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Joseph A. Elias, PhD1
Class 21: Testing and Yield
Topics:1. Intro2. Motivation for Test3. Functional vs. Manufacturing Tests4. Testing Sequence5. Testing Sequence6. Testing Sequence7. Manufacturing Tests and Yield 8. Yield vs. Area and DD9. Yield vs. Process10. Fault Models 11. Fault Models 12. Fault Models 13. Fault Models 14. IDDQ15. JTAG a.k.a. Boundary Scan
Joseph A. Elias, PhD2
Class 21: Testing and YieldMotivation for Test (Weste, c.7)
Testing of a chip can occur at the following stages:1) wafer level2) package chip level3) board level4) system level5) in the field
Approximate cost (1986 $s) to a company to detect a fault (total cost/total chips)1) wafer : $0.01 $0.102) package: $0.10 $1.003) board: $1.00 $104) system: $10 $1005) field: $100 $1000
Thus the motivation to test early to avoid expensive debug effortand to avoid what consequence?
Joseph A. Elias, PhD3
Class 21: Testing and YieldFunctional vs. Manufacturing Tests (Weste, c.7)
Functional tests refer to tests done to verify a variety of requirements:1) verbal (customer to supplier)2) high level test language description (ex., C)3) hardware description language (ex., VHDL)4) look-up table5) a detailed spec which describes what is expected, at what test conditions
Which is probably the best one to choose?
Manufacturing tests refer to tests done before parts reach the customer, and arerelated to known physical causes:1) shorts (ex., inter- and intra-layer)2) opens (ex., missing features, such as metal lines, contacts, diffusions)
These will manifest themselves as:o nodes shorted from power to groundo nodes shorted to each othero inputs floating, outputs not connected
Joseph A. Elias, PhD4
Class 21: Testing and YieldTesting Sequence (Weste, c.7)
A basic overview of how and when a wafer/chip gets tested:(1) Parametric, a.k.a., ETEST, PCMo In-Line: refers to testing at a wafer level, while the wafer is physically within the fab for items such as gate poly width, metal-to-metal shorting, contact resistance, and first pass transistor performance. These are located in the scribe line area.
o End-of-Line: refers to testing at a wafer level, while the wafer is physically within the fab, for an entire suite of test sites. These are located in the scribe line area.
Die
100um mm’s to cm’s
Scribelinearea
Individual test structure
Joseph A. Elias, PhD5
Class 21: Testing and YieldTesting Sequence (Weste, c.7)
A basic overview of how and when a wafer/chip gets tested:(2) Functional, a.k.a., full chip, first memory testo Memory testing: done on SRAM, DRAM, EEPROM, and/or FLASH portions of chip. In order to test memory by itself, test modes are usually done as part of the design. This will test the functionality of the addressing as well as a defect density monitor
o Logic Testing: done on the entire chip, which accesses the internal circuitry (issues such as addressing, logic patterns, speed are exercised). Can be done in a variety of ways, one of which is JTAG (covered later)
32k x 16
FLASHScribelinearea
4k x16SRAM
Memory
Memory
Logic
Joseph A. Elias, PhD6
Class 21: Testing and YieldTesting Sequence (Weste, c.7)
A basic overview of how and when a wafer/chip gets tested:(3) Package, board, system, fieldo Package is done by the supplier; demonstrates initial package integrityo Board level takes into account PCB issues, such as handshaking, RC delays, etc.o System level tests whether the chip boots Unix, for example, on a microprocessoro Field is using the chip in the actual end user’s configuration, for example, on the engine block of a Cadillac.
32k x 16
FLASH
4k x16SRAM
Die Package Board
Joseph A. Elias, PhD7
Class 21: Testing and YieldManufacturing Tests and Yield (Weste, c.7)
Yield at the wafer level is defined as
The yield is dependent on area anddefect density, as shown in one form:
Another model for yield is
Yield is also a function of “killer” design or parametric issuesBinning sorts the yield into buckets, or binsParametric vs. Functional yield
Joseph A. Elias, PhD8
Class 21: Testing and YieldYield vs. Area and DD
Yield vs. Area (cm2)
0.00
0.05
0.10
0.15
0.20
0.25
0.30
0.35
0.40
0.45
0.00 2.00 4.00 6.00 8.00 10.00 12.00
Area (cm2)
Yiel
d
Yield vs. DD (cm-2)
0.00
0.10
0.20
0.30
0.40
0.50
0.60
0.70
0.80
0.90
1.00
0 0.2 0.4 0.6 0.8 1 1.2
DD (cm-2)
Yiel
d
•Bigger chips yield lower, all else being equal•Decreasing DD dramatically improves yield•Defect density limited yield is as good as one
can achieve.
Joseph A. Elias, PhD9
Class 21: Testing and Yield
Gate line width distribution Speed distribution of a logic cell
Part fails boot up sequence at 1 GHzlow voltage, and high temperature
Schmoo plot
XXXXXXXXXXXXXXXXXXXXXXXXXXXXXXOXXXXXXXXXXXXXXOOXXXXXXXXXXXXXOOOXXXXXXXXXXXXOOOOOOOOOOOOOOOOOOOOOOOOOOOOOO
VDD
Frequency
Yield vs. Process
Joseph A. Elias, PhD10
Class 21: Testing and YieldFault Models (Weste, c.7)
To test a combinational logic circuitwith n inputs, need 2n vectors
To test a combinational logic circuitwith n inputs, and an m input register,need 2n+m vectors
If n=25 and m=50, at 1us per test,the total test time is 1e9 years
Joseph A. Elias, PhD11
Class 21: Testing and YieldFault Models (Weste, c.7)
Stuck at Faults: SA1, SA0
Joseph A. Elias, PhD12
Class 21: Testing and YieldFault Models (Weste, c.7)
S2:Fault which causes a schematic fault tobe “hidden” - how is that?
S1:What problem does this cause?
Joseph A. Elias, PhD13
Class 21: Testing and YieldFault Models (Weste, c.7)
Open causes combinational logic to becomesequential logic, as one of the transistors istaken out of the logic. Therefore a normalNOR gate becomes:
F = ( (A+B)’ + (A (B’) F ) )
Joseph A. Elias, PhD14
Class 21: Testing and YieldIDDQ Testing (Weste, c.7)
2-Input gateWhat is the gate?What is shorted in this diagram?If testing for quiescent current, whatpattern would be used to find this fault?
Joseph A. Elias, PhD15
Class 21: Testing and YieldJTAG a.k.a. Boundary Scan (Weste, c.7; Martin, p.527)
Joint Test-Action Group standard enables:•connectivity tests between components•sampling and setting chip I/Os•distribution and collection of self-test or built-in self test results•enable automated test equipment to interface to chips•reduce count for testing at wafer level