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Square Capacitive Pressure Sensor
Date
Nov 25, 2015 1:31:49 PM
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Contents
1.
Gloal.................................................................................................................
1.1.
!e"nitions....................................................................................................
2. Co#ponent
1.....................................................................................................2.1.
!e"nitions....................................................................................................
2.2. Geo#etr$
1..................................................................................................
2.3.
Materials......................................................................................................
2.4.
%lectro#ec&anics.........................................................................................
2.5. Mes&
1.........................................................................................................
3. Stu'$
1...............................................................................................................
3.1.
Stationar$....................................................................................................
4. Stu'$
2...............................................................................................................
4.1.
Stationar$....................................................................................................
5.
(esults...............................................................................................................
5.1. !ata
Sets.....................................................................................................
5.2. !erive'
)alues.............................................................................................
5.3.
*ales...........................................................................................................
5.4. Plot
Groups..................................................................................................
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1 Global
Used products
C+MS+ Multip&$sics
C-! #port Mo'ule
M%MS Mo'ule
1.1 Defnitions
1.1.1 Parameters 1
Parameters
Name Expression Value Description
p0 25/Pa 25000 Pa pressure
v0 1/) 1.0000 ) voltae
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2 Component 1
2.1 Defnitions
2.1.1 Coordinate Systems
Boundary System 1
Coor'inate s$ste# t$pe oun'ar$ s$ste#
*a s$s1
2.2 Geometry 1
Geometry 1
Units
ent& unit #
-nular unit 'e
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2. !aterials
2..1 "ir
Air
Selection
Geo#etric entit$ level !o#ain
Selection !o#ain 2
2..2 Si # Silicon $sin%le#crystal& isotropic'
Si - Silicon (single-crystal, isotropic)
Selection
Geo#etric entit$ level !o#ain
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Selection !o#ains 1, 3
2.( Electromec)anics
Electromechanics
*eatures
ree !e6or#ation 1
%lectrical Material Mo'el 1
7ero C&are 1
ree 2%lectro#ec&anical nter6ace 1
Prescrie' Mes& !isplace#ent 1
inear %lastic !ielectric 1
nitial )alues 1
inear %lastic Material 1
*er#inal 1
Groun' 1
oun'ar$ oa' 1i8e' Constraint 1
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2.+ !es) 1
Mesh 1
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Study 1
.1 Stationary
Study settin%sProperty Value
nclu'e eo#etric nonlinearit$ +n
P)ysics and ,ariables selection
P)ysics inter-ace Discretiation
%lectro#ec&anics ;e#i< p&$sics
!es) selection
Geometry !es)
Geo#etr$ 1 ;eo#1< #es&1
=
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( Study 2
(.1 Stationary
Study settin%sProperty Value
nclu'e eo#etric nonlinearit$ +n
P)ysics and ,ariables selection
P)ysics inter-ace Discretiation
%lectro#ec&anics ;e#i< p&$sics
!es) selection
Geometry !es)
Geo#etr$ 1 ;eo#1< #es&1
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+ /esults
+.1 Data Sets
+.1.1 Study 10Solution 1
Selection
Geo#etric entit$ level !o#ain
Selection !o#ains 2>3
Solution
Name Value
Solution Solution 1
Co#ponent Save Point Geo#etr$ 1
Data set: Study 1/Solution 1
+.1.2 Study 20Solution 2
Solution
Name ValueSolution Solution 2
Co#ponent Save Point Geo#etr$ 1
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Data set: Study /Solution
+.2 Deri,ed Values
+.2.1 Global E,aluation 1
Data
Name Value
!ata set Stu'$ 1?Solution 1
Expression
Name Value%8pression e#i.C11
@nit
!escription Capacitance
+.2.2 Global E,aluation 2
Data
Name Value
!ata set Stu'$ 2?Solution 2
Expression
Name Value
%8pression e#i.C11
@nit
!escription Capacitance
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+. ables
+..1 able 1
Gloal %valuation 1 ;e#i.C11<
able 1
p Capacitance $*'
0.0000 =.=542%A15
1000.0 =.=54%A15
2000.0 =.=5=5%A15
3000.0 =.=0%A15
4000.0 =.=29%A15
5000.0 =.=50%A15
000.0 =.=2%A15
000.0 =.=94%A15
=000.0 =.=15%A15
9000.0 =.=3%A15
10000 =.=59%A15
11000 =.==0%A15
12000 =.==02%A15
13000 =.==23%A15
14000 =.==45%A15
15000 =.==%A15
1000 =.====%A15
1000 =.=910%A15
1=000 =.=931%A15
19000 =.=952%A15
20000 =.=94%A15
21000 =.=995%A15
22000 =.901%A15
23000 =.903=%A15
24000 =.9059%A15
25000 =.90=0%A15
+..2 able 2
Gloal %valuation 2 ;e#i.C11<
able 2
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, Capacitance $*'
1.0000 =.90=0%A15
11.000 =.90=0%A15
21.000 =.90=0%A15
31.000 =.90=1%A15
41.000 =.90=2%A15
51.000 =.90=2%A15
1.000 =.90=3%A15
1.000 =.90=5%A15
=1.000 =.90=%A15
91.000 =.90==%A15
+.( Plot Groups+.(.1 Displacement $emi'
p!(")#$!!! Sur%ace: &otal displacement ('m)
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+.(.2 Potential $emi'
p!($)#!!! Slice: Electric potential ()
+.(. Potential $emi' 1
*!(1)#1 Slice: Electric potential ()
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+.(.( Displacement $emi' 1
*!(1!)#+1 Sur%ace: &otal displacement ('m)
+.(.+ 1D Plot Group 3
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+.(.4 1D Plot Group 5
1
