Bienroder Weg 54 E 38108 Braunschweig …tccc.iesl.forth.gr/visit27-3-06/German_pres/IST-FhG.pdf · Bienroder Weg 54 E 38108 Braunschweig ... HistoryHistoryof Fraunhofer IST of Fraunhofer

Dipl.-Ing. Holger Lüthje

Fraunhofer Institute Surface Engineering and Thin Films

Bienroder Weg 54 E38108 Braunschweig

www.ist.fraunhofer.de


ResearcherResearcherResearcherResearcherDiscoverer of the Fraunhofer-Lines in the solar spectrum

InventorInventorInventorInventorNew methods of working glass

EntrepreneurEntrepreneurEntrepreneurEntrepreneurDirector of a glassworks

Joseph von Fraunhofer (1787 Joseph von Fraunhofer (1787 Joseph von Fraunhofer (1787 Joseph von Fraunhofer (1787 –––– 1826) 1826) 1826) 1826)


30 % Private research contracts

36 % Public funded research projects

34 % Basic funding

TheTheTheThe FraunhoferFraunhoferFraunhoferFraunhofer----GesellschaftGesellschaftGesellschaftGesellschaft

FoundationFoundationFoundationFoundation

1949 as a non-profit organization with mandate forpromote applied research

StaffStaffStaffStaffApprox. 12.500, primarily scientists and engineers

58 Research 58 Research 58 Research 58 Research facilitiesfacilitiesfacilitiesfacilities

BudgetBudgetBudgetBudgetApprox. 1.031 billion € (2004)


HistoryHistoryHistoryHistory of Fraunhofer ISTof Fraunhofer ISTof Fraunhofer ISTof Fraunhofer IST

1988198819881988 Discussion of location (Lower Saxony/Bavaria/Bremen)

1989198919891989 Senate‘s Decision for Braunschweig as location

1990199019901990 Establishment in former Philips Research Laboratory in Hamburg; director of IST is Prof. Dr. Heinz Dimigen

1992199219921992 Begin of building project in Braunschweig

1994199419941994 Relocation of IST from Hamburg to Braunschweig

1999199919991999 New director is Prof. Dr. Günter Bräuer, formerly Leybold AG; in personal union director of Fraunhofer FEP

2003200320032003 Prof. Bräuer becomes head of the Institute for SurfaceTechnology (IOT) of the TU Braunschweig; Prof. Dr. Klages is appointed as Professor at IOT

2005200520052005 Extension of the IST‘s building projected, start of construction2006, completion 2008



• We offer to our customers innovative and tailored solutionssolutionssolutionssolutions in the field of surfaceengineering and thin films.

• In order to realize such solutions we use a wide spectrum of low and atmosphericpressure plasmas as well as electroplating technology.

• The object of our efforts is to become the leading research partner for our national national national national andandandand international international international international customerscustomerscustomerscustomers.

OurOurOurOur MissionMissionMissionMission


Transfer CenterTribology

DiamondTechnology

Large AreaCoatings

AtmosphericPressure Processes

New TribologicalCoatings

Optical and EletricalCoatings

Analysis andQuality Control

DortmunderOberflächenCentrum

Magnetron Sputtering

Hollow Cathode Processes

Galvano Technology

Dr. J. Brand Dr. L. Schäfer Dr. B. Szyszka

Dr. B. Szyszka

Prof. Dr. C.-P. Klages

Dr. M. Thomas

Dr. K. Bewilogua Dr. M. Vergöhl

Dr. M. Vergöhl

Dr. P. Willich

Dipl.-Ing. H. Paschke

Microtechnologyand Sensors

Dipl.-Ing. H. Lüthje

Dr. T. Jung

Dr. A. Dietz

Atmospheric PressurePlasma Processes

Marketing andCommunication Management

Director Prof. Dr. G. Bräuer

Deputy

Secretariat

Dipl.-Ing. W. Diehl

M. GeertsemaDr. S. Kondruweit Dipl.-Volkswirt U. Kampfer

Coating and ProcessDevelopment


Staff membersStaff membersStaff membersStaff members

Employees 77

thereof PhD students 4

Students 35

BudgetBudgetBudgetBudget 7.9 Mio €

Financing of contract researchFinancing of contract researchFinancing of contract researchFinancing of contract research

Basic funds 18 %

Internal programs 15 %

Public project financing 28 %

Contract financing industry 39 %

Personal and Budget Personal and Budget Personal and Budget Personal and Budget DataDataDataData 2004200420042004



Mechanical and Automotive Engineering

Tools

Energy, Glass and Facade

Optics, Information and Communication

Life Science and Ecology

Business Fields of Fraunhofer ISTBusiness Fields of Fraunhofer ISTBusiness Fields of Fraunhofer ISTBusiness Fields of Fraunhofer IST



Automotive and motor components

Driving and bearing components

Light construction

Sealing technology

General mechanical engineering

Business Business Business Business FieldFieldFieldField »»»»Mechanical and Automotive EngineeringMechanical and Automotive EngineeringMechanical and Automotive EngineeringMechanical and Automotive Engineering««««



Cutting tools

Blanking tools

Tools for chipless removal

Forming tools and dies

Molds and sintering tools

Business Business Business Business FieldFieldFieldField »»»»ToolsToolsToolsTools««««



Thin film solar cells

Glass protection

Automotive glazing

Architectural glass

Coating of steel strip

Business Business Business Business FieldFieldFieldField »»»»Energy, Glass and FacadeEnergy, Glass and FacadeEnergy, Glass and FacadeEnergy, Glass and Facade««««



Optical filters

Display technology

Storage media

Electronic devices

Decorative elements

Business Business Business Business FieldFieldFieldField »»»»Optics, Information and CommunicationOptics, Information and CommunicationOptics, Information and CommunicationOptics, Information and Communication««««



Bioanalytic and diagnostic

Medical technology

Food technology

Water purification and treatment

Household

Business Business Business Business FieldFieldFieldField »»»»Life Science and EcologyLife Science and EcologyLife Science and EcologyLife Science and Ecology««««



Atmospheric pressure processesAtmospheric pressure processesAtmospheric pressure processesAtmospheric pressure processes

• Electroplated multi-component systems

• Electrochemistry

• Atmospheric pressure plasma processes

Low pressure processesLow pressure processesLow pressure processesLow pressure processes

• Hollow cathode processes

• PACVD and hot filament CVD processes

• Magnetron sputtering

CompetenceCompetenceCompetenceCompetence FieldsFieldsFieldsFields


Friction reduction and wear protectionFriction reduction and wear protectionFriction reduction and wear protectionFriction reduction and wear protection

• Diamond-like carbon coatings (DLC)

• Hard coatings

• Plasma diffusion

• Dry lubricants

Corrosion protectionCorrosion protectionCorrosion protectionCorrosion protection

SuperSuperSuperSuper----hard coatingshard coatingshard coatingshard coatings

• Diamond

• Cubic boron nitride (c-BN)


Competence FieldsCompetence FieldsCompetence FieldsCompetence Fields



Electrical and optical coatingsElectrical and optical coatingsElectrical and optical coatingsElectrical and optical coatings

• Optical coatings

• Transparent conductive coatings

• Diamond electrodes

Micro and Micro and Micro and Micro and nanonanonanonano technologytechnologytechnologytechnology

• Functionalizing of interfacial layers

• Micro and sensor technology

• Nano composit coatings

Coatings on plasticsCoatings on plasticsCoatings on plasticsCoatings on plastics

Analysis and TestingAnalysis and TestingAnalysis and TestingAnalysis and Testing

CompetenceCompetenceCompetenceCompetence FieldsFieldsFieldsFields


SurfaceSurfaceSurfaceSurface PretreatmentPretreatmentPretreatmentPretreatment

ThinThinThinThin Film Film Film Film DevelopmentDevelopmentDevelopmentDevelopment

ProcessProcessProcessProcess Technology Technology Technology Technology (Diagnostics,

Modelling, Control)

SurfaceSurfaceSurfaceSurface Analysis and Analysis and Analysis and Analysis and ThinThinThinThin Film Film Film Film

CharacterizationCharacterizationCharacterizationCharacterization

Services of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer IST



TrainingTrainingTrainingTraining

ApplicationApplicationApplicationApplication OrientedOrientedOrientedOrientedFilm Design and Film Design and Film Design and Film Design and

ModellingModellingModellingModelling

System DesignSystem DesignSystem DesignSystem Design

Technology TransferTechnology TransferTechnology TransferTechnology Transfer

Services of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer IST

142.3

136.3

130.4

124.4

118.5

112.5

106.6

100.7

94.7

88.8

82.8

Argon-

Einlass

Turbo-Pumpen

Argon-Druck [mPa]


MEMSMEMSMEMSMEMS

Smart CoatingsSmart CoatingsSmart CoatingsSmart Coatings

3333----D D D D MikroMikroMikroMikro----StrukturierungStrukturierungStrukturierungStrukturierungSensorenSensorenSensorenSensoren

TribologieTribologieTribologieTribologieSchichttechnikSchichttechnikSchichttechnikSchichttechnik

Mikro-Systemtechnik

MultifunctionelMultifunctionelMultifunctionelMultifunctionel SurfacesSurfacesSurfacesSurfaces : Smart : Smart : Smart : Smart CoatingsCoatingsCoatingsCoatings


Thin film system for smart coatings

1. Wear resistant sensor / insulator layer

2. Thin film electrodes / sensor and micro structuring:

3. Tribology optimized insulator

4. (Functional wear resistant coating)

Smart Surfaces : Multifunctionel Sensorintegrated Surfaces


Intelligenter Drehmeißel

Temperatur-und

Verschleißmessung auf der Spanfläche

( Kolkbereich)


Temperaturmessung (Beginn des Temperaturmessung (Beginn des Temperaturmessung (Beginn des Temperaturmessung (Beginn des ZerspanensZerspanensZerspanensZerspanens))))

Ansteigende Flanke

0

100

200

300

400

500

600

700

2,1 2,2 2,3 2,4 2,5 2,6 2,7

Zeit in Sekunden

Tinnen in °C Taußen in °C

Temperaturanstieg innerhalb ca. 30 msec auf etwa 600 °C.Es sind Temperaturgradienten bis zu 1000 °C/mm möglich.(2. Sensor liegt 350 µm entfernt)


InsertsInsertsInsertsInserts withwithwithwith wearwearwearwear sensorssensorssensorssensors at flank at flank at flank at flank sidessidessidessides


Charakteristic Signals for Flank Sensors


Standweg für sensorbeschichtete HM-WSP; CK45: f=0,2mm; Schnitttiefe ap=1,3mm; Vc=250 /min

0,000

0,050

0,100

0,150

0,200

0,250

0,00

010

0000

0,00

020

0000

0,00

030

0000

0,00

040

0000

0,00

050

0000

0,00

060

0000

0,00

070

0000

0,00

080

0000

0,00

0

Standweg [mm]

VB

[m

m]


Amorphous Carbon Coatings –DLC-a:CH-X

DLC (or a-C:H)- high wear resistance- high hardness

Me-DLC (or Me-C:H)- low friction- better adhesion- electrical conductivity

a-C:H:Si:O- transparancy- scratch resistance- decoration- UV protection

+ Si+ Si+ Si+ Si

a-C:H:Si- minimum friction- heat resistance + metal+ metal+ metal+ metal

a-C:H:F- surface energy ↓↑- wettability- Low adhesion

ta-C, CNx

- high hardness, low wear- Low roughness

ArcArcArcArc, , , , sputteringsputteringsputteringsputtering

CVD-Diamond

- maximum wear resistance

- maximum hardness

Modification

CarbonCarbonCarbonCarbon

Based Coatings

hydrocarbonshydrocarbonshydrocarbonshydrocarbons

+ Si,O+ Si,O+ Si,O+ Si,O

+ F,Si,O,N,B+ F,Si,O,N,B+ F,Si,O,N,B+ F,Si,O,N,B

∆∆∆∆ T + T + T + T + hydrogenhydrogenhydrogenhydrogen

of

Sensoric properties ?


PrinziplePrinziplePrinziplePrinziple of force measurement by use of DLC filmsof force measurement by use of DLC filmsof force measurement by use of DLC filmsof force measurement by use of DLC films

Steel

Force

Carbon sensor

2,1

2,2

2,3

2,4

2,5

2,6

2,7

2,8

2,9

3

3,1

3,2

3,3

3,4

3,5

3,6

15 25 35 45 55 65 75 85 95 105 115 125 135 145 155 165 175 185

Kraft [N]

Widerstand [MOhm]

1. Zyklus

2. Zyklus

Effective variation of theelectrical resistivity vs. load


∆R / R / R / R / ∆F F F F SensitivitySensitivitySensitivitySensitivity of of of of a:CHa:CHa:CHa:CH filmsfilmsfilmsfilms

1

10

100

1000

10000

100000

Em

pfin

dlic

hkei

t [O

hm/N

]

Maxima Mittelwert +Standardabweichung Minima

200V 350V 500V 650V 800V

Crossection

surface

Crossection


1. Unterlegscheibe mit DiaForce®-Beschichtung

2. Zentrisch wird eine mit Laser geschnittene Metallfolienelektrode zwischen zwei beschichtete Unterlegscheiben gelegt.

3. Dieser Aufbau wird durch eine Klebung fixiert.

Intelligente UnterlegscheibeIntelligente UnterlegscheibeIntelligente UnterlegscheibeIntelligente Unterlegscheibe

LoadLoadLoadLoad Sensors Sensors Sensors Sensors designeddesigneddesigneddesigned as as as as WasherWasherWasherWasher


LoadLoadLoadLoad Sensor Sensor Sensor Sensor withwithwithwith DiaForceDiaForceDiaForceDiaForce CoatingsCoatingsCoatingsCoatings

U=5V

Kraftmessdose

Substrattisch

Unterlegscheiben

mit DiaForce®-Sensorik

Stempel

TestaufbauTestaufbauTestaufbauTestaufbau


Force Sensor Force Sensor Force Sensor Force Sensor

1,00E+06

2,00E+06

3,00E+06

4,00E+06

5,00E+06

6,00E+06

7,00E+06

0 200 400 600 800 1000 1200 1400

Kraft [N]

Widerstand [Ohm]

1. Belastung

1. Entlastung

2. Belastung

2. Entlastung

3. Belastung

3. Entlastung

Vollflächige belastungs-abhängige Widerstands-messung an zwei mit 6 µm DiaForce

beschichteten U-Scheiben mit Stahlfolienelektrode.


Mit Laser wird die Mit Laser wird die Mit Laser wird die Mit Laser wird die strukturierte Folie strukturierte Folie strukturierte Folie strukturierte Folie ausgeschnitten.ausgeschnitten.ausgeschnitten.ausgeschnitten.

Kunststofffolie mit Elektroden Kunststofffolie mit Elektroden Kunststofffolie mit Elektroden Kunststofffolie mit Elektroden und Temperatursensor.und Temperatursensor.und Temperatursensor.und Temperatursensor.

Intelligente Unterlegscheibe zur Intelligente Unterlegscheibe zur Intelligente Unterlegscheibe zur Intelligente Unterlegscheibe zur KraftKraftKraftKraft---- und Temperaturmessung in und Temperaturmessung in und Temperaturmessung in und Temperaturmessung in Schraubverbindungen.Schraubverbindungen.Schraubverbindungen.Schraubverbindungen.

Force Sensor Force Sensor Force Sensor Force Sensor


TemperaturemeasurementTemperaturemeasurementTemperaturemeasurementTemperaturemeasurement

α=∆R/(R* ∆T)

α=7,8*10-4K-1

∆R/ ∆T=1,67 Ω/K

Charakteristik des Chrom-Temperatur-mäanders:

y = 1,6651x + 2133,2

2160

2180

2200

2220

2240

2260

2280

2300

25 35 45 55 65 75 85 95

Temperatur [°C]

Widerstand [Ohm]


Local DiaForce®-Sensor for Determination of the Load Distribution

88000880008800088000

88500885008850088500

89000890008900089000

89500895008950089500

90000900009000090000

90500905009050090500

91000910009100091000

91500915009150091500

92000920009200092000

92500925009250092500

93000930009300093000

93500935009350093500

94000940009400094000

0000 100100100100 200200200200 300300300300 400400400400 500500500500 600600600600 700700700700 800800800800 900900900900 1000100010001000 1100110011001100

Kraft [N]Kraft [N]Kraft [N]Kraft [N]

Widerstand [

Widerstand [

Widerstand [

Widerstand [ ΩΩ ΩΩ]] ]]

1. Belastung1. Belastung1. Belastung1. Belastung

1. Entlastung1. Entlastung1. Entlastung1. Entlastung






Dynamische Charakterisierung der piezoresistiven Eigenschaft von F-DLC mit dem Alternating Force Tester

37

38

39

40

41

42

43

44

45

46

47

48

0 0,01 0,02 0,03 0 ,04 0,05 0,06

t [s]R [k

Ω]

f=100Hz; U(Piezo)=30-100V


38

40

42

44

46

48

0 0,1 0,2 0,3 0,4 0,5 0,6 0,7 0,8 0,9 1

t [s]

R [kΩ]

f=10Hz;U(Piezo)=30-100V

Z e i t t [ s ]

2 0

3 0

4 0

5 0

6 0

7 0

8 0

9 0

1 0 0

1 1 0

0 0 , 1 0 , 2 0 , 3 0 , 4 0 , 5 0 , 6 0 , 7 0 , 8 0 , 9 1

t [ s ]

U [V

]

Dynamische Messung mit F-DLC

Anregungs-frequenz:

1 KHz


Laser StructuringLaser StructuringLaser StructuringLaser Structuring


Temperatursensor mit Kupferkontakten.

Vollständiger Sensoraufbau mit angelöteten Messdrähten.

Laser Structuring Laser Structuring Laser Structuring Laser Structuring


Force Measurement directly in the Race Track of radial Ball Bearings

Messung am Hochlasttribometer an Kraftsensor E bei 200 N Belastung und 100 rpm Drehgeschwindigkeit;

Datum: 24.03.05

120650

120700

120750

120800

120850

120900

2 2,5 3 3,5 4 4,5 5

Zeit [s]

Widerstand [Ohm]


Thermal behavior of a ball bearing

516,80

516,90

517,00

517,10

517,20

517,30

517,40

0 100 200 300 400 500 600 700 800 900 1000

Zeit [s]

Widerstand [Ohm]

Start

Ende

Linearer Widerstandsanstieg

ω= 1000 rpm


Thermal behavior of DiaForce films

Thermal coefficient of resistivity:

20x10-3 1/°K - 5x10-3 1/°K

F F∂Diaforce Messung bei 120°C

0

10000

20000

30000

40000

50000

60000

70000

0 200 400 600 800 1000 1200

Kraft/N

Wid

erst

and/

Ohm

1,000

1,100

1,200

1,300

1,400

1,500

1,600

1,700

1,800

1,900

2,000

2,100

2,200

2,300

0 20 40 60 80 100 120 140 160 180 200 220

Kraft [N]

Wid

erst

and

[MΩΩ ΩΩ

]

1. Belastung

1. Entlastung

2. Belastung

2. Entlastung

3. Belastung

3. Entlastung

Compensation by measurement of resistivity at not loaded positions

20°C

120°C


1. Sensorschicht: d:~7,4 µm

Diaforce®

2. Strukturierte Elektrode: d: ~0,5 µm

Chrom/Gold

3. Isolator-/Verschleißschutzschicht:

d:~4,0 µm SiCON®

Force Force Force Force ---- and and and and TemperatursensoricTemperatursensoricTemperatursensoricTemperatursensoric forforforfor 3333----DDDD----ComponentsComponentsComponentsComponents


Determination of k-factor by means of lateral shift of Si-membran

K= ∆R x L / R x ∆L


Tellerfeder mit DiaForce Sensoren für Zug- und DruckbelastungMesssignal bei Schwingungsbeaufschlagung

(Amplitude 80 mµ) auf einer Tellerfeder


Multifunctional Thin Film SensorsMultifunctional Thin Film SensorsMultifunctional Thin Film SensorsMultifunctional Thin Film Sensors

•• Smart Surfaces: hard tribological coatings with integrated thin film sensors

direct control of mechanically treated surfaces novel steering possibilities of various machines first priorty parameters: load, temperature, wear

Documents

Bienroder Weg 54 E 38108 Braunschweig …tccc.iesl.forth.gr/visit27-3-06/German_pres/IST-FhG.pdf · Bienroder Weg 54 E 38108 Braunschweig ... HistoryHistoryof Fraunhofer IST of Fraunhofer