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CCD- and CMOS-Imaging
Visit Mid-Sweden University - November 2006
Prof. Dr. Arno Ruckelshausen Faculty of Engineering and Computer Science
Interdisciplinary Reserach Center Intelligent Sensor Systems (ISYS)
CCD- and CMOS-Imaging
CCD- and CMOS-Imaging
If a picture tells more than 1000 words,
imaging is the language of the future !Albert Theuwissen, DALSA/ The Netherlands and Delft University/Belgium
Imaging
CCD- and CMOS-Imaging
1969
Woodstock Moon landing Invention of the CCD
CCD- and CMOS-Imaging
Overview
CCD Principles
Device Architectures: Frame Transfer and Interline
Special Aspects
CMOS Principles
CCD- and CMOS-Imaging
OverviewOverviewOverview
CCD Principles
Device ArchitecturesDevice ArchitecturesDevice Architectures: Frame Transfer and : Frame Transfer and : Frame Transfer and InterlineInterlineInterline
Special Special Special AspectsAspectsAspects
CMOS CMOS CMOS PrinciplesPrinciplesPrinciples
CCD- and CMOS-Imaging
The Human Eye and the CCD Imager
Human Eye
120 Mpixels2-3 micron pixels< 1 mWperfect qualitycolor: perfectparallel read-out15 images/sec500 Myears
CCD Imager
80 Mpixels2-12 micron pixels1 Wgood qualitycolor: goodserial read-outup to 1.000.000 images/sec25 years
CCD- and CMOS-Imaging
MOS structure
SiO2 (oxide)Poly Si Gate
V
0 Volt 5 Volt
Silicon
CCD- and CMOS-Imaging
CCD
V
C1
0V
C2
0V
C3
5V
C1
0V
C2
0V
CCD- and CMOS-Imaging
V
C1
0V
C2
0V
C3
5V
C1
0V
C2
0V
CCD
CCD- and CMOS-Imaging
Transport
C1 C2 C3 C1 C2 C3 C1
t1
t2
t3
t4
storage separation
transfer
CCD- and CMOS-Imaging
Transport – comparison with water
CCD- and CMOS-Imaging
Surface CCD
0V 0V 10V 0V 0V 10V 0V
Vq
CN
CCVCQ
ox
ox
∆⋅=
=∆⋅=∆
Cox = 0.345 fF/µm2
∆V = 10V
N ≈ 20 000 e-/µm2
Oxide (0.1 µm)
CCD- and CMOS-Imaging
0V 0V 10V 0V 0V 10V 0V
Vq
CN
CCCCC
C
VCQ
eff
oxSiox
Sioxeff
∆⋅=
<+⋅
=
∆⋅=∆
Ceff = 0.15 fF/µm2
∆V(bulk) = 7
N ≈ 6 500 e-/µm2
Buried channel CCD
CCD- and CMOS-Imaging
OverviewOverviewOverview
CCD CCD CCD Principles Principles Principles
Device Architectures: Frame Transfer and Interline
Special Special Special AspectsAspectsAspects
CMOS CMOS CMOS PrinciplesPrinciplesPrinciples
CCD- and CMOS-Imaging
Linear Imager (1D)
Photo diode
Light shield Output
amplifier
outCCD register
CCD- and CMOS-Imaging
Interline Imager: IL-CCD (2D)
out
CCD- and CMOS-Imaging
Interline CCD: Basic operation
CCD- and CMOS-Imaging
Frame Transfer FT-CCD (2D)
out
CCD- and CMOS-Imaging
Frame Transfer CCD: Basic operation
CCD- and CMOS-Imaging
Full Frame CCD (FF-CCD)
CCD- and CMOS-Imaging
Timing diagram
Source: „Solid -State Imaging with Charge-Coupled Devices, A.J.P. Theuwissen, Kluwer 1995
Transport Systems : Four-phase CCD
CCD- and CMOS-Imaging
Example: Floating diffusion amplifier (FDA):
Ø charge packet is transported into the floating diffusion
Ø sensed by an amplifier
Ø reset via a MOS-transistor
Output structure
CCD- and CMOS-Imaging
OverviewOverviewOverview
CCD CCD CCD Principles Principles Principles
Device ArchitecturesDevice ArchitecturesDevice Architectures: Frame Transfer and : Frame Transfer and : Frame Transfer and InterlineInterlineInterline
Special Aspects
CMOS CMOS CMOS PrinciplesPrinciplesPrinciples
CCD- and CMOS-Imaging
Color Imaging: Spectral Sensitivity of the human eye
Source: „Physics of Semiconductor Devices“, S.M.Sze, Wiley 1981
CCD- and CMOS-Imaging
photon
elektron
nn
=η
Quantum Efficiency
λ
Image sensor with colour filters:
RGB-pattern („Bayer Pattern“)
Color and image sensors
CCD- and CMOS-Imaging
3 Chip Camera
CCD- and CMOS-Imaging
Blooming
Reference Picture Bright light spot
Blooming
Source: „Solid-State Imaging with Charge-Coupled Devices, A.J.P. Theuwissen, Kluwer 1995
CCD- and CMOS-Imaging
Antiblooming: Vertical antiblooming
CCD- and CMOS-Imaging
Number of electrons versus light intensity (overview)
Source: „Design and Fabrication of Integrated Image Sensors“, Course of R.I.Hornsy, University of Waterloo
CCD- and CMOS-Imaging
Smear
Reference Picture Bright light spot
Smear
Source: „Solid-State Imaging with Charge-Coupled Devices, A.J.P. Theuwissen, Kluwer 1995
CCD- and CMOS-Imaging
OverviewOverviewOverview
CCD CCD CCD Principles Principles Principles
Device ArchitecturesDevice ArchitecturesDevice Architectures: Frame Transfer and : Frame Transfer and : Frame Transfer and InterlineInterlineInterline
Special Special Special AspectsAspectsAspects
CMOS Principles
CCD- and CMOS-Imaging
System technology
CCD imager
Timing Generator PC
ic1
ic3
Driversic2
ASPic4
ADCic5
DSPic6
CMOS Camera-on-a-Chip
... tomorrow
Yesterday ...
CCD- and CMOS-Imaging
MOS characteristics
CCD- and CMOS-Imaging
Example of a pixel structure: Passive pixel sensor (PPS)
CCD- and CMOS-Imaging
CMOS image sensors: general items
☺ Low Cost ( 2002: K)
☺ System integration
L Complexity
☺ Adressability
☺ Programmable frame rate
☺ Automatic gain control
K Image quality (1999: L)
CCD- and CMOS-Imaging
CMOS-camera „FUGA15“
Example: CMOS imager
CCD- and CMOS-Imaging
Source: IMEC/ Belgium, Internet: www.imec.be, 1998
CMOS APS in 0.7µm technology512 * 512 random addressable pixelspixel pitch 12.5 * 12.5µm²dye size 7.5 * 7.5 mm²non-integrating, with logarithmic response5 MHz pixel rateon chip 8 bit AD converterspectral range 400 - 1 050 nmpixel fill factor 15% packaging 48 pin ceramic with glass cover, plastic in option, B/W & RGB available 5 Volt single power line
FUGA-camera
Example: CMOS imager
CCD- and CMOS-Imaging
Logarithmic response (example)
CCD- and CMOS-Imaging
Windowing and subsampling (every nth pixel)
CCD- and CMOS-Imaging
Windowing/ROI:(Region of Interest)
Camera-controlled goalkeeper
CCD- and CMOS-Imaging