camLine Product Catalog - All-Electronics.de...The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors

Jetzendorfer Str. 6 D-85238 Petershausen Germany Tel +49-8137-935-0 Fax +49-8137-935-235

www.camline.com

LineWorksproducts

The information contained in thisdocument is subject to change without

notice. camLine GmbH assumes noresponsibility for any errors which mayappear in this document. All companynames and product names are trade-

marks or registered trademarks oftheir respective holders. The followingare trademarks of camLine Datensys-

teme für die Mikroelektronik GmbH:

• camLine• CAPS• LineWorks• LineWorks ECoFrame• LineWorks ETM• LineWorks PR• LineWorks RM• LineWorks SPACE• LineWorks WIP• LineWorks UA

LineWorks PULSEEquipment Efficiency Monitoring and Optimization

LineWorks RMRecipe Management

LineWorks WIPWork in Process Tracking

LineWorks ECoFrameEquipment Connection Framework

LineWorks iGateInformation Gateway

LineWorks UAUser Administration

LineWorks SPACEStatistical Process Analysis and Control Environment

Company Profile and Fact Sheet

CAPScamLine Application Server

PAAPart Average Analysis

7. September 2006 Company Profile and Fact Sheet 1


Company Name camLine GmbH, a company of the camLine Holding AG

Founded August 1989

camLine is profitable since 1993.

The company has about 46 employees.

Headquarter Jetzendorfer Str. 685238 Petershausen, GermanyPhone: +49-8137-935-0Fax: +49-8137-935-235Email: [email protected]

Mission camLine GmbH distributes effective IT solutions for production automation,

process data management and process data analysis worldwide. The manu-

facturing execution systems (MES) of camLine are designed for extreme re-

liability and massive data throughput to meet the requirements of a 24/7

production.

camLine’s IT solutions are installed in various business sectors such as micro-

electronics, solar cell production, semiconductor production, or the automo-

tive industry. Customers include Audi, Bosch, Continental TEMIC, Fujitsu,

IBM, Infineon, OSRAM, and SolarWorld, to name but a few. The company

provides worldwide support through local distribution partners in the U.S.,

Taiwan, Japan, and Singapore.

Business Units Customer Specific IT Projects

Software Product Development

Consulting

Product Integration and Tool Connection



ProductOverview

LineWorksTM Product Family

The LineWorksTM product family provides software modules for a fabwide

production automation solution. Each LineWorks module can be employed

separately in production. The combined usage makes up a comprehensive

CIM solution (Computer Intergrated Manufacturing) meeting the IT require-

ments between the planning systems (e.g. SAP/R3) and production tools.

LineWorks SPACE (Statistical Process Analysis and Control Environment)

Online process and product data management and analysis,

online SPC, offline SPC, SPC reporting

LineWorks SQM (Supplier Quality Management)

Generic quality portal for suppliers: quality checks and reporting of incom-

ing materials before shipment

LineWorks STARGATE (SPC Quality Reporting)

Overview of the performance indexes for production processes to assess

the quality of SPC activities

LineWorks PULSE (Equipment Efficiency Monitoring and Optimization)

Recording of any equipment data

Fabwide OEE analysis (Overall Equipment Efficiency)

LineWorks RM (Recipe Management)

Central administration of process recipes and control parameters for all pro-

duction tools



LineWorks WIP (Work in Process Tracking)

Process security and transparency through tracing and verification of proc-

ess steps (sequence) including order, lot, serial number and used material

tracking

LineWorks ECoFrame (Equipment Connection Framework)

Generic tool connection

LineWorks iGate (Information Gateway)

Visualization framework for Web based reporting

LineWorks UA (User Administration)

Common user access control for all LineWorks products

camLine Application Server CAPSTM

All LineWorks products are based on the CAPS libraries guaranteeing the

performance and stability required in 24/7 environments.

Contacts outsideGermany and

DistributionPartners

David Hsu, Taiwan – email: [email protected]

Aneric Enterprises, Singapore

Brooks Automation Inc., USA, worldwide distribution of LineWorks SPACE

Yamatake Industrial Systems Co. Ltd., Japan

Customers AMS OSRAM Opto Semiconductors

Atmel Panasonic

Audi AG Pari

Chartered Semiconductors ProMOS

Continental TEMIC Qimonda

Deutsche Cell GmbH Robert Bosch GmbH

Dialog Semiconductor GmbH Samsung

EPCOS AG Sandia

Fujitsu Silterra

Honeywell Sonion

IBM ST Microelectronics

Infineon Technologies AG Sumco

Innolux Sunpower

International Rectifier SVA NEC

LSI Logic Corporation Toppan

Microchip Trecenti Technologies Inc.

NEC TSMC

Nokia Mobile Phones Winbond

Olympus ZMD Zentrum Mikroelektronik

25. August 2006 LineWorks SPACE 5.1 1

LineWorks SPACE TM

Statistical Process Analysis and Control Environment

LineWorks SPACE provides enterprise-wide SPC including online analysis of

measurement and process data. SPACE stores all collected data in one cen-

tral database for traceability according to ISO 9000 standards. Operators

and engineers are instantly informed about SPC violations.

SPACE Monitor for Online SPC

SPACE Navigator for Offline SPC

SPACE Reporting

for Reports


Online SPC with SPACE Monitor

The online component SPACE Monitor can be interactively integrated into

the production process. Samples sent to SPACE are evaluated according to

definable rules within a fraction of a second. The result is immediately

available to the operator or to the equipment. SPACE extends classic SPC by

providing Corrective Actions and Trouble Shooting Guides.

After a violation has occurred in produc-

tion operators or engineers are informed

by immediately receiving a chart. The

chart will be automatically displayed by

SPACE Monitor with the doubtful sam-

ple highlighted.

The operator is offered a list of typical ac-

tions to correct the problem. If unsure

which corrective action (CA) to take

they can inform themselves in a trouble

shooting guide (TSG). At last the opera-

tor is requested to comment their action.

A CA can have some attributes which

control further actions. You can auto-

matically flag samples as invalid to pre-

vent it from being included in further cal-

culations, e.g. in case of wrong measure-

ments.

Or you might want to build a direct con-

nection to the production equipment

(through SPACE Listener). SPACE Moni-

tor offers the following features:

Flexible SPC Administration

SPC administrator can configure under

which conditions which work stations

will receive a chart to be displayed.

SPC administrator can define the data

and attributes to be displayed for the

selected sample.

Raw value chart and attributes on raw

value level

Flexible Display

Users can reset the date for moving

charts

Users may choose CAs, TSGs, or com-

ments for each sample.

Click on a sample to view corrective

action or comment input

View pre-process data in sample histo-

ry for selected sample

Launch external program, e.g. wafer-

map viewer

Show or Hidehistograms

grid

calendar axis

markers for violations, com-

ments, missing comments, etc.

flagged samples

specifications

configurable axis labels

linear / logarithmic,

automatic / manual scaling


Offline SPC with SPACE Navigator

The process engineer is offered a powerful tool to analyse and administer

process data. You can view the data in offline charts as soon as they have

been collected by LineWorks SPACE.

Offline SPC with SPACE Navigator offers

the following features:

Calculation Control

Calculate control limits

Calculate process indexes

Flexible Display

Define the data and attributes to be

displayed for the selected sample.

Click on a sample to view corrective

action or comments

View pre-process data in sample histo-

ry for selected sample

Raw value chart and attributes on raw

value level

Sample Processing

Assign corrective action

Add comment to any sample

Flag samples and exclude them from

calculations

Launch external programs,

e.g. wafermap viewer

Export data to external tools like

qs-STAT, Microsoft EXCEL etc.

Show or Hidehistograms

grid

calendar axis

markers for violations,

available comments, miss-

ing comments, etc.

specifications

configurable x-tick labels

linear / logarithmic, auto-

matic / manual scaling


Reports with SPACE Reporting

The generation of regular reports makes sure that the management will al-

ways get an up-to-date overview. Reports are generated periodically – such

as daily, weekly, monthly, or quarterly. Standard reports are provided, Cpk

and other process index values can be automatically scheduled and calcu-

lated.

SPACE Reporting is integrated into

SPACE Navigator and offers the follow-

ing features:

Calculations performed at an absolute

date or at periodical time intervals

User-definable report cycles

(e.g. bi-weekly)

Calculation of thousands of process

capability coefficients in overnight

batch processes

Cpk calculation from non-normal

data for supported distribution mod-

els (requires qs-STAT)

Customer calculations by integrating

customer-specific formulas

Export report results – calculation re-

sults can be visualized and exported in

various formats such as PDF (Adobe

Acrobat), HTML (Web browsers) or

CSV (MS Excel)

Use Web Reporting to view already

calculated reports in the Intranet in

PDF format.

Searches that search for specific re-

port results (like »bad performing

charts«)


SPC Administration with SPACE Navigator

SPACE Navigator presents the SPACE system as a tree hierarchy. You are en-

abled to arrange even thousands of control charts in a clear and easy-to-use

structure.

Easy Navigation

Easy navigation like in Windows Ex-

plorer

All key structures, control charts and

reports are arranged under the »Data

Sources« node.

Corrective actions, trouble shooting

guides and alarms can be found under

the »Events« node.

Bookmarks for a fast view of objects

or charts of interest

Fast Control ChartAdministration

Existing control charts can be used as

templates.

Properties can be inherited through

SPACE Navigator object hierarchy.

Pasting attributes to copy settings

from one chart to multiple other charts

Powerful Search

Quick changes by powerful »Search«

or »Search and Replace« features

Multi-Language Support

SPACE Navigator, as well as SPACE Mon-

itor can be used with the following GUI

languages:

English

German

Japanese

Chinese

Asian Character Support

SPACE fully supports the usage of texts

with Multibyte characters, e.g. to enter

comments in Chinese language.


IntegratedSPC Violation HandlingThe online-violation handling together

with the chart display allows immediate

reactions in the production line.

Operators or engineers are informed

about violations by charts sent to their

SPACE Monitor or via Email.

The integration of customer business

rules is provided through an open event-

broadcasting interface.

Appropriate Reactions

The operator can perform various ac-

tions when a sample has violated a spe-

cific SPC rule:

Enter an online comment when the

chart is displayed.

Assign the appropriate corrective

actions to the sample.

Use your existing instructions as

SPACE trouble shooting guides by

simply defining the visualization pro-

gram and the document path.

Track Corrective Actions

Sequential assignment of different

corrective actions to the same rule vio-

lation of a sample will automatically

create an audit trail.

Append comments to a sample:

– Choose comments from predefined

list

– Enter free comments

– Pre-defined lists can be linked to

specific rule violations in specifc

charts

– Corrective action attributes track

current state (immediate, in-

progress, resolved)


Configurable SPC Violation Types

Violation of specification limits with

one- or two-sided limits

Violations of control limits , S, R,

one- or two-sided limits for each sta-

tistical value

Moving average of mean values,

standard deviation, or range (identical-

ly or exponentially weighted)

Run above/below center line

Linear trend up and trend down esti-

mation of mean values

N of M in zone A or B

N of M in zone A or beyond

N in zone C

N rising or falling in a row

N[%] raw values above/below specifi-

cation limit

N[%] raw values above/below control

limit

Mean value above/below specification

limit

N , S, R alternating up and down

N violations of specific types within the

last M samples (4 configurable repeat

rules)

Specification AdministrationSpecification limits are delivered by the

input process together with the sample

data or they are administered within

SPACE Navigator.

Special cases can be handled individu-

ally.

A Learning Mode is provided to cause

specification changes sent together

with the sample automatically change

the specification limits administered by

LineWorks SPACE.

x

x


Control Limit CalculationSPACE allows to automatically calculate

control limits. Calculated limits are dis-

played together with the existing limits

to accept or reject them.

Automatic control limit checks can be set

up, e.g. limits within spec, not wider

than previous limits, no violations, etc.

A control limit wizard allows to calculate,

accept or reject new limits for a larger set

of charts.

Benefits

Extended limits for process models

with considerable sample-to-sample

spread (e.g. for batched processing)

Calculation with customer specific for-

mulas through an open interface (see

»Integration Kit« below)

Wizard to quickly review or recalculate

control limits for a numerous charts

Limits can be marked as fixed to pre-

vent them from being overwritten by

subsequent calculations.

Statistical Designs

Calculation options are administered as

statistical designs. A statistical design is

provided as a standard (e.g. »6-sigma«)

by the inheritance mechanism of SPACE.

If parameters need special treatment

they can override the standard.

Once a chart is assigned to a statistical

design, control limits can be calculated

with a one button-click.

Advanced calculation options can be

used, such as distribution models, sever-

al choices for location and spread esti-

mators, acceptance limits, etc.


Non-Normal Distributed Data

Calculation of process indexes and con-

trol limits for non-normal distributed

data is supported by the following distri-

bution models (qs-STAT is required):

log-normal distribution

root transformed normal distribution

folded and extended normal distr.

Rayleigh distribution

Weibull distribution

Johnson transformation

Mixed distribution

Box-Cox transformations

Pearson distribution system

Automated PrerunWith the »Automated Prerun Support«

feature the SPC administrator's work will

be made easier. After a predefinable

number of samples have been collected,

the calculation of control limits is auto-

matically triggered without any human

intervention.

After prerun completion the control lim-

its are automatically checked against a

choice of rules. An email address can be

provided to automatically send a notifi-

cation. A prerun can be started at any

time.

Variable Sample SizesThe »Variable Sample Sizes« feature al-

lows dynamic adjustment of control lim-

its in the case of missing data or extend-

ed sample sizes due to dynamic sampling

strategies.

For each possible sample size, control

limits are calculated in advance and

stored in a look-up table.

This enables the fast adjustment of con-

trol limits to the actual sample size with-

out any recalculation needed:

Handling of situations where the sam-

ple size cannot be fixed, for example

100% sampling with varying lot sizes

Zero-effort implementation of adap-

tive sampling techniques


NotificationNotifications allow the automatic gener-

ation of emails to inform all responsible

persons about particular incidents, e.g.

an SPC rule violation. By simply clicking

on the link the receiver can display the

SPACE chart.

The mail contains all important data

about the incident and the violating

sample. The mail contents are configura-

ble via mail templates.

LineWorks NotificationManagerLineWorks Notification Manager (NFM)

is an extension of LineWorks SPACE.

It offers an elegant way to manage mail

templates, mail addresses and mailing

lists.


Sample HistoryThe sample history function provides

support for:

Checking for problems in upstream

process steps for a given lot or wafer

Displaying data for all lots from a given

wafer manufacturer within the last

week

Jumping to the chart of a pre-process

Launching external program, e.g. for

the wafermap of a pre-process

Simply click a button in the chart to dis-

play all samples collected for a given key

such as lot, tool and/or vendor.

The sample list shows keys, collection

date and sample value. Mean, Minimum

and Maximum values are displayed as

dot and whiskers, and the values are

normalized to upper (= 1.0) and lower

(= -1.0) specification limits.

By filtering and sorting the sample list

can be narrowed down.


SearchesBased on freely defined conditions you

can search for various objects or individ-

ual samples. Searches are stored in the

SPACE Navigator tree for repeated exe-

cution. You can work with the results as

if with objects, all actions are supported,

such as:

Search for uncommented SPC viola-

tions and add a comment

Search for unwanted sample data be-

longing to a specific lot and flag them

Search for charts with limits being too

old or wide and change the control

limits

Search for charts with specific settings

Search for charts with low Cpk or high

violation percentage

Search for charts for specific products,

tools or processes

Search for charts with no data collect-

ed since a certain time period and set

them to »Archived«

Specific report results (like »bad per-

forming charts«)

Over 25 different conditions can be com-

bined to define the search criteria.


RevisioningChanges of logical data sources and sub-ordinated objects and even of samples are automatically determined. They cause to generate revisions of these ob-jects resulting in an audit trail by whom, when and why an object was changed.

An additional revision tab allows to re-view the old revisions in detail, perform comparisons and to revert to a previous object revision.

Export InterfacesThe »Export Interfaces« feature allows

the export of sample data from control

charts, queries or query groups to vari-

ous file formats. The export can be auto-

mated, e.g. to provide external systems

with measurement data from SPACE.

There are export interfaces available for:

qs-STAT

Microsoft Excel (.csv)

ASCII files (.txt)

Further formats are supported on

demand.


User PermissionsThe »User Permissions« feature is used

to administer users, user groups, respon-

sibility domains and security levels in

LineWorks SPACE.

Objects are assigned to an owner and a

responsibility domain, e.g. »furnace

cell«, »lithography« etc.

Only users who are either owner of the

object, or have appropriate rights in the

objects responsibility domain, can per-

form an administrative function. With-

out read permission, the corresponding

objects is invisible.

Permission Objects

Data Sources

Logical Data Sources

SPC Channels

Specification Channels

Folders

Alarms

Corrective Actions

Trouble Shooting Guides etc.

Permissions per Object

Read

Write

Delete

Delete cascading

Create subordinated objects etc.


Calculated CharacteristicsThe »Calculated Characteristics« feature

offers the ability to define characteristics

which are determined from other (not-

calculated) characteristics using standard

or custom formulas.

It allows the calculation from two subse-

quent measurements with the result

stored as new calculated sample.

You may want to measure the film thick-

ness of the oxygen layer before and after

etching. The calculated characteristic

may be the etch removal, i.e. the differ-

ence of the film thickness before and af-

ter the etching.

Advanced CalculationOption (ACO)In addition to the standard formulas pro-

vided by SPACE, you can add your own

formulas by supplying a compiled Java

class. The class calculates the new pa-

rameter at runtime.

Furthermore, runtime parameters can be

supplied in a formula text area that con-

trol the calculation, such as the parame-

ters a,b,c in »c log( a x + b)«.

Specification limits for calculated param-

eters are provided by the SPACE specifi-

cation administration or by the formula

itself.

For more information, see the separate

LineWorks SPACE ACO specification

sheet.


Moving ChartsThe »Moving Charts« feature offers the

following possibilites:

EWMA of , R, S

Overlay display of EWMA and

Shewhart chart

Moving average (MA) or Moving Me-

dian (MM)

Moving standard deviation

The moving value computations start

anew after process target shifts, after a

reset of the calculation start or after con-

trol limit violations in the x-bar chart.

x


Normalized ChartsBy displaying normalized values you can

combine charts with different specifica-

tions. For example, you might want to

see different products in a single chart to

detect equipment trends earlier.

Normalized charts offer the following

features:

Normalize to target

Normalize to specification

Normalize to control limits

Normalized and real-value scale

Cpk value calculation across different

specs

Attributes ChartsThe »Attributes Charts« feature offers

the possibility to display the defects in a

unit without representing any numerical

values of the measurement parameter.

Each unit inspected is usually classified as

either »conforming« (nondefective) or

»nonconforming« (defective) to the

specifications. The attributes charts of-

fered by SPACE are:

p chart for fraction nonconforming

np chart for number nonconforming

c chart for nonconformities

u chart for average number of non-

conformities per unit


Matching ChartsTo facilitate commonality analysis, you

can configure the chart to connect sam-

ples with common attributes using color-

ed lines, e.g. one line per tool/chamber

combination.

You show or hide each line by a simple

mouse-click.


Multi-Parameter ChartsMulti-parameter charts (MPC) are built

to align samples of related parameters

together into one window. Multi-param-

eter charts can be used online in SPACE

Monitor for displaying simultaneously

transmitted parameters. In SPACE Navi-

gator, you can show arbitrary parameter

combinations in MPCs offline.


QueriesUsing the »Queries« offline SPC feature,

you can easily create free queries against

the LineWorks SPACE database using a

GUI instead of SQL.

Queries can be defined independently

from the control charts, or can be aliased

to an existing control chart.

Queries can ask for raw values or com-

pressed data only

Once a query is defined, it will be saved

in the database and can be re-

executed with one button click.

Query results are represented in offline

charts and can be used to export data

Simple query building...... with the aid of query templates.

Displaying the offline chart

for a query


Web Data Collectionwith SPISESPISE (LineWorks SPACE Input Server) is a

Web server that provides an HTML gen-

erator for manual data input forms.

It validates the entered data and delivers

it to the LineWorks SPACE online server,

providing feedback on violations to the

operator. SPISE offers features such as:

Include mechanism for form generator

property files and overwriting proper-

ties in the URL reduces effort for crea-

tion of similar forms

Automatic generation of input fields

on raw value level

Input of raw values or statistical values

Validation of input against limits, data

formats and missing values

Support of attributes chart data collec-

tion: p, np, u, or c data can be collect-

ed for various defect classes

Optional user login protection using

the LineWorks SPACE »User Permis-

sions« feature and the cookie mecha-

nism

Supply of......logical context keys with:

fixed values from URL or generator property file

choice lists

input fields from URL or generator property file

Seamless embedding......of input forms in an

existing Intranet struc-

ture using URL refer-

encing of input forms

and follow-up URLs

after data collection


Customer Specific Calculation ServerCustomer specific calculation strategies

for control limits and process indexes can

be realized by the use of an extra server

that is integrated into LineWorks SPACE

via the »Integration Kit«. The open inter-

face supports calculations from individu-

als or compressed statistical data.

Integration KitThe »Integration Kit« forms the basis for

customer input processes, event sub-

scribers and hook functions.

It comes with support and example pro-

grams for several middleware, program-

ming languages and platforms. The fol-

lowing connections are supplied:

Data upload from MS-Excel compati-

ble CSV (comma separated value) files

IDL files for any CORBA IIOP clients

OLE Automation proxy related to the

camline Application Server (CAPS) or

CORBA middleware including a type li-

brary to integrate arbitrary OLE auto-

mation capable clients such as Delphi,

Visual Basic, Java and C++

Java sample input API as jar library

C-DLLs with generated C style stub

functions via the camline Application

Server (CAPS) middleware and CORBA

for Windows clients (further clients on

demand)

Java Administration API to manage

various SPACE objects such as

– SPC channels

– Folders

– Bookmarks

– Multi-parameter charts

– CAs, TSGs, Alarms


GlossaryAdvanced Calculation Option (ACO)

Support for customer-specific formulas

for calculated characteristics.

Calculated Characteristics

Definition and usage of parameters that

are calculated from other parameters.

Control Limit Calculation

Automatic calculation of control limits

from control charts and automatic im-

port of the calculated control limits with

or without manual interaction (prerun).

Email and LineWorks NFM(Notification Manager)

Automatic generation of emails when an

SPC violation is detected or after auto-

mated preruns. NFM is used to manage

email addresses, mailing lists, and mail

content templates.

Export Interfaces

Export of sample data from control

charts or queries to various file formats.

Integration Kit

Implementation of your own customer

input processes, event subscribers, hook

functions, or calculation strategies for

SPC indices and control limits.

Matching Charts

To faciliate commonality analysis the user

can configure the chart to color by com-

mon attributes, e.g. one line per tool/

chamber combination.

Moving Statistics

Moving charts are based on statistics

that are calculated from more than the

current sample. SPACE supports EWMA

( ), EWMA (S), EWMA (R), Moving Av-

erage (x), Moving Median (x), Moving

Stdev ( ).

Multi-Parameter Charts

Alignment of samples of related param-

eters in one window.

Normalized Charts

Normalized charts plot values relative to

their specification or control limits, al-

lowing to compare data with different

specs in a common chart.

Attributes Charts

SPACE offers p, np, c, or u charts for at-

tribute characteristics.

Queries

Point and click definition and storage of

free queries against the SPACE database

using a GUI instead of SQL.

Reporting

Automatic scheduling and generation of

Cpk and other process index values for a

group of queries; visualization in reports

and export in various formats like PDF,

HTML or CSV.

Specification Administration

Maintenance of specification limits pro-

vided by fab data sources or manual in-

put.

Trouble Shooting Guides

Assignment of documents like flow-

charts or intranet web pages to an SPC

violation to assist the operator or engi-

neer in handling SPC violations.

User Permissions

Administration of users, groups, respon-

sibility domains and security levels.

Variable Sample Sizes

Dynamical adjustment of control limits in

the case of missing readings or extended

sample sizes due to dynamic sampling

strategies.

Web Data Collection (SPISE)

HTML form generator for manual data

input forms.

Web Reporting

Browser access to reports and automatic

generation of PDFs from report results.

x

x


The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective

holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.

Jetzendorfer Strasse 685238 Petershausen, Germany

phone: +49-8137-935-0fax: +49-8137-935-235

email: [email protected]: www.camline.com

LineWorks Product FamilyThe LineWorks product family provides

an automation solution with or without

MES system. Like every other LineWorks

product LineWorks SPACE is based on

the camLine Application Server (CAPS).

All interfacing technologies supported

by CAPS (CDLB, CORBA, COM, TIB/Ren-

dezvous) are also available to LineWorks

SPACE.

LineWorks SPACE Server Operating SystemsHP-UX 11.i

Sun Solaris 5.8 and 5.9

SuSE Enterprise Server 8 and 9

MS Windows NT, 2000, XP

Further systems or versions on demand

LineWorks SPACE Client Operating SystemsMS Windows NT, 2000, XP


LineWorks SPACE MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)

CORBA/IIOP (Load Balancing for UNIX server operating systems)

COM (via CAPS OLE Gateway)

TIB/Rendezvous TIBCO Load Balancing

LineWorks SPACE RDBMS SupportOracle 9i

Further database systems on demand

LineWorks products include:

SPACE – Statistical Process Control

SQM – Supplier Quality Management

STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management

WIP – Work in Process Tracking

ECoFrame – Equipment Connection FrameworkiGate – Information Gateway

UA – User Administration

2-May-2006 LineWorks SQM 3.0 1

LineWorks SQMSupplier Quality Management

LineWorks SQM is an additional LineWorks SPACE module to manage qual-

ity checks and reporting of incoming materials. SQM provides an electronic

Certificate of Analysis (eCOA) for the goods receipt.

LineWorks SQM provides a generic qual-

ity portal for suppliers, state of the art

data tracking with SPC, scheduled quali-

ty reports and automated feedback

based on the latest specifications for

each material. With this B2B extension of

LineWorks SPACE the quality of incom-

ing material can be automatically

checked and the supplier notified before

the physical shipment happens.

Value AddedSave cost and time by checking quality

of incoming material before shipment

Eliminate human errors for data entry

and spec checking

Collect all data to do analysis – corre-

late supplier quality data to IQC meas-

urements or Final Yield

Easily share data throughout the fab

Utilize the SQM Web Portal for data

upload and notification

Suppliers can avoid costly rejects – no

need to ship material until it has been

checked and released

Take advantage of powerful Line-

Works SPACE reporting capabilities;

every night, all important quality in-

dexes can be calculated automatically

Benefit from Web reports based on

iGate to show trends of delivered qual-

ity or compare similar materials deliv-

ered by different vendors


System OverviewFor each of your vendors, you define a

Quality Schema describing the parame-

ters and measurement values the vendor

has to supply for each material.

In compliance with that Quality Schema,

vendors collect their quality data and up-

load it over the SQM Web Portal.

On your Web server, the vendors' data is

validated against your requirements im-

plemented in the Quality Schema. Based

on the validation results, the materials

will be released for shipment or the re-

lease will be denied.

The release decision will automatically be

distributed by email to the supplier and

the input quality department. Vendors

can retrieve the validation results regard-

ing their materials in the Web portal as

well.

With LineWorks SQM, you can perform

quality checks of nearly all types of ma-

terials, such as Wafer, Pellicle, Gas,

Chemical, Quartz, Target, or Photo

Chemical etc.

SQM Web PortalThe SQM Web Portal offers:

Upload of quality data contained in

XML files structured according to a

given schema description; further-

more, upload by manual input, or op-

tionally using CSV files

Traceability of history

Notification to supplier if format is

wrong or data is missing

AnalysisSQM offers the following Analysis fea-

tures:

Automated verification of file formats

Easy to use SQM viewer

– View the contents by lot – out of spec items highlighted

– Manual acceptance or rejectionallowed

Automated spec checking

Full featured SPC with LineWorks

SPACE

Quality reports

– Cp/Cpk by material, supplier, location, etc.

– Trend quality over time (weeks, months, quarters)

– Scheduled report runs, no additional engineering effort

– SPACE chart display in the Web browser


SQM AdminstrationThe SQM Administration enables you to

define all the details regarding your

measurement parameters.

Materials with their measurement pa-

rameters and related context keys are

defined.

For each of the parameters, specification

limits and the type of samples like raw

values or condensed values, is specified.

For each vendor, a Quality Schema is cre-

ated describing which materials and

measurement values they have to pro-

vide.

Specification ManagementSQM offers a complete Specification

Management system.

Definition of materials supplied

Administration of measurable parame-

ters

Supplier specific alias names for pa-

rameters

Storage of specs for materials and sup-

pliers

Audit trail for spec changes

Definition of measurement data for

each supplier and material

Supplier specific XML schemas to be

used for data validation


ReportingWith LineWorks SPACE, reports can be

calculated on SQM quality data over-

night. They are provided as Web reports

based on LineWorks iGate.

Engineering Reports

Engineering Reports show the quality

trend (Cpk and OOC) of all materials

with a drill-down to part names. Further-

more, a comparison of material groups

as well as a comparison of suppliers is

available.

Management Reports

Management Reports show the maturity

trend (combination of Cpk and OOC) of

all materials with a drill-down to part

names.

Comparison of material groups as well

as a comparison of suppliers is provided.

The supplier comparison enables you to

clearly see the differences between ven-

dors.





phone: +49-8137-935-0fax: +49-8137-935-235


LineWorks Product FamilyThe LineWorks product family provides an automation solution with or without MES system.

The LineWorks product family includes:



STARGATE – SPC Quality Reporting

PULSE – Equipment Efficiency Monitoring and Optimization

RM – Recipe Management


iGate – Information Gateway

ECoFrame – Equipment Connection Framework


LineWorks SQM Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8

SuSE Enterprise Server 8

MS Windows 2000, XP


LineWorks SQM Client Operating SystemsMS Windows 2000, XP


LineWorks SQM MiddlewareCORBA/IIOP

RMI (Java Remote Method Invocation)

LineWorks SQM RDBMS SupportOracle 9i


1. August 2006 LineWorks SPACE ACO 1

LineWorks SPACE ACOAdvanced Calculation Option

LineWorks SPACE Advanced Calculation Option (ACO) adds support for

customer-definable calculations to the Calculated Parameter feature of

SPACE. Arbitrary Java code can be provided through a plugin architecture,

for applications from outlier removal and data normalization up to

Advanced Process Control (APC).

Easy deployment by auto-detection of new customer calculation formulas through plugin manager

Supports an arbitrary number of refer-ence parameters

Supports passing additional calcula-tion constants through the formula text GUI field

Centralized management of all formu-las and constants

Support to compute specification limit intervals for calculated parameters from original specifications

Build-in functions: Plus, minus, times, divide, log, clip

API Javadoc and example source

Value Added

Derive relevant parameters like etch rates from combined measurements

Reduce control chart numbers and administration by normalizing data first

Implement your own outlier removal strategies and reduce false alarms

Split data into subsets and control zones on a wafer in separate charts

Plug-in your favourite math tool

Derive new recipe parameters based on the measured values (APC)

Features

Extend the list of available formulas in the Calculated Parameter Editor

1. August 2006 LineWorks SPACE ACO 2




phone: +49-8137-935-0fax: +49-8137-935-235





product LineWorks SPACE ACO is based

on the camLine Application Server

(CAPS). All interfacing technologies sup-

ported by CAPS (CDLB, CORBA, COM,

TIB/Rendezvous) are also available to

LineWorks SPACE ACO.

LineWorks SPACE ACO Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8




LineWorks SPACE ACO Client Operating SystemsMS Windows NT, 2000, XP


LineWorks SPACE ACO MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)

CORBA/IIOP



LineWorks SPACE ACO RDBMS SupportOracle 9i









5. September 2006 LineWorks STARGATE 2.0 1

LineWorks STARGATE TM

SPC Quality Reporting

To guarantee serious SPC, statistics should be examined on a regular basis.

LineWorks STARGATE provides an overview of performance indexes for

production processes to assess the quality of SPC activities.

In LineWorks SPACE, thousands of SPC

charts are running to control various

process parameters during production

online.

With a growing variety of products,

managers and process engineers need to

keep a clear overview of the production

quality.

How good is the quality within the area

of responsibility? Which process areas or

individual processes don’t reach the

quality requirements? Which charts are

not maintained properly?

To get a fast summary of quality being

processed LineWorks STARGATE pro-

vides important analysis reports.

SPC ManagementProcess capability (Cpk) and process sta-

bility (%OOC)

SPC Engineering

Frequency of WE rule violations

Proper ChartsHave the control limits been set »reason-

ably« or »inadequately«?

SPC MaturityAre charts maintained well?

Matching ChartsIs the process close enough to the target

value?

Limit Changes

How often have the limits been

changed?


Drill-Down

It is very likely that you have to deal with

thousands of control charts. Which of

them have a Cpk < 1..33? With a simple

mouse click you navigate from the com-

pany-wide summary down to the indi-

vidual SPACE chart.

User Permissions

Depending on the permissions granted

during login, users might be allowed to

view only results belonging to specific

lots from particular customers.

STARGATE Summary Views

The summary views show statistics over

SPC charts, e.g. in one technology are

10000 control charts with 500 having a

Cpk < 1.33. You will find the 5% marked

red. In general, there are three summary

views available:

Summary over time, e.g. days, weeks,

or months

Summary over levels, e.g. site, tech-

nology, or recipe

Pareto analysis, e.g. find the most fre-

quent process step within 500 control

charts with Cpk < 1.33.

There are numerous other filter methods

available, e.g. »only critial processes«.

In configurable trees you create appro-

priate groupings of your data, e.g. by

Site, Technology, Product, and Process

Step.

Drill-down from the overviewto the individual SPACE chart

Click in summary report to see the details table. Click in

details table to open individual control chart in SPACE


SPC Management

The »SPC Management« report shows

summaries about process capability and

process stability. You can see immediate-

ly if your process behaviour is excellent

(green color) or the process behaviour is

not satisfying (yellow to red).

Quality managers can decide at first

glance whether everything is okay, proc-

esses have to be improved, or the SPC

system has to be adjusted by modifiying

specification or control limits.

Proper Charts

The »Proper Charts« report compares

the control limits configured in the charts

with the control limits resulting from the

actual process values.

If the configured limits are too wide

process instabilities will not be detected

and parts will not be processed with op-

timum quality.

If the configured limits are too tight the

manufacturing process will be inferred

too often resulting in reduced through-

put and less acceptance of SPC.

Even if it seems to be an unsoluble task

with thousands of charts to look for bad-

ly configured control limits you can do it

in this report with one mouse-click.


SPC Maturity

The »SPC Maturity« report shows how

well your charts are maintained. First, the

charts are checked against several mini-

mum standards, e.g. if control limits exist

and corresponding rules are enabled.

To reach the highest maturity level, com-

pany-wide objectives regarding process

capability (Cpk) and stability (%OOC)

must be fulfilled and the control limits

must be state-of-the-art.

Charts which utilize SPC evaluations in-

tensely and define limits reasonably are

rated excellent (green). Charts with im-

proper or insufficient valuations are rat-

ed bad (red).

SPC Engineering

The »SPC engineering« report is mainly

designed for process engineers to get an

overview over all technical processes for

a certain time period.

From this report you can see how often

the various violation types have been oc-

curred in your production and the ac-

tions performed by the operators.

You can individually sort by all available

violation types, e.g. trends in the Sigma

chart.


Matching Charts

The »Matching Charts« report shows if

the process average is close enough to

the target values. Usually, the control li-

mit center is compared with the target

value. Alternatively, the comparison can

be done with the values of a master

chart. This might be useful with a pro-

cess running on several tools.

Limit Changes

The »Limit Changes« report shows how

often the SPC system is adjusted to the

process behaviour. Excellent processes

usually do not need much adjustments.

SPC managers get a quick overview of

charts with frequent limit changes to de-

cide if processes are really controlled.



phone: +49-8137-935-0fax: +49-8137-935-235




LineWorks Product FamilyThe LineWorks product family provides an automation solution with or without MES system.

The LineWorks product family includes:




PULSE – Equipment Efficiency and Optimization






LineWorks STARGATE Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8


MS Windows 2000, XP

For all operating systems Java Development Kit 1.4 is required.

LineWorks STARGATE Client Operating SystemsMS Windows 2000, XP

For all operating systems, Internet Explorer 6 or higher is required.

LineWorks STARGATE RDBMS SupportOracle 9.2 Enterprise Edition

Further database systems on demand.

17. Juli 2006 LineWorks PULSE 1.1 1

LineWorks PULSE

Using LineWorks PULSE managers and engineers get the ideal tool to

improve the efficiency of manufacturing equipment. With LineWorks PULSE

as a fabwide standard tool you achieve complete production traceability.

LineWorks PULSE is the key tool to ana-

lyse downtime problem areas, to achieve

higher equipment uptime, to enhance

the throughput and to increase your re-

turn on invest (ROI). Overall Equipment

Efficiency (OEE) as well as RAM metrics

are calculated according to SEMI-E10

and SEMI-E79 in real-time.

AdvantagesReal-time processing of online equip-

ment messages

Centralized storage in standard data-

bases (Oracle, etc.)

Powerful Monitoring & Reporting

based on modern Web technology

Comfortable analysis and drilldown

features

Overall Equipment Efficiency (OEE)

analysis

Automatic determination of the

required time

RAM measurement

Recipe time analysis and material

tracking

Flexible equipment modelling

Support of cluster tools

High Reliability = 24 hours per day / 7

days a week


LineWorks PULSE Features

Real Time State Processing

Real time interpretation of equipment

messages according to your freely de-

finable equipment models

Configurable recipe tracking and ma-

terial tracking

Processing of individual production

keys

Online alarming based on configura-

ble alarm conditions for real time state

monitoring

CentralizedAdministration Tool

Comfortable administration and or-

ganization of state models, state inter-

pretation, watchdog settings etc.

Advanced modelling of cluster tools

Modern Java GUI

Hardware independent

User authentification for functions, di-

alogs and administration data

Equipment Online Connection

Connect your equipment to LineWorks

PULSE and see the real life of your ma-

chines. There is a broad range of possibil-

ities to connect your equipment to the

PULSE software online.

Send your equiment states using the

PULSE Online Input Interface via:

– CORBA /IIOP– COM– CAPS/DLB– TIB/Rendezvous

Connect SECS equipment using

LineWorks ECoFrame

Implement the LineWorks PULSE input

client in your existing equipment con-

troller or in your MES system. The

PULSE client function is avaliable in

– C, C++– Java– Turbo Pascal– Visual Basic– Further languages on demand.


Web Based Monitoringand Reporting

PULSE Web Server allows any web

browser to become an efficient moni-

toring tool to show real time equip-

ment efficiency summaries, states and

the situation of your production.

Fab wide real time data access

Advanced drill down features help to

find improvements

Individual analysis hierarchies

Using trace functions you will have a

powerful search engine.

Equipment Log Book

Visualization of equipment state histo-

ry, material flows, recipe loading, used

equipment programs, etc.

Comparison of tools or modules

Comfortable zoom functions to visual-

ize detailed time slices

Equipment State Monitor

Real time visualization of current tool

states, material and recipe informa-

tion, process variables etc.

Select your tool group, using the

hierarchy tree

See lot names, operation numbers,

material identifications, etc.


Comfortable Time Analysis

Get more information about

time states of your process cycles

Detect trends of tools and tool groups

Compare divisions, tools and modules

Target group oriented detail levels:

– main states (time model) for management

– sub and detail states (original tool states) for engineering

Drill Down Features

Drill down to learn from detailed

equipment states and events

Interactive charts offer a simple way

to drill down from trend views to com-

pare views and detail reports

drill down ...


Overall EquipmentEfficiency Analysis

Overall Equipment Efficiency (OEE) is an

important metrics, that will help manag-

ers benchmark the efficiency of their

production. While the expenses for lead-

ing edge equipment are increasing, the

technological lifespan is decreasing.

Equipment productivity is a highly con-

trollable factor which influences the

overall return on investment (ROI) signif-

icantly.

LineWorks PULSE is designed to support

managers in decision-making:

OEE review or drill down for detailed

equipment analysis

See trend reports, comparison reports

and OEE detail reports for tools, mod-

ules, tool groups – using your own

analysis hierarchies

Analyse the OEE figures

– OEE, speed loss, quality loss– OEE efficiency factors – productive losses– OEE and SEMI E10 time analysis

Find the most important losses in the

OEE loss pareto view

Using the SOT method, LineWorks

PULSE can automatically retrive theo-

retical production times.


RAM Measurement

Take an overview of equipment utiliza-

tion, reliability, availability and maintain-

ability.

See trends, tool-compare and detail re-

ports with one mouse-click.

Tracing Features

Powerful search engine, to find states,

material, comments, failures, alarms,

etc. – using flexible filter conditions.



phone: +49-8137-935-0fax: +49-8137-935-235


The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility forany errors which may appear in this document. All company names and product names are trademarks or registered trademarksof their respective holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM,

LineWorks SPACE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.




product LineWorks PULSE is based on

the camLine Application Server (CAPS).

All interfacing technologies supported

by CAPS (CDLB, CORBA, COM, TIB/Ren-

dezvous) are also available to LineWorks

PULSE.

LineWorks PULSE Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8




LineWorks PULSE Client Operating SystemsMS Windows NT, 2000, XP


LineWorks PULSE MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)

CORBA/IIOP



LineWorks PULSE RDBMS SupportOracle 9i









17. July 2006 LineWorks RM 3.2 1

LineWorks RMTM

Recipe Management

LineWorks RM offers enterprise wide process security. It ensures that a

product is processed by a piece of equipment correctly. As a full-featured

Recipe Management System (RMS), LineWorks RM assures that all required

data for processing is ready on the equipment.

All process recipes and control parame-

ters are centrally stored in a database.

Each modification is recorded. The ap-

proval and release of recipes makes sure

that a recipe is only used after having

been confirmed by certain persons.

FeaturesManagement of all recipes in a central

database

Cluster Tool Support: Management of

sequence and module recipes

APC support via SEMI E42 compliant

APS (Adjustable Parameter Sets)

Recipe filters for context /process spe-

cific recipe and parameter utilization

Support of recipe upload and down-

load

Version control

Approval for recipe releases

Audit trail

Administration of documents related

to equipment, recipe, or recipe filter

Basic reticle management

Web Reports showing recipe history


Value AddedLineWorks RM can save companies sev-

eral million dollars in material and re-

work by helping reduce the scrap gener-

ated due to wrong recipes and recipe pa-

rameter values to almost ZERO and

guarantee on-time delivery to custom-

ers.

LineWorks RM provides access to recipes

anywhere in the corporate intranet, al-

lowing process engineers to access them

from their offices.

Recipe approval processes avoid the

use of any recipe that may have potential

to scrap the material or cause an acci-

dent.

Recipe management history can play a

vital role and give a new dimension in

yield analysis.

LineWorks RM asCentral Storage ...To improve throughput time and yield

the production line should avoid han-

dling errors and mis-processing due to

incorrect settings.

... of Recipes,With a centralized recipe management

solution corrections and modifications

of the recipes don’t need to be done at

the individual tool.

Using LineWorks RM as an enterprise

wide tool, from one central office the

recipes of all equipments can be admin-

istered and distributed to all production

lines as and when required.

...and APS (Adjustable Parameter Sets)

Adjustable Parameter Sets (APS) offer

variable parameters which are provided

to the equipment in addition to the reci-

pe, but can be adjusted to individual pro-

duction conditions.


APS for Processesand EquipmentLineWorks RM handles generic recipe

bodies and APS. The adjustable parame-

ter sets might either depend on the proc-

ess (recipe filters) the recipe is associated

with or on the equipment that executes

the recipe.

While running a specific manufacturing

process the original recipe may be tem-

porarily modified by process-specific

parameters at the tool. Individual tool

adjustments may be necessary to make

equipment interchangeable and to track

and follow-up the adjustment of wear

and tear.

SearchesSearches can be used to find recipe filters

with certain process-specific information

or parameters. The retrieved parameters

might be updated then simultaneously.

Recipe FiltersRecipe filters provide context-sensitive

access to recipes and their adjustable pa-

rameters. A recipe filter determines the

process-specific context for which the

recipe is chosen, together with appropri-

ate process-specific parameters. Needed

documents and additional customer

data are provided as well.

The filter enriches the recipe by user-de-

finable keys and parameters for process-

specific adjustments.

By assigning various filters, a physical

recipe stored in the LineWorks RM recipe

pool can be utilized very effectively.


Cluster Tool SupportLineWorks RM provides the possibility to

link one recipe to other recipes. This

might be useful for a multi-chamber tool

where each main recipe controls a se-

quence of module recipes. Each of the

module recipes controls one individual

process and can be a sequence recipe it-

self. For each recipe, the recipe structure

stored in the database defines its mod-

ule recipes.

Recipe Download ...At the tool, configuration settings and

individual adjustments are necessary to

run a required manufacturing process.

LineWorks RM always provides the pro-

duction with the matching recipe version

and the current adjusted parameters.

... and UploadThe efficient usage of the central recipe

storage relies on how fast the storage

may be supplied with the up-to-date rec-

ipes.

The recipe upload facility enables the

rapid transfer of productve recipes to the

central recipe storage.

LineWorks RM Opens theWay for APCThe usage of LineWorks RM support the

realization of automated control loops of

Advanced Process Control (APC). In Line-

Works RM, all parameters needed for

APC can be defined.


Automated RecipeApprovalLineWorks RM offers an recipe approval

process. Using Approval Manager, vari-

ous approval boards can be configured

containing certain persons.

In LineWorks RM you define, if a recipe

has to be approved by certain boards or

persons, or if they will simply be notified

via e-mail of the changes made in a reci-

pe.

Reticle ManagementThe Reticle Management allows to store

all needed reticles in the central reticle

pool. From that pool, recipes can be as-

signed the reticles needed with certain

parameters for particular process steps

from.

Traceability throughVersioningLearning from experience is only reliable

if all changes of recipes are recorded

correctly. LineWorks RM gives full admin-

istrative control to all modifications to

guarantee full traceability.

LineWorks RM maintains the history of

various activities. It has a record of the

user activities as well as a history related

to a given recipe and its versions.

SecurityLineWorks RM can be employed with an

extensive security management sys-

tem. After users has logged in using

their individual passwords, LineWorks

RM provides them with their particular

security settings and permissions.

Permissions apply to the authorized reci-

pe import or export, the recipe locking

while it is being edited by another user,

and the recipe approval for production

release.


Web ReportingLineWorks RM generates reports to be

viewed in the Web browser. The Web re-

ports provide easy and fast access to all

information relevant in recipe manage-

ment. They are based on the Web repor-

ting tool LineWorks iGate.

LineWorks RM offers reports about reci-

pes, their history and usage. They allow

easy navigation between different

views on your production by just click-

ing on the information of interest.

InterfacesLineWorks RM communicates with the

manufacturing tool using a station con-

troller, e.g. LineWorks ECoFrame, via a

common SECS/GEM interface.



holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP, and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.


phone: +49-8137-935-0fax: +49-8137-935-235





product LineWorks RM is based on the

camLine Application Server (CAPS). All

interfacing technologies supported by

CAPS (CDLB, CORBA, COM/DCOM, TIB/

Rendezvous) are also available to Line-

Works RM.

LineWorks RM Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8


MS Windows 2000, XP


LineWorks RM Client Operating SystemsMS Windows 2000, XP


LineWorks RM MiddlewareCORBA/IIOP



LineWorks RM RDBMS SupportOracle 9i


LineWorks products include







17. July 2006 LineWorks RM 4.1 1/6

LineWorks RMTM

Recipe Management 4.1

Optimized equipment efficiency, traceability and process security are essential requests

asking for a comprehensive control of all factors influencing a manufacturing process.

Without the right recipe at the right place and all additional information needed for the

process to run properly, the fab looses efficiency due to lost time, rework, or scrapped

product. As a full-featured Recipe Management System (RMS), LineWorks RM assures

that all required data for processing is ready on the equipment.

FeaturesManagement of recipes in a central database

Cluster tool support: management of se-

quence and module recipes and their relation-

ship

Recipe objects representing recipe bodies, pa-

rameters, equipment constants, FDC strategies

(Fault Detection and Classification), process-

specific documents, etc.

Registration of recipe objects for context/proc-

ess specific recipe and parameter utilization

Support of recipe object upload and download

Advanced version control and audit trail

Configurable approval and release procedures

Notification management


Fulfill the Paradigm ChangeAs a modern RMS, LineWorks RM 4.1 represents

more than pure recipe and parameter administra-

tion. It offers the management of all controllable

components, so-called Recipe Objects. Recipe

Objects cover all pieces of information needed to

define the process target.

Each equipment type is described by means of a

Recipe Object. A recipe object contains a distinct

collection of Data Items. Which data items are al-

lowed or required is determined by the structure

definition. Among others, data items can be:

Recipe body, module and sequence recipe,

binary or formatted

Internal recipe structure

Recipe parameters

Equipment constants

Rules and control limits for parameters, e.g. for

supporting Advanced Process Control (APC)

Additional process relevant documents, e.g.

FDC strategies (Fault Detection Control)

Attributes used by the equipment automation

Once defined for the equipment type, a Recipe

Object can be used for all corresponding pieces

of equipment.

To meet all requirements made on a modern

RMS, LineWorks RM offers:

Management of automatich notifications, e.g.

via email

Approval of recipes

Versioning of recipes

User authorization and permissions

Paradigm Shift

From Recipes to Recipe Objects

Recipe Objects

Sequence Recipe, Module Recipe, Parameter,

Equipment Constant, Reticle, etc.

Registrations

An easy but powerful access to the recipe

objects

Variants

Prepare specialized variants of your recipe

objects

Version Branching

Develop several versions of your recipe object

in parallel

Notification

Be informed about the changes of your recipe

objects

Approval

Approve a recipe before releasing it to produc-

tion

Recipe Object Compare

Binary, masked and range compare

Integration

XML based API via TIB/Rendezvous and CORBA


Release Your Recipe ObjectsTo avoid misprocessing due to wrong or invalid

recipe objects, they need to be explicitly released

by particular authorities. LineWorks RM supports

all phases of the release procedure.

Validation

It is checked if the source data recipe object is

syntactically correct, if all required data items are

specified and if the values are in the range given

by the control information.

Approval

Make sure that the control information of the

recipe object (parameter limits) meet the process

target. Rules enable the concept of »minor and

major changes«. All changes which violate a rule

are »major« which means that an approval has to

be performed.

Rules can contain minimum or maximum limits, a

distinct set of values, or free definable expres-

sions which are based on JavaScript, for example.

Qualification

The recipe object is tested on each process equip-

ment to ensure the process capability of the rec-

ipe object.

Release

A recipe object has to be approved before it can

be released for production.

Access Recipe Objects byCluster Tool SupportLineWorks RM provides the possibility to link one

recipe to other recipes, e.g. for a multi-chamber

tool with a main (sequence) recipe controlling a

sequence of module recipes for individual proc-

esses. Module recipes can be sequence recipes as

well. The structure of a recipe stored in the data-

base defines the linked optional or mandatory

module recipes.

RegistrationsWhat really determines the recipe object is a set

of attributes describing how and when it is to be

used, e. g. process step, tool id, product, etc.

LineWorks RM registers a recipe object with a set

of context keys which can be used to retrieve it

later.

Using different context information, users can

register one recipe object for various purposes

more than once.


Keep Your Recipe ObjectsUp to DateLineWorks RM supports advanced event-driven

synchronization by a Notification Service. Every

recipe object modification is broadcasted to all

users and third-party systems such as MES (Man-

ufacturing Execution System), document man-

agement system, or external approval system,

that have been registered to be informed about

modifications.

Receivers, rules and contents of a notification can

be administered in LineWorks Notification Man-

ager. The effective use of the notification service

enables process engineers to be always up-to-

date regarding the latest recipe object changes.

Full Version ControlLineWorks RM provides a Version Control System

similar to the Concurrent Version System (CVS).

Track Your Recipe ObjectsLineWorks RM records all changes of a recipe ob-

ject as they happen to guarantee full traceability.

New recipe object versions are created based on

incrementing minor or major version numbers.

Rework, Design and ExperimentsEngineers can prepare special recipes for distinct

lots, products, experiments or tools. New recipe

object versions as well as rework or emergency

recipes can be created within dedicated develop-

ment branches. Via a priority matrix, branches

can be provided with priorities.

Furthermore, variants can be used to implement

special APS configurations for a recipe object, for

example.


Open ArchitectureThe advanced level of automation of modern fac-

tories makes high demands on the data ex-

change between the involved systems such as

MES, RMS, APC, or equipment automation.

Lineworks RM supports the upload and downlo-

ag of recipe objects from and to the equipment

automation. In addition, it provides information

about the state and the availability of certain rec-

ipe objects which can be used to plan further

processing.

LineWorks RM publishes all its system interfaces

so that you can extend each of the LineWorks RM

user interface by own functions or replace it com-

pletely with your own client program.

Information is exchanged with XML-based mes-

sages over the middleware CORBA/IIOP or TIB/

Rendezvous. All server components of LineWorks

RM are implemented in pure Java and are there-

fore available on all server systems supporting a

Java Runtime Environment (JRE).

LineWorks RM Opensthe Way for APCThe usage of LineWorks RM support the realiza-

tion of automated control loops of Advanced

Process Control (APC). In LineWorks RM, all pa-

rameters needed for APC can be defined.

SecurityThe security system of LineWorks RM is based on

user authorization and permission management.

With a single login and password, LineWorks RM

provides finely graded security and access rights.

This includes authorized recipe import/export,

recipe locking while it is being edited by another

user, and built-in recipe approval for production

release.





phone: +49-8137-935-0fax: +49-8137-935-235





product LineWorks RM is based on the



CAPS (CDLB, CORBA, COM/DCOM, TIB/

Rendezvous) are also available to Line-

Works RM.

LineWorks RM Server Operating SystemsHP-UX

IBM AIX

Sun Solaris

SuSE Enterprise Server

SuSE Linux

MS Windows 2000, XP


LineWorks RM Client Operating SystemsMS Windows 2000, XP


LineWorks RM MiddlewareCORBA/IIOP


LineWorks RM RDBMS SupportOracle 9i









3-Oct-2005 LineWorks WIP 4.2 1

LineWorks WIPTM

Work in Process Tracking

LineWorks WIP is the tool for tracking and monitoring jobs and material

throughout the enterprise manufacturing process, offering views from the

bird's-eye view right down to the individual process steps of each job.

LineWorks WIP can be used indepen-

dently or integrated with existing Pro-

duction Planning (PPS) or Enterprise Re-

source Planning (ERP) Systems.

LineWorks WIP supports production con-

trol and the monitoring of material flow,

and is the key element in a reliable pro-

duction environment.

LineWorks WIP allows managers or engi-

neers to track jobs within shopfloor pro-

duction areas in various industries.

"Work In Process Tracking" means mon-

itoring the previous, current and future

process steps, with regard to the num-

bers of good, failed and scrapped parts

resulting from each individual process

step.

LineWorks WIP can simultaneously mon-

itor various types of material flows which

can be orders, charges, lots or serial

numbers – LineWorks WIP summarises

them all as jobs.


LineWorks WIP FeaturesLineWorks WIP offers the following

features:

Tracking production unitsduring manufacturing

Interactive dispatch lists

Job split and merge

Carrier management, e.g. SMIF pod

Identifiable and non-identifiable

subsets

Standard jobs or development jobs for

new products

Locking the parts on each level (job,

process step, subset)

Verifying process stepsand used materials

Full traceability

Optional process steps

Rework with flexible capabilites for

repair and re-process

Alternative process step sequences

Check if equipment is released for pro-

cessing

Provides data for verification of mate-

rials to be used

Documented manufacturing

Guaranteed backtracing for related

production data

Displaying and recording the current

production status of each job

Detailed messages (check-in, process

start, process end, check-out) or

progress messages

Calculation of various indexes: yield,

cycle time, throughput, rework

Documentation of losses and related

reasons

Loss and loss rate statistics

Fast database access by separating

current from historic data

Attachments


LineWorks WIP Modules

WIP Core

Overview of the current state of production

WIP Core makes sure that a product is manufactured according to the pro-cess plan. It documents the individual process steps and the used material and provides an overview of the cur-rent state of your production.

WIP PMDA

Administration of product definitions and parts lists

LineWorks PMDA (Product Main Data Adminsitration) is used to define the main data for a product. This data is the basis for the jobs in WIP.

A process plan and a parts list describe how to produce the product. The parts in the parts list can be linked to process steps or directly to the job. Multiple structuring levels can be arranged to build a process plan.

WIP CarMa

Administration of production units

WIP Carrier Management allows the flexible administration of carriers (FOUP, SMIF pods, cassettes, boxes) and the contained material. Production units can be arranged in groups on var-ious hierarchy levels, e.g. serial num-bers on carriers in boxes on palettes.

LineWorks UA

User administration

LineWorks User Administration man-ages users, user groups, divisions and object permissions.

WIP ERP Interface

Information exchange with sys-tems like SAP, Workstream, Promis

LineWorks WIP can be provided with data from an Enterprise Resource Plan-ning System (ERP) through the CAPS client interface, e.g. Job (lot Id, charge Id, work order), Product Id, Process Plan, Feedback Indicator, or Parts List as well as various other parameters to synchronize the ERP information with the LineWorks WIP module.

A public interface is provided to sup-port the integration of WIP with the ERP to share the required data. In many systems the WIP interface can be di-rectly embedded into the ERP environ-ment.

Besides the »create job« feature the LineWorks WIP ERP interface offers a flexible feedback to the superordinate production planning system.

WIP MaMa

Tracking and monitoring of materials

WIP Material Management provides the tracking and monitoring of materi-als based on the defined stock.


Detailed Control of ProcessSequences and RoutesLineWorks WIP allows detailed control of

process sequences and routes.

The production units are either identi-

fied, e.g. via a production key, a number,

a name or a barcode, or exist as non-

identified subsets.

Using LineWorks WIP you will get an

overview of the current state of your pro-

duction which can be used for feedback

to the production planning system or op-

timized capacity planning and utilization.

LineWorks WIP makes sure that the indi-

vidual process steps are performed in the

correct order. In addition, it documents

all used materials so that you can check

if your products are manufactured exact-

ly according to the appropriate process

plan and parts list.

Loss or failure reasons can be recorded

during the production process and anal-

ysed via statistics.

The data gathered and managed in Line-

Works WIP contains basic information

for the other LineWorks modules such as

PULSE, SPACE, ECoFrame, or Recipe

Management.

Therefore, the features offered by Line-

Works WIP are of essential significance

for the area of production data acquisi-

tion.


Alternate Process StepsLineWorks WIP supports alternate pro-

cess steps or routes, any number of

which are defined in the Process Plan.

The Process Plan is defined in the WIP

PMDA module or an external ERP system

and sent to Lineworks WIP at run-time.

LineWorks WIP offers the possibility to

define alternative process steps or routes

and select them for execution. Line-

Works WIP tracks which one of the alter-

nate process steps is used and verifies

the correct sequence of steps.

Split & Merge JobLineWorks WIP internally supports Split

& Merge of jobs. Using WIP you specify

how many pieces from the master job

should be sent to the Split job, for exam-

ple. A Split job carries a new job id, a

new process plan and a new parts list.

Via the LineWorks WIP API you can de-

scribe the details for each split, e.g. the

number, quantity, process plan and parts

list.

The Merge function does exactly the

same as the Split function in reverse,

moving pieces back to a defined process

step in the master job.


ReworkIn LineWorks WIP it is possible to define

two different rework scenarios: sched-

uled and non-scheduled rework.

Non-Scheduled Rework

Non-scheduled rework is called for if an

unexpected event occurs, for example, a

process step may fail due to equipment

malfunction.

To repair the failure a Repair Job can be

generated with an individual process

plan and parts list and delivered to WIP.

The Repair Job works similar to the Split

& Merge procedure. However, all pieces

are moved to the repair job.

After completion they are moved back

into the defined process step to progress

the original job.

Scheduled Rework

Scheduled rework usually depends on

measurements taken during the produc-

tion process. If the result of the measure-

ment is outside of the required limits a

rework route will be used for reworking

the failed piece.

After rework, the piece could be routed

back to the measurement process step,

or routed to a different process step as

required.

When failed units are detected regularly,

a scheduled rework route will be speci-

fied in the process plan for failed pieces

and will be defined in the Product Main

Data Administration (PMDA) or in the ex-

ternal Enterprise Resource Planning (ERP)

system.


WIP Online ReportsWIP Online offers Web reports which can

be viewed in the Web browser. WIP On-

line reports offer:

Current list of all jobs that are not

started, started, in progress or finished

Dispatch list with jobs related to pro-

cess steps

Overall set, subset, failure per job and

process step

Jobs and split jobs per process step

Production time per job, process step,

subset or individual part, respectively

Various yield calculations

Numerous other reports regarding

jobs, process steps, stations and pro-

duction time

»Diary« of individual subsets (serial

numbers)

WIP APIUsing the LineWorks WIP API (Applica-

tion Programming Interface) you can in-

tegrate numerous WIP functions into the

program environment of your produc-

tion equipment.

WIP Online AcquisitionWIP integration can be facilitated by de-

ploying the camLine product LineWorks

ECoFrame providing powerful client

functions to accomplish equipment au-

tomation.

Using LineWorks ECoFrame, WIP can be

employed for online data acquisition

and monitoring.



phone: +49-8137-935-0fax: +49-8137-935-235







product LineWorks WIP is based on the



CAPS (CDLB, CORBA, COM, TIB/Rendez-

vous) are also available to LineWorks

WIP.

LineWorks WIP Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8

SuSE Enterprise Server 8 and 9



LineWorks WIP Client Operating SystemsMS Windows NT, 2000, XP


LineWorks WIP Supported Web BrowsersMicrosoft Internet Explorer 5.5 or higher

LineWorks WIP MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)

CORBA/IIOP



LineWorks WIP RDBMS SupportOracle 9i






PULSE – Equipment Efficiency and Optimization






7. August 2006 LineWorks ECoFrame 1.8 1

LineWorks ECoFrameTM

Equipment Connection Framework

LineWorks ECoFrame offers an efficient way to automate equipment includ-

ing equipment data collection, data routing and remote equipment control.

Data is automatically retrieved from the equipment guaranteeing highest

data quality as well as most detailed information.

Using LineWorks ECoFrame, equipment

automation can be realized with little ef-

fort. By simple configuration, alarms,

events, or process data are routed to

other LineWorks modules. Data routing

to third party solutions can be integrated

as well.

FeaturesBroad range of equipment connec-

tions via SECS, HSMS, OPC, Profibus

OPC, CORBA, Digital I/O

Combining and selecting relevant

equipment parameters

Enabling facility alarms, event reports,

or process data logging

Configurable data routing of alarms,

events or process data to other Line-

Works modules or third party solutions

Recipe download, upload or select

Optional equipment control

SEC (Statistical Equipment Control) in

combination with LineWorks SPACE

Monitoring equipment via LineWorks

PULSE


Equipment Data Alarms, Events, Variables

All equipment data provided by the man-

ufacturer can be used for processing.

The user chooses the relevant data and

defines how to use them further. For ex-

ample:

A variable to be monitored via SPC will

be collected during processing and sent

to LineWorks SPACE.

The process start and process end events

are sent to LineWorks PULSE to record

the productive time as well as the idle

time of the equipment.

With the aid of the administration fea-

tures of LineWorks ECoFrame the data

collection for a complete facility logging

file can be specified in LineWorks PULSE.

By that a lot track, recipe track, info

track, alarm track and/or time track can

be written.

Data Routing

In the ECoFrame Administration, it can

be defined for all equipment data where

the data is to be further processed.

For further processing the LineWorks

modules SPACE, PULSE, PDC and/or oth-

er existing applications can be specified.

Contextual Information

In the ECoFrame Administration, individ-

ual contextual data and constants such

as operation or lot number can be de-

fined.

The contextual information can be com-

bined with the equipment data and sent

to other applications.


ComprehensiveCIM Automation

Facility Specific Dispatch

The interface to Lineworks WIP offers the

possibility to link contextual information

with the equipment data. This interface

can be extended to existing MES sys-

tems, e.g. SAP/R3, Workstream, or

Promis.

User Administration

Extension of LineWorks ECoFrame for

the administration of users, divisions and

security levels.

ECoFrame MultiplatformClientThe ECoFrame Multiplatform Client of-

fers the same features as the ECoFrame

Standard Client 1.8. It supports equip-

ment connection via SECS, OPC, Profi-

bus OPC, CORBA, and Digital I/O.

Recipe Management

LineWorks RM provides central manage-

ment of programs and recipe files. Using

keys from the facility dispatch the correct

recipe is automatically provided for the

lot to be processed.





phone: +49-8137-935-0fax: +49-8137-935-235





product LineWorks ECoFrame is based

on the camLine Application Server

(CAPS). All interfacing technologies sup-

ported by CAPS (CDLB, CORBA, COM,

TIB/Rendezvous) are also available to

LineWorks ECoFrame.

LineWorks ECoFrame Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8




LineWorks ECoFrame Client Operating SystemsMS Windows NT, 2000, XP / Further systems or versions on demand

LineWorks ECoFrame MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)

CORBA/IIOP



LineWorks ECoFrame Communication ProtocolscamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)

CORBA/IIOP, COM (via CAPS OLE Gateway), TIB/Rendezvous TIBCO Load Balancing

SECS I, HSMS-SS, Digital I/O, OPC, Profibus-OPC

LineWorks ECoFrame RDBMS SupportOracle 9i








8. August 2006 LineWorks iGate 2.3 1

LineWorks iGateTM

Information Gateway

LineWorks iGate is a component-oriented visualization framework for

Web-based reporting. It is developed to provide easy and fast access to all

information available in various databases. It is a powerful reporting tool

to meet the requirements typical in production. The so-called 80%

solution can be achieved very quickly on the basis of re-usable components.

LineWorks iGate FeaturesDashboard functionality: define a col-

lection of reports you are interested in

Publishing by configuration

– easy and fast creation of reports

– configuration using XML files

– Uniform configuration with style

sheets stored centrally on a server

Best support for drill down approaches

Easy linking of reports over different

databases

Servlet library with common report

layout components which is regularly

extended by camLine

Online modification of reports without

restarting

Authentication and access control,

Hierarchical menus

e.g. with LineWorks User Administra-

tion (UA)

Plugin support for

– user-defined modifications of charts

and data sources

– the import of arbitrary data like csv

files, text files etc.

Blob support. Storage of any files such

as MS-Excel, images, zip-files etc.

WIP RM Third Party

Local DBs

OtherData Sources

LineWorks iGateWeb

Browser

XML Configuration

Files

Integration of data from

LineWorks products

such as WIP or RM

Third party products

Local customer database

All accessible data sources


Common Web Page Layout

High SecurityLogin required

Different users have

different permissions

Central permission and

password administration

Users can view a piece of

information only if they have

the corresponding

permissions

Main menus and sub menus

Navigation trees

Results area

Main and Sub MenusMain menu used to separate by prod-

ucts, user groups, etc.

Sub menu depends on the main

menu selection, displays detailed

views or adds constraints

Period under observation can be

specified

Each menu item can be provided with

user access control, e.g. by Line-

Works User Administration (UA)


TreesTrees used to change the detail level of

the report with drill down

Flexible linkage with reports per tree

level

Main menu, sub menus and trees may

be linked together in any combination.

Filtering and SortingA table can be sorted by clicking on the

heading of a table column by which the

data recoreds should be sorted.

You can filter data to only display the sig-

nificant information.

Results AreaResults Area with header, body, and

summary section

Body section with visual components

and their configuration such as tables-

charts, and text. The contents can be

linked, filtered, sorted, or exported in

various file formats.

Drill Down and LinkingDrill down means to create a new report

via clicking on a sensitive area within the

original report. Underlined data items

contain so called drill down links. By

clicking such a link you receive a more

detailed report, based on the selected

item.


Supported ChartsCharts provide a convenient way to ana-

lyze the data. Especially interactive charts

make work much easier.

By simply clicking on a linked data you

can drill down from a first overview to

various detail views.

LineWorks iGate provides the following

chart types. You can adjust them to your

own needs.

Category chart

Box plot chart

Bar chart

Line chart

Combined line and bar chart

Pie chart

Wafermap chart

XY plot chart

Dynamic NavigationFunctions

Zoom in / out the whole plot area

Zoom in a chart sector

Scroll up / down the value axis

Scroll forward / backward the domain axis

Reset the chart navigation

Scale up / down the chart


The DashboardThe dashboard provides an easy and fast

way to show how well your production is

performing right now. You will receive

an up-to-date snapshot into production

at various places of your site.

With one mouse-click, you display the

collection of reports of your personal in-

terest.

With a few simple touches you create

your own dashboard with all wanted

reports:

– Defining the number and size of

dashboard segments

– Placing the desired reports in the

dashboard

Creating a dashboard with all

wanted reports

16. August 2006 LineWorks UA 2.3 1

LineWorks UATM

User Administration

LineWorks UA offers the possibility to manage users, user groups, divisions

and permissions. Users have access to an object if they are assigned to a

user group which has the corresponding permissions in the division the

object belongs to.

User Groups ...

... state which access rights to which ob-

jects are granted. Each group defines a

specific permission profile. These permis-

sions have no influence on the data entry

itself, but are related to the administra-

tion, this means the viewing, creating

and editing of objects.

Divisions ...

make up a category above users and user

groups. In each division users can belong

to a certain group, i.e. in each division

they can have specific object permis-

sions.

In the Division »Frontend«, User Meyer belongs to the Group »Gast«, which has the permission to view charts. As member of Group »Expert« in Division »Lithography«, User Meyer can create and delete reports.

If users miss the ’read’ permission

the object will even be invisible

for them.

16. August 2006 LineWorks UA 2.3 2




phone: +49-8137-935-0fax: +49-8137-935-235





product, LineWorks UA is based on the




vous) are also available to LineWorks UA.

LineWorks UA Server Operating SystemsHP-UX 11.i

Sun Solaris 6, 7

SuSE Enterprise Server 8, 9

MS Windows 2000


LineWorks UA Client Operating SystemsMS Windows 2000


LineWorks UA MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)

CORBA/IIOP



LineWorks UA RDBMS SupportOracle 9i









6. September 2006 camLine Application Server – CAPS 1

CAPSTM

camLine Application Server

camLine presents the CAPS framework for your manufacturing infrastruc-

ture. Plug your different IT components together and take advantage of the

CAPS integration capabilities.

Based on a range of field proven middle-

ware and database architectures, CAPS

links your business systems together us-

ing a three-tiered client server architec-

ture. Major advantages are ease of use

and maintenance, fault tolerance, ro-

bustness and high availability, offline and

recovery capabilities, and high transpar-

ency as well as support for a wide range

of software standards.

The user may replace, upgrade or take

off-line a single layer without affecting

the others. This provides the open frame-

work for easy future updates of software

or even of hardware components.

Compared to the more simple message

bus systems a three-tiered client server

architecture provides overall higher relia-

bility. Even complex client server transac-

tions remain simple and easy to monitor

and debug, but are still fully transparent

to the user.

Performance of a transaction is reliable

and stays within predictable ranges. No

matter if you are using CAPS with ten or

a hundreds of clients, if you do one

transaction per hour or a thousand

transactions per minute: the system

keeps up performance, scales with the

requirements, stays reliable and is still

easy to maintain.

Business Logic Layer

,

Communication Layer

camLine Application Server (CAPS) – Architecture

SQLMapping

ORACLE

... others ...

Service 1

Service 2

Service 3

Service 4Service n

CDLB CORBA / IIOP TIB / Rendezvous

Factory Network

Core Layer RDBMS Layer

DB APICAPS Core

Any number of applicationspecific services

True Three Tiered Client Server ArchitectureCAPS is a three-tiered client serv-

er architecture with distinct pre-

sentation, application and data-

base layers.


Join the Future with Software Standards

In addition to the camLine Dynamic Load

Balancing Protocol (CDLB), CAPS sup-

ports most of the communication stand-

ards that are currently available.

Application servers can be started in

CORBA/IIOP mode, camLine DLB Proto-

col mode, COM (using the CAPS OLE

Gateway) or TIB/Rendezvous mode de-

pending on a startup flag and without

the need for any recompilation.

Multiple instances of the same applica-

tion server image may run in different

communication modes at the same time.

The benefit from this is that it is not de-

pendent on a single middleware strategy

and may use different middleware com-

ponents simultaneously or even change

the underlying middleware component

of a business application at runtime.

The CAPS to database connection con-

forms to the ANSI SQL standard. Other

databases can be supported on custom-

er request.

Building clients with Java ensures that

your application front-ends are highly

portable and run over a variety of plat-

forms with the same look and feel.

Furthermore you can use the de facto

middleware standard CORBA to access

your application servers through an Ob-

ject Request Broker (ORB).

The CAPS COM / OLE Automation Gate-

way enables you to connect to CAPS ob-

jects from popular developing environ-

ments like Microsoft Visual Basic or Bor-

land Delphi without any knowledge of

communication internals.

camLine Application Server (CAPS) – Application Scenarios

Factory Network

CDLB

camLine Application

Server 1

TIB / Rendezvous

camLine Application

Server 1CORBA / IIOP

camLine Application

Server 1

CDLB CDLB CORBA / IIOP

ORB:any supported programming

languagee.g. JAVA

(recommended)C/C++

TIB / Rendezvous

DLL WIN16/32C Lib UNIX /

ANSI C

ORACLE

DLL WIN 16/32(C-Lib UNIX /

ANSI C)

MS Visual C Borland C

MS Visual Basic Smalltalk

DLL WIN 16/32(C Lib UNIX /

ANSI C)

OLE Gateway

RAD:Visual Basic

Borland Delphi

OLE Gateway

CORBA / IIOP

OLE Gateway

RAD:Visual Basic

Borland Delphi

OLE Gateway


Dynamic Load BalancingThe camLine Dynamic Load Balancing

Protocol (CDLB) is a key feature of the

CAPS framework. CDLB offers various

features like a naming service and adap-

tive client routing.

Based on CDLB and Oracle Parallel Serv-

er, for example, fault tolerant, high avail-

ability systems can be set up.

Together with the advanced offline capa-

bilities CDLB improves overall middle-

ware stability and minimizes administra-

tion overhead on the enterprise frame-

work architecture.

CDLB offers

enterprise wide naming service

application transparent adaptive client

routing

application transparent offline capabil-

ities

fault tolerant and highly available in-

frastructure

highly efficient administration of CDLB

clients on shopfloor level

Performance, Fault Tolerance, High Availability

CAPS provides a fault tolerant middle-

ware architecture based on the camLine

Dynamic Load Balancing Protocol

(CDLB).

Loads are distributed over distinct nodes

and application server instances by a

ticketing mechanism.

Enterprise wide name services and dy-

namic client routing in combination with

Oracle Parallel Server allows for a fault

tolerant and highly available system.

Additional information or technicalspecification: can be found under:

General: http://www.camline.com

CORBA 2.2: http://www.omg.org

ANSI-SQL: http://www.oracle.com

TIB/Rendezvous: http://www.rv.tibco.com


Adaptive Client RoutingCAPS provides the possibility to start

more than one instance of an application

service. Those CDLB application servers

offer so called ’tickets’ to indicate if they

are currently idle and ready to process

new requests.

In the first phase the CDLB client asks the

naming services on the different nodes

for the address of the application servers

it wants to call.

The naming service on each node pro-

vides a list of application servers that are

currently available. In the second phase

the client tries to obtain a ticket from

one of those application servers.

This is done via a round robin algorithm,

i.e. the client starts at an arbitrary node,

scans the application server(s) – one after

another – for available tickets until it has

successfully got one. This ticket is the

permission to send a request to the ap-

plication server.

For the next request, the CDLB client per-

forms the same tasks again (though for

performance reasons it starts where it

got the ticket last time). This mechanism

assures that – if an application server is

busy or a whole node is down – the cli-

ent is able to perform its request possibly

on another application server or node.

Very Fast and Fully Transparent

The whole task of allocating an applica-

tion server is very fast and fully transpar-

ent to the client.

The client application isn’t aware of a

switch from one application server to an-

other nor does it notice a switch from

one node to another.


Advanced Offline CapabilitiesIf the network connection from a client

machine to the application server is com-

pletely down for example, clients can’t

obtain tickets. CDLB provides another

useful feature to move around problems

like this.

With the CAPS advanced offline capa-

bilites a client can be configured to log

its data and requests into an offline file in

case of a network breakdown, for exam-

ple.

The data is stored in a local file and can

be uploaded later, when the application

servers are back online. The stored re-

quests are performed when the connec-

tion is working again.

As you see, though there might be no

server connection at all, the client can

continue to process. Furthermore this

feature is fully transparent to the client

application - depending on the configu-

ration the client doesn’t even notice

whether it is currently online or offline.

The offline feature is broadly configura-

ble to provide the following options:

Store all data

Store data for specific applications

only

Try to go online at each new request

Stay offline and try to upload only af-

ter a specified downtime

Full recovery of stored data

Filtered recovery of stored data

Partial recovery of stored data

Not all applications are fully able to work

properly with the advanced offline capa-

bilities. A client that is uploading test

data to an application server would be

able to continue working, but a client

that is downloading data (e.g. recipes)

from the application server may not be

able to continue when the network is

down.


CAPS OLE GatewayThe CAPS architecture is a leading three-

tier client server environment to build en-

terprise wide CIM frameworks. The

CAPS client provides a dynamic interface

structure similar to the CORBA IDL spec-

ification.

Besides CORBA, the Microsoft COM

specification is an emerging middleware

interface standard. CAPS clients support

the OLE 2.0 Automation specification by

providing a dynamic OLE Automation in-

terface.

Several software development tools such

as Microsoft Visual Basic, Visual C++ or

Borland Delphi are supported.

By using the CAPS OLE Gateway, the end

user can take the advantage of interfac-

ing independent GUI front-ends to the

field proven CAPS client server architec-

ture.

The CAPS OLE Gateway support can only

be used together with the CAPS client

server architecture.

The Common InterfaceStructure

The OLE Gateway offers the common in-

terface structure to several software sys-

tems and applications such as Microsoft

Excel or Java, for example.

The OLE Gateway combines the free

choice between various OLE capable de-

velopment environments on the client

side with the benefits of the CAPS

framework on the server side.

The CAPS OLE Gateway offers

Transparent and dynamic OLE

Automation interface structure

Automated CAPS interface

definition query support

Windows 32-bit support (only)

Automated type library

generator

Compliance to the OLE 2.0

Automation specification





phone: +49-8137-935-0fax: +49-8137-935-235


LineWorks Product FamilyThe LineWorks product family offered by

camLine provides an automation solu-

tion with or without MES system. Each

LineWorks product is based on CAPS. All



vous) are available to all LineWorks prod-

ucts.

CAPS Communication LayerscamLine Dynamic Load Balancing (CDLB)

CORBA/IIOP



CAPS Server Operating SystemsHP-UX 11.i

IBM AIX 4.3.3

Sun Solaris 5.8



CAPS Client Operating SystemsWindows NT, 2000, XP and all the server platforms mentioned above

CAPS RDBMS SupportOracle 9i and further databases on demand

Client Programming Language SupportMicrosoft VisualBasic, Microsoft Visual C/C++

Borland C, Borland Delphi

Smalltalk

Java

and all others that are capable of using CORBA/IIOP or COM








10-Oct-2005 PAA (Part Average Analysis) 1

PAA (Part Average Analysis)

camLine offers a new self-contained online software solution for the mass

production that is highly specialized in the treatment of abnormal test data

(PAA). The long-term employment inside a productive environment at test

stations enables the consistent evaluation of all (semi finished) goods at se-

rial number level.

The application is designed for high

product variety and also for shortest re-

sponse times to meet the demands of

the electronic and semiconductor indus-

tries. An ORACLE database forms the

backbone of the application and guaran-

tees the complete documentation of all

PAA results.

A powerful web based reporting tool en-

ables all kinds of traceability queries. The

PAA module is easily integrated into al-

ready existing computing environments.

The solution is scalable and applicable

across diverse system platforms.

camLine's LineWorks product family is

complemented by a new and independ-

ently working PAA module that is devel-

oped to implement the part average

analysis into a manufacturing environ-

ment.

The module is designed to facilitate the

early detection of parts with high risk of

later failure. In all test areas abnormal

behavior of good parts that otherwise

would pass the test will be instantly de-

tected at serial number level. Parts with

increased risk are being filtered out and

rejected.

The implementation into the mass pro-

duction requires short response time that

are of particular importance to validate

the parts and their test results in real

time. Every test station sends its test data

to the central PAA server which will in-

stantly analyze the data. These server

calls transfer the PAA results back to the

test stations as return values. At the test

stations the test programs can proceed

and instantaneously make use of the

PAA validations.

The high variety of products and manu-

facturing processes requires parallel

processing of different part average

analyses. The PAA module offers an own

caching mechanism to hold a PAA in-

stance, separately for each analysis.

10-Oct-2005 PAA (Part Average Analysis) 2

The PAA instances follow a specific con-

cept that was originally developed by

camLine and is proven in practice due to

its high flexibility within other LineWorks

products: Each instance, i.e. each PAA

analysis, is identified by an arbitrary set

of key names that enable the introduc-

tion of sorting and grouping criteria.

In the background an online database is

kept as slim as possible to support the

cache mechanism of the PAA instances.

The cache itself is operating with test

data and PAA results that are taken only

from a short-term sliding window.

This approach is essential to guarantee

the required high performance for all

real-time analyses. The long-term docu-

mentation of the PAA results is provided

by an own history database that is being

supplied with data from the online data-

base section by a separate PAA back-

ground server.

The PAA module itself makes use of Line-

Works iGate to provide standardized or

customer specific web reporting. The

data are taken either from the history

but also from the online databases.

To communicate and configure the PAA

module camLine offers a standardized

API that may be integrated into the test

programs. Doing so the programmer is

able to determine and control all PAA in-

stances via the already existing test pro-

grams. The advantage is evident: Using

the API the PAA module becomes totally

configurable from the test stations.

There is no need for an extra GUI to set-

up and administrate PAA.

The application server of the PAA mod-

ule is based on the CAPS (camLine appli-

cation server) middleware architecture.

For many years CAPS has proven itself to

be noticeably well suited for a long-term

usage inside a manufacturing environ-

ment. CAPS is designed to operate and

communicate across diverse platforms

that facilitates the integration into an al-

ready existing IT landscape.

Furthermore CAPS offers a proven con-

cept for dynamic load balancing (DLB)

which is an essential aspect to guarantee

short response times. CAPS consists of

an inherent scaleable architecture that

allows adapting the PAA module to in-

creasing system load and data through-

put. Due to its modularity the deploy-

ment of the server software onto diverse

server hardware permits flexible arrange-

ments and meets all practical demands

for system integration.

Documents

camLine Product Catalog - All-Electronics.de...The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors