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7/30/2019 Bi ging k thut cm bin phn 7 : Cm tnh in v mt vi cm bin tim cn
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Bi ging
K Thut Cm Bin (sensors)
1
Hoang Si Hong
----2011----
Faculty of Electrical Eng., Hanoi Univ. of Science and Technology (HUST),
Hanoi, VietNam
Hoang Si Hong-HUST
6
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Ngun tham kho
Hoang Si Hong-HUST 2
Note: Bi ging mn hc ny c tham kho, trch dn v lc dch t cc ngun sau:
Sch
- K thut o lng cc i lng in tp 1, 2- Phm Thng Hn, Nguyn Trng Qu.
- Cc b cm bin trong o lng-L Vn Doanh
- Cc b cm bin-Nguyn Tng Ph
- o lng in v cc b cm bin: Ng.V.Ho v Hong S Hng- Sensor technology handbook (edited by JON WILSON)
- Elements of Electronic Instrumentation and Measurement (Prentice-Hall Company)
- Sch gii thch n v o lng hp php ca Vit Nam
Bi ging v website:
- Bi ging k thut cm bin-Hong S Hng-BKHN(2005)
- Bi ging Cm bin v k thut o:P.T.N.Yn, Ng.T.L.Hng BKHN (2010)
- Bi ging MEMs ITIMS BKHN
- Mt s bi ging v cm bin v o lng t cc trng i hc KT khc Vit Nam
- Website: sciendirect/sensors and actuators A and B
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Ni dung mn hc v mc ch
Hoang Si Hong-HUST 3
Ni dungChapter 1: Khi nim chung v Cm bin (2b) Chapter 2: Cm bin in tr (2b) Chng 3: Cm bin o nhit (2b) Chng 4: Cm bin quang (2b) v siu mChng 5: Cm bin tnh in (2b) v mt s cm bin tim cn Chng 6: Cm bin Hall v ho in Chng 7: Cm bin v PLC(1b)
Mc ch: nm c cu to, nguyn l hot ng v ng dng cacc loi cm bin thng dng trong cng nghip v i sng. Nmc xu th pht trin chung ca cng ngh cm bin trn th gii.
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Hoang Si Hong-HUST 4
Chng 5: Cm bin tnh in v tim cn
- Th ng haych ng ?- Khong cchpht hin ?
Ni dung Cm bin in dung v tim cn Cm bin p in
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Hoang Si Hong-HUST 5
V d v cm bin in dung o gia tc Tham kho bi ging ca vin vt l v ITIMS -BKHN (capacitive acceleration sensors)
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Hoang Si Hong-HUST 6
V d v cm bin in dung o gia tc
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Hoang Si Hong-HUST 7
V d v cm bin in dung o gia tc
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Hoang Si Hong-HUST 8
Mt s hng s in mi
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Hoang Si Hong-HUST 9
Cm bin in dung
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Hoang Si Hong-HUST 10
Cm bin p in
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Hoang Si Hong-HUST 11
Cm bin p in
Fig. 3.22. Piezoelectric sensor is formed by applying
electrodes to a poled crystalline material.
The magnitude of the piezoelectric effect in a simplified form can be represented
By the vector of polarization [4]:
P=Pxx +Pyy +Pzz, (3.64)
wherex, y, and z refer to a conventional ortogonal system related to the crystal axes.
In terms of axial stress, , we can write (6)
Pxx=d11xx +d12yy +d13zz,
Pyy=d21xx +d22yy +d23zz,
Pzz =d31xx +d32yy +d33zz, (3.65)
where constants dmn are the piezoelectric coefficients along the orthogonal axes of the
crystal cut. Dimensions of these coefficients are C/N (coulomb/newton) (i.e., charge
unit per unit force).
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Hoang Si Hong-HUST 12
Cm bin p in
The piezoelectric elements may be used as a single crystal or in a multilayer form where
several plates of the material are laminated together. This must be done with electrodes placedin between. Figure 3.24 shows a two-layer force sensor. When an external force is applied, the
upper part of the sensor expands while the bottom compresses. If the layers are laminated
correctly, this produces a double output signal. Double sensors can have either a parallel
connection as shown in Fig. 3.25Aor a serial connection as in Fig. 3.24C.The electrical
equivalent circuit of the piezoelectric sensor is a parallel connection of a stress-induced current
source (i), leakage resistance (r), and capacitance (C). Depending on the layer connection,equivalent circuits for the
(A) (B) (C) (D)
Fig. 3.24. Laminated two-layer piezoelectric sensor.
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Hoang Si Hong-HUST 13
Cm bin p in
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Hoang Si Hong-HUST 14
Cm bin p in thch anh nhiu thnhphn
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Hoang Si Hong-HUST 15
V d v hng tinh th
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Hoang Si Hong-HUST 16
Cm bin p in thch anh nhiu thnhphn
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Hoang Si Hong-HUST 17
Mch o
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Hoang Si Hong-HUST 18
Cm bin p in
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Hoang Si Hong-HUST 19
Cm bin p in-S khuych i in p
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Hoang Si Hong-HUST 20
S khuych i in tch
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Hoang Si Hong-HUST 21
S khuych i in tch
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Hoang Si Hong-HUST 22
Mt s ng dng ca cm bin phn tpin
Piezoelectric Force Sensors
SAW Sensors
Ultrasonic Sensors
(Piezoelectric microphone)
Piezoelectric Accelerometers
PIEZOELECTRIC SENSORS FOR DYNAMIC
PRESSURE
http://www.google.com.vn/url?sa=t&source=web&cd=14&ved=0CDIQFjADOAo&url=http%3A%2F%2Fwww.pcb.com%2FLinked_Documents%2FPressure%2FPFScat.pdf&rct=j&q=application%20of%20piezoelectric%20sensor&ei=WYSYTaGxDYf0cfTxkJ0H&usg=AFQjCNFO_jNIYNpwl7p0A_I7l0Cz3-Gd3g&cad=rjahttp://www.google.com.vn/url?sa=t&source=web&cd=14&ved=0CDIQFjADOAo&url=http%3A%2F%2Fwww.pcb.com%2FLinked_Documents%2FPressure%2FPFScat.pdf&rct=j&q=application%20of%20piezoelectric%20sensor&ei=WYSYTaGxDYf0cfTxkJ0H&usg=AFQjCNFO_jNIYNpwl7p0A_I7l0Cz3-Gd3g&cad=rjahttp://www.google.com.vn/url?sa=t&source=web&cd=14&ved=0CDIQFjADOAo&url=http%3A%2F%2Fwww.pcb.com%2FLinked_Documents%2FPressure%2FPFScat.pdf&rct=j&q=application%20of%20piezoelectric%20sensor&ei=WYSYTaGxDYf0cfTxkJ0H&usg=AFQjCNFO_jNIYNpwl7p0A_I7l0Cz3-Gd3g&cad=rjahttp://www.google.com.vn/url?sa=t&source=web&cd=14&ved=0CDIQFjADOAo&url=http%3A%2F%2Fwww.pcb.com%2FLinked_Documents%2FPressure%2FPFScat.pdf&rct=j&q=application%20of%20piezoelectric%20sensor&ei=WYSYTaGxDYf0cfTxkJ0H&usg=AFQjCNFO_jNIYNpwl7p0A_I7l0Cz3-Gd3g&cad=rja7/30/2019 Bi ging k thut cm bin phn 7 : Cm tnh in v mt vi cm bin tim cn
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Hoang Si Hong-HUST 23
Cm bin piezoelectric o lc
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Hoang Si Hong-HUST 24
Cm bin piezoelectric o lc
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Cm bin p in
Phn bi ging ng dng ca cm bin p in cho o gia tc_ph lc 1Phn bi ging ng dng ca cm bin p in cho o p sut_ph lc 2
Cn tip..