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Clean Technologies for Controlled Environment
Tengfang (Tim) Xu, Ph.D., PELawrence Berkeley National Laboratory
From Traditional Cleanrooms to Minienvironments and Nano-technology Facilities
Tengfang (Tim) Xu, Ph.D., PE
Environmental Energy Technologies Division
Lawrence Berkeley National Laboratory
June 23, 2005
Issues and Trends in Clean Technologies
- Slide 3
Outline
• Introduction to clean technologies
– Cleanrooms and minienvironments
• Energy saving opportunities
• Case studies
• Issues and trends
• What’s coming?
- Slide 4
Introduction: Cleanroom
• Definition
– A Cleanroom is "a room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters, e.g., temperature, humidity, and pressure, are controlled as necessary."
– ISO Standard 14644-1
- Slide 5
Introduction: Cleanroom• Design
– The design of cleanroom HVAC systems requires the unique understanding of cleanliness requirements, guidelines, airflow, filtration, room pressurization, code requirements, specialty equipment, precise control, and many more details.
– IEST CC RP12.2 Considerations in Cleanroom Design
• Subgroup 1: Cleanroom Design Considerations
• Subgroup 2: Installation of Cleanroom Production Equipment
• Subgroup 3: Cleanroom Electrical Systems
- Slide 6
Introduction: Minienvironment
• Definition
– A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment
• Guidelines
– Separative Devices, ISO Standard 14644-7 (IEST)
– IEST CC RP28.1: Minienvironments
- Slide 7
Minienvironment Applications
• A variety of names
– “Separative devices,” “separative enclosures,” “isolators,” or “barriers” in the microelectronics, chemical, and pharmaceutical industries
– “Safety cabinets” in biomedical and healthcare
– “Gloveboxes” in research and defense industry
- Slide 8
Clean Technologies for Controlled Environment
• Process-driven– contamination
• Planning• Design• Qualifications• Operation
Site plan
Facility
Cleanroom concepts
Contaminationproblem
Cleanroomactivities, e.g.,
process,production, etc
- Slide 9
Cleanroom Measured Power
Cleanroom Electric Power
- Slide 10
Energy Savings Opportunities
• Efficient Air Systems – initial costs – optimized sizing– utility costs and productivity– non-energy benefits
• Energy efficient planning and design – – strategy to achieve cost savings and to
improve bottom lines in the industry
- Slide 11
Case Studies on Minienvironment/Cleanroom
- Slide 12
Why Minienvironment?
- Slide 13
Results
• Total fan power • Power factor• Pressure control• EPI (W/cfm)
– Comparison with Cleanrooms
- Slide 14
Results
0
50
100
150
200
250
0 200 400 600 800 1000
Airflow Rates through the Minienvironment (cfm)
Ele
ctri
c P
ow
er (
W)
- Slide 15
Results
0.00
0.10
0.20
0.30
0.40
0.50
0.60
0.70
0.80
0.90
1.00
0 10 20 30 40 50 60 70 80 90 100 110 120 130
Airflow Speed in Clean Spaces (FPM)
EP
I (W
/cfm
)
Minienvironment
Benchmarked Cleanrooms
- Slide 16
Issues and Trends…
• Issues - Contamination control – Source: particle, molecular, bio, mechanical,
electronic – Preciseness, costs, safety, regulation
• Trends – Multi-level particle retention and/or bio containment– Minienvironments/Bio-safety cabinet– Nano-tech facilities
- Slide 17
Issues and Trends…Standards
The Institute of Environmental Sciences and Technology (IEST)– ISO Standard 14644 (1 through 8): Cleanrooms and
Controlled Environments– ISO Standard 14698 (1 through 3): Bio-contamination
- Slide 18
Issues and Trends… Solutions
• Resources for clean technologies– IEST RPs addressing a variety of cleanroom
technologies http://www.iest.org/technical/ccwgs.html • Design, construction, operation, compliance,
qualifications, procedure, control, etc.
• WG12 > WG28 > New WGs on Nano-tech facilities
– LBNL• Energy related technologies and strategies
- Slide 19
What’s Coming… Stay Tuned
• Cleanrooms• Minienvironments - upcoming workshop to
– Share knowledge and improve performance of minienvironments
– Understand energy implications of minienvironment vs. cleanroom
– Develop and identify strategies in energy efficiency for effective environmental control
