1
Approach โ€ข Model individual Au V-antenna scattering elements 65 nm thick and 250 nm wide on Si substrate in air at two wavelengths (5 & 8 ยตm) โ€ข Extract phase and amplitude of scattered cross-polarized field, โˆ’ โ€ข Identify elements that meet the constraints to populate lens array: โˆ† = +1 โˆ’ = 2 / โˆ† = โˆ’ โˆ’ +1 โˆ’ โ‰ˆ 0 Design of Metasurface IR Lenses Using COMSOL Multiphysics Background Combine Fresnel lens theory w/ new generalized form of Snellโ€™s Law to refract light incident upon a planar interface that mimics the phase gradient of a bulk lens Normal incidence light couples to โ€œanomalous refractionโ€ mode, creating a broadside angle of propagation through constructive interference of discrete scattering elements Flat lens designs rely on accurate knowledge of scattered phase/amplitude, but complex geometries and mutual coupling make analytical solutions intractable, driving the need for a design toolbox to properly characterize metasurface performance Goals Use COMSOL Multiphysics to characterize various subwavelength structures and architectures as fundamental building blocks for metasurface lens designs Fabricate and measure metasurface lenses and validate against COMSOL results Further develop COMSOL-based design tool for complex geometries, new architectures and lens optimization of flat lens performance Metasurface Low-Profile Lens Concept Single air/silicon (Si) interface patterned w/ gold (Au) V-antennas for control of phase/amplitude o Coupling between dipole arms provides sufficient access to full 2 phase space o Each V-antenna scatterer provides unique phase = [] and amplitude driven by its vertex angle โˆ† , dipole length โ„Ž , interface and material properties ( / ) To induce lensing function, neighboring elements must possess both a proper, constant phase gradient and equal amplitudes in order to produce a uniform broadside phasefront References [1] N. Yu et al., "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction," Science, vol. 334, pp. 333-337, 2011. [2] F. Aieta et al., "Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces," Nano Lett, 2012. [3] N. Yu et al., "Flat Optics: Controlling Wavefronts with Optical Antenna Metasurfaces," IEEE J Sel Top Quant, vol. 19, no. 3, 2013. [4] N. Yu and F. Capasso, "Flat Optics with Designer Metasurfaces," Nat Mater, vol. 13, pp. 139-150, 2014. k z 45ยฐ Field Components y x Parametrized Geometries ฮ” / = = โˆ’ โˆ’ Setup โ€ข Mimics โ€œScatterer on a Substrateโ€ model to separate scatterer response from scattered field from air/Si interface. Two distinct physics models: 1. Interface w/o scatterer. Uses periodic ports and boundary conditions to get scattered field โ€ฒ , which is used as background field for #2 2. Interface w/ scatterer. Uses perfectly-matched layers (PML) and = โ€ฒ to obtain true scattered field = โˆ’ โ€ข Active port aligned along ๏ฟฝ to excite asymmetric/symmetric modes equally โ€ข Extract near-field data from probes and far-field data from propagation โ€ข Batch Sweep space spans from โ„Ž/2 = 0.3 โˆ’ 1.6 ยตm and ฮ” = 25 โˆ’ 180ยฐ Far-field Calculation Applied to near-field, based on Stratton-Chu formula: , = fields on the surface , acting as the aperture 0 = unit vector from origin to observation point = radius vector of = unit vector normal to Lens Phenomenology โ€ข Interpolated COMSOL output is input for MATLAB optimization algorithm which finds โˆ† and MAX MEAN to within desired tolerances, if exists โ€ข Region cut-offs of common phase dictated by Fresnel lens phase calculation: โˆ†= 2 0 ( 2 + 2 + 2 โˆ’ )+ 0 Fabrication: โ€ข Accomplished at Sandia National Labs using in-house MATLAB GDS script โ€ข 19 unique lenses/8 unique metasurfaces, varying several parameters: Incident wavelength, 0, โ„ฑ /# (focal length and diameter) Number of unique elements, Packing density (intracell periodicity) โ€ข Significant rounding of edges, but good preservation of dipole angle/length = number of discrete elements = element index 1, / GDS layout for 8 m, = 16, = 25 mm SEM images for 5 m, = 16, = 100 mm Dipole Length (h/2) Vertex Angle (โˆ†) Phase calculation for 5 m, =8, = 100 mm Phase calculation for 8 m, = 16, = 50 mm SEM images of 5 m, =8, = 100 mm lens Lens Design & Fabrication Phase advance & amplitude โˆ’ profiles for V-antenna scattered cross-pol electric field as a function of antenna dipole length (h/2) and vertex angle (ฮ”). COMSOL demonstration of antennas arrayed with โˆ† = 45ยฐ to generate broadside scattering 1. Air Force Institute of Technology, Department of Engineering Physics, Wright-Patterson Air Force Base, OH 2. Sandia National Laboratories, Albuquerque, NM, USA Contact Information: [email protected]; [email protected] B. Adomanis 1 , D. Bruce Burckel 2 and M. Marciniak 1 ( , )= 4 0 ร— ๏ฟฝ ร— โˆ’ ๏ฟฝ 0 ร— ร— โ‹… 0 โ€ข Regions are filled based on COMSOL/ MATLAB optimized design elements Characterization COMSOL Modeling & Results Computational Information 2 Xeon CPUs/16-cores/128GB RAM 40GB solved model/200K mesh/2.2M DoF Wave Optics module + Frequency Domain (ewfd) + Stationary Solver + Batch Sweep o 5 cores/parameter solution o Time steps taken over the range: โˆ†= 4ยฐ/155ยฐ & โ„Ž = 0.05m/1.30m o Single parameter solver time: ~15min Conclusion Through the use of COMSOL as a design/characterization tool, we successfully recreated planar lenses at 5 m & 8 m over the focal ranges = 25 โˆ’ 200 mm using variants of Harvardโ€™s seminal metasurface design [1-4], and validated the future use of the COMSOL for a comprehensive investigation of design optimization. While an analytic approach is a more rapid solution for simple geometries and architectures, COMSOL has demonstrated an equal ability to quickly design metasurface lenses, with the added benefit of being able to expand functionality to more complex structures and architectures needed for optimized performance. = ( + + โˆ’)+ 0 Excerpt from the Proceedings of the 2016 COMSOL Conference in Boston

Design of Metasurface IR Lenses Using COMSOL Multiphysics

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Approach โ€ข Model individual Au V-antenna scattering elements 65 nm thick and 250 nm

wide on Si substrate in air at two wavelengths (5 & 8 ยตm)

โ€ข Extract phase and amplitude of scattered cross-polarized field, ๐ธ๐ธ๐‘–๐‘–๐‘ฅ๐‘ฅโˆ’๐‘๐‘๐‘๐‘๐‘๐‘

โ€ข Identify ๐‘๐‘ elements that meet the constraints to populate lens array: โˆ†๐œ‘๐œ‘ = ๐œ‘๐œ‘๐‘–๐‘–+1 โˆ’ ๐œ‘๐œ‘๐‘–๐‘– = 2๐œ‹๐œ‹/๐‘๐‘ โˆ† ๐‘ฌ๐‘ฌ = ๐ธ๐ธ๐‘–๐‘–

๐‘ฅ๐‘ฅโˆ’๐‘๐‘๐‘๐‘๐‘๐‘ โˆ’ ๐ธ๐ธ๐‘–๐‘–+1๐‘ฅ๐‘ฅโˆ’๐‘๐‘๐‘๐‘๐‘๐‘ โ‰ˆ 0

Design of Metasurface IR Lenses Using COMSOL Multiphysicsรˆ

Background

Combine Fresnel lens theory w/ new generalized form of Snellโ€™s Law to refract light incident upon a planar interface that mimics the phase gradient of a bulk lens

Normal incidence light couples to โ€œanomalous refractionโ€ mode, creating a broadside

angle of propagation through constructive interference of discrete scattering elements

Flat lens designs rely on accurate knowledge of scattered phase/amplitude, but complex geometries and mutual coupling make analytical solutions intractable, driving the need for a design toolbox to properly characterize metasurface performance

Goals

Use COMSOL Multiphysics to characterize various subwavelength structures and architectures as fundamental building blocks for metasurface lens designs

Fabricate and measure metasurface lenses and validate against COMSOL results

Further develop COMSOL-based design tool for complex geometries, new

architectures and lens optimization of flat lens performance

Metasurface Low-Profile Lens Concept Single air/silicon (Si) interface patterned w/ gold (Au) V-antennas for control of phase/amplitude o Coupling between dipole arms provides sufficient access to full 2๐œ‹๐œ‹ phase space o Each V-antenna scatterer provides unique phase ๐œ‘๐œ‘ = ๐ด๐ด๐ด๐ด๐ด๐ด[๐‘ฌ๐‘ฌ] and amplitude ๐‘ฌ๐‘ฌ driven

by its vertex angle โˆ† , dipole length โ„Ž , interface and material properties (๐œ–๐œ–๐ด๐ด๐ด๐ด/๐œ‡๐œ‡๐ด๐ด๐ด๐ด) To induce lensing function, neighboring elements must possess both a proper, constant phase

gradient and equal amplitudes in order to produce a uniform broadside phasefront

References [1] N. Yu et al., "Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction," Science, vol. 334, pp. 333-337, 2011. [2] F. Aieta et al., "Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces," Nano Lett, 2012. [3] N. Yu et al., "Flat Optics: Controlling Wavefronts with Optical Antenna Metasurfaces," IEEE J Sel Top Quant, vol. 19, no. 3, 2013. [4] N. Yu and F. Capasso, "Flat Optics with Designer Metasurfaces," Nat Mater, vol. 13, pp. 139-150, 2014.

kz

45ยฐ

Field Components

y x

Parametrized Geometries

ฮ”

๐’‰๐’‰/๐Ÿ๐Ÿ

๐’˜๐’˜ = ๐Ÿ๐Ÿ๐Ÿ๐Ÿ๐Ÿ๐Ÿ๐ง๐ง๐ง๐ง

๐’•๐’• = ๐Ÿ”๐Ÿ”๐Ÿ๐Ÿ๐ง๐ง๐ง๐ง

๐Ÿ๐Ÿ ๐๐๐ง๐ง ๐Ÿ–๐Ÿ– ๐๐๐ง๐ง

๐‹๐‹ ๐‹๐‹

๐‘ฌ๐‘ฌ๐’”๐’”๐’”๐’”๐’”๐’”๐’•๐’•๐’™๐’™โˆ’๐’‘๐’‘๐’‘๐’‘๐’‘๐’‘ ๐‘ฌ๐‘ฌ๐’”๐’”๐’”๐’”๐’”๐’”๐’•๐’•

๐’™๐’™โˆ’๐’‘๐’‘๐’‘๐’‘๐’‘๐’‘

Setup โ€ข Mimics โ€œScatterer on a Substrateโ€ model to separate scatterer response from

scattered field from air/Si interface. Two distinct physics models: 1. Interface w/o scatterer. Uses periodic ports and boundary conditions to get

scattered field ๐‘ฌ๐‘ฌ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ โ€ฒ , which is used as background field for #2 2. Interface w/ scatterer. Uses perfectly-matched layers (PML) and

๐‘ฌ๐‘ฌ๐‘๐‘๐‘๐‘ = ๐‘ฌ๐‘ฌ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ โ€ฒ to obtain true scattered field ๐‘ฌ๐‘ฌ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘  = ๐‘ฌ๐‘ฌ๐‘ ๐‘ ๐‘๐‘๐‘ ๐‘ ๐‘ ๐‘ ๐‘๐‘ โˆ’ ๐‘ฌ๐‘ฌ๐‘๐‘๐‘๐‘ โ€ข Active port aligned along ๐‘ฆ๐‘ฆ๏ฟฝ to excite asymmetric/symmetric modes equally โ€ข Extract near-field data from probes and far-field data from propagation โ€ข Batch Sweep space spans from โ„Ž/2 = 0.3 โˆ’ 1.6 ยตm and ฮ” = 25 โˆ’ 180ยฐ

Far-field Calculation Applied to near-field, based on Stratton-Chu formula:

๐‘ฌ๐‘ฌ,๐‘ฏ๐‘ฏ = fields on the surface ๐‘บ๐‘บ, acting as the aperture

๐’“๐’“0 = unit vector from origin to observation point

๐’“๐’“ = radius vector of ๐‘บ๐‘บ ๐’๐’ = unit vector normal to ๐‘บ๐‘บ

Lens Phenomenology โ€ข Interpolated COMSOL output is input for MATLAB optimization algorithm

which finds โˆ†๐œ‘๐œ‘ and MAX MEAN ๐‘ฌ๐‘ฌ to within desired tolerances, if exists โ€ข Region cut-offs of common phase dictated by Fresnel lens phase calculation: โˆ†๐œ‘๐œ‘= 2๐œ‹๐œ‹

๐œ†๐œ†0 ( ๐‘ฅ๐‘ฅ2 + ๐‘ฆ๐‘ฆ2 + ๐‘“๐‘“2 โˆ’ ๐‘“๐‘“) + ๐œ‘๐œ‘0

Fabrication: โ€ข Accomplished at Sandia National Labs

using in-house MATLAB GDS script โ€ข 19 unique lenses/8 unique metasurfaces,

varying several parameters: Incident wavelength, ๐œ†๐œ†0,๐‘–๐‘–๐‘–๐‘–๐‘ ๐‘  โ„ฑ/# (focal length ๐‘“๐‘“ and diameter) Number of unique elements, ๐‘๐‘ Packing density (intracell periodicity)

โ€ข Significant rounding of edges, but good preservation of dipole angle/length

๐‘๐‘ = number of discrete elements ๐‘–๐‘– = element index 1,๐‘๐‘

๐Ÿ๐Ÿ๐Ÿ๐Ÿ๐๐๐ง๐ง

๐Ÿ–๐Ÿ–๐๐๐ง๐ง

๐Ÿ–๐Ÿ– ๐๐๐ง๐ง

๐…๐…/๐Ÿ’๐Ÿ’

GDS layout for 8 ๐œ‡๐œ‡m, ๐‘๐‘ = 16, ๐‘“๐‘“ = 25 mm

SEM images for 5 ๐œ‡๐œ‡m, ๐‘๐‘ = 16, ๐‘“๐‘“ = 100 mm

Dipole Length (h/2)

Vertex Angle (โˆ†)

Phase calculation for 5 ๐œ‡๐œ‡m, ๐‘๐‘ = 8, ๐‘“๐‘“ = 100 mm

Phase calculation for 8 ๐œ‡๐œ‡m, ๐‘๐‘ = 16, ๐‘“๐‘“ = 50 mm

SEM images of 5 ๐œ‡๐œ‡m, ๐‘๐‘ = 8, ๐‘“๐‘“ = 100 mm lens

Lens Design & Fabrication

Phase advance ๐œ™๐œ™ & amplitude ๐ธ๐ธ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ ๐‘ 

๐‘ฅ๐‘ฅโˆ’๐‘๐‘๐‘๐‘๐‘๐‘ profiles for V-antenna scattered cross-pol electric field as a function of antenna dipole length (h/2) and vertex angle (ฮ”).

COMSOL demonstration of antennas arrayed with โˆ†๐œ‘๐œ‘ = 45ยฐ to generate broadside scattering

1. Air Force Institute of Technology, Department of Engineering Physics, Wright-Patterson Air Force Base, OH, USA 2. Sandia National Laboratories, Albuquerque, NM, USA

Contact Information: [email protected]; [email protected]

B. Adomanis1, D. Bruce Burckel2 and M. Marciniak1

๐‘ฌ๐‘ฌ(๐œƒ๐œƒ,๐œ™๐œ™) =๐‘–๐‘–๐‘–๐‘–4๐œ‹๐œ‹

๐’“๐’“0 ร— ๏ฟฝ๐‘‘๐‘‘๐‘บ๐‘บ ๐’๐’ ร— ๐‘ฌ๐‘ฌ โˆ’ ๐œ‡๐œ‡๐œ–๐œ–๏ฟฝ ๐’“๐’“0 ร— ๐’๐’ ร— ๐‘ฏ๐‘ฏ ๐‘’๐‘’๐‘–๐‘–๐‘–๐‘– ๐’“๐’“โ‹…๐’“๐’“0

โ€ข Regions are filled based on COMSOL/ MATLAB optimized design elements

Characterization

COMSOL Modeling & Results

Computational Information

2 Xeon CPUs/16-cores/128GB RAM 40GB solved model/200K mesh/2.2M DoF Wave Optics module + Frequency Domain

(ewfd) + Stationary Solver + Batch Sweep o 5 cores/parameter solution o Time steps taken over the range: โˆ†= 4ยฐ/155ยฐ & โ„Ž = 0.05๐œ‡๐œ‡m/1.30๐œ‡๐œ‡m

o Single parameter solver time: ~15min

Conclusion

Through the use of COMSOL as a design/characterization tool, we successfully recreated planar lenses at 5 ๐œ‡๐œ‡m & 8 ๐œ‡๐œ‡m over the focal ranges ๐‘“๐‘“ = 25 โˆ’ 200 mm using variants of Harvardโ€™s seminal metasurface design [1-4], and validated the future use of the COMSOL for a comprehensive investigation of design optimization.

While an analytic approach is a more rapid solution for simple geometries and

architectures, COMSOL has demonstrated an equal ability to quickly design metasurface lenses, with the added benefit of being able to expand functionality to more complex structures and architectures needed for optimized performance.

๐‹๐‹= ๐Ÿ๐Ÿ๐…๐…๐€๐€๐Ÿ๐Ÿ

( ๐’™๐’™๐Ÿ๐Ÿ + ๐’š๐’š๐Ÿ๐Ÿ + ๐’‡๐’‡๐Ÿ๐Ÿ โˆ’ ๐’‡๐’‡) + ๐‹๐‹0

Excerpt from the Proceedings of the 2016 COMSOL Conference in Boston