U DC 546.28-1 61 : 539. 23 : 621. 375. 826. 018. 756

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The F ini te Element Thermal Analysis of Amo rphous Si licon T hin Films Ir radiat ed by a Pulsed Lon er. By T os hiy ttJd JVa kam iya. Member (Faculty of Eng'incer tng , Kumamoto Institute of Technology ) & Ken ji Ebihara, Mem ber (Faculty of Engi neering, Kumamoto Unlver sity), .

I ~g&* : iErl.. n~:t: r;t*}tI~1:l!tIH'I~tH

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=~~ A. 106 ~ 10~ , 1m 63

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O) .r. ;j-. )V =¥'- O) - tlIH;t. r.y. .IWC i&J~~ iHJi: Jj~i '0JJ[] *{\ "9­

0 0 v -~~tl~ /' -;lN O)~ili'0~-~~~ G . A ~

';J r O)tfl'ii:\!ltWft7., ~ '2: J; lJ:R~' e iN:£'9 ~ e, Jl(HH i1Jj.f~O)tj J ~i5: <l:' ' ;tm~ITfi " O) ~A O) iilt j, 1. ! 'i ~i e A.,c'1=. t tJ~ ' 0 Vi .., -r, U):*-IJ&.J!X.i0l~''i, (XA,0)-?X5L:1.Mi;

i17;trI !jtI:\:C'~m ~ t1. i!> 0

pC p ~Z'..(~, t) = 0 (k 8T (X , t)) ot ax ax

+ a Q (X , t ) ( 1 )

<::.. <::.. ~. T (X.t} : tiTIITiJ)i?fI::~ X . P4~lJ t

Ic:tJr.to iJ\ilJ!{ ("C) . Q(X.t) : * ilii 7.» G i~ ~

X, ~ tlJ t IC=.6 11 O)'t..r. ;j, )v =\": - iflUJi' (WI

443

• • • •

III "), p, Cp, k, a : -e ~l, :if' ~T -if /7')v ([) ~~i J1t (kg/m 3) , ltxll (J/k g' °C), fiMi),t;(¥ (W/m '

°C), ~]kJ[>({,y;~ (m- I )

~ -~~([)~ X*N¥ -~&~, ff~~~~~W~~

Q (X, t )= Qo(t)( l- R (t)f exp ( - aX)

.. . . . .... .. . . . ........... . .. ,.(2)

1 {(t _.. t')2 }(.)o (t) = niiTj, exp ~ - j' ....... .. (3)

c. C -C, Qo(t) : IiJj~U I. ~c;to fj is 7t:.r. i·)v -t:' ­

~);r (W/m 2 ) , R (t ): 114t U f. IO l Vj" iS 1:(: ilIT o)

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fi{SU!jl:iU (5)

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~-::J~~~*66, ~OC~ 1tJ~*~iSCcc~~-C~

is cu» 0 (1) :t\:'<£­

a (a T) , ( aT) ax kax -, aQ - pC p at = 0 .... .. ( 4)

cttj~ 1.." , ( 4 )A'C T ([)tk:l} 61' ~J:ttI"J-c , -if /7'

)vO) J!i~ D I·cbt::. 'J -cft5-}-:r is c

rD 01' l' -a---, (k 0--'1')- +(a(J-pC p -OT)} dXJo ax ax 0 -t

= 0 .... .... . , ... .. , .. ....... , . .. . , .... , ... ( 5)

ttJQo (5 )AK~-'%(-)~HVj", iitlym I(T) O)~

~ 6f 1J',

{ a ( aT) ()Je, = - ~D aT - k­o »x oX

+ (a Q-pC)~) } dX =0 (6)

([))~i: I..,,-c:ti~1.li, (5)~!C.):H'-c OI=O -CilSZ,7'J'

~), I (T ) fi1!Em~ b --:) Cc 1::;tln"* j" iSo (6)l1:-'C

a ( 0 T ) 8 ( 8 T) 8 tes roX ko7{oT =ax kaY: oT+ kax -ax ~ J1j t"L't2%j" ~ c

OI=r ( k~I aao;r-fj~ ( k~ ro T)

- (a Q - «c,aa;) aT} dX ..... . ( 7 )

c!(~l~ t; ~1. ;;:-, 0

1'fllJ~~,w~i.t ;'i-JTl t '-Cf, 1t1-~fj-) t: iY...l!C (.:; , t6J I K / G,

j"~1~.~~m~*~~~M~~.K*~~~ 0~* (i) R (X, - L$;X ;SX i ) -C([)~'ij\[Q: T'" (J , ftfJli·ij!':li1 };4{ ,vi-l eX), N ,(X) ~JtH-\~ C,

1' (r) = (NUl} '1' {([l(i)} " (10)

C i.:.l:',

{N,C')l T -'= jNi-l(X)N, (X)f

j([l( ') f = {:;-I} N,- ,(X) = 1- . X =-Xi:'

L i

N,(X)=X-X,,:-. ! L i

XI: 1liSl,')\ i O)~t"l , L t=Xf-XI-l

9; : lYtiB i ([)iIiliffi: LhJ'([)~7f~([)lgmt t f.:iJ#{HC: I.." L'ff;9' C':: 1Ji -C ~ iJ,o

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a'([l( ')}(C,)) ~t--+ (K(i)) j([l( I)f = jF(I )}

.. .. .. .. . .. .. .. . ... .... . ,..... (1 1)

;' 1 - 2

:----.-..!~ I ~ ,

: ~ P I " : : : ~ I , , I , I I I

: ~~ (i - J): ~ l!I (1) : f.flll(i + 1) :

X I ~ X : -I X I X io,

~ 1 ~ ~ ~

Fig. L Diagram of elements.

444 T. lEE Japan, Vol. lOS-A, No. 10, 'S8

t:'~ ~ n. ~nlJ im :h,:H:: 009Q -- Wi11Hil:7}::J]fi'A. C: tJ

Q o ~~t:'.

(C C i) ) = f/ ~!, i)L [ 2 1 ] 6 1 2

(K ( i) ) = ~~ [ 1 -1] L .. -1 1

a (i)QCil L ,{ I}{Fcdl · 2 ._! 1

If!jrciJ mJ>,itlc -;ll'L"I:t . (ll)s1: lc:7 '3 :/;; • =-;:J )v'/

:;fE lc.J::':;'~0-i5:lJ;{3t 0Il~ Jjg ffl:t Q C:

(C(il) 1~ ( il (t+ Ll t )l- It'})c ll (t )l LIt

+ ( K ( i»)J'pCi) (t + Ll.m.+ It'})CiJ(t )1 2

= \FC;) (t + LIt~I. .t..{l"CO(t)1 ." . .. .. . (12)

C tJ Qo z; z; <:: . L1t l ;tltt{l] \1f.,1r<J9~"17} -cJi)':;'0

( 1 2)A~ t.:%T 0 C

(C (i») + .( !i~": J) It'})(i )(t-I LIt)1( LIt 2

'-'= ( (C CiJ) _ (KC;)) ) {t'})c,)( t)\ LIt 2

.:.. IEc~(t + 4t)L~JF'i )l!11 , 2 . ... .. (13)

c 1,;, ':;'0 ( 1 3)s1: ~ ~~~~ (i= 1,2. ... , 1I) IC-;llt'-Ca2i£

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~J?tL7.>o t =O 0)WE.!!l71:ffi'1J~WM;i'dt-c GL"Ej. 3L';

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I) , (13)3tiJ' J? t =" L1t (i)Jtl-fr0)~{;$:i\'iL~.:J.nliLi:\iJ1!tp;;

~n .:;, o ~ O)~~~ft:Jj.3t~H~~m*~C'm < c

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I), ~ ~jttHc to11 Q ·i!rl. Dt~fMj0-:ffi'iJ1*;t 7.> 021,

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bltGtJlt \o

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( iii ) -tj- :; 7')v O)W~ 1:t1m/lN-ct)oo

0) be C', ~O)~tfr~lf.C13 li: 1!H) C C::I)1<:: § 1.J 0

T (X, t )

= { 2f~ VlJ--;iierf e l 2 :15;t1

o, X ) o, (O D-;kexp( - a + 2a k exp a - tl

: -- X ;- a X)e rje:aVD , t- · .. . ".,

I 2 VDtt :

+ Z';;kexp(a2D, t +aX)erfc

X laV .b;t +2-V%~~i l} (1 - R) ... (14)

z; ~ <::, o.s iuc, -cM~Ii'd~U&C'<5Qo

WM~~C:GT~:;~NO).~~ t= O~ O~ . ~

W-~ft-c GT X= oo <:: oDe ~ Ej. 7.... tc; llPJU.l!~i:t

O)±liJ-frt;t, ~~U&iJ~ 20, trp .~,~ iJ 1 21 let!'!:> J: -) 11:::0­

j!;<j G, 1t?HAO)±.tJ--fr(;tJ± "~O)t.: ~ 20 ~'lt';\fIJc: 50 ~

::I-Hf:J(i)±,gil-- K-::>~ \T ITj·m: G, Il"Jr.lJ±tHt (;tl' -r tL0) ±.t\ 15' ~ t = 1. Ox 10- 11 S C'<5 7.> 0 -fll(JR{,1Wl~ :r.q- C: GL" l;t. ~ && y I) ;:J :; (c- Si) -tj- :; 7"JL-<~f*m G t: 0 -tt:/ 7" ) V

O)~~Q~ , mfifi C:~~T7.>§~C'B!!l~~~~~

L~it9 , k =28 . oW/m·ce, R= O. 35, a= 40m-1 :toJ: 0:

AA~:!i!: ( W, =pCrl ,;t 1.647 x106 J/m' ·oC C Gt.:C14l o v --if';YtO)I,")VA $i,\l:t 50ns O)JJjf%~C'';[WG . .:r.;j'.

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{:t 0. 85'C L,iJ>J:JI.-l±-T'. * ~;q--c JfH ' t': ~?1 tl lU: to J:

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~~~ cffiC'~Qoll~~.& ~*~ O)~M~~c

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rJ ltva: ( .6.1' 1.(1 l .'l , i ; ( )jo ~ '/rU IJ )sco

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m ill Ln s )

~ 2 :(-f ~ !~~t:t. K:7Ht, JWffi'j)!f ! .::: J: 7;, -tj- :; 7' Jv~Tm i1ft 1.Jt

Fig. 2. Surface tem pera ture calcul ated 1>)" finite elemen t method , fini te differential met hod an d an analy tical sol ut ion.

.$~ A, 108 ~ 10~. lIB 63 445

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L.'. ~'f,iJiJj)n:j:( t" 7.> iU:kM:c L,"C LJt =4. 0 x 10-" s ;f­

JE/vl:. *)~1j1,tri(( i!tm Lt.: a -Si l\ ~ rS! ),,, ,.j:: u:1 -i :V~ ;!j':;; A ihU;;<

(i)!Wt1Jii:~ ;lt 1. '& 2 K~-9 0 zz-Si (J)qf<j·r"t r;u C-.J(. \ "C ~;I: , iIill.tlt 1i({ftt1-~·rill: Lt,:l;~;a0~!~tt.*>i_ m ~ -t: ~ AAwffi~~a~ w.cL~~fi~~~tt>i-*6t.:

c·-Si (i)/JlIJ;tilti1-ffl 1,'1.:0 a -Si ;m:t:!JliH-i0i!~lW¥!f':r~CXj

L"C~Hi-'!Ji& f;l: c-Si o {u'FcJIj ~ '"CI,';';; 0 i.J!h lJ, T m [C-:::J

~,-C. Bagle y ,:;Cl91 I:J: c -S i O) i;i!u.\':i,i/;;UJ[ I ,4IO·C J:.tl

b 300'C t[ c\ 1. I OO'C ~, ~ t.: Baeri G( 20 ) t! 900

± I OO'C c L -O , ~ C C ~;J:t [it L"C, :4>: Wf. fJl'L.' (-j:

1. OOO°C C{)ft.1c L 1;;0 i'il,'f:Mi. Baer i G( ll) ,;I: 2.9125 x

109J/1113, W eb ber G(l(»(;I: 2.905 x 109J/m3, Wood

G(2J)/;: 3.0756 x 109 J /m3 C L"cI, \ J.j ;bi. *~1j1 .t'T -(' I ;1:

W ebb er GQ){jf["d:}fJI"t.: o

(3·2) ;.ffi\.Jl~1'5c~m· ;UIE)j)Ji: ~l H<!: , ~'t

I;f,)V-¥' -Wii!t E (= 0. 4J/em2) Q)v--lf':lt1- a - Si

446

- --_ ..._---- - ------ - - - - - - ­

R 1 a -Si Q)*.ftt Jil

T abl e 1. P hysical prope rt ies of a-Si .

M~lil:"" W I ; J. 978x 10' + 3. 51x 10'(1'+273)

- ·3. 68 x 10"(7'+273)"' J/ m" 'C ?:~ifi)l7-Ifim l I1 6 l k : 1. ax l O-t(T -G27)3+ 1. 3 x 1O-7 (T - G27r

;-10- ' (1' - 027)+ 1.0 W/ m··C (1'<1.000·C, a Si)

30.0 W/m ··C (1'C: 1. 000·c, !Mi~'1)

i,58S . 0 X H)'( T+273)-I.22 \" ! m· ·C

(1' < l , OWC. 4!1D1J :J&.jU b~Jit l 'l a : 5. Ox lo a IW-\ (7' < 1, coo-c. a-Si)

1. 0xI0'm- 1 (1' Z;1.000·C . MUff) 3. 0x1O'm- ' ('1'<1 .000·C, :tDilD

td-Fj; '<? ' R : 35% ('1'< 1.1 00·C)

30. 37 + 1. 1x 10"'1' -1, 3x 10- '1"+9 .19 :-< 10-"'1"

-;-5 .65xl0-"1'· % (1, IOO·CS;T;<; I .4 00'C )

72. 0- 0.02('1'- ! ,4 00) % (1'>I , 'IOOOC)

li;L\.l '1'", : I , OOO'C

~-»r r.~ sn . 2 .905xlO~ J /m ~

1l 2 7,5:;'Ji: ;lJ7 A Q)qr?1tb,t T ab le 2. Physical p ro perties of quartz.

:sea-I

E ;::C .4 J /C ~)". ·

Ts "'2 0 'C

,~\F:::::::=====:::::P lOCOjL,~ ----~------.::~- :.rf _o> 0 .~8Im

O . 6 ~}1:l

5CO 1, , I

o ~ . _-+--- I i

a xo 600 ::CQ IL')U

ma Ins)

Gl 3 l --E-Jv7 7 A;;"1P';'U,j0j1l gE0I1JHm 2N~

F ig . 3. Time evolut ion of the temper at ure at amorpho us thi n film la yer.

;':,ii')i;;ilcJIWH Lt,: JtJ {;'Q)*ffig~ , O.48p.m, O. 60"m lC;fJ

~7.>~~0~~~ft~~Lk~0L.'~7.>. ~-+~ ~

t ""0-56 ns Q)IH1 (F W H M : 20ns) , WtJlV~ :KjIjj1-na tJt

vn \7.> c 7.i!!~ii'7 A~f)}O) J.i X;ilITil,i\/J.t T s (X= 1. 0006

xl0-3 m) (;\: - ;1:: (20'C) C: Lt,:o v- ~J' :J' :: J !a4,jffi:.

ifriri6'!ldJi: (X = O) 1~:t'iS!ZfCJ:}r·L, MP-).~L.'f-j: it'i~-!\~ IW

~.x f.l!:l!(!W L "Cl&{),,:r:::tl3 ~\ifY~' 7.> 0 -'(-Q)1&. il;ll!tl:J:1:.JI· L. t = 36 ns :c;to~ ' -C lbL~;jif,rl, !5t (1. 375"C) j,2 JF; -y-o }Ii

r: . -trruiF.ftr:n:t."J':'- -j' J v{lUfijltll;j-}"'-Q)i~t\{i;if. (I) t.::~.

7. 9~~25. 4°C/115 O)'!;I J{]--C~Dj{ 'C{j:£r' L. itt iL!l iilliiJt Ie

~ -9 7.> C it1 ;\'!\~ti; q IcJjJ<lJJ L "C i~r,!;jt";::, 0 ilt[wiFili.!fD ;I: f!JjfiltrL.' ts <. - ~ ~c i:i~ }!U IN] - o){ii 'J:iJ ~}fJ l \ .; ;(l"C;to I) ( 6)(22) , *W~:L.' Mil'li!fliliA&1- 1,OOO"C ~cLil xE l,t;; a

T. lEE Japan, Vol. 108 -A, No. 10, ' 88

E ~ 0 . 01 J / e. a:.~

T s -: 2 0 'C

- - !JOO[n $] --· 1 20 [ n s )

30 (ns) 16( n~ ]

~ 4 T~N 7 T~~~ '~~a~& m8 0

t,;;\Bt5}:(ti F ig. 4. T emp eratu re di st ribu tion a t am or phous thin film layer an d subst ra te .

t=72- 816ns ~-c: O)~Jrl tJtJri\& (1. 000°C) Ii, illd!:l 1: ~ 7.> ~b* O) t: Ib -C: i!57.> o rM~~~j1ll:tlJ l.,1:1&. iPnd£!:/i 0. 2- 2. 4'Cfns O)t<]f;--c:~-\'::>:6)I ::: [l\!:F L -en<0 ~iiii

tJ'G 0. 48 1'm C O. 60 I'm O)~~ O) jE,[([i ;t l/--!f:)l:

oyx:*' )v -¥ - \t'N: :6SIj \ ~ vvi: Ibl:::~.'.',~ ~ C' /;n:t L'Lv'

@Hl, :JI:;.r.;j'. )V-¥- '$;1Jt 0. 4 J/cm 2 0) l/ - -!f )\::1:

a -S i l\~w:mM Lt:±H;~O) t = 16, 36, 120, 900 ns I::

~~7.>~mcE~~.O).~~~~~~ot=~ ns-c

/;;:X= 0.3\1111 f;' G 14,147°C!:lm O)'6Jji';--c %l tilHc if!.

J~ tJ i{jrF V (I, ' 7.> f;S , L 0) L c 1 -Jt7~ 0) J: 'j lC"'5'7\-Gt~

.0 0 MU¥f,Mt (X=0.2 Il m , T = l , 236"C) -eli, ~P1;

fiX%1& (D , = k/ lV , ) 20. Ox 10- 0 m2/s, !!&11X.r. ;{.)v-¥­

(S=aQ) O. 98x 1017 W/I11 ' -ci!5Q o -/i, M.I¥J!L-el'

fJP ;!\ll:/) (X=0.3 5 Il ln , T =662"C) -eli . D, =0. 44 X

1O-6 m3/s, S = 0. 15XI017 W/m' -Ci!5 7.> o Vt...,-e, &hff7 I;jl:/t O)}:t.j ;t 1\X 07:t\: ~\C' !Q:(Ij)l.r. ;j'. )v-t~'-:6i* ~ r, '1: Ib¥filg[

~t)HtJ) L" KM¥f, L -e v-ts r, \ li~ 'l} c o)I!<~ '::* ~ tJ,j~m: L

oj rirtJt '£ L;'L 1,' 7.> 0 t = 120 n s -c Ii O. 42 I,m ;t -c M~m

L , ~Mlf. Lt: ej;Jt'ii~\1~O)Js1J*O)t'::li) 1, OOO°C -;E ~

f~h 'L r, , 7.> o t=900ns -e!i1NiM\ ~).& I:Jj L'LIMl!ft - 1M

[E.JtJi~~T L" *-ITii~ <c (1jj&i.lttJs~.!kli..J:.1J {I:t.T L'Lv'

7.~ o L tJ) G, -+j- /7»vO)iW®$~c';l:f?Mi:#;tfCJ: I) 'Iillt 1!t1JiJ:.fl. L..-e, iNt.&5}:tt "J1JH~-{tL'LI,' 7.>o a -Si fi!i. IMc E~iJ7~O)Jtl..w (K= 0 .6 ~,m ) '('ii, a -Si ;.\'1~

O)~~~tllXl;'f: 1& tJ! O. 42x 10-6m2/s_ O. 44X 1O- 6m2/ s (t=

900 ns, T = 796°C) IC)(J L , E"!ffil7 x 0)f,f;1:<X11 0.8 1

x 10-6 m2/s c jUjj:f$0)M;tJtm:OiU1.: li;}il'{iTI ~ /y,; L'L~'

.0 t::.lb, !(\\'l?tO)j~H' ICJ: ~ iful1!tO)~ii'itJ,~{ tfi~ G:h

tss -; ~ 5 li a -Si ;:;7'~~~ UE~;fJ7 7-.;/;1;t1i0)-$17t0)

a:.:~ .,. :.;:. o . .. J /<: .. ' , r ."2 0-ci

.2 . 4 .s .S I I.E

t';t~ (pm)

~~*t,"l;trOl ffi - ~ fD W ill 1.' ;j'; T

~ 5 T -t)v 7 7 ~ ~~~ r t-J J: U}f;:!&iil;5t0) iIi1m: 5}1tr O)F~ml~{t

F ig . 5, Ti me devel opment of th e spa tial tern­pe ra tu re d istr ibu ti on of amor pho us th in film layer an d subs tra te.

0.6

?:0.5 Ts =2 0'"C 2

• 0.5 J /c~

2 • 0.4 J /c"

S 0 .4

2• 0. 3 J /CJO"­

~ 0.3 1;1: ~ iii! ;I; 0.2 c'Il

0.1

, ~ 0. 0 -- I I I ----I

a 2CO 400 600 EOG i C':'U

r.i r., (n s )

F ig . 6. T ime change of mo lten layer thickness .

(X = 0-0. Hl «m) iJ~ ljf~m]5}1tr0)!11jmJEt':J!.~ljfjT.2ff;Lt.:: 'bo)-C il5 7.> 0 MHJll'. · iM I8J;mn~ 1 U.H ' 'L , 111l tt: c ~{* tJi

jJi! L n,;r,Jj!,J;/'0 - ~1d11~ITii~~*,f;,~<: /f; L 'LP ~ c a­

Si A"1V31c:iii:1EltJiff:t£ L'L~ 'M~10li, iMd!\ 0) j.;/J m,C

.J:.1) Ji70J0iMb£{n;T(;l:;J\~ <. Rillit iJiH'iILt::.t~ft1.~

lciliJ!Jt 'if1£T L-e v' <0

l/ - -!fJ't O) :JI:; .r. ;j'. )v -t~ -*flt t) ! 0.3 ,0.4 , 0.5J!cm2

c.~~k~~ O) , ~~~.O).B~ O)~~ O)~OO

w,:1 tH~16 1Lff--<f' 0 .r..t. )!.o' -¥-\t~ ;b ! 0.3 J/cm2 O)f~

flo, t= 88 ns -c X =0. 3111n ~ <:~fl!i: Lt::.j~H~ ~ !cii\' N!I~1.&1fj UJ,M Gitifi,'jJ L , t=577 ns -c:ilil~tJi*~ T L

-rp~o .r. ;.f,)!.o'-¥ -itm:tJ~* ~ <ts. ~ [ic~Wf~li~

<tJ, ~ 'Lv ' 7.> iJi, 4t:l~:W:O) iJiMJlit: H:fi£ 'C~'1Z L'LI,'6 t ::. lb, f8 O) )fi ~ li.r. ;j'. )v -¥- t~gr O) ).: ~ ~ Ie 1;1J:t{0] L

1I~~ A, 108 ~ 10~ , ag 6 3 447

-- _ . - ._._-­

~ 7 1~1111¢ . &b!L]jm[Jt

Fig. 7. Th e melt ing and the sol id ifica t ion veloc i ty .

"[I, ' ts ~ ' 0 ~ 6 OJ i).H,¥t"Ij{C;J::; r} ~ U: {;j,~~*~ Q c. c

,e J:. IJ. iMl m:i!B m: (Melt ing Vclocity) , i~ ~~ I..fE

(Solidi fi cation Velocity ) ;;? *~J.)C.cIJ ~L' ~ Qo W li:~i~~ l:ln;l: . itH~1&O) !J?1tt :tJUL~~ikJE";j- Q 1J(~tJ:/"

'7;' - ~ c.m:b~" " o :illit!UJ~.!f!.~'~0 I c';l: . JJJ'fT-0) P:! Sll .:r. ;r· Jv ~- 1J~* ~ ~' ;ti!:iM Il!U f.., -CV;t? C. clU ';:

~, 7--t= Jv7 "j" .A ;j:§ ~% P.X9 7.> 0 -)], lIf~'f~-A-Kli

M~ ~M~• • ~#~~~ O) L' , ~~ffi~%~9Q o

~ 7 fC1t.f&Jit ffiiiffi1Llt~ 20. 100, ZOOT C~1 t.t' -tt­

t.:lt1fr!e;J::;~ '-C , 0.4 J/cm2 0) v - "'.f Jlt f:@' !M I f}j O)~m ·

int§l:illi&>J:ffi-:i0 ~:I&~llii i,\jWb?1iTlj <t.;.1,;;, l ;1c~!m. !*

ilHl:.!f!. <ts IJ. ~ @ii!!ltln;l::i!1 <ts -:> -CP Q 0 ~j;¥~f£

L'1;l: p-; n O)£f&m;lliiiiliilft-r bfJJ~..>WiQ)-CjjjwtiJ$.!f!. < (125 m/s). -(: O) {& X = 0.1 4 l1m IUJ P -C 10 m/s O)]!!

v\iilitl'UOJ: 1) , friU X =O.17 "m H:::t"P-C 25m/s 0) .!fI· ~' jffi&KtJ: -:> -C . -(:0) 1&. t~Jr P:Jm< t';:-:>-C I, \7.> ot!f

,c f,:j,m ,;m rjJL'(£ G" X = 0.1 I'm 1'J'4~ctJ v) Q --i!~JY1

tJ~ I:ll: {!rF ' i . M1itfIXk C~Mi f.:f& ~7ti!: L, -c~0)J:.? ,e a~HA L' f!-7.>o ~J;Ui. 1JjS;WIA:llii iffi'L[5£ i,)120°C 0)1£:313. lii!k ij7f;iiliLlt o){l~T(;J: 1=27 ns, X= O. 141'10 -('!.t G-CP1,;;,

iJ ~ , ii\..rItlW n~JjfJ L'0)7M i?!;l¥ k = 1. 12 W/m .oC. f.:!I~il:

W . =2.41 xl0G Jfm3 .oC ~m l,'7.> c. 1 '-~ 27n s L' O)M

Pl:llkR V kt f W. U: o. 1111lTl c ts '!> 0 tit -:> C. t = 27ns

L'! ;l: Xc=0.14 urn O)tI:1is lCl;!: -t ·;}t-!\ .:r.;t·Jv {: - iJqi~

~f.., -C;J::;~ ~ ••M~~G1,;;,k~~~OO~~~~. ~

Wf.jjIH;9:O){~T iJ~~ GQ 0 Th ompson G(23' /;l a - Si O) ~

Iff: • &H)!jjt~L', c.0)J:. ? tJmfO:U\ r{.~ (relaxed st a re)

:b{friJ.~,i,)'ff.{£T Z,UJljZti,IC;)P-C·d·& L -CP ~ ° a-Si

O)~m~m:O)j}lU)E{!iIJ c t.r , Bru ine s G(2<'{i Si 1r,1iJ1'2,

Ie Cn -1 * ;/ >J:ttA L-C fF ~~ U .: O. 22 lim 0) a -Si If':i IUv ~ -v --lf'Yt. (FWH M: 32 ns) 1": J!\tMf..,. IX M

448

J\':O) =f i!P>J:~Jffl U.: 1UIJJt~iJ ' ~Jil:jditi 13± 2mf s ~w.

-C ~ '7.> o T hompson ~ ( 23 ' 1;l:, 4J"7 71 T J:O) Si t5lffi 'e 1 ;of ;/I:J:A t.-C O. 32 lim 0) a -Si JiH: fF!:l L.. JV ~

- v-"'.f Jlt WWHM : ~ n~ ~.M f.." ~~. O).)E

fJ'G a -Si ~;61fM{1W vcv',Q~ rJl ~*~t.:o !l!IC, Jl\'l

Mt!tOJwrThlli.Q ~iJ' G~f.!i&. Si O).l!t t' ~*~. mm~

& Ii 10- 20 m/s OJ rEllIO i7.J c!: f..,-C ~ ',Q o c. ~1.GO) ~ ~

.c ~.9~k~K. ~ti ~ffiB~~2~ IC;J::; ~,Q

laJ!i11i ilHftO) tHij.~ ~*3) 0 c!: 13. Gillis Ie ts ,Q 0 J5: TIiiB&iJ1 200°C O) :I$J.j"frK!~ 14.5 m/ s -c ilSoo *if~

z;r{ili c ~~11il {H!. <- f.{ t.-CPo o ;:li~l&iff-c'li , ~

ffiIe liJJ lJ' ? ~Jjlj'J illi Br! ;t~ I{ l<::{llT t.-C~ '" 0 ~[fijiJ' G O)*Mt:Jjl1J;:IPJ~ ' c ([j[yt t.-C~ ' 7.> t: i>6ihlilJ£ c. oj ~ 1J{t\

,ctJ 1) . IMt~mt~ T liJfil1JL' ,;l~ OC i,) {J:-. gr. t.-Cv' 7.> 0

Galv in GC15 ' I';l:I~/i(tlj1lig[ldJ L, -C (;'~ O) ;!i fJ;J, ;i\;~ · f. f} -C

~,1,;;, °

v = L1~ ~'";/---Jj~~ (1 5)

=H llN~~i:Ec ( 15)~1C •.t 7.> iJ§il))ilj.tl:ltO)fl;'fnU2£1t.H 6J 8

IC"~To ( 15).ic\:0)~~:W:l ifi1J i1S0)t.{\1J1;ijj:O)nt;Wc [JSJ

r~ O) fiII (k= 1.12 W/m ·oC, MI ~.fl't W . =2.41 x I06 JI m3 .oC) ~m vvi: 0 i!i1i:l& Jitj]ijj,\liBtil{ I~~' 1;1 c[iEj :?!n;t~ < - :l& L -C;J::; 1). 2000C O)tjt;{}, ~~OO~1&O) t = 149 ns

(X =O. 44 11m) L':(;j'pR~~j:l L" i 0. 773m/s. ifflfrWf.L'

l;l: O. 713mfs L'asoo ;tk . ;U~~TiJ'JO) t= 1.215 ns

(X=O. 051'10) O).tbjfr. 1-I r~FU~~t.tL' i-;!. 0.253 tnls , ~~

trrmL'l;J: 0. 250 m/s L' asQ 0

( 3· 3) a /J\~iliiMM-7t: ::r: *Jv;f - IfIi ~iliir~

Wj1~:® O);t~c t.eli a-Si l\\lJ]Yi 1C v -"'.f J'2>d:P.\HHL,

k • • ~~a~~M~ IC~L,. m.~~~ f.., ~-:>k~

E = Q . 4.J/ CC1~ Ts

1.5 G 20·C - - -­ - ­ ( 1 ;-) ) i':

x too'C

0.0 ~--+-_---+-_---<__-'--_~_---<

100 JDO SGO 700 SCO 110:; 1300

m~ 1 ( n s)

r~ 8 itE~ i$ Eft O) ~ l m$~ { ~

Fig. 8. Ti me change of the sol idi fication velocity.

T. lEE Japan, Vol. l OS-A, No . 10. 'ss

ts =2 0-c

_____---- T m =1410~

--------_.--.­_----lot--~'-~-J( T m= 1 CO o c

_-.....-.----- --'" l i

~: :L~ . .~ 20 40 E:O SO 1;)0

J{ l v;>;~; F WIlM ( 1": 5 )

~ 9 JtVH,l~ fiijM<kW~3\:;.L *Jv ¥ -\£iiJr

Fig , 9. Threshold energ y de nsity for surf ace melt ing.

i,:'.2: L z; , B!: ~ 0) i- -'Ify(;I\"Jv ;1" l~tJ (FW H M) ((::to vt Z»U /J\ ~ ill g. k !~7 )\':.L *JV ¥ - if;'VX -!: P-:l 9 IC~-g- 0 1U.l~

f::::;lop -n;.t , iMlf\.lf. jgfJt ,:±: 700, 1.000, 1, ,1l0'C c Lt.:: f~ -fr O) t- - -tf :lt r~ Jv;1" ~,d'.ti - ~ :Itl:Jj\:rtillirl!ltlWJ't .L;;f­

Jv¥-w g[ O) r~~~~l/L ~ \ ~ o / {'JV ;1" w;J i'J5R:< fl. ;;'

l C:-:>~ \'-c, a -Si lti~ - to J:. rJ J;l; lIX A,. o) ;~~ .fft ll:{;l; ~ :ftJ -g­

k ~K , .m~~~ u)\': .L *JV ¥-moc t* ~< u ~

-cl \~o a -Si }1~Ii!4 O)m:JJ \* iffi~ W(. J't .L *)V ¥-!&.' &r

0) iW);:g{II'( c L -c Ioj: , Bruines b (24) Ie J:. l) O. 14 J/em 2

(a - Si mi O) ~~t, : O.22Ilm, FWHM : 32ns) . T hom p"

son ";> ( 23) 1<::J:.l) 0.15 J/em2 (a -S i Jm O)W-~ : 0.321lm,

FWHM : 28 ns) 1.): C iJ~1!} b ~1, -C~ \ ~ 0 ~ 9 J:. I) . «Jv

;1,, ~Ri tJ ; 30 ns 0)J:g-~ . T, .=70O"C -c 0.152J/em 2 c t: IJ , i:. ;h GO)~!j9'iflf:( IC;;JI l \fItI c ts: ~ -Cl \ {) z c t#)

1»;;' 0

iXle, il l) r'.J 1>. 1::* (GaAs) ~"'t /' 7"Jv c L -c ~

<.J , i- -"l)I:H {i!N L, t.:: f~.g.O) m:Jj \ ~TIfi/Alkwr) rc .L ;t· ) V

4:·-Gi&: 'i2:::j( iI.:d.:: o GaAs I;t, Si C: ltl&L-C4J.r~lFJJ

riiJ :\j-:~ <~~ ZHlb'J :\JJ\c) l\t,::Y..lIC. mi:iill1Tv;{ttoJ:.tJ

~~m~~~-g- ;;, ~~0)~ft~~~ ;;' c L -C~ 0 ~ h

-c~\~ o ::'~i5:0) Lowndes G( 4'O)tlH~, c J:. h , ;f , GaAs

O)~f!t ':"· Ioj:iMJJ[{t'(:fff1~ ';J§·h\.t L, ~~ ~.Q: w.= 1. 728 X

106 J/m3 . 'C (20°C )~2 . 025 x 10° J/m3 . oC 0, 500°C), 1i!'. 1i;iJ;L* k=38.4 W/m '''C (20°C) - 8. 3W /m · oC (1, 500

"C), LXtH~ R =35% (T<1 . 238 '(;) , R=60% ( T~

1,238"C) <:';[[ (l:). t: h -c l' ~ ·ti.t::., IJ& J~ Ix"1ii a t-;t0

8. 0 xIOGm - J -lEe', 7~~.'!:\ T, ,,= l ,238°C e' O)j!!i?A JH (oj: , 2. 916 X109 J/m 3 <:,S ;";C L-Cl' ;;'o ;;f>:ifuB)(

-c bU20)V3't!EM~3li.\{<.J , '* t.::"'t :/ 7' JVO)I'J.~ (oj: 20. 0

l-'m -c (2 ,2) Un c fpj-O)~ ~M!J~ T Jv,:±:m ~ \t.::Gi·Sf:~:fT

~t.::o -f O) ~~t /{'Jv;1"WJj I5 ns (F W H M) O)v --tf

.~!fi A, lOB ~ 10~, JP.l 63 449

J'tP,(UHICJ:. ~ J~ Jj \ ~iliil!~~I)I: .:r. *)v¥ - it' l!t loj: 0.20

J/cm2 Cts ~ tc; Lowndes GW!cJ:. /) GRAs "'t /'7

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oA 4. t5 olfil

a-Si i1;n~ ;fJ J:. <.J GRAs "'t /, 7" ) V IUv t: - i- - -In \: ~mMLkc~ O)~~~ · w~ · ~m ·~~~m~­

1XjdMi; i(,tjjfR3:t~ml \ -cfjllL! !z::~ut -C}j!j1 t!, (XO)J:.

-'j tt~;tr ,{fuI>C f~t: o

( 1 ) 1'r ~n~~iVl~ l: J:. ~ 7 ~ JV7 7 A"*;.~'7 {4: 1J c' 0)

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( I ) G. Auv ert , D. Bensahel, A. Perio, V. T . Nguy en & G. A. Rozqony t : "Explosive crystallizati on or a-5i films in both rhe solid and liquid phases", App/. Phys, L et r ., 39. 724 (1981)

( 2 ) S. Prower, R. Kali'h & M. Adel , "Pu lsed 1. "" l rcallnenl of diamondlike c. rhon films" , ibi d., 48. 1585 (1985)

( :i) [oannis N. Miaoulis & Bor-a B. Mikic : "Tem peralure distribution of silic on-an-insulator systems during reCr}"S4

1. 1Iira, ion precessing", J . Appl . Phys.• 59, 1663 (1986)