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OXIDATION Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1

Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

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Page 1: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

OXIDATION

Discussion 3Monday, February 23, 2015 12:20 PM

Discussions Page 1

Page 2: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

Monday, February 23, 2015 12:25 PM

Discussions Page 2

Page 3: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

EVAPORATION AND SPUTTER DEPOSITION

Monday, February 23, 2015 12:29 PM

Discussions Page 3

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CVD

Monday, February 23, 2015 12:33 PM

Discussions Page 4

Page 5: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

Monday, February 23, 2015 12:38 PM

Discussions Page 5

Page 6: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

LITHOGRAPY

Monday, February 23, 2015 1:15 PM

Discussions Page 6

Page 7: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

ETCHING

Monday, February 23, 2015 1:17 PM

Discussions Page 7

Page 8: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

Silicon Wet EtchingMonday, February 23, 2015 1:20 PM

Discussions Page 8

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DRY ETCHING

Monday, February 23, 2015 1:26 PM

Discussions Page 9

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Discussions Page 10

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Discussions Page 11

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Discussions Page 12

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DOPING

Monday, February 23, 2015 1:29 PM

Discussions Page 13

Page 14: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

Monday, February 23, 2015 1:33 PM

Discussions Page 14

Page 15: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

Monday, February 23, 2015 1:34 PM

Discussions Page 15

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IRVIN'S CURVES

Monday, February 23, 2015 1:36 PM

Discussions Page 16

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Discussions Page 17

Page 18: Discussion 3 - inst.eecs.berkeley.eduinst.eecs.berkeley.edu/~ee247b/sp15/discussions/Discussion 3.pdf · Discussion 3 Monday, February 23, 2015 12:20 PM Discussions Page 1 . Monday,

Surface MicromachiningMonday, February 23, 2015 1:49 PM

Discussions Page 18

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Monday, February 23, 2015 1:49 PM

Discussions Page 19

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Monday, February 23, 2015 1:49 PM

Discussions Page 20

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STRESS

Variation of residual stress in the direction of film growth

•

Can warp released structures in z-direction

•

TOPOGRAPHY

Monday, February 23, 2015 1:58 PM

Discussions Page 21

Tool: Talent Discussion Talking Points for Managers · Trinity Health Talent Discussion Talking Points for Managers Page 2 of 26 Once you are ready to have Talent Discussions with

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