BSAC Research Review Individual Project · Yerushalmi, et al. Applied Physics Letters, 2007. Printed, aligned nanowire arrays on glass (L) and paper (R). Nanowires are first grown

Prepublication Data March-August 2008 ©UC Regents

Berkeley Sensor and Actuator Center

Kris Pister


Berkeley Sensor & Actuator Center (BSAC)

The NSF Industry/University Cooperative Research Center on MEMS

22nd Year of Operation

“BSAC conducts industry-relevant, interdisciplinary research on

micro- and nano-scale sensors, moving mechanical elements,

microfluidics, materials, and processes that take advantage of progress

made in integrated circuit, bio, and polymer technologies”

Top US MEMS Center in Peer Rankings (Small Times Mag)


BSAC Center Statistics

• 29 Post-Doc & Research Leads151 Researchers

• +Michel Maharbiz +Ali Javey13 Faculty co-

Directors

• 7 Departments + 3 Campuses9 Affiliate Faculty

• Three with 20+ years in BSAC 40+ Industrial

Members

• 9 Research Areas 122 Reported

Projects

Generates 7% of all IP licensing deals on campus


J. HugginsExecutive Director

co-DIRECTORS

B. BoserEECS

D. HorsleyUC Davis Mechanical

L. LeeBioEngineering

D. LiepmannBioEngineering

Mechanical

A. JaveyEECS

L. LinMechanical

M. MaharbizEECS

R. MullerEECS

C. NguyenEECS

A. PisanoMechanical/EECS

K. PisterEECS

R. WhiteEECS

M. WuEECS


Analog Devices

BioVitesse

Brechtel Manufacturing

Bridgewave Communications

Chevron

Draper Laboratories

Eastman Kodak

FormFactor

Freescale Semiconductor

Honeywell

HP

IBM

Intel

JPL/NASA

Lockheed Martin

Marvell

Medtronic

National Semiconductor

ON Semiconductor

Qualcomm

Raytheon

Sandia National Labs

Starkey Laboratories

Textron

Vegrandis

Fujitsu

Honda

NDK

NGK Sparkplug

OKI

Omron

Panasonic

Rohm

Samsung

Sanyo

Sharp

Toshiba

TSMC

Toyota

Yamatake

Bosch

Suss MicroTec

Siemens

British Petroleum

North America 25

Europe 4 Asia 15

44 BSAC Industrial Members


•CAD & Modeling

0 Projects

•Photonics &

MicroOptics

9 projects •Power &

Energy

9 projects

•Sensors &

Actuators

16 projects

•BioMEMS

23projects

• Microfluidics

7 projects

•Wireless & RF

Components & Systems

20 projects

•Packaging, Processes

& Materials 16 projects

•NanoStructures &

Devices (+Plasmonics)

12 Projects

-90

-80

-70

-60

-50

-40

157.75 157.85 157.95 158.05

(a)

Tra

nsm

issio

n (

dB

)

Frequency (MHz)

Data

R = 17 μm

h = 3 μm

do = 70 nm

VP = 7 V

fo = 157.89 MHz

Q = 20,500

(b)

Disk Resonator

Electrode Electrode

Anchor

R = 17 µm

../../../Documents%20and%20Settings/jhuggins/IABFall06/Documents%20and%20Settings/jhuggins/Desktop/GarmireElectrometrology.ppt

../../../Documents%20and%20Settings/jhuggins/IABFall06/Documents%20and%20Settings/jhuggins/Desktop/GeigerPlasticMolding.ppt


Photoresist

ChitosanSilicon

Uncooled IR Material,

Process, & Detector

MEMS on finished CMOS Process

Ge

Xenon Difluoride etchingPolysilicon comb drive

Materials and Processes: Blue Sky to Business Impact


Micro Air Vehicles

• Michel Maharbiz

Content warning: PG13


v1.0, cotinis, no radio

Microbattery

Panasonic, ML614, 3 V, 160 mg,

Ø6.8 mm x 1.4 mm, 3.4 mAh

Microcontroller

Texas Instruments, MSP430F2012IPWR,

63 mg, 5.0 mm x 4.5 mm x 1.0 mm

Silver wires were soldered as electrodes.

Electrode

at flight muscle

Electrode at brain

Electrode at dorsal thorax

MicrobatteryMicrocontroller5 mm


On / Off (N > 20)

+3.0

- 3.0

0

1 sec

1 sec

Nor

mal

ized

am

plitu

de /

-

0

-0.5

-1.0

1.0

0.5

Off OnOn

On/Off movie

Positive pulse: Stop

Negative pulse: Start


Turning

Muscular Stimulation

2sec

100Hz

2sec

100Hz

2sec

100Hz

2sec

100Hz

2-sec

pause

LEFT Muscle Stimulation

2sec

100Hz

2-sec

pause

2-sec

pause

2-sec

pause

The microcontroller was

programmed to execute an

alternating pulse trains at right and

left flight muscles.


2 sec RIGHT

2 sec Pause

2 sec LEFT

Repeat

Turning (N>20)


v2.0: Mecynorrhina and radio

Chipcon TI CC2431

microcontroller

4 V, 8.5 mAh, 350 mg

microbattery

Dipole antenna


Turning

T1

T0

T2

T3

T4

Operator

T5

command

a left turnswitched the

stimulated side

Command a left turn

switched the

stimulated side

START

END

T1

T0

T2

T3

T4

Operator

T5

T1

T0

T2

T3

T4

Operator

T5

T1

T0

T2

T3

T4

Operator

T5

command

a left turnswitched the

stimulated side

Command a left turn

switched the

stimulated side

START

END


Turning


Wireless Power Monitoring

• Richard White


• Suite of miniature wireless electrical sensors for use in

residential/commercial buildings and high-voltage power systems

• Improving energy efficiency through sub-metering of Cory Hall

WIRELESS ELECTRICAL SENSORSProfs. White and Pister (EECS) and Wright (ME)

120 – 660 V

Residential/Commercial Distribution Circuits Transmission Circuits

4 – 35 kV 66 kV and up

Campus: 18 to 30 MW,

Cory Hall: 1 MW

Where does it all go?

Cory Hall


Sub-metering for loads >10 kW in part using “hardened” wirelessly enabled

versions of our experimental sensors and energy scavenging to power the

radios.

Meso-scale current sensor

MEMS prototype - 1mm

480-V feed to UCB Microlab

Exploratory Wireless Sub-Metering of Cory Hall

0

0.05

0.1

0.15

0.2

0.25

0.3

0 10 20 30 40 50

Current in cable, Amps AC

Sen

sor

ou

tpu

t, V

olt

s A

C

19 mm from center

22.2 mm from center

25.4 mm from center

Distance

Current Sensing on Residential Circuit


Nanowires for the Masses

• Ali Javey


Metal printing roll

Nanowireprinting roll

UV exposure

Final devices

Plastic substrate roll

Nanowirearrays

Shadow mask

Exposed pattern

All Printable Nanowire Electronics

Advantages:• Crystalline nanowires with tunable composition: high performance• Inorganic: air stable• Quasi-1D: mechanically flexible• Easy processing


rR

rW

Roll Printing of NWs

Yerushalmi, et al. Applied Physics Letters, 2007.

Printed, aligned

nanowire arrays

on glass (L) and

paper (R).

Nanowires are first grown on a roller and are thentransferred to the desired receiver substrate by a rollprinting process. The transferred nanowires are aligned inthe direction of rolling.A shear motion is applied in conjunction with the rollingmotion.Applicable for a wide range of NW materials.

roller

Receiver substrate

Printed nanowires


2 µm

10 µm

100 µm20 µm

Assembly of Nanowire Superstructures

Nanowire superstructures can be readily assembled on the receiver substrate by contact /roll printing.

10

8

6

4

2

0

De

nsity (

NW

/µm

)

F SiO2 N+ NH2 poly-L

Surface Functionalization

•The assembled nanowire length isgoverned by the growth nanowire length.

•The average density of printed nanowiresis tuned by the surface functional groupsof the receiver substrate.


Pd

Al

10-4

10-3

10-2

10-1

100

I DS (

nA

)-10 0 10

VGS (V)

VDS = 2V

Parallel Array Nanowire Device IntegrationSi NWs

S

DCdSe NWs

dark

light (4.4 mW/cm2)

S

DInAs NWs

G

7

6

5

4

3

2

1

0

ID

S (

mA

)

3210VDS (V)

-10 V

-6 V

-2 V

2 V

10 V

Pd

PdSi NWs

Vds = 1mV 250 ppm H2

10-12

10-10

10-8

10-6

Id

s (

A)

-2 -1 0 1 2Vds (V)

FETs Diodes

Gas Sensors Optoelectronics

The printed nanowire arrays can be configured into various device elements with defined functionalities.


Ordered Arrays of Crystalline Nanowires for Photovoltaics

2 µm 1 µm

Highly regular AAO template used for nanomaterial synthesis

0.5 µm

Vertical nanowire structures

Highly regular nanowire arrays

Nanomaterial synthesis

Ordered and regular arrays of crystalline nanomaterials with tunable diameter and atomic composition can be readily achieved on amorphous (and cheap) aluminum substrates, without the use of any lithography.

Z. Fan, et al, submitted, 2008.


NW

Ordered Arrays of Crystalline Nanowires for Photovoltaics


RF MEMS

• Clark Nguyen


RF BPF

RF BPF

RF BPF

Multi-Band Wireless Handsets

Duplexer

90o

0o

A/D

A/D

RXRF Channel

Select PLL

I

Q

LPF

LPF

RXRF LO

I

Q

AGC

AGC

LNA

Duplexer RF BPF

LNA

From TX

LNA

LNA

RF BPF

WCDMA

CDMA-2000

DCS 1800

PCS 1900

LNA

Duplexer

LNA RF BPF

GSM 900

CDMA

From TX

From TX90o

0o

I

Q

Tank

÷ (N+1)/N Xstal

Osc

Antenna

UCB

UCB

UCB

UCB

UCB

UCB

UCB

UCB


All High-Q Passives on a Single Chip

WCDMA

RF Filters

(2110-2170 MHz)

CDMA-2000

RF Filters

(1850-1990 MHz)

DCS 1800 RF Filter

(1805-1880 MHz)

PCS 1900 RF Filter

(1930-1990 MHz)

GSM 900 RF Filter

(935-960 MHz)

CDMA RF Filters

(869-894 MHz)

0.25 mm

Low Freq.

Reference

Oscillator

Ultra-High Q

Tank

Optional RF

Oscillator Ultra-

High Q Tanks

Vibrating Resonator

62-MHz, Q~161,000

Vibrating Resonator

1.5-GHz, Q~12,000


Wine Glass Disk Array Oscillator

VDD = 1.65 V

VSS = -1.65V

M3M4

M1 M2

MRf

Vbias2

Vbias1

M11 M12 M13 M14

Vcm

M17

M18

M16M15

Output

Input

M5

Shunt-Shunt Feedback Tranresistance Amplifier

Common Mode Feedback Bias Circuit

VP

vi

Bond Wire

MOS Resistor

io

Wine-Glass Disk Array-Composite Resonator

VP=7V Rx=2.5kW

Q = 118,900


GSM-Compliant Disk-Array Oscillator• Below: measured phase noise for

oscillators with varying disk #’s

-160

-140

-120

-100

-80

-60

-40

-20

1.E+01 1.E+02 1.E+03 1.E+04 1.E+05

Divide Down to 13 MHz

Makes GSM L{f } specs!

Pha

se N

oise

, L{

f} [d

Bc/

Hz]

Offset Frequency [kHz]

Output

Input

[Y.-W. Lin, Nguyen, IEDM’05]

Single WG Disk @ 62 MHz

9-WG Disk Array @ 62 MHz

All made possible by mechanical circuit design!


vi+

vi-

vo+

vo-

VP

VP

l

l/2

l/4

l/2

l/4

Port1

Port2

Port3

Port4

l

l/2

l/2

Filter CouplerCom. Array Couplers

Diff. Array Couplers

[Li, Nguyen Trans’07]

163-MHz Differential Disk-Array Filter


Performance

r=17m

h=3m

do=80nm

VP=14V

P=-15dBm

fo=163.126MHz

Qres=10,500

Rx=977W

BW=98.477kHz

PBW=0.06%

I.L.=2.43dB

20dB S.F.=2.85

RQ1=RQ2=1.6kW

RQ3=RQ4=1.4kW

Frequency [MHz]

Tra

nsm

issio

n [

dB

]

RQ ~ 1.5kW

Measured Filter Freq. CharacteristicsI.L. = 2.43 dB for 0.06% BW

RF Channel Selection

Becomes Possible!


RF Channel-Select Filter BankA1

A2

An

Filter 1

Filter 2

Filter n

Channel-Select

Mechanical FilterControl

Inputs n x m Decoder

1 21 2 m m

vivo

VP

Tra

nsm

issi

on

Freq.

RX

Pow

er

Freq.

Pow

er O

ut

Freq.

1 2 n3 4 5 6 7RF Channels

m = 2n

Switch filters on/off

via application and

removal of dc-bias

VP, controlled by a

decoder


Microfluidic manipulation

• Ming Wu


Optoelectronic Tweezers: Trapping Cells Using Digital Microprojector

P.Y. Chiou, A.T. Ohta, M.C. Wu, Nature, 2005

Digital

Projector

Virtual Electrode

By Illumination on

Photoconductor

Light-Induced

Dielectrophoretic (DEP)

Force


Optoelectronic Tweezers: Trapping Cells Using Digital Microprojector

P.Y. Chiou, A.T. Ohta, M.C. Wu, Nature, 2005

Optical Conveyor Belt

Digital

Projector

Virtual Electrode

By Illumination on

Photoconductor

Light-Induced

Dielectrophoretic (DEP)

Force


Progenitor

Neurons

Differentiated

Neurons

Dopaminergic

NeuronImplant

Culturing

Sorting

Neural Cell Replacement Therapy

for Parkinson’s DiseaseIn collaboration with E. Isocaff, H. Lee, S. Pautot


5s

Digital

Projector

Fluorescent

Excitation

Bright Field

Illumination

CCD

20x

Fluorescenc

e Detection

&

Actuation

Pattern

Generation

Automatic Sorting of Neural Beads

45μm 45μm

• Neuron stained with Calcein

AM dye

• Applied Voltage: 16Vpp, 2MHz


5s

Digital

Projector

Fluorescent

Excitation

Bright Field

Illumination

CCD

20x

Fluorescenc

e Detection

&

Actuation

Pattern

Generation

Automatic Sorting of Neural Beads

45μm 45μm

• Neuron stained with Calcein

AM dye

• Applied Voltage: 16Vpp, 2MHz


COTS DustGOAL:

• Get our feet wet

RESULT:

• Cheap, easy, off-the-shelf RF systems

• Fantastic interest in cheap, easy, RF:

– Industry

– Berkeley Wireless Research Center

– Center for the Built Environment (IUCRC)

– PC Enabled Toys (Intel)

• Fantastic RF problems

• Optical proof of concept

BSAC IAB Spring 2000


Dave Farr, CEO, Emerson, Investor Conference Feb. 2008



Pharmaceutical Process Monitoring - GE


Reliable Performance in Harsh Environments• Steel mills

• Breweries!

• Chemical processing

• Food production

• Urban Pavement

• Rail cars

• Power plants

• Pharmaceutical manufacturing

• Desert fences

• Northern coal facilities

• Oil and gas production & refining

• …

These and other factors conspire to define

the difference between what works in the lab

and what works in the real world!

Successful deployments in over 30 countries on 6 continents.


Classic BSAC/Berkeley Success Story

• Blue sky research

• Long-term vision

• Interdisciplinary teams

• A little competition, a lot of collaboration

• Industrial involvement at every stage

• Broad impact

– >10 Berkeley startups

– International standards

– Industrial consortia

– Academic progeny


BSAC Recent/ Upcoming Research Reviews

Tokyo Dec 10-11 2008

Member Meeting + Open Symposium

Berkeley March 11-13 2009

Spring 2009 IAB (members)+ Workshops

Munich May 27-29, 2009

Summer 2009 (members)+ Open Symposium

http://bsac.berkeley.edu (no “www”)

Berkeley September 2009

Fall 2009 IAB (members)+ Workshops