Brooks Automation - Ideal Vac · Brooks Automation Revision 102 Information provided within this document is subject to change without notice, and although believed to be accurate,

Brooks AutomationCTI-Cryogenics

On-Board Cryopumps Configuration Guide

Revision 102

On-Board CryopumpsConfiguration Guide

Brooks AutomationRevision 102

Information provided within this document is subject to change without notice, and although believed to beaccurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.

AcuLigner, AcuLine, AcuTran, AcuTrav, AeroLoader IV, AeroTrak, ARV 2000, AquaTran, Atmospheric Express,BALI 400 Indexer, BiSymmetrik, ExpressLock, FabExpress, FixLoad, FrogLeg, Gemini, Gemini Express, Gem-ini Express Tandem, Guardian Bare Reticle Stocker, Hercules, Hercules Express, InCooler, InLigner, InLineExpress, Leapfrog, Linear eXchange, MagnaTran 7, MagnaTran 70, MagnaTran 8, MagnaTran X, Marathon,Marathon Express, Marathon Express Tandem, MicroTool, MultiTran, OneFab AMHS, OpenMTS, PASIV, PF-100, PowerPak, Reliance ATR, Reliance DFR, Reliance WCR, SENTRY, TCM, Time Optimal Trajectory, Top-Cooler, TurboStocker, TurboStocker XT, Ultrasort, VacuTran, VCD, VCE, VPE, WAVE, WAVE II, Zaris, Z-Bot,Aquatrap, Conductron, Convectron, Cool Solutions, Cryodyne, Cryogem, Cryogenerator, CryoTiger, Cryo-Torr,CTI-Cryogenics, FastRegen™, GOLDLink, Granville-Phillips, GUTS, Helix, Micro-Ion, Mini-Convectron,Mini-Ion™, On-Board, Polycold, RetroEase, RetroFast, Stabil-Ion, ThinLine™, TrueBlueSM, TurboPlus, and Vac-uum AssuranceSM are trademarks of Brooks Automation Hardware.All other trademarks are properties of their respective owners.

© Brooks Automation 2005, All Rights Reserved. The information included in this manual is Brooks ProprietaryInformation and is provided for the use of Brooks customers only and cannot be used for distribution, reproduc-tion, or sale without the expressed written permission of Brooks Automation. This information may be incorpo-rated into the user’s documentation, however any changes made by the user to this information is theresponsibility of the user.

Brooks Automation15 Elizabeth DriveChelmsford, MA 01824Phone +1 (978) 262-2400Fax +1 (978) 262-2500For emergencies, contact Technical Support +1 (978) 262-2900www.brooks.com

July 12, 2006 Revision 102 8040423, Per ECO #17729; Alison Dann

This manual is available in the following formats: CD, Paper, Cleanroom.

This manual is available in the following languages: English.

This technology is subject to United States export Administration Regulations and authorized to the destinationonly; diversion contrary to U.S. law is prohibited.

Printed in the U.S.A.

On-Board Cryopumps ContentsConfiguration Guide

Brooks Automation 8040423Revision 102 i

Contents

Figures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii

Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v

System Configurations

Single On-Board or Waterpump Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

Cryo-Torr Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

Multiple Cryopump Configurations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

Customer Site Worksheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

Helium Flexlines

Flexline Compatibility. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

Flexline Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3Female Straight Coupling x Female Elbow Coupling . . . . . . . . . . . . . . . . .2-3Female Straight Coupling x Female Straight Coupling . . . . . . . . . . . . . . . .2-3

Helium Fittings

Helium Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2

Helium Cross . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

Helium Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5

Helium Y-Tube Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6

Helium Elbow Assembly 90º . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7

Contents On-Board CryopumpsConfiguration Guide

8040423 Brooks Automationii Revision 102

Helium Right Angle Adapter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8

Cable Assemblies

On-Board Power Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2

On-Board Panel Mount Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

Network Communication Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4

On-Board RS-232 DB9-DB25 Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6

9600 Remote Cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7

On-Board Adapter Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8

Installation Interface Devices

On-Board Splitter Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2

Cryo-Torr 3-Way Power Junction Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

Cryo-Torr Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5

Appendices

Appendix A: Customer Support Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2Customer Support Center Locations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2Guaranteed Up-Time Support (GUTS®) . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2Product Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2E-mail. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2

Appendix B: Compressor Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3

Appendix C: Rough Pump Flow Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6

On-Board Cryopumps FiguresConfiguration Guide

Brooks Automation 8040423Revision 102 iii

Figures

Figure Title Page

1-1 Typical Single On-Board Cryopump or Waterpump Application . . . . . . .1-21-2 Typical Single Cryo-Torr Cryopump Application . . . . . . . . . . . . . . . . . . . .1-31-3 Typical Multiple On-Board Cryopump or Waterpump Application. . . . .1-41-4 Typical Multiple Cryo-Torr Cryopump Application . . . . . . . . . . . . . . . . .1-5

3-1 Examples of Helium Flexline Splitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-33-2 Typical Helium Cross Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-43-3 Typical Helium Coupling Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-53-4 Typical Installation of Helium Y-Tube Assemblies . . . . . . . . . . . . . . . . . . .3-63-5 Typical Helium Elbow Assembly Installation. . . . . . . . . . . . . . . . . . . . . . . .3-73-6 Typical Helium Right Angle Adapter Installation. . . . . . . . . . . . . . . . . . . .3-8

4-1 On-Board Power Cable Diagram Example . . . . . . . . . . . . . . . . . . . . . . . . . .4-24-2 Typical On-Board Panel Mount Power Cable Installations. . . . . . . . . . . . .4-34-3 Network Communication Cable Diagram Example. . . . . . . . . . . . . . . . . . .4-44-4 On-Board Multi-Network Diagram Example . . . . . . . . . . . . . . . . . . . . . . . .4-54-5 RS-232 Cable Diagram Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-64-6 9600 Remote Cable Diagram Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-74-7 On-Board Adapter Cable Diagram Example . . . . . . . . . . . . . . . . . . . . . . . . .4-8

5-1 On-Board Splitter Box Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-35-2 Typical Cryo-Torr 3-Way Power Junction Box Application . . . . . . . . . . . .5-45-3 Typical Cryo-Torr Interface Application . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5

Figures On-Board CryopumpsConfiguration Guide

8040423 Brooks Automationiv Revision 102

On-Board Cryopumps TablesConfiguration Guide

Brooks Automation 8040423Revision 102 v

Tables

Table Title Page

1-1 System Component Sales Order . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

2-1 Maximum Helium Flexline Lengths . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

6-1 Maximum Number of Pumps per Compressor . . . . . . . . . . . . . . . . . . . . . .6-36-2 Water Cooled Compressor Input Power Specifications . . . . . . . . . . . . . . .6-46-3 Compressor Cooling Water Specifications . . . . . . . . . . . . . . . . . . . . . . . . . .6-46-4 Model 8200 Air Cooled Compressor Input Power Specifications . . . . . . .6-56-5 Rough Pump Flow Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6

Tables On-Board CryopumpsConfiguration Guide

8040423 Brooks Automationvi Revision 102


Brooks Automation 8040423Revision 102 1-1

1 System Configurations

Overview

This section describes the single and multiple On-Board Cryopump, Waterpump,TurboPlus Vacuum Pump and Cryo-Torr Cryopump System configurations. Use thissection to determine your customer’s configuration and the components involved.Use the worksheet at the end of this section to help properly configure your cus-tomer’s sales order.

Chapter Contents

Single On-Board or Waterpump Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

Cryo-Torr Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

Multiple Cryopump Configurations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

Customer Site Worksheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

System Configurations On-Board CryopumpsSingle On-Board or Waterpump Configuration Configuration Guide

8040423 Brooks Automation1-2 Revision 102

Single On-Board or Waterpump Configuration

Figure 1-1: Typical Single On-Board Cryopump or Waterpump Application

POWER

HELIUM SUPPLY

On-Board

Cryopump or

HELIUM RETURN

On-Board POWER CABLE8200 Compressor

On-Board Cryopumps System ConfigurationsConfiguration Guide Cryo-Torr Cryopump


Cryo-Torr Cryopump

A single Cryo-Torr Cryopump can be connected to a 8200 Compressor as shown inFigure 1-2.

Figure 1-2: Typical Single Cryo-Torr Cryopump Application

POWER

HELIUM SUPPLY

Cryo-Torr Cryopump

Cryo-Torr POWER CABLE8200 Compressor

HELIUM RETURN

System Configurations On-Board CryopumpsMultiple Cryopump Configurations Configuration Guide


Multiple Cryopump Configurations

The On-Board Splitter Box permits the connection of up to three On-Board Cry-opumps or Waterpumps to one 9600 Compressor as shown in <pdf_link>Figure 1-3.The Network Terminal provides control of up to 20 pumps from a single point andprovides an On-Board System interface to the customer host computer.

Figure 1-3: Typical Multiple On-Board Cryopump or Waterpump Application

The Cryo-Torr Interface permits the connection of up to three Cryo-Torr Cryopumpsto one 9600 Compressor as shown in Figure 1-4.

SUPPLYRETURN

WATER POWER

On-Board Cryopump Power Cables

To Customer Host Computer RS-232 Cable

Network Cable Network Cable

Net

wor

k C

able

9600 Compressor

Install Terminator

Network Terminal

On-Board Cryopump

or Waterpump

On-Board Cryopump

or Waterpump

On-Board Cryopump

or Waterpump

On-Board SplitterBox

On-Board Cryopumps System ConfigurationsConfiguration Guide Multiple Cryopump Configurations


Figure 1-4: Typical Multiple Cryo-Torr Cryopump Application

POWER

Cryo-Torr Cryopump

Cryo-Torr Cryopump

Cryo-Torr Cryopump

User Remote(From Vacuum System)

NOTE: This configuration allows the regeneration of Cryo-Torr Cryopumpsindividually or simultaneously without turning off the compressor.

Cryopump Electrical Input

9600 Remote Cable

System Configurations On-Board CryopumpsCustomer Site Worksheet Configuration Guide


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2 Helium Flexlines

Overview

This section describes the helium Flexline ordering information.

Chapter Contents

Flexline Compatibility. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

Flexline Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

Helium Flexlines On-Board CryopumpsFlexline Compatibility Configuration Guide


Flexline Compatibility

Table 2-1 provides maximum flexline lengths and diameters for various Cryopumpand Compressor configurations.

NOTE: Be sure to follow the guidelines in Table 2-1 to avoid system performance issues.

NOTE: Table 2-1 can only be used for compressor applications that do not use a heliummanifold. This table must not be used when compressors are connected to a heliummanifold. Contact CTI-CRYOGENICS engineering for proper flexline configura-tion

Table 2-1: Maximum Helium Flexline Lengths

System Configuration 1/2 inch ID Flexline Length

3/4 inch ID Flexline Length

Single: On-Board 4, On-Board 8, On-Board 250, Cryo-Torr 8 or Cryo-Torr 250 Cry-opump or On-Board Waterpump (350 refrigerator) connected to a 8200, 8510, 9600 or 9700 Compressor.

250 feet maximum

500 feet maximum

Multiple: On-Board 4, On-Board 8, On-Board 250, Cryo-Torr 8, Cryo-Torr 250 or On-Board Waterpump (350 & 1050 refrig-erator) connected to a 8510, 9600 or 9700 Compressor.

40 feet maximum

300 feet maximum

Single: On-Board 10, On-Board 400, Cryo-Torr 10, Cryo-Torr 400 On-Board Water-pump (1050 refrigerator) connected to a 8510, 9600 or 9700 Compressor.

60 feet maximum 400 feet maximum

On-Board Cryopumps Helium FlexlinesConfiguration Guide Flexline Description


Flexline Description

The information on the following pages provide a description of the most commonlyused helium Flexlines.

Female Straight Coupling x Female Elbow Coupling

Female Straight Coupling x Female Straight Coupling

Part Number Diameter (ID) Overall Length

8043074GXXX 1/2 inchOrder from 1 to 80 feet

8043081GXXX 3/4 inch

NOTE: Lengths are available in 1 foot increments up to a maximumof 80 feet. Measurements are expressed in inches.

Example: Standard stocked lengths are: G120 = 10 ft.G240 = 20 ft.

Part Number Diameter (ID) Overall Length

8043075GXXX 1/2 inchOrder from 1 to 80 feet

8043085GXXX 3/4 inch

NOTE: Lengths are available in 1 foot increments up to a maximumof 80 feet. Measurements are expressed in inches.

Example: Standard stocked lengths are: G120 = 10 ft.G240 = 20 ft.

OV

ER

ALL

LE

NG

TH

OV

ER

ALL

LE

NG

TH

OV

ER

ALL

LE

NG

TH

Helium Flexlines On-Board CryopumpsFlexline Description Configuration Guide


This Page Intentionally Left Blank



3 Helium Fittings

Overview

This section describes the most commonly used helium flexline fittings; tees, crosses,elbows, Y-tubes, and couplings.

Chapter Contents

Helium Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2

Helium Cross . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

Helium Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5

Helium Y-Tube Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6

Helium Elbow Assembly 90º . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7

Helium Right Angle Adapter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8

Helium Fittings On-Board CryopumpsHelium Tee Configuration Guide


Helium Tee

A helium tee is used to interconnect supply and return flexlines between compressorsand On-Board or Cryo-Torr Cryopumps.

Part Number A B CD

(inches)

3918059G001 Male Female Male 4 1/8

3918059G003 Male Male Male 3 3/4

3918059G009 Male Female Male 3 1/4

NOTE: Helium tee P/N 3918059G001 is used forsplitting helium flexlines at the compressor.Helium tee P/N 3918059G003 is used forsplitting helium flexlines in-line. Refer toFigure 3-1 for examples of splitting heliumflexlines with a helium tee.

NOTE: These helium tees connect to both 1/2 inchand 3/4 inch helium flexlines.

P/N 3918059G001

A

D

B

C

P/N 3918059G003

A

D

B

C

P/N 3918059G009

A

D

B

C

On-Board Cryopumps Helium FittingsConfiguration Guide Helium Tee


Figure 3-1: Examples of Helium Flexline Splitting

NOTE: To provide equal distribution of helium, try to use approximately equal lengthhelium flexlines.

Tee P/N 3918059G001

Tee P/N 3918059G003

Splitting Helium Flexlines At The Compressor

In-Line Splitting of Helium Flexlines

Helium Fittings On-Board CryopumpsHelium Cross Configuration Guide


Helium Cross

A helium Cross is used to interconnect supply and return flexlines between compres-sors and On-Board Cryopumps.

Figure 3-2: Typical Helium Cross Application

NOTE: To provide equal distribution of helium, try to use approximately equal lengthhelium flexlines.

Part Number A B C D

8096080G001 Male Male Male Female

8096080G002 Male Male Male Male

NOTE: This helium cross connects to both 1/2 inchand 3/4 inch helium flexlines.

A

B

C

D

8096080G002

Helium Cross

On-Board Cryopumps Helium FittingsConfiguration Guide Helium Coupling


Helium Coupling

A helium coupling is used to interconnect helium flexlines so a longer flexline can becreated, or a flexline can be secured to a metal panel.

Figure 3-3: Typical Helium Coupling Applications

Part Number A B C

8031135 Male Male 3.06

NOTE: For bulkhead installations, amounting hole of 1.06 inches isrequired to install the heliumcoupling.

A

BNOTE: Measurements are in inches.

Coupling Application

Bulkhead Application

Metal Panel (Bulkhead)

Helium Fittings On-Board CryopumpsHelium Y-Tube Assembly Configuration Guide


Helium Y-Tube Assembly

A helium Y-Tube Assembly is used to interconnect supply and return flexlinesbetween compressors and On-Board and Cryo-Torr Cryopumps.

NOTE: A helium Y-Tube P/N 8039814G001, and 8039805G001 and 8039805G002 areused for splitting helium flexlines in-line.

Figure 3-4: Typical Installation of Helium Y-Tube Assemblies

Part Number A B CD

(inches)

8039805G001 Male Male Male 2.97

8039805G002 Female Male Male 3.23

A B

C

D

8039814G001

D

8039805G001/G002

8039805G002 Shown

On-Board Cryopumps Helium FittingsConfiguration Guide Helium Elbow Assembly 90º


Helium Elbow Assembly 90º

A helium elbow assembly is used to interconnect supply and return flexlines betweencompressors and On-Board and Cryo-Torr Cryopumps.

Figure 3-5: Typical Helium Elbow Assembly Installation

Part Number A B CD

(inches)

8039913G001 Female Male 4.00 4.25

A

B

D

E

Helium Fittings On-Board CryopumpsHelium Right Angle Adapter Configuration Guide


Helium Right Angle Adapter

A helium right angle adapter is used to interconnect supply and return flexlinesbetween compressors and On-Board and Cryo-Torr Cryopumps.

Figure 3-6: Typical Helium Right Angle Adapter Installation

Part Number A B CD

(inches)

8039717G001 Female Male 2.26 2.77

A

B

C

D



4 Cable Assemblies

Overview

Cable Assemblies are used to provide power to On-Board Modules, provide networkcommunication, data communication between customer host computers and NetLinkchassis, and remote power control between compressors and customer vacuum sys-tems. Each of these cable assemblies are discussed within the section.

Chapter Contents

On-Board Power Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2

On-Board Panel Mount Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

Network Communication Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4

On-Board RS-232 DB9-DB25 Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6

9600 Remote Cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7

On-Board Adapter Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8

Cable Assemblies On-Board CryopumpsOn-Board Power Cables Configuration Guide


On-Board Power Cables

On-Board Power Cables connect between the POWER connector on a compressor, fre-quency converter, or three phase motor controller.e

Figure 4-1: On-Board Power Cable Diagram Example

Part Number Overall Length

8112463GXXX Order from 1 to 99 feet

NOTE: Lengths are available in 1 foot increments up to a max-imum of 99 feet.

Example G100 = 10 feet.


NOTE: Lengths are available in 1 foot increments from 100 feet to a maximum of 200 feet.

NOTE: All On-Board Cryopump Power Cables in this diagram are part number 8112463GXXX.

POWER

On-Board Cryopump Power Cables

9600 CompressorOn-BoardCryopump

orWaterpump

On-BoardCryopump

orWaterpump

On-BoardCryopump

orWaterpump

On-Board SplitterBox

On-Board Cryopumps Cable AssembliesConfiguration Guide On-Board Panel Mount Power Cable


On-Board Panel Mount Power Cable

The On-Board panel mount power cable is used to interconnect cryopumps and com-pressors through a wall or other partition within a customer’s tool.

Figure 4-2: Typical On-Board Panel Mount Power Cable Installations




NOTE: Lengths are available in 1 foot increments up to a maximum of 99 feet.

Example G100 = 10 feet.

Panel

A A

B B

8132060GXXX 8112463GXXX

8112463GXXX 8112464GXXX

NOTE: The overall length of an On-Board Power Cable cannot exceed 100 feet.

Cable Assemblies On-Board CryopumpsNetwork Communication Cable Configuration Guide


Network Communication Cable

Network Communication Cables are used to provide network communicationbetween On-Board Cryopumps or Waterpumps and Network Terminals.

Figure 4-3: Network Communication Cable Diagram Example



NOTE: NOTE: Lengths are available in one foot increments up to a maximum of 999 feet.

Example: Standard stocked lengths are: G010 = 10 ft. G020 = 20 ft.

Network Terminal

Network Communication Cable

Terminator Plug

NOTE: A terminator plug must be installed in the last On-Board Module net-work connector as shown to ensure proper data communication throughout the network.

RS-232

On-BoardCryopumps

or Waterpumps

P/N 8112545G001

RS-232

On-Board Cryopumps Cable AssembliesConfiguration Guide Network Communication Cable


Figure 4-4: On-Board Multi-Network Diagram Example

<< <<

<< <<

<< <<

Customer Host Computer

Network Terminal P/N 8113181GXXX connected to On-Board Cryopumps.

RS-232

<< <<

<< <<

<< <<

Network Cable

ON-BOARD®

Network TerminalON-BOARD®

Network Terminal

Terminator

TOOL #2TOOL #1

Network Terminal P/N 8113181GXXX connected to On-Board Cryopumps.

Cable Assemblies On-Board CryopumpsOn-Board RS-232 DB9-DB25 Cable Configuration Guide


On-Board RS-232 DB9-DB25 Cable

The On-Board RS-232 DB9-DB25 Cable provides data communication between theserial port (9 or 25 pin) on the customer’s Personal Computer and a CTI-Cryogenicsproduct.

Figure 4-5: RS-232 Cable Diagram Examples

Part Number PC Connector

8115174GXXX 25 pin

8039664GXXX 9 pin

NOTE: For 8115174GXXX, Lengths are available in one foot increments up to a maximum of 40 feet.

Example: G010 = 1 ft.

NOTE: For 8039664GXXX, Lengths are available in one foot increments up to a maximum of 99 feet.

Example: Standard stocked lengths are:G010 = 10 ft. G020 = 20 ft.

8115174GXXX

DB-9

DB-25

8039664GXXX

To the PC

To the On-Board Product

DB-9

DB-9

Customer Host Computer NetLink

P/N 8115096G001 connected to Network Terminals

RS-232

Customer Host Computer

Network TerminalP/N 8113181GXXX

RS-232ON-BOARD®

Network Terminal

On-Board Cryopumps Cable AssembliesConfiguration Guide 9600 Remote Cable


9600 Remote Cable

The 9600 Remote cable connects to the remote connector on the 9600 Compressor andthe Cryo-Torr Interface as shown in Figure 4-6. The cable provides the signal to turnthe compressor ON or OFF when the customer’s vacuum system sends the appropri-ate signal.

Figure 4-6: 9600 Remote Cable Diagram Example


8135193GXXX9600 LV

Order from 1 to 99 feet

8135243GXXX9600 HV

Order from 1 to 99 feet

NOTE: Lengths are available in one foot increments up to a maximum of 99 feet.


8135193GXXX 8135243GXXX

2 Pin 2 Pin

2 Pin 19 Pin

9600 LV 9600 HV

Connector Connector

ConnectorConnector

Cryo-TorrInterface

POWER


User Remote(from vacuum system)

9600 Remote Cable

Cryo-Torr Cryo-TorrCryo-Torr

Cable Assemblies On-Board CryopumpsOn-Board Adapter Cable Configuration Guide


On-Board Adapter Cable

The On-Board Adapter cable provides power to a Cryo-Torr Cryopump from anOn-Board CTI-Cryogenics compressor or other On-Board device.

Figure 4-7: On-Board Adapter Cable Diagram Example



NOTE: Lengths are available in ten foot increments up to a maximum of 150 feet.


10 Pin

3 Pin

Connector

Connector

POWER

Cryo-Torr



5 Installation Interface Devices

Overview

Section 5 provides information on three installation interface devices; the On-BoardSplitter Box, Cryo-Torr 3-Way Power Junction Box, and the Cryo-Torr Interface.These devices allow multiple respective cryopumps to be connected to a compressoras shown in Figures 5-1, 5-2, and 5-3.

Chapter Contents

Installation Interface Devices On-Board CryopumpsOn-Board Splitter Box Configuration Guide


On-Board Splitter Box

NOTE: The 8135240G002 On-Board Splitter Box mounts to the rear of the compressor asshown in Figure 5-1. This configuration allows a customer with an 8510 Compres-sor to upgrade to a 9600 Compressor.

Part Number

8135240G001

8135240G002

8135240G0018135240G002

On-Board Cryopumps Installation Interface DevicesConfiguration Guide On-Board Splitter Box


Figure 5-1: On-Board Splitter Box Applications

NOTE: All On-Board Cryopump Power Cables inthis diagram are P/N 8112463GXXX

POWER

9600 CompressorOn-Board Cryopump

or Waterpump

On-Board Cryopump

or Waterpump

On-Board Cryopump

or Waterpump

On-Board Splitter Box P/N 8135240G001

POWER

On-Board Power Cables

On-Board Splitter Box P/N 8135240G002

Installation Interface Devices On-Board CryopumpsCryo-Torr 3-Way Power Junction Box Configuration Guide


Cryo-Torr 3-Way Power Junction Box

Figure 5-2: Typical Cryo-Torr 3-Way Power Junction Box Application

Part Number

8112444G002

POWER

Cryo-Torr Cryopump

Cryo-Torr Cryopump

Cryo-Torr Cryopump

NOTE: Power Cables from the junction box to the Cryopumps are P/N 8112212GXXX.

8112463GXXX

NOTE: This is not the preferred installation because the compressor must be turned OFF in orderto regenerate the Cryo-Torr Cryopumps.

On-Board Cryopumps Installation Interface DevicesConfiguration Guide Cryo-Torr Interface


Cryo-Torr Interface

Figure 5-3: Typical Cryo-Torr Interface Application

Part Number

8135903G001

8.00(230mm)

3.38

4.93

6.88 (175mm)

4.74 (120mm)

9.01 MAX (229mm)

POWER


User Remote(from vacuum system)

9600 Remote Cable

Cryo-Torr Cryopump

Cryo-Torr Cryopump

Cryo-Torr Cryopump

Installation Interface Devices On-Board CryopumpsCryo-Torr Interface Configuration Guide




6 Appendices

Overview

The following appendices are included to provide the user with a single location forspecific information related to the Brooks Automation Product.

Contents

Appendix A: Customer Support Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2

Appendix B: Compressor Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3

Appendix C: Rough Pump Flow Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6

Appendices On-Board CryopumpsAppendix A: Customer Support Information Configuration Guide


Appendix A: Customer Support Information

Customer Support Center Locations

To locate a Customer Support Center near you, please visit our websitewww.brooks.com on the world wide web and select CONTACT on the home page.

Guaranteed Up-Time Support (GUTS®)

For 24-hour, 7-day per week Guaranteed Up-Time Support (GUTS) dial:

1 800-367-4887 - Inside the United States of America

+1 508-337-5599 - Outside the United States of America

Product Information

Please have the following information available when calling so that we may assistyou:

• Product Part Number

• Product Serial Number

• Product Application

• Specific Problem Area

• Hours of Operation

• Equipment Type

• Vacuum System Brand/Model/Date of Manufacture

E-mail

For your convenience, you may also e-mail us at:

[email protected]

On-Board Cryopumps AppendicesConfiguration Guide Appendix B: Compressor Specifications


Appendix B: Compressor Specifications

Table 6-1: Maximum Number of Pumps per Compressor

# of Pumps Pump Configuration Compressor

One On-Board 4, On-Board 8, Cryo-Torr 8 Cryopump, On-Board Waterpump/TurboPlus Vacuum Pump (350 refrigerator)

8200

One On-Board Waterpump (1050 refrigerator) 8200 (3 phase only)

One On-Board 10, On-Board 400, Cryo-Torr 10, Cryo-Torr 400 Cryopump

8510

One On-Board 10, On-Board 400, Cryo-Torr 10, Cryo-Torr 400 Cryopumps

9600

One* On-Board 400, Cryo-Torr 400 9700

Two On-Board 250, Cryo-Torr 250 Cryopumps 9600

Two On-Board Waterpumps , TurboPlus Vacuum Pumps (350 refrigerator)

8200 (3 phase only)

Two On-Board 4, On-Board 8, On-Board 250, Cryo-Torr 8, Cryo-Torr 250 Cryoumps, On-Board Waterpumps (1050 refrigerator)

8510

Two On-Board 10, Cryo-Torr 10, or one On-Board 10 and one On-Board 8 Cryopump.

9700

Three On-Board Waterpumps or TurboPlus Vacuum Pumps (350 refrigerator)

8510

Three On-Board 4, On-Board 8, Cryo-Torr 8 Cryopumps, On-Board Waterpump (350 or 1050 refrigerator)

9600

Three On-Board In-Situ 1050 Waterpumps or one On-Board 10 and two On-Board 4 Cryopumps (350 refrigerator)

9700

Six On-Board LowProfile Waterpumps, One On-Board InSitu Waterpumps, or TurboPlus Vacuum Pumps (350 refrigerator)

9700

NOTE: All multi-pump configurations require selection of appropriate interconnectiondevices.

* For Implanter Applications Only.

Appendices On-Board CryopumpsAppendix B: Compressor Specifications Configuration Guide


Table 6-2: Water Cooled Compressor Input Power Specifications

P/N CompressorModel

Voltage(VAC)

Frequency(Hz) Phase Power

(KW)

Customer Circuit Breaker (amps)

8032550G001 8200 180-250 50/60 3 2.0 15

8032550G002 8200 180-250 50/60 1 2.0 15

8031315 8510 198-250 190-230

60 50 3 5.75 30

8031400G002 8510 395-506 342-457

6050 3 5.75 20

8135900G001 9600 180-253 50/60 3 5.5 30

8135901G001 9600 342-506 342-457 60/50 3 5.5 30

8135910G001 9700 200-230 200-230

6050 3 5.5 30

Table 6-3: Compressor Cooling Water Specifications

P/N Compressor Model

Temperature Max/Min ºF

Flow Rate GPM @ 70º F

Pressure Drop PSID

8032550G001 8200 100/40 0.5 2.5

8032550G002 8200 100/40 0.5 2.5

8031315 8510 100/40 2.5 14

8031400G002 8510 100/40 2.5 14

8135900G001 9600 90/50 (inlet) 2.75 6.5

8135910G001 9700 90/50 (Inlet) 3.0 See 9700 Manual

NOTE: Flowing cooling water colder than 50º F through a non-running compressorcan cause start-up problems.

On-Board Cryopumps AppendicesConfiguration Guide Appendix B: Compressor Specifications


Table 6-4: Model 8200 Air Cooled Compressor Input Power Specifications

P/N Voltage (VAC)

Frequency (Hz) Phase Power

(KW)

Customer Circuit Breaker (amps)

Room Temp. Max/

Min ºF

8032549G001 180-250 50/60 3 2.0 15 100/50

8032549G002 180-250 50/60 1 2.0 15 100/50

Appendices On-Board CryopumpsAppendix C: Rough Pump Flow Specifications Configuration Guide


Appendix C: Rough Pump Flow Specifications

Table B-1 provides the minimum rough pump cubic feet per minute (cfm) ratingrequired for performing FastRegen cycles on On-Board Cryopumps.

NOTE: If the vacuum conductance is unknown, select the next largest rough pumpingspeed. Regeneration cycle (Fast and Full) time is minimized with a larger roughpump.

Table 6-5: Rough Pump Flow Data

On-Board Cryopump

Minimum Rough Pump Flow (cfm)

On-Board 4 10

On-Board 8, 8F 10

On-Board 250 17 - 20

On-Board 10, 10F 17 - 20

On-Board 400 35 - 50

Documents

Brooks Automation - Ideal Vac · Brooks Automation Revision 102 Information provided within this document is subject to change without notice, and although believed to be accurate,