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Company Introduction and
History
Semilab Semiconductor Physics Laboratory Co. Ltd.
2/2/2016
www.semilab.com
Outline
• Basic Facts about
Semilab
• Semilab Worldwide
• History
• Company acquisitions
• Technology purchases
• Semilab Staff
• Current portfolio
Company Introduction and History
2/2/2016 2
www.semilab.com
Basic Facts about Semilab
Main activity: Development, manufacturing and marketing of metrology equipment for the semiconductor and photovoltaic industries.
• Laboratory, office and manufacturing space:
11,000 m2, about 3,000 m2 in the US
• Over 400 employees worldwide
• 51 physicists employed worldwide
• 18 employees holding a Ph. D. in physics (7 in
Hungary)
• Patents: wholly owned – 90, applications – 8,
lincensed – 41
• ~400 tools with automated wafer handling
installed in semiconductor production
• 130 tools in 300mm fabs
• 34 different product lines, 110 products with
various configurable options
Company Introduction and History
2/2/2016 3
www.semilab.com
History of the Semilab Group
Company Introduction and History
2/2/2016 4
1990: Founded by researchers as a spin-off from the Research Institute for Technical Physics of the Hungarian Academy of Sciences
2004-2010: Photovoltaic area
• 90 % annual growth (industry growth ~40 %)
• Dominant player in front-end electrical metrology
2004-2014: Semiconductor area
• Growth by company and technology acquisitions
• 5th biggest pure-play metrology company
• Building significant customer base in FPD industry
www.semilab.com
Japan, TokyoUSA, Boston
USA, San
Jose
USA, Tampa
China, Shanghai , Wuxi
Singapore
Korea, Seoul
Budapest
(HQ)
Denmark,
Copenhagen
Germany,
Braunschweig
France, Grenoble
Taiwan, Hsinchu
Semilab around the World
Company Introduction and History
2/2/2016 5
Headquarters
R&D and product
Center
Sales & Service
www.semilab.com
Global Corporate Organization
Company Introduction and History
2/2/2016 6
Semilab HQBudapest
Semilab USABillerica, MA
Semilab AMSBillerica, MA
Semilab SDITampa, FL
Semilab JapanShin-
Yokohama
Semilab KoreaSeoul
Semilab ChinaShanghai
Semilab ChinaWuxi
Semilab TaiwanHsinchu
Semilab South-East
Asia
Semilab European Customer support
Semilab Germany
Semilab Denmark
www.semilab.com
Semilab Staff
Company Introduction and History
2/2/2016 7
PhD5.8%
PhDstudents
2.6%
University/College
without PhD (s)63.1%
Other28.5%
Qualifications
Hungary63%
Germany1%
China
10%
Japan6%
Singapore
1%
France1%
USA12%
Korea4%
Taiwan
2%
Semilab Worldwide
18 22 23 28 37 47 6190
170
234
392
443
381
331 350
408
1998 2000 2002 2004 2006 2008 2010 2012 2014
Semilab Employees Worldwide
www.semilab.com
History of the Semilab Group
Company Introduction and History
2/2/2016 8
Established:
1990
Acquired:
2004
Acquired: 2008
Acquired:
2008
Acquired: 2008
USA,
formerly formerly
Acquired: 2015
www.semilab.com
Technology Acquisitions in the Semiconductor Sector
Company Introduction and History
2/2/2016 9
Junction Photo-Voltage
measurement for ion
implant characterization
from IBM
Photo-Modulated
Reflectivity measurement
for ion implant
characterization from
Applied Materials
www.semilab.com
Technology Acquisitions in the PV Sector
Company Introduction and History
2/2/2016 10
Microcrack inspection
technology from Basler AG
Visual wafer inspection
technology from Tordivel
Solar
www.semilab.com
Applications for the Semiconductor Industry: Wafer
Makers
Company Introduction and History
2/2/2016 11
Ingot Resistivity
testing
Contamination monitoring W
afe
r Contamination and defect monitoring by non-destructive methods
High-sensitivity contamination analysis
Bulk microdefect characterization
Epi la
yer Contamination
monitoring
Resistivity monitoring
Resistivity profiling
www.semilab.com
Applications for the Semiconductor Industry: Device
Makers
Company Introduction and History
2/2/2016 12
Inco
min
g w
afe
r Electrical quality control by carrier lifetime and carrier diffusion length
Ion
im
pla
nt Dose
monitoring before anneal
Sheet resistancemeasurementafter anneal
Junction depth measurement
Gate
die
lectr
ic Optical thickness measurement
Qualification of electrical properties (by contact and non-contact methods)
Po
rou
s d
iele
ctr
ic Optical thickness measurement
Porosity measurement
Qualification of electrical properties (by contact and non-contact methods) M
eta
l la
ye
r, 3
D s
tru
ctu
res Non-contact
thickness measurement
Non-contactdetermination of mechanicalproperties
Bonded waferinspection (forvoids and alignment)
www.semilab.com
Products for the Semiconductor Industry• Most metrologies available in different platforms
for different customer needs
• Lab-scale R&D and small-scale productioncontrol
• Automated up to 200mm for Tier 2 fabs
• Automated up to 300mm without OHT formid-range fabs
• Full 300mm automation with OHT and factory integration for Tier 1 customers
• 450mm tools already shipped: Wafer Testerfor bulk Si qualification by carrier lifetimeand diffusion length, Laser Ellipsometer
• High-end tools are meeting all advanced fabcleanliness standards, including integrated minienvironments.
• Key applications to control critical parameters inproduction:
• Contamination and damage monitoring
• Monitoring key steps: implants, dielectriclayers, metallization layers, etchedstructures
Company Introduction and History
2/2/2016 13
www.semilab.com
Products for Wafer Makers
Company Introduction and History
2/2/2016 14
Semilab Metrologies
Destructive
BMD Characterization
LST productline (2)
ContaminationAnalysis
DLS productline (2)
Epi Profiling
SRP productline (2)
Non-destructive
Nanotopology
AFM productline (5)
Bulk stressmeasurement
PSI productline (4)
ContaminationMonitoring
WT productline (5)
FAaSTproduct line
(4)
PLS productline (4)
Epi thicknessmeasurement
EIR productline (4)
ResistivityMonitoring
Bulk
WT productline (5)
Epi
MCV productline (5)
ACV productline (3)
QC productline (3)
Available from manually
loaded lab platform to
300mm automated platform
Available from ≤200mm
automated to 300mm
automated platform
For wafer makers, we offer 12
product lines, 43 products.
www.semilab.com
Products for Semiconductor Device Manufacturing
Company Introduction and History
2/2/2016 15
Semilab Metrologies
Contaminationmonitoring
WT productline (5)
FAaSTproduct line
(4)
PLS productline (4)
Epi layers
SiGe / GaNcharacterization
SEIR product line
(3)
Ramanproduct line
(3)
SPL productline (4)
Ion implant
Photo-modulatedreflectivity
PMR productline (3)
Sheet resistance
control
JPV productline (5)
Dielectrics
Opticalthickness
SE productline (5)
Porosity
PS productline (4)
Electricalproperties
Hg CV characterizat
ion
MCV productline (5)
Non-contactCV
FAaSTproduct line
(4)
Elastic metal CV
FCV productline (3)
3D structures
True 3D structures
MBIR product line
(3)
Void and alignment
control
AIR productline (3)
Metallization
SAW product line
(3)
Available from manually
loaded lab platform to
300mm automated platform
Available from ≤200mm
automated to 300mm
automated platform
For semiconductor device makers,
we offer an additional 11 product
lines wit 44 products.
www.semilab.com
Products for the Photovoltaic Industry
Company Introduction and History
2/2/2016 16
• Handheld tools for quick testing
• Table-top tools for high resolution wafer mapping
• In-line tools for integration with a fully automated product line
• Key applications to control criticalparameters:
• Contamination monitoring
• Resistivity and sheet resistancemeasurements
• Visual inspection
• Geometry
• Surface
• Microcracks
• Photoluminescence imaging
• Efficiency measurements
Contaminated
Not contaminated
www.semilab.com
Products for the Photovoltaic Industry
Company Introduction and History
2/2/2016 17
Semilab Metrologies
Offline and labtools
WT product line (5)
Contaminationmonitoring
Resistivitymeasurement
Sheet resistancemeasurement
LBIC measurement
PV-2000 (1)
Contaminationmonitoring
Resistivitymeasurement
Sheet resistancemeasurement
LBIC measurement
ALID measurement
Dielectriccharacterization
PLI product line (4)
IRB product line (2)
Inline tools
Contaminationmonitoring
WxL product line (5)
PLI product line (4)
Thickness and resistivity
WxT product line (5)
Sheet resistance
CxS product line (5)
Wafer sorting
PVS product line
Contamination monitoring
Thickness and resistivity
Surfaceinspection
Shape inspection
Edgequalification
PLI product line (4)
Contaminationmonitoring
For the photovoltaic
industry, we offer 7 product
lines with 23 products and a
large number of metrology
options.
www.semilab.com
Incoming wafer
inspection
Chemical saw damage
etching
P diffusion, P glass
removal
Silicon nitride ARC
Back side printing,
Front side printing
Testing
Feedstock
CZ GrowingCastingRibbon pulling
Ingot, Block, Ribbon
Sawing, Etching, Polishing
Wafer
Applications for the Photovoltaic Industry
Company Introduction and History
2/2/2016 18
p/n type
bulk resistivity
Off-line inspection
carrier lifetime
bulk resistivity
In-line inspection
carrier lifetime
bulk resistivity,
defect detection
Off-line inspection
carrier lifetime, thickness,
TTV, bulk resistivity,
wafer sorting
In-line inspection
carrier lifetime
thickness, TTV
bulk resistivity
Off-line inspection
carrier lifetime
thickness, TTV
bulk resistivity, visual inspection
In-line inspection
emitter
sheet resistance
carrier lifetime
Off-line inspection
LBIC+reflectance
IQE
Off-line inspection
emitter
sheet resistance
carrier lifetime
In-line inspection
carrier lifetime
Interface recomb. velocity,
coating thickness
Off-line inspection
carrier lifetime
Interface recomb. velocity,
coating thickness
In-line inspection
Comprehensive, fully in-line process control for the c-Si PV manufacturing process.
www.semilab.com
Fully Automated In-line Metrology Systems for PV
Production
Company Introduction and History
2/2/2016 19
Wafer
loading
from
stack or
cassette
Wafer
unloading to
stacks
Testing and classification:
•Electrical testing (carrier
lifetime, resistivity)
•Visual inspection
(geometry, edge, surface,
microcracks)
•Photoluminescence
imaging
www.semilab.com
Products for the Flat Panel Industry
• Optical and electrical characterization of
state-of-the-art thin layers
• From table-top R&D tools to fully
automated systems capable of automatic
operation up to Gen. 8. glass panels
Company Introduction and History
2/2/2016 20
www.semilab.com
Products for Flat Panel Industry
• Electrical and optical characterization can be combined
• Various options available
• Line mura detection (ELA process characterization)
• Spectral reflectometry
• Imaging spectroscopic reflectometry for halftone process monitoring
• Sheet resistance measurement
• Contact angle measurement
• Full sheet stress measurement
Company Introduction and History
2/2/2016 21
FPT product line
OpticalCharacterization
SE option
IRSE option
ElectricalCharacterization
Mobilitymeasurement
www.semilab.com
Thank you!
Company Introduction and History
2/2/2016 22
For All Your Metrology Needs