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College of Engineering Biographical Data
University of Illinois at Urbana-Champaign
Department (% appnt): Nuclear, Plasma, and Radiological Engineering(100%); Physics Graduate Faculty (0%);Electrical and Computer Engineering - Affiliate(0%)
Date: May 2011
1. Name: Ruzic, David N. Birth Date: 2/10/1958 Citizenship: USA
2. Present Academic Rank: Professor 3. Tenure Status: A
4. Administrative Title:
5. Degrees (field, institution, year awarded)
B.S., Physics/Appl Math, Purdue, 19791. M.A., Physics, Princeton University, 19812. Ph.D., Physics, Princeton University, 19843.
6. Academic Positions at U of I and elsewhere (rank, institution, field, inclusive dates) (show % if you holdmultiple appointments)
Assistant Professor, June 1984 - August 19891. Graduate Faculty in Physics, November 1986 � present2. Honors Faculty for Undergraduate Campus Honors Program, January 1988 - present3. Affiliate Faculty in Dept. of Material Science and Engineering, June 1988 - 20024. Associate Professor, 1989-19945. Affiliate Faculty in Dept. of Electrical and Computer Engineering, December 1991 � present6. Professor, 1994-present7. Assistant Dean, College of Engineering, Academic Programs - 1995-19968. Faculty Fellow, Vice Presidents for Academic Affairs Office, August 2000 � July 20029. Associate Vice President for Administration, University Admin., Aug 2002 � Sept 200510. Director, Center for Plasma Material Interactions, 2004 - present11. Affiliate in Micro and Nanotechnology Laboratory- December 2008-present (0%)12. Bliss Professor, College of Engineering, Aug 2011 - August 201613.
7. Professional Activities
a. Other Professional Employment (title, organization, location, inclusive dates)
Professorial Assistant, Purdue University, Sept. 1975 - May 19771. Teaching Assistant, Purdue University, October 1978 - August 19792. Research Assistant, Princeton University Plasma Physics Lab, Sept. 1979 - Feb. 19843. Research Staff I, Princeton University Plasma Physics Lab, February 1984 - June 19844.
b. Major Consulting Activities (past five years) (list organization and location)
Fannie and John Hertz Foundation - Interviewer and Selection Committee1. Novellus Systems - Expert Witness for Physical Vapor Deposition patent dispute2. Varian � Expert Witness for Physical Vapor Deposition patent disputes3.
Kurt J. Lesker- Expert Witness for Magnetron Sputtering patent dispute4. TOSOH SMD Inc. - Sputtering Target Analysis5.
c. Professional Registrations (field, location, date)
8. Honors, Recognition, and Outstanding Achievements (list year)
Award Name Citation Date AwardedNational Scholastic Honorary Phi Beta Kappa 1997 National Leadership Honorary Omega Delta Kappa 1978 Valedictorian (tied) Purdue University Class of 1979 National Science Foundation Graduate Fellowship 1979 Hertz Foundation Graduate Fellowship 1979-1984 Presidential Young Investigator Award NSF 1985-1990 Arnold O. Beckman Award 1985 XEROX Award 1990 Fellow American Nuclear Society 2004 Micron Professorship 2005-2008 Fellow American Vacuum Society 2007 a. Teaching
Award Name Citation Date AwardedUndergraduate Instructional Award 1985 Amoco Foundation Award Undergraduate InstructionalDevelopment
1986
Special Commendation for Faculty/Student Relations 1986 Special Commendation for Faculty/Student Relations 1988 University of Illinois Award for Advising 1990-1991 Arthur Anderson Award for Advising 1990, 1991, 1992, 1993, 1994,
2005, 2007 Pierce Award for Student Faculty Relations 1992 Everitt Award for Excellence in Teaching 1992 Oakley Kunde Award for Excellence in UndergraduateInstruction
1993
Honorary Knight of St. Patrick (selected bystudents)
1996
College of Engineering Teaching Excellence Award 1996 Department of Nuclear Engineering Teaching ExcellenceAward
1996
All-Campus Charles and Harriet Luckman Award forDistinguished Teaching
1996
Broadrick-Allen Campus Honors Program TeachingAward
1997
Graduate College Award for Outstanding Mentoring ofGraduate Students Finalist
1999
Student Award for Excellence in Undergraduate Teaching 2003 Engineering Council Award for Excellence 2004 Campus Award for Excellence in Guiding UndergraduateResearch
2009
b. Research
Award Name Citation Date Awarded
Presidential Young Investigator Award NSF 1985-1990 Arnold O. Beckman Award 1985 XEROX Award 1990 Fellow American Nuclear Society 2004 Micron Professorship 2005-2008 Fellow American Vacuum Society 2007 c. Public Service
FACTUAL INFORMATIONA. Resident Instruction and Continuing Education (attach Teaching Activity reports, which covers 10years)
1. Resident Instruction (verify the information on the appended page for sections in which you had primaryresponsibility; pencil in corrections)
NPRE 101, "Introduction to Energy" (created this course)1. NPRE 201, "Advanced Energy Systems" (created this course)2. NPRE 241, "Introduction to Radiation Protection�3. NPRE 402, "Nuclear Power Engineering"4. NPRE 421, "Introduction to Controlled Thermonuclear Fusion"5. NPRE 423, "Plasma Laboratory" (created this course)6. NPRE 429, �Plasma Engineering� (created this course)7. NPRE 451, "Nuclear Engineering Laboratory"8. NPRE 452, "Advanced Nuclear Engineering Laboratory" (created this course)9. NPRE 458, "Nuclear Engineering Design"10. NPRE 521, "Interaction of Radiation with Matter"11. HIST 248, �Science Technology and the Human Condition� (co-created this course)12.
2. Continuing Education (credit courses only) (year, course, # of students, delivery method)
3. Other Instructional Activities (prelim and final exams, course development, short courses, etc.)
a. Prelim and Final Exams
b. Course Development
c. Short Courses
4. Undergraduate Advising
a. Academic Advising (number of students, current year only)
111.
b. Student Organizations (list past five years)
c. Design Teams (past five years)
NPRE 458, �Plasma Torch for Deposition�, 20081.
d. Other (individual projects, engineering open house, etc. past five years)
B. Research, Creative, and Other Scholarly Activities
1. Publications
List publications in print or accepted, with authors' names ordered the way they appear on the publications.Provide inclusive page numbers for papers in proceedings and journals. Follow the outline given below for theorganization of the list of publications. Within each category place items in chronological order.
(*) has undergone stringent editorial review by peers(**) invited and carries with it prestige and recognition(s) based on work as a student(w) co-authored with students you supervise(!) represents most important contribution of the past decade(P) derived from PhD thesis(D) co-authored with post-docs
a. Books Authored or Co-Authored
1. Original Editions
Ruzic, Neil P., and D. N. Ruzic, �Racing to a Cure� second edition. (University of Illinois Press,Champaign IL, 2006)
1.
2. Revisions
b. Books Edited or Co-Edited
1. Original Editions
Guest Editor, Plasma Science, Special Issue on Images in Plasma Science, 24 (1996)1.
2. Revisions
c. Chapters in Books
Chapter 3 of "Plasma Handbook of Processing Technology." The chapter is entitled, "Fundamentalsof Sputtering and Reflection," by David N. Ruzic. (Noyes, Park Ridge, NJ) edited by S. M.Rossnagel, J. J. Cuomo, and W. D. Westwood, 70-90 (1990).
1.
Chapter 36 of EUV Lithography. (37 pages) The chapter is entitled �Origin of Debris in EUVSources and its Mitigation,� by David N. Ruzic. Edited by Vivek Bakshi, SPIE Book Series, 2005.
2.
�Contamination�, Chapter 6C 40pp. D.N. Ruzic and S.N. Srivastava in �EUV Lithography� Ed. V.Bakshi, (SPIE press, Bellingham WA, 2008)
3.
d. Monographs (longer than an article, but shorter than a book)
Ruzic, D. N., "Hydrogen Collision Dynamics on a Rough Nickel Surface," Video Book: 1st Edition(American Vacuum Society Series VL-5, New York, 1991).
1.
Ruzic, D. N., "Electric Probes for Low-Temperature Plasmas," (AVS Monograph Series, New York,1994).
2.
e. Articles
1. Articles In Journals
Manos, D., D. N. Ruzic, R. Moore, and S. Cohen, "Laboratory Study of the PDX/PLT LaserBlow-Off Trace Element Injectors," J. Vac. Sci. Technol., 20, 1230-1233 (1982).
1.
Ruzic, D. N., R. Moore, D. Manos, and S. Cohen, "Secondary Electron Yields of Carbon-Coated andPolished Stainless Steel," J. Vac. Sci. Technol., 20, 1313-1316 (1982).
2.
Ruzic, D. N., S. Cohen, B. Denne, and J. Schivell, "Low-Energy Neutral Spectroscopy During PulsedDischarge Cleaning in PLT," J. Vac. Sci. Technol., A 1, 818-821 (1983).
3.
Budny, R., A. Cavallo, S.Cohen, C. Daughney, P. Efthimion, R. Fonck, R. Hulse, D. Hwang, D.Manos, A.-L. Pequet, D. N. Ruzic, J. Schivell, B. Smith, and R. Yelle, "Perturbation of TokamakEdge Plasma by Laser Blow-Off Impurity Injections," J. Vac. Sci. Technol., A 1, 837-840 (1983).
4.
Cohen, S., D. N. Ruzic, D. E. Voss, "Measurements of Low-Energy Neutral Outflux During ICRFHeating," Proc. of IX Intl. Vacuum Congress, Madrid, Spain, 455-468 (1983).
5.
Cohen, S., D. N. Ruzic, D. E. Voss, R. Budny, P. Colestock, D. Heifetz, J. Hosea, D. Hwang, D.Manos, and J. Wilson, "Measurements of Low-Energy Neutral Hydrogen Efflux During ICRFHeating," Nucl. Fusion, 24, 11, 1490-1496 (1984).
6.
Hwang, F. Jobes, D. Manos, R. Motley, D. N. Ruzic, J. Stevens, B. Stratton, S. Suckewer, S. VonGoeler, and R. Wilson, "Plasma-Materials Interactions During RF Experiments in Tokamaks," J.Nucl. Mater., 128-129, 280-291 (1984).
7.
Ruzic, D. N. and S. Cohen, "Total Scattering Cross-Sections and Interatomic Potentials for NeutralHydrogen and Helium, and Some Noble Gasses," J. Chem. Phys., 83, 11, 5527-5530 (1985). (>Thispublication is derived from Prof. Ruzic's Ph.D. Thesis).
8.
Ruzic, D. N., G. A. Gerdin, and C. M. Loxton, "Comparison of Glow Discharge Cleaning andIon-Impact Desorption of Stainless Steel," J. Vac. Sci. Technol., A 4, 3, 1232-1235 (1986).
9.
Ruzic, D. N., D. Heifetz, and S. Cohen, "The Density Dependence of Neutral Hydrogen Density andNeutral Hydrogen Emission from PLT," J. Nucl. Mater., 145-147, 527-533 (1987).
10.
Ruzic, D. N. and G. A. Gerdin, "An In-Situ Technique to Measure Erosion and Deposition in FusionDevices," J. Nucl. Mater., 145-147, 453-457 (1987).
11.
Caughman, J. B. O., D. N. Ruzic, and D. H. Hoffman, "The Effects of Radio Frequency Waves on theSputtering of Ion Cyclotron Resonance Heating Antenna Faraday Shields," J. Vac. Sci. Technol., A 5,2301-2304 (1987).
12.
Mandrekas, J., C. E. Singer, and D. N. Ruzic, "Effects of Plasma-Wall Sheath on Transport," J. Vac.Sci. Technol., A 5, 2315-2318 (1987).
13.
Cain, B. L., D. N. Ruzic, and R. Bastasz, "Production of Focused, Low-Energy, Hydrogen-Ion Usinga Colutron Ion Source," J. Vac. Sci. Technol., B 6, 485-490 (1988).
14.
Bastasz, R. B. L. Cain, T. E. Cayton, R. C. Huges, and D. N. Ruzic, "Plasma-Edge Diagnostics Basedon Pd-Mos Diodes," J. Nucl. Mater., 162-164, 587-592 (1989).
15.
Ruzic, D. N. and H. K. Chiu, "Modeling of Particle-Surface Reflections Including Surface RoughnessCharacterized by Fractal Geometry," J. Nucl. Mater., 162-164, 904-909 (1989).
16.
Caughman, J. B. O., D. N. Ruzic, and D. H. Hoffman, "Floating Potential Measurements in the NearField of an ICRH Antenna," J. Vac. Sci. Technol., A, 7, 1092-1098 (1989).
17.
Wilson, J. L., J. B. O. Caughman, P. L. Nguyen, and D. N. Ruzic, "Measurements of Time VaryingPlasma Potential, and Electron Temperature and Density in a 13.6 MHz RF Discharge," J. Vac. Sci.Technol., A, 7, 972-976 (1989).
18.
Ruzic, D. N., K. D. Schatz, and P. L. Long, "A Novel Apparatus to Investigate the Possibility ofPlasma-Assisted Cold Fusion," Fusion Technology, 16, 251-253 (1989).
19.
Ruzic, D. N., "The Effects of Surface Roughness Characterized by Fractal Geometry on Sputtering,"Nucl. Instr. Meth., B, 47, 118-125 (1990).
20.
Myers, A. M., D. N. Ruzic, R. C. Powell, J. E. Greene, and J. R. Abelson, "Energy and MassResolved Detection of Neutral and Ion Species using Modulated-Pole-Bias Quadrupole MassSpectroscopy," J. Vac. Sci. Technol., A, 8, 1668-1672 (1990).
21.
Ruzic, D. N., J. L. Wilson, "Time-Resolved Electric Probe Techniques in Radio Frequency Plasmas,"J. Vac. Sci. Technol., A, 8, 3746-3751 (1990).
22.
Caughman, J. B. O., D. N. Ruzic, D. J. Hoffman, R. A. Langley, and M. B. Lewis, "Ion EnergyMeasurements at the Surface of an Ion Cyclotron Range of Frequencies Antenna Faraday Shield," J.Vac. Sci. Technol., A, 8, 4011-4016 (1990).
23.
Cain, B. L., D. N. Ruzic, "A Small Electron Cyclotron Resonant Plasma-Based Neutral-Flux Ionizer,"Rev. Sci. Instrum., 61, 3473-3478, (1990).
24.
Ruzic, D. N., K. A. Werley, S. A. Cohen, "Neutral Gas Temperature and Densities in Divertor Regionand Pump Duct of ITER," J. Nucl. Mater., 176-177, 926-934 (1990).
25.
Brooks, J. N., D. N. Ruzic, "Modeling and Analysis of Surface Roughness Effects on Sputtering,Reflection, and Sputtered Particle Transport," J. Nucl. Mater., 176-177, 278-282 (1990).
26.
Zonca, F., S. A. Cohen, J. Cuthbertson, J. Timberlake, and D. N. Ruzic, "Measurements of PlasmaFlows in a Divertor Simulation," J. Nucl. Mater., 176-177, 746-749 (1990).
27.
Bastasz, R., S. J. Kilpatrick and D. N. Ruzic, "Charge-Exchange Neutral Hydrogen Measurements inTFTR Using Pd-Mos Microsensors," J. Nucl. Mater., 176-177, 1038-1043 (1990).
28.
Myers, A. M., J. R. Doyle, J. R. Abelson, and D. N. Ruzic, "Monte Carlo Simulations of MagnetronSputtering Particle Transport," J. Vac. Sci. Technol., A, 9, 614-618 (1991).
29.
Nguyen, P. L., R. B. Turkot Jr., and D. N. Ruzic, "Energy Distribution Measurements in RadioFrequency Plasma Discharges Using a Cubical Analyzer," J. Vac. Sci. Technol., A, 9, 682-687(1991).
30.
Rossnagel, S. M., K. Schatz, S. J. Whitehair, C. R. Guarnieri, D. N. Ruzic, and J. J. Cuomo, "TheEffects of Substrate Potentials on Electron Cyclotron Resonance Plasmas," J. Vac. Sci. Technol., A,9, 702-706 (1991).
31.
Myers, A. M., D. N. Ruzic, J. R. Doyle, "Monte Carlo Simulations of Sputter Atom Transport inLow-Pressure Sputtering; The effects of Interaction Potential, Sputter Distribution and SystemGeometry," J. Appl. Phys., 72, 3064-3071 (1992).
32.
Snipes, J. A., E. S. Marmar, J. L. Terry, M. G. Bell, R. V. Budny, K. W. Hill, D. L. Jassby, D. K.Mansfield, D. M. Meade, H. K. Park, J. D. Strachan, B. C. Stratton, E. J. Synakowski, G. Taylor, D.N. Ruzic, and M. Shaheen, "Wall Conditioning with Impurity Pellet Injection on TFTR," J. Nucl.Mater., 196-198, 686-691 (1992).
33.
Ruzic, D. N., D. R. Juliano, "Effect of Boundary Conditions on the Neutral Gas Temperatures andDensities in the ITER Divertor and Pump Duct," J. Nucl. Mater., 196-198, 194-198 (1992).
34.
Turkot, R. B. Jr. and D. N. Ruzic, "Time-and Space-Resolved Radio-Frequency Plasma ElectronEnergy Distributions from a Displacement-Current-Based Electric Probe Diagnostic," J. Appl. Phys.,73, 1-7 (1993).
35.
Schatz, K. D. and D. N. Ruzic, "An Electron-Beam Plasma Source and Geometry for PlasmaProcessing," Plasma Sources Sci. Technol., 1, 1-6 (1993).
36.
Ruzic, D. N., "The Effects of Elastic Scattering in Neutral Atom Transport," Physics of Fluids B, 5,3140-3147 (1993).
37.
Shaheen, M. A. and D. N. Ruzic, "Evolution of Atomic-Scale Surface Structures During IonBombardment: A Fractal Simulation," Vac. Sci. Technol., A, 11, (1993).
38.
Schmidt, J.A., K.I. Thomassen, D.N. Ruzic, plus many other authors too numerous to list, "TheDesign of the Tokamak Physics Experiment (TPX)," J. Fusion Technology, 12,3, 221-258 (1993).
39.
Leybovich A., T. Kuniya, P. C. Smith, M. B. Hendricks, and D. N. Ruzic, "Effects of TargetPolycrystalline Structure and Surface Gas Coverage on Magnetron I-V Characteristics," J. Vac. Sci.Technol., A, 12, 1618-1622 (1994).
40.
Hendricks, M. B., P. C. Smith, D. N. Ruzic, A. Leybovich, J. E. Poole, "Effects of Ion-InducedElectron Emission on Magnetron Plasma Instabilities," J. Vac. Sci. Technol., A, 12, 1408-1416(1994).
41.
Smith, P. C., B. Hu, and D. N. Ruzic, "Low Energy Ion-Induced Electron Emission FromGas-Covered Surfaces," J. Vac. Sci. Tech., A, 12, 2692-2700 (1994).
42.
Driemeyer, D., D. Bowers, J. Davis, D. Kubik, H. Mantz, M. McSmith, T. Rigney, C. Baxi, L. Sevier,M. Carelli, L. Green, D. Ruzic, D. Hayden, M. Gabler, J. Yuen, �ÏTER Divertor Research andDevelopment Activities,� Fusion Technology, 3, 603-610 (1994).
43.
Hill, D.N., B. Braams, J.N. Brooks, D.N. Ruzic, M. Ulrickson, K.A. Werley, R. Campbell, R.Goldston, T. Kaiser, G.H. Neilson, P. Mioduszewski, M.E. Rensink, T.D. Rognlien, �Divertor Designfor the Tokamak Physics Experiment,� J. of Nuclear Materials, 222, 698-702 (1995).
44.
Brooks, J. N., D.N. Ruzic, D.B. Hayden, and R.B. Turkot Jr., "Surface Erosion Issues and Analysisfor Dissipative Divertors," J. Nuclear Materials, 222, 269-273 (1995).
45.
Ruzic, D.N., "Neutral Atom and Molecular Transport in a Gaseous Divertor," J. Nuclear Materials,220-222, 1091-1096 (1995).
46.
Cheng, P.F., S.M. Rossnagel, D.N. Ruzic, "Directional Deposition of Cu into Semiconductor TrenchStructures using Ionized Magnetron Sputtering", J. Vac. Sci. Technol., B, 13, 203-208 (1995).
47.
Juliano, D.R., D.N. Ruzic, D. Hill, K.A. Werley, "Sensitivity of Neutral Throughput to Geometry andPlasma Position in the Tokamak Physics Experiment Divertor Region," Fusion Technology, 29,269-276 (1996).
48.
Ruzic, D.N., �Hydrogen Collision Dynamics on a Rough Nickel Surface,� Plasma Science, 24, 81-82(1996).
49.
Kushner, M.J., W.Z. Collison, D.N. Ruzic, �Electron-Beam Controlled Radio Frequency Dischargesfor Plasma Processing,� J. Vac. Sci. Technol., 14(4), 2094-2101 (1996).
50.
Stotler, D.P., C.H. Skinner, R.U. Budny, A.T. Ramsey, D.N. Ruzic, R.B. Turkot Jr., �Modeling ofNeutral Hydrogen Velocities in Tokamak Fusion Test Reactor,� Phys. of Plasmas, 3(11), 4084-4094(1996).
51.
Rossnagel, S.M., C. Nichols, S. Hamaguchi, D.N. Ruzic, R. Turkot, �Thin, High Atomic WeightRefractory Film Deposition for Diffusion Barrier, Adhesion Layer, and Seed Layer Applications,� J.Vac. Sci. Technol., B, 14 (3), 1819-1827 (1996).
52.
Hayden, D.B. and D.N. Ruzic, �Simulation of Neutral Atoms and Molecules in an InternationalThermonuclear Experimental Reactor High-Pressure (1Torr) Ultra-High Recycling Divertor,� FusionTechnol., 31, 128-134 (1997).
53.
D.N. Ruzic and D.B. Hayden, �Momentum and Energy Transfer via Neutral Atoms and Molecules inan International Thermonuclear Experimental Reator Low-Pressure (10-mTorr) Gas Target Divertor,�Fusion Technol., 31, 123-127 (1997).
54.
Brooks, J.N., R. Causey, G Federici, D.N. Ruzic, �Assessment of Erosion and Surface TritiumInventory Issues for the ITER Divertor,� J. Nuclear Materials, 241-243, 294-298 (1997).
55.
Ruzic, D.N., Preston C. Smith, R.B. Turkot Jr., �Measurement and Modeling of theAngular-Resolved Sputtering Yield of D-Soaked Be by 100, 300, 500 and 700 eV D+,� J. NuclearMaterials, 241-243, 1170-1174 (1997).
56.
Brooks J.N., D.N. Ruzic, D.B. Hayden, �Sputtering Erosion of Beryllium Coated Plasma FacingComponents�General Considerations and Analysis for ITER Detached Plasma Regime,� FusionEngineering and Design, 37, 332-337 (1997).
57.
Green, K.M., D.B. Hayden, D.R. Juliano, and D.N. Ruzic, �Determination of Flux Ionization FractionUsing a Quartz Crystal Microbalance and a Gridded Energy Analyzer in an Ionized MagnetronSputtering System,� Review of Scientific Instruments, 68, 4555-4560 (1997).
58.
Haynes, L.A., J.P. Kelly, D.N. Ruzic, �Neutral Atom Modeling of the TFTR First Wall, Pump Ducts,and Neutral Beams,� Fusion Technology, 33, 74-83 (1998).
59.
Hayden, D.B., D.R. Juliano, K.M. Green, D.N. Ruzic, C.A. Weiss, K.A. Ashtiani, T.J. Licata,�Characterization of Magnetron-Sputtering with Partially Ionized Aluminum Deposition,� J. Vac.Sci. Tech., A, 16(2), 624-627 (1998).
60.
Smith, P.C. and D.N. Ruzic, �Low-Energy (10-700eV) Angularly Resolved Sputtering Yields for D+on Be,� Nuclear Fusion, 38(5), 673-680 (1998).
61.
Brooks, J.N., D. Alman, G. Federici, D.N. Ruzic, and D.G.Whyte, �Erosion Redeposition Analysis:Status of Modeling and Code Validation for Semi-Detached Tokamak Edge Plasmas,� J. NuclearMaterials, 266-269, 58-66 (1999).
62.
Ruzic, D. N., M.C. Allain, and R.V. Budny, �The Effect of Lithium Wall Conditioning in TFTR onPlasma-Surface Interactions,� J. Nucl. Mater., 266-269, 1303-1308 (1999).
63.
Hayden, D.B., D.R. Juliano, M.N. Neumann, M.M. Allain, D.N. Ruzic, �Helicon Plasma Source forIonized Physical Vapor Deposition,� Surf. Coating Tech., 121, 401-404 (1999).
64.
Smith, P.C. and D.N. Ruzic, �Low-energy Ar+ Ion Induced Angularly Resolved AI(100) and AI(110)Sputtering Measurements,� J. Vac. Sci. and Tech., A17, 3443-3448, (1999)
65.
Wang, Z., S.A. Cohen, D.N. Ruzic and M.J. Goeckner, �Nitrogen Atom Energy Distributions in aHollow-Cathode Planar Sputtering Magnetron�, Phys Rev E., 61, 1904-1911 (2000).
66.
Alman, D.A. and D.N. Ruzic, �A Hydrocarbon Reaction Model for Low Temperature HydrogenPlasmas and an Application to the Joint European Tours,� Physics of Plasmas, 7, 1421-1432 (2000).
67.
Allain, M.M C. D.B. Hayden, D.R. Juliano, D.N. Ruzic, �Characterization of magnetron-sputteredpartially ionized deposition as a function of metal and gas species�. J. Vac. Sci. Technol., A, 13,797-801 (2000).
68.
Mattas, R.F, J.P. Allain, R. Bastasz, J.N. Brooks, T. Evans, A. Hassanein, S. Luckhardt, K. McCarthy,P. Mioduszewski, R. Maingi, E. Mogahed, R. Moir, S. Molokov, N. Morley, R. Nygren, T. Ronglien,C. Reed, D.N. Ruzic, I. Svitoslavsky, D. Sze, M. Tillack, M. Ulrichson, P.M. Wade, R. Wooley andC. Wong, �ALPS-Advanced Limiter-Divertor Plasma-Facing Systems�, Fusion Energy and Design,49-50, 127-134 (2000).
69.
Brooks, J.N., T. Rognlien, D.N. Ruzic, J.P. Allain, �Erosion/Redeposition Analysis of Lithium-BasedLiquid Surface Divertors�, J. Nucl. Materials, 290-293, 185-190 (2001).
70.
Allain, J. P., D.N. Ruzic, M.R. Hendricks, �D, He and Li Sputtering of Liquid Eutectic Sn-Li�, J.Nucl. Materials, 290-293, 33-37 (2001).
71.
Allain, J. P., D.N. Ruzic, M.R. Hendricks, �Measurements and Modeling of D, H, and Li Sputteringof Liquid Lithium�, J. Nucl. Materials, 290-293, 1809-184 (2001).
72.
Ranjan, R., J.P. Allain, M.R. Hendricks, D.N. Ruzic, �Absolute Sputtering Yield of Ti/TiN byAr+/N+ at 400 - 700 eV�, J. Vac. Sci. Technol., A, 19, 1004-1007 (2001).
73.
Allain, J.P., D.N. Ruzic, �Measurements and Modeling of Solid Phase Lithium Sputtering�, NuclearFusion, 42, 202-210 (2002).
74.
Juliano, D.R., D.N. Ruzic, M.M.C. Allain, D.B. Hayden, �Influences on Ionization Fraction in anInductively Coupled Ionized Physical Vapor Deposition Device Plasma�, J. Appl. Phys. 91, 605-12(2002).
75.
Li, Ning, J.P. Allain, D.N. Ruzic, �Enhancement of Aluminum Oxide Physical Vapor Depositionwith a Secondary Plasma�, Surf. and Coatings Technol., 149, 161-170 (2002).
76.
Allain, J.P., D.N. Ruzic. �Deuterium Treatment Effects on Lithium and Tin-Lithium Sputtering inSolid and Liquid Phase.� Hydrogen and Heilium Recycling at Plasma Facing Materials, Ed. AhmedHassanein. Netherlands: Kluwer Academic Publishers, 2002. pg. 73-82.
77.
Allain, J.P., M. Nieto, M.D. Coventry, M.J. Neumann, E. Vargas-Lopes, D.N. Ruzic,�FLIRE�Flowing Liquid Surface Retention Experiment, Design and Testing�, Fusion Engineeringand Design, 61-62, 245-250 (2002).
78.
Coventry, M.D., J.P. Allain, D.N. Ruzic, �D+, H+, and He+ Sputtering of Solid and Liquid PhaseTin�, J. Nucl. Mater., 313-316, 636-640 (2003).
79.
Allain, J.P., M.D. Coventry, D.N. Ruzic, �Temperature-Dependence of Liquid Lithium Sputtering�,J. Nucl. Mater. 313-316, 641-645 (2003).
80.
Ruzic, D.N., M. Nieto, J.P. Allain, M.D. Coventry, �Hydrogen and Helium Retention and Diffusivityin Flowing Liquid Lithium�, J. Nucl. Mater. 313-316, 646-650 (2003).
81.
Brooks, J.N., A. Kirschner, D.G. Whyte, D.N. Ruzic, D.A. Alman, �Advances in the Modeling ofChemical Erosion/Redeposition of Carbon Divertors and Application to the JET Tritium CodepositionProblem�, J. Nucl. Mater., 313-316 424-428 (2003).
82.
Alman, D.A., D.N. Ruzic, J.N. Brooks, �Molecular Dynamics Calculation of Carbon/HydrocarbonReflection Coeficients on a Graphite Surface Employing Distrubuted Computing�, J. Nucl. Mater.313-316, 182-186 (2003).
83.
84. Nieto M. Ruzic DN. Allain JP. Experimental measurements of helium retention in flowing liquidlithium. Fusion Science & Technology, 44:1, 232-236 (2003).
84.
Alman, D.A, D.N. Ruzic, �Molecular Dynamics Simulation of Hydrocarbon Reflection andDissociation Coefficients from Fusion-Relevant Carbon Surfaces�, Physica Scripta, T111, 145-151(2004).
85.
Coventry, M.D., J.P. Allain, D.N. Ruzic, �Temperature Dependance of Liquid Sn Sputtering by lowenergy He and D bombardment�, Journal of Nuclear Materials 335, 115-120 (2004).
86.
Li, N., D.N. Ruzic, R.A. Powell, �Chemically Enhanced Physical Vapor Deposition (CEPVD) ofTaN diffusion barrier layers for ULSI devices�, J. Vac. Sci. Technol. B 22(6), 2734-2742, Nov/Dec2004.
87.
Allain, J.P., M. Nieto, M.D. Coventry, R. Stubbers, D.N. Ruzic, �Studies of liquid-metal erosion andfree surface flowing liquid lithium retention of helium at the University of Illinois�, FusionEngineering and Design 72 (2004) 93-110.
88.
Jurczyk, B.E., E. Vargas-Lopez, M. N. Neumann, D. N. Ruzic, �Illinois Debris-mitigation EUVApplications Laboratory (IDEAL)�, Microelectronics Engineering 77 (2005) 103-109.
89.
Vargas-López, E., B E Jurczyk, M A Jaworski, M J Neumann, D N Ruzic, �Origins of debris andmitigation through a secondary RF plasma system for discharge-produced EUV sources�,Microelectronics Engineering 77 (2005) 95-102.
90.
Brooks, J.N., J.P. Allain, D.A. Alman and D.N. Ruzic, �Erosion, transport, and tritium codepositionissues of a beryllium wall tokamak�, Fusion Engineering and Design 72 (2005) 363-375.
91.
Stubbers, R., W. Olczak, M. Nieto, D. N. Ruzic, �Measurement of hydrogen absorption in flowingliquid lithium in the flowing lithium retention experiment (FLIRE)�, Journal of Nuclear Materials337-339 (2005) 1033-1037.
92.
Qiu, Hua-Tan, D.N. Ruzic, �Molecular dynamics modeling of deuterium in liquid lithium surfaces�,Journal of Nuclear Materials 337-339 (2005) 1029-1032.
93.
M.D. Coventry, M.D., and D.N. Ruzic, �Incident-mass dependence of temperature-enhancedion-induced sputtering in liquid metals�, Journal of Nuclear Materials 337-339 (2005) 1015-1018.
94.
Brooks, J.N., J.P. Allain, R. Bastasz, R. Doerner, A. Hassanein, R. Kaita, S. Luckhardt, R. Maingi, R.Majeski, N. Morely, N. Narula, T. Rognlien, D. Rudakov, D. Ruzic, R, Stubbers, M. Ulrickson,C.P.C. Wong, A. Ying, �Overview of the ALPS Program�, Fusion Science Technology, 47 (2005)669-678
95.
Allain, J.P., D. N. Ruzic, M.D. Coventry, D. A. Alman, M.N. Nieto, �A Model for Ion-BombardmentIndusced Erosion Enhancement with Target Temperature�, Nucl. Instrum. and Meth. B, 239 (2005)347-355.
96.
K.C. Thompson, E.L Antonsen, M.R. Hendricks, B.E. Jurczyk, M. Williams, D.N. Ruzic,�Experimental test chamber design for optics exposure testing and debris characterization of a xenondischarge produced plasma source for extreme ultraviolet lithography�, MicroelectronicsEngineering, 83 (2006) 476-484.
97.
Nieto, M., D.N. Ruzic, W. Olczak, R. Stubbers, �Measurement of Implanted Helium ParticleTransport by a Flowing Liquid Lithium Film�, J. Nucl. Mater., 350 (2006) 101-112.
98.
Ning Li, P.W. Brenner, D.N. Ruzic, �An Integrated model for the Chemically Enhanced PhysicalVapor Deposition (CEPVD) of tantalum nitride-based FILMS�, J. Vac. Sci. Technol., B, 24(3),(2006) 1071-1087.
99.
Erik L. Antonsen, Keith C. Thompson, Matthew R. Hendricks, Darren A. Alman, Brian E. Jurczyk,D. N. Ruzic, �Ion Debris Characterization from a Z-Pinch Extreme Ultraviolet Light Source�, J.Appl. Phys., 99 063301 (2006)
100.
M. A. Jaworski, B. E. Jurczyk, Erik L. Antonsen, D. N. Ruzic, �Direct current Magnetic insulation ofan immersed RF antenna�, Plasma Source Science and Technology 15, 474-478 (2006)
101.
Huatan Qiu, Darren A. Alman, Keith C. Thompson, Joshua B. Spencer, Erik L. Antonsen, Brian E.Jurczyk, D. N. Ruzic, Tim P. Spila, "Characterization of collector optic material samples before andafter exposure in laser produced plasma and discharge produced plasma EUV sources", J.Microlithography, Microfabrication, and Microsystems, 5(3), 033006(1-11),2006
102.
Huatan Qiu, Keith C. Thompson, S.N. Srivastava, Erik L. Antonsen, Darren A. Alman, Brian E.Jurczyk, D.N. Ruzic, �Optical exposure characterization and comparisons for discharge producedplasma Sn extreme ultraviolet system�, J. Microlithography, Microfabrication, and Microsystems,5(3), 033007(1-11), 2006
103.
Darren A. Alman, Huatan Qiu, T. Spila, Keith C. Thompson, Erik L. Antonsen, Brian E. Jurczyk,D.N. Ruzic, �Characterization of Collector Optic Material Samples Exposed to a DPP EUV LightSource�, J. Microlithography, Microfabrication, and Microsystems, 6(1), 2007
104.
T.K. Gray, M.A. Jaworski, D.N. Ruzic, �Target heat loading due to fast, transient heat pulsesproduced from a conical -pinch as a prototype for benchmarking simulations of transient heat loads�, J. of Nuclear Materials, 363-365( 2007) 1032-1036
105.
D.N. Ruzic, K. Thompson, B. Jurczyk, E. L. Antonsen, S. N. Srivastava, J. Spencer, �Reduction ofIon Energies From A Multicomponent Z-Pinch Plasma�, IEEE Transactions on Plasma Science,35(3) 606-613, June 2007
106.
S. N. Srivastava, K.C. Thompson, E. L. Antonsen, H. Qiu, J.B Spencer, D. Papke, D. N. Ruzic,�Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources� J. of
107.
Applied Physics, 102, 023301, 2007(*) J.P Allain, M.D. Coventry, D.N. Ruzic, "Collisional and thermal effects on liquid lithiumsputtering", Physical Review B, 76 (2007) 205434-1 to 12.
108.
(*) C. Castano, M. Aghazarian, D.N. Ruzic,�Preliminary evidence of field induced rhenium etchingby XEF2 at high vacuum� J. Applied Physics,103, 044901-4, 2008
109.
(*) H. Shin, S. N. Srivastava, D. N. Ruzic, �Tin removal from extreme ultraviolet collector optics byinductively coupled plasma reactive ion etching� J.Vac. Sci. Tech. May 2008
110.
(*) M. A. Jaworski, C. Y. Laua, D. L. Urbansky, M. B. Malfa, T. K. Gray, M.J. Neumann, and D. N.Ruzic �Observations of liquid lithium uptake in a porous molybdenum foam� J. of Nuclear Materials.378, pp. 105-109, May (2008).
111.
(*) H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, D. N. Ruzic �TemperatureDependence of Mo-Au Gibbsian Segregating Alloys� accepted in Journal of Micro/nanolithographyMems & Moems, (2008).
112.
(*) Huatan Qiu, Shailendra N. Srivastava, Keith C. Thompson, Martin J. Neumann, David N. Ruzic,"Time Exposure Performance of Mo-Au Gibbsian Segregating Alloys for EUV Collector Optics",Optical Engineering, v 48, n 5, p 056501 (10 pp.), May 2009.
113.
(*) H. Shin, J. Sporre, R. Raju, and D. N. Ruzic, �Reflectivity degradation of grazing incident EUVmirrors by EUV exposure and carbon contamination,� Microelectronics Engineering, v 86, n 1, p99-105 (2009).
114.
(*) M. Jarworski, N.B. Morley, and D. N. Ruzic, �Thermocapillary and Thermoelectric Effects inLiquid Lithium Plasma Facing Components�, Journal of Nuclear Materials, 390-391, pp.1055-1058 (2009).
115.
(*) H. Qiu, S. N. Srivastava, K. C. Thompson, M. J. Neumann, D. N. Ruzic �The Effectiveness ofMo-Au Gibbsian Segregating (GS) Alloys and The Surface Removal Effect on the GS Performancefor EUV Collector Optics� Optics Engineering, 48, 056501 (2009).
116.
(*) J. Sporre, C. H. Castano, R. Raju, and D. N. Ruzic, �Ionic Debris Measurement of Three ExtremeUltraviolet Sources," Journal of Applied Physics, 106, 4 (2009).
117.
(*) M. Racic, K. Ibano, R. Raju and D.N. Ruzic, �Physical Erosion Studies of Plain and LithiatedGraphite, Journal of Nuclear Materials, 390-391, pp. 1043-1047 (2009).
118.
(*) C. Y. Hwang, S. Jung, Y. S. Hwang and B. C. Cho, �Lethal Effects of Pulsed High-VoltageDischarge on Marine Plankton and Escherichia Coli�, Water Air & Soil Pollution (2010) 213:161�16
119.
(*) L. Wu, E. Ko, A. Dulkin, K. J. Park, S. Fields, K. Leeser, L. Meng and D. N. Ruzic, � Flux andenergy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper�, Review of Scientific Instruments 81, 123502 (2010)
120.
(*) L. Meng, R. Raju, R. Flauta, H. Shin, and D.N. Ruzic, �In situ Plasma Diagnostics Study of aCommercial High-Power Hollow Cathode Magnetron Deposition Tool�, Journal of Vacuum Scienceand Technology, A 28, 1, (2010).
121.
(*) M. A. Jaworski, T. K. Gray, M. Antonelli, J. J. Kim, C.Y. Lau, M. B. Lee, M. J. Neumann, W. Xu,and D. N. Ruzic, �Thermoelectric Magnetohydrodynamic Stirring of Liquid Metals� Physics ReviewLetters, 104, 094503 (2010).
122.
(*) R. Raju, L. Meng, R. Flauta, H. Shin, M. J. Neumann, T. A. Dockstader and D. N. Ruzic,�Development and Characterization of a Secondary RF Plasma-Assisted Closed-Field DualMagnetron Sputtering System for Optical Coatings on Large-Area Substrates�, Plasma Sources andTechnology, 19, 025011 (2010).
123.
(*) V. Surla, M. A. Jaworski, T. K. Gray, K. Ibano, W. Xu, M. J. Neumann, and D. N. Ruzic,�Lithium research as a Plasma Facing Cmponent Material at the University of Illinois� Thin SolidFilms, Vol. 518, No. 22, pp. 6663-6666 (2010)
124.
(*) C. R. Struck, R. Flauta, M.J. Neumann, K.N. Kim, R. Raju, R. L. Bristol, D.N. Ruzic, �GrazingIncidence Broad Ion Beams for Reducing Line-Edge Roughness,� Journal of Micromechanics andMicroengineering, Vol. 20, No. 7 (2010)
125.
(*) K. Ibano, D. Ruzic, and V. Surla, �Sputtering and thermal evaporation studies of lithiated ATJgraphite,� IEEE Transactions on Plasma Science, Vol. 38, No. 3 part 1, p 341-345 (2010).
126.
(*) D. N. Ruzic and A. J. Paul, �Guest editorial special issue on symposium on fusionengineering,�IEEE Transactions on Plasma Science, Vol. 38, No. 3 Part 1, p 222-223 (2010).
127.
2. Articles In Conference Proceedings
Ruzic, D. N., and S. A. Cohen, "Total Scattering Cross-Sections and Interatomic Potentials forNeutral Hydrogen and Helium on Some Noble Gases," Proc. of the 14th ICPEAC Conference, PaloAlto, CA (July, 1985).
1.
Caughman, J. B. O., D. N. Ruzic, and D. J. Hoffman, "Experimental Evidence of Increased ElectronTemperature, Plasma Potential and Ion Energies Near the Surface of an ICRF Antenna FaradayShield", Proc. of the RF Edge Workshop, Garching FRG (October 1989).
2.
Cohen, S. A., B. J. Braams, J. N. Brooks, J. C. Cummings, F. Engelmann, M. F. A. Harrison, E.Hotston, Yu. Igitkhanov, S. Krasheninnikov, A. Kukushkin, T. Mizoguchi, G. W. Pacher, H. D.Pacher, L. J. Perkins, A. Pigarov, V. I. Pistunovich, D. E. Post, A. Pozharov, M. H. Redi, D. N. Ruzic,M. Shimada, M. Sugihara, T. Takizuka, N. A. Uckan, G. Vieider, R. Watson, K. A. Werley, J.Wesley, and the participants in the ITER Conceptual Design Activities, "Power and Particle Controlfor ITER," Proc. of the 13th International Conference on Plasma Physics and Controlled NuclearFusion Research, Washington, DC (October, 1990.
3.
Singer, C. E. W. Choe, D. Cox, T. Djemil, E. Ghanem, J. Kinsey, G. Miley, J. Park, D. N. Ruzic, S.Hu, N. Tiouririne-Ougouag, V. Varadarajan, G. Bateman, R. R. Dominguez, and R. E. Waltz,"Predictive Modelling of Tokamak Plasmas," Proc. of the 13th International Conference on PlasmaPhysics and Controlled Nuclear Fusion Research, Washington, DC (October, 1990).
4.
Ruzic, D. N., S. L. Balog, R. B. Turkot, Jr., "Time-Resolved Electric Probe Measurements of Ar andCH4 Capacitively-coupled Plasmas," Proc. of the 12th Dry Processing Symposium, Tokyo, Japan(November, 1990).
5.
Ruzic, D. N., D. R. Juliano, R. B. Turkot, Jr., K. A. Werley, M. Ulrickson, D. Stutter, D. Hill, "TPxDivertor Design: Neutral Atom Behavior and Optimization for Pumping," Proc. of 15th Symp. onFusion Engineering, Hyannis, MA (October, 1993).
6.
Shapira, M., G. H. Miley, D. N. Ruzic, and Y. C. Francis, �Theta Pinch to Study Plasma-PlasmaInteraction as a Fusion Reactor Ignitor M,� Ninth Int�l Conf. On Emerging Nuclear Energy Systems(ICNES �98), Tel Aviv, Israel, (June 28-July 2, 1998).
7.
Lopez, E. V., B. E. Jurczyk, M. A. Jaworski, M. J. Neumann, and D. N. Ruzic, �Origins of debris andmitigation through a secondary RF plasma system for discharge-produced EUV sources,� Proc. of theInternational Society for Optical Engineering, Santa Clara, CA (February, 2004).
8.
Jurczyk, B. E., E. V. Lopez, M. J. Neumann, and D. N. Ruzic, �Illinois Debris-mitigation EUVApplications Laboratory (IDEAL),� Proc. of the International Society for Optical Engineering, SantaClara, CA (February, 2004).
9.
Ruzic, D. N., M. Nieto, M.D. Coventry, W. Olczak, H. Qiu, R. Stubberts, � Plasma Liquid-MetalInteraction Experiments and Modelling�, EPS (June 2004)
10.
Jaworski, M. A., M. J. Williams, E. L. Antonsen, B. E. Jurczyk, D. N. Ruzic, and R. Bristol,�Secondary RF plasma system for mitigation of EUV source debris and advanced fuels,� Proc. of theInternational Society for Optical Engineering, San Jose, CA (March, 2005).
11.
Jurczyk, B. E., D. A. Alman, E. L. Antonsen, M. A. Jaworski, M. J. Williams, D. N. Ruzic, T. Spila,G. Edwards, S. Wurm, O. Wood, and R. L. Bristol, �The Effect of Debris on Collector Optics, itsMitigation and Repair: Next-Step a Gaseous Sn EUV DPP Source,� Proc. of the International Societyfor Optical Engineering, San Jose, CA (March, 2005).
12.
Shin, H., M. J. Neumann, E. Ritz, R. A. DeFrees, D. A. Alman, B. E. Jurczyk, D. N. Ruzic, R. Bristol,B. Marx, and A. Ershov, �Evaluating Advanced Fuel Candidates in Surface Clean of Optics byPlasma Exposure (SCOPE),� Proc. of the International Society for Optical Engineering, San Jose, CA(March, 2005).
13.
Alman, D. A., H. Qiu, K. C. Thompson, E. L. Antonsen, J. B. Spencer, M. R. Hendricks, B. E.Jurczyk, D. N. Ruzic, T. Spila, G. Edwards, S. Wurm, O. Wood, and R. Bristol. �UIUC CollectorErosion and Optical Lifetime Project Results: Time Dependent Exposures,� Proc. of the InternationalSociety for Optical Engineering, San Jose, CA (March, 2005).
14.
Antonsen, E. L., K. C. Thompson, M. R. Hendricks, D. A. Alman, B. E. Jurczyk, D. N. Ruzic, T. D.Chinh, G. Edwards, S. Wurm, O. Wood, and R. Bristol, �XCEED: XTREME Commercial EUVExposure Diagnostic Experiment,� Proc. of the International Society for Optical Engineering, San
15.
Jose, CA (March, 2005).Qui, H., D. A. Alman, K. C. Thompson, M. D. Coventry, J. B. Spencer, E. L. Antonsen, B. E.Jurczyk, D. N. Ruzic, T. P. Spila, G. Edwards, S. Wurm, O. Wood, and R. Bristol, �Characterizationof collector optic material samples before and after exposure in LPP and DPP EUV sources,� Proc. ofthe International Society for Optical Engineering, San Jose, CA (March, 2005).
16.
Gray, T.K, D. N. Ruzic, R. Stubbers, �ELM Simulating Plasma Gun Development and Experiments�,EPS, (June, 2005)
17.
Gray, Travis K, Benjamin C. Masters, Robert Stubbers, David N. Ruzic, "Density and TemperatureMeasurements in the ELM Simulating Plasma (ESP) Gun," Twenty-First IEEE/NPS Symposium onFusion Engineering. SOFE, ( Sept. 2005)
18.
Lytle, W.M, M. J. Neumann, D. N. Ruzic, �Plasma- Assisted Cleaning by Electrostatics (PACE)�,Proc. Of SPIE, (2006)
19.
Qiu, Huatan, Keith C. Thompson, Shailendra N. Srivastava, Erik Antonsen, Darren Alman, BrianJurczyk, David Ruzic, � Optical Exposure Characterization and Comparisons for Sn Euv Systems,�Proc of SPIE (2006)
20.
Shin Hyung Joo, Brian Jurczyk, D. N. Ruzic, Robert Bristol, �Halide etching for tin EUV opticscleaning�,Proc of SPIE San Jose, CA, (Feb. 2006)
21.
Neumann, M.J, M. Cruce, P. Brown, S. N. Srivasta,, D. N. Ruzic, �Effect of deposition, sputtering,and evaporation of lithium debris buildup on EUV optics�, SPIE, San Jose, CA (2007)
22.
Thompson, K. C, S. N. Srivastava, E. L, D. N. Ruzic, �Debris mitigation techniques for a Sn andXe-fueled EUV light source.� SPIE, San Jose, CA, (2007).
23.
Qiu, H., S.N. Srivastava, J.C. Anderson, D.N. Ruzic, �Gibbsian Segregating (GS) Alloys: A PotentialSolution to Minimize Collector Degradation,� Proc. of SPIE (2007)
24.
Shin, H., S. N. Srivastava, D. N. Ruzic, �Contamination Removal from Collector Optics and Masks:An Essential Step for Next Generation Lithography� Proc. Of SPIE San Jose, CA, (March 2007)
25.
Gray, T.K., M.J. Williams, D. N. Ruzic, "Overview and Status of the Divertor Erosion and Vaporshielding eXperiment (DEVeX)," SOFE 2007. 2007 IEEE 22nd Symposium on , (June 2007)
26.
Racic, M.Z., D.N. Ruzic, R. Raju, C. Struck, C. H. Castano, "Physical and Chemical Erosion of LiTreated ATJ Graphite for NSTX," SOFE 2007. 2007 IEEE 22nd Symposium ( June 2007)
27.
Shin, H. R. Raju, D. N. Ruzic, �Plasma Sn Cleaning integrated in EUV source system� Proc. ofSPIE, (2008)
28.
Castano C. H., D. N. Ruzic, S. N. Srivastava, K. C. Thompson, J. Sporre, �Ionic Debris Assessmentof Various EUVL Systems�, Proc of SPIE, (March, 2008)
29.
Caughman, J.B.O., C. Castano-Giraldo , M. Aghazarian, F.W. Baity, D.A. Rasmussen, and D.N.Ruzic, �Study of RF Breakdown Mechanisms Relevant to an ICH Antenna Environment,� AIPConference Proceedings CP933, Radio Frequency Power (March, 2008).
30.
Lytle, W. M., R. Raju, H. Shin, C. Das, M. J. Neumann, D. N. Ruzic, �Plasma Cleaning ofNanoparticles From EUV Mask Materials by Electrostatics� SPIE 2008 (April 2008)
31.
Rovey, J.L., Stubbers, R.A., Jurczyk, B.E., Williams, M.J., Manley, F.T., and Ruzic, D.N., �PlasmaProperties in the Magnetic Nozzle of an Electron Cyclotron Resonance Plasma Source,�AIAA-2008-5191, 44th AIAA Joint Propulsion Conference, New Haven, CT. July 21-23, 2008.
32.
D. N. Ruzic, R. Raju, J. Sporre, H. Shin, W. M. Lytle and M. J. Neumann, �EUVL ContaminationControl Studies for High Volume Manufacturing�, Proc. of SPIE, (2008).
33.
W. M. Lytle, D. S. Szybilskia, C. E. Dasa, R. Raju, V. Surla, M. J. Neumann, and D. N. Ruzic,�Removal of Particles from Lithographic Masks Through Plasma Assisted Cleaning by MetastableAtomic Neutralization�, Proc. of SPIE Asia, (2009).
34.
W.M. Lytle, R.E. Lofgren, V. Surla, M. J. Neumann, and D.N. Ruzic, �Removal of Carbon andNanoparticles from Lithographic Materials by Plasma Assisted Cleaning by Metastable AtomNeutralization (PACMAN)�, Proc. of SPIE (2010).
35.
f. Pending Publications
g. Invited Lectures
Title Conference Location Year URLMolecular Dynamics Calculations ofCarbon/Hydrocarbon ReflectionCoefficients on Hydrogenated GraphiteSurfaces
10th International Workshopon Carbon Materials forFusion Application
Jülich,Germany
September,2003
RF Plasma System for Debris Mitigation inEUV Sources
SPIE Microlithography 2004 Santa Clara,CA
February,2004
Identity of Debris Components in a DPFand Secondary Plasma Effects
ISMT Source Workshop Santa Clara,CA
February,2004
Debris Mitigation in EUV Lithography Heraus InternationalConference on EUV
Bad-Honef,Germany
June 2004
Hydrogen Retention and Helium Pumpingby Flowing Liquid Lithium: A Path to aCompact (and therefore less costly)Magnetic Fusion Power Reactor
American Physical SocietyDivision of Plasma PhysicsAnnual Conference
Savannah,GA
November2004
MD and Hybrid-MD Simulations ofPlasma-Surface Interactions
Plasma Surface Interactionsfor Fusion
Oak Ridge,TN
March 2005
Plasma-Based Techniques to ReduceParticle Contamination
30th SPIE MicrolithographyConferences
San Jose, CA March 2005
Progress toward Sn DPP and LPP Solution:a Source-Collector perspective
5th International Symposiumon EUV Lithography
San Diego,CA
November2005
EUVL Research at Illinois: Steps toward anintegrated solution
INTEL Hillsboro, OR December2005
Next steps for Tin EUV source-opticsdevelopment
SPIE Emerging LithographicTechnologies
San Jose CA February2006
University R&D and Moore�s Law: Roleof University R & D in EUVLdevelopment
SEMATCH Austin, TX May 2006
Collector-optics development for Sn EUVsource
Media Lario Technologies Italy June 2006
EUV Lithography: A new world for thinfilms and plasma science
Brazil Vacuum Society Brazil July 2006
EUV Lithography for Microelectronics:Promise and challenges
Korean Vacuum Society Korea September2006
Overview of plasma science andtechnology in the world
Korean Vacuum Society Korea September2006
Extending the lifetime of Collector optics:advanced debris mitigation schemes andcleaning methods
6th International EUVSymposium
Barcelona,Spain
October 2006
Advanced debris mitigation schemes andcleaning methods: Collector optics lifetimeextension
SPIE Advanced Lithography San Jose, CA February2007
PVD- 30 years of filling interconnects Novellus InterconnectSymposium
Beijing andShanghi,China
May 2007
Nanoparticle Removal by Plasma-AssistedCleaning by Electrostatics (PACE),
Sematech Mask CleaningSymposium
Monterey,CA
September2007
Are Debris Mitigation Schemes GoodEnough?
International Symposium onEUV Lithography
Sapporo,Japan
October 2007
Lifetime determination of EUV sources:reflectivity, neutral, and ion debrismeasurement
SPIE Advanced Lithography San Jose, CA February2008
SPIE Advanced Lithography Austin, TX April 2008
Current results of the Plasma AssistedCleaning by Electrostatics Experiment Effective Debris Detection, Mitigation andCleaning Methods for Source - CollectorOptics
International Symposium onEUV Lithograph
Lake Tahoe,CA
October 2008
EUVL contamination control studies forhigh-volume manufacturing
SPIE Lithography-Asia TaipeiTaiwan
November2008
Advances in Plasma Sciences andTechnology
ECM-107/1UVSTA Champaign,IL
April 2009
Lithium Walls: The Ultimate Technologyfor Fusion
ICMAP Busan, Korea September2009
Invited Talk APCPST 2010 Leju, Korea July 2010 Invited Talk iPlasma Nano II Sydney,
Australia December2010
h. Other Publications (patents, bulletins or reports, magazine articles, etc.)
D. N. Ruzic, R. Raju, M. J. Neumann, J. Sporre, and W. M. Lytle, �Challenges and Solutions forEUVL at 22 nm�, SPIE Newsroom article, 10.1117/2.1200812.1392 (2008).
1.
1. Patents
"Surface Modifications to Waveguides," US #4,414,244 (1983)1. "Glow Discharge Vacuum Introduction System," disclosed in 19852. "An Inductively Coupled Plasma Processing System Utilizing a Variable Resistance Chamber toObtain Control of Plasma Parameters," disclosed in 1987
3.
�A Compact Remote Helicon Plasma Source for Ionized Physical Vapor Deposition and OtherApplications,� disclosed 1998
4.
�Pulsed Sheet-Electron-Beam Plasma Processing Device,� disclosed in 19965. "Pulsed Electron-Gun Plasma-Assisted Deposition�, disclosed in 19976. �Ionized Physical Vapor Deposition utilizing an External Source�, disclosed 1997, applied for 19987. �Tin Source for Extreme Ultra Violet Lithography,� TF02115, disclosed 20028. �Plasma Filter for Extreme Ultra Violet Lithography,� TF02117, disclosed 20029. �Plasma Treatment of Polymers to Repel Water and Reduce Biofouling,� TF02037, disclosed 200210. �Erosion-Resistant Self Healing, Self-Cleaning Collector Optics for EUV Lithography� TF03076,disclosed 2003
11.
�Chemically Enhanced Physical Vapor Deposition�, US #6, 841, 044 B1 (2005)12. �Submicron Particle Removal�, applied for Dec. 5, 2005, serial no. 11/293, 90313. �Plasma-Based Debris Mitigation for Extreme Ultraviolet (EUV) Light Source� serial no. 10/628,129 (2005), US #7, 230, 258 (2007)
14.
"Line-Edge Roughness Reduction Technique", TF07128, disclosed October 2007, patent applied for15. "Method to Produce Nanoscale Three Dimensional Porous Silicon Patterns and Applications inSelf-Integrated High Aspect Ratio Vias or Trenches with Build-in Low K Porous Dielectrics andWafer Level Packaging Integration", TF08145, disclosed July 2008,patent applied for
16.
"Plasma-Assisted Cleaning by Metastable Atom Neutralization", TF08156, disclosed August 2008,patent applied for
17.
2. Bulletins
Ruzic, D. N. and S. Cohen, "New Detectability Limits in a Low-Energy Neutral Spectrometer," Bult.APS, 27, 832 (1982).
1.
Ruzic, D. N., T. K. Chu, S. Cohen, D. Heifetz, and J. Stevens, "Low-Energy Neutral AtomSpectroscopy and Ion Temperature Measurements During Lower Hybrid Current Drive," Bult. APS,27, 1070 (1982).
2.
Ruzic, D. N. and S. Cohen, "Total Scattering Cross-Sections for Ho and Do and H2, He, Ne, Ar, andKr," Bult. APS, 28, 939 (1983).
3.
Ruzic, D. N., D. Heifetz, and S. Cohen, "Three-Dimensional Neutral Density Calculations for thePLT Tokamak During ICRF Heating," Bult. APS, 29, 1334 (1984).
4.
Ruzic, D. N., S. Cohen, M. Ono, P. Colestock, D. Heifetz, J. Hosea, R. Kaita, and R. Wilson, "LowEnergy Neutral Emission from PLT During Ion Bernstein Wave Heating Experiments," Bult. APS,30, 1570 (1985).
5.
Caughman, J. B. O., F. W. Baity, D. J. Hoffman, T. L. Owens, D. N. Ruzic, D. E. Schechter, C. C.Tsai and T. H. Zerguini, "The Effects of RF on the Sputtering Rate of ICRH Antenna Components,"Bult. APS, 30, 1590 (1985).
6.
Ruzic, D. N., B. L. Cain, and H. K. Chiu, "The Reflection of 100 eV Hydrogen off Nickel as aFunction of Fractal Dimension," Bult. APS, 31, 1624 (1986).
7.
Cain, B. L., R. L. Bastasz and D. N. Ruzic, "A Hydrogen Energy Diagnostic Based on Au-CoatedPd-MOS Diodes," Bult. APS, 32, 1940 (1987).
8.
Ruzic, D. N., "Ion Reflection and Sputtering Calculations Utilizing Fractal Geometry to SimulateSurface Roughness," Bult. APS, 33, 2106 (1988).
9.
Caughman, J. B. O., D. N. Ruzic, and D. J. Hoffman, "Properties of the RF Plasma Sheath at theSurface of an ICRF Antenna Faraday Shield", Bult. APS, 33, 2017 (1988).
10.
Ruzic, D. N., K. A. Werley, S. A. Cohen, "Neutral Transport in the Divertor Region of ITER", Bult.APS, 34, 1971 (1989).
11.
Cain, B. L., D. N. Ruzic, R. A. Lindley, B. Hu, "Experimental Analysis of Low -Energy ReflectedNeutral Hydrogen Fluxes from Ion Beam-Target Interactions", Bult. APS 34, 2026 (1989).
12.
Caughman, J. B. O., D. N. Ruzic, and D. J. Hoffman, "Measurements of Increased ElectronTemperature and Ion Energies Near the Surface of an ICRF Antenna Faraday Shield", Bult. APS, 34,2035 (1989).
13.
Ruzic, D. N., K. A. Werley, S. A. Cohen, "The Effects of Geometry on D/T and Helium Temperaturesand Densities in the Divertor Region and Pump Duct of ITER," Bult. APS, 35, 1923 (1990).
14.
Ruzic, D. N., S. A. Cohen, K. A. Werley, "Three Dimensional Simulation of Neutral Densities in theDivertor Region and Pump Duct of ITER," Bult. APS, 36, 2274 (1991).
15.
Shaheen, M. A., D. N. Ruzic, "Reflection and Sputtering of Low-Energy H, D, T, and He from C:Fractal TRIM Modelling," Bult. APS, 36, 2491 (1991).
16.
Juliano, D. R., and D. N. Ruzic, "Study of TPX/SSAT Divertor," Bult. APS, 37, 1398 (1992).17. Hayden, D. B., D. N. Ruzic, "Calculations of the Charge-Exchange Energy and the Power Flux to theDivertor in ITER," Bult. APS, 38, 2051 (1993).
18.
Kelly, J. P., D. N. Ruzic, "Determination of Chemical Sputterino Yields of Methane usingMonte-Carlo VFTRIM Code," Bult. APS, 38, 1918 (1993).
19.
Ulrickson, M., D. N. Hill, R. Campbell, W. Houlberg D. N. Ruzic, D. P. Stotter, K. Werley, "Powerand Particle Control for TPX," Bult. APS, 38 2049 (1993).
20.
Hayden, D. B., D. N. Ruzic, "Transport of Photons Throughout a High-Density Divertor Plasma,"Bult. APS, 39 1617 (1994).
21.
Juliano, D. R., D. N. Ruzic, P. F. Cheng, "Pumping and Throughput Calculations for TPX," Bult.APS, 39 1570 (1994).
22.
Kelly, J., D. N. Ruzic, B. R. Turkot, Jr., "The Effect of Ion-Wall Interactions on Recycling in TFTR,"Bult. APS, 39 1766 (1994).
23.
Post, D., A. Kukushkin, M. Sugihara, B. Braams, S. Cohen, Y. Igitkhanov, G. Janeschitz, D. Knoll, A.Loarte, G. Pacher, H. Pacher, A. Pigarov, G. Porter, B. Pozharov, D. Reiter, T. Tognlien, D. N. Ruzic,L. Schmitz, R. Schneider, R. Simonini, A. Taroni, N. Ueda, R. Vesey, and the ITER Joint CentralTeam and Home Teams, �ITER Divertor Modeling: Predictions and Experitmental Validation,� Bult.APS, 39, 1593 (1994).
24.
Ruzic, D. N., D. B. Hayden, "Momentum and Energy Transfer via Neutral Atoms and Molecules inthe ITER Divertor," Bult. APS, 39 1766 (1995).
25.
Post, D., B. Braams, S. Cohen, D. Coster, S. Dalhed, M. Fenstermacher, A. Grossman, Y. Igitikhanov,G. Janeschitz, C. Karney, A. Kukyshkin, H. Pacher, G. Porter, T. Rognlein, D. N. Ruzic, R.Schneider, H. Scott, M. Sugihara, A. Wan, �Analysis of the ITER Divertor,� Bult. APS, 40, 1730
26.
(1995).Hayden, D. B., D. A. Knoll, and D. N. Ruzic, �Analysis of an ITER Gas-Target Divertor Using aCoupled Navier-Stokes Fluid Code with a Monte-Carlo Transport Code,� Bult. APS, 40, 1728(1995).
27.
Hill, D. N., K. Owens, B. Braams, J. Brooks, R. Maingi, M. E. Rensink, D. N. Ruzic, K. Werley, G.H. Neilson, �Power and Particle Control for the Steady-state TPX Tokamak,� Bult. APS, 40, 1730(1995).
28.
Cheng, P. F., D. N. Ruzic, M. Rensink, �The Effects of Varying the Puffing Points on TPX,� Bult.APS, 40, 1731 (1995).
29.
Juliano, D. R., D. N. Ruzic, P. C. Smith, �An Analytic Pumping Model for Divertors and Ducts ofTokamaks, with Applications for the TPX Design,� Bult. APS, 40, 1731 (1995).
30.
Kelly, J. P., L. A. Haynes, D. N. Ruzic, �DEGAS Simulation of TFTR Neutral Beam Box andVacuum Vessel,� Bult. APS, 40, 1769 (1995).
31.
Smith, P. C., D. N. Ruzic, �Low-Energy D+ Sputtering of Be, An Angularly-Resolved Study,� Bult.APS, 40, 1885 (1995).
32.
Hayden, D. B., D. N. Ruzic, J. N. Brooks, �Detailed Neutral Particle Simulations Near the First WallLimiter of ITER,� Bult. APS, 41, 1436 (1996).
33.
Ruzic, D. N., P. C. Smith, R. B. Turkot, Jr., �Measurements and Modeling of Plasma-FacingComponent Sputtering by D+,� Bult. APS, 41, 1487 (1996).
34.
Budny, R. V., B. Leblanc, A. T. Ramse, C. H. Skinner, D. P. Stotler, D. B. Hayden, D. N. Ruzic,�Hydrogenic Recycling in TFTR Discharges,� Bult. APS, 41, 1515 (1996).
35.
Ruzic, D.N., D.B. Hayden, D.R. Juliano, �Ionized Physical Vapor Deposition and Diagnostics,� Bult.APS, 42, 1949 (1997).
36.
Hayden, D.B., D.N. Ruzic, J.N. Brooks, �Neutral Particle and Erosion Analysis of the ITERReference Solution,� Bult. APS, 42, 2014 (1997)
37.
Allain, M.M.C., D.A. Alman, D.N. Ruzic, R.Behrish, �Modeling of Beam-Target fusion due toCharge Exchange Neutrals Incident on ITER First Wall,� Bult. APS, 43, 1875, (1998)
38.
Allain,J.P., D.A. Alman, D.N. Ruzic, �Measurement and Modeling of Li Sputtering by D+ ions,�Bult. APS, 43, 1894, (1998)
39.
Norman, J.E., D.N. Ruzic, M. Shapiro, �Modular Plasma System Combining Ion Thrusters, InertialElectronstatic Confinement, and Theta Pinch Devices,� Bult. 44, 189, (1999)
40.
Alman, D.A., D.N. Ruzic, J.N. Brooks, �Neutral Particle and Erosion/Redepostion Analysis of Fire,�Bult. APS, 44, 210, (1999)
41.
Allain, J.P., M.R. Hendricks, M. Boaz, R. Ranjan, D.N. Ruzic, �Measurements and Modeling ofLow-Energy Liquid Lithium Sputtering,� Bult. APS, 44, 277, (1999)
42.
Allain, J.P., D.N. Ruzic, �Kinematic and Thermodynamic Effects on Liquid Metal Sputtering,� Bult.APS, 45, 262 (2000)
43.
Boaz, M., J. Norman, J.P. Allain, D.N. Ruzic, �Critical Design Considerations for the FlowingLiquid-Surface Illinois Retention Experiment (FLIRE),� Bult. APS, 45, 263, (2000)
44.
Alman, D.A., D.N. Ruzic, J.N. Brooks, T.D. Rognlien, �Neutral Particle and Erosion/RedepositionModeling of the FIRE Tokamak,� Bult. APS, 45, 312, (2000)
45.
D.N. Ruzic, M. Boaz, J. Norman, J.P. Allain, �Toroidally Symmetric Metal J x B Experiments,�Bult. APS, 45, 330, (2000)
46.
J.E. Norman, M.J. Neumann, D.N. Ruzic, �Langumuir Probe Analysis of a Helicon Plasma Source,�Bult. APS, 46, 59, (2001)
47.
J.P. Allain, M.D. Coventry, M. Lazebnik, D.N. Ruzic, �Temperature dependence of liquid lithiumand lithium alloy sputtering by D+, He+ and Li+ bombardment,� Bult. APS, 46, 68, (2001)
48.
M. Nieto, J.P. Allain, M.J. Neumann, J.E. Norman, E. Vargas-Lopez, M.D. Coventry, D.N. Ruzic,�Data Acquisition and Analysis for FLIRE�Flowing Liquid-metal Illinois Retention Experiment,�Bult. APS, 46, 69, (2001)
49.
D.A. Alman, D.N. Ruzic, �Molecular Dynamics Calculation of Carbon/Hydrocarbon ReflectionCoefficients on a Graphite Surface Employing Distributed Computing,� Bult. APS, 46, 171, (2001)
50.
D.N. Ruzic, M. Nieto, D.A. Alman, �Sputtering and Reflection Data for Mixed Tungsten/BerylliumLayers Under Typical FIRE Divertor Fluxes,� Bult. APS, 46, 271, (2001)
51.
M.J. Neumann, M. Nieto, J.P. Allain, J.E. Norman, E. Vargas-Lopez, M.D. Coventry, D.N. Ruzic,�FLIRE Flowing Liquid Surface Illinois Retention Experiment, Design and Operation,� Bult. APS,46, 336, (2001)
52.
J.P. Allain, M.D. Coventry, D.N. Ruzic, �Temperature-dependent mechanisms of lithium erosionfrom lithium-based liquid metals under low-energy bombardment,� Bult. APS, 47, 176, (2002)
53.
D.A. Alman, J.P. Allain, D.N. Ruzic, �Beryllium/Tungsten Mixed Material Analysis of FIRE PlasmaFacing Components,� Bult. APS, 47, 176, (2002)
54.
M. Nieto, J.P. Allain, E. Vargas-Lopez, M.D. Coventry, J. Tillery, D. Rokusek, M. J. Nuemann, D.N.Ruzic, �Plasma-liquid metal interaction studies in FLIRE,� Bult. APS, 47, 176, (2002)
55.
M.D. Coventry, J.P. Allain, D.N. Ruzic, �Erosion properties of liquid phase tine due to D+ and He+bombardment,� Bult. APS, 47, 176, (2002)
56.
D.N. Ruzic, D.A. Alman, �Molecular Dynamics Calculation of Carbon/Hydrocarbon ReflectionCoefficients on Hydrogenated Graphite Surfaces,� Bult. APS, 47, 253, (2002)
57.
3. Magazine Articles
Ruzic, D.N., �Fusion Energy,� Research and Development, June 1984, 25th Anniversary issue forEmerging Technologies, 88-96.
1.
4. Reports
Ruzic, D. N., R. Moore, D. Manos, and S. Cohen, "Secondary Electron Yields of Carbon-Coated andPolished Stainless Steel," PPPL-1974, 25 (1982).
1.
Hooke, W., S. Cohen, S. Bernabei, T. K. Chu, J. Hosea, R. Motley, D. N. Ruzic, J. Stevens, and R.Wilson, "Lower Hybrid Heating and Current Drive on PLT," PPPL-1976, 12 (1983).
2.
Stevens, J., S. Cohen, S. Bernabei, T. K. Chu, W. Hooke, J. Hosea, R. Motley, D. N. Ruzic, J.Stevens, and R. Wilson, "Recent Results of Lower Hybrid Heating and Current Drive on PLT,"PPPL-1977, 28 (1983).
3.
Cohen, S., S. Bernabei, R. Budny, T. K. Chu, P. Colestock, E. Hinnov, W. Hooke, J. Hosea, D.Hwang, F. Jobes, D. Manos, R. Motley, D. N. Ruzic, J. Stevens, B. Stratton, S. Suckewer, S. VonGoeler, and R. Wilson, "Plasma-Materials Interactions During RF Experiments in Tokamaks,"PPPL-2124, 47 (1984).
4.
Cohen, S., D. N. Ruzic, D. E. Voss, "Measurements of Low-Energy Neutral Outflux During ICRFHeating," PPPL-2133, 19 (1984).
5.
Ruzic, D. N. and S. Cohen, "Total Scattering Cross-Sections and Interatomic Potentials for NeutralHydrogen and Helium, and Some Noble Gasses," PPPL-2210, 15 (1985).
6.
Ruzic, D. N. and B. L. Cain, "Low Energy Light Ion Scattering Experiment," Report for NSF,CBT-84-51599 (1988).
7.
Bolan, P., D. N. Ruzic, and B. Thomas, "Thermal-Mechanical Performance of a Tubular Divertor,"Proposed for ITER (1993).
8.
2. Grants, contracts and gifts (in chronological order up to past ten years)
a. For Research
Years(Inclusive) Brief Title or Description Source of Funds Total
Funding
FundsAllocated
to this prof
#PI's and leadPI if not this
prof2000 ALPS DOE $95,000 2000 APEX DOE $40,000 2000 Next Step Options DOE $27,000 2000 Plasma Surface Interactions for
Fusion ANL $25,000
2000 Aluminum Oxide Experiments CVC Inc. $10,000
2001 ALPS DOE $95,000 2001 APEX DOE $10,000 2001 FLIRE DOE $80,000 2001 Next Step Option DOE $27,000 2001 ANL (PSI) $25,000 2001 LSI Inc., Helicon Experiments $15,000 2001 STTR - on FLIRE $100,000 2002 ALPS DOE $200,000 2002 ALPS STTR $250,000 2002 ALPS modeling ANL $30,000 2002 Galaxy Research Board $20,000 2003 ALPS FLIRE DOE $230,000 2003 ALPS FLIRE STTR subcontract
phase II $250,000
2003 ALPS Modeling ANL $30,000 2003 GALAXY SRC $60,000 2003 RF Experiment ORNL $35,000 2003 IDEAL INTEL $210,000 2003 Plasma Quest Research Board $11,000 2004 ALPS FLIRE/IIAX DOE $253,000 2004 ORNL RF experiment DOE $65,000 2004 Novellus for GALAXY $17,000 2004 ERC--Diagnostics for EUV $10,000 2004 INTEL IDEAL and SCOPE $669,000 2004 International Sematech (EUV
optics) $500,000
2004 JMAR $50,000 2004 Starfire Industries, STTR for
ELM simulator $50,000
2004 Starfire Industries, Phase I, TTA,Hall thrusters
$16,200
2005 ALPS FLIRE/IIAX DOE $250,000 2005 ORNL RF Experiment DOE $65,000 2005 INTEL SRA $500,000 2005 International Sematech $200,000 2005 Xtreme, Germany $85,000 2005 CYMER $79,000 2006 ALPS FLIRE/IIAX DOE $200,000 2006 ORNL RF Experiment DOE $65,000 2006 INTEL XCEED $230,000 2006 INTEL Line-Edge-Roughness $35,000 2006 INTEL Particle Removal $68,000 2006 Micron $75,000 2006 ASML (Netherlands) particle
removal $100,000
2006 Energetiq $50,000 2006 Xtreme, Germany $50,000 2006 CYMER, San Diego, CA $50,000 2006 University College Dublin $120,000 2006 Starfire Industries $14,000 2006 Ruzic Research Foundation $10,000 2006 Micron Foundation, Boise, ID $75,000
2007 ALPS DOE Fusion-related $175,000 2007 ORNL RF experiment DOE $65,000 2007 INTEL XCEED $100,000 2007 INTEL Line-edge-roughness $95,000 2007 INTEL Particle Removal $125,000 2007 Xtreme Technologies, Germany $50,000 2007 CYMER, San Diego, CA $50,000 2007 ASML (Netherlands) particle
removal $110,000
2007 Ushio, Japan $120,000 2007 Ruzic Research Foundation $10,000 2007 Micron Foundation, Boise, ID $75,000 2007 Sematech (EUV diagnostics) $200,000 2008 ALPS DOE Fusion-related $175,000 2008 ORNL RF Experiment (DOE) $55,000 2008 INTEL Line-edge-roughness $165,000 2008 INTEL Particle Removal $120,000 2008 CYMER, San Diego CA EUV $75,000 2008 ASML (Netherlands) particle
removal $50,000
2008 Ushio, Japan EUV $120,000 2008 Ruzic Research Foundation $10,000 2008 Micro Foundation, Boise, ID $75,000 2008 Sematech (EUV Diagnostics) $320,000 2008 Starfire Industries (Phase I
SBIR, AFSOR) $30,000
2008 Kurt J. Lesker Co. (Phase I NSFSBIR)
$33,000
2008 General Electric Aviation $100,000 2008 NSF I/URC center planning
grant $10,000
2009 ALPS DOE Fusion-related DOE $174,000 2009 ORNL RF Experiment DOE $55,000 2009 CYMER, San Diego CA EUV sources $50,000 2009 CYMER, center partnership $30,000 2009 Ruzic Research Foundation $10,000 2009 Sematech EUV Diagnostics $80,000 2009 Starfire TRTA Novellus Sub $20,000 2009 Kurt J. Lesker Co. Phase II NSF
SBIR $100,000
2009 General Electric Aviation $100,000 2009 NSFI/URC $58,000 2009 NSF (sub from Prof. Rohde) $50,000 2009 DOE collaboration grant on
NSTX DOE $125,000
2009 W. Wrigley Chewing Gum $60,000 2009 General Motors $40,000 2009 Dexter Magnetics $60,000 2009 Hammatech TTA $10,000 2009 SRC $60,000 2009 Pekin Prescription Lab, Inc. $1,600 2010 ALPS DOE (STX) $174,000
2010 DOE $125,000 2010 SPARC DOE $55,00 2010 Cymer Gift $40,000 2010 GM Gift $40,000 2010 Novellus Gift $40,000 2010 Industrial Partner CPLAM $70,000 2010 Hammatech TTA $6,000 2010 Starfire Industries $18,000 2010 Wrigley TTA $60,000 2010 General Electric Aviation $100,000 2010 Kurt J. Lesker SBIR $100,000 2010 NSF I/UCRC $58,000 2010 NSF w/Kappor $41,667 2010 NSF REU $8,000 2010 Sematech $400,000 2010 SRC $22,000 2010 Wrigley SRA $250,000 b. For Instruction
3. Areas of Research (brief description, key words are adequate)
Experimental fusion research1. Modeling of edge-plasma atomic physics2. Atomic properties of potential first-wall materials3. Plasma processing of semiconductors4. Extreme ultraviolet (EUV) sources for lithography and physical vapor deposition5. For more detail including funding source information, see the plasma-material interaction groupwebsite or link directly to: http://cpmi.illinois.edu
6.
4. Graduate Thesis Research Advising (list co-advisor, if any)
a. M.S. Thesis Students (name and year granted or anticipated)
Student Name YearGraduated Thesis Title Placement
John Caughman 1986 The Effects of RF on the Sputtering of ICRH Antenna FaradayShields
Henry Kui ChuenChiu
1987 The Reflection of Hydrogen Off Nickel Surfaces as a Functionof Fractal Dimension
Jeffrey Wilson 1989 Measurement of Process Plasma Parameters in a RFCapacitively Coupled Deivce
Bozhao Hu 1990 Measurements of Secondary Electron Yield From Low-EnergyIon Interactions with Gas Covered Surfaces
Phi Nguyen 1990 A Novel Device for Energy Distribution Measurements in anRF Plasma Discharge
Regina Demers 1991 Investigation of a Direct Current Cylindrical Hollow CathodeGlow Discharge Device for Use as a Remote Plasma Source forthe Growth of Amorphous Silicon Thin Films
MohammadShaheen
1991 A Fractal Surface Model for Multi-Component Trim:Applications to Boron-Carbon Materials
Robert Turkot, Jr. 1992 Time- and Space-Resolved RF-Plasma Measurements from aDisplacement-Current-Based Electric Probe Diagnostic
Preston Smith 1993 1993
Low-Energy Ion-Induced Electron Emission from Gas-CoveredSurfaces
Phyllis Jones(ECE)
1993
Douglas Hayden 1994 Neutral Particle Modeling in the ITER Divertor James Kelly 1995 Tritium Inventory in the Neutral Beam Box of TFTR Karyn Green 1996 Determination of Ionization Fraction and Plasma Potential in a
DC Magnetron Sputtering System Using a Quartz CrystalMicrobalance and a Gridded Energy Analyzer
Peter Cheng(MATSE)
1997
Rajiv Ranjan 2000 submitted by zip drive copy Jean Paul Allain 2000 Measurement and Modeling of Lithium Sputtering Monica Allain 2000 Characterization of Magnetron-Sputtered Partially Ionized
Deposition as a Function of Metal and Gas Species Darren Alman 2001 A Model of Hydrocarbon Reactions and Wall Interactions in
Low Temperature Hydrogen Plasmas Martin Nieto-Perez 2001 Effect of Coil Layout on the Performance of the Proton
Divertor Collimator Device Jeffrey Norman 2001 Langmuir Probe Investigations of Helicon Wave Discharges in
Three-Dimensions of a Commercial-Scale Plasma ProcessingReactor
Ning Li 2002 Ionized Physical Vapor Deposition of Aluminum Oxide Matthew Coventry 2004 Measurement of the Sputtering Yields of Solid and Liquid Tin
Due to Low-Energy, Light-Ion Bombardment at ObliqueIncidence
Martin Newmann(MD/Phd candidate
2004 Investigation of Plasma Processing of Polymers for Use inBiomedical Applications
ErnestoVargas-Lopez(Physics)
2004
Wes Olczak 2006 Thermal Desorption Spectroscopy Measurements of HydrogenRetention in Flowing Liquid Lithium
Mike Jarowski 2006 Debris Reduction by Means of a Secondary Plasma Systemwith a Dense Plasma Focus Extreme Ultraviolet Light Source
Benjamin Schultz 2007 Design and Characterization of a Plasma Source for IonBombardment
Hyung-Joo Shin Wayne Lytle 2007 Plasma-Assisted Cleaning by Electrostatics of Insulating
Nanometer Scale Contamination from Materials Used inIntegrated Circuit Manufacturing
Joshua Spencer 2007 Ion Energy Characterization Study for Next GenerationSemiconductor Lithography Based on Gas Discharge ProducedPlasma Technology
Benjamin Masters 2007 Development and Characterization of Conventional andInverted Helicon Plasma Sources
Keith Thompson(ECE) Eithan Ritz Marin Racic 2008 Experimental Erosion Study of Lithium-on-Carbon Surfaces for
Fusion Devices Ibano, Kenzo Steve 2009 Thermal Evaporation and Sputtering Studies of Lithium and
Lithiated Graphite
Struck, Corey RayMitchell
2009 Reduction of Line Edge Roughness in SemiconductorPhotoresist by Means of a Grazing Incidence Ion Beam
Lofgren, Robert 2010 Surface Cleaning of Optics by Plasma (SCOPE) with AtomicHydrogen
Meng, Liang 2010 Plasma Diagnostics and ITO Film Deposition by RF-AssistedClosed-Field Dual Magnetron System
Sporre, John 2010 Detection of Energetic Neutral Flux Emanating from ExtremeUltraviolet Light Lithography Sources
b. Ph.D. Thesis Students (name and year granted or anticipated)
Student Name YearGraduated Thesis Title Placement
Bruce Cain 1989 Analysis of Low Energy Neutral Hydrogen Fluxes Using anElectron Cyclotron Resonance Heated Discharge
John Caughman 1989 The Distribution of Ion Energies Incident on an ICRH AntennaFaraday Shield
Alan M. Myers(MatSE)
1991
Ken D. Schatz(Physics)
1995
Robert Turkot, Jr. 1997 Plasma-Material Interactions: A Langmuir Probe Analysis of aCylindrical SiO2 Deposition System and a ComputationalStudy Using VFTRIM3D
Mohamad Shaheen 1997 Pulsed Sheet Electron Beam Plasma Assisted CVD of SiliconFilms
Preston Smith 1997 Low-Energy Ion-Induced Angularly-Resolved SputteringMeasurements
Douglas Hayden 1999 Secondary Plasma Sources For Ionized Physical VaporDeposition
Daniel Juliano(Physics)
1999
Jean-Paul Allain 2002 Kinematic and Thermodynamic Effects on Liquid LithiumSputtering
Darren Alman 2004 Molecular Dynamics Simulations ofCarbon/Hydrocarbon-Surface Interactions Relevant to FusionDevices
Martin Nieto-Perez 2004 Study of Plasma/Flowing Liquid Metal Interactions Ning Li 2005 Chemically Enhanced Physical Vapor Deposition (CEPVD) of
Tantalum Nitride-Based Films for Diffusion Barrier LayersUsed in ULSI Devices
Carlos Castano 2007 Study of Breakdown/Arcing for High Power RF Antennas onFusion Applications
Huatan Qui 2007 Gibbsian Segregating Alloys Driven by Thermal andConcentration Gradients - A Potential Grazing Collector OpticsUsed in EUV Lithography
Matt Coventry 2007 Temperature-Enhanced Low-Energy Ion Sputtering of LiquidSn: Measurements and Modeling
Marty Neumann(MD/PhDcandidate)
2008 Lithium Debris Removal By Sputtering and Evaporation forEUV Optics and Applications
Travis Gray 2009 Bombardment of Thin Lithium Films with Energetic PlasmaFlows
2010
Jaworski, MichaelAndrew
Thermoelectric Magnetohydrodynamic and ThermocapillaryDriven Flows of Liquid Conductors in Magnetic Fields
Shin, Hyung Joo 2010 Cleaning of Tin Debris by Reactive Ion Etching in aDischarge-Produced EUV Plasma Source
5. Editorships of Journals or Other Learned Publications (list year)
Member, Editorial Board, J. Vac. Sci. and Technology A and B, 1994 � 20001.
6. Post-doctoral Associates and Visiting Scientists (>3 months stay in the past three years) (list name,year(s), country of origin, permanent employer)
Name Title (percent time) Country of Origin Permanent Employer YearsCarlos Castano 100% Colombia 2006-2008 Ramasamy Raju 100% India 2007-2009 Martin Neumann 100% USA 2007-2009 Randolph Flauta 100% Phillipines 2008-2010 Vijay Surla 100% India 2008-present Kyongnam Kim 100% Korea 2008-2010 Tae Cho 100% Korea 2010-present Daniel Andruczyk 100% Australia 2010-present 7. Other Scholarly Activities in the past five years (conferences organized or chaired, unpublishedpresentations, etc.)
a. Conferences Organized or Chaired
b. Unpublished Presentations
c. Other Scholarly Activities
C. Service
1. Professional Societies (list membership; office held, with dates; major committees or boards)
American Nuclear Society, Executive Committee of the Fusion Energy Division 1996-19991. American Nuclear Society Fellow, 20042. American Vacuum Society Fellow, 20073. Plasma Science and Technology Division Chair, International PSTD, 2005 - present4. Plasma Science and Technology Division International Vacuum Union Representative, 2005 - present5. Plasma Science and Technology Division Chair PST Division, 1991 - 19926. Plasma Science and Technology Division Program Committee, National Symposium, 1988, 1990,1993, 2007
7.
Plasma Science and Technology Division Executive Committee, 1987 - 19948. Advanced Surface Engineering Division, Executive Committee 2000-20069. American Physical Society, Member, Program Committee, DPP meeting, 1997, 200710. IEEE � Executive Committee of the Fusion Energy Division, 2001 � present11. Advisory Group Member for Plasma-Surface Interactions in Controlled Fusion, International AtomicEnergy Agency - 1989-1993
12.
SPIE, Technical Working Group on EUV Collector Optics, 2004-present13.
2. University (department, college and campus committees, administration, etc. for past five years)
Formed and chaired Faculty Advisory Committee to the UI-Integrate project.1. Convinced all three campus Senates and administrations to adopt uniform grade notation, values andcourse numbers systems.
2.
Formed and chaired Student Service Advisory Committee to the UI-Integrate project.3.
a. Department
Chairman of Student Committee, 1986-87, 1989-90, 1992-present1. Chairman of Student Committee, Member of Student Committee, 1986-902. Faculty Advisor for EOH, 1987-90, 1992-present3. Special Administrative Assignments: Wrote draft of the request for "Departmental Status" for NuclearEngineering.
4.
Wrote drafts of the Nuclear Engineering Bylaws.5.
b. College
Engineering Community College Liaison Committee, 1986 - 20001. College of Engineering Mentor Program2. Engineering Humanities and Social Science Electives Committee, 1990 - 19943. Engineering Humanities and Social Science Electives Committee Chairman, 1992 - 19944.
c. Campus
Interviewer for Hertz Foundation, 1986-present1. Selection Committee for Hertz Foundation, 1987-present2. Campus Honors Program Mentor, 1986-present3. Campus Honors Program Instructor, 1987-present4. Campus Honors Program, Advisory Committee, 1989-present5. Member of COPE (Council on Program Evaluation), 1991 - 19966. Task Force on the Environment: Undergraduate Education, 1993 - 19997. Illini Days speaker, 1993 - present8.
3. Federal and State (government commissions or panels, community, industrial extension, etc.)
4. Other Outside Service
Educational Demonstrations at Tuscola Grade School, East Prairie Middle School, Tuscola HighSchool, 8 hours/semester, 1990-present
1.
Illini Days speaker, 1993-present2.
D. Improvement Activities (list any specific programs in which you have participated it improve teachingand professional competence)
How to Manage People - one day seminar, 19861. Sloan Foundation Conference on "New Liberal Arts," 19902.
