Chapter 01 SYSTEM CONFIGURATION Systems for Spectroscopy ...spectrolab.co.uk/pages/optron/pdf/Spectroscopy System Catalog.pdf · Chapter 02 RAMAN SPECTROSCOPY S-RAM, Confocal Micro

Chapter 01 SYSTEM CONFIGURATION 04-05

Chapter 02 RAMAN SPECTROSCOPY S-RAM, Confocal Micro Raman Mapping System 06-07RAMBOSS-X, Modular Micro Raman System 08-09RAMBOSS-500I, Micro Raman System 10-11RAMBOSS-STAR, Microscope Raman System 12-13

Chapter 03 PL SPECTROSCOPY MAPLE II Micro PL(E) Mapping System 14-15MAPLE I High Speed PL Mapping System 16-17

Chapter 04 MACRO SPECTROSCOPY SC-100, Macro PL(E) /Raman/ATR System 18-19SC-100FS, Fluorescence Life Time System 20-21SC-100T, Laser-Based Plasma Diagnostics 22DGA-X, Flue Gas Analyzer system 23

Chapter 05 MONOCHROMATORMonochromator Selection 24Monora150i 25Monora200 26Monora320i 27Monora500i 28Monora750i 29Grating Selection 30-31

Chapter 06 OPTIONInput source 32-34Sample chamber 35-38Monochromator 39-41

Chapter 07 DATA ACQUISITIONAD converter board 42Lock in AMP & Chopper 42SOFTWARE 43-45System requirement for Quotation 46

Chapter 08 PARTNERS 47

INDEX

Systems for Spectroscopy

Microscope, Fluorescence

Confocal, mapping

Life time, PL & Raman

4

5

Free space PLX lens

Fiber optic adapter

MonoRa200

SYST

EM C

ONFI

GURA

TION

| Pa

rt 0

1

SYSTEM CONFIGURATION

MICRO RAMAN SYSTEM

S-RAM Confocal Micro Raman Mapping System

RAMBOSS-X, Modular Micro Raman System

RAMBOSS-500i Micro Raman System

RAMBOSS-STAR Microscope Raman System

PL/PLE SYSTEM

MAPLE II Micro PL(E) Mapping System

MAPLE I High Speed PL Mapping System

SC-100 Macro PL(E) /Raman/ATR System

SC-100FS Fluorescence Life Time System

SC-100T Incoherent Thomson Scattering System

785 Raman laser

He-Ne laser

Ar ion laser

Ar ion laser

DPSS Lasers

Quartz Tungsten Halogen lamp

XE ARC LAMP

Input source

Andor iDUS

Andor iStar

Andor Newton

LN Cooled MCT PbS

InGaAs, IGA-300-TE2

Silicon , SI-100-1

PMT , PDS-1

Detectors

Micro PL/PLE

Micro PL

Microscope Raman

Micro Raman

Modular Raman

Confocal Raman

chambersMonochromator as a light source or Filter

MonoRa750i

MonoRa500i

MonoRa320i

MonoRa150i

Monochromators & Spectrographs

HIGH QUALITY OPTICAL INSTRUMENTS & COMPONENTS FOR RESEARCH

6

7

RAM

AN S

PECT

ROSC

OPY

| Par

t 02

S-Ram Confocal Micro Raman Mapping System

S-RamKEY FEATURESHigh precision Raman Mapping• High spatial Resolution• Automation : Grating, Filter & laser selection• True Confocal Raman Microscopy• Easy & Fast auto laser selection• Flexible structure•

APPLICATIONSingle molecule detection• Stress measurement of Si• Crystallization condition of each point of amorphous• Si thin film

Profiling of polymer layers• Carbon material(CNT, Graphene) Surface and• subsurface analyze

Semiconductor surface structure•

FEATURE Laser combiner : support up to 3 lasers, additional•

external fiber connection

High spectral & spectral resolution• Macro Sample chamber capabilities for• Fluorescence, Transmittance & Transmittance

Real confocal module down to few micromete• r(optional variable type)

Fiber adapter box for Macro sample chamber or• Raman probe

Sub-micron confocal Raman imaging• Heating and cooling stage(down to 4K)• Automation(control input power, wavelength,• filter polarizer orientation, pinhole size, grating & detector)

Free space & Fiber optic connection to Micro/• Macro sample chamber & Spectrograph set.

Notch filter module (stokes & anti-stokes detection)• XY mapping down to 0.1 um step• Z axis signal profiling and Auto focusing• Combination with PL/PLE & TCSPC•

SPECIFICATION Excitation source

Wavelength 785nm (up to 3 different laser)

Spectral line width < 1 MHz

Output power up to 300 mW

Spectrograph

Spectral range 200 ~ 1,100 nm

Raman shift range 26cm-1 ~ 2,600cm-1 @ 785nm

Spectral resolution <2cm-1 @785nm

Stray light rejection 1.0 x 10^-5

Sample chamber

S-Ram, Free space optic system

Easy modification to confocal, Imaging, Additional fiber input Source & macro sample chamber For ATR, Fluorescence & Life Time

Detector

Type Low noise Back-illuminated CCD Deep Depletion with anti-fringing, low dark current

Pixel format 2,000 x 256

TE cooling Down to -95℃

Quantum efficiency 95% @ 800nm

Dark current 0.025e-/pixel/sec

Input laser sourceLaser combiner module up to 3 laser available• Manual or computer controlled shutter inside• 785nm CW Diode Laser set• Output power : 100mW FWHM Spectral Width : <0.001nm

Sample chamber XYZ axis manual stage• Travel range : XY axis : 50 x 80mm Z axis manual stage travel range : +/-25mm Motorized filter wheel system Easy and quick• selection of filter set depend on laser Wavelength Computer controlled ND filter system to adjust a• Power on sample Laser beam & sample monitoring Vision CCD• Objective lens• 50x objective lens /N.A. 0.55, W.D. 13mm FL : 4mm For 400~1,100nm 100x LMPlan-IR objective/N.A. 0.8, W.D. 1.2mm For 400-1,300nm

• Spectrograph Focal length : 500mm• Wavelength Range : 200~1,600nm• Resolution : 0.05nm @ 435.8nm• Accuracy: +/- 0.2nm, Repeatability: +/- 0.04nm• Raman shift range : 10cm-1 ~ 2,500cm-1• Raman shift resolution : <1.2cm-1• Computer controlled Motorized slit & Grating module• Detector

Back illuminated CCD,Deep Depletion with anti-• fringing, low dark current Optimal sensor for Near IR application Active Pixels: 2,000 x 256• Peak QE: 35% @ 340nm, room temp, 95% @ 800nm,• TE cooling : down to -95℃• Dark current(typical) : 0.025e-/pixel/sec@max cooling• Software

Easy parameter selection• Select monochromator, serial port, turret, grating• & current wavelength information, wavelength range, number of point/resolution, integrating time, accumulationAutomation control (Beam path, laser, detector, optics)•


OPTIONS

Mapping function Low scan speed with high resolution• 0x30 um area about 3 minutes At 1um step resolution Minimum exposuretime(available 0.1 um step.) High scan speed with low resolution• 2” wafers within 8 ~9 minutes at 1mmStep@ Minimum Exposure time

Low temp application4k or 10k He Cryostat system• Nitrogen pour fill cryostat set• (77 ~ 350K)

Detectors High efficiency & Stability for• UV-VIS- NIR Spectrometer for UV-VIS-NIR(up• to 2400nm)Low performance Line CCD• Photo diode module•

a) Non confocal 0.3 um stepb) Confocal with 0.3 um step with 25 um pinholec) Confocal with 0.2 um step with 10 um pinhole,

X100 objective lens

Sensitivity about structure of GaN by depth

8

9

RAM

AN S

PECT

ROSC

OPY

| Par

t 02

RAMBOSS-X Modular Micro Raman System

RAMBOSS-XKEY FEATURES Modular optical spectrometric System• (Switchable sample chamber)High sensitivity & efficiency• Fully automated system• Multiple excitation source(up to5)• Large sample area•

APPLICATION Stress evaluation of Silicon(Si) From the• Compressive tensile Depend on the Direction of stress in Lattice structure with Raman shift

Characterization of Amorphous Silicon & CIGS• solar cell Quantitate the component concentration

Characterization of Graphene on SiC• Air pollution analyze• Raman spectra of variable carbon materials• Flexible LCD with CNT clear electrode• Development of Bio sensor thro Au ball• Thin film solar cell crystallization(a-Si, uc-Si)•

FEATURE High sensitivity, offer ultra-low signal detection• with minimum noise

Flexibility & Sensitivity in one instrument• (compatible with SERS, TERS, AFM)

Real confocal with pinhole• Variable laser line combined for different• application up to 9 lasers

Time gated system to enhance the signal about• 100 ~ 10,000 times

Motorized control : laser power, input Beam line,• orientation of polarizer Pinhole size and grating etc.

Sensitivity• Clearly resolved 2nd order of Si Spectrum in 1 msec exposure time Clearly resolved 4th order of Si Spectrum in 60 sec exposure time

SPECIFICATIONExcitation source

Wavelength 632.8 nm (up to 6 lines)

Polarization >500 : 1 linear

Output power 18 mW

Spectrograph

Spectral range 200 ~ 1,100 nm

Raman shift range 32cm-1 ~ 4,500 cm-1 @633nm



Sample chamber

Ramboss, microscope, SC-100,

High performance Spectroscopic Micro/Macro Sample Chamber

Detector

Type TE cooled CCD(Deep Depletion with anti-fringing)



Dark current 0.0006 e-/pixel/sec

Software

Solis & Monoworks User-friendly interface for Simultaneous detector & Spectrograph control

Structure and consist of

OPTIONS

Mapping function Low scan speed with high resolution• 30 x 30 um area about 3 minutesAt 1 um step resolutionMinimum exposure time(available 0.1um step.) High scan speed with low resolution• 2”wafers within 8 ~ 9minutes at1mm Step@ Minimum Exposure time

Low temp application4k or 10k He Cryostat system• Nitrogen pour fill cryostat set• (77 ~ 350K)

Detectors High efficiency & Stability for• UV-VIS- NIR Spectrometer for UV-VIS-NIR(up• to 2400nm)Low performance Line CCD• Photo diode module•

➊ Macro Sample chamber box(included modular Macro sample chamber, confocal module, Spectrograph and low temp cryostat)➋ Laser combiner(up to 6 laser available, change the combiner module later without any Change of optics and hardware) ➌Micro sample chamber(Allow to use customer’s microscope system as a sample chamber)

Laser combiner(optional polarizer, automatic shutter system) From 266 to 1064nm, up to 5 laser available

Macro sample chamber for PL Raman PLE, TR and optional 77k LN cooled cryostat available

Monora322i, monochromator with two exit port for variable detector (spectral range 200nm ~ 5,000nm)

Optional confocal module

Micro sample chamber or microscope system, optional cryostat (4k~), mapping stage & AFM

Beam delivery assembly Motorized filter wheel controlled by software depend on input l ine Optional Notch filter

10

11

RAM

AN S

PECT

ROSC

OPY

| Par

t 02

RAMBOSS-500i Micro Raman System

RAMBOSS-500iKEY FEATURESHigh sensitivity & efficiency• Fully automated system• Multiple excitation source• Large sample area• (EL, SERS,LT, High temp & Pressure)• Built in Microscope•

APPLICATION Stress evaluation of Silicon(Si)• From the Compressive tensile Depend on the Direction of stress in Lattice structure with Raman shift


Characterization of Graphene on SiC• Raman spectra of variable carbon materials• Flexible LCD with CNT clear electrode• Development of Bio sensor thro Au ball• Thin film solar cell crystallization(a-Si, uc-Si)•

FEATURE High sensitivity, offer ultra-low signal detection• with minimum noise

Variable laser line combined for different• application up to 3 lasers

(Compatible with SERS & EL)• Time gated system to enhance the signal about• 100 ~ 10,000 times

Motorized control : laser power, input Beam line,• orientation of polarizer Filter and grating etc.

Sensitivity• Clearly resolved 2nd order of Si Spectrum in 1 msec exposure time Clearly resolved 4th order of Si Spectrum in 60 sec exposure time




Output power up to 100 mW

Spectrograph

Spectral range 200nm ~ 1,100nm

Raman shift range 26cm-1 ~ 2,600cm-1



Sample chamber

Ramboss High performance Spectroscopic Micro Sample Chamber

Detector

Type TE cooled CCD(Open electrode)




Software


Input laser source

Wavelength : 785nm (266 ~ 1064 nm available)• Max power on sample : up to 300 mW• Spectral line width : <0.1nm•

Sample chamber

High performance Spectroscopic Micro Sample• Chamber with microscope body

XYZ manual stage : +/- 12.5mm (XY) +/- 5mm(Z)• Included laser rejection, long pass edge filter• Motorized filter wheel with ND filter• For variable input power from 0.1 ~ 92%• LMPlan-IR X100, objective lens• Spectral range : 400 ~ 1300nm N.A : 0.85•

Monochromator

Monora502, 500mm focal length• Side entrance slit and front exit port for CCD• 0.045nm(<1.3cm-1) resolution@ 435.8nm• Detector coverage : 96nm• Repeatability : +/- 0.04nm(1.4 cm^-1 @532)• Triple grating turret•

Detector

Open electrode CCD• TE Cooling system. : - 100℃(Minimum cool down)• Dark current : 0.0004• Max spectra per sec : 88• Register well depth(typ.) 1000000e-•

Software

Instrument control and data acquisition, fully• Integrated data analysis, sample surface & Input beam position image capture


OPTIONS

Laser combiner Select proper laser line depend• on sample and block the harmfullightAlign the beam path easily• Combine different laser up to 9•

Low temp application4k or 10k He Cryostat system• Nitrogen pour fill cryostat set• (77 ~ 350K)High resolved mapping function• Direct measurement of stress(or• strain) map in silicon based solarcells by monitoring the spectralposition

Detectors High efficiency & Stability for• UV-VIS- NIRHigh sensitivity CCD• Low performance Line CCD• PDS-01, PMT tube• Photo diode module•

Micro Raman System diagram Sample area with high precision mapping stage

12

13

RAM

AN S

PECT

ROSC

OPY

| Par

t 02

RAMBOSS-Star Microscope Raman System

RAMBOSS-StarKEY FEATURESHigh sensitivity & efficiency• Fully integrated• Multiple excitation source• Fluorescence image system• Single molecule detection• Easy to combine with customer microscope•

APPLICATION Stress evaluation of Silicon(Si)• From the Compressive tensile Depend on the Direction of stress in Lattice structure with Raman shift


Characterization of Graphene on SiC• Air pollution analyze• Raman spectra of variable carbon materials• Flexible LCD with CNT clear electrode• Development of Bio sensor thro Au ball• Thin film solar cell crystallization(a-Si, uc-Si)• Single molecule Spectroscopy•

FEATURE High sensitivity, offer ultra-low signal detection• With minimum noise

(Compatible with SERS, TIRF, SMD)• Variable laser line combined for different• Application up to 3 lasers

Time gated system to enhance the signal about• 100 ~ 10,000 times

Motorized control : laser power, input• Beam line, orientation of polarizer• Pinhole size and grating etc.• Sensitivity• Clearly resolved 2• nd order of SiSpectrum in 1 msec exposure time Clearly resolved 4th order of Si Spectrum in 60 sec exposure time

SPECIFICATION

Excitation source

Wavelength 632.8 nm (up to 3 wavelength)

Polarization >500 : 1 linear

Output power 18 mW

Spectrograph

Spectral range 200nm ~ 1,100nm

Raman shift range 32cm-1 ~ 4,500cm-1



Sample chamber

Micro scope Olympus, Nikon Series

Detector

Type TE cooled CCD(Open electrode)




Software


Input laser source

Wavelength : 632.8nm (266 ~ 1,064 nm available)• Max power on sample : up to 18 mW• Beam dia. : <1.0mm•

Sample chamber

BX43 microscope system with eyepiece tube• XYZ manual stage : 50 x 80 (XY)+/ -25mm(Z)• Included laser rejection, Notch filter• Motorized filter wheel with ND filter• For variable input power from 0.1 ~ 92%• LMPlan-IR X100, objective lens• Spectral range : 400 ~ 1300 nm N.A : 0.85•

Monochromator

Monora502, 500mm focal length• Side ent. Slit and front exit port for CCD• 0.045nm(<1.3 cm-1) resolution@ 435.8nm• Detector coverage : 96nm• Repeatability : +/- 0.04nm(1.4 cm^-1 @532nm)• Triple grating turret•

Detector

Open electrode CCD• TE Cooling system. : - 100℃(Minimum cool down)• Dark current : 0.0004• Max spectra per sec : 88• Register well depth(typ.) 1000000e-•

Software

Instrument control and data acquisition, fully• Integrated data analysis, sample surface & Input beam position image capture


OPTIONS

Laser combiner Select proper laser line depend• on sample and block theharmful lightAlign the beam path easily• Combine different laser up to 9•

Low temp application Low cost anti-vibration He• Cryostat(Min.4 or 10K)N2 circulation type(77 ~ 600K)• High resolved mapping function• Direct measurement of stress(or• strain) map in silicon basedsolar cells by monitoring thespectral position

Detectors High efficiency & Stability for• UV-VIS- NIRHigh sensitivity CCD• Low performance Line CCD• PDS-01, PMT tube• Photo diode module•

Microscope Raman with Nikon Microscope Raman with Olympus

14

15

PL S

PECT

ROSC

OPY

| Par

t 03

MAPLE II Micro PL(E) Mapping System

MAPLE IIKEY FEATURESMicro/Macro PL/RT • PLE & EL SystemHigh performance monochromator• (Variable detectors depend on different application)• Scalability for variable application• High resolved PL Mapping• Fluorescence life time•

APPLICATION Semiconductor characterization and testing• (III-V materials)

GaN/ZnO LED wafer surface characterization• (Surface contaminet, uniformity, Reflectivity, Thickness)

Solar cell EL measuremnt• Sensor development for NIR CCD• Gemstone PL, Diamond by HPTP• Development of Material of LED with GaN / GaAs etc• Diamond anvil PL• TDIPL & IQE•

FEATURE High performance Spectroscopic Micro Sample• Chamber

Step Resolution(min.) : 0.05 um(min.) 0.5 um(typical)• Full automation to control the laser, filter Shutter• and stage etc.

Long travel range : up to 200mm• Time gated system to enhance the signal About• 100 ~ 10,000 times

Full automation : SW Controlled laser Power• Wavelength, slit, beam path and Grating etc.

Laser combiner (up to 5 lasers)• Compatible with Life time, Low temp PL(4K ~• 77K), PLE, Suface mapping & EL

Large area X-Y stepper motorized stage & High• spatial resolution :

Up to 200 x 200 mm with 0.05um minimum• Resolution

SPECIFICATION

Excitation source


Beam quality <1.2 M^2

Output power 20 mW(CW mode)

Spectrograph

Focal length 320mm (two exit port)

Spectral resolution 0.09nm


Sample chamber

Maple-II High performance Spectroscopic Micro/Macro Sample Chamber

PC control Sample stage & filter wheel

Detector

Type PMT(R928)

Spectral range 185 ~ 900nm


Software


Input laser source

A. 325 nm He-Cd laser set• Output power : 50 mW@325 nm TEM00 mode

B. 532nm Solid State Laser set• Output power : 50mW@ 532nm

C. 785nm Stabilized Laser set• Output power : 100 mW @785nm

Sample chamber

Large area X-Y stepper motorized stage: 70x50mm• Travel range(typical) up to 200 x 200mm(optional), 0.05um minimum resolution

Power control : PC controlled ND filter wheel• (Optical density : 0 ~ 3)

Motorized filter wheel system : automatically• change depend on input laser source

Beam spot size: <1um @ fulfilled entrance aperture• & Gaussian beam profile, 532nm, X50 objective

Objective lens• 50x /N.A. 0.55, W.D. 13mm FL : 4mm For 400 ~ 1,100 nm 40x LMU-NUV/N.A. 0.5, W.D. 1mm For 325 ~ 750 nm

Monochromator

Focal length : 320nm• Wavelength Range : 200 ~ 1000nm (UV-VIS)•

900 ~ 1700nm( NIR)

Resolution : 0.09nm @ 435.8nm 1200gr/mm grating,• 10 um slits <2cm-1 @785nm 2400gr/mm,

Detector

1,024 x 256 pixel CCD• 15 x 15 um pixel size• 200 ~ 1,000nm detecting range (95% @800nm)•

Software

Easy parameter selection• Select monochromator, serial port, turret, grating &• current wavelength information, wavelength range, number of point/resolution, integrating time, accumulation

Semi-Auto calibration•


OPTIONS

Mapping function Low scan speed with high• resolution 30x30 um area about3 minutes At 1 um step resolutionMinimum exposure time(available0.1 um step.) High scan speed with low resolution• 2” wafers within 8 ~ 9 minutes at1mm Step@ Minimum Exposure time

Low temp application for TDIPL

4k or 10k He Cryostat system• Nitrogen pour fill cryostat set• (77 ~ 350K)

Detectors • High efficiency & Stability for

UV-VIS- NIR Spectrometer for UV-VIS-NIR(up• to 2400nm)Low performance Line CCD• Photo diode module•

Maple sample chamber with cryostat on optical table Maple software for peak wavelength, intensity & FWHM

16

17

PL S

PECT

ROSC

OPY

| Par

t 03

MAPLE I High Speed PL Mapping System

MAPLE IKEY FEATURESMicro/Macro PL/RT PLE & EL System• Fully integrated(built in two different • laser source)Scalability for variable application• High & Low speed scanning •

APPLICATION Semiconductor characterization and testing • (III-V materials)

GaN/ZnO LED wafer surface characterization • (Surface contaminant, uniformity, Reflectivity, Thickness & Crack detecting)

Solar cell EL measuremnt • Stress evaluation of Silicon(Si)• Thin film solar cell crystallization(a-Si, uc-Si)• GaN LED wafer mapping • General Photoluminescence• Fluorescence •

FEATURE Scalability in one instrument (Compatible with PLE, • EL, R/T, Low temp PL and Life time instrument)

Built in modular beam box with two different • laser source

Easily change the beam box without additional • alignment for different sample

Variable laser line combined for different • application up to 5 lasers

Time gated system to enhance the signal about • 100 ~ 10,000 times

Full automation : SW Controlled laser power Filters, • Wavelength, slit, beam path and grating etc.

High speed scanning with 2mm step resolution(< • 20 s with 2 inch sample)

High resolved signal scanning (min. 0.1um)•



Beam quality <1.2 M^2

Output power 20 mW

Spectrograph

Pixel format 2048 pixel Silicon detector

Spectral resolution 1nm

Spectral range 200 ~ 1,100nm

F number f/4 symmetical Czerny-Turner

Sample chamber

Maple-I Fully automated, built in two DPSS laser&spectrometer system

Power control PC controlled ND filter wheel(0.2-92%)

Surface mapping 300 x 300 mm travel motorized stage(max.) & 10mm travel z axis stage(optimize focal point)

Sample monitoring Manual vision system

Detector

Type Low Noise Linear Array CCD

Software

Maple, Data acquisition & processing software

Spectral mode with PL intensity, λ peak, FWHM,Susceptor viewer, Line Profiler, Data Histogram

Input laser source

A. 532nm Solid State Laser set• Output power : 50mW@ 532nm• B. 785nm Stabilized Laser set• Output power : 100 mW @785nm•

Sample chamber

High performance Spectroscopic Micro/Macro • Sample Chamber

Long travel motorized stage : up to 300x300mm • High Speed X-Y Stage : Stealth quiet high speed • X-Y stage maps 2” wafer @ <13s @ 2mm step

Fine Step Resolution : 0.1mm / 0.5mm / 1.0mm / • 2mm / 4mm

Filter-wheel : Filter-wheel allows to cover wider • range of lasers. This is not required for a single laser system

ND Filter : Variable ND filter allows to fine control • laser power intensity. This is not required for PC controllable laser models

Power Control : Laser power is continually • monitored and calibrated to keep the power level constant. (depends on the laser model)

Spectrometer

Low Noise Linear Array CCD : • Highly sensitive Low Noise Linear Array CCD with • 3,648 Pixels for VIS and 512 pixels for NIR

Spectral range : 530 ~ 1,100nm & 900 ~ 1,700nm• PL accuracy : < 1 nm(+/- 0.5 nm) •

Software

Analytical Parameters : Peak λ, Dominant λ, Peak • Intensity, FWHM, Integrated Intensity, (Optional Thickness & Reflectivity)

Real time measured PL intensity and histogram are • displayed In parallel.

Intelligently separate main peak from peaks • incurred from Unwanted peak area


OPTIONS

Mapping function Low scan speed with high resolution • 30x30 um area about 3 minutes At 1 um step resolution Minimum exposure time(available 0.1 um step.) High scan speed with low resolution • 2” wafers within 8 ~ 9 minutes at 1mm Step@ Minimum Exposure time 1 ms minimum exposure for spectrum


4k or 10k He Cryostat system• Nitrogen pour fill cryostat set • (77 ~ 350K)

Detectors High efficiency & Stability for • UV-VIS- NIR Spectrograph for UV-VIS-• NIR(up to 2200nm)Low performance Line CCD• Photo diode module•

Sample area with long travel servo stage Program Window (Peak wavelength, intensity, FWHM, etc)

18

19

MAC

RO S

PECT

ROSC

OPY

| Par

t 04

SC-100 Macro PL(E)/Raman/RT System

SC-100KEY FEATURESCompact & Economical choice • Multiple excitation source • User defined system •

APPLICATION Semiconductor characterization (GaN/SiC or Si) • (III-V materials)

MEMS device characterization • Sensor development for NIR CCD• Gemstone PL, Diamond by HPTP, pearl etc • Development of Material of LED with GaN/ GaAs, • Deep UV diode laser & PD development • (III-Nitrides(AlGaN) and SiC etc.)

Temperature depandant PL & Internal quantum • efficiency

Reflectance & Transmittance measurement • (SiC/Si/Sapphire substrate etc)

Photoluminescence excitation(PLE) to measure • The energy levels(properties of absorption & Recombination)

FEATURECompact Modular Design• Free or Fiber coupled input/output • Variable laser line combined for different • Application up to 9 lasers

Time gated system to enhance the signal About • 100 ~ 10,000 times

Motorized control : laser power, input Beam line, • orientation of polarizer & grating etc.

Compatible with Time Correlated Single Photon • Counting


Wavelength 248.6nm(up to 3 different laser)


Output power (quasi-cw) : >250mW

Spectrograph

Focal length 320mm



Sample chamber

SC-100

Compact & simple structureXyθ Manual stage for sample PositionColor & spherical corrected Al Mirror for input source & signal

Detector

Type PMT(R928)

Spectral range 185 ~ 900nm

Raman shift range 90cm-1 ~ 4,000cm-1@532nm


Software

Monoworks

Select monochromator, serial port, turret, grating & current wavelength information, wavelength range, number of point/resolution, integrating time, accumulation

Input laser source

532nm Solid State Laser set • Output power : 50mW@ 532 nm

Sample chamber

Macro Sample Chamber for PL,Raman,RT(Optional • Reflection and transmission)

Refocusing assembly with 45℃ Al mirror set• Wavelength range : 200 ~ 5,000nm • Included suitable optics(PLX lens, Flat Al & off axis • parabolic mirror etc.) & Mount

Iris Diaphragm set for Optical path & laser beam • Alignment

Rotation & translation manual stage For sample • align & enhance the power density on Sample

Readable resolution : 2℃ 0.01mm• Adjustable range : +/- 25mm• Cuvett cell holder and sample plate•

Monochromator

Focal length : 150mm• Wavelength Range : 200 ~ 1,600nm • Resolution : 0.2nm @ 435.8nm • Accuracy: +/- 0.25nm, Repeatability: +/- 0.04nm•

Detector

R955/R928 photomultiplier tube• 185 ~ 900 nm detecting range (85% @400nm)• 16 Bit AD converter•

Software

Easy parameter selection • Select monochromator, serial port, turret, grating • & current wavelength information, wavelength range, number of point/resolution, integrating time, accumulation

Semi-Auto calibration•


OPTIONS

Laser combiner Select proper laser line depend • on sample Block the harmful scattered lightAlign the beam path easily • Combine different laser up to 5•


Low cost anti-vibration He • Cryostat(Min.4 or 10K) N2 circulation type (77 ~ 450K) •

Detectors High efficiency & Stability for • UV-VIS- NIR Spectrometer for UV-VIS-NIR • (up to 2400nm)Low performance Line CCD• Photo diode module•

Air Raman with 442nm laser

GaN PL Spectrum

Off axis parabolic mirror inside Low abberation

20

21

MAC

RO S

PECT

ROSC

OPY

| Par

t 04

SC-100FS Macro PL& Fluorescence Life time System

SC-100FSKEY FEATURESTime resolved single photon counting module • Time resolution ability : 25ps• Compatible with our Raman PL sys.• Ultra sensitive analysis•

APPLICATION Life time and PL measurement of nanoparticle for • organic Solar cell (P3HT), Rhodamine 6G & kind of phosphor

Time-Resolved Photoluminescence Spectroscopy• Time-Resolved Fluorescence Spectroscopy• Evaluation of an optical recording medium• Test and measurement of detectors & optical fibers• Ultra sensitive analysis & Material research included • solar cell

FEATURE Electrical Time Resolution : <25ps (rms) • In long range mode : <1 ns(rms)

Histogrammer full scale range : • From 819 ns to 1.71 s

PC interface : PCIe 1.1• Easy and precise voltage monitoring • Built the high speed amplifier in PMT and • Combined with the monochromator directly

Pulse and CW source for PL and fluorescence •


Wavelength 375 to 1550nm

Laser pulse width 60 ~ 500 ps

Peak power(typ) up to 160 mW

Spectrometer

Focal length 150mm



Sample chamber

SC-100,

Macro Sample Chamber includedColor & spherical corrected Al Mirror and vision system for Alignment

Detector

PMT Built in high-speed amplifier

Time resolution 25ps

Wavelength range 185 ~ 1,400 nm

Software

Decay data analysis Software

Setting time scale, measurement Time Temporary data store and Reload Function. A fluorescent life time can be Predicted with the approximate Curve . Deconvolution function.


Closed loop He Cryostat • (Min.4 or 10K) N2 circulation type(77 ~ 450K) •

Input laser source

375nm, Picosecond Diode Laser set• FWHM : <10nm• Peak power : 20 mW(typ.)• Pulse width(ps) : 100(max.) 80ps(typ.)•

Sample chamber

Macro Sample Chamber for PL,Raman,RT(Optional • Reflection and transmission)

Color & Spherical corrected Refocusing assembly • with 45℃ parabolic(optional off axis parabolic) mirror set

Wavelength range : 200 ~ 5,000nm • Rotation & translation manual stage & Vision • System For sample align & enhance the power density on sample

Readable resolution : 2℃ 0.01mm• Adjustable range : +/- 25mm• Included diverting box set for Si detector, PMT • And Vision CCD

Monochromator

Focal length : 150 mm• Wavelength Range : 200~1600nm • Resolution : 0.2nm @ 435.8nm • Accuracy: +/- 0.25nm, Repeatability: +/- 0.04nm• 3-120-500, Ruled Grating 32×32mm, 1200G/mm • with 500nm blaze Wavelength 330 ~ 900nm range

Detector

PMT, Photon counting for Decay & Si photodiode• 185 ~ 1,400nm(200 ~ 1100 nm) detecting range• Dark count(at 20℃)• Included preamplifier CFD unit &Time-Correlated • Single Photon Counting Module

Software(FluoFit)

Tail fitting or iterative reconvolution• Exponential decay models up to 4th order• • Lifetime distribution models(Gaussian, Lorentzian, Stretched Exponentials)

ASCII and direct data import from HydraHarp, PicoHarp, • TimeHarp, NanoHarp, SPC and MSA300 data

Unlimited number of data points• Storage of user preferences• Easy to use graphical interface•


OPTIONS

Laser combiner Select proper laser line depend • on sample Block the harmful scattered lightAlign the beam path easily • Combine different laser up to 5•

DetectorsMCP Detector • High dynamic range PDA• Low performance Line CCD• PDS-01, PMT tube• Photo diode module•

CDSe Life timeFluorescence life time on optical table

22

23

APPLICATION Power Plant: suitable for fossil fuel and petroleum • based power plants

Waste Treatment Plant • Cement Plant • Pulp Plant • Petrochemical Plant • Textile Plant • Stack Gas Control • DeNOx Control • Mega hotels or other service industry emission • monitoring

FEATUREUV DOAS• Instantaneous monitoring through direct probing • to industrial stack

Permanent high level of accuracy filtering out • dusts, humidity

No need of external transceiver/receiver unit or • computer system for service monitoring

In-Situ measuring system• Instantaneous monitoring• Thought direct a direct gas• Duct No need for gas extraction and preparation• No change in the gas composition and quantity•

SPECIFICATIONMeasuring

Gas SO2, NO, NO2, NH3(Multi Gas Analyzer)

Method UV DOAS

Type In-Situ

Detecting range

Range(Nox) 0~40, 0~150, 0~200, 0~500, 0~1000 ppm

Range (SOx) 0~100, 0~200, 0~500, 0~1000, 0~3000 ppm

Range (NH3) 0~10, 0~20, 0~50 ppm

Signal In & Out

Analog Output 2 Channel

Digital Output 8 Channel

Digital Input 2 Channel

Display Type 7 inch LCD Monitor

Input Interface USB Keyboard/Mouse

Communication RS232-422/TCP-IP Via Ethernet/Two-way Comm.

Auto Range change Auto Range Change Function

Software

DGA software Gas Spectrum & Density display

MAC

RO S

PECT

ROSC

OPY

| Par

t 04

SC-100T Incoherent Thomson Scattering System

SC-100TKEY FEATURES IElectron temperature & Density in the • Laser-Based Plasma Diagnostics Fast ion population in the plasma •


Input laser sourceQ-Switched Nd:Yag laser system, Powerlite DLS 9010Energy : 1000mJ at 532nmRepetition rate : 10Hz Pulse width : 4 ~ 6 ns at 532 nm Includes 2nd Harmonic generator

Triple MonochromatorFocal length : 1,500mmResolution : 0.005nmGrating : 300gr/mm 500nm blz & 1800 gr/mm, 500nm blzTwo entrance and Two exit (one slit. One port for CCD)Spectral range : 330 ~ 900 nm

Detector A. Time gated Intensified CCD, DH334T-18U-63

Effective area : 13.3 x 13.3mm Effective pixel size : 13x 13 um Fiber optic taper magnification : 1:1 Read noise( rms) : As low as 4e- Frame rate image/sec : up to 4(3.450) Useful photocathode spectral range : 120 ~ 1,100nm Photocathode QE : Up to 50% Min optical gate width : <2 ns Cool down to -40℃

B. Newton EM CCD Camera,

Beam collection tube set with fiberTo collect scattering beam from focal point of laser100 mm dia. 400 & 800 mm focal length.Vision camera for alignment

Optics 532nm laser line mirrorUltra narrow-band notch filter for 532nmPLX focusing lens setBeam expander : X5

APPLICATIONElectron Density• Electron Temperature• Fast Ion Population• Atomic & molecular density in plasma from • Scattering Intensity(Rayleigh & Raman)

System Diagram : internal configuration

N2 Atomic emission spectrum

DGA-X Flue Gas Analyzer System

DGA-XKEY FEATURESUV DOAS• Low cost(Maintenance & Long life spare parts)• No need of external transceiver/receiver unit• Multi-gas measuring •

24

25

MonoRa150i

MON

OCH

ROM

ATOR

| Pa

rt 0

5

Monochromater Selection Guide

MonochromaterKEY FEATURESFocal length : 150, 200, 320, 500, •

570mmImaging grade monochromator • <0.5cm-1 resolution • High stray light rejection• Full automation(Grating, slit &diverter) •

SPECIFICATION Model Configuration Model Configuration

MonoRa151i Side ent/Front exit slits MonoRa201 Side ent./side exit slits

MonoRa321i Side ent./side exit slits MonoRa322i Side ent./front exit port for CCD

MonoRa323i Adjustable one ent/two exit slits MonoRa324i Adjustable side ent/ exit slits &

front CCD port

MonoRa501i Side ent./side exit slits MonoRra511i Side ent./two exit slits with diverter

MonoRra512i Side ent./exit slits & front CCD port MonoRa513i Side ent./two exit port for CCD

MonoRa522i Two ent./two exit slit MonoRa524D Double Monochromator

MonoRa751i Side ent/Front exit slits MonoRa752i Side ent/Front exit port for CCD

MonoRa753i Side ent./two exit slits with diverter MonoRa756i two ent./two exit slits with diverter

Model MonoRa150i MonoRa200 Monora320i MonoRa500i MonoRa750i

Focal length 150mm 200mm 320mm 500mm 750mm

Aperture Ratio f/4.3 f/4.0 f/4.2 f/6.5 f/9.8

Optical Design Computer optimized imaging Czerny-Turner type

Optical Path 90℃ 90 or 180℃

Scan Range Mechanical range 0 ~ 1600 nm with 1 1200gr/mm

Operating Range 190nm to NIR with available grating and detector

Resolution 0.2nm 0.18nm 0.09nm 0.045nm 0.02nm

Dispersion 4.6nm 3.5nm 2.4nm 1.6nm 1.0nm

Accuracy +/-0.1nm

Repeatability +/-0.04nm

Drive step size 0.005nm with stepper motor 0.0025nm with stepper motor

Focal plane size 26mm wide x 10mm height

Detector coverage 125mm 95mm 64mm 41mm 27mm

Standard slit Width : 0 ~ 5 mm, 10 um via micrometer control Height : 4 ~15 mm selectable

Grating mount Dual grating turret Triple grating turret

Grating size 32 x 32mm 50 x 50mm 68 x 68 mm

Optical path One entrance & one exit slit One entrance and one exitslit/One entrance and two exit slit/ two entrance and two exit (port&slit)

Detector UV, Visible : PDS-01 PMT, Photodiode detector : 200 ~5,000 nm CCD detector : 200 ~ 2,200 nm

Software Monoscan, Monoworks, operating software and Maple, scan image software

APPLICATIONSpectroscopy• Phtoluminescence • Fluorescence• Raman scattering• Phosphorescence• Colorimetry • Spectroradiometry • Photometry• Laser characterization• Laser scattering •

FEATURE Focal length : 150mm, 200mm, • 320mm, 500mm, 750mm & 1,500mm

Interface : USB &RS232• Imaging grade monochromator • Double/Triple monochromator • available (addictive and subtractive type)

Grating selection : • Triple/Dual grating Turret

Motorized diverting mirror/slit• Stray light rejection : 1.0x10^-5• Variable slit•

MONORA Monochromator

Focal length 150mm

Aperture ratio f/4.3

Optical design Computer optimized Czerny-Turner

Optical port Side entrance and front exit

Scan range 0 ~ 1600 nm, mechanical range with a 1200gr/mm

Operating range 190nm to NIR with variable gratings & detectors

Resolution 0.2nm @ 10 um slit with 1200gr/mm at 435.8nm

Dispersion 4.6nm/mm

Accuracy +/-0. 1nm


Drive step size 0.005nm with stepper motor

Focal Plane size 27mm wide x 14mm height

Detector coverage 125nm @ 1200gr/mm grating

Standard slit Width : 0 ~ 5mm, 10 um via micrometer controHeight : 4 ~ 15 mm selectable

Grating mount Dual grating turret

Grating size 32x32mm

PC Interface RS232 & USB

Size/Weight 218(L) x 158(W) x 177(H)/5.8 Kg

MonoRa150i is a150 mm, f/4.3 aperture, dual grating monochromator and imaging grade performance by two aspheric mirrors featuring built-in computer compatibility and a scanning range.It offers 0.2 nm resolution with 1200gr/mm grating, plus easy integration into automated spectral data acquisition systems, named Monoworks.MonoRa150i is ideal for both emission and excitation.

MonoRa150i, Monochromatic Light source with DL450-XE,

450W Xe arc lamp set

26

27

MonoRa320iMonoRa200


MON

OCH

ROM

ATOR

| Pa

rt 0

5

Focal length 200mm



Optical port Side entrance and Side exit(Optional Front Exit port)

Scan range 0 ~ 1600nm, mechanical range with a 1200gr/mm



Dispersion 3.5nm/mm

Accuracy +/-0.1nm





Standard slit Width : 0 ~ 5 mm, 10 um via micrometer controlHeight : 4 ~ 15 mm selectable

Grating mount Dual grating turret

Grating size 50 x 50 mm



MonoRa200 is a200 mm, f/4.0 aperture, dual grating monochromator and spectrograph featuring a multi-port optical system, built-in computer compatibility and a scanning range.It offers 0.18 nm resolution with 1200gr/mm grating, plus easy integration into automated spectral data acquisition systems, named Monoworks.MonoRa200 is ideal for Monochromatic light source and low cost better resolution emission Monochromator

MonoRa200,Monochromator & DL450-XE,


MonoRa320i is a 320 mm, f/4.2 aperture, triple grating Monochromator and imaging spectrograph by two aspheric mirrors featuring a multi-port optical system, It offers 0.09 nm resolution plus easy integration into automated spectral data acquisition systems, named Monoworks.MonoRa320i is ideal for Raman, Laser fluorescence, P/L, and emission spectroscopy.

Focal length 320mm







Raman shift Resolution

[email protected] nm/1800gr/mm/10umslit/CCD1024 pixel

Dispersion 2.4nm/mm

Accuracy +/-0.1nm





Standard slit Width : 0 ~ 5 mm, 10 um via micrometer controlHeight : 4 ~ 15 mm selectable

Grating mount Triple grating turret

Grating size 68 x 68 mm



Monochromator

MonoRa320i, Monochromator & ATR System

28

29

MonoRa500i


MON

OCH

ROM

ATOR

| Pa

rt 0

5

MonoRa500i is a 500 mm, f/6.5 aperture, triple grating Monochromator and imaging spectrograph by two aspheric mirrors featuring a multi-port optical system, It offers 0.045 nm resolution by easy integration into automated spectral data acquisition systems, named Monoworks.Double MonoRa500i is available for twice the dispersion of single monochromator.MonoRa500i is ideal for Raman, Laser fluorescence, P/L, and emission spectroscopy.

Focal length 500mm



Optical port Side entrance and Side exit (Optional Front Exit port)




CCD Resolution 0.12nm@1200gr/mm, 0.08nm@1800gr/mm


[email protected] nm/1800gr/mm/10umslit/CCD1024 pixel

Dispersion 1.6nm/mm

Accuracy +/-0.1nm





Standard slit Width : 0 ~ 5 mm, 10 um via micrometer control Height : 4 ~ 15 mm selectable





Monochromator

Ramboss-500i, Micro Raman SystemMonoRa500i

MonoRa750i is a 750 mm, f/9.8 aperture, triple grating Monochromator and imaging spectrograph featuring a multi-port optical system, built-in computer compatibility, and a scanning range. As a monochromator, It offers 0.0025 nm drive step size and 0.02nm resolution, plus easy integration into automated spectral data acquisition systems, named Monoworks.As a spectrograph it offers 1.0 nm /mm dispersion using a 1200gr/mm grating, as well as a 14mm-height x27 mm-wide focal plane.Double MonoRa750i is available for twice the dispersion of single monochromator of the same focal length.MonoRa750i is ideal for Raman, Laser fluorescence, P/L, and emission spectroscopy.

Monora750i

Focal length 750mm







CCD Resolution 0.07nm@1200gr/mm, 0.08nm@1800gr/mm


[email protected] nmH1200 /1800gr/mm/10umslit/CCD1024 pixel

Dispersion 1.0nm/mm

Accuracy +/-0.1nm





Standard slit Width : 0 ~ 5 mm, 10 um via micrometer control Height : 4 ~ 15 mm selectable




Size/Weight 802(L) x 258(W) x 224(H)/24.0 Kg High resolution Confocal

Raman System with MonoRa750i

30

31


MON

OCH

ROM

ATOR

| Pa

rt 0

5

GRATING SELECTION GRATING Efficiency Curve

Groove/mm Blaze Wavelength

(nm) Optimum

Wavelength

Grating part number

Model : Monora150i Model : Monora200Model : Monora320i,

500i & 750i

150

300 200~570nm 1-150-300 2-150-300 3-150-300

500 380~950nm 1-150-500 2-150-500 3-150-500

800 500~1300nm 1-150-800 2-150-800 3-150-800

1090 700~1700nm 1-150-1090 2-150-1090 3-150-1090

1250 900~2000nm 1-150-1250 2-150-1250 3-150-1250

2000 1300~2200nm 1-150-2000 2-150-2000 3-150-2000

3000 2500~5000nm 1-150-3000 2-150-3000 3-150-3000

4000 2500~6000nm 1-150-4000 2-150-4000 3-150-4000

6000 4000~9000nm 1-150-6000 2-150-6000 3-150-6000

300

300 200~500nm 1-300-300 2-300-300 3-300-300

500 330~700nm 1-300-500 2-300-500 3-300-500

760 500~1200nm 1-300-760 2-300-760 3-300-760

1000 700~1600nm 1-300-1000 2-300-1000 3-300-1000

2000 1400~2500nm 1-300-2000 2-300-2000 3-300-2000

3000 2500~5500nm 1-300-3000 2-300-3000 3-300-3000

600

300 200~500nm 1-600-300 2-600-300 3-600-300

500 330~900nm 1-600-500 2-600-500 3-600-500

750 500~1300nm 1-600-750 2-600-750 3-600-750

1000 700~1800nm 1-600-1000 2-600-1000 3-600-1000

1200 900~2000nm 1-600-1200 2-600-1200 3-600-1200

1600 1300~2400nm 1-600-1600 2-600-1600 3-600-1600

1200

250 200~450nm 1-1200-250 2-1200-250 3-1200-250

250H 190~900nm 1-1200-250H 2-1200-250H 3-1200-250H

300 200~150nm 1-1200-300 2-1200-300 3-1200-300

450H 300~1000nm 1-1200-450H 2-1200-450H 3-1200-450H

500 330~900nm 1-1200-500 2-1200-500 3-1200-500

600 500~2100nm 1-1200-600 2-1200-600 3-1200-600

1800

250 190~450nm 1-1800-250 2-1800-250 3-1800-250

250H 190~450nm 1-1800-250H 2-1800-250H 3-1800-250H

350H 350~800nm 1-1800-350H 2-1800-350H 3-1800-350H

500 330~900nm 1-1800-500 2-1800-500 3-1800-500

500H 300~950nm 1-1800-500H 2-1800-500H 3-1800-500H

2400250H 200~900nm 1-2400-250H 2-2400-250H 3-2400-250H

300 200~500nm 1-2400-300 2-2400-300 3-2400-300

3600250 190~450nm 1-3600-250 2-3600-250 3-3600-250

300H 240~500nm 1-3600-300H 2-3600-300H 3-3600-300H

150gr/500nm blz 150gr/1250nm blz 150gr/3000nm blz

150gr/6000 nm blz 300gr/300nm blz 300gr/760nm blz

300gr/2000nm blz 600gr/300nm blz 600gr/750nm blz

600gr/1600nm blz 1200gr/300nm blz900gr/1300 nm blz

1200gr/600nm blz 1800gr/500nm blz holographic1800gr/250nm blz holographic

2400gr/250nm blz Holographic 2400gr/300nm blz Holographic 3600gr/300nm blz holographic

32

33

OPTI

ON |

Part

06

OPTION INPUT SOURCE

INPUT SOURCE

Available (248nm ~ 1,550nm)• DPSS(266nm ~ 1,342) & LDLD(405,670,780,830,1300,1550 nm)• GAS(325, 488, 514, 632.8nm), Pico second(375 ~ 1,550nm)•

LASER COMBINERS

Available (266 nm ~ 5,000 nm)• Quartz wave plate (266 nm ~ 1,550nm)• Polarizer set for NIR(700 nm ~ 5,000 nm)• Glan taylor & thompson prism(cube type)•

Plastic sheet polarizer (320 ~ 2,000nm)• Block the laser line during sample exchange • Selection of input laser wavelength by software •

POLARIZER MODULE & MOTORIZED SHUTTER

450W Xe arc light source• Included 450W Ozone free lmap(XBO450W OFR)• Arc lamp power supply for 450W Xe bulb• Lamp housing with fan cooling• 150W Xe arc light source• Includes 150W Ozone free lmap • Arc lamp power supply for 150W Xe or Xe-Hg bulb• Lamp housing with fan cooling•

250W Tungsten-Halogen light source• With housing, AC power supply, mounting flange, light collection optics, Output power from 350nm to >2 .0 • um 30W Deuterium lamp set for UV available

LAMP MODULES

Monochromatic light source With 450W Xe arc lamp

150W Xe arc lamp with Monora150i


250W QTH monochromatic light source with macro sample chamber

30W Deuterium Bulb for UV

Spectral response(Deuterium lamp)

Laser combiner built in 2 DPSS & 1 Diode laser

Sheet beam polarizer with Fine adjustment rotator Motorized shutter controlled by software

Laser input on optical table

34

35

OPTION SAMPLE CHAMBER

OPTI

ON |

Part

06

Motorized filter wheel assembly• Wavelength range : 300 ~ 2,500 nm• Includes 6 hole filter wheel and cut off filters • (4 different kind filters with 1 inch)

Manual filter plate with holder• Up to 6 different cut off filter available •

Flip mirror module (360 ~ 2000 nm)• Two different light source selection • 450W Xe arc & 250W QTH lamp Combination

Flip mirror (UV ~ 1,000 nm)• Two different lamp & Laser source selection 150W • Xe arc & Laser from UV-NIR Combination

BEAM DELIVERY MODULES

ORDER SORTING FILTER MODULES

SAMPLE CHAMBER

LN cooled (-196℃~ 600℃.)• He cooled(4K ~ 500K) • Low noise He cooled cryostat For Raman PL • mapping

LN cooled(77K) Cryostat For Microscope(Olympus, • Nikon, Zeiss)

Up to 600℃• LN cooled(77K) Cryostat Up to 150℃• For macro sample chamber • Vertical mount•

CRYOSTAT SYSTEM

XY axis(max.) : 50mm x 75mm Up to 100 x 100mm• Repeatability : < 1 um• Resolution(min.) : 0.05 um(min.) 0.1 um(typical)• Accuracy : 1 um• 2” wafers within 8 ~ 9 minutes at 1mm step@ • Minimum Exposure time• 30 x 30 um area 5hours at 0.1 um step resolution @ Minimum • Exposure time

30 x 30 um area about 3 minutes at 1 um step Resolution @ • Minimum exposure time

Included tilting plate•

MAPPING SYSTEM

450W Xe arc & 250W QTH lamp source

Motorized order sorting filter with 6 holes

450W Xe arc & 250W QTH lamp source

Manual order sorting filter plate with 4 holes

He cooled(10K) Cryostat set for 2 inch wafer Liquid Nitrogen(77K) Cryostat module

Olympus microscope with high precision stage

36

37

OPTION SAMPLE CHAMBER

OPTI

ON |

Part

06

Travel : 100 um +/1 15% or 10mm • Resolution (close-loop) : 10nm or 1 um/pulse • Straightness : 1 um or lower • Positional repeatability : 0.1 um or lower or 10 um •

Motorized stage set to optimize the Z axis at the • point of Maximum signal intensity

AUTO FOCUSING

Available Long pass edge & ND filter• Edge long pass filter (248.6nm ~ 1,064nm)• Number of filter up to 9• Easy & quick exchange of filters depend on laser by SW• Input power control ( 0.2 ~ 92%)•

Manual type ND filter & beam expander• Input power control ( 0.2 ~ 92%)•

MOTORIZEDFILTER WHEEL & ND FILTER

Piezo actuator with objective lens

Filter selection with motorized wheel

Sample plate with manual XY & motorized Z axis stage

Variable ND filter wheel

SAMPLE CHAMBER Real Confocal module with 30 um / 10 um Pinhole and without pin hole mode• X50, X100 objective lens •

CONFOCAL MODULE

Available wavelength range (UV ~ VIS)• Magnification : X5 & X10 •

BEAM EXPANDER

Vacuum sample chuck for high speed mapping Multiple sample plate up to 4 wafer

samples

Vacuum sample chuck for high speed mapping • Available size : 1 ~ 4 inch• Multiple sample mount plate(2inch x 4ea) •

MAPPING SAMPLE HOLDER

Set the location of sample chuck with this pin

Fix the sample chuck by this tapped hole with a bolt

38

39

OPTION SAMPLE CHAMBER OPTION MONOCHROMATOR

OPTI

ON |

Part

06

Full wavelength range : 200 ~ 1,800nm •

OBJECTIVE LENS TRANSMISSION

UV-VIS Objective• Spectral range : 325 ~500nm• Magnification : X5~X40, 0.5 N.A •

VIS-NIR Objective• Spectral range : 400 ~1,800nm• Magnification : X5 ~X100, 0.85 N.A •

VIS-NIR Objective• Spectral range : 400 ~ 1,300 nm• Magnification : ~X100, 0.85 N.A•

a : Laser band pass filter, b : cut off filter c : Notch filter

OBJECTIVE LENS

FILTERS

iDUS420, CCD

Peak QE of > 95% • TE Cooling to -100℃• Extended range dual-AR option• Single UV grade silica window • Pixel : 1,024 x 255(26 x 26um)• Dark current(typical) : 0.0004e-/pixel/sec• Read noise : 4e-•

iDUS416, UV-NIR for PL/Raman

Low dark current • Peak QE up to 95% • TE Cooling to -95℃ • Image area : 2,000 x 256(15 um pixel size)• Dark current(typical) : 0.0006e-/pixel/sec• Read noise : 4e- •

iDUS InGaAs NIR CCD

Operating range : 0.8 to 2.2 um • Peak QE of > 70% • TE Cooling to -90℃ • Pixel : 512 or 1,024(25 x 250/50 x 250 um)• Dark current(typical) : 5Me-/pixel/sec• Minimum exposure time : 1.4 us •

MONOCHROMATOR SAMPLE CHAMBER

CCD DETECTOR

iDUS420 Series

iDUS416 Series

iDUS IGA Series

Quantum Efficiency Curve •

iDUS416 Series200 ~ 1,000nm for PL & Raman(UV,NIR)

iDUS420 Series200 ~ 1,000 nm for PL & Raman(VIS)

iDUS IGA Series800 ~ 2,200nm for PL

Revolving nose piece with 5 objectives

OFR’S LMU-NUV

Revolving nose piece with 2 objectives

Mitutoyo’s Mplan Apo UV NIR

Olympus LCPlan N objective

Olympus’s LCPLN-IR

(a)(b) (c)

40

41

OPTION MONOCHROMATOR

OPTI

ON |

Part

06

Standard 1.125” side window PMT• 4 digit LCD display for HV/signal • Toggle switch to change the value of High voltage And signal.• Adjustable range of HV : 0 ~ 1,200V • Out put signal type : Current or Voltage selectable• Single offset potentiometer, Time constant Rotary Switch, • Output voltage gain rotary switch

Hamamatsu R928 side window photomultiplier tube, 185 ~ • 900nm (Available other PMT tube) supply with 4 pin power connector(please add PMT models)

PMT & PHOTO DETECTOR

Photodiode Detector • Diode material : Silicon, InGaAs, PBS, PBSE, MCT(LN cooled type)• Spectral range : 200 ~ 5,000 nm• Out put signal Port : BNC• Operating Temperature : 22 to 30 deg/C by two stage TEC •

Monora320i with PMT for Photon counting

Monora200 with PMT for PL/Raman R928, Tube & Spectral Response

Detecting range for variable photodiode sensor

Precision fiber adapter module • XYZ position control stage and focusing assembly

Additional fiber optic assembly with refocusing assembly With SAM905 fiber set •

Motorized x axis slit for Monora Monochromators • Width : 10um to 3,000um adjustable in 10 um step . Height : 4mm to 15mm selectable (5mm is standard) Scan time(optional) : in 10 um step : 1 set / 10 um step, 9 sec (From 10um to 3,000 um) Do not need additional control board, software & installation with our Monochromator

MONOCHROMATOR SIGNAL RECEIVE MODULE

MOTORIZED SLIT

Monora522i , spectrograph with signal receiver module & EMCCD

Monora150i with two motorized slits

42

43

DATA

ACQ

UIS

ITIO

N |

Part

07

DATA ACQUISITION

Analog to Digital Converter

DATA ACQUISITION

4 Hz to 3.7 kHz chopping frequencies• Low phase jitter• Single and dual beam experiments• Sum & difference reference outputs• Included 0.5 Hz to 100 kHz frequency range single • phase lock in amp

Current and voltage inputs• Internal reference oscillator• Four ADC inputs, two DAC outputs• GPIB and RS-232 interfaces•

Lock in AMP & Chopper system

SR530, Lock in AMP

SR540, Chopper

DAD-1602U

High speed(40khz) spectral data acquisition, low signal to • noise and light research application

A/D resolution : 16 bit• A/D sampling rate : 500KHz• Input Current range : 1uA/10nA/100nA • Input Voltage range : 1V/10V• Input signal port : Voltage(4ch) Current(2ch)• Interface : USB •

Select wavelength, Model of Monochromator And Grating• Set the interface(RS232 & USB)• Control motorized filter wheel And slit module• Command setting (Accuracy, grating position modulation etc.)• Semi-Auto Calibration with Hg standard lamp• Motorized slit & Diverter mirror control • Select proper order sorting filter Input Current range : • 1uA/10nA/100nA

Input Voltage range : 1V/10V• Input signal port : Voltage(4ch) Current(2ch)• Interface : USB •

MonoScan Software

Monoscan4.1 Monoworks, operating software window

Includes MonoRa series system control and • general spectroscopy applications,

Features

Single / Double monochromator control(optional) • by user selection

Easy parameter selection • Easy zoom in/out• OS : Window 98, 2000, XP, 7•

Monochromator parameter

Select monochromator, serial port, turret, grating & • current wavelength,information

Scan parameter• Set the wavelength range of scan• Set the number of point/resolution(min. hardware • step resolution : 0.001nm)

Set the integrating time(msec)• Set the number of scan/average/scan rate/scan • time(sec)

Set the delay time(msec)• Set the accumulation•

Post processing

Peak finder• Graph Color, data average and graph control and • 2D-3D conversion(optional)

Mode

Input range(Voltage : 0 ~ 1V, 0 ~ 10V, • Current : 10^-7. 10^-6, 10^-5 A)

Scan type : Auto, Excitation, Emission, Sync• Unit : Wavelength, Optional : eV• Current intensity monitoring• Semi-Auto calibration• Optional Transmittance, Reflectance & • Luminescence operation.

DATA ACQUISITION

Monowork Operating Software

44

45

DATA ACQUISITION

DATA

ACQ

UIS

ITIO

N |

Part

07

Spectral mode

Set the wavelength range, number of Point/resolution Integration time(msec), Accumulation etc.• Real time measurement and spectrum displayed in parallel Wavelength/Wavenumber(Photoluminescence /Raman), Intensity, FWHM, optional Thickness

Sample area Double peak isolation(Focused on shoulder peak or exclude area)

User defined threshold, Max and Min Values

Set Step resolution and scanning area

Automation High speed/High precision XYZ stage control (below 0.1 um) • Laser focus calibration : Intelligent auto Z-axis stage calibrates the laser beam focus• Select proper grating, ent/exit slit of monochromator control, beam diverting mirror control, • Laser beam block to prevent harmful scattering, • Motorized filter wheel control according to the input laser line(reject laser and pass signal to Detector• Motorized ND filter in front of laser to control the laser power on sample surface• Sample and laser beam spot capture for alignment •

Maple Mapping Software

Life time resolution: 25picosecond• Tail fitting or iterative reconvolution• Exponential decay models up to 4th order• Lifetime distribution models(Gaussian, Lorentzian, Stretched Exponentials)• ASCII and direct data import from HydraHarp, PicoHarp, TimeHarp, NanoHarp, SPC and MSA300 data•

Gas density raw data transmission Through analog output • Gas spectrum display, Control of signal processing time • Data export to Excel compatible format • Real time data logging, Diagnostic agent & Exceptions logging • Scalability to support both the standalone / centralized control requirement •

DATA ACQUISITION

Decay Data Analysis Software

Gas Analysis Software

Laser IRF

Window based application software

Deconvolution

Monoworks, operating software window for Maple II, micro pl mapping system

Monoworks, operating software window for Maple I, High speed pl mapping system.

Steve

Typewritten text

Newbury, Berkshire. RG14 1JB UK. Offices in UK, EU, Dubai [email protected] [email protected] www.spectrolab.co.uk Sales T 44 (0) 7787 521545 Admin 44 (0)7795 274633 Admin 44 (0 ) 1488 686700 CAT21903

Steve

Typewritten text

Our Partners in Optical Spectroscopy Xray Associates Dongwoo Optron Anaspec Spectrolab in Science Raman FTIR AAS GC Raman Electro optics SEM AFM UV Vis XRD XRF Monochromators Configured optical systems Optical Microscopy Electro optics

Documents

Chapter 01 SYSTEM CONFIGURATION Systems for Spectroscopy ...spectrolab.co.uk/pages/optron/pdf/Spectroscopy System Catalog.pdf · Chapter 02 RAMAN SPECTROSCOPY S-RAM, Confocal Micro