 H7

6 90 15.4 7.7 4 2 13.6 1.5 23 16 M3 3 8 2 6 M4 7

180

8 90 17 7.7 4 4 16.2 1.5 27 21 M3 3 11 – 8 M5 9

180

12 90 21 7.7 4 6 18.2 1.5 27 21 M3 3 11 – 8 M5 9

180

Ø Swivel EE H1 L1 L2 L3 L5 L7 L8 T3 T4 T6 T8 ß 1 ß 2

Angle [°] max. ±0.03 ±0.03

6 90 M3 31 46.7 20.2 7.1 7.5 20 30 1.8 3.4 1.6 1.4 8 2.5

180 61.8 27.75

8 90 M3 34 54.2 23.45 8.1 7 – 36 – 4.6 2 2 10 3

180 71.8 32.25

12 90 m3 41 59.2 25.95 9.1 8 – 36 – 4.6 2 2 13 4

180 76.8 34.75

1

2

3

4

5

aJ

Sensor slots for type

SME-10- proximity sensors

Supply ports

Mounting thread

Internal hex-head screw for

end position adjustment

Position of designated

threaded hole at 0°

Centering sleeves (2 ea.

included in scope of delivery)

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52 Cleanroom Product Range-subjected to change

Trunnion mounting

ZNCM-…, LNZG-...

Swivel mounting

SNCL-…, SNCB-...

Swivel mounting

SNCB-…, LNG-..., LSN-...

Trunnion flange mounting

ZNCF-…, LNZG-...

Swivel mounting

SNC-…, LSNG-...

Swivel mounting

SNCS-…, LBG-...

Double-acting standard cylinders

with adjustable end-position

cushioning

DNC-...-PPV-RR-SA

Double-acting standard cylinders

with contactless end-position

sensing and adjustable end-

position cushioning

DNC-...-PPV-A-RR-SA

– The modern design and con-

struction saves up to 11%

more space compared to ordi-

nary standard cylinders.

– The proximity sensors sit flush

in the profile slot. There is

therefore no need for an addi-

tional mounting kit.

– An extensive range of mount-

ing accessories makes it possi-

ble to install the solution virtu-

ally anywhere.

– The widest range of variants on

the market provides the right

DNC cylinder for every applica-

tion.

– These standard cylinders com-

ply with the following stan-

dards:

– ISO 6431 (international)

– DIN ISO 6431 and

– VDMA 24 562 (Germany)

– NF E 49 003.1 (France)

– UNI 10 290 (Italy)

Order example:

Part no: 15024244

Type: DNC-50-500-PPV-A-RR-

SA

Double-acting standard cylin-

ders, diameter 50 mm, stroke

500 mm, with contactless end-

position sensing and adjust-

able end-position cushioning

Mounting options

Foot mounting

HNC-…

Flange mounting

FNC-…

Proximity sensor (Page 40)

SME-8-…, SMT-8-...

Standard cylinders DNC-…-RR-SA Ø 32, 40, 50 mm, stroke 10 to 1000 mm

Cleanroom class ISO 5 (FS209E class 100)

Type [without mag-netic piston]

Part No. Type [with magnetic piston]

Part No. Piston Ø [mm]

Stroke [mm]

Thrust at 6 bar [N]

Return force [N]

Cushioning length [mm]

Connec-tion

DNC-32-…-PPV-RR-SA 15024237 DNC-32-…-PPV-A-RR-SA 15024157 32 10 …1000 483 415 20 G1/8

DNC-40-…-PPV-RR-SA 15024238 DNC-40-…-PPV-A-RR-SA 15024243 40 10 …1000 754 633 20 G1/4

DNC-50-…-PPV-RR-SA 15024240 DNC-50-…-PPV-A-RR-SA 15024244 50 10 …1000 1178 990 22 G1/4

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53 Cleanroom Product Range-subjected to change

Standard cylinders DNC-…-RR-SA Ø 32, 40, 50 mm, stroke 10 to 1000 mm

Cleanroom class ISO 5 (FS209E class 100)

Ø AM B BG E EE EE1 J2 J3 KK L1 L2 LL1 LL2

[mm] Ø d11

32 22 30 16 45 G 1/8 M5 6 5.2 M10 x1.25 18 94 22 18

40 24 35 16 54 G 1/4 G 1/8 8 6 M12 x1.25 21.5 105 26.5 20

50 32 40 17 64 G 1/4 G 1/8 10.4 8.5 M16 x1.5 28 106 33 26

Ø L7 MM PL PL1 RT TG VA VD WH ZJ SW1 SW2 SW3

[mm] Ø f 8

32 3.3 12 15.6 5.5 M6 32.5 4 10 26 120 10 16 6

40 3.6 16 14 7 M6 38 4 10.5 30 135 13 18 6

50 5.1 20 14 7.5 M8 46.5 4 11.5 37 143 17 24 8

1

2

3

4

+ = plus stroke length

Socket head screw with fe-

male thread for mounting

attachments

Regulating screw for adjust-

able end-position cushioning

Sensor slot for proximity

sensor SME/SMT-8

Vacuum suction port

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54 Cleanroom Product Range-subjected to change

Double-acting powerful mini slide

with shock absorber cushioning

and adjustable end-position

SLT-...-A-CC-B-RR-SA

– Precision, rigid guide

– Repetition accuracy 0.02 mm

– Highly flexible thanks to

versatile, direct assembly and

connection

– Sensors can be integrated

– Powerful, double barrel

– Compact design through air

connections at rear

– Extremely compact drive

thanks to cushioning sys-

tems integrated in the pro-

file section

– Versatile combination

options

– Include drives and gripper

– System product for handling

and assembly technology

Order example:

Order no: 15081847

Type: SLT-16-50-A-CC-B-RR-SA

Double acting mini slide,

diameter 16 mm, 50 mm

stroke with shock absorber

at both ends

Cleanroom class ISO 5 (FS209E class 100)

Mini slide SLT-…-A-CC-B-RR-SA Ø 10, 16, 20, 25 mm, stroke 30 to 100 mm

Type Part no. Stroke Connec-tions

Adj. End posi-tion range

Cushioning range

Advance force

Retract force

Max. Impact energy at end position

Max. allow-able speed

[mm] [mm] [mm] at 6 bar at 6 bar [Nm] [m/s]

SLT-10-30-A-CC-B-RR-SA 15080474 30 M5 4 5 94 79 1 0.8

SLT-10-40-A-CC-B-RR-SA 15082026 40

SLT-10-50-A-CC-B-RR-SA 15078924 50

SLT-10-80-A-CC-B-RR-SA 15082025 80

SLT-16-30-A-CC-B-RR-SA 15083562 30 M5 5 5 242 218 2 0.8

SLT-16-40-A-CC-B-RR-SA 15083563 40

SLT-16-50-A-CC-B-RR-SA 15081847 50

SLT-16-80-A-CC-B-RR-SA 15083564 80

SLT-16-100-A-CC-B-RR-SA 15083565 100

SLT-20-30-A-CC-B-RR-SA 15083566 30 G1/8 12 8 376 317 3 0.8

SLT-20-40-A-CC-B-RR-SA 15083567 40

SLT-20-50-A-CC-B-RR-SA 15083568 50

SLT-20-80-A-CC-B-RR-SA 15083569 80

SLT-20-100-A-CC-B-RR-SA 15083570 100

SLT-25-30-A-CC-B-RR-SA 15083571 30 G1/8 12 12 590 495 10 0.8

SLT-25-40-A-CC-B-RR-SA 15083572 40

SLT-25-50-A-CC-B-RR-SA 15083573 50

SLT-25-80-A-CC-B-RR-SA 15083574 80

SLT-25-100-A-CC-B-RR-SA 15083575 100

Accessories

Proximity sensor for fitting

in slot (Page 40)

SME-10…

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

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55 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Mini slide SLT-…-A-CC-B-RR-SA Ø 10, 16, 20, 25 mm, stroke 30 to 100 mm

Piston Ø Stroke Static Dynamic

M01 M02 M03 M01 M02 M03 A B C

[mm] [mm] [Nm] [Nm] [Nm] [Nm] [Nm] [Nm] [mm] [mm] [mm]

10 30 10 10 10 2.5 2.5 1.4 19.2 25 11.8

40 10 10 10 2.2 2.2 1.3 19.2 25 11.8

50 16 16 13 3.1 3.1 1.4 24.2 25 11.8

80 27 27 17 4.3 4.3 1.5 31.7 25 11.8

16 30 18 18 19 4.2 4.2 3 20.7 33 15.3

40 18 18 19 3.8 3.8 2.7 20.7 33 15.3

50 21 21 20 4.6 4.6 2.8 24 33 15.3

80 34 34 27 6 6 2.8 31 33 15.3

100 60 60 36 9.1 9.1 3.2 41 33 15.3

20 30 45 45 73 11 11 12 25 42.5 16.8

40 45 45 73 10 10 11 25 42.5 16.8

50 45 45 73 9 9 10 25 42.5 16.8

80 90 90 101 14 14 11 34.5 42.5 16.8

100 119 119 123 18 18 11 41.7 42.5 16.8

25 30 75 75 88 14 14 14 29.7 52 23

40 75 75 88 13 13 12 29.7 52 23

50 75 75 88 12 12 11 29.7 52 23

80 90 90 101 14 14 11 34.5 52 23

100 119 119 123 18 18 11 41.7 52 23

Correction factors

Combined load

The following torque equation must be satisfied with combined load:

Permissible loads

Static / Dynamic

Refer to calculation example on page 57

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56 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Mini slide SLT-…-A-CC-B-RR-SA Ø 10, 16, 20, 25 mm, stroke 10 to 100 mm

1

2

3

4

5

6

7

8

B1 B2 B4 B5 B6 B7 B8 B9 B10 D1 D2 D3 D4 D5 D6 D7 D8

H7 H7 H7 Ø Ø Ø H7 Ø H7

SLT-10 50 5.5 10 30 40 5 7 5 20 M5 8 7 M3 M4 5 M3 5

SLT-16 66 6.5 8 50 55 7 9 5 20 M6 10 9 M5 M5 7 M4 5

SLT-20 85 7 15 55 70 9 12 9 40 M8 11 12 M5 M5 9 M5 9

SLT-25 104 8 12 80 80 12 12 12 40 M8 11 12 M6 M6 12 M6 12

D9 D10 EE EE1 G1 H1 H2 H3 H4 H5 H6 H7 H8 H9 H10 H11 H12

SLT-10 M4 M8 x 1 M5 M5 10 30 9.4 5.5 11 20 2 4 10 5 15.15 5.5 1.5

SLT-16 M5 M10 x 1 M5 M5 10 40 13 6.5 13 20 2 4.5 15 13 20 6.5 1.5

SLT-20 M5 M12 x 1 G 1/8 G 1/8 14 49 19.5 9 19.7 20 2 6 19 16 30.5 9 2.5

SLT-25 M6 M16 x 1 G 1/8 G 1/8 14 60 21 10 21 40 2 5 25 10 34.5 10 1.5

Mounting thread

Centering holes (centering

sleeves included in scope of

delivery)

Through-holes for mounting

the drive

Supply ports

Sensor slots for SME-10

proximity sensors

Slim lock nuts are supplied

loose

Through-hole length for

mounting screws

Vacuum port

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57 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Mini slide SLT-…-A-CC-B-RR-SA Ø 10, 16, 20, 25 mm, stroke 10 to 100 mm

Stroke L1 L2 L3 L4 L5 L6 L7 L8 m n p

SLT-10 30 mm 92 82 7 21.7 20 20 82.5 15 1 2 1

40 mm 102 92 7 21.7 20 20 82.5 25 2 3 1

50 mm 122 112 7 21.7 20 40 102.5 25 2 3 2

80 mm 172 162 7 21.7 20 40 150.5 25 2 5 2

SLT-16 30 mm 97 85 6.7 24.2 20 20 80.5 22 1 1 1

40 mm 107 95 6.7 24.2 20 20 90.5 22 1 1 1

50 mm 122 110 6.7 24.2 20 40 100.5 28 2 1 2

80 mm 168 156 6.7 24.2 20 40 144.5 28 2 2 2

100 mm 209 197 6.7 24.2 20 40 186.5 28 2 3 2

SLT-20 30 mm 111 99 11.5 29.2 20 40 88 28 1 1 1

40 mm 121 109 11.5 29.2 20 40 98 28 1 1 1

50 mm 136 124 11.5 29.2 40 40 106 37 1 1 1

80 mm 181 169 11.5 29.2 40 80 149 37 2 2 2

100 mm 217 205 11.5 29.2 40 80 185 37 2 3 2

SLT-25 30 mm 122 108 10.7 32.7 40 40 102.5 25 1 1 1

40 mm 132 118 10.7 32.7 40 40 106.5 34 1 1 1

50 mm 145 131 10.7 32.7 40 40 116.5 34 1 1 1

80 mm 191 177 10.7 32.7 40 80 146.5 51 2 2 2

100 mm 224 210 10.7 32.7 40 80 173.5 57 2 3 2

L9 L10 L11 L12 L13 L14 L15 L16 L17 L18 T1 T2 T3 T4 T5 T6 ß1 ß2

min. min.

SLT-10 8 10 4 14 20 2 35 21.7 1 – 12 1.6 1.3 7 8 1.3 10 2.5

SLT-16 10 12 9 19 20 2 42 23.5 1 20 16 2.1 1.6 10 7 1.3 13 3

SLT-20 10 12 29 43 40 2 39 34 1 – 20 2.6 2.1 10 10 2.1 15 4

SLT-25 12 14 29 43 40 2 44 49.5 1 – 20 2.6 2.6 12 11 2.6 19 5

Calculation example

Static load

Given:

Mini slide = SLT-16

Stroke length = 30 mm

Lever arm L1 = 0.040 mm

Torque M01perm. = 18 Nm

Correction factor A = 20.7 mm

= 0.0207m

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58 Cleanroom Product Range-subjected to change

The CLR linear/swivel clamp is

used for all types of clamping.

CLR-...-P-A-RR-SA

– Simple mechanical system

– Robust design

– Long service life

– Low initial, assembly and

maintenance expenditure

– Subsequently adjustable

swivel direction

– Compact dimensions for the tightest installation spaces

– Clamping finger sets including

slip-on rubber cap to protect

sensitive surfaces are avail-

able as accessories.

– Clamping finger can be freely

adjusted across a full 360°

– Can be repaired with wearing

parts kit

The combination of the linear and

swivel motion of the piston rod,

make it possible to insert and

remove work pieces even beyond

the clamping range. There is also

a possibility to choose between

swiveling to the right or left, while

the CLR also boasts a linear

stroke.

Order example:

Order no: 15083579

Type: CLR-16-20-R-P-A-RR-SA

Swivel clamp, diameter 16 mm,

20 mm clamping stroke, swivel

to the right to clamp.

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Mounting options

Foot mounting

HNA-…

Flange mounting

FNC-…

Cleanroom class ISO 5 (FS209E class 100)

Linear/swivel clamp CLR-...-P-A-RR-SA Ø 12, 16, 20, 25 mm, stroke 10 to 20 mm

Type Part no. Type Part no. Con-nection

Clamping force

Female rod thread

Clamping stroke

Swivel stroke

Total stroke

Swivel angle

Swivel to right Swivel to left at 6 bar [N] [mm] [mm] [mm] [°]

CLR-12-10-R-P-A-RR-SA 15083576 CLR-12-10-L-P-A-RR-SA 15083584 M5 51 M3 10 9 19 90

CLR-12-20-R-P-A-RR-SA 15082031 CLR-12-20-L-P-A-RR-SA 15083585 20 9 29

CLR-16-10-R-P-A-RR-SA 15083578 CLR-16-10-L-P-A-RR-SA 15083586 M5 90 M4 10 10 20 90

CLR-16-20-R-P-A-RR-SA 15083579 CLR-16-20-L-P-A-RR-SA 15083587 20 10 30

CLR-20-10-R-P-A-RR-SA 15083580 CLR-20-10-L-P-A-RR-SA 15083588 M5 121 M6 10 12 22 90

CLR-20-20-R-P-A-RR-SA 15083581 CLR-20-20-L-P-A-RR-SA 15083589 20 12 32

CLR-25-10-R-P-A-RR-SA 15083582 CLR-25-10-L-P-A-RR-SA 15083590 M5 227 M6 10 12 22 90

CLR-25-20-R-P-A-RR-SA 15082032 CLR-25-20-L-P-A-RR-SA 15083591 20 12 32

Type Part no.

CLR-12-FS-RR-SA 15083592

CLR-16-FS-RR-SA 15083593

CLR-20/25-FS-RR-SA 15083594

Accessories

Clamping finger set CLR-…-FS-RR-

SA

Materials:

Clamp arm: anodised aluminium

Fixing screw, clamping screw and

lock nut: stainless steel

Protective cap: Polymer

Accessories

Proximity sensor for fitting

in slot

SME-10…

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59 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Linear/swivel clamp CLR-...-P-A-RR-SA Ø 12, 16, 20, 25 mm, stroke 10 to 20 mm

Ø AF BG D1 E EE H G1 KF L2 L3 L4 L5

[mm] Ø

12 10 17 4.5 27.5 M5 3.25 10 M3 70.6 3.5 21.8 4.9

16 12 17 4.5 29 M5 3.25 10 M4 72.5 3.5 23.5 4.9

20 15 20 5.5 35.5 M5 4.75 10 M6 89.5 5 43.8 7.4

25 15 20 5.5 39.5 M5 4.75 10 M6 92.5 5 45.8 7.4

Ø L6 MM PL PL1 PL2 R RT TG WH ß 1 ß 2

[mm] Ø

12 13.5 6 6 15.1 5 18.2 M4 16 10.9 5 3

16 13.5 8 6.5 15 5 19.3 M4 18 10.9 7 3

20 15 12 6 6 5 23.7 M5 22 16.4 10 5

25 15 12 6 6 5 26.3 M5 26 16.4 10 5

+ = plus clamping stroke length

++ = plus 2 x clamping stroke

length

1 Vacuum port

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60 Cleanroom Product Range-subjected to change

Standard servo motor

MTR-AC-...

Important technical data:

– For used in Cleanroom class

ISO 4 (FS209E class 10),

max. speed should be 0.5

m/s and max. acceleration 1

m/s²

– For used in Cleanroom class

ISO 5 (FS209E class 100),

max. speed should be 1.5

m/s and max. acceleration 4

m/s²

– Repetition accuracy: ± 0.1

mm

– Ambient temperature: 0…

+40°C

– Protection class on cover

strip: IP 40

– To simplify ordering only

one type is included in the

Cleanroom product range.

Please contact Festo for

other variations

Accessories:

Single phase motor controller

(for used with PNP sensors)

SEC-AC-305/PO1

Electromechanical axes

Tooth belt drives units with slide,

and recirculating ball bearing

guides housed into a tube profile

with end cover plates.

DGE-25-...-ZR-LK-RV-KG-KF-RR-SA

– Precision, rigid guide

– Greater flexibility thanks to wide

choice of mounting and assem-

bly options

– Wide range of options for

mounting on drive units

– Comprehensive range of mount-

ing accessories for multi-axis

combinations

– Optimally adapted motor con-

troller combinations

Order example:

Part no: 15059855

Type DGE-25-500-ZR-LK-RV-KG-KF-

RR-SA

Electrical axes, tooth belt linear

drive, Ø 25 mm, stroke 500 mm

ZR: With tooth belt

LK: No drive on left

RV: Drive shaft on right, front

KG: Drive come with coupling hous-

ing and motor flange

KF: Recirculating ball bearing

guides

RR-SA: Product modified for

cleanroom use

Material:

Drive profile barrel: Anodised

aluminium

Tube with end plates: Aluminium,

nickel plated

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Toothed belt drives DGE-...-ZR-LK-RV-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

Type Part No. Piston Ø Stroke

Max. feed force

[mm] [mm] [N] Type Indexing [mm]

Width [mm]

Effective radius [mm]

Feed constant [mm/rev]

DGE-25-...-ZR-LK-RV-KG-KF-RR-SA 15059855 25 100…1000 260 15LL-3MR-35M-610

3 15 20.05 63

DGE-40-...-ZR-LK-RV-KG-KF-RR-SA 15059856 40 100…1000 610 25LL-5MR-30M-610

5 25 31.83 100

Toothed belt

Foot mounting

HNC-40 for DGE-25-…-RR

HNC-63 for DGE-40-…-RR

Sensor cable (Page 40)

SIM-M8-…-RR

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61 Cleanroom Product Range-subjected to change

Optional packages:

Part no: 15060234

Basic servo motor package (used

with PNP sensors) for DGE-25-…-

ZR-…-RR consisted of:

– Motor controller:

SEC-AC-305/PO1

– Standard servo motor:

MTR-AC-70-3S-AA

– Coupling: KSE-30-D08-D11

– Cable set (5 m): KSEC-AC-5

Part no: 15060235

Basic servo motor package (used

with PNP sensors) for DGE-40-…-

ZR-…-RR consisted of:

– Motor controller:

SEC-AC-305/PO1

– Standard servo motor:

MTR-AC-100-3S-AA

– Coupling: KSE-40-D15-D19

– Cable set (5 m): KSEC-AC-5

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Toothed belt drives DGE-...-ZR-LK-RV-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

1

2

3

4

5

6

1

2

3

4

5

6

Part no: 15060238

Proximity Sensor package (PNP)

– Proximity Sensor: 2 x SIEN-

M8B-PS-S-L

– Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-

18/25-M8

– Slot nuts: 2 x ZVB-8

Part no: 15060239

Proximity Sensor package (NPN)

– Proximity Sensor: 2 x SIEN-

M8NB-NS-S-L

– Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-

18/25-M8

– Slot nuts: 2 x ZVB-8

Part no: 15060240

Shock absorber package for DGE-

25-…-RR-SA

– Shock absorber: 2 x YSR-12-

12-C (2x)

– Shock absorber retainer with

end stop : 2 x KYP-25-SA

Part no: 15060241

Shock absorber package for DGE-

40-…-RR-SA

– Shock absorber: 2 x YSR-16-

20-C

– Shock absorber retainer with

end stop: 2 x KYP-40-SA

Toothed belt

Drive shaft/trunnion

Coupling housing

Profile barrel

Driver

Slide

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62 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Toothed belt drives DGE-...-ZR-LK-RV-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

1

2

3

4

5

6

7

8

Ø [mm] B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14 B15

25 103.2 86 76.2 32 9.5 43 31 38 12.5 67 12 5 18.2 49.5 32

40 158 127 127 55 22 69.2 57.8 56.5 20 100 18 5 28.5 70 20

Ø [mm] B16 D1 D2 D3 D4 D5 D6 D7 H1 H2 H3 H4 H5 H6 H7

25 29 M6 M6 M4 M4 Ø 14 G7 M6 Ø 32 98.2 95.2 76.2 38 25.7 9.5 39.2

40 29 M8 M8 M4 M6 Ø 25 G7 M8 Ø 48 155 146 127 56.5 50.5 20.5 62.4

Ø [mm] H8 L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11 L12

25 50.2 416 392 105 88 402 312 73 43 40 46 67 50

40 83.4 621 589 167 150 605 489 120 40 60 60 100 60

+ = plus stroke length

For foot mounting HNC-40/63

Sensor package

For mounting of switch lug

SF-25

For mounting of shock ab-

sorber retainer

For centering sleeve

Vacuum suction port G1/8

For slot nut NSTL-25

Shock absorber retainer

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63 Cleanroom Product Range-subjected to change

Important technical data:

– For used in Cleanroom class

ISO 4 (FS209E class 10),

max. speed should be 0.5

m/s and max. acceleration 1

m/s²

– For used in Cleanroom class

ISO 5 (FS209E class 100),

max. speed should be 1.0

m/s and max. acceleration 4

m/s²

– Repetition accuracy: ± 0.02

mm

– Ambient temperature: 0…

+40°C

– Protection class on cover

strip: IP 40

– For x-stroke, please contact

Festo

– To simplify ordering only

one type is included in the

Cleanroom product range.

Please contact Festo for

other variations

Accessories:

Single phase motor controller

(for used with PNP sensors)

SEC-AC-305/PO1

Electromechanical axes

Spindle drives units with slide,

and recirculating ball bearing

guides housed into a tube profile

with end cover plates.

DGE-...-SP-KG-KF-RR-SA

– Precision, rigid guide

– Greater flexibility thanks to

wide choice of mounting and

assembly options

– Wide range of options for

mounting on drive units

– Comprehensive range of

mounting accessories for

multi-axis combinations

– Optimally adapted motor con-

troller combinations

Order example:

Part no: 15059857

Type DGE-25-500-SP-KG-KF-RR-

SA

Electrical axes, spindle drive, Ø

25 mm, stroke 500 mm

SP: With spindle drive

KG: Drive come with coupling

housing and motor flange

KF: Recirculating ball bearing

guides

RR-SA: Product modified for

cleanroom use

Material:

Drive profile barrel: Anodised

aluminium

Tube with end plates: Aluminium,

nickel plated

Standard servo motor

MTR-AC-...

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Spindle drives DGE-…-SP-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

Type Part No. Piston Ø

Stroke

Max. feed force Spindle Speed

[mm] [mm] [N] Diameter [mm]

Feed pitch [mm/rev]

[rpm] Max speed [m/s]

DGE-25-…-SP-KG-KF-RR-SA 15059857 25 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000

250 12 10 3000 0.5

DGE-40-…-SP-KG-KF-RR-SA 15059858 40 200, 300, 400, 500, 600, 800, 1000

600 20 20 3000 1.0

Foot mounting

HNC-40 for DGE-25-…-RR

HNC-63 for DGE-40-…-RR

Sensor cable (Page 40)

SIM-M8-…-RR

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64 Cleanroom Product Range-subjected to change

1

2

3

4

5

6

1

2

3

4

5

6

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Spindle drives DGE-…-SP-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

Optional packages:

Part no: 15060236

Basic servo motor package (used

with PNP sensors) for DGE-25-…-

SP-…-RR-SA consisted of:

– Motor controller:

SEC-AC-305/PO1

– Standard servo motor:

MTR-AC-55-3S-AA

– Coupling: KSE-30-D06-D09

– Cable set (5 m): KSEC-AC-5

Part no: 15060237

Basic servo motor package (used

with PNP sensors) for DGE-40-…-

SP-…-RR-SA consisted of:

– Motor controller:

SEC-AC-305/PO1

– Standard servo motor:

MTR-AC-70-3S-AA

– Coupling: KSE-30-D11-D12

– Cable set (5 m): KSEC-AC-5

Part no: 15060238

Proximity Sensor package (PNP)

– Proximity Sensor: 2 x SIEN-

M8B-PS-S-L

– Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-

18/25-M8

– Slot nuts: 2 x ZVB-8

Part no: 15060239

Proximity Sensor package (NPN)

– Proximity Sensor: 2 x SIEN-

M8NB-NS-S-L

– Switching Lug on slide: SF-25

– Sensor brackets: 2 x HW-

18/25-M8

– Slot nuts: 2 x ZVB-8

Part no: 15060240

Shock absorber package for DGE-

25-…-RR-SA

– Shock absorber: 2 x YSR-12-

12-C (2x)

– Shock absorber retainer with

end stop: 2 x KYP-25-SA

Part no: 15060241

Shock absorber package for DGE-

40-…-RR-SA

– Shock absorber: 2 x YSR-16-

20-C

– Shock absorber retainer with

end stop: 2 x KYP-40-SA

Spindle drive

Drive shaft/trunnion

Coupling housing

Profile barrel

Driver

Slide

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65 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 or 5 (FS209E class 10 or 100)

Spindle drives DGE-…-SP-KG-KF-RR-SA Ø 25, 40 mm, stroke 100 to 1000 mm

Ø [mm] B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14 B15 B16 B17

25 103 88.2 86 43 32 9 44.5 16.7 37.5 8.5 12 5 18.2 49.5 35 76.2 55

40 158 127 127 57.8 55 22 53 28.5 70 20 18 5 28.5 70 57.8 127 70

Ø [mm] B18 B19 D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 H1 H2 H3 H4 H5

25 32 29 Ø 6 M6 M5 M6 M4 G1/8 M6 Ø 14 G7 M4 M6 98.2 95.2 38 9 6.1

40 20 29 Ø 6 M8 - M8 M4 G1/8 M8 Ø 25 G7 M6 M6 155 146 56.5 20.5 13.5

Ø [mm] H6 H7 H8 H9 L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11

25 44.5 76.2 25.3 55 257 233 105 88 245 153 73 43 40 50 31.5

40 53 127 38 70 367 335 167 88 351 235 120 40 60 60 64

1

2

3

4

5

6

7

8

+ = plus stroke length

For foot mounting HNC-40/63

Sensor package

For mounting of switch lug

SF-25

For mounting of shock ab-

sorber retainer

For centering sleeve

Vacuum suction port G1/8

For slot nut NSTL-25

Shock absorber retainer

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66 Cleanroom Product Range-subjected to change

Fluid muscle:

MAS-…-RR

Fluidic Muscle is a tensile actua-

tor which mimics the action of

biological muscles. When pres-

sure is applied, the muscle ex-

tends in its peripheral direction.

This creates a tensile force and a

contraction motion in the longitu-

dinal direction. The areas of ap-

plication are:

– Single-acting actuator

– Pneumatic spring

The features of the muscle are:

– Initial force up to 10 times

higher

– than a cylinder of the same

diameter

– Highly dynamic characteristics

– No stick/slip effect

– Robust design

– Low weight

– Hermetically sealed

Radial adapter

MXAC-R…

Treaded rod

MXAD-T...

Order example:

Order no:

Type: MAS-20-N200-AA-MOHK

Fluid muscle, diameter 20 mm,

stroke 200 mm, muscle open at

both ends with integrated force

compensator and female

thread M16 x1.5

Selection criteria:

Refer to DKI (Electronic

catalogue) or Volume 1 of

Pneumatic Drives catalogue.

Sizing software

Select a suitable size of the

muscle using the Fluidic Muscle

sizing software.

Mounting options

Axial adapter

MXAC-A…

Blanking adapter

MXAC-B...

Cleanroom class ISO 4 (FS209E class 10)

Fluid muscle MAS-…-RR Ø 10, 20, 40 mm, stroke 40 to 4500 mm

Type Part no Description Nominal length

Contraction (stroke)

Lifting force

Useful load, suspended

Operating pressure

Muscle weight

[mm] Max. Max. [N] Max. [bar] [kg/m]

MAS-10-N...-AA-MCFK-RR

15060444 Muscle open at one end with integrated force compensator and female thread M10 x1.25

40...4500 20% of Nominal length

400 30 8 0.09

MAS-10-N...-AA-MOFK-RR

15060445 Muscle open at both ends with integrated force compensator and female thread M10 x1.25

MAS-20-N...-AA-MCHK-RR

15060446 Muscle open at one end with integrated force compensator and female thread M16 x1.5

60...4500 1200 60 6 0.16

MAS-20-N...-AA-MOHK-RR

15060447 Muscle open at both ends with integrated force compensator and female thread M16 x1.5

MAS-20-N...-AA-MCGK-RR

15060448 Muscle open at one end with integrated force compensator and female thread M10 x1.25

MAS-40-N...-AA-MCKK-RR

15060449 Muscle open at one end with integrated force compensator and female thread M20 x1.5

90...4500 4000 120 6 0.36

MAS-40-N...-AA-MOKK-RR

15060450 Muscle open at both ends with integrated force compensator and female thread M20x1.5

MAS-40-N...-AA-MCIK-RR

15060451 Muscle open at one end with integrated force compensator and female thread M16x1.5

25% of Nominal length

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67 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Type D1 D2 L1 L2 L3 L4 L5 Ln T1 T2 X ß1 ß2

±1.0 ±1.0 ±0.3 ±0.4 min. max. min. min.

MAS-10-N...-AA-MCFK-RR M10 x 1.25 M10 x 1.25 24.1 34.1 10 3.5 ±0.2 2.5 40 4500 15 15 40 27 17

MAS-10-N...-AA-MOFK-RR

MAS-20-N...-AA-MCHK-RR M16 x 1.5 M16 x 1.25 31.5 42.5 11 3.5 ±0.2 5.5 60 24 24 50 41 24

MAS-20-N...-AA-MOHK-RR

MAS-20-N...-AA-MCGK-RR M10 x 1.25 15

MAS-40-N...-AA-MCKK-RR M20 x 1.5 M20 x 1.5 42.5 55.5 13 3.5 ±0.3 6.5 120 30 30 70 60 41

MAS-40-N...-AA-MOKK-RR

MAS-40-N...-AA-MCIK-RR M16 x 1.5 24

1

2

3

4

5

6

7

8

9

aJ

aA

aB

aC

2

4

5

6

7

8

9

aJ

aA

aB

1

3

aC

9

aJ

aA

aB

8

4

5

6

7

1

3

aC

2

4

5

6

7

Fluid muscle MAS-…-RR Ø 10, 20, 40 mm, stroke 40 to 4500 mm

Blanking adapter for connect-

ing the cylinder peripherals

and sealing the muscle

Radial adapter for connecting

the cylinder peripherals and

the compressed air supply in

a radial direction

Axial adapter for connecting

the cylinder peripherals and

the compressed air supply in

an axial direction

One-way flow control valve

GRLA

Quick connector CK for the

tubing connection

Quick Star push-in fitting

QS –F for the tubing

connection

Barbed fitting N for the

tubing connection

Threaded rod for connecting

the cylinder accessories

Foot mounting HBN for

clamping the muscle

Rod clevis SG for rod eye SGS

Rod eye SGS with spherical

bearing

Coupling pieces KSG/KSZ for

compensating radial

deviations

Rod clevis SGA with threaded

rod for direct mounting on

the muscle

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68 Cleanroom Product Range-subjected to change

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69 Cleanroom Product Range-subjected to change

Valves

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70 Cleanroom Product Range-subjected to change

In-line valve

MHP1-…-RR

Sub-base valve

MHA1-…-RR

3/2G: Normally close

3/2O: Normally open

MHP1-M1H-3/2G-M3-PI-RR

Extremely compact valve series

for the semiconductor and elec-

tronics industries. Directly actu-

ated valves with response

times under 8 ms.

Optimised installation.

– 100% duty cycle and con-

tinuous three shift operation

and guaranteed even on a

manifold block

– Short cycle times

– Precise cycle times

MHA1-M1H-3/2G-0,6-HC-RR

Design flexibility with valve

manifold construction:

– Suitable for expansion up to

22 valves

– Various electrical and pneu-

matic connection options

– Mounting and electrical con-

nection directly on a printed

circuit board

MHP1-M1H-3/2G-M3-TC-RR

Cleanroom class ISO 4 (FS209E class 10)

Miniature valves MH...1-…-RR 3/2 way solenoid valve

Type [sub-base valve] Part No. Description

Individual valve with M3 connection on sub base

MHA1-M1H-3/2G-0,6-HC-RR 15024913 3/2G; NC 3/2O; NO HC; Horizontal connect TC; Top connect PI; Underneath connect

MHA1-M1H-3/2G-0,6-TC-RR 15024914

MHA1-M1H-3/2G-0,6-PI-RR 15024915

MHA1-M1H-3/2O-0,6-HC-RR 15024916

MHA1-M1H-3/2O-0,6-TC-RR 15024917

MHA1-M1H-3/2O-0,6-PI-RR 15024918

Individual sub base

MHA1-AS-3-M3-RR 15024919 With plug connection

MHA1-AS-3-M3-PI-RR 15024921 With base plug

MHA1-PR2-3-M3-RR 15024922 In-line manifold block, plug connection for 2, 4, 6, 8, 10 valves MHA1-PR4-3-M3-RR 15024923

MHA1-PR6-3-M3-RR 15024924

MHA1-PR8-3-M3-RR 15024925

MHA1-PR10-3-M3-RR 15024926

MHA1-PR2-3-M3-PI-RR 15024927 In-line manifold block with base plugs for 2, 4, 6, 8, 10 valves MHA1-PR4-3-M3-PI-RR 15024928

MHA1-PR6-3-M3-PI-RR 15024929

MHA1-PR8-3-M3-PI-RR 15024936

MHA1-PR10-3-M3-PI-RR 15024937

MHA1-PR4-3-M3-PI-D9-RR 15024938

MHA1-PR6-3-M3-PI-D9-RR 15024940

MHA1-PR8-3-M3-PI-D9-RR 15024941

MHA1-PR10-3--M3-PI-D25-RR 15024942

Multi-pin connector, in-line manifold block with base plugs for 4, 6, 8, 10 valves

Type [In-line valve] Part No. Description

Individual valve with M3 connection on valve body

MHP1-M1H-3/2G-M3-HC-RR 15024883 3/2G; NC 3/2O; NO HC; Horizontal connect TC; Top connect PI; Underneath connect

MHP1-M1H-3/2G-M3-TC-RR 15024884

MHP1-M1H-3/2G-M3-PI-RR 15024885

MHP1-M1H-3/2O-M3-HC-RR 15024886

MHP1-M1H-3/2O-M3-TC-RR 15024887

MHP1-M1H-3/2O-M3-PI-RR 15024888

Individual sub base

MHP1-AS-3-M3-RR 15024889 With plug connection

MHP1-AS-3-M3-PI-RR 15024890 With base plug

MHP1-PR2-3-RR 15024892 In-line manifold block, plug connection for 2, 4, 6, 8, 10 valves MHP1-PR4-3-RR 15024893

MHP1-PR6-3-RR 15024894

MHP1-PR8-3-RR 15024895

MHP1-PR10-3-RR 15024897

MHP1-PR2-3-PI-RR 15024898 In-line manifold block with base plugs for 2, 4, 6, 8, 10 valves MHP1-PR4-3-PI-RR 15024900

MHP1-PR6-3-PI-RR 15024901

MHP1-PR8-3-PI-RR 15024902

MHP1-PR10-3-PI-RR 15024903

MHP1-PR4-3-PI-D9-RR 15024904

MHP1-PR6-3-PI-D9-RR 15024905

MHP1-PR8-3-PI-D9-RR 15024907

MHP1-PR10-3-PI-D25-RR 15024909

Multi-pin connector, in-line manifold block with base plugs for 4, 6, 8, 10 valves

2

1 3

12

2

11 33

110

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71 Cleanroom Product Range-subjected to change

Individual valve with sub base

Sub-base valve (MHA1-…-RR)

Individual sub-base (MHA1-AS-…-RR)

In-line valve (MHP1-…)

Individual sub-base (MHP1-AS-…-RR)

Cleanroom class ISO 4 (FS209E class 10)

Miniature valves MH...1-…-RR 3/2 way solenoid valve

Technical data 3/2 way valve

Medium Compressed air, filtered

Nominal flowrate 10 l/min

Design Poppet valve, direct actuated

Width 10 mm

Type of mounting Mounting screw M1.6 x 15

Pneumatic connection

Individual valve 1, 2, 3, 11, 22

M3

Manifold mount 1, 3, 11, 22

M7

2 M3

Nominal size 0.65 mm

Technical data 3/2 way valve

Operating pressure

Normally open 0...6 bar

Normally close 0...8 bar

Response time on/off 4/5 ms

Switching frequency 20 Hz

Temperature range

Individual mount -5…+50°C

Manifold mount -4…+40°C

Material Die-cast zinc

Weight 0.05 kg

Operating voltage 24 V DC ±10%

Power consumption 1W

Duty cycle 100%

Protection class IP 40

Connection type Crimping

Type Part no.

Blanking plug Plug connection MHAP1-BP-3-RR 15024950

Base plug MHAP1-BP-3-PI-RR 15024951

Base plug Plug-in MHAP-PI-RR 15024954

Plug socket with cable

0.5m KMH-0,5-RR 15024955

1.0m KMH-1-RR 15024956

Accessories

Base plug MHAP-PI-RR

Plug connection TC

Plug connector HC

Plug connection PI

1

3

4

5

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72 Cleanroom Product Range-subjected to change

Manifold mounting

Sub-base valve (MHA1-…-RR)

Manifold block with base plug

(MHA1-PR-…-M3-PI-RR)

In-line valve (MHP1-…-RR)

Manifold block with base plug

(MHP1-PR-…-M3-PI-RR)

Cleanroom class ISO 4 (FS209E class 10)

Miniature valves MH...1-…-RR 3/2 way solenoid valve

No. of valve position L1 ±0.15 mm L2 ±0.1 mm L3

2 35 27 10

4 55 47 30

6 75 67 50

8 95 87 70

10 115 107 90

Base plug MHAP-PI-RR

Blanking plate MHAP1-RR

Plug connection TC

Plug connection HC

Plug connection PI

1

2

5

6

7

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73 Cleanroom Product Range-subjected to change

Manifold mounting

Sub-base valve (MHA1-…-RR)

Multi-pin, manifold block with base

plug (MHA1-PR-…-M3-PI-D9-RR)

In-line valve (MHP1-…-RR)

Multi-pin manifold block with base

plug (MHP1-PR-…-M3-PI-D9-RR)

Cleanroom class ISO 4 (FS209E class 10)

Miniature valves MH...1-…-RR 3/2 way solenoid valve

No. of valve position L1 ±0.1 mm L2 ±0.15 mm L3

2 70 63 10

4 90 83 30

6 110 103 50

8 130 123 70

10 172 165 90

Base plug MHAP-PI-RR

Sub-D plug 9/25 pins

Blanking plate MHAP1-RR

1

2

3

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74 Cleanroom Product Range-subjected to change

Individual valve, normal switching

at 7 ms respond time

MHE2-M1H-…-RR

Individual valve, fast switching

at 2 ms respond time

MHE2-MS1H-…-RR

3/2G: Normally close

3/2O: Normally open

Remark:

MHE2-...-RR: Socket version

MHE2-…-K-RR: Cable version

The new generation of 24 V DC

valves really merits the name

fast switching; switching times

up to 2 ms allows extremely

short cycle times creating

productivity reserves. Used in

sorting via air jets, in flap

control system, boding, dosing

and high speed packaging.

– Directly actuated poppet

design valves

– Rapid response times down

to 2 ms

– Standard nominal flow rate

– 100 … 400 l/min

– Compact design

– Free of copper, PTFE and

silicone

Cleanroom class ISO 4 (FS209E class 10)

Fast switching valve MHE2-…-RR 3/2 way solenoid valve

Type Part No.

Response time 2 ms

MHE2-MS1H-3/2G-M7-RR 15084728

MHE2-MS1H-3/2G-M7-K-RR 15084729

MHE2-MS1H-3/2O-M7-RR 15084730

MHE2-M1H-3/2O-M7-K-RR 15084745

MHE2-MS1H-3/2O-M7-K-RR 15084731

Response time 7 ms

MHE2-M1H-3/2G-M7-RR 15084732

MHE2-M1H-3/2G-M7-K-RR 15084733

MHE2-M1H-3/2O-M7-RR 15084744

Technical data

Valve function 3/2-way, single solenoid

Design Poppet valve

Sealing principle Soft

Actuation type Electrical

Type of control Direct

Direction of flow Non-reversible

Exhaust function Flow control

Manual override Resetting

Assembly position Any

Grid dimension [mm] 14

Nominal diameter [mm] 2

Standard nominal flow rate [l/min] 100

Type of mounting Via through-holes

Pneumatic connection Connecting thread M7

Product weight [g] 50

Operating medium Filtered compressed air, lubricated or unlubricated, grade of filtration 40 µ

Vacuum grade of filtration 40 µ

Operating pressure range [bar] - 0.9 ... +8

Ambient temperature [°C] -5... +40 (100% duty cycle)

Temperature of medium [°C] -5... +40 (100% duty cycle)

Part No.

Plug socket PUN cable with LED (IP 65)

KMYZ-3-24-2,5-LED-PUR-B-RR 2.5 m 15084746

KMYZ-3-24-5-LED-PUR-B-RR 5.0 m 15084747

KMYZ-3-24-10-LED-PUR-B-RR 10 m 15084748

Type

2

1 3

12

2

11 33

110

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75 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Response times and switching frequencies

With fast-switching electronics

Response time on/off [ms] 2 ± 10%

Switching frequency [Hz] 150

Without fast-switching electronics

Response time on/off [ms] 7 ± 10%

Switching frequency [Hz] 50

Fast switching valve MHE2-…-RR 3/2 way solenoid valve

Manual override, resetting

Plug vanes for plug socket

with cable KMYZ-3-...

Cable 2.5 m

1

2

3

Capacitor charging

Controlled coil current 1 A

Drop to holding current

Controlled holding current

0.5 A

1

2

3

4

Current in the coil Current in the supply line

Current curve Electrical data

Operating voltage [V DC] 24 ± 10%

Connection type Plug vanes or molded-in cable (2.5 m)

Power consumption

With fast-switching electronics [W] 5 for 3 ms approx. (pull 1 A), then 2.88 W

Without fast-switching electronics [W] 2.88

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76 Cleanroom Product Range-subjected to change

Compact performance valve ter-

minal

CPA-SC-…-RR

The CPA-SC Smart Cubic is a com-

pact valve terminal for a wide

range of pneumatic applications.

It permits a high degree of flexi-

bility during planning, installation

and system operation.

– Dimensions: All valves have

the same length of 100 mm

and width of 10 mm. Ultra flat

variants with a height of 40

mm are also available.

– Valve functions: Wide choice,

with 5/2- and 5/3-way func-

tions and double functions

with 2 x 3/2-way valves in one

housing with flow rate of 150

l/min. Special functions are

also available to expand the

range of possible applications.

– Plug-in type electrical connec-

tion.

– Flexibility during installation

and easy servicing, thanks to

the fact that valve are screw

mounted onto metallic mani-

folds.

– Long-lasting spool valves, with

robust metallic housings and

threaded connections

Cleanroom class ISO 4 (FS209E class 10)

Compact performance individual valve CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

Type Part No. Description Connections (on aluminum sub-base)

Operating pressure

Electrical data

Electrical connections

Protection class

CPASC82P-10-1SP-AB-N-VLB- ...-RR

15060300 M5: 1, 3, 5 M5: 12, 14, 82, 84 M5: 2, 4

3...8 bar Operating voltage: 24 V DC Power: 1.0 W per valve

Individual sub-base, plug-in, 0.5 m cable

IP 40 Individual valve for 1 position Fill in the blank space with the appropriate letters .

Order example:

Part no: 15060300

Type: CPASC82P-10-1SH-AB-N-

VLB-...-RR

CPVSC82P: Compact perform-

ance valve terminal

10: Valve width is 10 mm

1: Valve voltage 24 V DC

SP: Individual sub-base, plug-

in, 0.5 m cable

AB: Working ports on sub-base

with M5 thread connection

N: Manual override not con-

cealed

V: Internal pilot air, ducted

exhaust

LB: Pneumatic supply and ex-

haust ports on left side, with

M5 thread connection

M: 5/2 way single solenoid

valve (160 l/min)

RR: Suitable for cleanroom

application

Important:

To simplify ordering, only the

above type is included in the

Cleanroom product range.

Please contact Festo for other

variations.

If supply pressure is less than 4

bar or greater than 8 bar, a

separate air supply must be

used for pilot air. To order valve

terminal with external auxiliary

pilot port, please contact Festo.

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77 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Compact performance individual valve CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

The CPA-SC offers the following

valve options. When ordering,

fill in the blank space with the

appropriate letters:

B: 5/3 way mid position pres-

surised valve (160 l/min)

E: 5/3 way mid position ex-

hausted valve (160 l/min)

M: 5/2 way single solenoid

valve (160 l/min)

N: 2 x 3/2 way valve normally

open (140 l/min)

X: 1 x 3/2 way valve, external

compressed air supply, nor-

mally closed (100 l/min)

G: 5/3 way mid position closed

valve (140 l/min)

I: 2 x 2/2 way valve, normally

close, for vacuum (140 l/min)

J: 5/2 way double solenoid

valve (160 l/min)

K: 2 x 3/2 way valve normally

close (140 l/min)

2

12 1 382

12

(4)

4 2

5 1 3

14 12

8214

4 2

5 1 3

14 12

8214

4 2

5 1 3

14 12

8214

4 2

5 1 314 84

144 2

5 1 314 128284

14 12

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78 Cleanroom Product Range-subjected to change

Compact performance valve

terminal

CPA-SC-…-RR

The CPA-SC Smart Cubic is a

compact valve terminal for a wide

range of pneumatic applications.

It permits a high degree of flexi-

bility during planning, installation

and system operation.

– Dimensions: All valves have

the same length of 100 mm

and width of 10 mm. Ultra flat

variants with a height of 40

mm are also available.

– Valve functions: Wide choice,

with 5/2 and 5/3 way func-

tions and double functions

with 2 x 3/2-way valves in one

housing with flow rate of 150

l/min. Special functions are

also available to expand the

range of possible applications.

– Electrical connection using

multi-pins sub-D plug connec-

tor.

– Flexibility during installation

and easy servicing, thanks to

the fact that valve are screw

mounted onto metallic mani-

folds.

– Long-lasting spool valves, with

robust metallic housings and

threaded connections

– Plenty of scope for expansions

with 4 to 20 valve positions

possible, with max. 20 valve

coils on one terminal.

Cleanroom class ISO 4 (FS209E class 10)

Compact performance valve terminal CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

Type Part No. Description Connections Operating pressure

Electrical data

Electrical connections

Protection class

CPASC82P-10-1MS-AB-N-VLD- … -E+CP-RR

15060299 G1/8: 1, 3, 5 (on left, end plate) M5: 12, 14, 82, 84 (on left, end plate) M5: 2, 4 (in aluminum sub-base)

3...8 bar Operating voltage: 24 V DC Power: 1.0 W per solenoid coil

Sub-D connector with multi-core cable with 20 wires prefabricated at 2.5 m

IP 40 Terminal from 4 to 20 valve positions, in step of 2 valve positions with max. 20 valve coils. Fill in the blank space with the appropriate letters .

Order example:

Part no: 15060299

Type: CPASC82P-10-1MS-AB-N-

VLD- MMMM-E +CP-RR

CPASC82P: Compact performance

valve terminal

10: Valve width is 10 mm

1: Valve voltage 24 V DC

MS: Multi-pin with sub-D, 25 pin

connector

AB: Working ports on sub-base

with M5 thread connection

N: Manual override not concealed

V: Internal pilot air, ducted ex-

haust

LD: Pneumatic supply and ex-

haust ports on left side, with

G1/8 thread connection

MMMM: 4 x 5/2 way single sole-

noid valve (160 l/min)

E: English manual included

CP: 2.5 m long connecting cable

for sub-D multi-pin connector

RR: Suitable for cleanroom appli-

cation

Important:

To simplify ordering only one type

is included in the Cleanroom

product range. Please contact

Festo for other variations.

If supply pressure is less than 4

bar or greater than 8 bar, a sepa-

rate air supply must be used for

pilot air. To order valve terminal

with external auxiliary pilot port,

please contact Festo.

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79 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Compact performance valve terminal CPA-SC-…-RR 2/2, 3/2, 5/2 and 5/3 way solenoid valve

The CPA-SC offers the following

valve options. When ordering,

fill in the blank space with the

appropriate letters:

B: 5/3 way mid position pres-

surised valve (160 l/min)

E: 5/3 way mid position ex-

hausted valve (160 l/min)

G: 5/3 way mid position closed

valve (140 l/min)

I: 2 x 2/2 way valve, normally

close, for vacuum (140 l/min)

J: 5/2 way double solenoid

valve (160 l/min)

K: 2 x 3/2 way valve normally

close (140 l/min)

positions available for valves

with two coils is reduced as

shown in the table

Example: With 16 valve positions,

the first four positions can be

equipped with valves with one or

two solenoid coils. At positions 5

to 16, it is possible to fit single-

solenoid valves only.

L: Blanking plate

M: 5/2 way single solenoid

valve (160 l/min)

N: 2 x 3/2 way valve normally

open (140 l/min)

X: 1 x 3/2 way valve, external compressed air supply, nor-mally closed (100 l/min)

Special note when ordering:

Depending on the number of

valves configured at any par-

ticular time, it is possible to

address and trigger valves with

one or two solenoid coils. If the

number of valve positions is

less than 10, it is always possi-

ble to address 2 valve coils.

With 12 valve positions and

more, the number of valve

Valve position

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

coils

20 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1

20 2 2 2 2 1 1 1 1 1 1 1 1 1 1 1 1

20 2 2 2 2 2 2 2 2 1 1 1 1

20 2 2 2 2 2 2 2 2 2 2

16 2 2 2 2 2 2 2 2

12 2 2 2 2 2 2

8 2 2 2 2

4 2

5 1 3

14 12

8214

4 2

5 1 3

14 12

8214

4 2

5 1 3

14 12

8214

4 2

5 1 314 128284

14 12

4 2

5 1 314 84

14

2

12 1 382

12

(4)

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80 Cleanroom Product Range-subjected to change

Performance optimised sizes,

the solenoid valves CPE,

Compact Performance are

distinguished by their minimal

width and low power consump-

tion at high flow rates.

– Internal air piloted

– Shorter tubing lengths with

minimal air volumes:

– Fast switching times

– Quick reaction times

– Shorter machine cycles

– Low power consumption

– Convenient manual override

– A current reduction function

has been integrated in the

KMYZ-9 plug socket

Cleanroom class ISO 5 (FS209E class 100)

Compact Performance valve CPE-…-RR 3/2, 5/2 and 5/3 way solenoid valve

Type Part No. Width Grid size Nominal Flowrate Respond Operating Weight

[mm] [mm] Size [mm] [l/min] Main Pilot time on/off Pressure [bar] [g]

3/2 way

CPE10-M1BH-3GL-M7-RR 15084749 10 12 4 400 M7 M3 14/14 ms 2.5 … 8 45

CPE10-M1BH-3OL-M7-RR 15084750 10 12 4 400 M7 M3 14/14 ms 2.5 … 8 45

CPE14-M1BH-3GL-1/8-RR 15084751 14 16 6 900 G1/8 M3 27/16 ms 2.5 … 8 60

CPE14-M1BH-3OL-1/8-RR 15084752 14 16 6 900 G1/8 M3 27/16 ms 2.5 … 8 60

5/2 way

CPE10-M1BH-5L-M7-RR 15084753 10 12 4 350 M7 M3 16/16 ms 3 … 8 56

CPE14-M1BH-5L-1/8-RR 15084754 14 16 6 800 G1/8 M3 24/32 ms 3 … 8 95

5/2 way double solenoid

CPE10-M1BH-5J-M7-RR 15084755 10 12 4 350 M7 M3 8 ms 2.5 … 8 68

CPE14-M1BH-5J-1/8-RR 15084756 14 16 6 800 G1/8 M3 12 ms 2 … 8 115

5/3 way. Normally closed

CPE10-M1BH-5/3G-M7-B-RR 15084757 10 12 4 350 M7 M3 16/20 ms 3 … 8 73

CPE14-M1BH-5/3G-1/8-RR 15084758 14 16 6 750 G1/8 M3 20/42 ms 3 … 8 120

5/3 way. Normally exhausted

CPE10-M1BH-5/3E-M7-B-RR 15084759 10 12 4 250 M7 M3 16/20 ms 3 … 8 73

CPE14-M1BH-5/3E-1/8-RR 15084760 14 16 6 700 G1/8 M3 20/42 ms 3 … 8 120

5/3 way. Normally pressurised

CPE10-M1BH-5/3B-M7-B-RR 15084761 10 12 4 300 M7 M3 16/20 ms 3 … 8 73

CPE14-M1BH-5/3B-1/8-RR 15084762 14 16 6 750 G1/8 M3 20/42 ms 3 … 8 120

Connection

Part No.

Plug socket PUN cable with LED (IP 65)

KMYZ-9-24-2,5-LED-PUR-B-RR 2.5 m 15084763

KMYZ-9-24-5-LED-PUR-B-RR 5.0 m 15084764

AHB-MZB-RR 15084766

Type

KMYZ-9-24-10-LED-PUR-B-RR 10 m 15084765

Manual override tool

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81 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Compact Performance valve CPE-…-RR 3/2, 5/2 and 5/3 way solenoid valve

Technical data

Valve function 3/2, 5/2, 5/3 way

Design Piston spool

Sealing principle Soft

Actuation type Electrical

Type of reset 5/2: Pneumatic, 5/3: Mechanical spring

Type of control Piloted

Pilot air supply Internal or external

Direction of flow Internal pilot air supply: non-reversible

Exhaust function With flow control

Manual override Resetting, detenting via tool accessory

Mounting position Any

Ambient temperature –5 … +50

Temperature of medium –5 … +50

Operating voltage 24 V DC +10/-15%

Power consumption 1.28 W

Degree of protection IP 65 (EN 60 529)

3GL: 3/2 way, normally close

3OL: 3/2 way, normally open

5L: 5/2 way, single solenoid

5J: 5/2 way, double solenoid

5/3G: 5/3 way, normally closed

5/3E: 5/3 way, normally exhausted

5/3B: 5/3 way, normally pressurised

2

1 3

12

2

11 33

110

4 2

5 1 3

14 12

84 82

4 2

5 1 3

14 12

84 82

4 2

5 1 384 82

14 12

4 2

5 1 384 82

1214

4 2

5 1 384

14

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82 Cleanroom Product Range-subjected to change

3/2 way NO or NC

B1 B2 B3 B4 D1 D2 D3 H1 H2 H3

M7 10 10 2.3 1.5 M7 M3 3.5 35 26 4

G1/8 14 10 3.5 3.5 G1/8 M3 4.4 40.3 26 7

L1 L2 L3 L4 L5 L6 L7 L8 L9 L10

M7 57 40.8 28.5 16.5 23 10 16.3 4.2 28.5 16.5

G1/8 67 50.5 35 18.3 27 9.5 20 5 32 18.3

Cleanroom class ISO 5 (FS209E class 100)

Compact Performance valve CPE-…-RR 3/2, 5/2 and 5/3 way solenoid valve

5/2 way , single solenoid

B1 B2 B3 B4 D1 D2 D3 H1 H2 H3

M7 10 10 2.3 1.5 M7 M3 3.5 35 26 4

G1/8 14 10 3.5 3.5 G1/8 M3 4.4 40.3 26 7

L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11

M7 86.8 70.6 46 16.5 23 10 16.3 4.2 28.5 16.5 13

G1/8 101.5 85 54 18.3 27 9.5 20 5 32 18.3 17.5

Manual override facility

Connection for plug socket

Location for inscription labels

Pilot air connection

1

2

3

4

Manual override facility

Connection for plug socket

Location for inscription labels

Pilot air connection

1

2

3

4

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83 Cleanroom Product Range-subjected to change

Cleanroom class ISO 5 (FS209E class 100)

Compact Performance valve CPE-…-RR 3/2, 5/2 and 5/3 way solenoid valve

5/2 way , Double solenoid

B1 B2 B3 B4 D1 D2 D3 H1 H2 H3

M7 10 10 2.3 1.5 M7 M3 3.5 35 26 4

G1/8 14 10 3.5 3.5 G1/8 M3 4.4 40.3 26 7

L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11

M7 103 70.6 46 16.5 23 10 16.3 4.2 28.5 16.5 13

G1/8 118 85 54 18.3 27 9.5 20 5 32 18.3 17.5

5/3 way , Double solenoid

B1 B2 B3 B4 D1 D2 D3 H1 H2 H3

M7 10 10 2.3 1.5 M7 M3 3.5 35 26 4

G1/8 14 10 3.5 3.5 G1/8 M3 4.4 40.3 26 7

L1 L2 L3 L4 L5 L6 L7 L8 L9 L10 L11

M7 115.6 83.2 46 16.5 23 10 16.3 4.2 28.5 16.5 13

G1/8 134 101 54 18.3 27 9.5 20 5 32 18.3 17.5

Manual override facility

Connection for plug socket

Location for inscription labels

Pilot air connection

1

2

3

4

Manual override facility

Connection for plug socket

Location for inscription labels

Pilot air connection

1

2

3

4

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84 Cleanroom Product Range-subjected to change

Order example:

Part no: 15059882

Type: CDVI15P-K05-4G-UR-

MMMM-E-Y-RR

CDVI15P: Clean design valve

terminal

K05: Multi-core cable of 5 m

4G: 4 positions with G1/8

pneumatic connections

U: Supply on left side, internal

pilot air supply

R: Resistant to cleaning agents

MMMM: 4 x 5/2 way single

solenoid valve (650 l/min)

E: English manual included

Y: 4 x spacing bolt included

RR: Suitable for cleanroom

application

Important:

To simplify ordering only one

type is included in the Clean-

room product range. Please

contact Festo for other varia-

tions.

If supply pressure is less than 4

bar or greater than 6 bar, a

separate air supply must be

used for pilot air. To order valve

terminal with external auxiliary

pilot port, please contact Festo.

Clean design valve terminal

CDVI15P-…-RR

The basic version of the CDVI

valve terminal is available with

4 or 8 positions. Contrary to

the standard non-cleanroom

version, the cleanroom version

cannot be expanded with 2

position modules for additional

positions.

– Easy to clean as a result of

no shape edges, no small

radius and no corners where

dirt can be trapped

– Ample space between valves

to allow for laminar air flow

– Corrosion resistant material

– The terminals include com-

mon supply lines and ex-

haust for all valves

– The electrical bus lines are

connected to the end plate

– Protection class IP65 and

IP67

Material:

Housing: Polypropylene (PP)

Seal: EPDM

Subbase: Aluminum anodised

Cable: PVC (Chemical resistant)

Cleanroom class ISO 4 (FS209E class 10)

Clean design valve terminal CDVI15P-…-RR 3/2, 5/2 and 5/3 way solenoid valve

Type Part No. Description Connections Operating pressure

Electrical data

Electrical connections

Mounting

CDVI15P-K05-4G-UR-…-E-Y-RR 15059882 Terminal for 4 valves positions . Fill in the blank space with 4 appropriate letters.

G3/8: 1, 3, 5 (in end plate) G1/8: 12, 14, 82, 84 (in end plate) G1/8: 2, 4 (in aluminum profile)

3...6 bar

Operating voltage: 24 V DC Power: 1.5 W per valve; holding current reduced to 50% after 20 ms.

Multi-core cable with 26 wires prefabricated at 5 m

CDVI15P-K05-8G-UR-...-E-Y-RR 15060242 Terminal for 8 valves positions. Fill in the blank space with 8 appropriate letters.

Mounting with 2 screw at end plate or use spacer both provided

Mounting:

With spacer bolt provided

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85 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Clean design valve terminal CDVI15P-…-RR 3/2, 5/2 and 5/3 way solenoid valve

The CDVI offers the following

valve combination options.

When ordering, fill in the blank

space with the appropriate

letters:

A: Blanking plate for double

positions

B: 5/3 way mid position pres-

surised valve (500 l/min)

C: Blanking plate for single

position

E: 5/3 way mid position ex-

hausted valve (400 l/min)

G: 5/3 way mid position closed

valve (600 l/min)

H: 2 x 3/2 way valve, 1 nor-

mally open and 1 normally

close (300 l/min)

J: 5/2 way double solenoid

valve (650 l/min)

K: 2 x 3/2 way valve normally

close (300 l/min)

M: 5/2 way single solenoid

valve (650 l/min)

N: 2 x 3/2 way valve normally

open (300 l/min)

4 2

5 1 3

14 12

84 82

4 2

5 1 3

14 12

84 82

4 2

5 1 384 82

14 12

4 2

5 1 384 82

1214

4 2

5 1 384

14

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86 Cleanroom Product Range-subjected to change

One-way flow control valves with

exhaust-air flow control

Slotted head screw

GRLA-…-D-RR

Knurled screw

GRLA-…-RS-D-RR

are used to regulate exhaust air

flow rates with double-acting

cylinders. In the reverse direction,

the air flows freely through the

non-return valve with full cross-

sectional flow.

– Precision adjustment for low

speed

– Push-in connector

– Swivel joint rotatable 360°

after installation

– Adjustment with slotted

head or knurled screw

– Swivel joint, elbow outlet

Technical data

Operating pressure:

0.2...10 bar

Temperature range:

-10…+60 °C

Material:

GRLA… : Die-cast zinc

CRGLRA-…: X5 CrNiMoNb 18 10

Remark: Standard nominal

flowrate [l/min] refer to the

flow controlled direction from 6

to 5 bar.

Cleanroom class ISO 4 (FS209E class 10)

Flow control valves GRLA-…-…-RR, CRGRLA-…-RR Flowrate: 0...820 l/min

Type Part No. Connection Std nominal flowrate [l/min]

CRGRLA-M5-B-RR 15024852 M5 0...95

CRGRLA-1/8-B-RR 15024853 G1/8 0...340

CRGRLA-1/4-B-RR 15024854 G1/4 0...610

CRGRLA-…-RR

Connection Tightening torque [Nm]

M5 1.5

G1/8 5.5

G1/4 11

3/8 20

Type Part No. Connection Std nominal flowrate [l/min]

GRLA-M5-QS-3-D-RR 15085347 M5 0...100

GRLA-M5-QS-4-D-RR 15085348 M5 0...100

GRLA-M5-QS-6-D-RR 15085349 M5 0...115

GRLA-1/8-QS-3-D-RR 15085350 G1/8 0...130

GRLA-1/8-QS-4-D-RR 15085351 G1/8 0...160

GRLA-1/8-QS-6-D-RR 15085352 G1/8 0...185

GRLA-1/8-QS-8-D-RR 15085353 G1/8 0...215

GRLA-1/4-QS-6-D-RR 15085384 G1/4 0...400

GRLA-1/4-QS-8-D-RR 15085385 G1/4 0...475

GRLA-1/4-QS-10-D-RR 15085386 G1/4 0...480

GRLA-3/8-QS-6-D-RR 15085387 G3/8 0...495

GRLA-3/8-QS-8-D-RR 15085388 G3/8 0...820

Type Part No. Connection Std nominal flowrate [l/min]

GRLA-M5-QS-3-RS-D-RR 15085389 M5 0...100

GRLA-M5-QS-4-RS-D-RR 15085390 M5 0...100

GRLA-M5-QS-6-RS-D-RR 15085391 M5 0...115

GRLA-1/8-QS-3-RS-D-RR 15085392 G1/8 0...130

GRLA-1/8-QS-4-RS-D-RR 15085393 G1/8 0...160

GRLA-1/8-QS-6-RS-D-RR 15085394 G1/8 0...185

GRLA-1/8-QS-8-RS-D-RR 15085395 G1/8 0...215

GRLA-1/4-QS-6-RS-D-RR 15085396 G1/4 0...400

GRLA-1/4-QS-8-RS-D-RR 15085397 G1/4 0...475

GRLA-1/4-QS-10-RS-D-RR 15085398 G1/4 0...480

GRLA-3/8-QS-6-RS-D-RR 15085399 G3/8 0...495

GRLA-3/8-QS-8-RS-D-RR 15085400 G3/8 0...820

1

2

GRLA-…-D-RR

GRLA-…-RS-D-RR

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87 Cleanroom Product Range-subjected to change

Slotted head screw

GRLA-…-D-RR

Knurled screw

GRLA-…-RS-D-RR

Cleanroom class ISO 4 (FS209E class 10)

Flow control valves GRLA-…-…-RR, CRGRLA-…-RR Flowrate: 0...820 l/min

Type B D H H1 L L1 L2 L3 ß

CRGRLA-M5-B-RR 10 M5 17.5 12.5 23.2 4 7.1 2.5 9

CRGRLA-1/8-B-RR 16 G1/8 28 20 33.7 5.3 10.3 3.5 14

CRGRLA-1/4-B-RR 20 G1/4 36 26 38.8 8.3 13.2 3.5 17

Connection Tubing O.D. B D2 D3 H H1 L L-RS L1 L2 ß

Ø Ø max. max.

M5 3 8.9 8.2 + 0.15 22.4 18 11.65

4 9.9 10.0 ± 0.2 8.9 ± 0.07 24.7 20.3 21.4 31.3 3.7 + 0.17/- 0.25 11.65 8

6 12 12.0 ± 0.2 26.5 22 10.65

G1/8 3 10.2 ± 0.2 31.9 25 14.4

4 13.8 10.2 ± 0.2 13.8 ± 0.07 29.4 22.5 26.9 40.4 5.1 + 0.17/- 0.25 14.4 12

6 12.5 ± 0.2 32.6 25.7 13.7

8 14.5 ± 0.2 35.6 28.7 13.7

G1/4 6 12.5 ± 0.2 36.6 27.7 17.2

8 17.8 14.5 ± 0.2 17.8 ± 0.15 36.6 30.7 31.5 48.3 5.9 + 0.17/- 0.25 17.2 15

10 17.5 ± 0.2 42 33.1 16.1

G3/8 6 12.5 ± 0.2 39.8 28.6 20.3

8 22.4 14.5 ± 0.2 22.4 ± 0.15 44.1 32.9 36 55.3 6.95 + 0.15/- 0.3 19.3 19

10 17.5 ± 0.2 46.7 35.5 19.3

Slotted head screw

CRGRLA-…-RR

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88 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

One way flow control valve

GR-…-RR

GR-M3-RR

GR-1/8-B-RR

These valves are used to regu-

late air flow, e.g. to control the

piston speeds of single and

double-acting cylinders, or as a

flow control valve for back pres-

sure nozzles.. A non-return

valve blocks air flow in one

direction. Air is only able to

flow via the cross section which

is adjusted with the throttle

screw. Air flows freely in the

other direction through the

open non-return valve.

– Tamper-proof cap for secur-

ing against inadvertent read-

justment. Included in scope

of delivery

– Hex nut for panel mounting

– Precision thread for accurate

flow rate adjustment

GR-M5-B-RR

Flow control valves GR-…-RR Flowrate: 0...420 l/min

Type Part No. Connec-tion

Nominal size [mm]

Std nominal flowrate [l/min]

Full flow [l/min]

Pressure range [bar]

Temperature range [°C]

Material Weight [kg]

GR-M3-RR 15024878 M3 1 0...29 - 0.3...8 -10…+60 Al 0.002

GR-M5-B-RR 15024879 M5 2 0...94 115 0.5...10 -20…+60 Al 0.020

GR-1/8-B-RR 15024880 G1/8 3 0...220 217 0.5...10 -20…+60 Al 0.035

GRA-1/4-B-RR 15024881 G1/4 4.5 0...420 780 0.1...10 -20…+75 ZnAl 0.180

1 Tamper-proof cap

2 Hex nut for panel mount

1

2

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89 Cleanroom Product Range-subjected to change

Air Preparation units and accessories

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90 Cleanroom Product Range-subjected to change

Filter 5.0 µm with manual con-

densate drain

LF-…-D-5M-MICRO-RR

– Sintered filter with condensate

separator

– Vertical mounting position, ±5°

– Good particle and condensate

separation

– High flow rate with minimal

pressure drop

– 5 µm filter cartridges

Cleanroom class ISO 4 (FS209E class 10)

Filter for D-Micro series LF-…-D-M5-MICRO-RR Flowrate: 170...290 l/min

Type

Part No. Connection Std nominal flowrate at 7 bar

Weight Input pressure

Temperature range

Condensate volume

[5.0 µm] [l/min] [kg] [bar] [°C] [ml]

LF-M5-D-5M-MICRO-RR 15059897 M5 (Thread screw in housing)

170 0.044 0...10 -10…+60 3

LF-M7-D-5M-MICRO-RR 15059898 M7 (Thread in connection plate)

280 0.064

LF-1/8-D-5M-MICRO-RR 15059899 G1/8 (Thread in connection plate)

290 0.064

LF-M5-D-M5-MICRO-RR

LF-M7-D-M5-MICRO-RR

LF-1/8-D-M5-MICRO-RR

Accessories

Mounting bracket

HFOE-D-MICRO

Connecting plate kit

PBL-1/8-D-MICRO

Threaded pin set

FRB-D-MICRO

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91 Cleanroom Product Range-subjected to change

LF-M5-D-M5-MICRO-RR

LF-M7-D-M5-MICRO-RR LF-1/8-D-M5-MICRO-RR

Type B1 D1 H1

LF-M7-D-5M-MICRO-RR - M7 -

LF-1/8-D-5M-MICRO-RR - G1/8 -

Filter for D-Micro series LF-…-D-M5-MICRO-RR Flowrate: 170...290 l/min

1

2

Cleanroom class ISO 4 (FS209E class 10)

Retainer set HFOE-D-MICRO

(not included in scope of

delivery)

Barbed fitting for plastic tubing

of I.D. 3 mm

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92 Cleanroom Product Range-subjected to change

Micro filter 0.01 µm with manual

condensate drain

LFMA-…-D-…-RR

Micro filter 1 µm with manual

condensate drain

LFMB-…-D-…-RR

– High efficiency filter for special

requirements

– Optional filter cartridges 1 µm

or 0.01 µm

– Air quality to ISO 8573-1

– Available as pre-assembled

filter combination

– Optional manual condensate

drain, or integrated, automatic

condensate drain Sate

– Operating pressure; 1...16 bar

– Temperature range; -10…+60°C

– Mounting position; Vertical ±5°

– Filter housing of die-cast zinc

or aluminium

LFMA:

ISO class 1: for particles

ISO class 2: for oil aerosols

Residual oil content 0.01 mg/m³

Filter efficiency 99.9999 %

LFMB:

ISO class 2: for particles

ISO class 3: for oil aerosols

Residual oil content 0.5 mg/m³

Filter efficiency 99.99 %

Characteristic curve for flow

rate

LFMB-1/4-D-MINI

LFMB-1/2-D-MIDI

LFMB-1-D-MAXI

Characteristic curve for flow

rate

LFMA-1/4-D-MINI

LFMA-1/2-D-MIDI

LFMA-1-D-MAXI

Microfilter LFMA-…-RR and LFMB-…-RR Flowrate: 130...1250 l/min

Type

Part No. Connec-tion

Std nominal flowrate

Type

Part No. Connec-tion

Std nominal flowrate

Condensate volume

Weight

[0.01 µm] [l/min] [1 µm] [l/min] [ml] [kg]

LFMA-1/8-D-MINI-RR 15024732 G1/8 130 LFMB-1/8-D-MINI-RR 15024743 G1/8 250 22 0.250

LFMA-1/4-D-MINI-RR 15024733 G1/4 160 LFMB-1/4-D-MINI-RR 15024744 G1/4 300

LFMA-3/8-D-MINI-RR 15024734 G3/8 180 LFMB-3/8-D-MINI-RR 15024748 G3/8 310

LFMA-1/4-D-MIDI-RR 15024735 G1/4 350 LFMB-1/4-D-MIDI-RR 15024749 G1/4 500 43 0.650

LFMA-3/8-D-MIDI-RR 15024736 G3/8 380 LFMB-3/8-D-MIDI-RR 15024750 G3/8 700

LFMA-1/2-D-MIDI-RR 15024737 G1/2 400 LFMB-1/2-D-MIDI-RR 15024752 G1/2 900

LFMA-3/4-D-MIDI-RR 15024739 G3/4 460 LFMB-3/4-D-MIDI-RR 15024754 G3/4 1000

LFMA-1/2-D-MAXI-RR 15024740 G1/2 750 LFMB-1/2-D-MAXI-RR 15024755 G1/2 1150 80 1.2

LFMA-3/4-D-MAXI-RR 15024741 G3/4 900 LFMB-3/4-D-MAXI-RR 15024756 G3/4 1200

LFMA-1-D-MAXI-RR 15024742 G1 950 LFMB-1-D-MAXI-RR 15024757 G1 1250

Standard flow rate Standard flow rate

Standard flow rate Standard flow rate

Standard flow rate Standard flow rate

Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al p

res

sure

Dif

fere

nti

al p

res

sure

Dif

fere

nti

al p

res

sure

Cleanroom class ISO 4 (FS209E class 10)

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93 Cleanroom Product Range-subjected to change

Micro filter 1 µm followed by 0.01

µm with manual condensate drain

LFMBA-…-D-…-RR

– Available as pre-assembled filter

combination

– Available with manual conden-

sate drain, or integrated, auto-

matic condensate drain

– High efficiency filter for special

requirements

– Optional filter cartridges with 1

and 0.01 µm

– Air quality to ISO 8573-1

– ISO class 1: for particles

– ISO class 2: for oil aerosols

– Filter efficiency 99.9999%

– Residual oil content 0.01 mg/m³

– Operating pressure: 1 to 16 bar

– Temperature range: -10 to +60°C

– Mounting position; Vertical ±5°

– Filter housing of die-cast zinc or

aluminium

Characteristic curve for flow

rate

LFMBA-1/4-D-MINI

LFMBA-1/2-D-MIDI

LFMBA-1-D-MAXI

Cleanroom class ISO 4 (FS209E class 10)

Microfilter LFMBA-…-RR Flowrate: 125...600 l/min

Type [1 µm followed by 0.01 µm]

Part No. Connection Std nominal flowrate Condensate volume

Weight

[l/min] [ml] [kg]

LFMBA-1/8-D-MINI-RR 15024758 G1/8 125 22 0.5

LFMBA-1/4-D-MINI-RR 15024762 G1/4 130

LFMBA-3/8-D-MINI-RR 15024763 G3/8 140

LFMBA-1/4-D-MIDI-RR 15024764 G1/4 300 43 1.3

LFMBA-3/8-D-MIDI-RR 15024765 G3/8 350

LFMBA-1/2-D-MIDI-RR 15024766 G1/2 350

LFMBA-3/4-D-MIDI-RR 15024767 G3/4 350

LFMBA-1/2-D-MAXI-RR 15024769 G1/2 550 80 2.4

LFMBA-3/4-D-MAXI-RR 15024770 G3/4 550

LFMBA-1-D-MAXI-RR 15024772 G1 600

1 2

Standard flow rate

Standard flow rate

Standard flow rate

Dif

fere

nti

al

pre

ssu

re

Dif

fere

nti

al p

res

sure

D

iffe

ren

tia

l p

res

sure

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI

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94 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Microfilter LFMA-…-RR and LFMB-…-RR Grade of filteration: 0.01 µm or 1 µm

Type B1 B2 B3 B6 B7 D1 D4 D5 D7 H1 H2 H3 H4 H5 L1 L3 L5 T1 ß2

LFMA/B-1/8-D-MINI-RR 64 52 40 39 2 G1/8 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMA/B-1/4-D-MINI-RR 64 52 40 39 2 G1/4 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMA/B-3/8-D-MINI-RR 70 52 40 39 2 G3/8 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMA/B-1/4-D-MIDI-RR 85 70 55 47 3 G1/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-3/8-D-MIDI-RR 85 70 55 47 3 G3/8 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-1/2-D-MIDI-RR 85 70 55 47 3 G1/2 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-3/4-D-MIDI-RR 85 70 55 47 3 G3/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMA/B-1/2-D-MAXI-RR 96 80 66 53 3 G1/2 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMA/B-3/4-D-MAXI-RR 96 80 66 53 3 G3/4 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMA/B-1-D-MAXI-RR 116 91 66 53 3 G1 M5 5.3 65 40 70 60 22 24.5 203 170 90 8 24

1

2

3

4

Mounting bracket HFOE (not

included in scope of delivery)

Installation dimensions

Barbed fittings for plastic tub-

ing (order code 7134 PCN-4)

Metal bowl guard

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95 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Microfilter LFMBA-…-RR Grade of filteration: 0.01 µm and 1 µm

Type B1 B2 B3 B4 B6 B7 D1 D4 D5 D7 H1 H2 H3 H4 H5 L1 L3 L5 T1 ß2

LFMBA-1/8-D-MINI-RR 104 92 40 80 39 2 G1/8 M4 4,3 38 20 43 35 11 17.5 144 124 60 7 22

LFMBA-1/4-D-MINI-RR 104 92 40 80 39 2 G1/4 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMBA-3/8-D-MINI-RR 110 92 40 80 39 2 G3/8 M4 4.3 38 20 43 35 11 17.5 144 124 60 7 22

LFMBA-1/4-D-MIDI-RR 140 125 55 110 47 3 G1/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-3/8-D-MIDI-RR 140 125 55 110 47 3 G3/8 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-1/2-D-MIDI-RR 140 125 55 110 47 3 G1/2 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-3/4-D-MIDI-RR 140 125 55 110 47 3 G3/4 M5 5.3 52 32 70 60 22 24.5 179 151 80 8 24

LFMBA-1/2D-MAXI-RR 162 146 66 132 53 3 G1/2 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMBA-3/4D-MAXI-RR 162 146 66 132 53 3 G3/4 M5 5.3 65 32 70 60 22 24.5 203 170 90 8 24

LFMBA-1-D-MAXI-RR 182 157 66 132 53 3 G1 M5 5.3 65 40 70 60 22 24.5 203 170 90 8 24

1

2

3

4

Mounting bracket HFOE (not

included in scope of delivery)

Installation dimensions

Barbed fittings for plastic tub-

ing (order code 7134 PCN-4)

Metal bowl guard

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96 Cleanroom Product Range-subjected to change

– The valve can be combined with

service units of series D

– Input pressure; 0...16 bar

– Temperature range; -10...+60 °C

– Material; Die-cast zinc / alumin-

ium

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI

Manual on/off valve with

threaded connection plate

HE-...-D-…-RR

– 3/2-way manual non-return

valve

– The system is exhausted when

the valve is switched off.

– Ducted exhaust air is possible

via a threaded connection.

– The switching position is im-

mediately discernable.

– Standard padlock as shut off

protection

Cleanroom class ISO 4 (FS209E class 10)

Manual on/off valves HE-…-RR Flowrate: 1000...6500 l/min

Type Part No. Con-nection

Std nominal flowrate [l/min]

Weight [kg]

HE-1/8-MINI-RR 15024804 G1/8 1000 0.192

HE-1/4-MINI-RR 15024805 G1/4 1500

HE-3/8-MINI-RR 15024807 G3/8 1600

HE-1/4-MIDI-RR 15024808 G1/4 2600 0.511

HE-3/8-MIDI-RR 15024810 G3/8 3200

HE-1/2-MIDI-RR 15024811 G1/2 3600

HE-3/4-MIDI-RR 15024814 G3/4 3800

HE-1/2-MAXI-RR 15024815 G1/2 5600 0.796

HE-3/4-MAXI-RR 15024816 G3/4 6000

HE-1-MAXI-RR 15024819 G1 6500

Type B1 B2 B3 B4 B5 B6 D1 D2 D3 D4 D5 H1 H2 H3 H4 H5 L1 L2 T1

HE-...-D-MINI-RR 64 52 40 39 2 32 G1/8 24 M4 4.3 G1/8 20 43 35 11 17.5 98 128 7

G1/4

70 G3/8

HE-...-D-MIDI-RR 85 70 55 47 3 44 G1/4 34 M5 5.3 G1/4 32 70 60 22 24.5 119 169 8

G3/8

G1/2

G3/4

HE-...-D-MAXI-RR 96 80 66 53 3 44 G1/2 38 M5 5.3 G3/8 32 70 60 22 24.5 132 203

G3/4

116 91 G1 40

8

2

31

1

3

Mounting bracket HFOE-D-

… (not included in scope of

delivery)

Hole for pad lock

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97 Cleanroom Product Range-subjected to change

Precision pressure regulator with-

out pressure gauge and mounting

bracket

LRP-…-RR-SA

– Precision pressure adjustment

possible both in static and dy-

namic applications

– Pressure hysteresis of character-

istic flow rate curve < 0.02 bar

– Good response characteristics

during rapid modification of input

pressure or flow rate

– Input pressure fluctuations are

almost entirely compensated

– Connection; G1/4

– Input pressure; 1 to 12 bar

– Temperature range; -10…+60 °C

The precision pressure regulator

regulates the operating pressure

(secondary side) via a diaphragm

pilot control, which acts upon the

main seat, thereby achieving better

regulating characteristics.

Internal air consumption as a func-

tion of internal pressure.

No internal air consumption during

flow.

(air consumption at output)

Precision pressure gauge, di-

ameter 40 mm, for direct

mounting on to LRP

MAP-…-RR

– These precision pressure

gauges are used for pressure

measurement (e.g. for preci-

sion pressure regulators type

LRP- -...) and display in con-

trol systems.

– Compared to standard pres-

sure gauges, these gauges

offer a higher precision class

and a bar/psi scale with fine

graduations.

– They do not contain any

paint-wetting impairment

substances.

– Pressure gauges should only

be operated at up to 3/4 of

their full scale value during

continuous operation (dead

load).

Cleanroom class ISO 4 (FS209E class 10)

Precision pressure regulator and gauge LRP-…-RR-SA, MAP-…-RR Flowrate: 800...2300 l/min

Type Part No. Std nominal flowrate [l/min]

Control pres-sure [bar]

LRP-1/4-0,7-RR-SA 15024451 800 0.05...0.7

LRP-1/4-2,5-RR-SA 15024452 1800 0.05...2.5

LRP-1/4-4-RR-SA 15024453 2000 0.05...4

LRP-1/4-10-RR-SA 15024454 2300 0.1...10

Type Part No. Con-nection

Dia. [mm]

MAP-40-1-1/8-EN-RR [for LRP-0,7-RR-SA] 15024977 G1/8 40

MAP-40-4-1/8 EN-RR [for LRP-2,5-RR-SA] 15024980 G1/8 40

MAP-40-6-1/8-EN-RR [for LRP-4-RR-SA] 15024986 G1/8 40

MAP-40-16-1/8-EN-RR [for LRP-10-RR-SA] 15024988 G1/8 40

1

2

3

4

5 Input pressure

Inte

rna

l a

ir c

on

sum

pti

on

Mounting bracket HR-1/4-P

(not included in scope of

delivery)

Precision pressure gauge

MAP-40-...-1/8-EN (not in-

cluded

in scope of delivery)

Filter throttle

Vacuum suction port

Air release port

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98 Cleanroom Product Range-subjected to change

The micro regulator come with

27 mm diameter gauge. It has a

grid width dimension of 25 mm

and connection size of M5. With

connection plate at both ends,

G1/8 female thread is possible.

LR-…-D-7-MICRO-RR-SA

The micro size regulator is a new

family with many accessories.

This range optimised the used of

compressed air supply solutions

for the miniaturised pneumatic

components used in the electron-

ics industry.

– Also suitable for installation

into panel

– Two pressure gauge connec-

tions for different fitting op-

tions

– Size: Directly actuated dia-

phragm regulator (without

internal air consumption or

primary pressure compensa-

tion)

– Good regulator characteristics

with minimal pressure hystere-

sis

– High flow rate

– Pressure range: 7 bar

– Setting values are secured by

locking the rotary knob

Accessories

Mounting bracket

HFOE-D-MICRO

Connecting plate kit

PBL-1/8-D-MICRO

Threaded pin set

FRB-D-MICRO

Cleanroom class ISO 4 (FS209E class 10)

Regulator and gauge for D-Micro series LR-…-D-7-MICRO-RR-SA Flowrate: 120...300 l/min

Type

Part No. Connection Std nominal flowrate at 7 bar

Weight Input pressure

Output pressure

Temperature range

[5.0 µm] [l/min] [kg] [bar] [bar] [°C]

LR-M5-D-7-MICRO-RR-SA 15059884 M5 (Thread screw in housing)

120 0.07 0...10 0.5...7 -10…+60

LR-M7-D-7-MICRO-RR-SA 15059886 M7 (Thread in connection plate)

300 0.09

LR-1/8-D-7-MICRO-RR-SA 15059888 G1/8 (Thread in connection plate)

280 0.09

LR-M5-D-7-MICRO-RR-SA

LR-M7-D-7-MICRO-RR-SA

LR-1/8-D-7-MICRO-RR-SA

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99 Cleanroom Product Range-subjected to change

LR-M5-D-7-MICRO-RR

LR-M7-D-7-MICRO-RR LR-1/8-D-7-MICRO-RR

Cleanroom class ISO 4 (FS209E class 10)

Regulator and gauge for D-Micro series LR-…-D-7-MICRO-RR-SA Flowrate: 120...300 l/min

Type A

LR-M7-D-5M-MICRO-RR M7

LR-1/8-D-5M-MICRO-RR G1/8

1

2

1

2

Second pressure gauge

connection

Vacuum suction port M5

Second pressure gauge

connection

Vacuum suction port M5

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100 Cleanroom Product Range-subjected to change

Branching module, without

non-return valve, with threaded

connection plate

FRM-...-D-…-RR

– Branching module for com-

pressed air distribution for

attachment of additional

modules (pressure regulat-

ing valve, pressure switch...).

– Several additional air con-

nections for more flexibility.

– Can be used as an intermedi-

ate outlet for different air

qualities.

– Any mounting position

– Temperature range; -10…+60

°C

– Material; Die-cast zinc

Branching module, without

non-return valve, without

threaded connection plate for

D-Micro series

FRZ-D-MICRO-RR

– This branching module is

mounted after the regulator

type LR-…-MICRO-RR-SA or

after the filter regulator type

LFR-…-MICRO-RR-SA

Accessories

Mounting bracket

HFOE-D-MICRO

Connecting plate kit

PBL-1/8-D-MICRO

Branching module, with non-

return valve and threaded con-

nection plate

FRM-H-...-D-…-RR

– An integrated non-return

valve prevents return flow of

lubricated compressed air.

– The branching module can

be combined with service

units of series D.

– Any mounting position

– Temperature range; -10…+60

°C

– Material; Die-cast zinc

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI

Cleanroom class ISO 4 (FS209E class 10)

Branching modules FRZ-…-RR and FRM-…-RR Flowrate: 250...17400 l/min

Type Part No. Connec-tion

Std nominal flowrate

Input pressure

Type Part No. Connec-tion

Std nominal flowrate

Input pressure

Weight

[l/min] [bar] [l/min] [bar] [kg]

FRZ-D-MICRO-RR 15059911 M5 250 0...10 - - - - - -

FRM-1/8-D-MINI-RR 15024773 G1/8 1500 0...16 FRM-H-1/8-D-MINI-RR 15024790 G1/8 1300 0.15...16 0.210

FRM-1/4-D-MINI-RR 15024775 G1/4 3300 FRM-H-1/4-D-MINI-RR 15024793 G1/4 2000

FRM-3/8-D-MINI-RR 15024776 G3/8 3300 FRM-H-3/8-D-MINI-RR 15024794 G3/8 2100

FRM-1/4-D-MIDI-RR 15024779 G1/4 3500 0.2...16 FRM-H-1/4-D-MIDI-RR 15024795 G1/4 3400 0.2...16 0.520

FRM-3/8-D-MIDI-RR 15024780 G3/8 7000 FRM-H-3/8-D-MIDI-RR 15024797 G3/8 5500

FRM-1/2-D-MIDI-RR 15024781 G1/2 8200 FRM-H-1/2-D-MIDI-RR 15024798 G1/2 5600

FRM-3/4-D-MIDI-RR 15024784 G3/4 8800 FRM-H-3/4-D-MIDI-RR 15024799 G3/4 5500

FRM-1/2-D-MAXI-RR 15024786 G1/2 11700 0.25...16 FRM-H-1/2-D-MAXI-RR 15024800 G1/2 9600 0.25...16 0.900

FRM-3/4-D-MAXI-RR 15024787 G3/4 20000 FRM-H-3/4-D-MAXI-RR 15024801 G3/4 15000

FRM-1-D-MAXI-RR 15024789 G1 17400 FRM-H-1-D-MAXI-RR 15024802 G1 13400

G1/8

M5 M5

M5

1

2

2

2 1

2

2

2

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101 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Branching modules FRZ-…-RR and FRM-…-RR Flowrate: 250...17400 l/min

Type B1 B2 B3 B4 B5 D1 D3 D4 D5 D6 H1 H2 H3 H4 H5 L1 T1

FRM-...-H-...-D-MINI-RR 64 52 40 39 2 G1/8 M4 4,3 G1/4 G1/4 20 43 35 11 17.5 42 7

G1/4

70 G3/8

FRM-...-H-...-D-MIDI-RR 85 70 55 47 3 G1/4 M5 5.3 G1/2 G1/4 32 70 60 22 24.5 59 8

G3/8

G1/2

G3/4

FRM-...-H-...-D-MAXI-RR 96 80 66 53 3 G1/2 M5 5.3 G3/4 G1/4 32 70 60 22 24.5 70 8

G3/4

116 G1

1

FRZ-D-MICRO-RR

FRM-...

Mounting bracket HFOE –D-...

(not included in scope of

delivery)

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102 Cleanroom Product Range-subjected to change

Filter regulator with manual con-

densate drain with 5 µm filter

cartridges and gauge

LFR-…-D-5M-MICRO-RR-SA

– Pressure range: 7 bar

– Two pressure gauge connec-

tions for flexible installation

– 5 µm filter cartridges

– Available with manual conden-

sate drain

– Space saving design with filter

and regulator in a single unit

– Good particle separation and

high flow rate

– Good regulating characteristics

with minimal hysteresis

– Setting values are secured by

locking the rotary knob

LFR-M5-D-7-5M-MICRO-RR-SA

LFR-M7-D-7-5M-MICRO-RR-SA

LFR-1/8-D-7-5M-MICRO-RR-SA

Filter regulator for D-Micro series LFR-…-D-5M-MICRO-RR-SA Flowrate: 110...280 l/min

Cleanroom class ISO 45(FS209E class 100)

Type

Part No. Connection Std nominal flow rate at 7 bar

Weight Input pressure

Temperature range

Condensate volume

[5.0 µm] [l/min] [kg] [bar] [°C] [ml]

LFR-M5-D-5M-MICRO-RR-SA 15059901 M5 (Thread screw in housing)

110 0.08 1...10 -10…+60 3

LFR-M7-D-5M-MICRO-RR-SA 15059904 M7 (Thread in connection plate)

280 0.09

LFR-1/8-D-5M-MICRO-RR-SA 15059905 G1/8 (Thread in connection plate)

250 0.09

Output pressure

[bar]

0.5...7

Accessories

Mounting bracket

HFOE-D-MICRO

Connecting plate kit

PBL-1/8-D-MICRO

Threaded pin set

FRB-D-MICRO

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103 Cleanroom Product Range-subjected to change

LFR-M5-D-M5-MICRO-RR

LFR-M7-D-M5-MICRO-RR LFR-1/8-D-M5-MICRO-RR

Filter regulator for D-Micro series LFR-…-D-5M-MICRO-RR-SA Flowrate: 110...280 l/min

Cleanroom class ISO 5 (FS209E class 100)

Type A

LR-M7-D-5M-MICRO-RR M7

LR-1/8-D-5M-MICRO-RR G1/8

1

2

3

4

1

2

3

4

Barbed fitting for plastic

tubing

Second pressure gauge

connection

Installation dimension

above ground level

Vacuum suction port M5

Barbed fitting for plastic

tubing

Second pressure gauge

connection

Installation dimension

above ground level

Vacuum suction port M5

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104 Cleanroom Product Range-subjected to change

Filter regulator with manual con-

densate drain with 40 µm filter

cartridges and gauge

LFR-...-D-…-RR-SA

Filter regulator with manual con-

densate drain with 5 µm filter

cartridges but without gauge

LFR-...-D-O-…-RR-SA

Filter regulator with manual con-

densate drain with 5 µm filter

cartridges and gauge

LFR-...-D-5M-…-RR-SA

– Two pressure gauge connec-

tions for flexible installation

– Sintered filter with water

separator

– Usual 40 µm filter cartridges.

Optional with 5 µm filter

cartridges

– Space-saving design with

filter and regulator in a sin-

gle unit

– Good particle separation and

high flow rate

– Good regulating characteris-

tics with minimal hysteresis

– Setting values are secured

by rotary knob.

– Input pressure; 1...16 bar

– Operating pressure;

0.5 ...12 bar

– Temperature range;

-10…+60 °C

– Mounting; Vertical ±5°

MINI and MIDI sizes

Directly actuated diaphragm

regulator valve

MAXI size

Pilot-actuated piston regulating

valve

Accessories

Mounting bracket

HFOE-D-MINI

HFOE-D-MIDI/MAXI

Filter regulator LFR-…-RR-SA Flowrate: 750...10000 l/min

Cleanroom class ISO 5 (FS209E class 100)

Type Part No. Type Part No. Connec-tion

Std nominal flowrate Condensate volume

Weight

LFR-1/8-D-MINI-RR-SA 15024394 LFR-1/8-D-O-MINI-RR-SA 15024425 G1/8 750 22 0.460

LFR-1/4-D-MINI-RR-SA 15024396 LFR-1/4-D-O-MINI-RR-SA 15024426 G1/4 1400

LFR-3/8-D-MINI-RR-SA 15024397 LFR-3/8-D-O-MINI-RR-SA 15024428 G3/8 1600

LFR-1/4-D-MIDI-RR-SA 15024398 LFR-1/4-D-O-MIDI-RR-SA 15024429 G1/4 2000 43 0.920

LFR-3/8-D-MIDI-RR-SA 15024399 LFR-3/8-D-O-MIDI-RR-SA 15024430 G3/8 3100

LFR-1/2-D-MIDI-RR-SA 15024401 LFR-1/2-D-O-MIDI-RR-SA 15024431 G1/2 3400

LFR-3/4-D-MIDI-RR-SA 15024402 LFR-3/4-D-O-MIDI-RR-SA 15024432 G3/4 3400

LFR-1/2-D-MAXI-RR-SA 15024382 LFR-1/2-D-O-MAXI-RR-SA 15024387 G1/2 9400 80 1.470

LFR-3/4-D-MAXI-RR-SA 15024385 LFR-3/4-D-O-MAXI-RR-SA 15024388 G3/4 9700

LFR-1-D-MAXI-RR-SA 15024386 LFR-1-D-O-MAXI-RR-SA 15024391 G1 10000

LFR-1/8-D-5M-MINI-RR-SA 15024440 LFR-1/8-D-5M-O-MINI-RR-SA 15024458 G1/8 650 22 0.460

LFR-1/4-D-5M-MINI-RR-SA 15024441 LFR-1/4-D-5M-O-MINI-RR-SA 15024459 G1/4 1200

LFR-3/8-D-5M-MINI-RR-SA 15024442 LFR-3/8-D-5M-O-MINI-RR-SA 15024460 G3/8 1350

LFR-1/4-D-5M-MIDI-RR-SA 15024443 LFR-1/4-D-5M-O-MIDI-RR-SA 15024461 G1/4 1600 43 0.920

LFR-3/8-D-5M-MIDI-RR-SA 15024444 LFR-3/8-D-5M-O-MIDI-RR-SA 15024462 G3/8 2400

LFR-1/2-D-5M-MIDI-RR-SA 15024446 LFR-1/2-D-5M-O-MIDI-RR-SA 15024463 G1/2 2500

LFR-3/4-D-5M-MIDI-RR-SA 15024447 LFR-3/4-D-5M-O-MIDI-RR-SA 15024464 G3/4 2600

LFR-1/2-D-5M-MAXI-RR-SA 15024436 LFR-1/2-D-5M-O-MAXI-RR-SA 15024455 G1/2 7580 80

LFR-3/4-D-5M-MAXI-RR-SA 15024438 LFR-3/4-D-5M-O-MAXI-RR-SA 15024456 G3/4 7600

LFR-1-D-5M-MAXI-RR-SA 15024439 LFR-1-D-5M-O-MAXI-RR-SA 15024457 G1 8000

1.470

]l/min] [ml] [kg]

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105 Cleanroom Product Range-subjected to change

Filter regulator LFR-…-RR-SA Flowrate: 750...10000 l/min

Cleanroom class ISO 5 (FS209E class 100)

Type B1 B2 B3 B4 B5 B6 B7 D1 D2 D3 D4 D5

LFR-1/8-D-MINI-RR-SA 64 28 40 92 76 36 75 G1/8 31 43 M4 41

LFR-1/4-D-MINI-RR-SA G1/4

LFR-3/8-D-MINI-RR-SA 70 G3/8

LFR-1/4-D-MIDI-RR-SA 85 46 55 111,5 95 44 91 G1/4 50 58 M5 49

LFR-3/8-D-MIDI-RR-SA G3/8

LFR-1/2-D-MIDI-RR-SA G1/2

LFR-3/4-D-MIDI-RR-SA G3/4

LFR-1/2-D-MAXI-RR-SA 96 51 66 124 107 50 100 G1/2 31 43 M5 49

LFR-3/4-D-MAXI-RR-SA G3/4

LFR-1-D-MAXI-RR-SA 116 G1

Type D6 H1 H2 H3 H4 L1 L2 L3 T1 SW1 SW2

LFR-1/8-D-MINI-RR-SA 38 20 38 35 9 193 69 60 7 14

LFR-1/4-D-MINI-RR-SA

LFR-3/8-D-MINI-RR-SA

LFR-1/4-D-MIDI-RR-SA 52 32 45,5 60 13 250 99 80 8 14 24

LFR-3/8-D-MIDI-RR-SA

LFR-1/2-D-MIDI-RR-SA

LFR-3/4-D-MIDI-RR-SA

LFR-1/2-D-MAXI-RR-SA 65 32 51 60 9 252 82 90 8 14 24

LFR-3/4-D-MAXI-RR-SA

LFR-1-D-MAXI-RR-SA 40

24

1

2

3

4

5

6

7

Barbed fittings for plastic

tubing

Metal bowl guard

Second pressure gauge

Connection

Pressure sensor SDE1- ... -R

Mounting bracket HFOE-D-

… (not included in scope of

delivery)

Installation dimensions

Vacuum suction port

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106 Cleanroom Product Range-subjected to change

Corrosion and acid resistant air

reservoir tested in accordance with

EC directive 87/404 and designed

to EC standard EN 286-2.

CRVZS-…-RR

When these reservoirs are com-

bined with time-delay and flow con-

trol valves, it is possible to achieve

very long delay times.

The reservoirs can be used to

compensate for pressure fluc-

tuations, and act as accumula-

tors in cases of sudden air con-

sumption.

The retaining clamps required

for mounting are included.

Air reservoir CRVZS-…-RR Capacity: 0.1, 0.4, 0.75, 2, 5, 10 l

Cleanroom class ISO 4 (FS209E class 10)

Type Part No. Connection Volume ± 10% Material Medium Design Weight

CRVZS-0,1-RR 15024675 G1/8 0.1l X5 CrNi 18 10, retainer: X12 CrNi 17 7

Air or Nitrogen Seamless vessel 0.226 kg

CRVZS-0,4-RR 15024677 G1/4 0.4l 0.543 kg

CRVZS-0,75-RR 15024678 G1/4 0.75l 0.736 kg

CRVZS-2-RR 15024681 G1/2 2l 1.681 kg

CRVZS-5-RR 15024682 G1, G3/8 5l 3.581 kg

CRVZS-10-RR 15024684 G1, G3/8 10l 6.459 kg

Type B B1 B2 D D1 D2 D3 H H1 L L2 L3

±2 ±2 ±1 ±1 ±1 min. max.

CRVZS-0,1-RR 51 14 – 40 G1/8 15 42 43 28 132 13 50 10 6 19

CRVZS-0,4-RR 54 14 – 52 G1/4 19 54 50 34 240 13 150 14 9 27

CRVZS-0,75-RR 60 20 79 70 G1/4 19 72 61 34 248 13 140 14 9 27

L1

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107 Cleanroom Product Range-subjected to change

CRVZS-2-RR

CRVZS-5-RR

CRVZS-10-RR

Air reservoir CRVZS-…-RR

Cleanroom class ISO 4 (FS209E class 10)

Capacity: 0.1, 0.4, 0.75, 2, 5, 10 l

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108 Cleanroom Product Range-subjected to change

Polyurethane tubing is highly

resistant to abrasion, pressure

and wear, offers outstanding

resistance to kinks, excellent

tensile and tear propagation

strength, very good cushioning

capacity and temperature

flexibility.

PUN-…-RR

It is also highly resistant to oil,

grease, oxygen and ozone. The

level of deformation remains low

even with long term stress. Each

of the different polyurethane

types has different characteris-

tics.

These tubing are suitable for

QS-F and CK range of fittings.

The PUN tubing is approved for

the following use:

– Outside diameter conform to

Cetop RP 54 P

– Halogen free

– Free of paint-wetting impair-

ment substances to FN 942

010 Part 1

– German Technical Control

Board (TUV) tested

Media

Compressed air and vacuum

Temperature dependent

operating pressure

Cleanroom class ISO 4 (FS209E class 10)

Tubing PUN-…-RR Polyurethane tubing

Type Part No. Outside Ø Inside Ø Material Min. bending radius Weight Tubing colour

[mm] [mm] [mm] [kg/m]

PUN-3x0,5-BL-RR 15059981 3.0 2.1 12.5 0.004 Blue

PUN-3x0,5-SW-RR 15059982 Black

PUN-4x0,75-BL-RR 15059983 4.0 2.6 17.0 0.009 Blue

PUN-4x0,75-SW-RR 15060054 Black

PUN-6x1-BL-RR 15060055 6.0 4.0 26.5 0.019 Blue

PUN-6x1-SW-RR 15060056 Black

PUN-8x1,25-BL-RR 15060057 8.0 5.7 37.0 0.030 Blue

PUN-8x1,25-SW-RR 15060058 Black

PUN-10x1,5-BL-RR 15060059 10.0 7.0 54.0 0.049 Blue

PUN-10x1,5-SW-RR 15060060 Black

Polyurethane

Resistance

Chemicals Not suitable

Micobes Not suitable

UV radiation Good (Black version)

Hydrolysis Restricted

Stress cracks Good suitable

Shore hard-ness (D)

52

Operating pressure

Max. operating temperature

[bar] [°C]

0 60

2 60

4 60

6 60

8 50

10 30

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109 Cleanroom Product Range-subjected to change

Push in fitting range

Threaded connection: M5 to G1/2

Tubing O.D.: 3 to 12 mm

Push in connector with male

thread, external hex

QS-F-…-RR

– Wide variety of variants, e.g.

rotatable

– Brass fitting, nickel plated

– With sealing ring or

moulded-on sealing rim

– Operating pressure –

0.95...10 bar

– Ambient temperature:

0...150 °C

– Material on collet: Stainless

high alloy steel

– Material: Brass with nickel

and chrome plated

– Approved for used in food

processing

Cleanroom class ISO 4 (FS209E class 10)

Push in fitting series QS-F-…-RR

Type Part no. Connection Nominal size Tubing O.D. D5 L1 L2 ß1 ß2 Weight/piece

D1 [mm] D2 [g]

Metric thread with sealing ring

QS-F-M5-4-RR 15059957 M5 2.6 4 8 20.5 4 9 2.5 6.1

QS-F-M5-6-RR 15059958 M5 2.6 6 8 23 4 11 2.5 9.3

QS-F-M7-4-RR 15059851 M7 2.6 4 10.2 22 5.5 9 2.5 6.9

QS-F-M7-6-RR 15059852 M7 3.6 6 11 25.3 5.5 11 3.5 10.3

G thread with sealing ring

QS-F-G1/8-4-RR 15059828 G 1/8 2.6 4 13.5 19.5 5.5 9 2.5 8.9

QS-F-G1/8-6-RR 15059832 G 1/8 4.2 6 13.5 24.8 5.5 11 4 12

QS-F-G1/8-8-RR 15059833 G1/8 5.2 8 12.8 26.5 5.5 13 5 14

QS-F-G1/4-6-RR 15059834 G 1/4 4.2 6 17 22.8 6.5 11 4 16

QS-F-G1/4-8-RR 15059835 G 1/4 6.2 8 17 24 6.5 13 6 16

QS-F-G1/4-10-RR 15059837 G 1/4 7.3 10 16 28.9 6.5 16 7 23.7

QS-F-G3/8-8-RR 15059838 G 3/8 6.2 8 20 24 7.5 13 6 23.3

QS-F-G3/8-10-RR 15059839 G 3/8 8.3 10 21 29.4 7.5 16 8 30

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110 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Push in fitting series QS-F-…-RR

Push in fitting. Male straight

thread with internal hex

QS-F-…-I -RR

Type Part No. Connection Nominal size Tubing O.D. D5 L1 L2 ß Weight/piece

D1 [mm] D2 [g]

Metric thread with sealing ring

QS-F-M5-4-I-RR 15085174 M5 2.6 4 8 20.5 4 2.5 6

QS-F-M5-6-I-RR 15085175 M5 2.6 6 8 23.5 4 2.5 9

QS-F-M7-4-I-RR 15085176 M7 2.6 4 11 22 5.5 2.5 6.4

QS-F-M7-6-I-RR 15085177 M7 4.1 6 11 25.3 5.5 3.5 9.4

QS-F-G1/8 -4-I-RR 15085178 G 1/8 2.6 4 13 19.5 5.5 2.5 8.6

QS-F-G1/8 -6-I-RR 15085179 G 1/8 4.2 6 13 24.8 5.5 4 13.4

QS-F-G1/8 -8-I-RR 15085180 G1/8 5.2 8 13 26.5 5.5 5 13.1

QS-F-G1/4 -8-I-RR 15085181 G 1/4 6.2 8 16 24 6.5 6 14.6

QS-F-G1/4 -10-I-RR 15085182 G 1/4 7.3 10 16 28.9 6.5 7 21

G thread with sealing ring

Type Part No. Tubing O.D. Nominal size D5 L1 Weight/piece

D1 [mm] [g]

QS-F-4-RR 15085183 4 3 11 32 14.3

QS-F-6-RR 15085184 6 5 14 36.1 22.5

QS-F-10-RR 15085186 10 9 18 42.3 41.7

QS-F-8-RR 15085185 8 7 16 38 29.4

Push in connector

QS-F-... -RR

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111 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Push in fitting series QS-F-…-RR

Push in L-fitting with male

straight thread and external hex

360° rotatable

QSL-F-…-RR

Type Part No. Connection Nominal size Tubing O.D. D5 D6 H1 H2 L1 ß Weight/piece

D1 [mm] D2 [g]

Metric thread with sealing ring

QSL-F-M5-4-RR 15085187 M5 2.2 4 8 9 19.7 4 18.2 8 10.7

QSL-F-M5-6-RR 15085188 M5 2.2 6 8 11 19.7 4 20.6 8 14.7

QSL-F-M7-4-RR 15085189 M7 2.2 4 10.2 9 21.7 5.5 18.2 9 11.3

QSL-F-M7-6-RR 15085190 M7 2.2 6 10.2 11 21.7 5.5 20.6 9 15.6

G thread with sealing ring

QSL-F-G1/8-4-RR 15085191 G 1/8 3 4 12.8 11 18.2 5.5 17.7 13 17.6

QSL-F-G1/8-6-RR 15085192 G 1/8 3.8 6 12.8 11 18.2 5.5 19.8 13 16

QSL-F-G1/8-8-RR 15085193 G1/8 3.8 8 12.8 13 20.2 5.5 23 13 20

QSL-F-G1/4-6-RR 15085194 G 1/4 5 6 15.8 11 21 6.5 22.1 16 24.5

QSL-F-G1/4-8-RR 15085195 G 1/4 6 8 15.8 13 21 6.5 23 16 24

QSL-F-G1/4-10-RR 15085196 G 1/4 6 10 15.8 16 23 6.5 26.4 16 34.6

QSL-F-G3/8-8-RR 15085197 G 3/8 6.7 8 20 13 24 7.5 24.5 18 34.2

QSL-F-G3/8-10-RR 15085198 G 3/8 8.8 10 20 16 24 7.5 26.4 18 36.6

Type Part No. Tubing O.D. Nominal size D5 L1 Weight/piece

D1 [mm] [g]

QSL-F-4-RR 15085199 4 3 9 17.3 9

QSL-F-6-RR 15085200 6 5 11 20.6 15.1

QSL-F-10-RR 15085202 10 9 16 26.4 29.6

QSL-F-8-RR 15085201 8 7 13 23 19.1

Push in L-connector

QSL-F-... -RR

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112 Cleanroom Product Range-subjected to change

Push in connector with push in

sleeve

QS-F-... H-...-RR

Type Part No. Tubing O.D. Nominal size Push in sleeve D5 L1 Weight/piece

QS-F-6H-4-RR 15085203 4 3 6 9 32.5 7.3

QS-F-8H-4-RR 15085204 4 3 8 9 34 11.2

QS-F-8H-6-RR 15085205 6 5 8 11 36.3 10.8

QS-F-10H-4-RR 15085206 4 3 10 13 39 23.5

QS-F-10H-6-RR 15085207 6 5 10 11 39.3 17.5

QS-F-10H-8-RR 15085208 8 7 10 13 39 14.2

D1 [mm] D2 [g]

Cleanroom class ISO 4 (FS209E class 10)

Push in fitting series QS-F-…-RR

Push in T-fitting with male

straight thread and external hex

360° rotatable

QST-F-…-RR

Type Part No. Connection Nominal size Tubing O.D. D5 D6 H1 H2 L1 ß Weight/piece

D1 [mm] D2 [g]

Metric thread with sealing ring

QST-F-M5-4-RR 15085209 M5 2.2 4 8 9 19.7 4 34.6 8 14.6

QST-F-M5-6-RR 15085210 M5 2.2 6 8 11 19.7 4 41.2 8 20.9

QST-F-M7-4-RR 15085211 M7 2.2 4 10.2 9 21.7 5.5 34.6 9 15.9

QST-F-M7-6-RR 15085212 M7 2.2 6 10.2 11 21.7 5.5 41.2 9 22.2

G thread with sealing ring

QST-F-G1/8-4-RR 15085213 G 1/8 2.9 4 12.8 11 18.2 5.5 34.6 13 22

QST-F-G1/8-6-RR 15085214 G 1/8 3.8 6 12.8 11 18.2 5.5 39.6 13 22

QST-F-G1/8-8-RR 15085215 G1/8 3.8 8 12.8 13 20.2 5.5 46 13 28

QST-F-G1/4-6-RR 15085216 G 1/4 4.9 6 15.8 11 21 6.5 44.2 16 32

QST-F-G1/4-8-RR 15085217 G 1/4 6 8 15.8 13 21 6.5 46 16 33.6

QST-F-G1/4-10-RR 15085218 G 1/4 6 10 15.8 16 23 6.5 52.8 16 47.5

QST-F-G3/8-8-RR 15085219 G 3/8 6.8 8 20 13 24 7.5 49 18 44

QST-F-G3/8-10-RR 15085220 G 3/8 8.8 10 20 16 24 7.5 52.8 18 51

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113 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Push in fitting series QS-F-…-RR

Type Part No. Tubing O.D. Nominal size Tubing O.D. D5 D6 H1 L1 Weight/piece

D1 [mm] D2 [g]

QST-F-4-RR 15085221 4 3 4 9 9 17.3 34.6 13.1

QST-F-6-RR 15085222 6 5 6 11 11 20.6 41.2 21.3

QST-F-8-RR 15085223 8 7 8 13 13 23 46 26.9

QST-F-10-RR 15085224 10 9 10 16 16 26.4 52.8 43.2

QST-F-6-4-RR 15085225 6 – 4 11 11 20.6 41.2 22.3

QST-F-8-6-RR 15085226 8 – 6 11 13 23 46 26.5

QST-F-10-8-RR 15085227 12 – 10 16 19 28.9 57.8 64.3

Reducing

Push in T-connector

QST-F-…-RR

Type Part No. Tubing O.D. Nominal size Tubing O.D. D5 D6 H1 L1 Weight/piece

D1 [mm] D2 [g]

QSY-F-6-RR 15085228 6 5 6 11 11 11.5 43.1 26.2

QSY-F-8-RR 15085229 8 7 8 13 13 13.5 46.5 27.6

QSY-F-10-RR 15085230 10 9 10 16 16 16.5 49.3 58.8

Reducing

QSY-F-6-4-RR 15085231 6 – 4 11 9 9.5 38.8 17.8

QSY-F-8-6-RR 15085232 8 – 6 13 11 11.5 44.8 28.1

QSY-F-10-8-RR 15085233 10 – 8 16 13 13.5 46.5 39

Push in Y-connector

QSY-F-…-RR

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114 Cleanroom Product Range-subjected to change

Quick connector range

Threaded connection: M5 to G1/2

Tubing I.D.: 3 to 13 mm

– Wide variety of variants, e.g.

rotatable

– Aluminum or polymer design

– With sealing ring or moulded-

on sealing rim

Quick connector with male thread

CK-…-RR

Cleanroom class ISO 4 (FS209E class 10)

Quick connector series CK-…-RR

Type Part No. Connection For tubing Nominal size Material Dimensions

D Type (mm) B L ß ß1

CK-M5-PK-3-RR 15024505 M5 PUN-4-... 2.4 Steel/Al with sealing ring

3.7 17.4 7 8

CK-M5-PK-4-RR 15024506 M5 PUN-6-... 2.4 3.7 18.7 10 –

CK-1/8-PK-3-RR 15024507 G1/8 PUN-4-... 2.4 5 20.4 13 8

CK-1/8-PK-4-RR 15024508 G1/8 PUN-6-... 3.4 5 23.5 13 12

CK-1/8-PK6-RR 15024509 G1/8 PUN-8-... 5.4 5 23.6 13 14

CK-1/4-PK-4-RR 15024510 G1/4 PUN-6-... 3.4 6.5 26.5 17 12

CK-1/4-PK-6-RR 15024511 G1/4 PUN-8-... 5.4 6.5 26.6 17 14

CK-3/8-PK-6-RR 15024513 G3/8 PUN-8-... 5.3 8.5 28.6 19 14

Al, blue ano-dised with sealing ring

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115 Cleanroom Product Range-subjected to change

Quick connector with female

thread and sealing ring

ACK-…-RR

L-quick connector. Rotatable

LCK-…-RR

Cleanroom class ISO 4 (FS209E class 10)

Quick connector series CK-…-RR

Type Part No. Connection For tubing Nominal size Material Dimensions

D Type (mm)] B L ß ß1

ACK-1/8-PK-3-RR 15024528 G1/8 PUN-4-... 2.4 9 23.9 13 8

ACK-1/8-PK-4-RR 15024529 G1/8 PUN-6-... 3.4 9 27 13 12

ACK-1/8-PK-6-RR 15024531 G1/8 PUN-8-... 5.3 9 27 13 14

ACK-1/4-PK-4-RR 15024532 G1/4 PUN-6-... 3.4 12 30 17 12

ACK-1/4-PK-6-RR 15024533 G1/4 PUN-8-... 5.3 12 30 17 14

ACK-3/8-PK-6-RR 15024534 G3/8 PUN-8-... 5.3 12 31 19 14

Al, blue ano-dised

Type Part No. Connec-tion

For tubing Nominal size

Material Dimensions

D Type [mm] B C H H1 L L1 ß

LCK-M5-PK-3-RR 15024545 M5 PUN-4-... 2 4.2 10 21.1 16.1 18.2 5.7 7

LCK-M5-PK-4-RR 15024546 M5 PUN-6-... 2.9 3.4 11 21.1 16.1 18.2 5.7 7

LCK-1/8-PK-3-RR 15024547 G1/8 PUN-4-... 2 6.4 16 27.1 19.1 22 6 13

LCK-1/8-PK-4-RR 15024548 G1/8 PUN-6-... 2.9 6 16 30.2 22.2 27.5 9 13

LCK-1/8-PK-6-RR 15024549 G1/8 PUN-8-... 4.9 6 16 30.3 22.3 27.5 9 13

LCK-1/4-PK-4-RR 15024550 G1/4 PUN-6-... 2.9 7 20 34.2 24.2 28.5 9 17

LCK-1/4-PK-4-RR 15024551 G1/4 PUN-6-... 4.9 6.8 20 34.3 24.3 28.5 9.1 17

LCK-3/8-PK-6-RR 15024553 G3/8 PUN-8-... 4.9 8.6 25 39.3 26.8 31 9.1 22

Die-cast zinc with 2 seal-ing rings

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116 Cleanroom Product Range-subjected to change

L-quick connector. Rotatable with

sealing rings OL-…

LCKN-…-RR

T quick connector. Rotatable

TCK-…-RR

Type Part No. Conec-tion

For tubing Nominal size

Material Dimensions

D Type [mm] H H1 L L1 L2 ß

LCKN-M5-PK-3-RR 15024560 M5 PUN-4-... 1.7 Die-cast zinc/aluminium with sealing ring

22.2 15.2 20.1 3.1 16.1 7

LCKN-M5-PK-4-RR 15024561 M5 PUN-6-... 2.6 23.8 15.8 23.2 3.1 19.2 7

LCKN-1/8-PK-3-RR 15024562 G 1/8 PUN-4-... 1.7 24.6 15.9 25.4 4.7 18.9 13

LCKN-1/8-PK-4-RR 15024565 G1/8 PUN-6-... 2.6 27 16.3 28.5 4.7 22 13

LCKN-1/8-PK-6-RR 15024567 G1/8 PUN-4-... 4.6 30.3 18.6 28.6 4.7 22.1 13

LCKN-1/4-PK-4-RR 15024568 G1/4 PUN-6-... 2.6 30 17.7 28.5 6.3 22 17

LCKN-1/4-PK-6-RR 15024569 G1/4 PUN-8-... 4.6 33.3 20 28.6 6.3 22.1 17

LCKN-3/8-PK-6-RR 15024570 G3/8 PUN-8-... 4.6 35.3 20.8 28.6 7.5 22.1 19

Cleanroom class ISO 4 (FS209E class 10)

Quick connector series CK-…-RR

Type Part No. Connec-tion

For tubing Nominal size

Material Dimensions

D Type [mm] B C H L L1 ß

TCK-M5-PK-3-RR 15024517 M5 PUN-4-... 2.4 Die-cast zinc with 2 sealing rings

4.2 10 21.1 18.2 5.7 7

TCK-M5-PK-4-RR 15024520 M5 PUN-6-... 3.4 3.4 11 21.1 18.2 5.7 7

TCK-1/8-PK-3-RR 15024521 G1/8 PUN-4-... 2.4 6.4 16 38.2 22 6 13

TCK-1/8-PK-3-RR 15024522 G1/8 PUN-4-... 3.4 6 16 44.4 27.5 9 13

TCK-1/8-PK-6-RR 15024523 G1/8 PUN-8-... 5.3 6 16 44.6 27.5 9 13

TCK-1/4-PK-4-RR 15024524 G1/4 PUN-6-... 3.4 7 20 48.4 28.5 9 17

TCK-1/4-PK-6-RR 15024525 G1/4 PUN-8-... 5.3 6 20 48.6 28.5 9.1 17

TCK-3/8-PK-6-RR 15024526 G3/8 PUN-8-... 5.3 Al, blue anodised 9 25 53.6 31.5 9 22

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117 Cleanroom Product Range-subjected to change

Bulkhead quick connector

SCK-…-RR

Bulkhead quick connector with

female thread and sealing ring

QCK-…-RR

Cleanroom class ISO 4 (FS209E class 10)

Quick connector series CK-…-RR

Type Part No. For tubing Nominal size Material Dimensions

Type [mm] B max. B1 D L ß

SCK-PK-3-RR 15024541 PUN-4-... 2.4 8 3.2 M6x0.75 34 10

SCK-PK-4-RR 15024542 PUN-6-... 3.4 10 3.5 M10x1 43 13

SCK-PK-6-RR 15024543 PUN-8-... 5.3 10 4 M12x1 44 17

Al, blue ano-dised/steel

Type Part No. Con-nection

For tubing Nominal size

Mate-rial

Dimensions

D I.D. [mm] B B1 B2 B3 max.

D1 L1 ß ß1

QCK-M5-PK-3-B-RR 15024556 M5 PUN-4-... 2.4 6 3.2 10 8 M6x0.75 31 7 10

QCK-1/8-PK-4-B-RR 15024557 G1/8 PUN-6-... 3.4 8 3.5 13.5 10 M10x1 40 13 13

QCK-1/4-PK-6-B-RR 15024558 G1/4 PUN-8-... 5.3 12 4 18 10 M12x1 45 17 17

Al, blue ano-dised/steel

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118 Cleanroom Product Range-subjected to change

This captive sealing ring is effective

even when only gently tightened, is

reusable and can be used at

hydraulic pressures of up to 30 bar.

OL-…-RR

Operating pressure: -1 ... +30 bar

Temperature range: -30 ... +100 °C

Cleanroom class ISO 4 (FS209E class 10)

Sealing rings OL-…-RR Ø M5, M10, M12, M14, M16, M22, G1/8, G1/4, G3/8, G1/2, G3/4

Type Part No. For thread Material Max. permissible tightening torque Weight [kg]

OL-M5-RR 15024659 M5 Stainless steel & NBR

2 Nm 0.001

OL-1/8-RR 15024660 G1/8 4 Nm

OL-1/4-RR 15024661 G1/4 11 Nm

OL-3/8-RR 15024662 G3/8 AI & NBR 40 Nm 0.002

OL-1/2-RR 15024663 G1/2 50 Nm

OL-3/4-RR 15024664 G3/4 100 Nm

OL-M6-RR 15024665 M6 St. steel & NBR - 0.001

OL-M10-RR 15024666 M10 Al & NBR 12 Nm 0.006

OL-M12-RR 15024667 M12 20 Nm 0.007

OL-M14-RR 15024668 M14 35 Nm 0.008

OL-M16-RR 15024669 M16 - 0.096

OL-M22-RR 15024670 M22 - 0.025

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119 Cleanroom Product Range-subjected to change

Pressure and vacuum switch SDE-5-…-RR

Cleanroom class ISO 4 (FS209E class 10)

Pressure switch: 0...10 bar

SDE5-D10-…-RR

Vacuum switch: -1...0 bar

SDE5-V1-…-RR

– The right pressure switch for

every application

– Increased functional

reliability thanks to simple,

dependable pressure moni-

toring in pneumatic systems

– Festo plug and work

– Simple teach-in program-

ming

– Reduced costs thanks to

simple installation

– Modular system for

optimum configuration

For tubing of O.D. of 3 mm

Part No. For tubing of O.D. of 4 mm

Part No. For tubing of O.D. of 6 mm

Part No. Pneumatic connection

Overload pressure

SDE5-V1-O-Q3E-P-M8-RR

15060111 SDE5-V1-O-Q4E-P-M8-RR

15060125 SDE5-V1-O-Q6E-P-M8-RR

15060129 At one end 5 bar

SDE5-V1-O-Q3-P-M8-RR

15060112 SDE5-V1-O-Q4-P-M8-RR

15060126 SDE5-V1-O-Q6-P-M8-RR

15060130 At both ends

SDE5-D10-O-Q3E-P-M8-RR

15060113 SDE5-D10-O-Q4E-P-M8-RR

15060127 SDE5-D10-O-Q6E-P-M8-RR

15060131 At one end 15 bar

SDE5-D10-O-Q3-P-M8-RR

15060124 SDE5-D10-O-Q4-P-M8-RR

15060128 SDE5-D10-O-Q6-P-M8-RR

15060132 At both ends

Technical data

Constructional design Piezoresistive pressure sensor with display

Different between teach-in and switching pressure

±1.5% of the measuring range final value

Repeatability ±0.3% of the measuring range final value

Temperature range 0...50 °C

Temperature of medium 0...50 °C

Response time 4 ms

Electrical connection Normally open, M8 connector. Refer to SIM-M8…-RR cable on page 40

Pneumatic connection Push-in connector at one or both ends, 3, 4 or 6 mm O.D. tube

Type of mounting Using interlinking wall bracket provided

Operating voltage DC 15 … 30 V

Max. idle current 20 mA

Max. output current 100 mA

Protection class to EN 60529

IP40

Switching output Semiconductor switching element, positive switching (PNP)

Type of display LED, visible from all sides

Weight of sensor (bracket) 19 g (5.5 g)

Plug M8 x 1, 3-pin, pin

allocation to EN 60 947-5-2

Yellow LED display, visible

from all sides

Pneumatic connection

QS-3, QS-4 or QS-6

Pneumatic connection

QS-3, QS-4 or QS-6 or

blanking plug with

SDE5-…- Q…E-…

1

2

3

4

Bracket for wall mounting

Through-hole for mounting

screw

Angled connection socket

SIM-M8- 3WD

Straight connection socket

SIM-M8-3GD

5

6

7

8

Voltage: 15...30 V DC, Pressure: -1...10 bar

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120 Cleanroom Product Range-subjected to change

Standard design:

With conventional configuration:

Supply and vacuum port turned

by 90°, since the drawn-in flow

from V to R is diverted by 90°.

Inline design:

With supply and vacuum port

arranged in a line. This design

allows the generator to be

mounted directly in a tubing line

to save space.

Technical data

Medium: Compressed air, filter 40

µm, unlubricated

Operating pressure: 1...8 bar

Max. vacuum: 0.89 bar

Max. suction rate: 90 l/min

Temperature range: 0...60 °C

High suction volume

Up to 90 l/min which results in very short evacuation times.

…… High vacuum ___ High suction volume

Cleanroom class ISO 4 (FS209E class 10)

Vacuum generator VN-…-RR High vacuum of 0.89 vac bar or High suction rate at 90 l/min

– Vacuum generators for gen-

eration of vacuum in the

higher range to –0.89 bar

– Vacuum generators for high

suction rates resulting in

very short evacuation times

– Housing width 14 mm, 18

mm

– Plastic type

– Vacuum generators which

functions on the ejector prin-

ciple

– Simple, compact design

– Can be used directly in the

workplace, making them very

effective

– Versatile connection options:

– With screw in thread

– T-shaped housing

– Straight housing without

exhaust port for space-

saving assembly in a tubing

line or directly in the suction

cup holder

– Laval nozzles in four nominal

sizes:

– 0.45 mm

– 0.7 mm

– 0.95 mm

– 1.4 mm

High vacuum

Up to 0.89 bar

System comparison

High vacuum vs. High suction

volume

The first type of generator

has been optimised for the

generation of high vacuum at

comparatively low suction

volume rates. The second

type of generator, on the other

hand, can achieve very short

evacuation times because of

the high suction volume rate

at relatively low vacuum.

High vacuum High suction rate Nominal sizes

Housing width

Design

Type Part No. Type Part No. [mm] [mm] 1P [D1] 2V [D2] 3R [D3]

VN-05-H-T3-PI4-VI4-RI4-RR 15024717 VN-05-L-T3-PI4-VI4-RI4-RR 15024725 0.45 14 G1/8 G1/8 G1/8 Standard design

VN-07-H-T3-PI4-VI4-RI4-RR 15024718 VN-07-L-T3-PI4-VI4-RI4-RR 15024726 0.7 14 G1/8 G1/8 G1/8

VN-10-H-T3-PI4-VI4-RI4-RR 15024720 VN-10-L-T3-PI4-VI4-RI4-RR 15024727 0.95 14 G1/8 G1/8 G1/8

VN-14-H-T4-PI4-VI5-RI5-RR 15024721 VN-14-L-T4-PI4-VI5-RI5-RR 15024728 1.4 18 G1/8 G1/4 G1/4

VN-05-M-T3-PI4-VI4-RI4-RR 15024722 VN-05-N-T3-PI4-VI4-RI4-RR 15024730 0.45 14 G1/8 G1/8 G1/8 In-line design

VN-07-M-T3-PI4-VI4-RI4-RR 15024723 - - 0.7 14 G1/8 G1/8 G1/8

Connection

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121 Cleanroom Product Range-subjected to change

Vacuum as a function of operat-

ing pressure

Cleanroom class ISO 4 (FS209E class 10)

Vacuum generator VN-…-RR

Performance data for high vacuum generators Standard Inline

Size VN-05-H-... VN-07-H-... VN-10-H-... VN-14-H-... VN-05-M-... VN-07-M-...

Max. vacuum is at operating pressure [vac. bar] 0.88 0.88 0.89 0.88 0.86 0.86

[bar] 4.5 4.7 4.5 5 6 5.8

[l/min] 6.2 16 25 51.6 6.1 13.5

[bar] 2.1 2.1 3.1 5.1 6.3 7

Pressurisation time for 1 l volume at p1 = 6 bar evacuated at maximum vacuum

[s] 4.8 1.9 1.1 0.5 4.7 2.1

Performance data for high suction rate generators Standard Inline

Max. suction rate with respect to atmosphere [l/min] 15.3 38.8 52 88.4 12 –

at operating pressure [bar] 5.5 6.2 5.2 6.2 6 –

achieved with vacuum [vac. bar] 0.55 0.55 0.56 0.57 0.55 –

Pressurisation time for 1 l volume at p1 = 6 bar evacuated at maximum vacuum

[s] 1.7 0.5 0.46 0.25 1.57 –

Suction rate with respect to atmosphere max. at operating pressure

Size VN-05-L-... VN-07-L-... VN-10-L-... VN-14-L-... VN-05-N-... –

High vacuum of 0.89 vac bar or High suction rate at 90 l/min

Type

1 (P) 2 (V) 3 (R)

B1 D1 D2 D3 H1 H2 L1 L2 L3 ß1 ß2

VN-...-T3-PI4-VI4-RI4-RR 14 G1/8 G1/8 G1/8 35.7 26.2 70 9.5 25.5 13 13

VN-14-...-T4-PI4-VI5-RI5-RR 18 G1/8 G1/4 G1/4 45.5 32.7 81.9 13.1 22 13 17

Connections

VN-05-H-…-RR

VN-07-H-…-RR

VN-10-H-…-RR

VN-14-H-…-RR

VN-05-M-…-RR

VN-07-M-…-RR

VN-05-L-…-RR

VN-07-L-…-RR

VN-05-N-…-RR

VN-10-L-…-RR

VN-14-L-…-RR

1

4

5

6

7

8

9

aJ

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122 Cleanroom Product Range-subjected to change

Cleanroom class ISO 4 (FS209E class 10)

Vacuum generator VN-…-RR High vacuum of 0.89 vac bar or High suction rate at 90 l/min

Suction flow rate

(with respect to atmosphere)

as a function of operating

pressure

High vacuum

Suction flow rate

(with respect to atmosphere)

as a function of operating

pressure

High suction rate

VH-05-H…-RR

1

VH-05-M-…-RR

5 VH-07-H…-RR

2

VH-07-M-…-RR

6

VH-10-H-…-RR

3

VH-14-H-…-RR

4

VH-05-L-…-RR

7

VH-05-N-…-RR

aA VH-07-L-…-RR

8

VH-10-L-…-RR

9

VH-14-L-...-RR

aJ

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123 Cleanroom Product Range-subjected to change

Information

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124 Cleanroom Product Range-subjected to change

Information

General information

Introduction to Cleanroom

The term “Cleanroom” is some-

thing you associate with in

modern industries. However, the

root of cleanroom design goes

back more than a century. Think

of the need to control contamina-

tion in hospitals and you would

be able to imagine the first

cleanroom.

It can be seen that the require-

ment for cleanroom can be

broadly divided into two areas:

– That in which inanimate parti-

cles are a problem and where

their presence may prevent a

product functioning or reduce

its useful life.

– To ensure the absence of mi-

crobe carrying particles whose

growth could lead to human

infection.

Definition of cleanroom

It is clear that a cleanroom is a

room that is clean. However, a

cleanroom now has a special

meaning and it is defined in

ISO 144641 as:

“A room in which the concentra-

tion of airborne particles is con-

trolled and which contains one or

more clean zones.”

And in ISO 14644-1 as:

“A room in which the concentra-

tion of airborne particles is con-

trolled, and which is constructed

and used in a manner to minimise

the introduction, generation and

retention of particles inside the

room and in which other relevant

particles inside the room and in

which other relevant parameters

e.g. temperature, humidity and

pressure, are controlled as neces-

sary.”

Classification of cleanroom

Cleanroom are classified by the

cleanliness of their air. The

method most easily understood

and universally applied is the

one suggested in versions of

Federal Standard 209 up to

edition "D”.

The Federal Standard FS 209D

Table shows the simplified

classification of Cleanroom

Class according to the older

Federal Standard 209D. This

standard has now been super-

seded by the metric version;

Federal Standard 209E which

was published in 1992. The

basic unit of measurement

within a cleanroom is a micron

(µm) which is one millionth of a

metre.

To classify cleanroom, the num-

ber of particles equal to and

greater than 0.5 µm is meas-

ured in one cubic foot of air and

this count is used to identify

the Cleanroom Class.

However, because of the sim-

plicity and universal usage of

the Federal Standard 209D, it is

unlikely to be forgotten or

removed. It is also likely that

the Federal Standard 209E will

supersede it but by the new

International Standard Organi-

sation’s (ISO) standard ISO

14644-1.

Cleanroom for different

industries

The required standard of

cleanliness of a room is de-

pendent on the task performed

in it; the more susceptible the

product is to contamination,

the better the standard.

How small is a sub micro particle?

The Federal Standard FS 209D

The possible cleanroom

requirements for various tasks

Objects Approximate Size [µm]

Human hair 100

Rubbing or abrading an ordinary painted surface 90

Sliding metal surfaces (non-lubricated) 75

Crumpling or folding paper 65

Rubbing an epoxy painted surface 40

Belt drive (Conveyor) 30

Dust 25

Writing with ball pen on ordinary paper 20

Abrading of the skin 04

Oil smoke particles 0.1

Measured Particle Size [µm]

0.1 0.2 0.3 0.5 5.0

1 35 7.5 3 1 NA

10 350 75 30 10 NA

100 NA 750 300 100 NA

1000 NA NA NA 1000 7

10000 NA NA NA 10000 70

100000 NA NA NA 100000 7000

Class

ISO Class (FS 209E) Tasks

ISO Class 3 (Class 1) Integrated circuit manufacturers manufacturing sub-micron geometries only use these rooms.

ISO Class 4 (Class 10)

Semiconductor manufacturers producing integrated circuits with line widths below 2 µm use these rooms.

ISO Class 5 (Class 100)

Used with a bacteria-free or particulate-free environment is required in the manufacture of aseptically produced injectable medicines. Required for implant or transplant surgical operations.

ISO Class 6 (Class 1000)

Manufacture of high quality optical equipment. Assembly and testing of precision gyroscopes. Assembly and testing of precision gyroscopes. Assembly of miniaturised bearings.

ISO Class 7 (Class 10000)

Assembly of precision of hydraulic or pneumatic equipment, servo-control valves, precision timing devices, high grade gearing.

ISO Class 8 Class 100000)

General optical work, assembly of electronic components, hydraulic and pneumatic assembly.

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125 Cleanroom Product Range-subjected to change

Information

General information

International standard of cleanroom

Introduction

The Federal Standard 209E have

long been the only definition of

cleanroom classification available

from a standard organisation. It is

from the U.S. General Service

Administration and approved for

use by all U.S. Agencies. In the

absence of an international

standard, FS 209E was broadly

used internationally.

The need for a new international

standard that covered more

cleanroom environmental

parameters and practices led to

the formation of a technical

committee of the International

Standards Organisation. The

technical committee is named TC

209 Cleanroom and Associated

Controlled Environments.

The goal of TC 209 is

standardization of equipment,

facilities and operational

methods for cleanroom and

associated controlled

environments. This includes

procedural limits and testing

procedures to achieve desired

attributes to minimise micro

contamination.”

The ISO committee will produce

11 new standards documents

that relate to cleanroom or clean

zones.

Cleanroom standard adopted by

different countries

Some countries completely

adopted FS 209, while others

made their own national version,

similar to FS 209. Some made

minor changes of the classes to

comply with the metric system,

but all changed the denomination

of the classes.

Because of the different naming

of the classes in different

countries, care must be taken not

to mix up the standards.

Germany standard: VDI2083

The German Engineering

Association, known as VDI, has

published the VDI 2083 as

"Cleanroom engineering"

guideline, for the first time in

1976. The various tasks and

measures associated with

cleanroom technology are

described the VDI guideline

series VDI 2083.

This guideline, which was

developed just recently, is the

only guideline, which can be used

for the classification of operating

materials. The aim of this

guideline is to provide a

standardized procedure for

qualifying or comparing operating

materials with regards to their

airborne particle emission.

FESTO is applying this guideline

for the particle emission tests it

conducts.

Country Standard Year Description

Australia AS 1386 1989 Cleanroom and clean work stations

France AFNOR X44101 1981 Definition of cleanroom levels

Germany VDI 2083.3 1993 Contamination control measuring technique for clean air rooms

Holland VCCN 1 1992 Dust and micro-organism classification of air

Japan JIS-B-9920 1989 Measuring methods for airborne particles in cleanroom and evaluating methods, etc.

Russia Gost-R 50766 1995 Cleanroom classification, General requirements

UK BS 5295 1989 Environmental cleanliness in enclosed spaces

US FS 209E 1992 Airborne particulate cleanliness classes in cleanroom and clean zones

USA 209E 1992

ISO 14644-1 1997

Japan B 9920 1989

France X44101 1981

Germany VDI 2083 1990

UK BS 5295 1989

Australia AS 1386 1989

ISO Class 1 1

ISO Class 2 2 0

1 ISO Class 3 3 1 C 0.035

10 ISO Class 4 4 2 D 0.35

100 ISO Class 5 5 4000 3 E,F 3.5

1000 ISO Class 6 6 - 4 G,H 35

10000 ISO Class 7 7 400000 5 J 350

100000 ISO Class 8 8 4000000 6 K 3500

ISO Class 9 7 L

Some major national stan-

dards exist today:

– British standard: BS5295

– Japanese standard: JIS B

9920

– Australian standard: AS

1386

– French standard: AFNOR X

44101

– Dutch standard: VCCN-RL-1

– Russian standard: GOST

R50766-95

The table shows major national

standards exist today.

A comparison of major

engineering cleanroom

classes in the world

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126 Cleanroom Product Range-subjected to change

Information

General information

Introduction

After 40 years, the FS 209E has

been officially retired. This

paves the way for worldwide

harmonisation promised by the

new cleanroom protocols from

the International Organisation

for Standardisation (ISO). The

Institute of Environmental Sci-

ences and Technology (IEST)

submitted a request to retire

the federal standard and it was

approved. The Federal Stan-

dard 209E was officially retired

by the US Government on 29

November 2001.

Basically, the quality of air in a

cleanroom has not changed,

what has changed is the meas-

uring system. ISO standards

use only the metric system.

Almost all countries now use

the new ISO 14644 standard.

ISO classification standard

Because of the large number of

cleanroom standards produced

by individual countries, it is

very desirable that one world-

wide standard of cleanroom

classification is produced. ISO

has set up a technical

committee (TC 209) and will

produce 10 new standards

documents that relate to

cleanroom or clean zones. The

first two standards have been

published: ISO 14644-1 and –2.

ISO 14644-1 classification of

air cleanliness

Cleanliness class designations

and quantity have changed

from FS 209E. Along with the

obvious change to metric

measure of air volume, ISO

14644-1 adds three additional

classes – two cleaner than

Class 10 and one dirtier than

Class 100,000.

ISO 14644-2 cleanroom testing

for compliance

ISO 14644-2 determines the

type and frequency of testing

required conforming to the

standard. Table 2.12 indicates

which tests are mandatory and

Table 2.13 indicates which

tests are optional.

Summary of FS 209E and ISO

14644-1 and –2

The cleanliness classification

levels defined by FS 209E and

ISO 14644-1 are approximately

equal, except the new ISO

standard uses new class

designations, a metric measure

of air volume and adds three

additional classes – two cleaner

than Class 10 and one dirtier

than Class 100,000. The second

new ISO standard, ISO 14644-

2, gives requirements for

monitoring a cleanroom or

clean zone to provide evidence

of its continued compliance

ISO 14644-1

ISO 14644-2

Table compares the FS 209E to

the new ISO 14644-1

classifications.

International standard for cleanroom

Airborne Particulate Cleanliness Classes ISO 14644-1

Number of Particles per Cubic Meter by Micrometer Size

0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5 µm

ISO 1 10 2

ISO 2 100 24 10 4

ISO 3 1000 237 102 35 8

ISO 4 10000 2370 1020 352 83

ISO 5 100000 23700 10200 3520 832 29

ISO 6 1000000 237000 102000 35200 8320 293

ISO 7 352000 83200 2930

ISO 8 3520000 832000 29300

ISO 9 35200000 8320000 293000

Class

Schedule of Tests to Demonstrate Continuing Compliance

Test Parameter Class Maximum Time Interval

Test Procedure

≤ ISO 5 6 months ISO 14644-1 Annex A

≥ ISO 5 12 months

Air Pressure Test

All Classes 12 months ISO 14644-1 Annex B5

Air Flow All Classes 12 months ISO 14644-1 Annex B4

Particle Count Test

ISO 14644-1

ISO Class English Metric

1 - -

2 - -

3 1 M1.5

4 10 M2.5

5 100 M3.5

6 1000 M4.5

7 10000 M5.5

8 100000 M6.5

9 - -

FED STD 209E

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127 Cleanroom Product Range-subjected to change

Introduction

The design of cleanroom

equipment plays an important

role in cleanroom technology. It

would be wasteful to design a

state-of-the-art cleanroom and do

not place any importance on the

equipment used in the

cleanroom. When designing

cleanroom equipment, care must

be taken right from the initial

stage.

Using pneumatic cylinder in

cleanroom

When you lower the piston speed,

the particle count will greatly

reduce as the impact at the end

position is reduced.

To help reduce the impact,

cylinders with cushioning will

significantly help in the reduction

of particles generated.

When there is a need to have end

position stopping, do not use

rubber stoppers, use shock

absorbers as they generate lesser

particles.

Using rotary moving elements

Whenever possible rotary

movements should be employed,

as lesser particles are generated

by rotary moving elements.

Furthermore, it is easier to seal

rotating elements from the clean

environment.

Minimising sliding friction

The design should minimise

sliding friction. Do not use sliding

tracks, it is better if you could use

roller tracking. Lip sealing is also

not allowed and tries to avoid

unnecessary functional contact.

Principle of arranging task

integration

Reduce the number of

components used to a minimum,

if possible make use of single

components which can assume

several functions.

Magnetic influences

When handling components,

which are subject to magnetic

influences, care must be taken to

ensure that they are shielded

from the electromagnetic effects.

Another option would be keeping

critical products away from

Electric motors, permanent

magnets, coils and

electromagnetic fields.

Properties of materials

The properties of the materials

used in the equipment affects the

level of contamination. If the

wrong choice were made there

would be more particles emitted

and would greatly affect the

cleanroom.

Take note of the following points

when choosing the right material:

Know the emission of particles

from the material in use

– Constantly

– Sporadically

– Which size of particle, critical/

uncritical?

– Which combinations of

materials emit particles

– Know the life span of material

– Correlation between the wear

and tear of materials used and

tool life

Outgassing

When the equipment is under

extremes of temperature, there is

the likely occurrence of

"Outgassing" which is simply the

release of gases or volatile

substances from a material other

than a change of state of the

material.

Make sure that the emission

levels of volatile substances do

not exceed limits. They must not

be harmful to either the product

or the personnel working the

area. The materials chosen must

pass tests at extremes of

temperature.

Analysing ways of gripping

products

If you need to use a gripper in

the production, avoid gripping

in the same direction as the

direction of the first airflow.

Keep the product contact to a

minimum either by the

equipment or the operator.

If you grip either from the side

or from beneath the product,

the gripper does not affect the

airflow around the product and

the airflow obstruction caused

by the gripper is kept to a mini-

mum.

If the gripper can only be used

above the product, then keep

moving elements next to the

product and select the shape of

the gripper and its distance

away from the product in such

a way that stagnant areas do

not reach the product

Choice of materials / surface

finish

With regard to the choice of

materials, the following are

recommended:

– Use materials with low

electrostatic charge

properties

– Combination of materials:

plastic - metal: avoid

insulated partial systems

– Surfaces should be smooth

where possible, no sharp

edges

– Easier to clean, minimising

influence on airflow

– In semiconductor industry:

– No moving elements made of

copper of brass

– Better: special steel,

aluminium

Secondary measures and

alternatives

The following are some

additional guidelines, which

should be considered:

– Encapsulating components

– All moving parts enclosed

– Vacuum Suction

– Accurately aimed local

airflow direction

Unconventional sources of

contamination

In addition to dust and other

particles, surface

contamination can be any one

of the following – reaction

layers of chemical compounds,

absorbed

layers of mostly hydrocarbons

and moisture, or variable

composition contaminants due

to preferential diffusion of one

component through a

substrate.

ESD behavior of operating

materials

ESD stands for Electrostatic

Discharge. It is the rapid

transfer from static charged

bodies of materials to or from

Electrostatic Discharge

Sensitive Electronic Devices.

Virtually all electronic devices

are ESD sensitive; the

sensitivity is based on product

and design. ESD occurs when

charge is generated, stored on

an object and rapidly

transferred.

Materials become charged via:

– First air flowing onto them

– Friction from other materials

– Particles generated are not

removed by the first air flow

– Contamination adheres to

charged materials

– Formation of larger

agglomerates

– Sporadic, intermittent

detachment of very large

forms of contamination

ESD is harmful to the system

and must be removed.

Recommended ways of

removing of electrostatic

charges are:

Basic principles for designing cleanroom equipment

Information

General Information

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128 Cleanroom Product Range-subjected to change

Qualification tests are carried out

to assess the cleanroom

suitability of operating materials

that include equipment.

It is very important to note here

that “No operating material may

be allocated to a cleanroom

class”. It is therefore wrong to say

that “Our product has the

Cleanroom ISO Class 3”

The reasons are:

– Cleanroom classes were drawn

up only for the acceptance and

classification of cleanroom.

– Operating materials do not

fulfil these fundamental

conditions.

– Missing of specifications for

the classification of operating

materials.

– Correlation of cleanroom

classification / air volume

– Air volume

– Defined degree of

cleanliness per volume of air

– Procedures for classification

standards are related to

cleanroom

Moreover we could not just

transfer the cleanroom

classifications to operating

materials, because these are

standards based on degree of

cleanliness per volume of air and

not for qualifying equipment used

in the cleanroom.

It is important to note that the

Federal Standard and ISO

standard does not cover this

area. VDI 2083 Part 8 "Cleanroom

suitability of equipment", which

was developed just recently, is

the only guideline, which can be

used for the classification of

operating materials.

The procedure for carrying out

cleanroom suitability tests in

accordance with regulating

bodies for assessing air

cleanliness may be summarized

as follows:

– Specification of operating

parameters;

– Localization of particle

sources;

– Classification measurements;

– Statistical analysis;

– Classification of the operating

material

Measurement classification

The parameters required for the

classification measurements are

either prescribed or have been

ascertained from the

measurements taken beforehand:

– Typical operating conditions of

the operating material during

the measurement procedure;

– Measuring points on the

operating material;

– Positions of the OPC sampling

probe at the operating

material measuring points.

Statistical analysis

The suitability of an operating

material for a given cleanroom

class is determined using a

statistical method. For this, all

particle size ranges measured

must be taken into consideration.

In order to obtain significant data

for all the statistical observations

to be carried out, there must be a

random distribution of particles in

the air.

This guideline is applicable to

operating materials which are

introduced into a cleanroom.

The aim of this guideline is to

provide a standardized

procedure for qualifying or

comparing operating materials

with regards to their airborne

particle emission.

FESTO is applying this

guideline for the particle

emission tests it conducts on

all Festo cleanroom products.

Introduction of VDI2083 Part 8

Operating materials are often

responsible for contaminating

the production environment in

cleanroom. An operating mate-

rial does not process a cleanli-

ness class, rather only a suit-

ability for use in cleanroom

classes. This means that an

operating material may only be

assessed with respect to its use

in cleanroom with a defined

level of particle cleanliness of

the air.

The design, construction and

operation of an operating

material (geometry and

dynamics) should be selected

in such a way that airflow

patterns in the cleanroom

environment are affected as

little as possible. This can also

checked by performing airflow

visualization tests.

The standardized assessment

of airborne particle emission,

supported by a statistical

analysis of the results, should

enable a comparison and

assessment of operating

materials. This should lend

transparency to the

assessment of operating

materials concerning their

suitability for use in cleanroom.

Cleanroom suitability

Cleanroom suitability assesses

the suitability of an operating

material for use in cleanroom

which have been specified in

accordance with a regulating

body for assessing air

cleanliness. The classification

criterion in this instance is the

emission of particles from the

operating material.

Measurement technology

Only optical particle counters

(OPC) have been used in this

guideline for measuring

airborne particles. Further

information concerning the use,

handling and method of

function of OPC’s can be found

in the guidelines VDI 3489 Part

3 and VDI 2083 Part 3.

Procedure

The highest concentration of

particulate contamination

emitted from the operating

material into the system or

product space is measured.

The size distribution of

particles emitted from the

operating material being

assessed for its cleanroom

suitability may vary

considerably. As the

distribution characteristics of

each operating material are not

always known, it does not

suffice to investigate only one

range of particle size.

Therefore, at least three

representative particle size

ranges are to be selected.

These must be as distant from

one another as possible.

The concentration measured is

then compared with the limiting

values given by the regulating

body concerned with air

cleanliness and thus an

assessment made of suitability

for use in a specific air

cleanliness class defined by

that regulating body.

Qualifying equipment for cleanroom used

Information

General Information

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129 Cleanroom Product Range-subjected to change

One of the major sources of

contamination is operating

materials. Contamination caused

by operating materials can be

either:

– Chemical

– Physical

– Biological

– Radiological

– Ionic

Particle contamination falls under

the umbrella of physical

contamination. Particles is

caused by:

– When leakage from the

pneumatic components will

lead to particle contamination.

The air, which leaks, might

bring along particles with it.

– When operating materials

come into contact with one

another, there is bound to be

abrasion, make sure that the

abrasion is to a minimum as

particles are generated.

– When the pneumatic

components move from end to

end, there tend to be knocking

at the end position, this will

lead to minor vibration and

also cause particles to be

released.

The optical particle counter OPC

It is a microprocessor-based

instrument that detects airborne

particles, analyses and stores the

data in eight size classes, and

produces reports. It displays

real time data on a CRT and

contains a printer, which can be

used to produce hard copies of

reports.

During the airborne particle

emission measurements, the

operating parameters of the

optical particle counter are set

as follows:

Air volume : 1.0 cfm

Sampling time : 60 seconds

Delay time : 1 second

Measurement time : 5 minutes

The measurement time is 3

minutes, 1.0 ft³ and at maximum

airflow velocity of the MENV. The

measurement point used is the

center of MENV on operational

level of component.

The Climomaster is setup as

follows:

– Data sampling time : 60

seconds

– Data sampling interval : 1

second

– Number of sampling data : 1

– VTH measurement time : 3

minutes

Upon completion of the test, the

readings must be within the

parameters:

First airflow velocity :

0.45 ± 0.05 m/s

Temperature : 20.0 ± 2.0°C

Relative humidity : 55 ± 10%

Measuring the test

environment

In order to get correct particle

count results, the test

environment, in which the tests

are carried out should have

little or no influence on the

particle measurements. The

parameters, which influence

the particle count, are the

particle count in the:

– Environment

– Air velocity

– Degree of turbulence

– Relative humidity

The purpose of measuring the

test environment is to

determine whether the given

environment is suitable for

particle measurement.

Therefore, the ‘ground

contamination level’ of the test

environment has to be

measured for the cleanroom as

well as the Mini-environment

(MENV). The lower the "ground

contamination level", the more

accurate the particle

measurements will be.

Zero the count measurement

Before any test is done, a zero-

count measurement is made.

When doing a zero-count meas-

urement, it is a functional test.

For this test, a zero-filter is

attached to the OPC and the

counter takes measurement for

about 3 minutes. The reading

obtained should be zero. Then

the environment is ready for

use.

Base Measurement of Airborne

Particulate in MENV

Similar to the zero-count

measurement, which is used for

the OPC, the base

measurement is used for the

Mini-environment.

VTH Measurement

Three major environment

parameters:

– Air velocity (V)

– Air Temperature (T)

– Relative Humidity (H)

are measured in the cleanroom

and MENV to ensure the meet

the requirements. We obtain

these readings by using the

Kanomax Climomaster. This is a

precision measuring

instrument, which has velocity,

temperature and humidity

sensors.

Simultaneous measurements of

air velocity air temperature and

relative humidity can be

obtained with a single probe of

this instrument.

Measurement of airborne particle in cleanroom

Information

General Information

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130 Cleanroom Product Range-subjected to change

Information

General Information

The principle of measuring contamination level of pneumatic components

Introduction

Basically there are two different

measuring principles how to

assess the clean room suitability

of operating materials. One

principle is to localize the particle

source and to measure the

particle emission directly at its

source.

Another principle is to assess the

total particle emission, by

measuring the average particle

emission in the space

surrounding the operating

material.

The direct Measurement

Principle

Applying the direct measurement

the specimen is operated inside a

clean room or mini environment.

There should be laminar, vertical

air flow around the specimen.

While the specimen is operated

a particle counter with a

movable measurement probe is

used to screen the entire

product for sources of particles.

Subsequently, the particle

emission is measured for 100

minutes at every particle

source, which has been located

before, in order to establish the

particle emission behavior.

The major advantage of this

principle is that it can be

applied to operating equipment

of almost any size.

Furthermore, it provides some

information about the particle

distribution and concentration

around the operating material.

This measurement principle is

described in detail in the VDI

2083-8 guideline.

The average Measurement

Principle

Using the average

measurement principle, the

specimen is operated inside a

container. The container is then

supplied with a defined volume

of clean dry air.

Simultaneously, the particle

emission is measured inside

the container, by using an

optical particle counter. All air,

which does not flow through

the particle counter, is release

through an exhaust opening. In

order to get the measurement

results, the ration between the

exhaust air and the amount of

air flowing through the particle

counter has to be known.

The major disadvantages of

this method are that the result

largely depends on the

placement of the measurement

probe inside the container as

the particle emission is not

necessarily consistent.

This makes the measurement

principle also very unsuitable for

measuring larger operating

materials, as the particle

emission get more inconsistent

inside of larger containers.

The advantage of this method is

that it allows a direct comparison

among several test specimen.

Furthermore, it is a lot easier to

handle.

There is no guideline available

from any independent

organization, such as ISO, VDI,

DIN, FDA etc., describing this

measurement principle.

How does FESTO measure?

FESTO decided to apply the direct

measurement method, as this

measurement allows the user to

gain information about the

highest particle concentration

around the product. Furthermore,

this measurement method is

described in the VDI-2083-8

guideline, which gives FESTO the

possibility to have a neutral

reference for the measurements.

The Direct Measurement

Principle

The Average Measurement

Principle

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131 Cleanroom Product Range-subjected to change

Information

Festo Cleanroom project

The cleanroom project initiated

by Festo is a collaboration among

Fraunhofer Institute for

Manufacturing Engineering and

Automation in Germany, Nanyang

Polytechnic (NYP) of Singapore

and Festo Singapore.

The objective is to work together

in the field of particle emission of

Festo products.

Furthermore, it is Festo’s

intention to improve the

experience in the field of particle

measurements, contamination

control as well as cleanroom

applications in general.

Cleanroom environment

The cleanroom environment in

Nanyang Polytechnic is ISO

Class 6 cleanroom. The design

of this cleanroom is shown.

This is a cleanroom typical

layout.

This is a “ballroom” type

cleanroom with the area of

120 m2. The air flows in a

unidirectional way from a

ceiling of High Efficiency

Particular Air (HEPA) filters

down to the floor of the

cleanroom. The return air

passes through a return air

plenum in the Grey Room. The

Grey Room, which is located

just beside the cleanroom,

where it is used for service.

Festo cleanroom project - A collaboration among 3 parties

Floor

Return Air

Plenum

CleanroomGrey Room

Utility andEquipment

Chase

Supply Air from Fans

Window

PanelReturn

Air

Ceiling

HEPA

Floor

Return Air

Plenum

CleanroomGrey Room

Utility andEquipment

Chase

Supply Air from Fans

Window

PanelReturn

Air

Ceiling

HEPA

We’re doing the measurement

according the VDI 2083-8

guideline which is described on

page 82 and the following

pages. Fraunhofer Institute

approved this measurement

principle and attested this in a

‘Certificate of qualification’.

The certification covers: The

support for the performance of

testing the cleanroom suitabil-

ity of pneumatic components of

the company Festo AG & Co.

Festo’s cooperation with

Fraunhofer of Germany and

Nanyang Polytechnic of

Singapore

The cleanroom environment in

Nanyang Polytechnic of

Singapore

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132 Cleanroom Product Range-subjected to change

Mini-environment (MENV)

A Class 1 clean Mini-Environment

(MENV) is used within a clean-

room to provide the high level of

protection to products against

contamination and ESD events.

The specification of MENV is

shown. This MENV is a cleanroom

test cabinet with one clear

antistatic front panel and three

side panels. The dimension of

MENV is 1.2m x 0.6m internal

area and with 2.2m height. In

order to achieve high cleanliness

class, Ultra Low Penetration Air

(ULPA) Fan Filter Unit (99.9995%

efficiency on 0.12 micron) is

installed on the ceiling of the

MENV. The unidirectional supply

of air flows vertically from the Fan

Filter Unit (FFU), and the air

velocity can be adjusted up from

0.2 m/s to 0.6 m/s.

Optical Particle Counter

The LASAIR 210 OPC is used to

detect the concentration of

particles. The flow volume of this

counter is 1.0 CFM (cubic foot per

minute) or 28.3 liters per minute.

The counter is able to detect

particle size from 0.2 µm to 5.0

µm. The particle counter has

eight channels.

The setting of OPC is:

– Data Sampling Time: 60

seconds

– Data Sampling Interval: 1

second

– Measurement Time: 120

minutes

Flow Meter

The flow meter – Model 6521

Climomaster is used to measure

the airflow parameters.

Simultaneous measurements of

air velocity, air temperature and

relative humidity can be obtained

with a single probe of this

precision instrument.

The setting of flow meter is

– Data Sampling Time: 60

seconds

– Data Sampling Interval: 1

second

– Number of Sampling Data: 1

– Measurement Time: 3 minutes

Test procedure of Festo cleanroom components

Information

Festo Cleanroom project

Summary specification of MENV

Vertical Laminar

Flow

1200 x 600 mm

ISO Class 3

0 … 0.6 m/s

infinitely

adjustable

800 … 1000 lux

Aluminium

Clear Front

Cover

230 V, single

phase 50 Hz

Design:

Internal

Dimensions:

Cleanliness:

Air Velocity:

Light

Intensity:

Main Body:

Front Design:

Power Supply:

In accordance with the US FED-

STD-209E, a cleanroom is

classified to be of Class 1 if only

one particle of the size of 0.5

µm or larger can be found in a

reference volume of one cubic

foot of the first air (filtered air

supplied).

In accordance with the ISO

14644-1, a cleanroom is

classified to be of Class 3 if only

35 particles of the size of 0.5

µm or larger can be found in a

reference volume of one cubic

meter of the first air (filtered air

supplied).

There is no tabletop installed in

the mini environment. Instead a

removable clean room trolley

with perforated tabletop is

used. The height of the trolley/

table is approx. 1.10 m

Measuring Instrument

The two most important test

instruments for the particle

measurements are Optical

Particle Counter (OPC) and Flow

Meter.

A LASAIR 210 Optical Particle

Counter, manufactured by

Particle Measuring Systems

Incorporation, and Model 6521

Climomaster (airflow, relative

humidity and temperature

measurement), manufactured

by KANOMAX Japan incorpora-

tion, are used in the particle

measurements.

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133 Cleanroom Product Range-subjected to change

Testing of Festo cleanroom

pneumatic product range

The VDI-2083-8 guideline

describes, how particle

measurements have to be carried

out, in order to establish the

particle emission of individual

equipment. If a whole range of

equipment is to be tested, it

becomes viable to define,

whether all types and sizes of the

equipment has to be tested or

whether it would be sufficient to

test a defined share and to apply

the results to the remaining

products. Such a procedure

becomes especially important if

extensive product ranges are

involved.

To achieve the above mentioned,

this guideline has been

developed. The guideline is

based on the measurement

procedures applied by F-SG. This

guideline is not a FESTO

Standard.

Subject of test

FESTO products, which are part of

the clean room product range. It

does not apply to the testing of

standard product or special

applications.

Specimen Selection

The number of specimen to be

tested is determined by the size

and the number of products in

one product range. In every

product range, the smallest and

the largest type is tested. The

terms small and large are defined

as follows:

– For cylinders, slide units, shock

absorbers and grippers, small

and large are defined by the

piston diameter.

– For valves and filters, service

units, small and large are

defined by the flow rate.

– For tubes and fittings, small

and large are defined by the

tube diameter.

Furthermore, at least, 25% of

all products within one product

range have to be tested.

Each test is conducted with a

number of two identical

specimens.

Definition of a Product Range

The selection of test samples

does apply only, if the product

design is consistently the

same, throughout a product

range. This is defined as

follows:

– The working principle of all

products within the product

range is identical.

– All materials of all products

within the product range are

identical, including all

lubricants.

– The geometry of all products

within the product range is

identical, especially the

geometry of all seals.

– The working pressure of all

products within the product

range is the same.

If not all products of a product

range fulfill the above-

mentioned requirement, all

products of that particular

product range have to be

tested.

Test procedure of Festo cleanroom components

Information

Festo Cleanroom project

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134 Cleanroom Product Range-subjected to change

Test procedure of Festo cleanroom components

Information

Festo Cleanroom project

Step 2: Testing of instrument

It is also important to note that

each time before the tests are

made the required zero count

measurement, base

measurement and VTH

measurement are carried out as

follows:

– OPC airflow

– OPC laser-reference

– OPC zero-particle-count

(measurement time: 3

minutes, with zero-filter

attached)

– MENV air flow velocity

(maximum power of FFU)

– Relative humidity

(measurement time: 1

minute with measurement

intervals of 1 second)

– Airflow-velocity

(measurement time: 1

minute with measurement

intervals of 1 second)

– Temperature (measurement

time: 1 minute with

measurement intervals of 1

second)

– Base measurements of

MENV, airborne particulate

contamination

(measurement time 3

minutes, 1.0 cft, at maximum

air flow velocity of MENV,

measurement point in the

center of MENV on

operational level of

component)

Standard operation procedure

(SOP) are done before actual

commencement of the test. These

procedure are standard

regardless of the type of test

specimen.

Step 1: Inward transfer of test

samples

Before any test is done, the

components need to be prepared.

The preparation for the

cleanroom suitability assessment

involves the cleaning of these

components according to the

Festo-SG guidelines "Operating

Conditions for Cleanroom Tests".

The cleaning sequence is outlined

below:

– Decontamination of test

samples (inner and outer parts)

with Isopropanol saturated

wipers and ultrapure

compressed dry air.

Sequence:

– Pre-cleaning by blowing

component surface with

ultra-pure compressed dry

air.

– Cleaning of component

surface using pre-saturated

wipers containing a blend of

Isopropyl alcohol.

– Final cleaning by blowing

component surface with

ultra-pure compressed dry

air.

– Bringing the test samples into

the CR-environment and MENV

– Arranging the test samples

(with gloves, intermediate

decontamination, cleaning)

Step 5: Classification

measurements

During the test, the airborne

particle generated by the

component is measured using a

discrete particle counter (DPC).

– Particle size is ≥ 0.2 mm, ≥ 0.7

mm, ≥ 1.0 mm, ≥ 2.0 mm, ≥ 3.0

mm, and ≥ 5.0 mm are

selected.

– Measurement time:

– standard-classification: 100

minutes (according to VDI

2083 part 8) at the

measurement points that

were found during the

Localization measurements

– lifecycle-test: several days,

up to months

– Documentation of

measurements points (sketch

or photograph)

Step 6: Statistical evaluation

Evaluation according to guideline

VDI 2083 part 8

Step 7: Visual inspection

Visual inspection of tested

components (e.g. wear and tear,

deposition of lubricants and

particles, product failure…)

Step 8: Classification

Classification of test specimen

according to statistical evaluation

and visual inspection (see

guideline VDI 2083 part 8)

Step 3: Adjustment of the

operating parameters for the

test sample

After mounting the component

on a test support fixture, it is

ready for the test.

– Adjustment of operating

parameters e.g. cushioning

on actuator, speed of

actuator

– Statement about performed

duty cycles at the time of

testing

– Documentation of

adjustment (sketch or

photograph)

Step 4: Localization

measurements

Determination of points of

highest concentrations of

particle emission (according to

VDI 2083 part 8)

– Coarse localization

measurement

– Localization measurement

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135 Cleanroom Product Range-subjected to change

– Description of measurement

points

– Sketches or photographs

– References to applied

standards and guidelines

– Documentation

– Particle concentration at

measurement points

– Graphical visualization of

particle emission

– Interpretation of results and

conclusion

– Classification related to

applied standards/

guidelines

– General Assessment

Potential for optimization

Operating condition for testing

Festo components in

cleanroom

Operating Conditions are

defined by Festo-SG

individually for different Festo

products. The guidelines for

product range, cylinders, rotary

actuators, valves, grippers and

service units are listed in page

88 and 89.

Preparing compressed air for

testing Festo components in

cleanroom

– Compressor

– Air storage

– Refrigeration dryer

– Prefilter regulator of 40 µm

– Fine filter 1 µm

– Micro filter 0.1 µm

Test procedure of Festo cleanroom components

Information

Festo Cleanroom project

Testing of DSNU-…-RR-SA cylinder

Testing of ADVU-…-RR-SA cylinder

Testing of CDN-…-RR-SA cylinder

Step 9: Documentation

Complete documentation

should contain the following

information

– Title, Date , Place of test

– Person responsible

– Test environment

– Operating Parameters

– Temperature

– Relative humidity

– Air flow velocity

– Particulate concentration

in test environment

– Measurement technology

– Type

– Model

– Detection limits

– Air flow

– Description of sample

technique

– Sample Characteristics

– Type

– Supplier

– Serial Number

– Component description

– Operating parameters of

components

– Break-in load

– Running-in time

– Mounting position

– Operating frequency

– Attached load

– Supply (air- power supply

etc.)

Air 40 µm 1µm 0.1 µm

1 2

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136 Cleanroom Product Range-subjected to change

Operating conditions for

Cleanroom tests - Cylinders

Pneumatic linear actuators:

– Single- and double-acting

cylinders with and without

piston rods

– Guide and slide units

Each test is conducted with a

number of two identical

specimens. The supply air should

be clean dry air. This clean dry air

is filtered with micro-filter which

eliminates 99.9999% of particles

bigger than 0.01 mm. The

operating pressure for all

samples is 6.0 ± 0.3 bar or

maximum pressure, for specimen,

whose operating pressure is less

than 6.0 bar. The ambient

temperature should be 20 ± 2 °C.

The medium temperature should

not exceed 30 °C. The max.

speed is defined as 0.2 m/s for all

kinds of cylinders. The speed is

adjusted by means of one-way

flow control valves, installed as

close as possible to the cylinder

ports. The adjustment is done in a

way, that the piston safely

reaches its end-position.

Tables below shows: A pulse/

interval ratio of 1:1 should be

used for all frequencies. On the

condition of the max. speed

0.2m/s, the different frequencies

are defined due to different

piston diameter., they are shown

as following table. The

frequencies can be adjusted by

changing PLC programming.

Whenever possible compression

fittings with sealing rings in

combination with polyurethane

tubes should be used for the for

the air supply. This is to ensure

minimum leakage.

For all cylinders with piston rod

the mounting position is defined

as horizontal, with the supply

ports on the bottom of the

sample, except for DGPL cylinder

and slide units. For the latter the

port orientation is determined by

the product design. Cylinders

without piston rod are tested in

horizontal and vertical mounting

positions. If possible, standard

mounting-accessories should be

used. To minimize turbulence, the

mounting accessories should

disturb the airflow as little as

possible.

Prior to every measurement the

supply pressure must be

checked. The pressure should be

6.0 +/- 0.3 bar.

Acoustic/visual/tactile check

under test conditions to see that

test specimens are operating

correctly and that there is not

sticking, jamming, stopping short

of end positions, jerky motion,

bottoming-out of cushioning or

leaks which can be felt or heard.

As any leakage leads to high

emission of particles, there

should be no detectable leakage.

If there is any leakage detected,

the test should be aborted.

As the amount of particles,

emitted by a cylinder, is not

constant throughout its service

life, particle measurements have

to be undertaken at different

stages of the service life.

Particle measurement should be

carried out after 20,000 duty

cycles have been completed

In the case of cylinders with

protection against torsion,

testing should be carried out

using 20% of the maximum

moment.

Suction rate at vacuum port

Conditions at which Festo cleanroom components are tested

Information

Festo Cleanroom project

The end position cushioning

should be adjusted in such a

way that there is no hard

metallic impact in the end

positions and the piston does

not rebound.

For test sample of cylinders, the

following stroke lengths are

chosen for the various piston

rods as:

Cleanroom test of cylinders

should be carried out under

different load conditions.

However, because of short of

time, cylinders are only tested

under the condition of

horizontally mounted with a

load.

Table below shows: Load

parameters for piston-rod

cylinders without guide or

protection against torsion.

Type Piston diameter [mm]

Frequency [Hz]

6 to 8 2

10 to 20 1.5

25 to 50 1.0

63 to 100 0.3

Rodless cylinders

8 to 100 0.5

Piston rod cylinder

Piston diameter [mm]

Stroke length *[mm]

6 to 8 20 or max. stroke

10 to 20 50 or max. stroke

25 to 32 100 or max. stroke

40 to 50 200 or max. stroke

63 to 100 300 or max. stroke

Ø [mm] Additional Mass [kg] (3% theoretical effective

force)

Moment due to additional load [Nm]

M = m x g x s

6 0.057 0.0168

8 0.091 0.0357

10 0.145 0.0711

12 0.225 0.1324

16 0.360 0.2825

20 0.570 0.5592

25 0.910 1.1159

32 1.450 2.2759

40 2.225 4.4145

50 3.600 8.8290

63 5.700 16.7751

80 9.100 26.7813

100 14.500 42.6735

Piston Diameter [mm]

Additional Mass [kg] (20% theor. effective force)

8 0.570

10 0.910

12 1.450

16 2.250

20 3.600

25 5.700

32 9.100

40 14.500

50 22.500

63 36.000

80 36.000

100 36.000

Ø [mm] Min. vacuum flowrate [l/min]

Recommend Vacuum generator [Type]

12...25 23 VN-07-L-…

32...50 35 VN-07-L-…

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137 Cleanroom Product Range-subjected to change

Conditions at which Festo cleanroom components are tested

Information

Festo Cleanroom project

Operating conditions for

cleanroom tests - Valves

Pneumatic digital switching

valves as follows:

– Mechanically-actuated/

manually-operated digital

switching valves

– Pneumatically-actuated digital

switching valves

– Solenoid-actuated digital

switching valves

Each test is conducted with a

number of two identical

specimens. The supply air should

be clean dry air. This clean dry air

is filtered with micro-filter which

eliminates 99.9999% of particles

bigger than 0.01 µm. The

operating pressure for all

samples is 6.0 +/- 0.3 bar or

maximum pressure, for specimen,

whose operating pressure is less

than 6.0 bar. The ambient

temperature should be 20 +/- 2

degree Celsius. The medium

temperature should not exceed

30 degree Celsius.

Table shows: A pulse/interval

ratio of 1:1 should be used for all

frequencies. The additional

volumes should be connected to

the outputs of the test specimens

via pieces of tubing and

appropriate fittings.

The ambient temperature should

be 20 ± 2 °C. The medium

temperature should not exceed

30 °C. A minimum flow rate of 125

l/min is necessary for correct

operation. However, flow meas-

urement devices such as flow

sensors or flowmeters are need to

ensure this minimum flow rate.

The switch frequency for on-off

valves are 2 Hz. The mounting

position for is vertical ±5°. The

operating voltage for solenoid

actuated on-off valve is set as 24

± 10% V DC. For manual conden-

sate drain, plastic tubing is con-

nected to the barb fitting. This is

to ensure minimum leakage.

Prior to every measurement the

supply pressure must bechecked.

The pressure should be 7.0 ± 0.3

bar. Acoustic/visual/tactile check

under test conditions to see that

test specimens are operating

correctly. As any leakage leads to

high emission of particles, there

should be no detectable leakage.

If there is any leakage detected,

the test should be aborted.

Although, it should be avoided

that any medium such as air or

lubricant is leaking out of the

pneumatic system, it cannot be

entirely avoided if pneumatic

actuators are applied. In order to

minimize harmful contamination,

the medium, mostly compressed

air or nitrogen, should be dried

and filtered accordance to ISO

8573-1, Class 1.

Compressed Air Quality Standard:

ISO8573-1

Ensure that the tubing connect

does not increase the size of

the additional volume by more

than 20%. Tube size of supply

line with maximum length of

100 cm.

Whenever possible

compression or barbed fittings

in combination with

polyurethane tubes should be

used for the for the air supply.

This is to ensure minimum

leakage. For those valves that

barbed fittings are not

available, push-in fittings are

used in the test.

Acoustic/visual/tactile check

under test conditions to see

that test specimens (and pilot

valves) are operating correctly

and that there is no failure to

switch, sticking, incomplete

venting of outputs or leaks

which can be felt or heard. Any

departures from normal

operation should be

documented.

As any leakage leads to high

emission of particles, there

should be no detectable

leakage. If there is any leakage

detected, the test should be

aborted.

Operating conditions for

cleanroom tests - Air

preparation units

– Filter

– Filters

– Fine and micro filters

– Pressure regulators

– Manual on-off valve

– Solenoid actuated on-off

valve

– Soft start valves

The specifications of test

specimens are as:

– Pressure range: 0 to 7 bar

– Degree of filtration: refer to

filter type filter or micro-filter

connected

– Filter type LF or LFMA/B with

connector plates are used

– Pressure gauge connections

– Manual condensate drain

The supply air should be clean

dry air. This clean dry air is

filtered with micro-filter which

eliminates 99.9999% of

particles bigger than 0.01 mm.

The compressed air regulator is

connected with micro-filter to

adjust the pressure. The

working pressure during the

test is 7 bar. The air

preparation unites are

measured under the following

conditions:

– Primary pressure (input

pressure) p1=7 bar

– The controlled pressure

(output pressure) p2= 6 bar

– Pressure drop ∆p=1 bar Valve port size Switching frequency [Hz]

Additional volume [ml]

Inner diameter of tube [mm]

M3 3 2 3

M5 3 10 3-4

M7 3 10 4-6

1/8” 3 10 4-6

1/4” 3 25 4-6

3/8” 2 25 6-9

1/2” 2 50 6-9

3/4” 1 100 13

1 1 400 13

Class Dust Oil

[um] [mg/m³] [DTP] [g/m³] [mg/m³]

1 0.1 0.1 -70 0.003 0.01

2 1 1 -40 0.12 0.1

3 5 5 -20 0.88 1

4 15 8 +3 6.0 5

5 40 10 +7 7.8 25

6 - - +10 9.4 -

7 - - - - -

Water

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138 Cleanroom Product Range-subjected to change

In all automation processes,

pneumatics plays an important

role. This is the same for

cleanroom, pneumatics are

used in cleanroom for the

following reasons:

– Automation of production se-

quence with pneumatics

– Lower space requirements with

pneumatics

– Lower levels of contamination

with pneumatics

– Laminar flow virtually unim-

paired by pneumatics

Benefits

– Avoidance or reduction of

particle emissions both with

stationary components and in

an operating sequences

– Minimization of disturbance

factors affecting laminar flow

– Counter measures against pos-

sible environmental influences

(e.g. acids, aggressive media)

Difference in comparison

with standard products

The following list is the difference

between the standard products

and those used in cleanroom.

– Generally suitable for

unlubricated operation

– Cleanroom compatible grease

used when necessary

– Cleanroom compatible

markings

– Ducted exhaust ports and

connections for air breather

ports

– Extraction by means of vacuum

where necessary

Production sequence of Festo

cleanroom product range

Basically, the manufacturing of

clean room pneumatics is not any

different from the design of any

other pneumatic component. It is

just, that special care is taken, to

avoid any kind of contamination

caused by the product.

Design office

Firstly the design of a standard

product is modified with a view to

cleanroom compatibility.

Assembly

All products are assembled

outside the cleanroom, according

to the standard assembly

procedures. In very special cases,

cleanroom grease is applied

instead of the standard lubricant.

Testing

Just as any standard product,

cleanroom products are tested,

concerning their functionality.

There is no particle emission test

conducted for every product.

Cleaning

Before packing all products are

cleaned under cleanroom

condition of ISO Class 7. The

cleaning is done either by means

of an ultrasonic bath or with

isopropanol wipers.

Packaging

Packaging is done in antistatic

plastic bags. Whereby each

product is double packed and

sealed. Just as the cleaning, the

packaging takes place under

cleanroom condition of ISO Class

7. When the product is ready for

shipment, it is transferred out of

the cleanroom through an airlock.

Basic principle of Festo

cleanroom product range

It is known that there isn’t

a standard or guideline for

cleanroom product design

available. In order to develop

products for cleanroom

application, we mainly base on

the principle of “avoiding

cleanroom contamination by

preventing particles generated

from the components”.

This principle includes the

following three aspects:

– Non-contaminant release

very low leakage construc-

tion

– Non-contaminant generation

special material, surface

treatment and special lubri-

cation specification

– Non-contaminant in produc-

tion processes – component

cleaning and double bag

packaging

The above three aspects can be

achieved for cleanroom com-

patibility by modifying our stan-

dard products to cleanroom

products with some special

features. The general principle

is to design an additional vac-

uum suction port so that air

leakage during operation can

be sucked back and extracted

by vacuum.

Non contaminants releasing:

Drives

– Air leakage from the piston

rod is sucked back and

extracted by vacuum via a

additional vacuum suction

port on the front cap or

barrel (housing)

– Leak-free design principle

Valves

– Exhaust air from both main

valve and pilot valve are

released via common ex-

haust ports

– Breather air from underside

of piston is removed via

exhaust ports

– Leak-free design principle

Air preparation unit

– Regulator: vent air in the

bonnet is sucked through a

vacuum connection on an

additional ring

– Air filter: drain is discharged

from cleanroom via drain

guide port

Grippers

– Air leakage is extracted via

vacuum suction port

Vacuum and other components

– Exhaust air is ported to the

outside of cleanroom

– Shock absorber: replace-

ment of a new housing with a

vacuum port

– Fittings & tubing: air leakage

is minimized by using the

barbed fittings

Non contaminant generating

Piston rod is made of corrosion

resistant steel

Non contaminant in production

process

– Cleaning individual compo-

nents by ultrasonic cleaning

bath

– All components are cleaned

and assembled in a

cleanroom

– Functional test in a

cleanroom

– Double-packed in plastic

bags in a cleanroom

Benefits of using Festo cleanroom components

Information

Festo Cleanroom project

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139 Cleanroom Product Range-subjected to change

Festo Worldwide

Sales and Service Network—International

Festo Worldwide

Algeria

Argentina

Australia

Austria

Bahrain

Bangladesh

Belarus

Belgium

Bolivia

Brasilia

Bulgaria

Canada

Chile

China

Columbia

Costa Rica

Croatia

Cyprus

Czech Republic

Denmark

Dominican Republic

Ecuador

Egypt

El Salvador

Estonia

Finland

France

Germany

Great Britain

Greece

Guatemala

Honduras

Hong Kong

Hungary

Iceland

India

Indonesia

Iran

Ireland

Israel

Ivory Coast

Italy

Japan

Jordan

Kenya

Kuwait

Latvia

Lebanon

Lithuania

Malaysia

Malta

Morocco

Mexico

Myanmar

Netherlands

New Zealand

Nicaragua

Nigeria

Norway

Oman

Pakistan

Paraguay

Peru

Philippines

Poland

Portugal

Republic Korea

Romania

Russia

Saudi Arabia

Singapore

Slovakia

Slovenia

South Africa

Spain

Sri Lanka

Sweden

Switzerland

Syria

Taiwan

Thailand

Tunisia

Turkey

Ukraine

United Arab Emirates

United States of America

Uruguay

Venezuela

Viet Nam

Yugoslavia

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140 Cleanroom Product Range-subjected to change

Festo Worldwide

The Company

Festo Group:

Year of foundation:

Name of company:

Board of Directors:

Supervisory Board:

Number of employees (Festo Group):

Trainees (in Germany):

Locations in Germany:

Number of Festo companies:

Number of agencies:

Service world-wide:

R&D investment as % of turnover:

Quality certificates held by Festo AG & Co.:

Environmental certificates held by Festo AG & Co.:

Quality and environmental certificates:

Festo customers:

Festo AG & Co.

Festo Didactic GmbH & Co.

Beck IPC GmbH

FCC GmbH Marketing, Werbung, Messen

Festo AG & Co.

1925

Festo AG & Co.

Personally responsible shareholder:

Festo Aktiengesellschaft

Dr. Wilfried Stoll (Chairman)

Dr. Ekkehard Gericke

Dipl.-Ing. Rudi Menrad

Dr. Thomas Rubbe

Dr. Eberhard Veit

Dr. Ulrich Walker

Dr. h.c. Kurt Stoll (Chairman)

Dr. Mark Binz

Dipl.-Kfm. Manfred Kalmbach

10,050 world-wide

6.2 % of workforce (in Germany)

Festo HQ in Esslingen Berkheim:

Festo AG & Co.

Postfach

73726 Esslingen

Ruiter Straße 82

73734 Esslingen

Customer Service Center, St. Ingbert-Rohrbach

Cylinder production works, St. Ingbert-Rohrbach

Festo Saar Learning Center, St. Ingbert-Rohrbach

54 independent Festo companies with over 250 branch offices

Authorised Festo agencies in a further 36 countries

In 176 countries

6,5 %

DQS certificate as per DIN ISO 9001 since 1990

DQS certificate as per VDA 6.1 since 1999

DQS certificate as per VDA 6.4 since 2000

Best Factory Award 1997

Eco certificate as per EMAS since 1996

Eco certificate as per ISO 14001 since 2000

41 companies world-wide certified as per ISO 9001/9002.

held by Festo companies One company certified as per ISO 14001.

Over 300,000 in 176 countries

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141 Cleanroom Product Range-subjected to change

Festo Worldwide

The History

History – An overview of Festo’s milestones 1956 Festo S.p.A. Milano, Italy Festo AG Zürich, Switzerland 1958 Festo S.A.R.L. Sarreguemines, France 1959 Festo Maschinenfabrik Ges.m.b.H. Vienna, Austria 1963 Festo Elgi Private Ltd. Coimbatore, India 1964 Festo AB Malmö, Sweden Festo Pneumatic Belgium S.P.R.L., Brussels, Belgium 1966 Festo Pty. Ltd. Melbourne, Australia 1967 Festo Pneumatic Holland B.V., Delfgauw, Netherlands 1968 Festo Ltd. Fleet, Great Britain Festo Ltd. Northhampton, Great Britain Festo Maquinas e Equipamentos Pneumaticos Ltda., Santo André, Brazil 1970 Festo Pneumatic ApS, Copenhagen, Denmark 1971 Festo Pneumatic S.A., Barcelona, Spain 1972 Festo Corporation, Hauppauge , USA 1973 Festo Ltd., Johannesburg, South Africa 1974 Festo Pneumatic S.A., Edo. De México, Mexico 1975 Festo Pneumatic S.K., Teheran, Iran 1976 Festo Pneumatic Ltd., Kowloon, Hong Kong 1977 Festo Inc., Toronto, Canada Festo Pneumatic S.A., Buenos Aires, Argentina Festo OY AB, Helsinki, Finland 1978 Festo Inc., Manila, Philippines 1979 Festo Pneumatic Sdn. Bhd., Kuala Lumpur, Malaysia Festo Co. Ltd., Taipei, Taiwan

1980 Festo Korea Co. Ltd., Seoul, Korea Festo Pte. Ltd., Singapore 1983 Festo Kft., Budapest, Hungary 1986 Festo Controls Pvt. Ltd., Bangalore, India Festo K.K., Yokohama, Japan Festo Autoamação, São Paulo, Brazil Festo Machinex (ab 1993 Festo Bulgaria EOOD), Sofia, Bulgaria 1987 Festo Ltd., Athens, Greece 1988 Festo RF 000, Moscow, Russia Festo Pnevmoavtomatic, Simferopol, Ukraine 1989 Festo Ltda., Bogotá, Colombia Festo Sp.z o.o., Warsaw, Poland Festo San. ve Tic. A.S., Istanbul, Turkey Festo PT, Jakarta, Indonesia 1990 Festo spol.sr.o., Prag, Chechnya Festo S.R.L., Bucharest, Romania 1991 Festo Ltd., Dublin, Ireland Festo Ltd. Auckland, New Zealand Festo Ukraina, Kiew, Ukraine Festo d.o.o., Zagreb, Croatia 1992 Festo Ltd., Bangkok, Thailand Festo d.o.o., Ljubljana, Slovenia 1993 Festo Bulgaria EOOD (bis 1993 Festo Machinex), Sofia, Bulgaria Festo UAB, Kaunas, Lithuania Festo Ltd., Shanghai, China 1994 Festo spol. s r.o., Bratislava, Slovakia 1995 Festo C.A., Maracaibo, Venezuela 1996 Festo OY AB Eesti Filiaal, Tallinn, Estonia 1997 Festo SIA, Riga, Latvia 2001 Festo Chile, Santiago, Chile 2004 Festo S.R.L., Lima, Peru 2005 Festo Israel Ltd, Yehud, Israel

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Festo worldwide

Argentina Festo S.A. Edison 2392 RA-1640 Martinez Pcia. de Buenos Aires Tel. ++54 (0)11/47 17 82 14, Fax 47 17 82 15 E-mail: [email protected] Australia Festo Pty. Ltd. P.O. Box 261 179-187 Browns Road Noble Park North VIC. 3174 Tel. ++61 (0)3/97 95 95 55, Fax 97 95 97 87 E-mail: [email protected] Austria Festo Gesellschaft m.b.H. Lutzowgasse 14 A-1141 Wien Tel. ++43 (0)1/91 07 50, Fax 91 07 52 50 E-mail: [email protected] Belgium Festo Belgium nv/sa Rue Colonel Bourgstraat 101 B-Brussel 1030 Bruxelles Tel. ++32 (0)2/702 32 11 Fax 726 90 11 E-mail: [email protected] Brazil Festo Automacao Ltda. Rua Giuseppe Crespi, 76 Jardim Santa Emilia BR-04183-080 Sao Paulo-SP Tel. ++55 (0)11/69 69 95 00, Fax 69 47 73 11 E-mail: [email protected] Bulgaria Festo Bulgaria EOOD Tintjava 15-17 BG-1113 Sofia Tel. ++359 (0)2/962 53 06, Fax 962 52 36 E-mail: [email protected] Canada Festo Inc. 5300 Explorer Drive CON-Mississauga, Ontario L4W 5G4 Tel. ++1(0)905/624 90 00, Fax 624 90 01 E-mail: [email protected] Chile Festo Chile Mapocho 1901 6500151 Santiago Tel. ++56 (0)2/6 98 46 55, Fax 6 97 07 96 China Festo (China) Ltd. 1156 Yunqiao Road Jinqiao Export Processing Zone 201206 Pudong, Shanghai, PRC Tel. ++86 (0)21/58 54 90 01, Fax 58 54 03 00 E-mail: [email protected] Colombia Festo Ltda. Avenida Eldorado No. 98-43 CO-Santafe de Bogota D.C. Tel. ++57 (0)1/413 00 88, Fax 415 30 51 Croatia Festo d.o.o. Nova Cesta 181 HR-10 000 Zagreb Tel. ++385 (0)1/619 19 69, Fax 619 18 18 E-mail: [email protected] Czech Republic Festo spol. s r.o. Pod Belarii 784 C2-143 00 Praha 4-Modrany Tel. ++420 (0)2/61 09 96 11, Fax 61 09 36 34 E-mail: [email protected] Denmark Festo A/S Islevdalvej 180 DK-2610 Rødovre Tel.++4570211090 Fax 88 8110 E-mail: [email protected]

Singapore Festo Pte. Ltd. 6 Kian Teck Way SGP-Singapore 628 754 Tel. ++65 (0)6264 01 52, Fax 6261 10 26 E-mail: [email protected] Slovakia Festo spol. sr. o. Gavlovicova ul.l SK-83103 Bratislava Tel. ++421 (0)7/44 25 02 68. Fax 44 45 38 76 E-mail: [email protected] Slovenia Festo d.o.o. Ljubljana IC Trzin, Blatnica 8 SLO-1236 Trzin Tel. ++386 (0)1/530 21 00, Fax 530 21 25 E-mail: [email protected] South Africa Festo (Pty.) Ltd. 22-26 Electron Ave. ZA-lsando 1600 Tel. ++27 (0)11/971 55 00, Fax 974 21 57 E-mail; [email protected] Spain Festo Pneumatic, S.A. Avda.de la Gran Via, 159 (Poligono Gran Via Sur) E-08908 Hospitalet de Llobregat-Barcelona Tel. ++34 (9)3/261 64 00, Fax 261 64 20 E-mail: [email protected] Sweden Festo AB Stillmansgatan 1 S-20021 Malmo Tel. ++46 (0)40/38 38 00, Fax 18 97 68 E-mail: [email protected] Switzerland Festo AG Moosmattstrasse 24 CH-8953 Dietikon/Zurich Tel. ++41 (0)1/744 55 44, Fax 744 55 00 E-mail: [email protected] Taiwan Festo Co.. Ltd. 9, Kung 8th Road Linkou 2nd Industrial Zone, 244 Taipei Hsien, Taiwan, ROC Tel. ++886 (0)2/2601 92 81, Fax 2601 92 87 E-mail: [email protected] Thailand Festo Ltd. 67/1 Phaholyothin Road. Moo 6, Klong 1, Amphur Klong Luang Pathumthani 12120. Thailand Tel. ++66 (0)2/901 88 00, Fax 901 88 33 E-mail: [email protected] Turkey Festo San. ve Tic. A.S. Fahrettin Kerim Gokay Cad. No. 281, Ozcelik han - Sahray cedid TR-81080 Kadikoy/lstanbul Tel. ++90 (0)216/411 44 66, Fax 411 44 74 E-mail: [email protected] Ukraine Festo Ukraina ul. Borissoglebskaja, 11 UA-254070 Kiev Tel. ++380 (0)44/239 24 34, Fax 463 70 96 E-mail: [email protected] USA Festo Corporation 395 Moreland Road USA-Hauppauge, N.Y. 11788 Tel. ++1 (0)631/435 08 00. Fax 435 80 26 E-mail: [email protected] Venezuela Festo C.A. Av. 23, Esquina calle 71, No. 22 - 62 Maracaibo. Edo. Zulia Tel. ++58 (0)261/7 59 09 44 , Fax 7 59 04 55 E-mail: [email protected]

Estonia Festo OY AB Eesti Fillaal Turi 10 EE-11313 Tallinn Tel. ++372(0)6/5016 40, Fax 55 81 26 E-mail: [email protected] Finland Festo OY Makituvantie 9 FIN-01511 Vantaa Tel. ++358 (0)9/87 06 51, Fax 87 06 52 00 E-mail: [email protected] France Festo E.U.R.L. 5, rue Montgolfier F-93116 Rosny-sous-Bois Cedex Tel. ++33 (0)1/49 35 23 23, Fax 49 35 23 33 E-mail: [email protected] Germany Festo AG & Co. Postfach D-73726 Esslingen Ruiter Strasse 82 D-73734 Esslingen Tel. ++49 (0)711/347-0, Fax 347-2144 E-mail: [email protected] Great Britain Festo Limited Automation House Harvest Crescent, Ancells Business Park GB-Fleet, Hampshire 6U13 8XP Tel. ++44 (0)12 52/77 50 00, Fax 77 50 01 E-mail: [email protected] Greece Festo Ltd. 40 Homosternas Av. GR-11853 Athens Tel. ++30 (0)1/34 12 90 04, Fax 341 29 05 E-mail: [email protected] Hong Kong Festo Ltd. Unit C&D, 7/F, Leroy Plaza, 15 Cheung Shun Street. Cheung Sha Wan, Kowloon, Hong Kong Tel. ++852/ 27 43 83 79. Fax 27 86 21 73 E-mail: [email protected] Hungary Festo Kft. Becsi ut 100 H-1034 Budapest Tel. ++36 (0)1/250 00 55, Fax 250 15 93 E-mail: [email protected] India Festo Controls Private Ltd. Plot No. 226, Bommasandra Industrial Area IND-Bangalore 562 158 Tel. ++91 (0)8110/3 33 59, Fax 3 20 58 E-mail: [email protected] Indonesia PT. Festo Jl. Sultan Iskandar Muda No. 68 (Arteri Pondok Indah) Jakarta 12240 Tel. ++62 (0)21/2750 7900, Fax 726 73 86 E-mail: [email protected] Iran Festo Pneumatic S.K. Kh. Ramsar, Ko. Behbahan No. 1 IR-15 Teheran Tel. ++98 (0)21/882 92 25. Fax 882 21 62 E-mail: [email protected] Ireland Festo Limited Unit 5, Sandyford Park Sandyford Industrial Estate IRL-Dublin 18 Tel. ++353 (0)1/295 49 55, Fax 295 56 80 E-mail: [email protected] Italy Festo S.p.A. Via Enrico Fermi 36/38 I-20090 Assago (Ml) Tel. ++39 (0)2/45 78 81, Fax 488 06 20 E-mait: [email protected]

Japan Festo K.K. 1-26 10 Hayabuchi, Tsuzuki-ku J-Yokohama 224-0025 Tel. ++81 (0)45/593 56 10, Fax 593 56 78 E-mail: [email protected] Korea Festo Korea Co. Ltd. 470-9 Kasan-dong Kumchun-ku ROK Seoul 153053 Tel. ++82 (0)2/850 7114, Fax 864 70 40 E-mail: [email protected] Latvia Festo SIA Deglava iela 60 LV-1035 Riga Tel. ++371 (0)2/57 78 64, Fax 57 79 46 E-mail: [email protected] Lithuania Festo UAB Karaliaus Mindaugo pr. 22 LT-3000 Kaunas Tel. ++370 (0)7/32 13 14, Fax 32 13 15 E-mail: [email protected] Malaysia Festo Sdn, Berhad 10, Persiaran Industri Bandar Sri Damansara Wilayah Persekutuan MAL-52200 Kuala Lumpur Tel. ++60 (0)3/632 81 22. Fax 635 64 12 E-mail; [email protected] Mexico Festo Pneumatic S.A. Av. Ceylan 3 Col. Tequesquinahuac MEX-54020 Tlalnepantla. Edo. de Mex. Tel. ++52 (01)5/321 66 00, Fax 321 66 65 E-mail: [email protected] Netherlands Pesto B.V. Schieweg62 NL-2627 AN Delft Tel. ++31 (0)15/251 88 99, Fax 26110 20 E-mail: [email protected] New Zealand Festo Limited 20 Fisher Crescent. MT. Wellington NZ-Auckland Tel. ++64 (0)9/574 10 94, Fax 574 10 99 E-mail: [email protected] Norway Festo AB Østensjøveien 27 N-0661 Oslo Tel. ++47 (0)22/72 89 50, Fax 72 89 51 E-mail: [email protected] Philippines Festo Inc. Km. 18, West Service Road, South Superhighway 1700 Paranaque City Tel. ++63 (0)2/7 76 68 88, Fax 8 23 42 19 E-mail: [email protected] Poland Festo Sp.zo.o. Janki k/Warszawy, ul. Mszczonowska 7 PL-05090 Raszyn Tel. ++48 (02)22/720 41 66, Fax 720 44 76 E-mail: [email protected] Rumania Festo S.R.L. Str. SfintuI Constantin No. 17 RO-70751 BucurestI Tel. ++40 (0)1/310 29 83, Fax 310 24 09 E-mail: [email protected] Russia Festo RF 000 Mitschurinskji prosp., 49 RUS-117607Moskwa Tel. ++7 (0)95/737 34 85, Fax 737 34 83 E-mail: [email protected]

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